JP5827515B2 - パーティクル測定装置 - Google Patents
パーティクル測定装置 Download PDFInfo
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- JP5827515B2 JP5827515B2 JP2011165457A JP2011165457A JP5827515B2 JP 5827515 B2 JP5827515 B2 JP 5827515B2 JP 2011165457 A JP2011165457 A JP 2011165457A JP 2011165457 A JP2011165457 A JP 2011165457A JP 5827515 B2 JP5827515 B2 JP 5827515B2
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- 239000002245 particle Substances 0.000 title claims description 55
- 238000007664 blowing Methods 0.000 claims description 28
- 239000000523 sample Substances 0.000 claims description 13
- 230000000694 effects Effects 0.000 claims description 8
- 238000011156 evaluation Methods 0.000 description 12
- 238000005259 measurement Methods 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Description
Claims (1)
- 測定対象物の被測定面に対し圧縮空気を吹き付ける空気吹付管と、被測定面から飛散したパーティクルを含む空気を吸引する吸引管と、この吸引管内に吸引された空気を、当該空気中に含まれるパーティクルを計数する計数器へと導く導入管とを備え、
空気吹付管を分岐した分岐管を更に備え、この分岐管から圧縮空気を吹き出したときに発生するエジェクター効果で吸引管内にパーティクルを含む空気を吸引するように構成し、
前記吸引管の周囲に、この吸引管の長手方向一側に向けて圧縮空気を吹き出す分岐管の空気吹出口が配置され、
前記吸引管の他側でこの吸引管内に前記空気吹付管の少なくとも先端部と導入管の少なくとも先端部とを内蔵し、
内部に空気吹付管及び分岐管への圧縮空気の供給をオンオフ制御する開閉弁が介設された空気通路を備える一方向に長手の胴体を備え、胴体に、この胴体に交差させて上記吸引管が設けられると共に、開閉弁の開閉を操作する操作部が設けられて手持式のプローブを構成することを特徴とするパーティクル測定装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2011165457A JP5827515B2 (ja) | 2011-07-28 | 2011-07-28 | パーティクル測定装置 |
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JP2011165457A JP5827515B2 (ja) | 2011-07-28 | 2011-07-28 | パーティクル測定装置 |
Publications (2)
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JP2013029415A JP2013029415A (ja) | 2013-02-07 |
JP5827515B2 true JP5827515B2 (ja) | 2015-12-02 |
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JP2011165457A Active JP5827515B2 (ja) | 2011-07-28 | 2011-07-28 | パーティクル測定装置 |
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JP (1) | JP5827515B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6648416B2 (ja) * | 2015-05-29 | 2020-02-14 | 大日本印刷株式会社 | 降塵異物評価方法および降塵異物評価装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3403564B2 (ja) * | 1995-12-04 | 2003-05-06 | 日機装株式会社 | 粉体の粒度分布測定装置 |
US7010991B2 (en) * | 2000-09-13 | 2006-03-14 | Pentagon Technologies Group, Inc. | Surface particle detector |
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