CN103010742B - Carrying glass sheet method and glass substrate laminate forming method - Google Patents
Carrying glass sheet method and glass substrate laminate forming method Download PDFInfo
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- CN103010742B CN103010742B CN201210356975.9A CN201210356975A CN103010742B CN 103010742 B CN103010742 B CN 103010742B CN 201210356975 A CN201210356975 A CN 201210356975A CN 103010742 B CN103010742 B CN 103010742B
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Abstract
It is an object of the invention to provide a kind of carrying glass sheet method and glass substrate laminate forming method being difficult to produce scar at glass substrate when moving glass substrate.Provide and by keeper holding glass substrate across pad and carry pad and the carrying glass sheet method of glass substrate simultaneously and employ the glass substrate laminate forming method of this carrying glass sheet method, glass base plate transport device, the glass substrate laminate with described glass base plate transport device forms system, and employ the manufacture method of the glass base plate for magnetic recording carrier of described carrying glass sheet method, employ the manufacture method of the glass base plate for magnetic recording carrier of described glass substrate laminate forming method.
Description
Technical field
The present invention relates to carrying glass sheet method and employ the glass substrate laminate forming method of this carrying glass sheet method, glass base plate transport device, have the glass substrate laminate of described glass base plate transport device formed system and employ described carrying glass sheet method glass base plate for magnetic recording carrier manufacture method, employ the manufacture method of the glass base plate for magnetic recording carrier of described glass substrate laminate forming method.
Background technology
When manufacturing glass substrate, end face or principal plane at glass substrate carry out the processing such as grinding, grinding, so that the shape of glass substrate meets the condition of regulation.In the operation manufacturing glass substrate, need glass substrate being processed or moving glass substrate during pre-treatment.
In the past, as the method for moving glass substrate, the method such as disclosed in patent documentation 1 was used, i.e. make glass substrate directly contact and be adsorbed in the adsorption plane of the glass chuck as keeper and carry.
Patent documentation 1: Japanese Laid-Open 2010-238292 publication
As disclosed in Patent Document 1, when making keeper directly be adsorbed in the principal plane of glass substrate and to carry, there is the problem producing scar sometimes on the surface of the glass substrate contacted with keeper.Particularly in the purposes requiring machining accuracy, it is undesirable to produce scar on the surface of glass substrate, seek to obtain it and improve.
Summary of the invention
Therefore, problem that the present invention exists in view of prior art and propose, its object is to provide a kind of carrying glass sheet method being difficult to produce scar at glass substrate when moving glass substrate.
In order to solve above-mentioned problem, the present invention provides a kind of carrying glass sheet method, it carries out described glass substrate and the location of described pad before carrying pad and glass substrate at the same time, across pad by keeping glass substrate as the adsorption tool of keeper or electrostatic instrument, described glass substrate and described pad, and carrying pad and glass substrate simultaneously is adsorbed by being configured at the liquid between described glass substrate and described pad or electrostatic.
Invention effect
According to the present invention, when moving glass substrate, between keeper and the glass substrate keeping glass substrate, configure pad, keep glass substrate across pad, therefore can suppress to produce on the surface of glass substrate scar.
Accompanying drawing explanation
Fig. 1 is the explanatory diagram by the way of the keeper in the first embodiment involved in the present invention keeps glass substrate.
Fig. 2 is the explanatory diagram of the glass substrate laminate forming method in the second embodiment involved in the present invention.
Fig. 3 is the explanatory diagram of the glass base plate transport device in the 3rd embodiment involved in the present invention.
Label declaration
10,22,321 glass substrate
11,25 pad
12 adsorption tools
24,324 liquid
27 glass substrate laminates
30 glass base plate transport devices
31 glass substrate mounting portions
32 carrying glass sheet mechanisms
326 pad mounting portions
325 glass substrates-pad is to forming portion
327 pad carrying mechanisms
329 glass substrates-pad is to carrying mechanism
Detailed description of the invention
Below, referring to the drawings the mode being used for implementing the present invention is illustrated, but the invention is not restricted to following embodiment, various deformation and replacement can be given to following embodiment without departing from the scope of the present invention.
[the first embodiment]
In the present embodiment, following carrying glass sheet method is illustrated, i.e. keep glass substrate, and carrying pad and glass substrate simultaneously across pad by keeper.
Here, first the pad used in the above-mentioned methods, glass substrate are illustrated.
Shape for pad does not limit, and carries out, by keeper, the part that keeps as long as at least having and can be configured between keeper and glass substrate when keeping glass substrate.Therefore, it can suitably select according to as the operational requirement etc. in the performance of padded coaming, quality, manufacturing process, when particularly the operation after moving glass substrate using pad, the pad that use is preferably used in operation behind.This is because, by using the pad used in operation after moving glass substrate, it is not necessary to configure pad after carrying, exchange etc., operation after can directly implementing, such that it is able to reduce process number.
Such as, when using the glass base plate for magnetic recording carrier of disc-shape as glass substrate, preferably consistent with the shape of glass substrate and use the pad of disc-shape.And, if the pad of configuration when grinding peripheral end face, then the external diameter of preferred pad is less than the external diameter of glass substrate, if the pad of configuration when grinding inner circumferential end face, then the internal diameter of preferred pad is bigger than the internal diameter of glass substrate.
The material of pad does not limit, it is possible to use the various material such as synthetic resin, but the film-like material such as polypropylene, polyethylene, polyurethanes is such as preferably used.Because these materials are light, keeper will not be applied big load when moving glass substrate and pad at the same time, furthermore, it is possible to realize the function as padded coaming.
The surface roughness Ra (arithmetic average roughness) of the gasket surface relative with glass substrate when carrying is preferably below 2.0 μm, below more preferably 1.7 μm.More preferably below 1.4 μm.
This is because, when the surface roughness of gasket surface is bigger than above-mentioned scope, when carrying, the position of glass substrate and pad easily misplaces.
And, as it is explained in detail hereinafter, when carrying, preferably adsorbed by the liquid being configured between them or electrostatic etc. between glass substrate and pad, particularly preferably this absorption affinity is higher.Therefore, this absorption affinity is improved, it is also preferred that the surface roughness in the face contacted with glass substrate when carrying in the gasket surface i.e. gasket surface relative with glass substrate meets above-mentioned scope to make glass substrate and the stable absorption of pad.
And, the thickness of pad is preferably below 0.5mm.This is because, when pad is thickening, improve owing to putting on the load of keeper, therefore equipment increases, so the most preferably.It addition, especially as it is explained in detail hereinafter, when using adsorption tool, electrostatic instrument as keeper, absorption affinity is easily reduced when pad is thickening, the most preferably there is above-mentioned scope.
But, when pad is crossed thin, it is difficult to realize the function as padded coaming, it is possible to can produce scar on the surface of glass substrate, therefore, its thickness is more preferably more than 0.05mm and below 0.5mm, particularly preferably more than 0.1mm and below 0.4mm.
Glass substrate is also not particularly limited, according to the carrying glass sheet method of the present invention, regardless of shape etc., various glass substrate can be carried.Wherein, for being not intended to produce the glass substrate of scar, such as glass base plate for magnetic recording carrier etc. at principal plane, the carrying glass sheet method of the present invention can suitably be used.
And, the surface roughness Ra in the face (face that contact) relative with pad when carrying in the principal plane of glass substrate is preferably below 1.5 μm.
This is because, preferred glass substrate and pad absorption when carrying, if but and the surface roughness of the principal plane of glass substrate identical with the situation of pad is relatively big, then both absorption affinities reduce, and are easily peeled off.In order to avoid this situation, preferably meet above-mentioned scope by keeper across the surface roughness of the glass substrate principal plane of the side that pad keeps when carrying.It addition, especially for improving this absorption affinity, above-mentioned surface roughness Ra is more preferably below 1.3 μm, more preferably below 1.0 μm.
As long as glass substrate and pad contact when carrying, but in order to misplace both preventing when carrying or fall, preferably both adsorb strongly.Particularly preferably glass substrate and pad is adsorbed by liquid or the electrostatic being configured between them.
So, such as when being configured with liquid between glass substrate and pad, the surface tension of liquid is utilized to make both adsorb.It addition, when being configured with electrostatic, utilize the captivation of the electric charge produced by electrostatic to make both adsorb similarly.
Here, as the liquid used, select according to the reactivity etc. of the operation after carrying with glass substrate, pad, be not particularly limited.
If enumerating concrete example as liquid, then can use do not carry out with glass substrate, pad reacting water, ethanol, oil, coolant, lapping liquid etc., but the most not with the operation carried out after carrying used in material, the mechanical material liquid that reacts and performance is not impacted.Such as, when carrying out grinding step after carrying, the most do not use the liquid that the performance to lapping liquid impacts, as liquid, such as water or lapping liquid are preferably used.It addition, in aforesaid liquid, from the standpoint of adhering to dust etc. from being dried of glass baseplate surface and preventing can be prevented, the most particularly preferably use water.
Secondly, when configuring electrostatic between glass substrate and pad, about the method for the surface configuration electrostatic (charged) at glass substrate, degree is not particularly limited, such as, it can also be made to adsorb the surface of glass substrate is applied configuration pad after voltage makes it charged.It addition, as keeper can also use electrostatic instrument to keep glass substrate and pad, and make simultaneously between glass substrate and pad produce electrostatic.
Then, the keeper used when carrying is illustrated.
For keeping the keeper of glass substrate to be not particularly limited across pad, as long as glass substrate can be kept across pad.Specifically, such as adsorption tool, electrostatic instrument etc. can be enumerated.
Here, adsorption tool refers to be adsorbed by object and be held in the instrument on the surface of the cushion part attached in the adsorption section of adsorption tool.Such as can enumerate following device, i.e. at the surface configuration adsorption tool of object, by object being held in cushion part in attracting adsorption tool with vacuum pump etc..
And, electrostatic instrument refers to by electrostatic force at the instrument of the surface holding object of cushion part.Such as, there is the instrument of structure being pasted with dielectric plate at electrode surface, make chuck surface charged by applying voltage to electrode, thus in dielectric plate surface holding object.
Owing to above-mentioned keeper the most easily carrying out keep (absorption), depart from operation, so particularly preferably keeper is as adsorption tool.
It addition, the aggregate value of the quality of the quality of glass substrate and pad is being set to m (kg), acceleration of gravity is being set to g (m/s2) time, the retentivity F (N) of the most above-mentioned keeper meets F ＞ mg.This is in order to when preventing from carrying, glass substrate or pad fall.In particular it is preferred that retentivity F meets F ＞ 2mg, more preferably meet F ＞ 10mg.This is because, in carrying operation, sometimes due to the rotations of machine etc. can apply the load of more than the quality of glass substrate etc. to keeper, even and if in this case, glass substrate or pad do not fall out yet.
It addition, retentivity F described herein, as long as such as adsorption tool refers to absorption affinity.
Here, Fig. 1 (A)～(C) illustrate that keeper keeps the example of glass substrate across pad.This is the sectional view that adsorption tool 12 keeps the state of the duplexer (glass substrate-pad to) of one group of glass substrate 10 and pad 11.
Adsorption tool such as can as shown in (A) on the glass substrate 10 face side configuration pad 11 and from upper surface adsorb, it is also possible to as shown in (B) glass substrate 10 lower face side configuration pad 11 and from lower surface support.It addition, without flatly keeping glass substrate 10, adsorption tool 12 as shown in (A), (B), it is also possible to such as (C) vertically keeps like that, it is also possible to keep with the state that glass substrate tilts.
Although it addition, be illustrated with the example of adsorption tool at this, but the most identical when such as electrostatic instrument being used as keeper.
So, the present invention keeps simultaneously and carries pad, glass substrate by keeper, as long as configuring pad between keeper and glass substrate, but preferably makes glass substrate and pad become suitable configuration when carrying.Therefore, at the same time before moving glass substrate and pad, preferably there is the positioning process positioning glass substrate and pad.
This is because, when pad is not located in position on the principal plane of glass substrate, it is possible to glass substrate can not be kept by keeper across pad.If it addition, the configuration that the position deviation of pad and glass substrate is suitable, then position of centre of gravity deviation, it is possible to fall when carrying.And, in the operation after moving glass substrate, pad is also possible to impact operation or processing.
It is therefore preferable that arranged positioning process before moving glass substrate and pad.
It is not particularly limited as localization method, as long as glass substrate and the position of pad can be detected and adjusts both positions based on this detection signal.As glass substrate and the position detection unit of pad, it is possible to use various detectors or range estimations etc. such as video cameras (camera).Additionally, the method of position based on above-mentioned detection signal correction pad when can be set forth in carrying, configuration pad as the method adjusting position, or after by pad deployment on glass substrate, the method etc. of the position of the correction shims such as various arms is utilized according to above-mentioned detection signal.
Carrying glass sheet method from the description above, it is possible to do not damage the principal plane of glass substrate and moving glass substrate.During it addition, operation after moving glass substrate uses pad, pad is carried with the state being laminated in glass substrate, therefore can omit the operation of laminated glass substrate and pad.
And, the carrying glass sheet method of the present invention can use when carrying various glass substrate, but the particularly suitable carrying being applicable to there will be the glass substrate of problem when at glass baseplate surface part generation scar.
The glass substrate of such as magnetic recording media can be enumerated as such glass substrate.In recent years, in disk, along with the raising of packing density, its glass substrate is required higher machining accuracy, even the scar fine when carrying is also not intended to produce.
Glass base plate for magnetic recording carrier is fabricated by by carrying out following operation, it may be assumed that is formed at center from glass element substrate and has the glass substrate of round-meshed disc-shape, and the shape that end face part carries out chamfer machining gives operation；Carry out the end surface grinding operation of the grinding of end face part；The principal plane grinding step of the principal plane of grinding glass substrate；And clean the matting etc. of glass substrate.The carrying glass sheet method illustrated in the present embodiment can use in the arbitrary operation in the manufacture method of above-mentioned glass base plate for magnetic recording carrier.
By the carrying glass sheet operation by employing the carrying glass sheet method illustrated in the present embodiment be applicable to the manufacture method of the glass base plate for magnetic recording carrier with above-mentioned end surface grinding operation, principal plane grinding step, matting, the most than ever, particularly it is difficult to produce scar at main planar portion, it is provided that the glass substrate of higher quality.
[the second embodiment]
In present embodiment, the glass substrate laminate forming method with following feature is illustrated, i.e. use the carrying glass sheet method of explanation in the first embodiment, simultaneously carrying pad and glass substrate, form glass substrate laminate.
Here, by using glass base plate for magnetic recording carrier as glass substrate and using the example of the pad at the central part round-meshed disc-shape of tool to illustrate.
For glass substrate laminate forming method, Fig. 2 is used to illustrate.It addition, here, by using the example of adsorption tool to illustrate as keeper, but it is not limited to this example, it is possible to use the various keepers illustrated in the first embodiment.
Glass substrate is positioned in such as glass substrate box 21 to avoid contacting with each other.
Then, the first operation represented as (a) in Fig. 2, from glass substrate box 21 glass substrate 22 taken out and be positioned over assigned position.
Then, the second operation represented as (b) in Fig. 2, in order to make glass substrate and pad absorption, from fluid supply unit 23 to the surface of glass substrate for liquid 24.Now, amount, scope for dripping are not particularly limited, and the degree preferably can adsorbed with glass substrate and pad is supplied uniformly across, dropping liquid.
It addition, when such as using electrostatic instrument as keeper, it is not necessary to carry out this second operation.According to the kind of keeper, this second operation can determine that it is implemented.It addition, for the liquid used in the second operation, as illustrated by the first embodiment, it is possible to use various liquid, but particularly preferably use water.
In the 3rd operation that (c) represents in fig. 2, at the surface configuration pad 25 of the glass substrate of the aforesaid liquid that dripped, form glass substrate-pad pair.
In this operation, in order to make glass substrate and pad be adjacent to, it is also possible to carry out together pressing the operation such as glass substrate and pad after configuration pad.
Additionally, it is preferred that be adjusted the positioning process of the position of pad in the 3rd operation or the 4th operation, so that pad and glass substrate become the configuration of regulation.By having positioning process, after forming glass substrate laminate, carry out end surface grinding etc. add man-hour, glass substrate can be processed accurately.Alternatively, it is also possible to by glass substrate-pad to stable state carrying.
In the 4th operation that (d) represents in fig. 2, it is maintained at, by keeper, glass substrate-pad pair that the 3rd operation is formed, is carried and be placed in laminating tool 26.It addition, when being formed with glass substrate laminate on laminating tool 26, laminated glass substrate-pad pair on glass substrate laminate.Here, not shown for keeper, but the various keepers illustrated in the first embodiment can be used, particularly preferably use adsorption tool.
And, as laminating tool 26, it is not particularly limited, as long as glass substrate laminate can be kept.For example, it is also possible to the circular hole inserting glass base plate for magnetic recording carrier shown in use Fig. 2 support the centration axis of inner circumferential end face portion glass substrate is carried out stacking.Alternatively, it is also possible to use the support of the outer circumference end face keeping glass substrate that glass substrate is carried out stacking.
Additionally, it is preferred that have the mechanism in order to glass substrate-pad can detect being placed in appropriate location, adjust, controls its position in laminating tool 26.
It is not particularly limited as this mechanism, but as the unit of detection position, video camera or the position detectors based on infrared ray etc. such as such as camera can be enumerated.And, according to carrying out the signal of self-detector, adjust, control glass substrate-pad carrying mechanism is loaded the position of glass substrate-pad pair.
By being repeated above-mentioned first～the 4th operation, glass substrate laminate 27 can be formed.
In employing the glass substrate laminate forming method of method for carrying of the present invention, can in time being used in carrying with glass substrate and pad the most paired in the way of carry, therefore then the existing method of its stacking can more efficiently be formed glass substrate laminate than moving glass substrate and pad respectively.It is additionally possible to suppress produce the situation of scar on the surface of glass substrate when the carrying of glass substrate, it is provided that the glass substrate of high-quality and glass substrate laminate.
Above, in the present embodiment glass substrate laminate forming method is illustrated, but can be set to include the use of the manufacture method of the glass base plate for magnetic recording carrier of the glass substrate laminate formation process of glass substrate laminate forming method, end surface grinding operation, principal plane grinding step, matting.
Here, the manufacture method of glass base plate for magnetic recording carrier and disk is illustrated.
First, glass base plate for magnetic recording carrier can be manufactured by the manufacture method containing following operation:
Glass element substrate is being processed as after central part has the glass substrate of round-meshed disc-shape by (operation 1), and the shape that inner circumferential end face and peripheral end face carry out chamfer machining gives operation；
The end surface grinding operation of the end face (inner circumferential end face and peripheral end face) of (operation 2) grinding glass substrate；
(operation 3) grinds the principal plane grinding step of the principal plane of above-mentioned glass substrate；
(operation 4) carries out precision cleaning the matting being dried to above-mentioned glass substrate.
Then, obtain glass base plate for magnetic recording carrier by the manufacture method containing above-mentioned each operation and pass through also to carry out being formed on the operation of the thin film such as magnetosphere, disk can be formed as.
Here, the shape of (operation 1) gives operation will be processed as the glass substrate having round-meshed disc-shape at central part by the glass element substrate of float glass process, fusion method, punching formation, glass tube down-drawing or traction therapy shaping again.It addition, the glass element substrate used can be non-crystalline glass, it is also possible to be sintered glass ceramics, it is also possible to be the strengthening glass on the top layer of glass substrate with strengthening layer.
And, the end surface grinding operation of (operation 2) is the operation that the end face to glass substrate (side surface part and chamfered section) carries out end surface grinding.
End surface grinding operation is implemented to form smooth minute surface with concavo-convex for the side surface part of periphery and/or inner circumferential or the scratch of chamfered section removing glass base plate for magnetic recording carrier.By the side surface part of glass substrate or chamfered section being formed as smooth minute surface, improve the mechanical strength of glass substrate.It addition, reduced by the quantity of side surface part or the foreign body of the concavo-convex seizure of end face portion, when using as magnetic recording media, the microgranule produced due to side surface part or the resin component of the concavo-convex box of pruning of end face portion reduces.
When grinding peripheral end face and the inner circumferential end face of glass base plate for magnetic recording carrier, generally, multiple glass substrates diametric position of alignment is overlapping, form glass substrate laminate, glass substrate laminate is installed on end-face grinder, uses abrasive brush or polishing pad and lapping liquid to carry out end surface grinding.
At this time it is also possible to insert such as pad between adjacent glass substrate.By inserting pad, bristle or lapping liquid are prone to arrive the boundary portion between first type surface and chamfered section, therefore can more uniformly grind peripheral end face or inner circumferential end face.Furthermore it is possible to prevent the damage of the first type surface to glass substrate.
For the principal plane grinding step of (operation 3), it it is the operation of the principal plane up and down using the lapping device limit principal plane supply lapping liquid limit simultaneous grinding glass substrate to glass substrate.Grinding step can be once to grind, it is also possible to once grinds and grinds with secondary, it is also possible to carries out three times after secondary grinds and grinds.
Can also before and after the end surface grinding operation of above-mentioned (operation 2) at least one party implement the polishing (such as free abrasive polishing, bonded-abrasive polishing etc.) of principal plane.Alternatively, it is also possible to implement cleaning (inter process cleaning) or the etching (inter process etching) of glass baseplate surface of glass substrate at each inter process.It addition, the polishing of principal plane refers to the grinding of the principal plane of broad sense.
And, when glass base plate for magnetic recording carrier is required higher mechanical strength, the top layer that can also be implemented in glass substrate before grinding step or after grinding step or during grinding step forms the strengthening operation (such as, chemical enhanced operation) of strengthening layer.
Glass base plate for magnetic recording carrier described above, disk manufacture method in, by using the glass substrate laminate forming method of present embodiment, when moving glass substrate, it is not likely to produce scar at its principal plane, therefore can manufacture the glass base plate for magnetic recording carrier of high-quality.
Above-mentioned glass base plate for magnetic recording carrier, disk manufacture method in, the opportunity of glass substrate laminate forming method implementing present embodiment is not limited, and can carry out before needing the operation of cambium layer stack.For example, it is possible to carried out before end surface grinding operation, glass substrate laminate is carried out end surface grinding.
It addition, in the present embodiment, as glass substrate, it is illustrated as a example by glass base plate for magnetic recording carrier, but the kind of glass substrate is not limited to this, as long as glass substrate can be suitable for.As the glass substrate that can be preferably suitable for, can enumerate the optical elements such as the display such as such as magnetic recording media, photomask, liquid crystal or organic EL, photo-sensitive cell or optical filter with etc. glass substrate.
[the 3rd embodiment]
Glass base plate transport device is illustrated by present embodiment.
Glass base plate transport device in present embodiment uses the carrying glass sheet method illustrated in the first embodiment to carry pad and glass substrate simultaneously, it is characterised in that have with lower component:
The glass substrate mounting portion of mounting glass substrate；
The pad mounting portion of mounting pad；
At the glass substrate-pad of surface configuration pad of glass substrate to forming portion；
From described glass substrate mounting portion by the carrying glass sheet to the described glass substrate-pad carrying glass sheet mechanism to forming portion；
From described pad mounting portion, pad is transported to the described glass substrate-pad pad carrying mechanism to forming portion；And
Carry the glass substrate-pad of the glass substrate-pad pair forming portion formed at glass substrate-pad to carrying mechanism.
Use Fig. 3, above-mentioned glass base plate transport device is illustrated.
Glass base plate transport device 30 shown in Fig. 3 possesses the glass substrate mounting portion 31 being placed with glass substrate 321.In Fig. 3, illustrate the structure that glass substrate is held in glass substrate box 21 as glass substrate mounting portion 31, but not in limiting which, do not damage glass substrate as long as loading into.
And, glass substrate is taken out from glass substrate mounting portion 31 by carrying glass sheet mechanism 32.
Then, the glass substrate 321 being arranged in carrying glass sheet mechanism 32 by ensuing liquid supply step portion 322 from liquid supply unit 323 to its surface for liquid 324.Additionally, as described in the second embodiment, this operation not necessarily, can be appropriately arranged with according to the kind of keeper.
And, then by carrying glass sheet to glass substrate-pad to forming portion 325, pass through the pad carrying mechanism 327 surface configuration pad at glass substrate from pad mounting portion 326.For pad carrying mechanism, as long as assigned position pad can being transported to glass substrate from pad mounting portion 326, it is not particularly limited.It is, for example possible to use have the device of various keeper identically with glass base plate transport device described later.
Alternatively, it is also possible to be provided for making the positioning process of the position consistency of glass substrate and pad before being transported on glass substrate by pad or after carrying.For example, it is preferable to the top of forming portion is arranged the video cameras such as camera at glass substrate-pad, confirm glass substrate and the position of pad, adjusted the position of glass substrate and pad by pad carrying mechanism 327.Alternatively, it is also possible to have the pads placement guiding mechanism of the position adjusting glass substrate and pad respectively.
And, the glass substrate-pad obtained according to above operation utilize 328 glass substrate-pad carrying mechanism 329 is transported to the position of regulation.
Glass substrate-pad uses the carrying glass sheet method illustrated by the first embodiment to carrying mechanism, is to keep glass substrate, and carrying pad and the mechanism of glass substrate simultaneously across pad by keeper.
Glass base plate transport device from the description above, configures pad on the glass substrate, is kept by keeper and carries being formed as the parts of glass substrate-pad pair across pad, therefore can suppress to produce on the surface of glass substrate the situation of scar.
Here, glass substrate laminate forming portion can also nearby be arranged on the basis of above-mentioned glass base plate transport device, be formed as glass substrate laminate and form system.
This is to form system by the glass substrate laminate utilizing glass substrate laminate forming portion that stacking is formed glass substrate laminate by the glass substrate-pad using above-mentioned glass base plate transport device to carry.
Here, as the structure of glass substrate laminate forming portion, such as, when glass substrate is to have round-meshed glass base plate for magnetic recording carrier at central part, it is possible to use the columned centration axis illustrated by the second embodiment.Alternatively, it is also possible to be to maintain the peripheral end face side of glass substrate and the structure of cambium layer stack.
Additionally, above-mentioned glass substrate-pad to carrying mechanism 329 by glass substrate-pad to when being placed in glass substrate laminate forming portion, preferably at glass substrate-pad, carrying mechanism 329 and/or glass substrate laminate forming portion are possessed adjustment, control the mechanism of its position.
This is because, in the case of being processed the glass substrate laminate formed waiting, if constituting glass substrate and the location dislocation of pad of glass substrate laminate, then machining accuracy is likely to decrease.
As the mechanism of the position adjusting glass substrate and pad, it is not particularly limited, various mechanism can be used.Such as, following mechanism can be considered, i.e., the detectors such as the camera that the position that can detect glass substrate-pad pair is set on the top of glass substrate laminate forming portion, based on its signal, it is adjusted, controls so that the position of regulation can be carried, be placed on to carrying mechanism 329 by glass substrate-pad.
By such glass substrate laminate forming portion and glass base plate transport device illustrated in the present embodiment are combined, glass substrate laminate can be formed as and form system.According to this system, glass substrate is carried together with pad, therefore without carrying pad separately when forming glass substrate laminate, glass substrate laminate can be formed expeditiously.It addition, suppression produces the situation of scar on the surface of glass substrate when carrying glass sheet, glass substrate and the glass substrate laminate of higher quality therefore can be provided.
The Japanese patent application 2011-208148 that the application is proposed based on JIUYUE in 2011 on the 22nd, has been incorporated by reference herein its content.
Claims (9)
1. a carrying glass sheet method, described glass substrate and the location of described pad is carried out at the same time before carrying pad and glass substrate, across pad by keeping glass substrate as the adsorption tool of keeper or electrostatic instrument, described glass substrate and described pad, and carrying pad and glass substrate simultaneously is adsorbed by being configured at the liquid between described glass substrate and described pad or electrostatic.
2. carrying glass sheet method as claimed in claim 1, it is characterised in that
The surface roughness Ra of the described gasket surface relative with described glass substrate is below 2.0 μm, and the thickness of described pad is below 0.5mm.
3. carrying glass sheet method as claimed in claim 1 or 2, it is characterised in that
The surface roughness Ra of the principal plane of the described glass substrate relative with described pad is below 1.5 μm.
4. carrying glass sheet method as claimed in claim 1 or 2, wherein,
In the aggregate value of quality of the quality and described pad setting described glass substrate as m (kg), acceleration of gravity as g (m/s2) time,
The retentivity F (N) of described keeper meets F ＞ mg.
5. a glass substrate laminate forming method, it is characterised in that
Use the carrying glass sheet method according to any one of claim 1～4, carry described pad and described glass substrate simultaneously, form glass substrate laminate.
6. a glass base plate transport device, uses the carrying glass sheet method according to any one of claim 1～4, carries described pad and described glass substrate, it is characterised in that have simultaneously:
Load the glass substrate mounting portion of described glass substrate；
Load the pad mounting portion of described pad；
At the glass substrate-pad of pad described in the surface configuration of described glass substrate to forming portion；
Described glass substrate is transported to the described glass substrate-pad carrying glass sheet mechanism to forming portion from described glass substrate mounting portion；
Described pad is transported to the described glass substrate-pad pad carrying mechanism to forming portion from described pad mounting portion；And
Carry the glass substrate-pad of the glass substrate-pad pair forming portion formed at described glass substrate-pad to carrying mechanism.
7. glass substrate laminate forms a system, by the described glass substrate-pad of the glass base plate transport device carrying used described in claim 6 is formed glass substrate laminate to carrying out stacking, it is characterised in that
There is glass substrate laminate forming portion.
8. a manufacture method for glass base plate for magnetic recording carrier, has:
The end surface grinding operation of the end face of grinding glass substrate；
The principal plane grinding step of the principal plane of grinding glass substrate；And
Clean the matting of glass substrate；It is characterized in that,
There is the carrying glass sheet operation employing the carrying glass sheet method according to any one of Claims 1 to 4.
9. a manufacture method for glass base plate for magnetic recording carrier, has:
The end surface grinding operation of the end face of grinding glass substrate；
The principal plane grinding step of the principal plane of grinding glass substrate；And
Clean the matting of glass substrate；It is characterized in that,
There is the glass substrate laminate formation process employing the glass substrate laminate forming method described in claim 5.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-208148 | 2011-09-22 | ||
| JP2011208148A JP5842502B2 (en) | 2011-09-22 | 2011-09-22 | Glass substrate transport method, glass substrate laminate forming method using the glass substrate transport method, glass substrate transport device, glass substrate laminate forming system having the glass substrate transport device, and further using the glass substrate transport method Manufacturing method of glass substrate for magnetic recording medium, and manufacturing method of glass substrate for magnetic recording medium using the glass substrate laminate forming method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103010742A CN103010742A (en) | 2013-04-03 |
| CN103010742B true CN103010742B (en) | 2016-08-03 |
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| JP6132957B2 (en) * | 2015-10-13 | 2017-05-24 | ヤス カンパニー リミテッド | Substrate chucking method and system by charging process |
| CN107843966B (en) * | 2016-09-18 | 2021-05-04 | 中芯国际集成电路制造(上海)有限公司 | Method and system for assembling microlens array assembly |
| CN106733841A (en) * | 2016-12-21 | 2017-05-31 | 重庆天和玻璃有限公司 | Glass bar automatically grinding production line |
| CN109664194B (en) * | 2017-10-16 | 2020-08-18 | 蓝思科技股份有限公司 | Edge polishing method for 2.5D window screen glass |
| JP6616922B1 (en) * | 2018-03-09 | 2019-12-04 | Hoya株式会社 | Spacer, substrate laminate, substrate manufacturing method, and magnetic disk substrate manufacturing method |
| JP7315351B2 (en) * | 2019-03-26 | 2023-07-26 | Ｋｂセーレン株式会社 | cushioning material |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001028390A (en) * | 1999-07-13 | 2001-01-30 | Nitto Denko Corp | Sucking fixing carrying sheet |
| JP2003203899A (en) * | 2001-12-28 | 2003-07-18 | Nagano Denshi Kogyo Kk | Method and device for manufacturing epitaxial wafer silicon single-crystal substrate |
| JP2005075482A (en) * | 2003-08-28 | 2005-03-24 | Nippon Electric Glass Co Ltd | Glass sheet packing method and glass sheet packing device |
| JP2011065729A (en) * | 2009-09-18 | 2011-03-31 | Hoya Corp | Method of conveying magnetic disk substrate |
| CN102157157A (en) * | 2010-02-01 | 2011-08-17 | 旭硝子株式会社 | Glass substrate for magnetic recording medium, and method for manufacturing the same |
| JP2011167769A (en) * | 2010-02-16 | 2011-09-01 | Konica Minolta Opto Inc | Method for polishing glass substrate |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH056933A (en) * | 1991-06-27 | 1993-01-14 | Kyocera Corp | Electrostatic chuck made of ceramic |
| JP3933432B2 (en) * | 2001-09-10 | 2007-06-20 | Ｈｏｙａ株式会社 | Glass substrate clamping jig, glass substrate processing method, and glass substrate |
-
2011
- 2011-09-22 JP JP2011208148A patent/JP5842502B2/en active Active
-
2012
- 2012-09-21 CN CN201210356975.9A patent/CN103010742B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001028390A (en) * | 1999-07-13 | 2001-01-30 | Nitto Denko Corp | Sucking fixing carrying sheet |
| JP2003203899A (en) * | 2001-12-28 | 2003-07-18 | Nagano Denshi Kogyo Kk | Method and device for manufacturing epitaxial wafer silicon single-crystal substrate |
| JP2005075482A (en) * | 2003-08-28 | 2005-03-24 | Nippon Electric Glass Co Ltd | Glass sheet packing method and glass sheet packing device |
| JP2011065729A (en) * | 2009-09-18 | 2011-03-31 | Hoya Corp | Method of conveying magnetic disk substrate |
| CN102157157A (en) * | 2010-02-01 | 2011-08-17 | 旭硝子株式会社 | Glass substrate for magnetic recording medium, and method for manufacturing the same |
| JP2011167769A (en) * | 2010-02-16 | 2011-09-01 | Konica Minolta Opto Inc | Method for polishing glass substrate |
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| CN103010742A (en) | 2013-04-03 |
| JP5842502B2 (en) | 2016-01-13 |
| JP2013069380A (en) | 2013-04-18 |
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