JP5836759B2 - 除膜方法 - Google Patents
除膜方法 Download PDFInfo
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- JP5836759B2 JP5836759B2 JP2011241887A JP2011241887A JP5836759B2 JP 5836759 B2 JP5836759 B2 JP 5836759B2 JP 2011241887 A JP2011241887 A JP 2011241887A JP 2011241887 A JP2011241887 A JP 2011241887A JP 5836759 B2 JP5836759 B2 JP 5836759B2
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- film
- parylene
- dry ice
- parylene film
- component
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Description
Claims (1)
- 成膜装置を用いて成膜対象物に対しパリレン膜を成膜したとき、この成膜装置の構成部品に付着したパリレン膜を除去する除膜方法において、
前記パリレン膜が付着した構成部品表面にペレット状のドライアイスを吹き付けて衝突させるブラスト工程を含み、
前記ブラスト工程に先立ち、前記構成部品を100℃〜200℃の範囲の温度に加熱する加熱工程を更に含むことを特徴とする除膜方法。
Priority Applications (1)
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JP2011241887A JP5836759B2 (ja) | 2011-11-04 | 2011-11-04 | 除膜方法 |
Applications Claiming Priority (1)
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JP2011241887A JP5836759B2 (ja) | 2011-11-04 | 2011-11-04 | 除膜方法 |
Publications (2)
Publication Number | Publication Date |
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JP2013095989A JP2013095989A (ja) | 2013-05-20 |
JP5836759B2 true JP5836759B2 (ja) | 2015-12-24 |
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JP2011241887A Active JP5836759B2 (ja) | 2011-11-04 | 2011-11-04 | 除膜方法 |
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JP (1) | JP5836759B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105013763A (zh) * | 2015-08-13 | 2015-11-04 | 宁夏北极星化工有限公司 | 冬季车皮内冰雪清除方法及装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004008995A (ja) * | 2002-06-10 | 2004-01-15 | Matsushita Electric Ind Co Ltd | 部品の洗浄方法 |
JP4615246B2 (ja) * | 2004-05-07 | 2011-01-19 | 株式会社デジタルネットワーク | 洗浄方法 |
US20070108161A1 (en) * | 2005-11-17 | 2007-05-17 | Applied Materials, Inc. | Chamber components with polymer coatings and methods of manufacture |
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- 2011-11-04 JP JP2011241887A patent/JP5836759B2/ja active Active
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