JP2001028390A - Sucking fixing carrying sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrying sheet capable of sufficiently responding to a reduction in size and weight in a green sheet, without changing any facilities on the like of a manufacturing process, by using a porous carrying sheet whose surface to be a contact surface with a sheet to be sucked has a porosity and a roughness of respective specific values and moreover whose air permeability as a whole is a specific value. SOLUTION: A porous sheet 2 is used whose surface to be a contact surface with a green sheet 3 of a sheet to be sucked has a porosity of 40% or lower and has a roughness of 1 μm or lower. This prevents the green sheet 3 from coming in the pores in the sheet 2, when the green sheet 3 is sucked because the pores are very small and the occurrence of defects, such as uneven spots or flaws on the surface of the green sheet 3, because the surface of the sheet 2 is smooth. Furthermore, if air permeability in the direction of thickness of a sucking fixing carrying sheet 2 is set at 1 cm3/cm2/sec or lower, it is easy to conduct suction, fixation, and detachment of the green sheet 3 without affecting the cycle time of manufacturing process (time required to suck and detach the green sheet 3).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a glass plate for a liquid crystal,
The present invention relates to a sheet for fixing and conveying by suction, which is used for cutting and fixing a semiconductor wafer or for stacking green sheets of a multilayer ceramic capacitor.

[0002]

2. Description of the Related Art When laminating green sheets in a manufacturing process of a multilayer ceramic capacitor, a polymer porous sheet is employed as a member for adsorbing and fixing and conveying. The method of using the suction-fixing / conveying member for laminating the green sheets is, for example, as follows. That is, as shown in FIG. 1, a polymer porous sheet 2 which is a suction-fixing / conveying member attached to a suction device 1 is placed on a green sheet 3 on a carrier film 4, and is sucked in the direction of the arrow. The green sheet 3 is suction-fixed by the suction device 1 and transported. As this polymer porous sheet, it is proposed to use a porous sheet made of ultra-high molecular weight polyethylene having a viscosity average molecular weight of 500,000 or more (hereinafter referred to as "UHMWPE") in consideration of air permeability, rigidity, cushioning property and the like. (Japanese Patent Laid-Open No. 8-16)
9971, JP-A-8-258198, and JP-A-9-22935).

[0003]

In recent years, the above-mentioned multilayer ceramic capacitor has become a high-density laminate, and accordingly the thickness of the green sheet itself has been reduced to several μm.
The technology of laminating types is indispensable. As described above, the thickness of the green sheet is reduced, and accordingly, the rigidity of the green sheet is reduced, so that it is difficult to handle the green sheet. That is, when the green sheet is adsorbed and fixed to the porous sheet serving as the adsorbing / fixing / transporting member, the above-mentioned green sheet penetrates into the holes of the porous sheet, and the thin green sheet has defects such as irregularities and scratches. Occurs, which is a factor of causing defects.

[0004] From such a point, it has been attempted to address the above-mentioned problem by using a porous body having a small hole diameter with respect to a conventionally used adsorption-fixing / conveying sheet made of a porous sheet made of UHMWPE. There was such a problem. That is, the porous sheet having the small pore size generally has a problem that the air permeability is reduced, so that the tact time (time required for sucking and releasing the green sheet) in the manufacturing process becomes longer, or the green sheet cannot be adsorbed.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and does not require any change in the conventional manufacturing process equipment and the like, and can sufficiently cope with the reduction of the thickness of the green sheet. The purpose is to provide.

[0006]

In order to achieve the above-mentioned object, the present invention provides a suction-fixing and conveying sheet comprising a porous sheet having the following (A) and (B): Wherein the air permeability in the thickness direction of the entire suction-fixed and conveyed sheet is 1 cm ³ / cm ² / sec or more. (A) The porosity of the surface is 40% or less. (B) The surface roughness (Ra) is 1 μm or less.

That is, the present inventors have made a series of attempts to obtain a transfer sheet which can be used as a member for adsorbing and fixing a thin green sheet without any change without changing the conventional manufacturing process. Repeated research. As a result, when a porous sheet having a porosity of 40% or less and a surface roughness (Ra) of 1 μm or less is used as a contact surface portion with a green sheet as a member to be sucked, when a green sheet is adsorbed, It has been found that the green sheet does not penetrate due to the fine pore size, and that the surface of the green sheet is free from defects such as irregularities and scratches due to its smooth surface. Furthermore, the air permeability in the thickness direction of the entire sheet for adsorption and fixing is set to 1 cm ³ / cm ² / sec.
By setting as described above, it has been found that adsorption, fixing, and desorption can be easily performed without affecting the tact (time required for sucking and releasing the green sheet) in the manufacturing process, and reached the present invention.

Further, when another porous sheet for reinforcement is laminated on the other surface side of the above-mentioned porous sheet from the contact surface with the member to be adsorbed, good surface smoothness and air permeability are obtained.
It is easy to secure a sufficiently high strength for suction fixed conveyance.

[0009]

Next, an embodiment of the present invention will be described in detail.

[0010] The sheet for suction and fixed conveyance according to the present invention has a porosity and a surface roughness (R) of a surface which is a contact surface portion with a member to be sucked.
a) is obtained by using a porous sheet having a specific value, and the air permeability of the entire sheet for adsorption and fixing has a specific value. In the adsorption-fixing / conveying sheet of the present invention, the porous sheet provided with the above (A) and (B) may constitute the entire adsorption-fixing / conveying sheet, or the porous sheet may further include another porous sheet. It may have a multilayer structure in which porous sheets are laminated.

The material for forming the porous sheet is not particularly limited, but among them, UHMWPE is preferably used in terms of abrasion resistance, impact resistance, and low coefficient of friction. The UHMWPE is characterized in that it has a high molecular weight of about 500,000 or more, while the general polyethylene molecular weight (measured by a viscosity method) is about 100,000 or less.

[0012] For example, in obtaining a porous sheet using the above UHMWPE, especially in a sintered porous body, its particle diameter and particle shape are important factors, and how to perform high density sintering. This also affects the size of the hole diameter of the sheet. However, in any of the methods, reducing the pore diameter can only obtain a sheet having characteristics of low porosity and low air permeability. On the other hand, in terms of strength, a low porosity is considered to be more suitable, but as mentioned above, it has an appropriate air permeability to affect the tact of the manufacturing process and to smoothly absorb and desorb the green sheet. Is required. From such a point, the present inventors have conducted studies and found that the following setting is necessary in terms of the air permeability in the thickness direction of the entire sheet. That is, the air permeability in the thickness direction of the entire suction-fixing and conveying sheet, in which the specific porous sheet forms a contact surface with the member to be sucked, must be 1 cm ³ / cm ² / sec or more, and particularly preferably. 1.5 cm ³ / cm ² / sec or more. Although there is no problem even if the air permeability is high as long as the sheet has the rigidity as the suction-fixing and conveying sheet, it is usually 3
0 cm ³ / cm ² / sec is the upper limit. in this way,
In order to set the air permeability in the thickness direction of the entire sheet for adsorption and fixing to the above value, the air permeability can be appropriately set by adjusting the porosity of the porous sheet.
It can be adjusted by setting it in the range of 0 to 60%, preferably in the range of 30 to 50%.

[0013] The sheet for suction and fixed conveyance of the present invention can be obtained, for example, as follows. That is, when the above-described UHMWPE is used as a porous sheet forming material, first, a sintered porous body is prepared under predetermined conditions. Next, a sheet is produced from the sintered porous body. Then, a material having a smooth surface is placed on the sheet-like body and heated and pressurized so that the surface roughness (Ra) of the surface is increased.
Can be obtained as a sheet having a predetermined value.

The preparation of the sintered porous body is appropriately set so that a sheet having a desired porosity, air permeability and pore size can be obtained. As an example, a mold in which at least one or more holes of a desired size are formed is filled with resin powder, and then put into a pressure-resistant container,
Water vapor is sealed in a container and heated to produce a sintered porous body. Next, the desired porous body can be obtained by further cutting the sintered porous body with a cutting lathe.

The material to be placed on the sheet is not particularly limited. For example, a polymer sheet having a smooth surface, such as a polyethylene terephthalate sheet, or a metal sheet, such as a stainless material, may be used. And the like. Then, heating and placing a material with a smooth surface
The pressing conditions are not particularly limited. For example, the temperature is 120 to 150 ° C., and the pressure is 10 g / cm ^{2 to} 100.
It can be set in the range of kg / cm ² .

The sheet for adsorption and fixing obtained in this manner must have a surface porosity of 40% or less and a surface roughness (Ra) of 1 μm or less. The surface roughness (Ra) is preferably from 0.1 to 1 μm, particularly preferably from 0.1 to 0.5 μm. That is, when the opening ratio of the surface exceeds 40%, the green sheet penetrates into the hole of the sheet for suction fixing and transporting during suction fixing and becomes uneven, so that lamination of the green sheet becomes difficult, or the laminated green sheet having a predetermined thickness is formed. This is because there is a problem that it is difficult to obtain a sheet. Further, if the surface roughness exceeds 1 μm, the surface of the green sheet is damaged and defects are generated.

The air permeability in the thickness direction of the whole sheet for suction and fixing conveyance is 1 cm ³ / c as described above.
m ² / sec or more. Thus, in order to set the air permeability in the thickness direction of the entire sheet to the above value,
The porosity of the porous sheet is set to a predetermined value, for example, 20 to 60.
It can be adjusted by setting it in the range of%. If the air permeability is too small, such as less than 1 cm ³ / cm ² / sec, it will affect the tact time of the manufacturing process and make it difficult to smoothly adsorb and desorb the green sheet.

Regarding the air permeability, for example, the porosity of the sheet for adsorption and fixing is preferably set in the range of 20 to 60%, particularly preferably 30 to 50%.

The porosity of the sheet surface can be measured and calculated as follows, for example. That is,
The surface of the sheet is photographed using a scanning electron microscope (magnification: 20 to 300 times). Then, the photograph is read by a scanner, the hole and the non-hole are binarized, and the aperture ratio can be calculated using image analysis software (V10) (manufactured by Asahi Kasei Corporation).

The surface roughness (Ra) of the sheet surface can be measured, for example, as follows. That is, it can be measured using a Surfcom 550A surface roughness meter manufactured by Tokyo Seimitsu Co., Ltd. The measurement conditions in this case are a stylus diameter of 250 μmR, a cutoff value of 0.8, a moving speed of 0.3 mm / sec, and a measurement length of 4 mm.

Further, regarding the above-mentioned air permeability, JIS
L 1096A method, Frazier tester (TOYO
(Manufactured by SEIKI Co., Ltd.).

When the air permeability in the thickness direction of the entire sheet is set to the above-mentioned predetermined value, it can be appropriately set by adjusting the porosity of the porous sheet as described above. As a more preferred embodiment, there is a method in which another porous body having high air permeability is laminated on the porous sheet (sheet-like body) produced as described above. When another porous sheet having high air permeability is laminated on the porous sheet, it is naturally necessary to laminate the porous sheet on the other surface side from the contact surface of the porous sheet with the member to be sucked.
By laminating another porous sheet with high air permeability on the porous sheet in this way, the surface of the porous sheet has a predetermined surface smoothness and a pore size, and the entire sheet has a predetermined air permeability. In addition, it is easy to secure a sufficiently high strength for use for suction fixed conveyance. The porous sheet having a high air permeability in such an embodiment is not particularly limited. For example, when UHMWPE is used, the porous sheet can be porous even by lamination near the melting point due to the high viscosity characteristic of this UHMWPE. It is preferable because it can be fused without closing the holes of the porous sheet.

A method for laminating another porous body on the other surface side of the porous sheet from the contact surface with the member to be adsorbed is as follows.
For example, when both use UHMWPE, the temperature is 1
A method of heating and pressurizing at 30 to 150 ° C. under a pressure of 1 to 100 kg / cm ² for 1 minute to 12 hours is exemplified.

Next, examples will be described together with comparative examples.

(1) Single layer type (porous sheet only)

EXAMPLE 1 UHMWPE powder (molecular weight 2.5 million, melting point 136 ° C.,
(Average particle size: 40 μm), and this was placed in a metal pressure-resistant container, and the pressure in the container was reduced to 30 mmHg. Thereafter, steam was introduced and heated at a temperature of 160 ° C. × 6 atm for 5 hours, and then gradually cooled to produce a columnar sintered porous body. This was cut with a lathe, thickness 0.3mm, porosity 30%,
A white sheet having an air permeability of 10 cm ³ / cm ² / sec and a pore size of 30 μm was obtained.

Next, a polyethylene terephthalate (PET) having a thickness of 0.25 mm is formed on the upper surface of the white sheet.
The sheet is placed and heated and pressurized for 1 hour at a temperature of 140 ° C. and a pressure of 50 g / cm ² , so that the surface roughness (Ra) of the PET sheet placement surface is 0.6 μm and the air permeability is 5 cm.
A sheet of ³ / cm ² / sec was obtained.

[0027]

Example 2 A UHMWPE powder (molecular weight 2.5 million, melting point 136 ° C.,
(Average particle size: 40 μm), and this was placed in a metal pressure-resistant container, and the pressure in the container was reduced to 30 mmHg. Thereafter, steam was introduced and heated at a temperature of 170 ° C. × 6 atm for 12 hours, and then gradually cooled to produce a columnar sintered porous body. This was cut with a lathe, thickness 0.2mm, porosity 25%,
A white sheet having an air permeability of 6 cm ³ / cm ² / sec and a pore size of 10 μm was obtained.

Next, on the upper surface of the white sheet,
Place a 0.25 mm PET sheet, temperature 130 ° C,
Pressure 20g / cm^TwoHeat and pressurize for 1 hour under the conditions of
As a result, the surface roughness (Ra) of the PET sheet mounting surface is 1.
0 μm, air permeability 2 cm^Three/ Cm ^Two/ Sec sheet
Was.

[0029]

Example 3 UHMWPE powder (molecular weight 2.5 million, melting point 136 ° C.,
(Average particle size: 150 μm), which was placed in a metal pressure-resistant container, and the pressure in the container was reduced to 30 mmHg. After this,
After steam was introduced and heated at a temperature of 140 ° C. × 4 atm for 12 hours, it was gradually cooled to produce a cylindrical sintered porous body. This was cut with a lathe, thickness 0.2mm, porosity 45%,
A white sheet having an air permeability of 20 cm ³ / cm ² / sec and a pore size of 100 μm was obtained.

Next, a PET sheet having a thickness of 0.25 mm was placed on the upper surface of the white sheet.
By heating and pressurizing for 1 hour under the condition of a pressure of 50 g / cm ² , the surface roughness (Ra) of the PET sheet mounting surface becomes 1.
A sheet having 0 μm and air permeability of 15 cm ³ / cm ² / sec was obtained.

(2) Laminated type

Example 4 Instead of the UHMWPE powder used in Example 1, UHMWWP having an average particle size of 170 μm and a molecular weight of 5,000,000 was used.
Using E powder, as in Example 1, thickness 1.5 m
m, porosity 35%, air permeability 4 cm ³ / cm ² / sec,
A sheet having a pore size of 200 μm was obtained.

Next, the above-obtained sheet and the white sheet before the pressure treatment in Example 1 were overlapped, and a 0.25 mm thick P
Place an ET sheet and apply a load of 50 g / cm ² to
By performing a heat treatment in a dryer at 40 ° C. for 1 hour,
A laminated porous sheet having a total thickness of 1.8 mm was obtained. The air permeability of the entire obtained sheet is 1.5 cm ³ / cm ² / sec
The porosity is 30%, and the surface roughness (Ra) on the small pore diameter side is 0.1.
It was 6 μm.

[0033]

Example 5 UHMWWP having an average particle size of 170 μm and a molecular weight of 5,000,000 was used in place of the UHMWPE powder used in Example 1.
Using E powder, as in Example 1, thickness 4 mm, porosity 45%, air permeability 5 cm ³ / cm ² / sec, pore size 2
A sheet of 00 μm was obtained.

Next, the sheet obtained above and
The white sheet (pore diameter 100 μm) before the pressure treatment of Example 3 was weighed.
Thickness is applied to the surface of the small-diameter sheet (white sheet) side
Place a 0.25mm polyethylene sheet (PET)
And 50g / cm^TwoWith a load of 140 ° C in the dryer
By heating for 1 hour at a total thickness of 4.2 mm
Was obtained. Ventilation of the entire sheet obtained
The degree is 2cm^Three/ Cm ^Two/ Sec, porosity 40%, small
The surface roughness (Ra) on the pore diameter side was 1.0 μm.

[0035]

Example 6 Instead of the UHMWPE powder used in Example 1, UHMWWP having an average particle size of 140 μm and a molecular weight of 4,000,000 was used.
1.8 m in thickness in the same manner as in Example 1 using E powder
m, porosity 38%, air permeability 2 cm ³ / cm ² / sec,
A sheet having a pore size of 100 μm was obtained.

Next, the above-obtained sheet and the white sheet (pore size: 10 μm) before the pressure treatment in Example 2 were superimposed, and a 0.25 mm-thick sheet was placed on the surface of the sheet (white sheet) having a small hole diameter. A polyethylene sheet (PET) was placed and subjected to heat treatment in a dryer at 140 ° C. for 1 hour under a load of 50 g / cm ² to obtain a laminated porous sheet having a total thickness of 2 mm. The air permeability of the entire sheet obtained was 1.0 cm ³ / cm ² / sec, the porosity was 30%,
The surface roughness (Ra) on the small diameter side was 0.6 μm.

[0037]

[Comparative Example 1] A columnar sintered body was prepared in the same manner as in Example 1 and cut by a lathe to obtain a thickness of 0.3 m.
m, porosity 30%, air permeability 10 cm ³ / cm ² / se
c, a white sheet having a pore size of 30 μm and a surface roughness (Ra) of 3 μm was obtained.

[0038]

Comparative Example 2 The above Example 1 was prepared using UHMWPE powder (molecular weight: 5,000,000, melting point: 136 ° C., average particle size: 170 μm).
A cylindrical sintered body was prepared in the same manner as described above, and was cut with a lathe to obtain a thickness of 1.8 mm, a porosity of 35%, and a permeability of 3
A white sheet having a size of cm ³ / cm ² / sec and a pore size of 200 μm was obtained.

Next, a PET sheet having a thickness of 0.25 mm was placed on the upper surface of the white sheet, and heated and pressed in the same manner as in Example 1 to obtain a surface roughness (Ra) of the PET sheet placing surface. ) Of 1.0 μm, a porosity of 35%, and an air permeability of 3 cm ³ / cm ² / sec.

[0040]

Comparative Example 3 A columnar sintered porous body was prepared in the same manner as in Example 1 and cut by a lathe to obtain a thickness of 1.8 mm, a porosity of 30%, and a permeability of 0.3 cm ³ /. cm
A white sheet having a pore size of 30 μm was obtained in ² / sec.

Next, a PET sheet having a thickness of 0.25 mm was placed on the upper surface of the white sheet, and heated and pressed in the same manner as in Example 1 to obtain a surface roughness (Ra) of the PET sheet placing surface. ) Of 0.6 μm, a porosity of 30%, and an air permeability of 0.3 cm ³ / cm ² / sec.

[0042]

Comparative Example 4 The above Example 1 was prepared using UHMWPE powder (molecular weight: 4,000,000, melting point: 136 ° C., average particle size: 150 μm).
A white sheet having a thickness of 0.3 mm, a porosity of 38%, a porosity of 1.5 cm ³ / cm ² / sec, and a pore diameter of 100 μm was obtained by producing a columnar sintered body in the same manner as described above and cutting it with a lathe. Was.

Next, a PET sheet having a thickness of 0.25 mm was placed on the upper surface of the white sheet.
By heating and pressurizing for 1 hour under the condition of a pressure of 20 g / cm ² , the surface roughness (Ra) of the PET sheet mounting surface becomes 1.
2 μm, porosity 35%, air permeability 1.0 cm ³ / cm ² /
sec, and a sheet having a hole diameter of 100 μm was obtained.

[0044]

Comparative Example 5 Instead of the UHMWPE powder used in Example 1, UHMWWP having an average particle size of 150 μm and a molecular weight of 4,000,000 was used.
Using E powder, a thickness of 0.3 m was obtained in the same manner as in Example 1.
m, porosity 30%, air permeability 10 cm ³ / cm ² / se
c, a sheet having a hole diameter of 100 μm was obtained.

Next, using the UHMWPE powder used in Example 1, a thickness of 3.0 mm, a porosity of 30%, an air permeability of 1 cm ³ / cm ² / sec and a pore diameter of 30 were used in the same manner as in Example 1.
A μm sheet was obtained.

Then, the sheets obtained above are superposed on each other, and a sheet having a thickness of 0.
A 25 mm PET sheet was placed and subjected to a heat treatment in a dryer at 140 ° C. for 1 hour under a load of 50 g / cm ² to obtain a laminated porous sheet having a total thickness of 3.2 mm. The air permeability of the obtained sheet is 0.8 cm ³ / c.
At m ² / sec, the porosity was 28%, and the surface roughness (Ra) on the small-pore side was 1.0 μm.

[0047]

Comparative Example 6 UHMWWP having an average particle size of 170 μm and a molecular weight of 5,000,000 was used in place of the UHMWPE powder used in Example 1.
Using E powder, a thickness of 0.3 m was obtained in the same manner as in Example 1.
m, porosity 30%, air permeability 20 cm ³ / cm ² / se
c, A sheet having a pore size of 130 μm was obtained.

Next, in place of the UHMWPE powder used in Example 1, U-U-M powder having an average particle diameter of 140 μm and a molecular weight of 4,000,000 was used.
Using HMWPE powder, the thickness was 2.
7 mm, porosity 35%, air permeability 2 cm ³ / cm ² / se
c, a sheet having a hole diameter of 100 μm was obtained.

Then, the obtained sheets are superimposed on each other, and a sheet having a thickness of 0.
A 25 mm PET sheet was placed and subjected to a heat treatment in a dryer at 140 ° C. for 1 hour under a load of 100 g / cm ² to obtain a laminated porous sheet having a total thickness of 3 mm. The air permeability of the entire obtained sheet is 1.5 cm ³ / c.
At m ² / sec, the porosity was 30%, and the surface roughness (Ra) on the small pore diameter side was 0.8 μm.

The physical properties (pore size, porosity, air permeability, surface roughness) of each sheet thus obtained were measured according to the following measuring methods. Further, the tensile strength of each sheet was measured according to the method described below. The results are shown in Table 1 below.

[Pore Size and Porosity] The surface of the sheet was photographed using a scanning electron microscope (magnification: 20 to 300).
Times). The hole diameter of the sheet was determined from this photograph. Further, this photograph was read by a scanner, and the holes and non-holes were binarized, and the aperture ratio was calculated using image analysis software (V10) (manufactured by Asahi Kasei Corporation).

[Air permeability] Measured using a Frazier tester (manufactured by TOYOSEIKI) according to JIS L 1096A method.

[Surface Roughness (Ra)] The surface roughness was measured using a Surfcom 550A surface roughness meter manufactured by Tokyo Seimitsu Co., Ltd. The measurement conditions were as follows: stylus diameter 250 μmR, cutoff value 0.8,
The moving speed was 0.3 mm / sec and the measurement length was 4 mm.

[Comprehensive Evaluation] Each sheet was actually used for conveying a green sheet as a sheet for suction and fixed conveyance. That is, as shown in FIG. 1, each suction-fixing / conveying sheet (polymer porous sheet) 2 is attached to a suction machine 1, the green sheet 3 on the carrier film 4 is suctioned, and then the air
Pressurized for desorption. The results were comprehensively evaluated in accordance with the following criteria in consideration of the tensile strength measurement results. ：: When used as a sheet for adsorption and fixation, no damage or the like was confirmed on the surface of the green sheet, and the peeling time by suction and exhaust was short, and workability was good. Δ: The surface of the green sheet was not damaged when the sheet was sucked and conveyed, but it took time for suction and exhaust. X: When used as a sheet for adsorption and fixing, damage and the like were confirmed on the surface of the green sheet, and it took time to peel off by suction and exhaust, resulting in poor workability. Alternatively, the work was completed in a short time, but damage was confirmed on the surface of the green sheet.

[0055]

[Table 1]

From the results shown in Table 1, when the product of the example was used as a sheet for adsorption and fixing, no damage or the like was observed on the surface of the green sheet, and the peeling time by suction and exhaust was short, and the workability was short. Was good. From this, it is understood that the sheet is very excellent as a sheet for fixing and conveying the green sheet. In contrast, Comparative Example 1,
In the case of the two products, when used as a sheet for adsorption and fixation, irregularities were confirmed on the surface of the green sheet, and damage was confirmed. In Comparative Examples 3 and 5, no damage was confirmed on the surface of the green sheet, but it took a long time to peel off by suction and exhaust, resulting in poor workability. Furthermore, although the work of Comparative Example 4 could be performed in a short time, damage was confirmed on the surface of the green sheet. Further, in the product of Comparative Example 6, damage was confirmed in the green sheet, and it took time for the operation.

[0057]

As described above, as described above, the present invention relates to
The sheet has a surface porosity of 40% or less and the surface
A porous sheet having a roughness (Ra) of 1 μm or less is a member to be adsorbed.
And a contact surface portion. like this
In addition, since the pore size of the porous sheet surface is very small,
Green sheet gets into holes when adsorbing heat
And the surface is smooth,
The occurrence of irregularities, scratches, and the like on the surface can be prevented. In addition, adsorption
The air permeability in the thickness direction of the entire fixed conveyance sheet is 1 cm. ^Three/
cm^Two/ Sec or more, the production process
Tact (time required to suck and release green sheet)
Adsorption, fixation, and desorption can be easily performed without affecting
Become like

Further, when another porous body for reinforcement is laminated on the other side of the contact surface of the porous sheet with the member to be adsorbed, it has good surface smoothness and air permeability, as well as adsorption and fixed conveyance. Sufficient high strength for use can be easily secured.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a process of adsorbing and fixing a green sheet using an adsorbing and fixing conveying member (porous sheet).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Suction machine 2 Polymer porous sheet (sheet for adsorption fixed conveyance) 3 Green sheet 4 Carrier film

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C016 DA05 4F071 AA15 AA81 AH12 BA01 BB13 BC01 BC13 BC16 4F100 AK04 AK42 BA02 DJ00A DJ00B EJ17 EJ24 EJ42 GB41 JA08 JD02A JK01 JK14A JK15 YY00A 5F031 CA02 GA05

Claims (3)

[Claims] 1. A sheet for suction and fixed conveyance, wherein a porous sheet having the following (A) and (B) constitutes a contact surface portion with a member to be sucked. The air permeability in the thickness direction of the entire sheet is 1 cm ³ / cm
² / sec or more, the sheet for suction fixed conveyance. (A) The porosity of the surface is 40% or less. (B) The surface roughness (Ra) is 1 μm or less. 2. The sheet according to claim 1, wherein another porous sheet is further laminated on the other surface of the porous sheet from the contact surface with the member to be adsorbed. 3. The suction member is attached to a suction surface of a suction machine, and uses the suction force to suck the member to be suctioned.
The sheet for fixing and conveying according to the above description.