JP5784999B2 - Wire saw device and cutting method - Google Patents

Description

  The present invention relates to a wire saw device and a cutting method used for cutting out a thin plate-like substrate from, for example, a silicon ingot or the like.

  In general, in this type of wire saw device, a cutting wire (also simply referred to as a wire) is spirally wound around a plurality of spaced apart wire guides. By controlling the travel of this wire, a group of wires traveling in the same direction are formed in parallel between the wire guides. By pressing a silicon ingot or the like (also referred to as a workpiece) against these wire groups, a plurality of substrates can be simultaneously cut out from the workpiece.

  However, as the cutting progresses, there is no gap between the workpiece and the wire, the contact amount increases, and the cut removal amount also increases. If it becomes so, since cutting load will become large and it will become difficult to discharge | emit swarf, cutting efficiency will fall.

  Therefore, a method of cutting while swinging the wire (rocking cutting) has been proposed (Patent Document 1). When the wire is swung, the amount of contact between the workpiece and the wire is reduced as a whole, so that the cutting speed is increased and chips are easily discharged.

Japanese Unexamined Patent Publication No. 01-171753

  However, when swing cutting is performed, there is a problem that the wire is easily bent when the swing angle is increased.

  1 and 2 show the workpiece W and the wire 101 in the middle of swing cutting. In these drawings, a state is shown in which the workpiece W is pressed from above with respect to the wire 101 traveling while swinging within the range indicated by the arrow line. FIG. 1 shows the time when the swing angle is the smallest, and FIG. 2 shows the time when the swing angle is the largest. The workpiece W is displaced at a constant speed toward the wire 101 and is always pressed against the wire 101.

  When the swing angle of the wire 101 is small, as shown in FIG. 1, even if the wire 101 is bent, the contact amount between the workpiece W and the wire 101 is small, and the cutting removal amount of the workpiece W (the portion indicated by the mesh line) is also small. Few. Therefore, even if the wire 101 is pressed against the workpiece W and bends as shown in (b) of the figure, the bending immediately disappears as shown by the phantom line. Can be cut.

  However, as the swing angle increases, as shown in FIG. 2, the amount of contact between the workpiece W and the wire 101 increases, and the amount of workpiece W removed by cutting increases. As a result, the cutting speed by cutting cannot follow the displacement speed of the workpiece W, and the bending of the wire 101 is difficult to return. If the wire 101 is bent, excessive tension may be applied to the wire 101, the contact amount increases, the cutting load increases, and the chips are not easily discharged.

  Therefore, an object of the present invention is to provide a wire saw device and a cutting method that can suppress the bending of the wire even when the swing angle becomes large and can cut with good balance.

  The wire saw device of the present invention presses a workpiece against a cutting wire that swings while traveling and cuts the workpiece. The wire saw device is disposed on a wire guide support portion that swings around a swing shaft within a predetermined angle range from a reference position substantially perpendicular to a direction in which the workpiece is pressed, and the wire guide support portion. A pair of wire guides that rotate about a rotation axis that is separated from each other and parallel to the swing axis, and one cutting wire in which an intermediate portion is spirally wound around the pair of wire guides, A wire supply device capable of unwinding and winding on one end side of the cutting wire; and a wire winding device capable of unwinding and winding on the other end side of the cutting wire; A workpiece holding unit that supports the workpiece, displaces and presses the workpiece against the cutting wire, and a control device.

  And the control device is inversely proportional to the change of the swing angle of the wire guide support part, the displacement control means for controlling the displacement speed of the work holding part inversely proportional to the change of the swing angle of the wire guide support part. And at least one of swing control means for controlling the swing speed of the wire guide support portion.

  According to this wire saw device, the displacement speed of the workpiece holding part and the swing speed of the wire guide support part are controlled in inverse proportion to the change in the swing angle of the wire guide support part. That is, if the swing angle is reduced, the workpiece displacement speed and the cutting wire swing speed are correspondingly increased, and if the swing angle is increased, the workpiece displacement speed is correspondingly increased. And the swing speed of the cutting wire is reduced.

  Even if the swing angle is increased, if the displacement speed of the workpiece or the swing speed of the cutting wire decreases, the amount of pressing the workpiece against the cutting wire decreases, so the cutting wire and the workpiece Even if the amount of contact with an object or the amount of cutting removal increases, cutting becomes easy. As a result, the cutting speed by cutting can be made to follow the displacement speed of the workpiece, and the bending of the cutting wire can be suppressed.

  Preferably, the displacement control means controls the displacement speed to be zero when the swing angle is maximized. Then, the bending of the cutting wire can be effectively suppressed.

  For example, the displacement speed may be kept constant until the swing angle reaches a predetermined threshold value, and the control of the displacement control means may be executed within a range equal to or greater than the threshold value. Further, the displacement speed may be kept constant within a range of a maximum angle of the swing angle and a predetermined angle in the vicinity thereof. Furthermore, the rocking speed can be kept constant until the rocking angle reaches a predetermined threshold value, and the control of the rocking control means can be executed within a range equal to or greater than the threshold value.

  Suitable cutting methods include, for example, a displacement control step of automatically controlling the displacement speed of the workpiece in inverse proportion to the change in the swing angle of the cutting wire, and the swing angle of the cutting wire. A swing control step of automatically controlling the swing speed of the cutting wire may be included in inverse proportion to the change.

  According to the wire saw device and the like of the present invention, when the swing angle is increased, the cutting load is controlled to be decreased accordingly, so that the bending of the wire is stably suppressed regardless of the swing angle. be able to.

It is the schematic seen from the cross-sectional direction which shows the relationship between the workpiece | work and wire at the time of rocking | fluctuation cutting. (B) is an enlarged view of the part partitioned by the dashed-dotted line of (a). It is the schematic seen from the cross-sectional direction which shows the relationship between the workpiece | work and wire at the time of rocking | fluctuation cutting. (B) is an enlarged view of the part partitioned by the dashed-dotted line of (a). It is the schematic which shows the whole structure of the principal part of the wire saw apparatus which concerns on embodiment. It is the schematic of the principal part of a wire saw apparatus. It is a time chart of the rocking speed with respect to the rocking angle. (A) shows the change of the swing angle, and (b) shows the change of the swing speed corresponding to (a). It is a time chart of the displacement speed with respect to a rocking angle. (A) shows the change of the swing angle, and (b) shows the change of the displacement speed corresponding to (a). It is a time chart of the displacement speed with respect to the rocking angle of the 1st modification. (A) shows the change of the swing angle, and (b) shows the change of the displacement speed corresponding to (a). It is a time chart of the displacement speed with respect to the rocking angle of the 2nd modification. (A) shows the change of the swing angle, and (b) shows the change of the displacement speed corresponding to (a). It is a time chart of the displacement speed with respect to the rocking | fluctuation angle of a 3rd modification. (A) shows the change of the swing angle, and (b) shows the change of the displacement speed corresponding to (a). It is a time chart of the displacement speed with respect to the rocking | fluctuation angle of a 4th modification. (A) shows the change of the swing angle, and (b) shows the change of the swing speed corresponding to (a).

(Wire saw device)
In FIG. 3, the wire saw apparatus 1 of this embodiment is shown. The wire saw device 1 is used, for example, for cutting a column-shaped workpiece (referred to as a workpiece W) such as a silicon ingot used for manufacturing a semiconductor device or a solar cell into a plurality of thin plate-like substrates. . The wire saw device 1 includes a wire guide 2, a cutting wire 3, a wire guide support portion 4, a wire supply device 6, a wire winding device 7, a control device 8, a side wall plate 10, a tension holding mechanism 11, a work holding portion 50, and the like. Is provided.

  The side wall plate 10 is a part of a wall body that defines a processing region of the wire saw device 1, and has a through-hole 12 that opens in a circular shape on a side surface facing the processing region. A rocking disk 91 is disposed inside the through hole 12. The oscillating disk 91 is oscillated and displaced about the oscillating axis A1 passing through the center of the through hole 12.

  The wire guide support portion 4 is fixed to one side surface (processing region side) of the swing disk 91. The wire guide support portion 4 is also oscillated and displaced about the oscillation axis A1. The wire guide support portion 4 is composed of a pair of support walls 4a, 4a facing away from each other in the direction of the swing axis A1, a connecting wall 4b connected to one end of the support walls 4a, and the like. A pair of wire guides 2, 2 are arranged on the opposite side (workpiece side) of the connecting wall 4 b in the wire guide support portion 4.

  The wire guide 2 has a cylindrical shape. The end portions of the wire guides 2 are supported by both supporting wall portions 4a, and the wire guides 2 are separated from each other and are arranged in parallel. The wire guide 2 rotates around a rotation axis A2 parallel to the swing axis A1 in synchronization with each other. The swing axis A1 is located at the midpoint of the line segment connecting these two rotation axes A2 (see FIG. 4).

  A wire guide drive motor 20 and a swing drive motor 92 are attached to the other side surface (back side) of the swing disk 91. The swing disk 91 swings by driving the swing drive motor 92, and the wire guide 2 rotates by driving the wire guide drive motor 20. The swing drive motor 92 and the wire guide drive motor 20 are driven and controlled by the control device 8.

  In the present embodiment, a fixed abrasive wire in which fine abrasive grains such as diamond are fixed to the surface of the wire 3 is used for the cutting wire 3 (also referred to as the wire 3). For example, one wire 3 having a length of 100 m or more is used for one wire saw device 1. The wire 3 is spirally wound around the pair of wire guides 2, 2 so that a plurality of substantially parallel rows of wires 3 (also referred to as a wire group 3 a) is formed between the pair of wire guides 2, 2. Yes.

  Specifically, as shown in FIG. 4, the intermediate portion of the wire 3 is repeatedly wound around the entire pair of wire guides 2 and is stretched between the wire guides 2. The wire 3 passes through the workpiece W side of one wire guide 2 (supply side wire guide 2) to the other wire guide 2 (winding side wire guide 2), and is wound around the winding side wire guide 2. It has been. The wire 3 wound around the winding-side wire guide 2 is stretched to the supply-side wire guide 2 through the connecting wall 4 b side, and is wound around the supply-side wire guide 2. This state is repeatedly performed at a predetermined pitch in the direction of the rotation axis A2, and finally the wire 3 is drawn from the work W side of the winding-side wire guide 2.

  The wire 3 drawn outward from the supply wire guide 2 is guided by a plurality of pulleys P and extends to the wire supply device 6. The wire supply device 6 includes a supply-side bobbin 61, a supply-side assist motor 62, and the like. First, the supply side bobbin 61 around which a new wire 3 is wound is attached to the wire supply device 6. The supply-side assist motor 62 rotates and drives the supply-side bobbin 61 in cooperation with the control device 8 to unwind or wind a predetermined amount of the wire 3 at a predetermined speed.

  The wire 3 drawn outward from the winding-side wire guide 2 is guided by a plurality of pulleys P and extends to the wire winding device 7. The wire winding device 7 includes a winding side bobbin 71 and a winding side assist motor 72. The wire winding device 7 is first mounted with an empty winding-side bobbin 71 in which the wire 3 is not wound. The winding-side assist motor 72 rotates the winding-side bobbin 61 in cooperation with the control device 8, and winds or unwinds the wire 3 in synchronization with the supply-side assist motor 62.

  In order to hold and control the tension of the wire 3 to be constant, a tension holding mechanism 11 is provided between the supply-side bobbin 61 and the supply-side wire guide 2 and between the winding-side bobbin 71 and the winding-side wire guide 2. It is arranged. The tension holding mechanism 11 includes a tension arm 11a and a tension motor 11b. The tension motor 11b is composed of, for example, a feedback-controlled servo motor, and is set so as to be rotationally displaced based on an actual measurement value of the tension of the wire 3. The pulley P pivotally supported by the tension arm 11a is displaced by the operation of the tension motor 11b, and the tension of the wire 3 is kept constant.

  In the wire saw device 1 of the present embodiment, the wire guide driving motor 20 and both assist motors 62 and 72 are driven by alternately changing the rotation direction, so that the wire 3 in each of the wire supply device 6 and the wire winding device 7 is driven. Unwinding and winding of the wire 3 are repeated alternately. Specifically, the wire 3 having a predetermined length is unwound from the supply-side bobbin 61 and wound around the take-up bobbin 71. Subsequently, the wire 3 is unwound from the winding-side bobbin 71 by a length shorter than a predetermined length and is wound again around the supply-side bobbin 61. By repeating this process alternately, the new line portion of the wire 3 is sequentially fed out from the supply-side bobbin 61, and the wire 3 is sequentially wound from the supply-side bobbin 61 to the winding-side bobbin 71.

  The workpiece holding unit 50 is configured by a workpiece holding member 51, a workpiece lifting / lowering motor 52, and the like, and is disposed away from the wire guide support 4 on the workpiece W side. Specifically, as shown in FIG. 4, when viewed from the axial direction, the extension line L passes through the swing axis A <b> 1 and is substantially perpendicular to the line connecting the two rotation axes A <b> 2 when the swing angle is 0. The work holding member 51 is located on the top. One end (also referred to as a table 51a) of the work holding member 51 faces the wire group 3a, and the work W is detachably supported on the table 51a.

  A workpiece lifting / lowering motor 52 is disposed on the other end side of the workpiece holding member 51. The workpiece lifting / lowering motor 52 cooperates with the control device 8 to displace the workpiece holding member 51 along the extension line L by a ball screw mechanism (not shown).

  The control device 8 includes hardware such as a CPU and a memory, and software such as a control program installed in the memory. The control device 8 is connected to a wire guide drive motor 20, a workpiece elevating motor 52, a supply side assist motor 62, a winding side assist motor 72, a swing drive motor 92, and the like. doing.

  Specifically, the control device 8 controls the drive of the wire guide drive motor 20, the supply side assist motor 62, and the winding side assist motor 72. As a result, the unwinding and winding processes of the wire 3 are repeated alternately, and the wire 3 is gradually wound from the supply side bobbin 61 to the winding side bobbin 71.

  The control device 8 also drives and controls the swing drive motor 92. Thereby, the swing disk 91, the wire guide support part 4, the wire guide 2, and the wire group 3a swing. Specifically, the wire guide support 4 and the like are centered on the swing axis A1 within a predetermined angle (θ) clockwise and counterclockwise from the reference position of the swing angle 0 perpendicular to the extension line L. Oscillating displacement. The control device 8 drives and controls the wire guide drive motor 20 and the wire guide support portion 4 and the like at the same time, so that the wire group 3a is oscillated and displaced while traveling.

  The control device 8 also drives and controls the workpiece lifting / lowering motor 52. Thereby, the workpiece holding member 51 and the workpiece W are displaced toward the wire group 3a, and the workpiece W is always pressed against the wire 3 until it is cut.

  The control device 8 of the present embodiment includes a displacement control program 8a (displacement control means) for controlling the displacement speed of the workpiece W in order to suppress the bending of the wire 3 caused by the swing, and the swing of the wire 3. A swing control program 8b (swing control means) for controlling the speed is incorporated. The displacement control program 8a and the swing control program 8b will be described in detail in the description of the next cutting method.

(Cutting method)
In this wire saw device 1, the workpiece W is set, and for example, by operating the operation switch to operate the wire saw device 1, the workpiece W can be cut by the cooperation of the wire guide drive motor 20 and the control device 8. A series of processing until completion is automatically executed.

  First, the work W is set on the table 51a (work support process). Specifically, the workpiece W is attached to the table 51a so that the cutting direction thereof is parallel to the wire group 3a. Then, when the wire saw device 1 is operated, in conjunction with the rotation of the wire guide 2, the wire supply device 6 and the wire take-up device 7 perform the wire 3 drawing process and the take-up process. The forward and backward movements are repeated at a speed of (wire traveling process).

  In conjunction with the travel of the wire 3, the wire guide support 4 and the like are also automatically controlled to swing by the control device 8 (swing control step). In the swing control process of the present embodiment, the swing control program 8b described above is executed. Specifically, the rocking speed of the wire guide support 4 or the like is controlled so as to be inversely proportional to the change in the rocking angle of the wire guide support 4 or the like.

  FIG. 5 shows a time chart of the rocking speed with respect to the rocking angle in the control. (A) of the figure represents the change of the swing angle of the wire guide 2 and the like with time. (B) of the same figure represents the change of the rocking speed of the wire guide support part 4 etc. corresponding to (a).

  In the present embodiment, control is performed such that the swing speed gradually decreases as the swing angle increases, and the swing speed gradually increases as the swing angle decreases. When the swing angle becomes 0, the swing speed becomes a preset value (Vy), and when the swing angle becomes maximum, the swing speed becomes a value smaller than the set value Vy (preset). The controlled deceleration value is Vy1).

  If the swing angle is increased, the swing speed is decreased accordingly, and the amount of pressing of the workpiece W against the wire group 3a is also decreased, so that the amount of contact between the wire group 3a and the workpiece W and the amount of cutting removal increase. However, the wire 3 is easy to cut. As a result, the cutting speed by cutting can be made to follow the displacement speed of the workpiece W, and the bending of the wire 3 can be suppressed. Further, when the workpiece W is easily cut (when the swing angle is 0), the swing speed is maximized, so that the workpiece can be cut efficiently.

  Then, in order to press the workpiece W against the wire group 3a, the workpiece holding member 51 is displaced toward the wire group 3a traveling while being controlled to swing (displacement control step). When the workpiece W comes into contact with the traveling wire group 3a, the workpiece W is cut by the frictional resistance. At the time of cutting, oil is supplied to the cutting site of the workpiece W from an oil supply device (not shown). Until the workpiece W is divided, traveling control and swing control of the wire 3 are automatically executed.

  In the displacement control process of the present embodiment, the above-described displacement control program 8a is executed. Specifically, the displacement speed of the workpiece W is controlled so as to be inversely proportional to the change in the swing angle of the wire guide 2 and the like.

  FIG. 6 shows a time chart of the displacement speed with respect to the swing angle in the control. (A) of the figure represents the change of the swing angle of the wire guide 2 and the like with time. (B) of the same figure represents the change of the displacement speed of the workpiece | work holding | maintenance part 50 corresponding to (a).

  In this embodiment, the displacement speed is controlled to gradually decrease as the swing angle increases, and the displacement speed is controlled to increase gradually as the swing angle decreases. The displacement speed is controlled to be maximum (Vh: set displacement speed) when the swing angle is 0, and is set to 0 when the swing angle is maximum.

  If the swing angle is increased, the displacement speed of the workpiece W is reduced accordingly, and the amount of pressing the workpiece W against the wire group 3a is also reduced. Even if it increases, the wire 3 becomes easy to cut. As a result, the cutting speed by cutting can be made to follow the displacement speed of the workpiece W, and the bending of the wire 3 can be suppressed.

  When the swing angle is 0, the displacement speed becomes maximum, so that cutting can be performed efficiently. In addition, since the displacement speed is 0 when the swing angle is maximum, the bending of the wire 3 can be effectively suppressed. Since the bending of the wire 3 can be controlled in a well-balanced manner according to the swing angle, stable cutting can be realized.

  In particular, in the wire saw device 1 of the present embodiment, since the control of the displacement speed of the workpiece W and the control of the swing speed of the wire group 3a are performed simultaneously, the bending of the wire 3 can be further suppressed and stable cutting can be realized. can do.

(Modification)
The configuration of the displacement control program 8a and the swing control program 8b is not limited to the above-described embodiment, and can be changed as appropriate according to the specifications.

  FIG. 7 shows an example of the modified example (first modified example). (A) of the figure shows the change of the swing angle of the wire guide 2 and the like with time, and (b) of the figure shows the change of the displacement speed of the work holding unit 50 corresponding to (a). In this modification, the displacement speed of the work holding unit 50 is held constant until the swing angle (absolute value) reaches a predetermined threshold value (θs), and the control of the displacement control program 8a is executed within a range equal to or greater than the threshold value. Is set to be.

  Specifically, when the swing angle (absolute value) of the wire guide 2 or the like is in the range of 0 to θs, the displacement speed of the work holding unit 50 is held at the set displacement speed (Vh). In the range where the swing angle (absolute value) of the wire guide support portion 4 and the like is equal to or greater than θs, the displacement speed gradually decreases as the swing angle increases, as in the above-described embodiment, and the swing angle The displacement speed is controlled to increase gradually as the value decreases.

  By controlling in this way, the bending speed of the wire 3 can be suppressed when the swing angle becomes large, and the displacement speed can be kept high when the swing angle is small, so that the cutting time can be shortened while realizing stable cutting. Can also be planned.

  Further, FIG. 8 shows another modification (second modification). (A) of the figure shows the change of the swing angle of the wire guide 2 and the like with time, and (b) of the figure shows the change of the displacement speed of the work holding unit 50 corresponding to (a).

  This modification differs from the first modification in that the displacement speed is controlled to be a value (Vh1) smaller than the set displacement speed when the swing angle is maximized, instead of being zero. Yes.

  FIG. 9 shows another modification (third modification). (A) of the figure shows the change of the swing angle of the wire guide 2 and the like with time, and (b) of the figure shows the change of the displacement speed of the work holding unit 50 corresponding to (a).

  This modification is different from the above-described embodiment and the like in that the displacement speed is controlled to be kept constant within the range of the maximum angle in the swing angle and a predetermined angle in the vicinity thereof. As described above, when the swing angle is large, the displacement of the work holding unit 50 or the like is stopped for a certain period, so that the wire 3 can be further easily cut, and thus the bending of the wire 3 is further effectively suppressed. can do.

  FIG. 10 shows another modification (fourth modification). (A) of the figure shows the change of the swing angle of the wire guide 2 and the like with time, and (b) of the figure shows the change of the swing speed of the wire guide support portion 4 and the like corresponding to (a). Yes.

  In this modification, the swing speed of the wire guide support portion 4 and the like is kept constant until the swing angle reaches a predetermined threshold value (θs), and control of the swing control program 8b is executed within a range equal to or greater than the threshold value. Is set to be.

  Specifically, when the swing angle (absolute value) of the wire guide 2 or the like is in the range of 0 to θs, the swing speed of the wire guide support portion 4 or the like is held at the set displacement speed (Vy). Then, in the range where the swing angle (absolute value) of the wire guide support portion 4 or the like is equal to or greater than θs, the swing speed gradually decreases as the swing angle increases, as in the case of the above-described embodiment. The swing speed is controlled to increase gradually as the angle decreases.

  In addition, the wire saw apparatus 1 etc. concerning this invention are not limited to embodiment mentioned above, The other various structures are included. The wire saw device 1 to which the present invention is applicable is not limited to the wire saw device 1 shown in FIG. The present invention can be widely applied to a wire saw device 1 of a type that performs a cutting process by pressing a workpiece against a wire that runs while swinging.

  For example, the tension holding mechanism 11 is not limited to the tension arm 11a. For example, a tension holding mechanism may be incorporated in the wire supply device 6 or the wire winding device 7. There may be three or more wire guides 2.

  The shape of the workpiece W (the shape before processing) is not particularly limited. For example, the present invention can be widely applied to a workpiece W having various shapes such as a columnar shape and a rectangular parallelepiped shape. The material of the workpiece W is not limited to silicon or the like. The cutting wire is not limited to a fixed abrasive wire, but when the workpiece W is a difficult-to-cut material such as sapphire or silicon carbide (SiC), it is preferable to use a fixed abrasive wire.

  The displacement control means 8a and the swing control means 8b need not be performed simultaneously. Each may be performed alone. As in the embodiment, the wire saw device 1 may have both the displacement control means 8a and the swing control means 8b, or only the displacement control means 8a or only the swing control means 8b. Also good.

  The wire saw device and the cutting method of the present invention are suitable for cutting a silicon ingot or the like.

DESCRIPTION OF SYMBOLS 1 Wire saw apparatus 2 Wire guide 3 Cutting wire 4 Wire guide support part 6 Wire supply apparatus 7 Wire winding apparatus 8 Control apparatus 8a Displacement control program 8b Swing control program 10 Side wall plate 11 Tension holding mechanism 50 Work holding part 61 Supply side Bobbin 71 Take-up side bobbin P Pulley W Workpiece A1 Oscillating shaft A2

Claims (7)

A wire saw device for cutting a workpiece by pressing the workpiece against a cutting wire that swings while traveling,
And the wire guide supporting part swings about the swing axis in a range of a predetermined angle substantially perpendicular reference position with respect to the direction in which the object to be pressurized Engineering object is pressed,
A pair of wire guides disposed on the wire guide support portion, each of which is separated from each other and rotates about a rotation axis parallel to the swing axis;
One cutting wire in which an intermediate portion is spirally wound around a pair of the wire guides;
A wire supply device capable of unwinding and winding on one end side of the cutting wire;
A wire winding device capable of unwinding and winding on the other end side of the cutting wire;
A workpiece holding unit that supports the workpiece, displaces and presses the workpiece against the cutting wire;
A control device;
With
The control device is
Displacement control means for controlling the displacement speed of the workpiece holder so that the absolute value of the swing angle of the wire guide support portion gradually decreases as the absolute value of the swing angle increases and gradually increases as the absolute value of the swing angle decreases. ,
The swing for controlling the swing speed of the wire guide support portion is gradually decreased as the absolute value of the swing angle of the wire guide support portion is increased, and is gradually increased as the absolute value of the swing angle is decreased. Dynamic control means,
A wire saw device having at least one of the above. The wire saw device according to claim 1,
The displacement control means is a wire saw device that controls the displacement speed to be zero when the absolute value of the swing angle becomes maximum. In the wire saw device according to claim 1 or 2,
The wire saw device in which the displacement speed is kept constant until the absolute value of the swing angle reaches a predetermined threshold, and the control of the displacement control means is executed in a range equal to or greater than the threshold. In the wire saw device according to any one of claims 1 to 3,
A wire saw device in which the displacement speed is kept constant within a range of a maximum angle in the absolute value of the swing angle and a predetermined angle in the vicinity thereof. In the wire saw device according to any one of claims 1 to 4,
The wire saw device in which the rocking speed is kept constant until the absolute value of the rocking angle reaches a predetermined threshold value, and the control of the rocking control means is executed within the threshold value or more. A cutting method for cutting a workpiece by pressing the workpiece against a cutting wire that swings while traveling,
A displacement control step of automatically controlling the displacement speed of the workpiece so that it gradually decreases as the absolute value of the swing angle of the cutting wire increases and gradually increases as the absolute value of the swing angle decreases. A cutting method including: A cutting method for cutting a workpiece by pressing the workpiece against a cutting wire that swings while traveling,
Swing that automatically controls the rocking speed of the cutting wire so that it gradually decreases as the absolute value of the rocking angle of the cutting wire increases and gradually increases as the absolute value of the rocking angle decreases. A cutting method including a control process.

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