JP5812660B2 - 電気機械変換装置及びその製造方法 - Google Patents

電気機械変換装置及びその製造方法 Download PDF

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Publication number
JP5812660B2
JP5812660B2 JP2011093370A JP2011093370A JP5812660B2 JP 5812660 B2 JP5812660 B2 JP 5812660B2 JP 2011093370 A JP2011093370 A JP 2011093370A JP 2011093370 A JP2011093370 A JP 2011093370A JP 5812660 B2 JP5812660 B2 JP 5812660B2
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Japan
Prior art keywords
silicon
substrate
vibration film
layer
film
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Expired - Fee Related
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JP2011093370A
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English (en)
Japanese (ja)
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JP2012227718A (ja
JP2012227718A5 (enExample
Inventor
虎島　和敏
和敏 虎島
綾子 加藤
綾子 加藤
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011093370A priority Critical patent/JP5812660B2/ja
Priority to US13/425,346 priority patent/US8875583B2/en
Priority to CN201210114687.2A priority patent/CN102744193B/zh
Publication of JP2012227718A publication Critical patent/JP2012227718A/ja
Publication of JP2012227718A5 publication Critical patent/JP2012227718A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Sensors (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
JP2011093370A 2011-04-19 2011-04-19 電気機械変換装置及びその製造方法 Expired - Fee Related JP5812660B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011093370A JP5812660B2 (ja) 2011-04-19 2011-04-19 電気機械変換装置及びその製造方法
US13/425,346 US8875583B2 (en) 2011-04-19 2012-03-20 Electromechanical transducer and method of manufacturing the same
CN201210114687.2A CN102744193B (zh) 2011-04-19 2012-04-18 电气机械变换器及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011093370A JP5812660B2 (ja) 2011-04-19 2011-04-19 電気機械変換装置及びその製造方法

Publications (3)

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JP2012227718A JP2012227718A (ja) 2012-11-15
JP2012227718A5 JP2012227718A5 (enExample) 2014-06-05
JP5812660B2 true JP5812660B2 (ja) 2015-11-17

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JP2011093370A Expired - Fee Related JP5812660B2 (ja) 2011-04-19 2011-04-19 電気機械変換装置及びその製造方法

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US (1) US8875583B2 (enExample)
JP (1) JP5812660B2 (enExample)
CN (1) CN102744193B (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7994877B1 (en) 2008-11-10 2011-08-09 Hrl Laboratories, Llc MEMS-based quartz hybrid filters and a method of making the same
US8766745B1 (en) 2007-07-25 2014-07-01 Hrl Laboratories, Llc Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
JP5511260B2 (ja) * 2009-08-19 2014-06-04 キヤノン株式会社 容量型電気機械変換装置、及びその感度調整方法
US8176607B1 (en) * 2009-10-08 2012-05-15 Hrl Laboratories, Llc Method of fabricating quartz resonators
US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
JP5896665B2 (ja) 2011-09-20 2016-03-30 キヤノン株式会社 電気機械変換装置の製造方法
JP5986441B2 (ja) 2012-07-06 2016-09-06 キヤノン株式会社 静電容量型トランスデューサ
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
JP6381195B2 (ja) 2013-10-22 2018-08-29 キヤノン株式会社 静電容量型トランスデューサ及びその作製方法
JP2015100472A (ja) 2013-11-22 2015-06-04 キヤノン株式会社 静電容量型トランスデューサの駆動方法および駆動装置
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
JP6399803B2 (ja) * 2014-05-14 2018-10-03 キヤノン株式会社 力覚センサおよび把持装置
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
JP6552177B2 (ja) * 2014-10-10 2019-07-31 キヤノン株式会社 静電容量型トランスデューサ及びその駆動方法
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
JP7127510B2 (ja) * 2018-11-22 2022-08-30 セイコーエプソン株式会社 超音波素子、及び超音波装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3945613B2 (ja) * 2000-07-04 2007-07-18 日本放送協会 圧力センサの製造方法および圧力センサ
JP2003153393A (ja) * 2001-11-16 2003-05-23 Seiko Epson Corp コンデンサマイクロホンの製造方法、コンデンサマイクロホンおよび電子機器
US6958255B2 (en) * 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
US7777291B2 (en) * 2005-08-26 2010-08-17 Smoltek Ab Integrated circuits having interconnects and heat dissipators based on nanostructures
US8372680B2 (en) 2006-03-10 2013-02-12 Stc.Unm Three-dimensional, ultrasonic transducer arrays, methods of making ultrasonic transducer arrays, and devices including ultrasonic transducer arrays
JP5305993B2 (ja) 2008-05-02 2013-10-02 キヤノン株式会社 容量型機械電気変換素子の製造方法、及び容量型機械電気変換素子
JP2010004199A (ja) 2008-06-19 2010-01-07 Hitachi Ltd 超音波トランスデューサおよびその製造方法
US8087153B2 (en) * 2008-06-24 2012-01-03 Canon Kabushiki Kaisha Manufacturing method of an electromechanical transducer
WO2010009058A1 (en) * 2008-07-15 2010-01-21 Gridshift, Inc. Electrochemical devices, systems, and methods
JP2010098454A (ja) * 2008-10-15 2010-04-30 Canon Inc 機械電気変換素子
JP5377066B2 (ja) 2009-05-08 2013-12-25 キヤノン株式会社 静電容量型機械電気変換素子及びその製法
JP5578810B2 (ja) 2009-06-19 2014-08-27 キヤノン株式会社 静電容量型の電気機械変換装置
JP5414546B2 (ja) * 2010-01-12 2014-02-12 キヤノン株式会社 容量検出型の電気機械変換素子
JP5921079B2 (ja) * 2011-04-06 2016-05-24 キヤノン株式会社 電気機械変換装置及びその作製方法
JP5787586B2 (ja) * 2011-04-14 2015-09-30 キヤノン株式会社 電気機械変換装置
JP6071285B2 (ja) * 2012-07-06 2017-02-01 キヤノン株式会社 静電容量型トランスデューサ
JP6057571B2 (ja) * 2012-07-06 2017-01-11 キヤノン株式会社 静電容量型トランスデューサ

Also Published As

Publication number Publication date
CN102744193B (zh) 2015-12-02
JP2012227718A (ja) 2012-11-15
CN102744193A (zh) 2012-10-24
US8875583B2 (en) 2014-11-04
US20120266682A1 (en) 2012-10-25

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