JP5842502B2 - Glass substrate transport method, glass substrate laminate forming method using the glass substrate transport method, glass substrate transport device, glass substrate laminate forming system having the glass substrate transport device, and further using the glass substrate transport method Manufacturing method of glass substrate for magnetic recording medium, and manufacturing method of glass substrate for magnetic recording medium using the glass substrate laminate forming method - Google Patents

Description

  The present invention provides a glass substrate transport method, a glass substrate laminate forming method using the glass substrate transport method, a glass substrate transport device, a glass substrate laminate forming system having the glass substrate transport device, and the glass substrate The present invention relates to a method for producing a glass substrate for a magnetic recording medium using a conveying method and a method for producing a glass substrate for a magnetic recording medium using the glass substrate laminate forming method.

  When manufacturing a glass substrate, processing, such as grinding and polishing, is performed on an end face or a main plane of the glass substrate so that the shape of the glass substrate satisfies a predetermined condition. In the process of producing a glass substrate, when the glass substrate is processed or pretreated, it is necessary to transport the glass substrate.

  Conventionally, as a method of transporting a glass substrate, for example, as disclosed in Patent Document 1, a method of transporting a glass substrate by directly contacting and adsorbing the glass substrate to a suction surface of a glass chuck that is a holder has been taken. .

JP 2010-238292 A

  As disclosed in Patent Document 1, when the holder is directly adsorbed to the main plane of the glass substrate and conveyed, the surface of the glass substrate in contact with the holder may be scratched, which is a problem. In particular, in applications where processing accuracy is required, it is not preferable that scratches occur on the surface of the glass substrate, and improvements have been demanded.

  Then, in view of the problem which the prior art has, this invention aims at providing the glass substrate conveyance method which is hard to produce a damage | wound in a glass substrate when conveying a glass substrate.

In order to solve the above-mentioned problems, the present invention performs positioning of the glass substrate and the spacer before simultaneously transporting the spacer and the glass substrate, and the glass substrate is held via the spacer by an adsorption jig or electrostatic treatment. A glass substrate transport method is provided in which the glass substrate and the spacer are held by a tool , and the glass substrate and the spacer are adsorbed by a liquid disposed between them or static electricity, and the spacer and the glass substrate are transported simultaneously.

  According to the present invention, when the glass substrate is transported, the spacer is disposed between the holder for holding the glass substrate and the glass substrate, and the glass substrate is held via the spacer. Can be suppressed.

Explanatory drawing of the aspect which hold | maintains a glass substrate with the holder in 1st Embodiment which concerns on this invention. Explanatory drawing of the glass substrate laminated body formation method in 2nd Embodiment which concerns on this invention. Explanatory drawing of the glass substrate conveying apparatus in 3rd Embodiment which concerns on this invention.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments, and the following embodiments are not departed from the scope of the present invention. Various modifications and substitutions can be made.

[First Embodiment]
In this embodiment, a glass substrate transport method in which a glass substrate is held by a holder via a spacer and the spacer and the glass substrate are transported simultaneously will be described.

  Here, first, the spacer and glass substrate used in the above method will be described.

  The shape of the spacer is not limited, and any spacer may be used as long as it has at least a portion to be held by a holder and can be disposed between the holder and the glass substrate when holding the glass substrate. For this reason, although it can select suitably according to the performance as a shock absorbing material, mass, the operational request | requirement in a manufacturing process, etc., when using a spacer in the process after conveying a glass substrate especially, it uses it at a subsequent process. It is preferable to use a spacer. This is because by using the spacer used in the process after transporting the glass substrate, it is possible to carry out the post-process as it is without arranging or replacing the spacer after transport, thereby reducing the number of processes. .

  For example, when a disk-shaped glass substrate for a magnetic recording medium is used as the glass substrate, it is preferable to use a disk-shaped spacer in accordance with the shape of the glass substrate. And if it is a spacer arrange | positioned when grind | polishing an outer peripheral end surface, it is preferable that the outer diameter of a spacer is smaller than the outer diameter of a glass substrate, and if it is a spacer arrange | positioned when grind | polishing an inner peripheral end surface, The inner diameter is preferably larger than the inner diameter of the glass substrate.

  The material of the spacer is not limited, and various materials such as a synthetic resin can be used. For example, it is preferable to use a film-like material such as polypropylene, polyethylene, or polyurethane. This is because these materials are lightweight, and a large load is not applied to the holder when the glass substrate and the spacer are transported at the same time, and a function as a cushioning material can be achieved.

  The surface roughness Ra (arithmetic mean roughness) of the spacer surface facing the glass substrate during transport is preferably 2.0 μm or less, and more preferably 1.7 μm or less. More preferably, it is 1.4 μm or less.

  This is because if the surface roughness of the spacer surface is larger than the above range, the positions of the glass substrate and the spacer are liable to shift during transportation.

  Moreover, it is preferable to adsorb | suck with the liquid arrange | positioned between them, static electricity, etc. between the glass substrate and a spacer at the time of conveyance, and it is especially preferable that the adsorption power is high. Therefore, both the glass substrate and the spacer are stably adsorbed, and the surface roughness of the spacer surface facing the glass substrate, that is, the surface of the spacer surface that comes into contact with the glass substrate during transportation is also increased in order to increase the adsorbing power. It is preferable that the above range is satisfied.

  And it is preferable that the thickness of a spacer is 0.5 mm or less. This is because if the spacer is thicker, the load on the holding tool becomes higher, and the equipment becomes larger, which is not preferable. In particular, as will be described later, when an adsorption jig or an electrostatic jig is used as a holder, it is preferable to have the above range because the adsorption force tends to decrease as the spacer becomes thicker.

  However, if the spacer is too thin, it will be difficult to perform the function as a cushioning material, and the surface of the glass substrate may be scratched. Therefore, the thickness is more preferably 0.05 mm or more and 0.5 mm or less. Particularly preferably, the thickness is 0.1 mm or more and 0.4 mm or less.

  Also about a glass substrate, it is not specifically limited, According to the glass substrate conveyance method of this invention, various glass substrates can be conveyed regardless of a shape. Among them, the glass substrate transport method of the present invention can be suitably used for glass substrates in which scratches are not preferred on the main plane, such as glass substrates for magnetic recording media.

  And it is preferable that surface roughness Ra of the surface (surface which touches) at the time of conveyance among the main planes of a glass substrate is 1.5 micrometers or less.

  This is because it is preferable that the glass substrate and the spacer are adsorbed at the time of conveyance. If the surface roughness of the main surface of the glass substrate is rough as in the case of the spacer, the adsorbing power of the both decreases, and it is easy to peel off. Because it becomes. In order to avoid such a situation, it is preferable that the surface roughness of the glass substrate main plane on the side held by the holder via the spacer when transporting satisfies the above range. Moreover, in order to make the adsorption power particularly high, the surface roughness Ra is more preferably 1.3 μm or less, and further preferably 1.0 μm or less.

  It is sufficient that the glass substrate and the spacer are in contact with each other at the time of transportation, but it is preferable that both of them are strongly adsorbed in order to prevent them from shifting or dropping at the time of transportation. In particular, the glass substrate and the spacer are preferably adsorbed by a liquid disposed between them or by static electricity.

  For example, when a liquid is arranged between the glass substrate and the spacer, both are adsorbed by the surface tension of the liquid. Similarly, when static electricity is provided, both are adsorbed due to the attraction of charges due to static electricity.

  Here, the liquid to be used is not particularly limited and is selected depending on the process after the conveyance, the reactivity with the glass substrate and the spacer, and the like.

  Specific examples of liquids include water, alcohol, oil, coolant, polishing liquid, etc. that do not react with glass substrates and spacers, but do not react with materials and equipment used in the process performed after transport It is preferable that it does not affect the performance. For example, when the polishing process is performed after conveyance, it is preferable not to use a liquid that affects the performance of the polishing liquid, and it is preferable to use, for example, water or a polishing liquid as the liquid. Further, among the liquids described above, it is particularly preferable to use water because it is possible to prevent the glass substrate surface from being dried and to prevent adhesion of dust and the like.

  Next, when static electricity is arranged between the glass substrate and the spacer, the method and degree of arranging (charging) the static electricity on the surface of the glass substrate are not particularly limited. For example, a voltage is applied to the surface of the glass substrate. After applying and charging, a spacer can be arranged and adsorbed. Further, an electrostatic jig can be used as a holder to hold the glass substrate and the spacer, and static electricity can be generated between the glass substrate and the spacer.

  Next, the holder used at the time of conveyance is demonstrated.

  The holding tool that holds the glass substrate via the spacer is not particularly limited, and any holding device that can hold the glass substrate via the spacer is sufficient. Specifically, an adsorption jig, an electrostatic jig, etc. are mentioned, for example.

  Here, the suction jig is used to suck and hold the object on the surface of the pad portion attached to the suction portion of the suction jig. For example, there is an apparatus that holds a target object on a pad portion by installing a suction jig on the surface of the target object and sucking the suction jig with a vacuum pump or the like.

  And an electrostatic jig hold | maintains a target object on the surface of a pad part with an electrostatic force. For example, it has a configuration in which a dielectric plate is attached to the electrode surface, and the chuck surface is charged by applying a voltage to the electrode to hold the object on the surface of the dielectric plate.

  Among the above-mentioned holders, it is particularly preferable that the holder is an adsorption jig because the holding (adsorption) and desorption processes can be easily performed.

Further, when the total value of the glass substrate mass and the spacer mass is m (kg) and the gravitational acceleration g (m / s ² ), the holding force F (N) of the holder satisfies F> mg. It is preferable.
This is to prevent the glass substrate and the spacer from dropping during transportation. In particular, the holding force F preferably satisfies F> 2 mg, and more preferably satisfies F> 10 mg. This is to prevent the glass substrate or the spacer from falling in such a case where a load exceeding the mass of the glass substrate or the like is applied to the holder due to the rotation of the device in the transport process.

  In addition, the holding force F here means an adsorption force in the case of an adsorption jig, for example.

  Here, an example in which the holder holds the glass substrate via the spacer is shown in FIGS. This is a cross-sectional view of a state in which the adsorption jig 12 holds a pair of glass substrates 10 and spacers 11 (a glass substrate-spacer pair).

  For example, as shown in (A), the adsorption jig can be arranged such that the spacer 11 is arranged on the upper surface side of the glass substrate 10 and can be adsorbed from the upper surface, and the spacer 11 is arranged on the lower surface side of the glass substrate 10 as shown in (B). It can also be placed and supported from below. Further, it is not necessary to hold the glass substrate 10 and the suction jig 12 horizontally as in (A) and (B), and for example, it is possible to hold in the vertical direction as in (C). Can be held in an inclined state.

  Although the example of the suction jig has been described here, the same applies to the case where an electrostatic jig is used as a holder, for example.

  As described above, the present invention is to hold and transport the spacer and the glass substrate simultaneously by the holder, and it is sufficient if the spacer is arranged between the holder and the glass substrate. It is preferable that the arrangement is appropriate. For this reason, it is preferable to have the positioning process which positions a glass substrate and a spacer, before conveying a glass substrate and a spacer simultaneously.

  This is because if the spacer is not in an appropriate position on the main plane of the glass substrate, the holder may not be able to hold the glass substrate over the spacer. Further, if the positions of the spacer and the glass substrate are deviated from the proper arrangement, the position of the center of gravity is deviated, and there is a possibility that the spacer and the glass substrate may fall during conveyance. Furthermore, in the process after conveying the glass substrate, the spacer may interfere with the operation and processing.

  For this reason, it is preferable to provide a positioning process before conveying a glass substrate and a spacer.

  The positioning method is not particularly limited as long as it can detect the positions of the glass substrate and the spacer and adjust the positions of both based on the detection signal. As the glass substrate and spacer position detecting means, various detectors such as an image pickup device (camera), visual observation, and the like are used. As a means for adjusting the position, a method of correcting the position of the spacer based on the detection signal when the spacer is transported and arranged, or after arranging the spacer on the glass substrate, the detection signal is used by various arms. For example, a method for correcting the position of the spacer may be used.

  According to the glass substrate transport method described above, the glass substrate can be transported without damaging the main plane of the glass substrate. Moreover, when using a spacer in the process after conveying a glass substrate, since it conveys in the state which laminated | stacked the spacer on the glass substrate, it becomes possible to reduce the process of laminating | stacking a glass substrate and a spacer.

  The glass substrate transport method of the present invention can be used when transporting various glass substrates, but can be particularly suitably applied to transport of glass substrates that are problematic when scratches occur on the glass substrate surface.

  An example of such a glass substrate is a glass substrate for a magnetic recording medium. In recent years, high processing accuracy is required for the glass substrate of a magnetic disk with an increase in recording density, and it is not preferable that even a fine scratch occurs during transportation.

  A glass substrate for a magnetic recording medium is formed by forming a disk-shaped glass substrate having a circular hole in the center from a glass substrate, a shape imparting step for chamfering the end surface portion, an end surface polishing step for polishing the end surface portion, glass It is manufactured by performing a main flat surface polishing step for polishing the main flat surface of the substrate, a glass substrate cleaning step, and the like. The glass substrate transport method described in the present embodiment can be employed in any step of the above-described method for producing a glass substrate for a magnetic recording medium.

By applying the glass substrate transporting process using the glass substrate transporting method described in this embodiment to the method for manufacturing a glass substrate for a magnetic recording medium having the above-described end surface polishing process, main surface polishing process, and cleaning process, In particular, scratches are less likely to occur in the main plane portion, and a higher quality glass substrate can be provided.
[Second Embodiment]
In the present embodiment, the glass substrate laminate forming method, wherein the glass substrate laminate is formed by simultaneously conveying the spacer and the glass substrate using the glass substrate carrying method described in the first embodiment. Will be described.

  Here, a description will be given using an example in which a glass substrate for a magnetic recording medium is used as a glass substrate and a disk-shaped spacer having a circular hole in the center is used.

  The glass substrate laminate forming method will be described with reference to FIG. Here, although an example using a suction jig will be described as the holder, the invention is not limited to this example, and various holders described in the first embodiment can be used.

  The glass substrates are set in, for example, a glass substrate cassette 21 so as not to contact each other.

  Then, as a first step represented by (a) in FIG. 2, the glass substrate 22 is taken out from the glass substrate cassette 21 to a predetermined place and set.

  Next, as a second step represented by (b) in FIG. 2, the liquid 24 is supplied from the liquid supply means 23 to the surface of the glass substrate in order to adsorb the glass substrate and the spacer. At this time, the amount and range of the liquid to be dropped are not particularly limited, and it is preferable to supply and drop uniformly so that the glass substrate and the spacer can be adsorbed.

  For example, when an electrostatic jig is used as a holder, it is not necessary to perform the second step. The implementation of this second step can be determined according to the type of the holder. As the liquid used in the second step, various liquids can be used as described in the first embodiment, but water is particularly preferable.

  In a third step represented by (c) in FIG. 2, a spacer 25 is disposed on the surface of the glass substrate on which the liquid has been dropped to form a glass substrate-spacer pair.

  In this process, in order to bring the glass substrate and the spacer into close contact with each other, a process such as pressing the glass substrate and the spacer may be performed after the spacer is arranged.

  Moreover, it is preferable to perform the positioning process which adjusts the position of a spacer by a 3rd process or a 4th process so that a spacer and a glass substrate may become predetermined | prescribed arrangement | positioning. By having the positioning step, the glass substrate can be processed with high accuracy when processing such as end face polishing is performed after the glass substrate laminate is formed. Further, the glass substrate-spacer pair can be transported in a stable state.

  In the fourth step represented by (d) in FIG. 2, the glass substrate-spacer pair created in the third step is held by a holder, conveyed to the stacking jig 26 and placed. In addition, when the glass substrate laminated body is formed in the lamination jig | tool 26, a glass substrate-spacer pair is laminated | stacked on a glass substrate laminated body. Here, although not shown about a holder, the various holders demonstrated in 1st Embodiment can be used, and it is preferable to use especially a suction jig.

  The lamination jig 26 is not particularly limited as long as it can hold the glass substrate laminate. For example, the glass substrate may be laminated using a centering shaft that supports the inner peripheral end surface portion through the circular hole of the glass substrate for a magnetic recording medium as shown in FIG. Moreover, you may laminate | stack a glass substrate using the holder holding the outer peripheral end surface part of a glass substrate.

  Moreover, it is preferable that the stacking jig 26 has a mechanism capable of detecting, adjusting, and controlling the position of the glass substrate-spacer pair so that the glass substrate-spacer pair is placed at an appropriate place.

  Such a mechanism is not particularly limited, but examples of the means for detecting the position include an imaging device such as a camera and a position detector using infrared rays. And according to the signal from a detector, the place which a glass substrate-spacer pair conveyance mechanism mounts a glass substrate-spacer pair is adjusted and controlled.

  The glass substrate laminate 27 can be formed by repeating the first to fourth steps.

  In the method for forming a glass substrate laminate using the transport method of the present invention, since the glass substrate and the spacer can be transported in a paired state at the time of transport, the glass substrate and the spacer are transported separately, A glass substrate laminate can be formed more efficiently than the conventional method of laminating. Moreover, it is suppressed that a damage | wound generate | occur | produces on the surface of a glass substrate at the time of conveyance of a glass substrate, and can provide a high quality glass substrate and a glass substrate laminated body.

  As mentioned above, although this Embodiment has demonstrated the glass substrate laminated body formation method, it has a glass substrate laminated body formation process using the glass substrate laminated body formation method, an end surface grinding | polishing process, a main plane grinding | polishing process, and a washing | cleaning process. It can be set as the manufacturing method of the glass substrate for magnetic recording media.

  Here, a method for producing a glass substrate for a magnetic recording medium and a magnetic disk will be described.

First, the glass substrate for magnetic recording media can be manufactured by a manufacturing method including the following steps.
(Step 1) A shape imparting step of chamfering the inner peripheral end surface and the outer peripheral end surface after processing the glass base substrate into a disk-shaped glass substrate having a circular hole in the center.
(Step 2) An end surface polishing step for polishing the end surfaces (the inner peripheral end surface and the outer peripheral end surface) of the glass substrate.
(Step 3) A main flat surface polishing step for polishing the main flat surface of the glass substrate.
(Step 4) Washing step of precisely washing and drying the glass substrate And the glass substrate for a magnetic recording medium obtained by the manufacturing method including the above steps further includes a step of forming a thin film such as a magnetic layer on the glass substrate. By doing so, a magnetic disk can be obtained.

  Here, the shape imparting step of (Step 1) includes a glass substrate having a circular shape in the center, and a glass substrate formed by a float method, a fusion method, a press forming method, a down draw method or a redraw method. To be processed. The glass substrate used may be amorphous glass, crystallized glass, or tempered glass having a tempered layer on the surface of the glass substrate.

  And the end surface grinding | polishing process of (process 2) end-polishes the end surface (a side surface part and a chamfering part) of a glass substrate.

  The end surface polishing step is performed in order to remove scratches and irregularities on the outer peripheral surface and / or the inner peripheral side surface portion and chamfered portion of the glass substrate for a magnetic recording medium and finish it to a smooth mirror surface. By finishing the side surface and chamfered portion of the glass substrate into a smooth mirror surface, the mechanical strength of the glass substrate is improved. In addition, the number of foreign substances trapped by the irregularities on the side surfaces and end surfaces is reduced, and when used as a magnetic recording medium, particles generated by the irregularities on the side surfaces and end surfaces are scraped off the resin member of the cassette. To do.

  When polishing the outer peripheral end face and the inner peripheral end face of the glass substrate for magnetic recording medium, usually, a plurality of glass substrates are overlapped in the radial direction to form a glass substrate laminate, and the glass substrate laminate is It is mounted on an end surface polishing apparatus, and end surface polishing is performed using a polishing brush or a polishing pad and a polishing liquid.

  At this time, for example, a spacer may be inserted between adjacent glass substrates. By inserting the spacer, the brush hair and the polishing liquid can easily reach the boundary portion between the main surface and the chamfered portion, so that the outer peripheral end surface and the inner peripheral end surface can be more uniformly polished. Moreover, the damage to the main surface of a glass substrate can be prevented.

  About the main plane polishing step of (Step 3), the upper and lower main planes of the glass substrate are simultaneously polished using a polishing apparatus while supplying a polishing liquid to the main plane of the glass substrate. The polishing step may be primary polishing only, primary polishing and secondary polishing may be performed, or tertiary polishing may be performed after secondary polishing.

  At least one of the above-described (Step 2) before and after the end face polishing step may be performed with a main plane lapping (for example, loose abrasive lapping, fixed abrasive lapping, etc.). In addition, glass substrate cleaning (inter-process cleaning) and glass substrate surface etching (inter-process etching) may be performed between the processes. The main plane lapping is polishing of the main plane in a broad sense.

  Furthermore, when high mechanical strength is required for the glass substrate for magnetic recording media, a strengthening step (for example, a chemical strengthening step) for forming a reinforcing layer on the surface layer of the glass substrate is performed before the polishing step, after the polishing step, or the polishing step. You may carry out between.

  In the manufacturing method of the glass substrate for magnetic recording media and the magnetic disk described above, the main plane is damaged when the glass substrate is transported by using the glass substrate laminate forming method of the present embodiment. Since it is difficult, a high quality glass substrate for magnetic recording media can be manufactured.

  In the method for manufacturing the glass substrate for magnetic recording medium and the magnetic disk, the timing for carrying out the glass substrate laminate forming method of the present embodiment is not limited, and is performed before the step that needs to be a laminate. be able to. For example, it can be performed before the end surface polishing step to polish the end surface of the glass substrate laminate.

In this embodiment, the glass substrate for a magnetic recording medium has been described as an example of the glass substrate. However, the type of the glass substrate is not limited to this, and any glass substrate can be applied. it can. Examples of the glass substrate that can be preferably applied include glass substrates for magnetic recording media, photomasks, displays such as liquid crystal and organic EL, and optical components such as optical pickup elements and optical filters.
[Third Embodiment]
In this embodiment, a glass substrate transfer device will be described.

  The glass substrate transport apparatus in the present embodiment is a glass substrate transport apparatus that transports the spacer and the glass substrate simultaneously using the glass substrate transport method described in the first embodiment, and has the following members. Features.

Glass substrate placement portion on which a glass substrate is placed Spacer placement portion on which a spacer is placed Glass substrate-spacer pair forming portion on which a spacer is placed on the surface of the glass substrate A glass substrate is placed from the glass substrate placement portion Glass substrate transport mechanism for transporting the glass substrate to the spacer pair forming portion Spacer transport mechanism for transporting the spacer from the spacer mounting portion to the glass substrate-spacer pair forming portion Glass substrate-Glass substrate formed by the spacer pair forming portion Glass substrate-spacer pair transport mechanism for transporting a spacer pair The glass substrate transport apparatus will be described with reference to FIG.

  The glass substrate transport apparatus 30 shown in FIG. 3 includes a glass substrate placement unit 31 on which a glass substrate 321 is placed. In FIG. 3, the glass substrate placement unit 31 is shown in which the glass substrate is held in the glass substrate cassette 21, but is not limited to such a form so that the glass substrate is not damaged. It is sufficient if it is placed.

  Then, the glass substrate is taken out from the glass substrate mounting portion 31 by the glass substrate transport mechanism 32.

  Next, the glass substrate 321 installed on the glass substrate transport mechanism 32 is supplied with the liquid 324 from the liquid supply unit 323 on the surface thereof in the next liquid supply process unit 322. Note that, as described in the second embodiment, this step is not essential and can be appropriately provided depending on the type of the holder.

  Then, the glass substrate is transported to the glass substrate-spacer forming unit 325, and the spacer is disposed on the surface of the glass substrate by the spacer transport mechanism 327 from the spacer placing unit 326. The spacer transport mechanism is not particularly limited as long as the spacer can be transported from the spacer mounting portion 326 to a predetermined position on the glass substrate. For example, the thing provided with various holders similarly to the glass substrate conveying apparatus mentioned later can be used.

  In addition, you may provide the positioning process for aligning the position of a glass substrate and a spacer before conveying a spacer on a glass substrate, or after conveyance. For example, it is preferable to install an imaging device such as a camera on the glass substrate-spacer forming unit, confirm the positions of the glass substrate and the spacer, and adjust the positions of the glass substrate and the spacer by the spacer transport mechanism 327. . Moreover, you may have a spacer position adjustment mechanism which adjusts the position of a glass substrate and a spacer separately.

  Then, the glass substrate-spacer pair 328 obtained by the above steps is transported to a predetermined position by the glass substrate-spacer pair transport mechanism 329.

  The glass substrate-spacer pair transport mechanism uses the glass substrate transport method described in the first embodiment, holds the glass substrate with a holder through the spacer, and transports the spacer and the glass substrate at the same time. Mechanism.

  According to the glass substrate transport apparatus described above, a spacer is disposed on the glass substrate, and the glass substrate-spacer pair is held and transported by the holder via the spacer. Can be suppressed.

  Here, in addition to the glass substrate transport device described above, a glass substrate laminate forming system may be provided by providing a glass substrate laminate forming portion in the vicinity.

  This is a glass substrate laminate forming system in which a glass substrate laminate is formed by laminating glass substrate-spacer pairs conveyed using the glass substrate conveyer in a glass substrate laminate forming section.

  Here, as a configuration of the glass substrate laminate forming portion, for example, in the case where the glass substrate is a glass substrate for a magnetic recording medium having a circular hole at the center, the cylindrical centering shaft described in the second embodiment is used. Can be used. Moreover, it can also be set as the structure which hold | maintains the outer peripheral end surface side of a glass substrate and forms a laminated body.

  When the glass substrate-spacer pair transport mechanism 329 places the glass substrate-spacer pair on the glass substrate laminate forming portion, a mechanism for adjusting and controlling the position of the glass substrate-spacer pair transport mechanism 329 and the glass substrate-spacer pair transport mechanism 329 and It is preferable to be provided in the glass substrate laminate forming part.

  This is because, when processing or the like is performed on the formed glass substrate laminate, the processing accuracy may decrease if the positions of the glass substrate and the spacer constituting the glass substrate laminate are shifted.

  The mechanism for adjusting the positions of the glass substrate and the spacer is not particularly limited, and various mechanisms can be employed. For example, a detector such as a camera capable of detecting the position of the glass substrate-spacer pair is installed above the glass substrate laminate forming portion, and the glass substrate-spacer pair transport mechanism 329 is placed at a predetermined location based on the signal. A mechanism for adjusting and controlling this so that it can be conveyed and placed can be considered.

By combining such a glass substrate laminate forming unit and the glass substrate transport apparatus described in the present embodiment, a glass substrate laminate forming system can be obtained. According to such a system, since the glass substrate and the spacer are transported together, it is not necessary to transport the spacer separately when forming the glass substrate stack, and the glass substrate stack can be formed efficiently. Moreover, since it suppresses that a damage | wound arises on the surface of a glass substrate at the time of glass substrate conveyance, a higher quality glass substrate and a glass substrate laminated body can be provided.

10, 22, 321 Glass substrate 11, 25 Spacer 12 Suction jig 24, 324 Liquid 27 Glass substrate laminate 30 Glass substrate transport device 31 Glass substrate mounting portion 32 Glass substrate transport mechanism 326 Spacer mounting portion 325 Glass substrate-spacer Pair forming unit 327 Spacer transport mechanism 329 Glass substrate-spacer pair transport mechanism

Claims (9)

Spacer and said glass substrate prior to conveying the glass substrate are simultaneously subjected to positioning of the spacer, and held by suction jig or electrostatic jig is holder glass substrate via spacer, said and said glass substrate A glass substrate transport method in which a spacer is adsorbed by a liquid disposed between them or by static electricity and transports the spacer and the glass substrate simultaneously. The surface roughness Ra of the spacer surface is at 2.0μm or less, the glass substrate transfer method according to claim 1, wherein the thickness of the spacer is 0.5mm or less opposed to the glass substrate. The glass substrate carrying method according to claim 1 or 2 , wherein the surface roughness Ra of the main plane of the glass substrate facing the spacer is 1.5 µm or less. When the total value of the mass of the glass substrate and the mass of the spacer is m (kg) and the gravitational acceleration g (m / s ² ),
The glass substrate carrying method according to any one of claims 1 to 3, wherein the holding force F (N) of the holder satisfies F> mg. A glass substrate laminate forming method, wherein the glass substrate laminate is formed by simultaneously conveying the spacer and the glass substrate using the glass substrate carrying method according to any one of claims 1 to 4 . A glass substrate transfer device for transferring simultaneously the glass substrate and the spacer by using a glass substrate transfer method according to any one of claims 1 to 4,
A glass substrate mounting portion on which the glass substrate is mounted;
A spacer placement portion on which the spacer is placed;
A glass substrate-spacer pair forming portion for disposing the spacer on the surface of the glass substrate;
A glass substrate transport mechanism for transporting the glass substrate from the glass substrate placement unit to the glass substrate-spacer pair forming unit;
A spacer transport mechanism for transporting the spacer from the spacer placement section to the glass substrate-spacer pair forming section;
A glass substrate-spacer pair transport mechanism for transporting the glass substrate-spacer pair formed in the glass substrate-spacer pair forming section;
A glass substrate transport apparatus comprising: A glass substrate laminate forming system for forming a glass substrate laminate by laminating the glass substrate-spacer pairs conveyed using the glass substrate conveyer according to claim 6 ,
A glass substrate laminate forming system comprising a glass substrate laminate forming portion. An end surface polishing step for polishing the end surface of the glass substrate;
A main surface polishing step for polishing the main surface of the glass substrate;
A glass substrate cleaning process;
A method for producing a glass substrate for a magnetic recording medium, comprising:
Method of manufacturing a glass substrate for a magnetic recording medium characterized by having a glass substrate transfer process using the glass substrate transfer method according to any one of claims 1 to 4. An end surface polishing step for polishing the end surface of the glass substrate;
A main surface polishing step for polishing the main surface of the glass substrate;
A glass substrate cleaning process;
A method for producing a glass substrate for a magnetic recording medium, comprising:
A method for producing a glass substrate for a magnetic recording medium, comprising the step of forming a glass substrate laminate using the method for forming a glass substrate laminate according to claim 5 .

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