JP5809154B2 - 流体の赤外線解析のための測定セル、そのような測定セルを備える測定システム及びそのような測定セルを製造する製造方法 - Google Patents
流体の赤外線解析のための測定セル、そのような測定セルを備える測定システム及びそのような測定セルを製造する製造方法 Download PDFInfo
- Publication number
- JP5809154B2 JP5809154B2 JP2012535643A JP2012535643A JP5809154B2 JP 5809154 B2 JP5809154 B2 JP 5809154B2 JP 2012535643 A JP2012535643 A JP 2012535643A JP 2012535643 A JP2012535643 A JP 2012535643A JP 5809154 B2 JP5809154 B2 JP 5809154B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement cell
- connection layer
- cell
- transmissive element
- measuring cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 title claims description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 238000004458 analytical method Methods 0.000 title claims description 9
- 238000005259 measurement Methods 0.000 claims description 61
- 230000005855 radiation Effects 0.000 claims description 22
- 230000005540 biological transmission Effects 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000006112 glass ceramic composition Substances 0.000 claims description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 7
- 238000005245 sintering Methods 0.000 claims description 7
- 239000002318 adhesion promoter Substances 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims description 2
- 150000002894 organic compounds Chemical class 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 16
- 125000006850 spacer group Chemical group 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 239000003921 oil Substances 0.000 description 5
- 238000012937 correction Methods 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- -1 Al 2 O 3 Chemical compound 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910021418 black silicon Inorganic materials 0.000 description 1
- 239000005352 borofloat Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/0317—High pressure cuvettes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0636—Focussing flows, e.g. to laminate flows
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0689—Sealing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0663—Whole sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/032—Gluing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N2021/0346—Capillary cells; Microcells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
- G01N2021/056—Laminated construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacturing & Machinery (AREA)
- Dispersion Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
特許文献6は赤外分光法のためのマイクロセルを開示している。
特許文献7はヒートシンク及びこのヒートシンクを製造する製造方法を開示している。
特許文献11は高速の化学反応を調査するための測定フローセルを開示している。
特許文献12は3次元マイクロフローセルを製造する製造方法を開示している。
同様に、狭帯域放射の複数の放射器が設けられてもよい。
この負荷を受ける接続層は圧粉体に導入された可塑化部を通って流れるとともに、2つの要素の間のすべての空間公差を均一化し、それにより、接続層がウエハ表面全体にわたって要素と接触するようになる。
Claims (28)
- 2メガパスカル(20バール)よりも大きい可能動作圧力を有する、流体の赤外解析のための測定セル(1)であって、赤外放射に対して少なくとも部分的に透過性を有する第1の透過要素と第2の透過要素(2,4)との間に形成される流れチャネル(10)を流体のために備えており、赤外放射は前記第1の透過要素(2)を通って前記流れチャネル(10)内に照射され得るとともに、前記第2の透過要素(4)を通って前記流れチャネル(10)から排出され得るものであり、前記第1の透過要素と前記第2の透過要素(2,4)は、前記第1の透過要素と前記第2の透過要素の間に配置されていてガラス含有材料からなる接続層(6)によって互いに流体密に接続され、
前記接続層(6)がセラミックフィルムとして形成されており、このようにして前記流れチャネル(10)が該流れチャネル(10)の形状に形成され、
前記流れチャネル(10)の境界部を形成する1つの表面における前記第1の透過要素(2)と前記第2の透過要素(4)の中の少なくとも一方が、反射防止層又は赤外放射のフィルタ層として作用する表面構造体(56)を有し、
前記表面構造体(56)が、1mm2当り10000針よりも大きい密度を有するマイクロ針を有し、かつ前記第1の透過要素(2)及び前記第2の透過要素(4)と前記接続層(6)とを接続するための接着促進体をも形成する、測定セル(1)。 - 前記接続層(6)が前記第1の透過要素と前記第2の透過要素(2,4)のうちの一方に付与されて形成されることを特徴とする、請求項1に記載の測定セル(1)。
- 前記接続層(6)が、前記接続層(6)の前記ガラス含有材料の焼結処理の前の過程において前記接続層(6)から有機化合物を排出するための排出チャネルを有することを特徴とする、請求項1又は2に記載の測定セル(1)。
- 前記接続層(6)が、可塑化部を有する低温同時焼成されたセラミックから形成されることを特徴とする、請求項1から3のいずれか1項に記載の測定セル(1)。
- 摂氏0度から摂氏600度との間の温度範囲における焼結された前記接続層(6)が、8ppm/Kよりも小さい線形熱膨張係数を有することを特徴とする、請求項1から4のいずれか1項に記載の測定セル(1)。
- 前記表面構造体(56)が、1mm2当り10000針よりも大きい密度を有するマイクロ針を有することを特徴とする、請求項1から5のいずれか1項に記載の測定セル(1)。
- 前記針が、0.3μmよりも大きくかつ30μmよりも小さい長さを有することを特徴とする、請求項1から6のいずれか1項に記載の測定セル(1)。
- 前記第1の透過要素と前記第2の透過要素(2,4)が単結晶シリコンから形成されることを特徴とする、請求項1から7のいずれか1項に記載の測定セル(1)。
- 前記第1の透過要素と前記第2の透過要素(2,4)のうちの少なくとも一方が、1mmよりも大きい肉厚を有することを特徴とする、請求項1から8のいずれか1項に記載の測定セル(1)。
- マイクロ流体構造が前記第1の透過要素と前記第2の透過要素(2,4)のうちの少なくとも一方に形成されることを特徴とする、請求項1から9のいずれか1項に記載の測定セル(1)。
- 請求項1から10のいずれか1項に記載の測定セル(1)と、赤外放射の放射器(36)と、前記赤外放射の受信器(42)と、を備える、流体の赤外解析のための測定システム(8)。
- 当該測定システム(8)は、前記測定セル(1)が挿入される受容開口が形成された設置要素(26)を有しており、該設置要素(26)には、流体が前記測定セル(1)の前記流れチャネル(10)に進入し得るとともに、前記測定セル(1)の前記流れチャネル(10)から放出され得るようにする進入開口(32)及び出口開口(34)が形成されることを特徴とする、請求項11に記載の測定システム(8)。
- 未焼結状態のガラスセラミック材料からなる前記接続層(6)を前記第1の透過要素(2)と前記第2の透過要素(4)の間に配置し、前記第1の透過要素(2)及び前記第2の透過要素(4)及び前記接続層(6)の配列体を、次いで温度及び圧力の作用によって焼結し、その際に、流体密の接続状態を形成することを特徴とする、請求項1から10のいずれか1項に記載の測定セル(1)を製造する製造方法。
- 前記ガラス含有材料は、焼結されたガラスセラミック材料であることを特徴とする、請求項1に記載の測定セル(1)。
- 前記可能動作圧力は5メガパスカル(50バール)よりも大きいことを特徴とする、請求項1に記載の測定セル(1)。
- 前記接続層(6)は焼結されたガラスセラミック材料からなることを特徴とする、請求項1に記載の測定セル(1)。
- 前記温度範囲は摂氏0度と摂氏400度との間であることを特徴とする、請求項5に記載の測定セル(1)。
- 前記温度範囲は摂氏0度と摂氏200度との間であることを特徴とする、請求項5に記載の測定セル(1)。
- 前記線形熱膨張係数は5ppm/Kよりも小さいことを特徴とする、請求項5に記載の測定セル(1)。
- 前記線形熱膨張係数は3ppm/Kよりも小さいことを特徴とする、請求項5に記載の測定セル(1)。
- 前記密度は1mm2当り100000針よりも大きいことを特徴とする、請求項6に記載の測定セル(1)。
- 前記密度は1mm2当り500000針よりも大きいことを特徴とする、請求項6に記載の測定セル(1)。
- 前記長さは0.5μmよりも大きくかつ15μmよりも小さいことを特徴とする、請求項7に記載の測定セル(1)。
- 前記長さは0.8μmよりも大きくかつ8μmよりも小さいことを特徴とする、請求項7に記載の測定セル(1)。
- 前記肉厚は1.5mmよりも大きいことを特徴とする、請求項9に記載の測定セル(1)。
- 前記肉厚は2mmよりも大きいことを特徴とする、請求項9に記載の測定セル(1)。
- 前記マイクロ流体構造が前記第1の透過要素(2)と前記第2の透過要素(4)の両方に形成されることを特徴とする、請求項10に記載の測定セル(1)。
- 前記マイクロ流体構造が前記第1の透過要素(2)と前記第2の透過要素(4)を形成する1つのシリコンウエハに形成されることを特徴とする、請求項10に記載の測定セル(1)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009051853A DE102009051853A1 (de) | 2009-10-27 | 2009-10-27 | Messzelle zur Infrarot-Analyse von Fluiden, Messsystem mit einer solchen Messzelle und Verfahren zur Herstellung einer solchen Messzelle |
DE102009051853.3 | 2009-10-27 | ||
PCT/EP2010/005629 WO2011054412A1 (de) | 2009-10-27 | 2010-09-14 | Messzelle zur infrarot-analyse von fluiden, messsystem mit einer solchen messzelle und verfahren zur herstellung einer solchen messzelle |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013508733A JP2013508733A (ja) | 2013-03-07 |
JP5809154B2 true JP5809154B2 (ja) | 2015-11-10 |
Family
ID=43128223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012535643A Expired - Fee Related JP5809154B2 (ja) | 2009-10-27 | 2010-09-14 | 流体の赤外線解析のための測定セル、そのような測定セルを備える測定システム及びそのような測定セルを製造する製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8890075B2 (ja) |
EP (1) | EP2494332B1 (ja) |
JP (1) | JP5809154B2 (ja) |
KR (1) | KR101733490B1 (ja) |
CN (1) | CN102549407B (ja) |
DE (1) | DE102009051853A1 (ja) |
WO (1) | WO2011054412A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9249014B2 (en) * | 2012-11-06 | 2016-02-02 | Infineon Technologies Austria Ag | Packaged nano-structured component and method of making a packaged nano-structured component |
WO2016055629A1 (en) | 2014-10-09 | 2016-04-14 | Sanofi | Automatic drug injection device with torsion drive spring and rotational dose setting and correction mechanism |
JP6813316B2 (ja) * | 2016-09-20 | 2021-01-13 | 株式会社東芝 | 劣化情報取得装置、劣化情報取得システム、劣化情報取得方法及び劣化情報取得プログラム |
US11266344B2 (en) | 2016-09-21 | 2022-03-08 | Samsung Electronics Co., Ltd. | Method for measuring skin condition and electronic device therefor |
KR102470238B1 (ko) | 2016-10-31 | 2022-11-23 | 미코노스 리미티드 | 생체 세포 주입을 위한 니들 매니퓰레이터들의 어레이(an array of needle manipulators for biological cell injection) |
JP6197094B1 (ja) * | 2016-12-13 | 2017-09-13 | 日科ミクロン株式会社 | オゾン濃度測定装置 |
WO2020252213A1 (en) * | 2019-06-13 | 2020-12-17 | Mekonos Inc. | Micro-electro-mechanical-system structures and applications thereof |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4175233A (en) * | 1978-05-26 | 1979-11-20 | Calspan Corporation | Flow cell and method for continuously monitoring deposits on flow surfaces |
EP0186755A3 (de) | 1984-11-26 | 1986-07-23 | Kontron-Holding Ag | Durchflusszelle |
EP0488947B1 (de) * | 1990-11-26 | 1995-02-15 | Ciba-Geigy Ag | Detektorzelle |
DE4137060C2 (de) * | 1991-11-11 | 1993-10-14 | Fraunhofer Ges Forschung | Mikroküvette für die Infrarotspektroskopie |
DE4412012A1 (de) * | 1994-04-07 | 1995-10-12 | Suspa Spannbeton Gmbh | Verfahren und Vorrichtung zur Messung und Überwachung der Dichte einer Gasatmosphäre, insbesondere in druckgasisolierten Hochspannungsschaltanlagen |
JP3499717B2 (ja) * | 1997-06-24 | 2004-02-23 | 株式会社 ジャパンセル | 合成コランダムの接合方法及び合成コランダムセルの製造方法 |
DE19731241C2 (de) * | 1997-07-21 | 1999-09-23 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zur Bestimmung von Fluidkomponenten und Verfahren zur Herstellung der Vorrichtung |
US7344499B1 (en) * | 1998-06-10 | 2008-03-18 | Georgia Tech Research Corporation | Microneedle device for extraction and sensing of bodily fluids |
GB9820776D0 (en) * | 1998-09-25 | 1998-11-18 | Ford Michael A | Imrovements to infrarec cells |
DE19909692C1 (de) * | 1999-03-05 | 2000-03-16 | Karlsruhe Forschzent | Durchflußmeßzelle zur Untersuchung einer schnell ablaufenden chemischen Reaktion |
JP4599019B2 (ja) | 1999-12-17 | 2010-12-15 | バイエル・テクノロジー・サービシーズ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | フローセル配列及び多重分析対象物測定のためのその利用 |
DE10104957A1 (de) * | 2000-09-07 | 2002-03-21 | Gesim Ges Fuer Silizium Mikros | Verfahren zum Herstellen einer 3-D-Mikrodurchflusszelle und 3-D-Mikrodurchflusszelle |
US6727422B2 (en) * | 2000-09-18 | 2004-04-27 | Chris Macris | Heat sink/heat spreader structures and methods of manufacture |
DE10244786A1 (de) * | 2002-09-26 | 2004-04-08 | Robert Bosch Gmbh | Mikromechanisches Bauelement und Verfahren |
DE10321472B4 (de) * | 2003-05-13 | 2005-05-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Fluidik-Modul, Verfahren zu seiner Herstellung und Verfahren zum Betreiben eines Fluidik-Moduls |
DE10329866B4 (de) * | 2003-07-02 | 2013-10-31 | Epcos Ag | Piezoelektrisches Substrat mit Temperaturkompensation und Verfahren zur Herstellung eines SAW-Bauelements |
DE102004007060B3 (de) * | 2004-02-13 | 2005-07-07 | Thallner, Erich, Dipl.-Ing. | Vorrichtung und Verfahren zum Verbinden von Wafern |
DE102004008685A1 (de) * | 2004-02-21 | 2005-09-29 | Roche Diagnostics Gmbh | Transmissionsspektrometer zur Untersuchung einer flüssigen Probe |
CN1746656A (zh) * | 2004-09-09 | 2006-03-15 | 张爱荔 | 一种流动比色池 |
US7518720B2 (en) * | 2007-08-01 | 2009-04-14 | Lockheed Martin Corporation | Optical flow cell for use in high temperature and/or high pressure environments |
WO2009020982A1 (en) * | 2007-08-06 | 2009-02-12 | The Regents Of The University Of California | Nano-microfluidic apparatus for continuous real-time analysis of targets in thin liquid films |
-
2009
- 2009-10-27 DE DE102009051853A patent/DE102009051853A1/de not_active Withdrawn
-
2010
- 2010-09-14 CN CN201080042688.XA patent/CN102549407B/zh not_active Expired - Fee Related
- 2010-09-14 WO PCT/EP2010/005629 patent/WO2011054412A1/de active Application Filing
- 2010-09-14 EP EP10752736.8A patent/EP2494332B1/de not_active Not-in-force
- 2010-09-14 US US13/261,198 patent/US8890075B2/en active Active
- 2010-09-14 JP JP2012535643A patent/JP5809154B2/ja not_active Expired - Fee Related
- 2010-09-14 KR KR1020127007859A patent/KR101733490B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN102549407A (zh) | 2012-07-04 |
US8890075B2 (en) | 2014-11-18 |
KR101733490B1 (ko) | 2017-05-11 |
DE102009051853A1 (de) | 2011-06-09 |
KR20120089276A (ko) | 2012-08-09 |
EP2494332A1 (de) | 2012-09-05 |
US20120174658A1 (en) | 2012-07-12 |
WO2011054412A1 (de) | 2011-05-12 |
JP2013508733A (ja) | 2013-03-07 |
CN102549407B (zh) | 2014-12-03 |
EP2494332B1 (de) | 2018-08-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5809154B2 (ja) | 流体の赤外線解析のための測定セル、そのような測定セルを備える測定システム及びそのような測定セルを製造する製造方法 | |
US11530980B2 (en) | Wafer arrangement for gas sensor | |
US9514854B2 (en) | X-ray radiation passage window for a radiation detector | |
US20170290098A1 (en) | Light Emitter Devices, Optical Filter Structures and Methods for Forming Light Emitter Devices and Optical Filter Structures | |
JP2009509356A (ja) | 基板温度決定装置およびその決定方法 | |
US10453985B2 (en) | Integrated light emitting device, integrated sensor device, and manufacturing method | |
EP2619557A1 (de) | Strahlungseintrittsfenster für einen strahlungsdetektor | |
US20220243527A1 (en) | Glass panel unit, method for manufacturing glass panel unit, composite getter material, and getter paste | |
EP2172753B1 (en) | A method for manufacturing infrared sensor on a wafer basis | |
CN109596560B (zh) | 一种多通道集成红外气体传感器 | |
JP4276891B2 (ja) | 微細流路およびこれを含むマイクロ化学チップ | |
Karioja et al. | LTCC-based differential photo acoustic cell for ppm gas sensing | |
DE102007021911A1 (de) | Sensorelement zur Messung infraroter Strahlung, insbesondere für spektroskopische Messungen und Verfahren zu dessen Herstellung | |
Czok et al. | LTCC based chip for monitoring in biological applications | |
DE102017211431B4 (de) | Küvette zum Aufnehmen eines Fluids, Vorrichtung zum Analysieren des Fluids sowie Herstellungsverfahren | |
EP2172755A1 (en) | Infrared sensor with front side bandpass filter and vacuum cavity | |
US20220381659A1 (en) | Sensor and method for performing a reference measurement with guided thermal radiation | |
WO2022181453A1 (ja) | 熱デバイス | |
Czok et al. | LTCC system for light absorbance measurement | |
Welker et al. | Design and fabrication of gas tight optical windows in LTCC | |
US20130022809A1 (en) | Multilayer Ceramic Structure and Method for Producing the Same | |
US20110284743A1 (en) | Method for Characterizing a Membrane in a Wet Condition By Positron Annihilation Spectrometer and Sample Holder Thereof | |
DE10315964A1 (de) | Mikromechanischer Infrarotdetektor mit integriertem Filter für Gasanalyse | |
JPH07190925A (ja) | 赤外線式ガス分析計 | |
JP2009092613A (ja) | 検出器および赤外線ガス分析計 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130701 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140226 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140318 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140617 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140624 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140723 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150106 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150310 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150811 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150910 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5809154 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |