JP5814822B2 - Abnormality diagnosis method for differential pressure / pressure combined sensor - Google Patents

Abnormality diagnosis method for differential pressure / pressure combined sensor Download PDF

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JP5814822B2
JP5814822B2 JP2012036211A JP2012036211A JP5814822B2 JP 5814822 B2 JP5814822 B2 JP 5814822B2 JP 2012036211 A JP2012036211 A JP 2012036211A JP 2012036211 A JP2012036211 A JP 2012036211A JP 5814822 B2 JP5814822 B2 JP 5814822B2
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宗則 高井
宗則 高井
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この発明は、差圧測定用の差圧センサと静圧測定用の圧力センサとを備えた差圧／圧力複合センサの異常診断方法に関するものである。   The present invention relates to a method for diagnosing abnormality of a differential pressure / pressure combined sensor including a differential pressure sensor for measuring a differential pressure and a pressure sensor for measuring a static pressure.

従来より、流体の流量を測定する方法として、流路に絞りを設け、絞りの上流と下流の圧力差が流速に比例することを利用して、絞りの上流と下流の圧力差を測定して流量に変換する方法がある。このような場合、通常は差圧センサが用いられる。差圧センサは、２種類の測定圧をセンサダイアフラムに同時に受け、その差圧を検出するセンサである。一方、このような流量計測がなされるとき、静圧、すなわち大気圧を基準としたゲージ圧、又は真空圧を基準とした絶対圧を測定し、流体の密度変化の補正を同時に行うことがある。前述のとおり、差圧センサは、２点間の圧力差を測るものなので、静圧自体を測ることはできない。   Conventionally, as a method of measuring the flow rate of fluid, a restriction is provided in the flow path, and the pressure difference between the upstream and downstream of the restriction is measured by utilizing the fact that the pressure difference upstream and downstream of the restriction is proportional to the flow velocity. There is a way to convert to flow rate. In such a case, a differential pressure sensor is usually used. The differential pressure sensor is a sensor that receives two types of measurement pressures simultaneously on a sensor diaphragm and detects the differential pressure. On the other hand, when such flow rate measurement is performed, static pressure, that is, gauge pressure based on atmospheric pressure, or absolute pressure based on vacuum pressure may be measured, and fluid density change correction may be performed simultaneously. . As described above, since the differential pressure sensor measures the pressure difference between two points, it cannot measure the static pressure itself.

そこで、差圧測定用の差圧センサと静圧測定用の圧力センサとを組み合わせた差圧／圧力複合センサが提案されている（例えば、特許文献１参照）。この差圧／圧力複合センサでは、封入液が封止されたボディの内部空間に、差圧測定用の差圧センサと静圧測定用の圧力センサを収容している。   Therefore, a differential pressure / pressure combined sensor in which a differential pressure sensor for measuring a differential pressure and a pressure sensor for measuring a static pressure are combined has been proposed (see, for example, Patent Document 1). In this differential pressure / pressure combined sensor, a differential pressure sensor for measuring a differential pressure and a pressure sensor for measuring a static pressure are accommodated in an internal space of a body sealed with a sealing liquid.

この差圧／圧力複合センサは、１つのセンサで差圧と静圧を検出することができる長所を有するが、差圧センサと圧力センサの何れか一方が異常となるとセンサの検出出力の信頼性が損なわれる。そこで、従来は、例えば特許文献２に開示されているように、正常時の差圧センサの出力値を基準として差圧センサの正常時の上下限の範囲を定め、この上下限の範囲を差圧センサの出力値が逸脱すれば差圧センサの異常と判断し、同様に、正常時の圧力センサの出力値を基準として圧力センサの正常時の上下限の範囲を定め、この上下限の範囲を圧力センサの出力値が逸脱すれば圧力センサの異常と判断していた。   This combined differential pressure / pressure sensor has the advantage of being able to detect differential pressure and static pressure with a single sensor, but if either the differential pressure sensor or the pressure sensor becomes abnormal, the reliability of the sensor detection output Is damaged. Therefore, conventionally, for example, as disclosed in Patent Document 2, the upper and lower limit ranges of the differential pressure sensor are determined based on the output value of the differential pressure sensor at the normal time. If the output value of the pressure sensor deviates, it is determined that the differential pressure sensor is abnormal. Similarly, the upper and lower limit range of the pressure sensor is determined based on the normal pressure sensor output value. If the output value of the pressure sensor deviates, the pressure sensor is judged to be abnormal.

特開２００３−４２８７８号公報JP 2003-42878 A 特開２００３−２１４９７０号公報JP 2003-214970 A

しかしながら、上述した特許文献２に開示されている方法では、差圧センサの出力値と圧力センサの出力値の２つを評価指標としているため、差圧センサと圧力センサの両方に対して正常時の上下限の範囲を記憶させておかなければならず、処理も複雑となるという問題があった。   However, in the method disclosed in Patent Document 2 described above, since the two output values of the differential pressure sensor and the pressure sensor are used as evaluation indexes, both the differential pressure sensor and the pressure sensor are in a normal state. There is a problem that the upper and lower limit ranges must be stored, and the processing becomes complicated.

本発明は、このような課題を解決するためになされたもので、その目的とするところは、差圧／圧力複合センサの正常／異常の判断を１つの評価指標で行うことが可能な差圧／圧力複合センサの異常診断方法を提供することにある。   The present invention has been made in order to solve such problems. The object of the present invention is to provide a differential pressure capable of making a judgment of normality / abnormality of a differential pressure / pressure combined sensor with one evaluation index. An object of the present invention is to provide a method for diagnosing abnormality of a pressure composite sensor.

このような目的を達成するために本発明は、流体が流れる流路中に設けられた流量制御バルブの上流側と下流側とをバイパスする管路中に設けられ、流量制御バルブの上流側の流体圧力を第１の測定圧、流量制御バルブの下流側の流体圧力を第２の測定圧とし、第１の測定圧と第２の測定圧との差を検出する差圧センサと、第１の測定圧と基準圧との差を検出する圧力センサとを備えた差圧／圧力複合センサの異常診断方法であって、流量制御バルブの開度を全閉とし、さらに流量制御バルブの下流側を大気開放することによって、第２の測定圧を大気圧とする第１ステップと、第１ステップによって第２の測定圧が大気圧とされている状態で、差圧センサによって検出される第１の測定圧と第２の測定圧との差および圧力センサによって検出される第１の測定圧と基準圧との差を取得し、この取得した第１の測定圧と第２の測定圧との差と第１の測定圧と基準圧との差との比較結果として評価指標を求める第２ステップと、第２ステップによって求められた評価指標と予め設定されている使用限界値とを比較し、評価指標が使用限界値を超えていた場合には、差圧／圧力複合センサに異常が生じたことを知らせる第３ステップと、第３ステップにおいて評価指標が使用限界値を超えていなかった場合、使用限界値よりも低めに設定されている切替閾値と評価指標とを比較し、評価指標が切替閾値を超えていた場合には、差圧／圧力複合センサの交換を促す第４ステップとを備えることを特徴とする。 In order to achieve such an object, the present invention is provided in a pipeline that bypasses the upstream side and the downstream side of the flow control valve provided in the flow path through which the fluid flows, A differential pressure sensor for detecting a difference between the first measured pressure and the second measured pressure , wherein the fluid pressure is a first measured pressure, and the fluid pressure downstream of the flow control valve is a second measured pressure; This is a method for diagnosing an abnormality of a differential pressure / pressure combined sensor having a pressure sensor for detecting a difference between a measured pressure and a reference pressure, wherein the flow control valve is fully closed and further downstream of the flow control valve The first step detected by the differential pressure sensor in the state where the second measured pressure is set to the atmospheric pressure by the first step by opening the atmosphere to the atmospheric pressure. The difference between the measured pressure and the second measured pressure and the pressure sensor The difference between the obtained first measured pressure and the reference pressure is acquired, and the comparison result between the obtained difference between the first measured pressure and the second measured pressure and the difference between the first measured pressure and the reference pressure The second step for obtaining the evaluation index as follows, the evaluation index obtained in the second step and the preset use limit value are compared, and if the evaluation index exceeds the use limit value, the differential pressure / A third step notifying that an abnormality has occurred in the pressure composite sensor, and a switching threshold and an evaluation index set lower than the use limit value when the evaluation index does not exceed the use limit value in the third step; And when the evaluation index exceeds the switching threshold, a fourth step for urging replacement of the differential pressure / pressure combined sensor is provided.

本発明において、例えば、基準圧を大気圧とした場合、差圧センサによって検出される第１の測定圧と第２の測定圧（大気圧）との差および圧力センサによって検出される第１の測定圧と基準圧（大気圧）との差が取得され、この取得された第１の測定圧と第２の測定圧（大気圧）との差と第１の測定圧と基準圧（大気圧）との差との比較結果として評価指標が求められる。そして、この評価指標と予め設定されている使用限界値とが比較され、評価指標が使用限界値を超えていた場合には、差圧／圧力複合センサに異常が生じたことが知らされる。評価指標が使用限界値を超えていなかった場合、使用限界値よりも低めに設定されている切替閾値と評価指標とが比較され、評価指標が切替閾値を超えていた場合には、差圧／圧力複合センサの交換が促される。この場合、差圧／圧力複合センサが正常であれば、第１の測定圧と第２の測定圧（大気圧）との差と第１の測定圧と基準圧（大気圧）との差は等しくなるはずである。したがって、第１の測定圧と第２の測定圧（大気圧）との差と第１の測定圧と基準圧（大気圧）との差との比較結果として求められる評価指標を使用限界値や切替閾値と比較することにより、１つの評価指標から差圧／圧力複合センサの異常の有無を判定することができる。 In the present invention, for example, when the reference pressure is atmospheric pressure, the difference between the first measured pressure detected by the differential pressure sensor and the second measured pressure (atmospheric pressure) and the first detected by the pressure sensor. The difference between the measured pressure and the reference pressure (atmospheric pressure) is acquired, the difference between the acquired first measured pressure and the second measured pressure (atmospheric pressure), the first measured pressure and the reference pressure (atmospheric pressure). Evaluation index is obtained as a result of comparison with the difference between Then, this evaluation index is compared with a preset use limit value, and when the evaluation index exceeds the use limit value, it is notified that an abnormality has occurred in the differential pressure / pressure combined sensor. If the evaluation index does not exceed the use limit value, the switching threshold set lower than the use limit value is compared with the evaluation index. If the evaluation index exceeds the switch threshold, the differential pressure / Exchange of pressure composite sensor is prompted. In this case, if the differential pressure / pressure combined sensor is normal, the difference between the first measurement pressure and the second measurement pressure (atmospheric pressure) and the difference between the first measurement pressure and the reference pressure (atmospheric pressure) are Should be equal. Therefore, the evaluation index obtained as a comparison result between the difference between the first measurement pressure and the second measurement pressure (atmospheric pressure) and the difference between the first measurement pressure and the reference pressure (atmospheric pressure) is used as a use limit value or By comparing with the switching threshold value, the presence / absence of abnormality of the differential pressure / pressure combined sensor can be determined from one evaluation index .

本発明において、例えば、基準圧を真空圧とした場合、差圧センサによって検出される第１の測定圧と第２の測定圧（大気圧）との差および圧力センサによって検出される第１の測定圧と基準圧（真空圧）との差が取得され、この取得された第１の測定圧と第２の測定圧（大気圧）との差と第１の測定圧と基準圧（真空圧）との差との比較結果として評価指標が求められる。そして、この評価指標と予め設定されている使用限界値とが比較され、評価指標が使用限界値を超えていた場合には、差圧／圧力複合センサに異常が生じたことが知らされる。評価指標が使用限界値を超えていなかった場合、使用限界値よりも低めに設定されている切替閾値と評価指標とが比較され、評価指標が切替閾値を超えていた場合には、差圧／圧力複合センサの交換が促される。この場合、差圧／圧力複合センサが正常であれば、第１の測定圧と第２の測定圧（大気圧）との差と第１の測定圧と基準圧（真空圧）との差は、例えば第１の測定圧と基準圧（真空圧）との差から大気圧を差し引けば、等しくなるはずである。したがって、第１の測定圧と第２の測定圧（大気圧）との差と第１の測定圧と基準圧（真空圧）との差との比較結果として求められる評価指標を使用限界値や切替閾値と比較することにより、１つの評価指標から差圧／圧力複合センサの異常の有無を判定することができる。 In the present invention, for example, when the reference pressure is a vacuum pressure, the difference between the first measured pressure detected by the differential pressure sensor and the second measured pressure (atmospheric pressure) and the first detected by the pressure sensor. The difference between the measured pressure and the reference pressure (vacuum pressure) is acquired, and the difference between the acquired first measured pressure and second measured pressure (atmospheric pressure), the first measured pressure and the reference pressure (vacuum pressure). Evaluation index is obtained as a result of comparison with the difference between Then, this evaluation index is compared with a preset use limit value, and when the evaluation index exceeds the use limit value, it is notified that an abnormality has occurred in the differential pressure / pressure combined sensor. If the evaluation index does not exceed the use limit value, the switching threshold set lower than the use limit value is compared with the evaluation index. If the evaluation index exceeds the switch threshold, the differential pressure / Exchange of pressure composite sensor is prompted. In this case, if the differential pressure / pressure combined sensor is normal, the difference between the first measurement pressure and the second measurement pressure (atmospheric pressure) and the difference between the first measurement pressure and the reference pressure (vacuum pressure) are For example, if the atmospheric pressure is subtracted from the difference between the first measured pressure and the reference pressure (vacuum pressure), they should be equal. Therefore, the evaluation index obtained as a comparison result between the difference between the first measurement pressure and the second measurement pressure (atmospheric pressure) and the difference between the first measurement pressure and the reference pressure (vacuum pressure) is used as the use limit value or By comparing with the switching threshold value, the presence / absence of abnormality of the differential pressure / pressure combined sensor can be determined from one evaluation index .

なお、本発明において、基準圧は大気圧や真空圧に限られるものではない。また、本発明において、差圧センサや圧力センサは、それぞれセンサチップとして独立したものであってもよく、１チップ上に形成されたものであってもよい。 In the present invention, the reference pressure is not limited to atmospheric pressure or vacuum pressure. In the present invention, the differential pressure sensor and the pressure sensor may be independent from each other as a sensor chip, or may be formed on one chip.

本発明によれば、第２の測定圧が大気圧とされている状態で、差圧センサによって検出される第１の測定圧と第２の測定圧との差および圧力センサによって検出される第１の測定圧と基準圧との差を取得し、この取得した第１の測定圧と第２の測定圧との差と第１の測定圧と基準圧との差との比較結果として評価指標を求め、この評価指標と予め設定されている使用限界値とを比較し、評価指標が前記使用限界値を超えていた場合には、差圧／圧力複合センサに異常が生じたことを知らせ、評価指標が使用限界値を超えていなかった場合、使用限界値よりも低めに設定されている切替閾値と評価指標とを比較し、評価指標が切替閾値を超えていた場合には、差圧／圧力複合センサの交換を促すようにしたので、差圧／圧力複合センサの正常／異常の判断を１つの評価指標で行うことが可能となり、差圧センサと圧力センサの両方に対して正常時の上下限の範囲を記憶させておく必要がなくなり、処理も簡単となる。 According to the present invention, in a state where the second measured pressure is atmospheric pressure, the difference between the first measured pressure and the second measured pressure detected by the differential pressure sensor and the first detected by the pressure sensor. The difference between the measured pressure of 1 and the reference pressure is acquired, and the evaluation index is obtained as a comparison result between the difference between the acquired first measured pressure and the second measured pressure and the difference between the first measured pressure and the reference pressure. The evaluation index is compared with a preset use limit value, and if the evaluation index exceeds the use limit value, it is notified that an abnormality has occurred in the combined differential pressure / pressure sensor, When the evaluation index does not exceed the use limit value, the switching threshold value set lower than the use limit value is compared with the evaluation index, and when the evaluation index exceeds the switch threshold value, the differential pressure / since to prompt the replacement of the pressure composite sensor, a normal differential pressure / pressure combined sensor / It is possible to perform a normal determination in one metric, it is not necessary to store the range of the upper limit of normal for both the differential pressure sensor and the pressure sensor, the processing becomes simple.

本発明の実施に用いる流量計測機能付きバルブの要部の構成を示す図である。It is a figure which shows the structure of the principal part of the valve | bulb with a flow measurement function used for implementation of this invention. この流量計測機能付きバルブに設けられた差圧／圧力複合センサの要部の断面図である。It is sectional drawing of the principal part of the differential pressure / pressure combined sensor provided in this valve | bulb with a flow measurement function. この流量計測機能付きバルブにおけるコントローラが有する異常診断機能を説明するためのフローチャートである。It is a flowchart for demonstrating the abnormality diagnosis function which the controller in this valve with a flow measurement function has. コントローラからバルブ（流量制御バルブ）へ全閉指令が送られ、さらに２次側が大気開放された状態を示す図である。It is a figure which shows the state in which the full close command was sent from the controller to the valve | bulb (flow control valve), and also the secondary side was open | released to air | atmosphere. バルブ（流量制御バルブ）が全閉とされ、さらに２次側が大気開放された時の差圧／圧力複合センサへの測定圧Ｐ１，Ｐ２の印加状態を示す図である。It is a figure which shows the application state of measured pressure P1, P2 to a differential pressure / pressure combined sensor when a valve (flow control valve) is fully closed and the secondary side is opened to the atmosphere. 異常診断機能により求められる評価指標ΔＰＧのトレンドを例示する図である。It is a figure which illustrates the trend of evaluation index (DELTA) PG calculated | required by the abnormality diagnosis function. コントローラが有する異常診断機能の機能ブロック図である。It is a functional block diagram of the abnormality diagnosis function which a controller has. 静圧ＰＧとして絶対圧を測定するようにした場合の差圧／圧力複合センサの要部の断面図である。It is sectional drawing of the principal part of a differential pressure / pressure combined sensor at the time of making it measure absolute pressure as static pressure PG.

以下、本発明の実施の形態を図面に基づいて詳細に説明する。
図１は本発明の実施に用いる流量計測機能付きバルブ１００の要部の構成を示す図である。図１において、１は流体が流れる流路Ｌ１中に設けられたバルブ（流量制御バルブ）、２はバルブ１を駆動するアクチュエータ、３はアクチュエータ２の駆動を制御するコントローラ、４はバルブ１の上流側（１次側）と下流側（２次側）とをバイパスする管路Ｌ２中に設けられた差圧／圧力複合センサ、５はバルブ１の２次側を大気開放するためのバルブ（大気開放バルブ）である。なお、コントローラ３は実際にはアクチュエータ２に内蔵されているが、この例では分かり易いようにアクチュエータ２の外部に示している。また、コントローラ３はバルブ５の開閉も制御し、通常はバルブ５を全閉としている。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a diagram showing a configuration of a main part of a valve 100 with a flow rate measuring function used for implementing the present invention. In FIG. 1, 1 is a valve (flow rate control valve) provided in a flow path L1 through which fluid flows, 2 is an actuator that drives the valve 1, 3 is a controller that controls driving of the actuator 2, and 4 is upstream of the valve 1. The differential pressure / pressure combined sensor 5 is provided in the pipe L2 that bypasses the side (primary side) and the downstream side (secondary side), and a valve 5 for opening the secondary side of the valve 1 to the atmosphere (atmosphere Open valve). The controller 3 is actually built in the actuator 2, but in this example, it is shown outside the actuator 2 for easy understanding. The controller 3 also controls the opening and closing of the valve 5, and normally the valve 5 is fully closed.

図２に差圧／圧力複合センサ４の要部の断面図を示す。図２において、４１は金属製のボディであり、管路Ｌ２の上流側管路Ｌ２１と下流側管路Ｌ２２との間に設けられている。ボディ４１は、内部空間として、隔壁４１−１によって区画された第１の空間４１−２と第２の空間４１−３とを有している。隔壁４１−１には、第１の空間４１−２と第２の空間４１−３とを連通する貫通路４１−４と、第１の空間４１−２とボディ４１の外部空間とを連通する連通路４１−５が設けられている。第１の空間４１−２の開口部４１−２ａには第１の金属ダイアフラム（第１の受圧ダイアフラム）４２−１が設けられており、第２の空間４１−３の開口部４１−３ａには第２の金属ダイアフラム（第２の受圧ダイアフラム）４２−２が設けられている。   FIG. 2 shows a cross-sectional view of the main part of the differential pressure / pressure composite sensor 4. In FIG. 2, 41 is a metal body and is provided between the upstream line L21 and the downstream line L22 of the line L2. The body 41 has a first space 41-2 and a second space 41-3 partitioned by a partition wall 41-1 as internal spaces. The partition wall 41-1 communicates a through passage 41-4 that communicates the first space 41-2 and the second space 41-3, and the first space 41-2 and the external space of the body 41. A communication path 41-5 is provided. A first metal diaphragm (first pressure receiving diaphragm) 42-1 is provided in the opening 41-2a of the first space 41-2, and the opening 41-3a of the second space 41-3 is provided in the opening 41-3a. Is provided with a second metal diaphragm (second pressure receiving diaphragm) 42-2.

４３は差圧センサチップであり、その中央部を薄肉状としてセンサダイアフラムＳ１が形成されており、このセンサダイアフラムＳ１の一方の面４３ａに対する他方の面４３ｂに凹部４３ｃが形成されている。差圧センサチップ４３は、センサダイアフラムＳ１の一方の面４３ａを第１の受圧ダイアフラム４２−１に臨むようにして、センサダイアフラムＳ１の他方の面４３ｂに通ずる連通路４４を隔壁４１−１の貫通路４１−４に連通させるようにして、第１の空間４１−２に位置する隔壁４１−１の壁面４１−１ａに台座４５を介して接合されている。台座４５は筒状とされており、その中空部４５ａと差圧センサチップ４３の凹部４３ｃとによって、センサダイアフラムＳ１の他方の面４３ｂに通ずる連通路４４が形成されている。差圧センサチップ４３はシリコンなどから成り、台座４５はシリコンやガラスなどから成る。   Reference numeral 43 denotes a differential pressure sensor chip. A sensor diaphragm S1 is formed with a thin central portion, and a recess 43c is formed on the other surface 43b of the sensor diaphragm S1 with respect to one surface 43a. In the differential pressure sensor chip 43, the one side 43a of the sensor diaphragm S1 faces the first pressure receiving diaphragm 42-1, and the communication path 44 that communicates with the other side 43b of the sensor diaphragm S1 passes through the passage 41 of the partition wall 41-1. -4 is joined to the wall surface 41-1a of the partition wall 41-1 located in the first space 41-2 via a pedestal 45 so as to communicate with the first space 41-2. The pedestal 45 has a cylindrical shape, and a communication passage 44 that communicates with the other surface 43b of the sensor diaphragm S1 is formed by the hollow portion 45a and the concave portion 43c of the differential pressure sensor chip 43. The differential pressure sensor chip 43 is made of silicon or the like, and the base 45 is made of silicon or glass.

４６は圧力センサチップであり、その中央部を薄肉状としてセンサダイアフラムＳ２が形成されており、このセンサダイアフラムＳ２の一方の面４６ａに対する他方の面４６ｂに凹部４６ｃが形成されている。圧力センサチップ４６は、センサダイアフラムＳ２の一方の面４６ａを第１の受圧ダイアフラム４２−１に臨むようにして、センサダイアフラムＳ２の他方の面４６ｂに通ずる連通路４７を隔壁４１−１の連通路４１−５に連通させるようにして、第１の空間４１−２に位置する隔壁４１−１の壁面４１−１ａに台座４８を介して接合されている。台座４８は筒状とされており、その中空部４８ａと圧力センサチップ４６の凹部４６ｃとによって、センサダイアフラムＳ２の他方の面４６ｂに通ずる連通路４７が形成されている。圧力センサチップ４６はシリコンなどから成り、台座４８はシリコンやガラスなどから成る。   Reference numeral 46 denotes a pressure sensor chip. A sensor diaphragm S2 is formed with a thin central portion, and a recess 46c is formed on the other surface 46b of the sensor diaphragm S2 with respect to one surface 46a. The pressure sensor chip 46 has a communication passage 47 that communicates with the other surface 46b of the sensor diaphragm S2 such that one surface 46a of the sensor diaphragm S2 faces the first pressure receiving diaphragm 42-1, and a communication passage 41- of the partition wall 41-1. 5 is joined to the wall surface 41-1a of the partition wall 41-1 located in the first space 41-2 via a pedestal 48. The pedestal 48 has a cylindrical shape, and a communication passage 47 communicating with the other surface 46b of the sensor diaphragm S2 is formed by the hollow portion 48a and the concave portion 46c of the pressure sensor chip 46. The pressure sensor chip 46 is made of silicon or the like, and the base 48 is made of silicon or glass.

ボディ４１には、第１の空間４１−２を第１の封入室４９−１として、第１の圧力伝達用媒体４０−１が封止されている。また、第２の空間４１−３および隔壁４１−１の貫通路４１−４および差圧センサチップ４３のセンサダイアフラムＳ１の他方の面４３−１ｂに通ずる連通路４４を第２の封入室４９−２として、第２の圧力伝達用媒体４０−２が封止されている。圧力伝達用媒体４０−１，４０−２としては、シリコーンオイル等の非圧縮性流体が用いられる。   The body 41 is sealed with the first pressure transmission medium 40-1 with the first space 41-2 as the first enclosure 49-1. Further, the communication path 44 that communicates with the second space 41-3, the through passage 41-4 of the partition wall 41-1 and the other surface 43-1b of the sensor diaphragm S1 of the differential pressure sensor chip 43 is provided in the second enclosure 49-. 2, the second pressure transmission medium 40-2 is sealed. As the pressure transmission media 40-1 and 40-2, an incompressible fluid such as silicone oil is used.

この差圧／圧力複合センサ４では、バルブ１の１次側の流体圧力が測定圧Ｐ１として第１の受圧ダイアフラム４２−１に加わり、この第１の受圧ダイアフラム４２−１が受けた測定圧Ｐ１が第１の圧力伝達用媒体４０−１を介して差圧センサチップ４３のセンサダイアフラムＳ１の一方の面４３ａに伝達され、バルブ１の２次側の流体圧力が測定圧Ｐ２として第２の受圧ダイアフラム４２−２に加わり、この第１の受圧ダイアフラム４２−２が受けた測定圧Ｐ２が第２の圧力伝達用媒体４０−２を介して差圧センサチップ４３のセンサダイアフラムＳ１の他方の面４３ｂに伝達される。その結果、差圧センサチップ４３のセンサダイアフラムＳ１が測定圧Ｐ１と測定圧Ｐ２との圧力差に応じて撓み、その圧力差に応じた信号が差圧ΔＰを示す信号（以下、この信号を差圧信号ΔＰと呼ぶ）として差圧センサチップ４３から出力される。この差圧信号ΔＰはコントローラ３へ送られる。差圧センサチップ４３のセンサダイアフラムＳ１には、差圧信号ΔＰを出力するための構成として、圧力変化に応じて抵抗値が変化する歪抵抗ゲージが形成されている。   In this differential pressure / pressure combined sensor 4, the fluid pressure on the primary side of the valve 1 is applied to the first pressure receiving diaphragm 42-1 as the measured pressure P1, and the measured pressure P1 received by the first pressure receiving diaphragm 42-1. Is transmitted to one surface 43a of the sensor diaphragm S1 of the differential pressure sensor chip 43 via the first pressure transmission medium 40-1, and the fluid pressure on the secondary side of the valve 1 is the second pressure receiving pressure as the measurement pressure P2. The measured pressure P2 received by the first pressure receiving diaphragm 42-2 is added to the diaphragm 42-2, and the other surface 43b of the sensor diaphragm S1 of the differential pressure sensor chip 43 via the second pressure transmission medium 40-2. Is transmitted to. As a result, the sensor diaphragm S1 of the differential pressure sensor chip 43 bends according to the pressure difference between the measured pressure P1 and the measured pressure P2, and a signal corresponding to the pressure difference indicates a differential pressure ΔP (hereinafter, this signal is referred to as a difference). Is output from the differential pressure sensor chip 43 as a pressure signal ΔP). This differential pressure signal ΔP is sent to the controller 3. The sensor diaphragm S1 of the differential pressure sensor chip 43 is formed with a strain resistance gauge whose resistance value changes according to the pressure change as a configuration for outputting the differential pressure signal ΔP.

また、この差圧／圧力複合センサ４では、バルブ１の１次側の流体圧力が測定圧Ｐ１として第１の受圧ダイアフラム４２−１に加わり、この第１の受圧ダイアフラム４２−１が受けた測定圧Ｐ１が第１の圧力伝達用媒体４０−１を介して圧力センサチップ４６のセンサダイアフラムＳ２の一方の面４６ａに伝達され、ボディ１の外部空間の圧力（大気圧）が基準圧Ｐ３として圧力センサチップ４６のセンサダイアフラムＳ２の他方の面４６ｂに伝達される。その結果、圧力センサチップ４６のセンサダイアフラムＳ２が測定圧Ｐ１と基準圧（大気圧）Ｐ３との圧力差に応じて撓み、その圧力差に応じた信号が静圧ＰＧを示す信号（以下、この信号を静圧信号ＰＧと呼ぶ）として圧力センサチップ４６から出力される。この静圧信号ＰＧはコントローラ３へ送られる。圧力センサチップ４６のセンサダイアフラムＳ２には、静圧信号ＰＧを出力するための構成として、圧力変化に応じて抵抗値が変化する歪抵抗ゲージが形成されている。   Further, in the differential pressure / pressure combined sensor 4, the fluid pressure on the primary side of the valve 1 is applied to the first pressure receiving diaphragm 42-1 as the measurement pressure P 1, and the measurement received by the first pressure receiving diaphragm 42-1. The pressure P1 is transmitted to one surface 46a of the sensor diaphragm S2 of the pressure sensor chip 46 via the first pressure transmission medium 40-1, and the pressure (atmospheric pressure) in the external space of the body 1 is used as the reference pressure P3. It is transmitted to the other surface 46b of the sensor diaphragm S2 of the sensor chip 46. As a result, the sensor diaphragm S2 of the pressure sensor chip 46 bends according to the pressure difference between the measurement pressure P1 and the reference pressure (atmospheric pressure) P3, and the signal corresponding to the pressure difference indicates a signal indicating the static pressure PG (hereinafter referred to as this). The signal is referred to as a static pressure signal PG) and output from the pressure sensor chip 46. This static pressure signal PG is sent to the controller 3. The sensor diaphragm S2 of the pressure sensor chip 46 is formed with a strain resistance gauge whose resistance value changes according to a pressure change as a configuration for outputting the static pressure signal PG.

コントローラ３は、プロセッサや記憶装置からなるハードウェアと、これらのハードウェアと協働して各種機能を実現させるプログラムとによって実現され、基本機能としてバルブ１の流量制御機能に加え、本実施の形態特有の機能として差圧／圧力複合センサ４の異常診断機能を有している。   The controller 3 is realized by hardware including a processor and a storage device, and a program for realizing various functions in cooperation with these hardware. In addition to the flow rate control function of the valve 1, the controller 3 is provided as a basic function. As a unique function, an abnormality diagnosis function of the differential pressure / pressure combined sensor 4 is provided.

〔流量制御機能〕
先ず、コントローラ３が有する流量制御機能について説明する。コントローラ３は、差圧／圧力複合センサ４からの差圧信号ΔＰを入力とし、この入力された差圧信号ΔＰに基づいて、バルブ１を流れている現在の流体の流量Ｑｐｖを計測する。そして、この計測した流量Ｑｐｖと上位から与えられる設定流量Ｑｓｐとを比較し、Ｑｐｖ＝Ｑｓｐとなるようにアクチュエータ２へ駆動指令を送り、バルブ１の開度を制御する。 [Flow control function]
First, the flow rate control function of the controller 3 will be described. The controller 3 receives the differential pressure signal ΔP from the differential pressure / pressure combined sensor 4 and measures the flow rate Qpv of the current fluid flowing through the valve 1 based on the input differential pressure signal ΔP. Then, the measured flow rate Qpv is compared with the set flow rate Qsp given from the host, and a drive command is sent to the actuator 2 so that Qpv = Qsp, and the opening degree of the valve 1 is controlled.

〔異常診断機能〕
次に、コントローラ３が有する異常診断機能について説明する。コントローラ３は、一定期間が経過する毎に異常診断として、差圧／圧力複合センサ４の定期検査を実行する。図３にコントローラ３が実行する定期検査のフローチャートを示す。 (Abnormality diagnosis function)
Next, the abnormality diagnosis function of the controller 3 will be described. The controller 3 executes a periodic inspection of the differential pressure / pressure combined sensor 4 as an abnormality diagnosis every time a certain period elapses. FIG. 3 shows a flowchart of periodic inspection executed by the controller 3.

コントローラ３は、定期検査の実行日となると（ステップＳ１０１のＹＥＳ）、図４に示すように、アクチュエータ２へ全閉指令を送り、バルブ（流量制御バルブ）１を全閉とし、さらにバルブ（大気開放バルブ）５へ全開指令を送り、バルブ５を全開とする（ステップＳ１０２）。これにより、バルブ１の２次側が大気開放され、図５に示すように、差圧／圧力複合センサ４における差圧センサチップ４３のセンサダイアフラムＳ１の他方の面４３ｂに加えられる測定圧Ｐ２が大気圧とされる。このとき、差圧センサチップ４３のセンサダイアフラムＳ１の一方の面４３ａと圧力センサチップ４６のセンサダイアフラムＳ２の一方の面４６ａには、バルブ１の１次側の流体圧力が測定圧Ｐ１として加わっている。 When the execution date of the periodic inspection comes (YES in step S101), the controller 3 sends a fully-close command to the actuator 2 to fully close the valve (flow control valve) 1 as shown in FIG. A fully open command is sent to the (open valve) 5 to open the valve 5 fully (step S102). As a result, the secondary side of the valve 1 is opened to the atmosphere, and as shown in FIG. 5, the measured pressure P2 applied to the other surface 43b of the sensor diaphragm S1 of the differential pressure sensor chip 43 in the differential pressure / pressure composite sensor 4 is large. Atmospheric pressure. At this time, the fluid pressure on the primary side of the valve 1 is applied as the measurement pressure P1 to one surface 43a of the sensor diaphragm S1 of the differential pressure sensor chip 43 and one surface 46a of the sensor diaphragm S2 of the pressure sensor chip 46. Yes.

コントローラ３は、バルブ１の２次側を大気開放させた状態（測定圧Ｐ２が大気圧とされている状態）で、その時の差圧センサチップ４３からの差圧信号ΔＰと圧力センサチップ４６からの静圧信号ＰＧを取得する（ステップＳ１０３）。すなわち、差圧センサチップ４３によって検出される測定圧Ｐ１（１次側の流体圧力）と測定圧Ｐ２（大気圧）との差である差圧ΔＰを取得し、圧力センサチップ４６によって検出される測定圧Ｐ１（１次側の流体圧力）と基準圧Ｐ３（大気圧）との差である静圧ＰＧを取得する。   In a state where the secondary side of the valve 1 is opened to the atmosphere (a state in which the measured pressure P2 is an atmospheric pressure), the controller 3 receives the differential pressure signal ΔP from the differential pressure sensor chip 43 and the pressure sensor chip 46 at that time. The static pressure signal PG is acquired (step S103). That is, a differential pressure ΔP, which is a difference between the measured pressure P1 (primary fluid pressure) detected by the differential pressure sensor chip 43 and the measured pressure P2 (atmospheric pressure), is acquired and detected by the pressure sensor chip 46. A static pressure PG which is a difference between the measurement pressure P1 (primary fluid pressure) and the reference pressure P3 (atmospheric pressure) is acquired.

そして、コントローラ３は、その取得した差圧ΔＰと静圧ＰＧとの差を評価指標ΔＰＧとして求める（ステップＳ１０４）。この時、差圧／圧力複合センサ４が正常であれば、取得した差圧ΔＰと静圧ＰＧとは等しく、評価指標ΔＰＧは零となるはずである。   And the controller 3 calculates | requires the difference of the acquired differential pressure (DELTA) P and static pressure PG as evaluation parameter | index (DELTA) PG (step S104). At this time, if the differential pressure / pressure combined sensor 4 is normal, the acquired differential pressure ΔP and the static pressure PG should be equal, and the evaluation index ΔPG should be zero.

次に、コントローラ３は、その求めた評価指標ΔＰＧと予め設定されている使用限界値とを比較する（ステップＳ１０５）。ここで、評価指標ΔＰＧが使用限界値を超えていれば（ステップＳ１０５のＹＥＳ）、直ちに警報信号を出力し（ステップＳ１０８）、差圧／圧力複合センサ４に異常が生じたことを知らせる。   Next, the controller 3 compares the obtained evaluation index ΔPG with a preset use limit value (step S105). If the evaluation index ΔPG exceeds the use limit value (YES in step S105), an alarm signal is immediately output (step S108) to notify the differential pressure / pressure composite sensor 4 that an abnormality has occurred.

評価指標ΔＰＧが使用限界値を超えていなければ（ステップＳ１０５のＮＯ）、コントローラ３は、評価指標ΔＰＧと切替閾値とを比較する（ステップＳ１０６）。この切替閾値は使用限界値よりも低めに設定されている。コントローラ３は、評価指標ΔＰＧが切替閾値を超えていれば（ステップＳ１０６のＹＥＳ）、センサ交換信号を出力し（ステップＳ１０６）、差圧／圧力複合センサ４の交換を促す。評価指標ΔＰＧが切替閾値を超えていなければ（ステップＳ１０６のＮＯ）、ステップＳ１０１へ戻り、定期検査を繰り返す。   If the evaluation index ΔPG does not exceed the use limit value (NO in step S105), the controller 3 compares the evaluation index ΔPG with the switching threshold (step S106). This switching threshold is set lower than the use limit value. If the evaluation index ΔPG exceeds the switching threshold value (YES in step S106), the controller 3 outputs a sensor replacement signal (step S106) and prompts replacement of the differential pressure / pressure combined sensor 4. If the evaluation index ΔPG does not exceed the switching threshold value (NO in step S106), the process returns to step S101 and the periodic inspection is repeated.

このようにして、コントローラ３は、一定期間が経過する毎に異常診断として、差圧／圧力複合センサ４の定期検査を実行する。図６に評価指標ΔＰＧのトレンドを例示する。通常は、図６に示されるように、評価指標ΔＰＧは時間の経過に伴って大きくなって行く。この場合、一定期間が経過する毎に求められる評価指標ΔＰＧが切替閾値を超えた時点で、センサ交換信号が出力される。   In this way, the controller 3 performs a periodic inspection of the differential pressure / pressure combined sensor 4 as an abnormality diagnosis every time a certain period elapses. FIG. 6 illustrates a trend of the evaluation index ΔPG. Normally, as shown in FIG. 6, the evaluation index ΔPG increases with the passage of time. In this case, the sensor replacement signal is output when the evaluation index ΔPG obtained every time a certain period elapses exceeds the switching threshold.

これにより、大きな出力異常が認められる前に異常を察知して、差圧／圧力複合センサ４を交換することが可能となり、トラブルを最小限に抑えることが可能となる。また、差圧／圧力複合センサ４を使用限界直前まで有効に活用でき、交換コストを削減することが可能となる。また、評価指標ΔＰＧが使用限界値を超えた場合には直ちに警報信号が出力されるので、差圧／圧力複合センサ４の大きな出力異常にも速やかに対処することが可能となる。また、差圧／圧力複合センサ４を取り外して検査するなど、差圧／圧力複合センサ４の正常／異常を定期的に確認する必要もない。   As a result, it is possible to detect the abnormality before the large output abnormality is recognized and replace the combined differential pressure / pressure sensor 4, thereby minimizing trouble. Further, the differential pressure / pressure combined sensor 4 can be effectively utilized until just before the use limit, and the replacement cost can be reduced. Further, when the evaluation index ΔPG exceeds the use limit value, an alarm signal is immediately output, so that it is possible to quickly cope with a large output abnormality of the differential pressure / pressure composite sensor 4. Further, it is not necessary to periodically check the normality / abnormality of the differential pressure / pressure composite sensor 4 such as removing and inspecting the differential pressure / pressure composite sensor 4.

また、差圧／圧力複合センサ４の正常／異常の判断を１つの評価指標ΔＰＧで行うことができるので、差圧センサチップ４３と圧力センサチップ４６の両方に対して正常時の上下限の範囲を記憶させておく必要がなくなり、処理も簡単となる。   In addition, since the normal / abnormal judgment of the differential pressure / pressure combined sensor 4 can be performed with one evaluation index ΔPG, the upper and lower limits of the normal range for both the differential pressure sensor chip 43 and the pressure sensor chip 46. Is not required to be stored, and the processing is simplified.

図７にコントローラ３が有する異常診断機能の機能ブロック図を示す。同図において、３−１は差圧・静圧取得部、３−２は評価指標算出部、３−３は異常判定部である。   FIG. 7 shows a functional block diagram of the abnormality diagnosis function that the controller 3 has. In the figure, 3-1 is a differential pressure / static pressure acquisition unit, 3-2 is an evaluation index calculation unit, and 3-3 is an abnormality determination unit.

差圧・静圧取得部３−１は、一定期間が経過する毎に、アクチュエータ２にバルブ１の全閉指令を送り、さらにバルブ５に全開指令を送り、差圧センサチップ４３からの差圧信号ΔＰと圧力センサ４６からの静圧信号ＰＧを取得する。   The differential pressure / static pressure acquisition unit 3-1 sends a full-close command for the valve 1 to the actuator 2 and sends a full-open command to the valve 5 every time a certain period of time elapses, and the differential pressure from the differential pressure sensor chip 43. The signal ΔP and the static pressure signal PG from the pressure sensor 46 are acquired.

評価指標算出部３−２は、差圧・静圧取得部３−１が取得した差圧信号ΔＰから得られる差圧ΔＰと静圧信号ＰＧから得られる静圧ＰＧとの差を評価指標ΔＰＧとして求める。   The evaluation index calculation unit 3-2 evaluates the difference between the differential pressure ΔP obtained from the differential pressure signal ΔP acquired by the differential pressure / static pressure acquisition unit 3-1 and the static pressure PG obtained from the static pressure signal PG. Asking.

異常判定部３−３は、評価指標算出部３−２からの評価指標ΔＰＧを入力とし、評価指標ΔＰＧが使用限界値を超えていれば警報信号を出力し、評価指標ΔＰＧが使用限界値を超えておらず、切替閾値を超えていればセンサ交換信号を出力する。   The abnormality determination unit 3-3 receives the evaluation index ΔPG from the evaluation index calculation unit 3-2, outputs an alarm signal if the evaluation index ΔPG exceeds the use limit value, and the evaluation index ΔPG indicates the use limit value. If it does not exceed the switching threshold value, a sensor replacement signal is output.

なお、上述した実施の形態において、コントローラ３からのセンサ交換信号や警報信号は、通信で上位装置へ送るようにしてもよく、流量計測機能付きバルブ１００においてその信号に基づく表示を行わせるようにしてもよい。   In the above-described embodiment, the sensor replacement signal and the alarm signal from the controller 3 may be sent to the host device by communication, and the valve 100 with a flow rate measuring function performs display based on the signal. May be.

また、上述した実施の形態では、基準圧Ｐ３を大気圧とし静圧ＰＧとしてゲージ圧を測定するものとしたが、基準圧Ｐ３を真空圧とし静圧ＰＧとして絶対圧を測定するようにしてもよい。   In the above-described embodiment, the gauge pressure is measured using the reference pressure P3 as the atmospheric pressure and the static pressure PG. However, the absolute pressure may be measured using the reference pressure P3 as the vacuum pressure and the static pressure PG. Good.

図８に静圧ＰＧとして絶対圧を測定するようにした場合の差圧／圧力複合センサ４の要部の断面図を示す。以下、図２に示した差圧／圧力複合センサ４と区別するために、図２に示した差圧／圧力複合センサ４を差圧／圧力複合センサ４Ａとし、図８に示した差圧／圧力複合センサ４を差圧／圧力複合センサ４Ｂとする。   FIG. 8 shows a cross-sectional view of the main part of the differential pressure / pressure combined sensor 4 when the absolute pressure is measured as the static pressure PG. Hereinafter, in order to distinguish from the differential pressure / pressure composite sensor 4 shown in FIG. 2, the differential pressure / pressure composite sensor 4 shown in FIG. 2 is referred to as a differential pressure / pressure composite sensor 4A, and the differential pressure / pressure composite sensor 4 shown in FIG. The pressure composite sensor 4 is referred to as a differential pressure / pressure composite sensor 4B.

この差圧／圧力複合センサ４Ｂでは、差圧／圧力複合センサ４Ａがボディ４１に連通路４１−５を設けていたのに対し、この連通路４１−５をボディ４１からなくし、圧力センサチップ４６のセンサダイアフラムＳ２の他方の面４６ｂに通ずる連通路４７を真空としている。これにより、基準圧Ｐ３が真空圧とされ、絶対圧を示す静圧信号ＰＧがコントローラ３へ送られるものとなる。   In this differential pressure / pressure combined sensor 4B, the differential pressure / pressure combined sensor 4A is provided with the communication path 41-5 in the body 41, whereas the communication path 41-5 is eliminated from the body 41, and the pressure sensor chip 46 is provided. The communication passage 47 communicating with the other surface 46b of the sensor diaphragm S2 is evacuated. Thereby, the reference pressure P3 is set to the vacuum pressure, and the static pressure signal PG indicating the absolute pressure is sent to the controller 3.

この差圧／圧力複合センサ４Ｂでは、静圧信号ＰＧから得られる静圧ＰＧ（絶対圧）から大気圧を差し引いた値を静圧ＰＧ’として求め、差圧信号ΔＰから得られる差圧ΔＰとその求めた静圧ＰＧ’との差を評価指標ΔＰＧとして求める。この時、差圧／圧力複合センサ４Ｂが正常であれば、差圧ΔＰと静圧ＰＧ’とは等しく、評価指標ΔＰＧは零となるはずである。したがって、差圧ΔＰと静圧ＰＧ’との差を評価指標ΔＰＧとすることにより、上述した実施の形態と同様にして差圧／圧力複合センサ４Ｂの異常の有無を判定することができる。   In this differential pressure / pressure combined sensor 4B, a value obtained by subtracting the atmospheric pressure from the static pressure PG (absolute pressure) obtained from the static pressure signal PG is obtained as a static pressure PG ′, and the differential pressure ΔP obtained from the differential pressure signal ΔP is obtained. The difference from the obtained static pressure PG ′ is obtained as an evaluation index ΔPG. At this time, if the differential pressure / pressure combined sensor 4B is normal, the differential pressure ΔP and the static pressure PG ′ are equal, and the evaluation index ΔPG should be zero. Therefore, by using the difference between the differential pressure ΔP and the static pressure PG ′ as the evaluation index ΔPG, the presence / absence of abnormality of the differential pressure / pressure sensor 4B can be determined in the same manner as in the above-described embodiment.

なお、この場合、静圧ＰＧ（絶対圧）から差し引く大気圧は、標準大気圧としてもよいし、その時の大気圧としてもよい。また、差圧信号ΔＰから得られる差圧ΔＰに大気圧を加算した値を差圧ΔＰ’として求め、この求めた差圧ΔＰ’と静圧信号ＰＧから得られる静圧ＰＧ（絶対圧）との差を評価指標ΔＰＧとして求めるようにしてもよい。   In this case, the atmospheric pressure subtracted from the static pressure PG (absolute pressure) may be the standard atmospheric pressure or the atmospheric pressure at that time. Further, a value obtained by adding the atmospheric pressure to the differential pressure ΔP obtained from the differential pressure signal ΔP is obtained as a differential pressure ΔP ′, and the obtained differential pressure ΔP ′ and the static pressure PG (absolute pressure) obtained from the static pressure signal PG are obtained. May be obtained as the evaluation index ΔPG.

また、上述した実施の形態では、差圧センサを差圧センサチップ４３とし、圧力センサを圧力センサチップ４６とし、ボディ４１内にそれぞれ独立して収容するようにしたが、差圧センサと圧力センサを１チップ上に形成して１つのセンサチップとし、このセンサチップをボディ４１内に収容するようにしてもよい。   In the above-described embodiment, the differential pressure sensor is the differential pressure sensor chip 43 and the pressure sensor is the pressure sensor chip 46, and each is housed independently in the body 41. May be formed on one chip to form one sensor chip, and this sensor chip may be accommodated in the body 41.

また、上述した実施の形態では、差圧センサチップ４３や圧力センサチップ４６を圧力変化に応じて抵抗値が変化する歪抵抗ゲージを形成したタイプとしたが、静電容量式のセンサチップとしてもよい。静電容量式のセンサチップは、所定の空間（容量室）を備えた基板と、その基板の空間上に配置されたダイアフラムと、基板に形成された固定電極と、ダイアフラムに形成された可動電極とを備えている。ダイアフラムが圧力を受けて変形することで、可動電極と固定電極との間隔が変化してその間の静電容量が変化する。   In the above-described embodiment, the differential pressure sensor chip 43 and the pressure sensor chip 46 are of the type in which a strain resistance gauge whose resistance value changes according to a pressure change is formed. Good. A capacitance type sensor chip includes a substrate having a predetermined space (capacitance chamber), a diaphragm disposed in the space of the substrate, a fixed electrode formed on the substrate, and a movable electrode formed on the diaphragm. And. When the diaphragm is deformed by receiving pressure, the distance between the movable electrode and the fixed electrode changes, and the capacitance between them changes.

〔実施の形態の拡張〕
以上、実施の形態を参照して本発明を説明したが、本発明は上記の実施の形態に限定されるものではない。本発明の構成や詳細には、本発明の技術思想の範囲内で当業者が理解し得る様々な変更をすることができる。 [Extension of the embodiment]
The present invention has been described above with reference to the embodiment. However, the present invention is not limited to the above embodiment. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the scope of the technical idea of the present invention.

１…バルブ（流量制御バルブ）、２…アクチュエータ、３…コントローラ、Ｌ１…流路、Ｌ２…管路、Ｌ２１…上流側管路、Ｌ２２…下流側管路、４（４Ａ，４Ｂ）…差圧／圧力複合センサ、５…バルブ（大気開放バルブ）、４０−１…第１の圧力伝達用媒体、４０−２…第２の圧力伝達用媒体、４１…ボディ、４１−１…隔壁、４１−２…第１の空間、４１−３…第２の空間、４１−４…貫通路、４１−５…連通路、４２−１…第１の受圧ダイアフラム、４２−２…第２の受圧ダイアフラム、４３…差圧センサチップ、Ｓ１…センサダイアフラム、４４…連通路、４５…台座、４６…圧力センサチップ、Ｓ２…センサダイアフラム、４７…連通路、４８…台座、４９−１…第１の封入室、４９−２…第２の封入室、３−１…差圧・静圧取得部、３−２…評価指標算出部、３−３…異常判定部、１００…流量計測機能付きバルブ。   DESCRIPTION OF SYMBOLS 1 ... Valve (flow control valve), 2 ... Actuator, 3 ... Controller, L1 ... Flow path, L2 ... Pipe line, L21 ... Upstream side pipe, L22 ... Downstream side pipe, 4 (4A, 4B) ... Differential pressure / Pressure composite sensor, 5 ... valve (atmospheric release valve), 40-1 ... first pressure transmission medium, 40-2 ... second pressure transmission medium, 41 ... body, 41-1 ... partition wall, 41- 2 ... 1st space, 41-3 ... 2nd space, 41-4 ... Through-passage, 41-5 ... Communication path, 42-1 ... 1st pressure receiving diaphragm, 42-2 ... 2nd pressure receiving diaphragm, 43 ... differential pressure sensor chip, S1 ... sensor diaphragm, 44 ... communication path, 45 ... pedestal, 46 ... pressure sensor chip, S2 ... sensor diaphragm, 47 ... communication path, 48 ... pedestal, 49-1 ... first enclosure chamber , 49-2 ... second sealing chamber, 3-1 ... differential pressure / static pressure acquisition , 3-2 ... evaluation index calculating unit, 3-3 ... abnormality determining unit, 100 ... flow measurement function valve.

Claims (3)

流体が流れる流路中に設けられた流量制御バルブの上流側と下流側とをバイパスする管路中に設けられ、前記流量制御バルブの上流側の流体圧力を第１の測定圧、前記流量制御バルブの下流側の流体圧力を第２の測定圧とし、前記第１の測定圧と第２の測定圧との差を検出する差圧センサと、前記第１の測定圧と基準圧との差を検出する圧力センサとを備えた差圧／圧力複合センサの異常診断方法であって、
前記流量制御バルブの開度を全閉とし、さらに前記流量制御バルブの下流側を大気開放することによって、前記第２の測定圧を大気圧とする第１ステップと、
前記第１ステップによって前記第２の測定圧が大気圧とされている状態で、前記差圧センサによって検出される前記第１の測定圧と第２の測定圧との差および前記圧力センサによって検出される前記第１の測定圧と基準圧との差を取得し、この取得した第１の測定圧と第２の測定圧との差と第１の測定圧と基準圧との差との比較結果として評価指標を求める第２ステップと、
前記第２ステップによって求められた評価指標と予め設定されている使用限界値とを比較し、前記評価指標が前記使用限界値を超えていた場合には、前記差圧／圧力複合センサに異常が生じたことを知らせる第３ステップと、
前記第３ステップにおいて前記評価指標が前記使用限界値を超えていなかった場合、前記使用限界値よりも低めに設定されている切替閾値と前記評価指標とを比較し、前記評価指標が前記切替閾値を超えていた場合には、前記差圧／圧力複合センサの交換を促す第４ステップと
を備えることを特徴とする差圧／圧力複合センサの異常診断方法。 Provided in a conduit that bypasses the upstream side and the downstream side of the flow rate control valve provided in the flow path through which the fluid flows, the fluid pressure upstream of the flow rate control valve is the first measured pressure, and the flow rate control A differential pressure sensor for detecting a difference between the first measured pressure and the second measured pressure, using a fluid pressure downstream of the valve as a second measured pressure, and a difference between the first measured pressure and a reference pressure An abnormality diagnosis method for a differential pressure / pressure combined sensor comprising a pressure sensor for detecting
A first step in which the opening of the flow control valve is fully closed, and the downstream side of the flow control valve is opened to the atmosphere so that the second measured pressure is atmospheric pressure;
In the state where the second measured pressure is atmospheric pressure by the first step , the difference between the first measured pressure and the second measured pressure detected by the differential pressure sensor and the pressure sensor are detected. The difference between the first measured pressure and the reference pressure is acquired, and the difference between the acquired first measured pressure and the second measured pressure is compared with the difference between the first measured pressure and the reference pressure. As a result, a second step for obtaining an evaluation index ,
The evaluation index obtained in the second step is compared with a preset use limit value, and if the evaluation index exceeds the use limit value, there is an abnormality in the differential pressure / pressure combined sensor. A third step to let it happen,
When the evaluation index does not exceed the usage limit value in the third step, the switching threshold set lower than the usage limit value is compared with the evaluation index, and the evaluation index is the switching threshold. A differential pressure / pressure combined sensor abnormality diagnosis method , comprising: a fourth step that prompts replacement of the combined differential pressure / pressure sensor . 請求項１に記載された差圧／圧力複合センサの異常診断方法において、
前記基準圧は大気圧であり、
前記第２ステップは、
前記第１ステップによって前記第２の測定圧が大気圧とされている状態で、前記差圧センサによって検出される前記第１の測定圧と第２の測定圧との差および前記圧力センサによって検出される前記第１の測定圧と基準圧との差を取得し、この取得した第１の測定圧と第２の測定圧との差と第１の測定圧と基準圧との差との比較結果として前記評価指標を求める
ことを特徴とする差圧／圧力複合センサの異常診断方法。 The abnormality diagnosis method for a differential pressure / pressure combined sensor according to claim 1,
The reference pressure is atmospheric pressure,
The second step includes
In the state where the second measured pressure is atmospheric pressure by the first step , the difference between the first measured pressure and the second measured pressure detected by the differential pressure sensor and the pressure sensor are detected. The difference between the first measured pressure and the reference pressure is acquired, and the difference between the acquired first measured pressure and the second measured pressure is compared with the difference between the first measured pressure and the reference pressure. As a result, the evaluation index is obtained. An abnormality diagnosis method for a differential pressure / pressure combined sensor. 請求項１に記載された差圧／圧力複合センサの異常診断方法において、
前記基準圧は真空圧であり、
前記第２ステップは、
前記第１ステップによって前記第２の測定圧が大気圧とされている状態で、前記差圧センサによって検出される前記第１の測定圧と第２の測定圧との差および前記圧力センサによって検出される前記第１の測定圧と基準圧との差を取得し、この取得した第１の測定圧と第２の測定圧との差と第１の測定圧と基準圧との差との比較結果として前記評価指標を求める
ことを特徴とする差圧／圧力複合センサの異常診断方法。 The abnormality diagnosis method for a differential pressure / pressure combined sensor according to claim 1,
The reference pressure is a vacuum pressure,
The second step includes
In the state where the second measured pressure is atmospheric pressure by the first step , the difference between the first measured pressure and the second measured pressure detected by the differential pressure sensor and the pressure sensor are detected. The difference between the first measured pressure and the reference pressure is acquired, and the difference between the acquired first measured pressure and the second measured pressure is compared with the difference between the first measured pressure and the reference pressure. As a result, the evaluation index is obtained. An abnormality diagnosis method for a differential pressure / pressure combined sensor.
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