JP5768300B2 - Stamp manufacturing method and stamp manufacturing apparatus - Google Patents

Description

  The present invention relates to a stamp manufacturing method and a stamp manufacturing apparatus, and more particularly to a method and apparatus for manufacturing a stamp using a photosensitive resin.

Conventionally, it is known to produce a stamp using a photosensitive resin such as an ultraviolet curable resin. For example, light (for example, ultraviolet rays) is exposed to the photosensitive resin using a negative film as a mask, and an uncured portion by this exposure. As a result, the uneven stamp surface was obtained (see, for example, Patent Document 1).
In addition, as stamps, there are stamps used for contact printing, uneven stamps used for nanoimprinting, and the like.

JP-A-8-324086

  However, the conventional stamp manufacturing method and apparatus require many steps and materials with a complicated structure, leading to problems that the lead time required for stamp manufacturing is long and the stamp manufacturing cost is high.

  Accordingly, the present invention provides a stamp manufacturing method and a stamp manufacturing apparatus that can deal with such problems, can manufacture a stamp with a simple process and configuration, and can perform stamp manufacturing with a short lead time and at a low cost. The purpose is to do.

In order to achieve the above object, a stamp producing apparatus according to the present invention comprises a first transfer means for transferring a production stage tape used for producing a stamp, a coating means for applying a photosensitive resin on the production stage tape, and a base of the stamp. A second transfer means for transferring a stamp tape which is a member and transmits photosensitive wavelength light; and a light irradiation means for irradiating photosensitive wavelength light of the photosensitive resin, and is provided between the production stage tape and the stamp tape. The photosensitive resin is irradiated from the stamp tape side to the region corresponding to the stamp shape of the photosensitive resin that has been sandwiched and spread by light irradiation means to cure the photosensitive resin, and the production stage tape and the stamp tape are separated from each other. a structure for forming a stamp on the stamp tape adhesion the Preparation stay photosensitive resin after curing in the stamp tape It is higher than the tape, and by separating the production stage tape and the stamp tape after curing, the cured photosensitive resin remains in close contact with the stamp tape and a stamp is formed on the stamp tape. After the stamp is formed, the non-photosensitive photosensitive resin adhering to the prepared stage tape is cured by exposure and then removed.
In such a configuration, the photosensitive resin is spread between the production stage tape and the stamp tape, which can be transported by the first and second transport means, respectively, and the stamped tape side with respect to the spread photosensitive resin. Is irradiated with light from the light irradiation means, and the irradiated portion is cured to form a stamp on the stamp tape.

Here, the first and second transfer means are prepared for the new production of the stamp, and the used stage tape and the used part of the stamp tape are withdrawn from the stamp production area, and the subsequent unused part is transferred to the stamp production area. Can do.
In such a configuration, a stamp production region is used for stamp production, in which a portion to which an unphotosensitive photosensitive resin adheres and a portion in which a stamp is formed by cured resin are transferred by the first and second transfer means. And a subsequent portion (unused portion) is transferred to a stamp producing region, and a stamp is produced using the unused portion of the tape every time the stamp is produced.

Further, the height of the stamp can be variably set by adjusting the distance between the production stage tape and the stamp tape at the time of spreading.
In such a configuration, the photosensitive resin after spreading is adjusted by adjusting the distance (gap) between the producing stage tape and the stamp tape when the photosensitive resin is spread between the producing stage tape and the stamp tape. The thickness of the photosensitive resin changes, and accordingly, the stamp height, which is the thickness of the photosensitive resin after curing, changes.

The first transfer means and the second transfer means include a supply-side reel and a take-up reel, and a production stage tape stretched between the supply-side reel and the take-up reel and the supply-side reel and the winding reel. The photosensitive resin can be spread by being sandwiched between a stamp tape stretched between the take-up reel and the take-up reel.

  According to the stamp manufacturing method and the stamp manufacturing apparatus according to the present invention, the photosensitive resin spread between the manufacturing stage tape and the stamp tape is exposed to form a stamp on the stamp tape, so that a simple process In addition, the stamp can be manufactured with the configuration, and the stamp can be manufactured with a short lead time and at a low cost.

It is a figure which shows each process of the stamp production apparatus and production method in embodiment of this invention.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is a diagram showing a manufacturing process of a stamp manufacturing apparatus according to the present invention and a stamp manufacturing method according to the present invention.
A stamp producing apparatus 100 shown in FIG. 1 includes a first transfer means 200 for transferring a production stage tape MST used for stamp production, an application means 300 for applying a liquid photosensitive resin PHP on the production stage tape MST, and a stamp. Second transport means 400 for transporting a stamp tape STT used as an ST base member, and light irradiation means 500 for irradiating light RA having a wavelength for curing the photosensitive resin PHP are provided.

The stamp tape STT is a base member of the stamp ST formed in a tape shape using, for example, polyethylene terephthalate PET or polyimide as a base material. As will be described later, the stamp ST is formed on the stamp tape STT.
The stamp tape STT preferably has a high light transmittance for the photosensitive wavelength of the photosensitive resin PHP and is excellent in adhesion to the photosensitive resin PHP after photosensitive curing, and has a coating for improving the adhesion. You may give it.

On the other hand, the production stage tape MST used for producing the stamp ST is formed in a tape shape having substantially the same width as the stamp tape STT.
As the material of the production stage tape MST, various materials can be used, and the characteristic of transmitting the photosensitive wavelength light is not necessary, but the releasability (peelability) from the photosensitive resin PHP after photosensitive curing. It is desirable to have excellent coating properties, and a coating (for example, a fluororesin coating) may be applied to improve the releasability (peelability).
In the stamp producing apparatus 100, as will be described later, in a state where a liquid photosensitive resin PHP is sandwiched between the production stage tape MST and the stamp tape STT, the photosensitive wavelength light is transmitted through the stamp tape STT. The stamp ST is formed on the stamp tape STT by exposing to PHP and separating the prepared stage tape MST and the stamp tape STT after curing.

Accordingly, a stamp tape STT having a property of transmitting photosensitive wavelength light is used. Further, when the production stage tape MST and the stamp tape STT are separated after curing, the cured photosensitive resin PHP is peeled off from the production stage tape MST, while the cured photosensitive resin PHP remains in close contact with the stamp tape STT. As described above, the production stage tape MST has a releasability (removability) with respect to the cured photosensitive resin PHP, while the stamp tape STT has an adhesion with respect to the cured photosensitive resin PHP.
In other words, the stamp tape STT has higher adhesion to the cured photosensitive resin PHP than the production stage tape MST. Conversely, the production stage tape MST is a cured photosensitive resin compared to the stamp tape STT. The material and coating of the stamp tape STT and the production stage tape MST are selected so that the releasability (peelability) with respect to PHP is high.

In addition, as the photosensitive resin PHP (photocurable resin), an ultraviolet curable resin or a visible light curable resin can be used, and as the resin, for example, an acrylic resin, a polyimide, a silicone resin, or the like can be used.
The light irradiation means 500 includes an ultraviolet lamp as a light source when an ultraviolet curable resin is used as the photosensitive resin PHP, and a halogen lamp as a light source when a visible light curable resin is used as the photosensitive resin PHP. The photosensitive resin PHP is irradiated with light RA emitted from the light source through a lens or the like.

In addition, the light irradiation means 500 selectively irradiates the region RA to be cured of the photosensitive resin PHP, that is, the region corresponding to the desired stamp shape, with the light RA, thereby forming a stamp surface (concave / convex type) having the desired shape. For example, by irradiating light through a mechanical slit (mask) having an opening corresponding to the shape of the stamp surface, or by individually controlling the inclination of a plurality of micromirrors. The light is projected from the micromirror corresponding to the region to be cured by a DMD (digital mirror device) that can control the projection of light for each mirror.
With the configuration using the DMD (digital mirror device), the projection area of light can be arbitrarily changed by controlling on / off of each micromirror. It is not necessary to replace the device, and stamps ST having various shapes can be manufactured with high versatility.

The first transfer means 200 for transferring the production stage tape MST includes a supply-side reel 201 around which the production stage tape MST used for stamp production is wound, and a take-up reel for winding up the production stage tape MST used for stamp production. 202 and a drive motor (not shown) for driving the take-up reel 202 to rotate counterclockwise in the figure, and these are integrally attached to a first base plate (not shown).
The supply-side reel 201 and the take-up reel 202 are supported so as to be rotatable about a substantially horizontal axis, and the rotation axis of the supply-side reel 201 and the rotation axis of the take-up reel 202 are substantially the same. The production stage tape MST is disposed so that the surface thereof is substantially horizontal between the upper part of the supply-side reel 201 and the upper part of the take-up reel 202.

  On the other hand, the second transfer means 400 for transferring the stamp tape STT includes a supply-side reel 401 around which the stamp tape STT used for stamp production is wound, and a take-up reel 402 for winding up the stamp tape STT used for stamp production. And a winding drive motor (not shown) that rotates the winding reel 402 counterclockwise in the figure, and the supply side reel 401 is rotated clockwise in the figure to rewind the stamp tape STT. A pair of rotations for bypassing a rewinding drive motor (not shown) that enables selective use of the stamp ST and a transport path of the stamp tape STT from the supply reel 401 to the take-up reel 402. It consists of shafts (spindles) 403a and 403b, which are integrated with the second base plate (not shown). Only it is.

The supply reel 401 and the take-up reel 402 are supported so as to be rotatable about a substantially horizontal axis, and the rotation axis of the supply-side reel 401 and the rotation axis of the take-up reel 402 are substantially the same. It is arranged to be separated by a predetermined distance in height.
Further, the pair of rotating shafts 403a and 403b are supported so as to be rotatable about a substantially horizontal axis and are disposed at substantially the same height and spaced apart from each other by a predetermined distance. The rotation centers of both rotary shafts 403 and 403 are positioned below the rotation center of the take-up reel 402.

Then, the stamp tape STT pulled out from the supply-side reel 401 is hung on the lower side of the rotation shaft 403a, further hung on the lower side of the rotation shaft 403b, and then wound on the take-up side reel 402. Is stretched between the lower part of the rotating shaft 403a and the lower part of the rotating shaft 403b so that the surface is substantially horizontal.
That is, the production stage tape MST stretched between the upper portion of the supply-side reel 201 and the upper portion of the take-up reel 202, and the stamp tape STT stretched between the lower portion of the rotating shaft 403a and the lower portion of the rotating shaft 403b. Are opposed to each other in parallel with the stamp tape STT as the upper side.

Note that at least one of the first base plate integrally including the first transfer means 200 and the second base plate integrally including the second transfer means 400 is configured to be movable at least in the vertical direction. Here, as means for moving the base plate in the vertical direction, means comprising a guide rail that supports the base plate so as to be movable in the vertical direction and a feed screw mechanism that moves the base plate along the guide rail can be used. The feed screw mechanism includes a ball nut provided on the base plate, a ball screw threadably engaged with the ball nut and supported rotatably on the fixed side, and a motor that rotationally drives the ball screw.
The application means 300 is means for applying a liquid photosensitive resin PHP on the upper surface of the production stage tape MST stretched between the upper part of the supply-side reel 201 and the upper part of the take-up reel 202. Application means by various known methods such as a contact application method such as a dispenser and a non-contact method such as an inkjet can be appropriately employed.

Next, a manufacturing process of the stamp ST using the stamp manufacturing apparatus having the above configuration will be described in detail.
First, supply of the first transfer means 200 in a state in which the second transfer means 400 is retracted from the upper part of the first transfer means 200 (or in a state in which the first transfer means 200 is retracted from directly below the second transfer means 400). A liquid photosensitive resin PHP is applied to the upper surface of the production stage tape MST stretched between the upper portion of the side reel 201 and the upper portion of the take-up reel 202 (see FIG. 1A). .

Here, the amount of the photosensitive resin PHP applied varies depending on the height of the stamp ST (expanded thickness), the outer area of the stamp ST, and the like. Only apply.
When the application of the liquid photosensitive resin PHP is finished, the stamp tape STT is then pressed against the liquid photosensitive resin PHP applied on the upper surface of the production stage tape MST, so that the production stage tape MST and the stamp tape STT are The liquid photosensitive resin PHP is spread between them.

Specifically, the production stage tape MST stretched between the upper part of the supply-side reel 201 and the upper part of the take-up reel 202 and the lower part of the rotary shaft 403a and the lower part of the rotary shaft 403b. With the stamp tape STT facing each other in parallel, the relative distance between the first transfer means 200 and the second transfer means 400 is set until the gap S between the production stage tape MST and the stamp tape STT reaches a set value. The stamp tape STT is pressed against the liquid photosensitive resin PHP applied to the upper surface of the production stage tape MST by gradually shrinking.
The set value of the gap S between the production stage tape MST and the stamp tape STT, which is a target value when the relative distance between the first transfer means 200 and the second transfer means 400 is shortened, is the spread of the liquid photosensitive resin PHP. Since it is the target of the thickness, and by pulling, the height of the stamp is predetermined, at least one of the first transfer means 200 and the second transfer means 400 while detecting the relative distance by a sensor. Move.
Therefore, by adjusting the gap S, it is possible to produce a stamp ST having an arbitrary height.

By gradually reducing the relative distance between the first transfer means 200 and the second transfer means 400 until the gap S between the preparation stage tape MST and the stamp tape STT reaches a set value, the preparation stage tape MST and the stamp tape STT are reduced. The photosensitive resin PHP sandwiched between the two is spread to a thickness corresponding to the set value (see FIG. 1B).
When the photosensitive resin PHP is spread between the production stage tape MST and the stamp tape STT, the light irradiation means 500 sensitizes the stamp tape STT from the opposite side of the stamp forming surface while maintaining the gap S at that time. The light RA is irradiated toward the conductive resin PHP (see FIG. 1C).
The light irradiation means 500 can be integrally attached to the second base plate on which the second transfer means 400 is mounted.

The light RA irradiated by the light irradiation means 500 is transmitted through the stamp tape STT, and exposes the photosensitive resin PHP sandwiched between the production stage tape MST and the stamp tape STT. Therefore, the photosensitive resin PHP in the region corresponding to the desired stamp shape is cured.
When the light RA is irradiated by the light irradiation means 500 for a predetermined irradiation time and the portion constituting the stamp surface is cured, the first transfer means 200 and the second transfer means 400 are then separated from each other. The gap S between the stage tape MST and the stamp tape STT is widened (see FIG. 1D).

At this time, the cured photosensitive resin PHP is easily peeled off from the production stage tape MST. However, since the cured photosensitive resin PHP is in close contact with the stamp tape STT, there is a gap S between the production stage tape MST and the stamp tape STT. When spread, the cured photosensitive resin PHP remains in close contact with the stamp tape STT side.
Further, the photosensitive resin PHP that is not exposed to light and remains in a liquid state remains attached to both the production stage tape MST and the stamp tape STT.

  Here, with respect to the production stage tape MST, by performing winding transfer by the first transfer means 200, from the region between the supply side reel 201 and the winding side reel 202, that is, from the region used for manufacturing the stamp, The production stage tape MST (used production stage tape MST) that has not been exposed to the liquid photosensitive resin PHP is retracted, and the subsequent production stage tape MST to which the liquid photosensitive resin PHP has not adhered is removed. The used part is stretched between the supply-side reel 201 and the take-up reel 202 in preparation for the new production of the stamp (see FIG. 1D).

On the other hand, for the stamp tape STT, the photosensitive resin PHP that is not exposed to light and is in a liquid state adheres around the cured photosensitive resin PHP. Washing and removing with (1) leave only the cured photosensitive resin PHP on the stamp tape STT.
As a result, the cured photosensitive resin PHP on the stamp tape STT can be used as a stamp ST (uneven type) (see FIG. 1 (e)). It is used for contact printing, nanoimprinting, etc. with the stamp tape STT as a pedestal.

When a stamp ST is newly produced, the stamp ST is formed between the rotary shaft 403a and the rotary shaft 403b by winding and transferring by the second transfer means 400, and the stamp ST is formed. The used stamp tape STT is retracted from between the rotation shaft 403a and the rotation shaft 403b (stamp production region), and the stamp tape STT (unused portion) on which the subsequent stamp formation is not performed is stored on the stamp ST. In preparation for a new production, it is stretched between the rotating shaft 403a and the rotating shaft 403b.
Therefore, a plurality of stamps ST can be formed on the stamp tape STT by performing stamp production a plurality of times, and a plurality of different types of stamps ST can be formed on the stamp tape STT by changing the exposure pattern for each stamp production. The stamp ST positioned between the rotary shaft 403a and the rotary shaft 403b by switching (feeding or rewinding) the stamp tape STT by the second transfer means 400 can be selected from a plurality of stamps ST. Can be used.

As described above, according to the stamp manufacturing method and the stamp manufacturing apparatus of the present embodiment, the photosensitive resin PHP is exposed and cured in accordance with a desired stamp shape, so that the stamp ST (concave / convex type) is manufactured. It can be manufactured in a short time.
Further, since the shape of the stamp ST (concave / convex) is determined according to the shape of the region to which the photosensitive resin PHP is exposed, the stamp ST (concavo-convex) having an arbitrary shape can be easily and inexpensively manufactured.
Further, the opposing distance between the stamp tape STT and the production stage tape MST when the photosensitive resin PHP is spread (in other words, the relative movement distance between the first transfer means 200 and the second transfer means 400) is controlled. Thus, it is possible to arbitrarily control the height of the stamp ST (uneven type).

In addition, a plurality of stamps ST (concave / convex) can be formed side by side on the stamp tape STT, and the selective use of the irregularly shaped stamp ST (concave / convex) can be facilitated. The workability of nanoimprinting is improved.
In addition, since the liquid photosensitive resin PHP is spread between the stamp tape STT and the production stage tape MST to have a desired thickness, the thickness is adjusted by using a spin coating method or the like. The apparatus can be simplified as compared with the case of making it uniform.

In addition, when the non-photosensitive photosensitive resin PHP remains attached to the manufacturing stage tape MST after the stamp is manufactured, as described above, the liquid photosensitive resin PHP remains attached in preparation for new manufacturing. The production stage tape MST may be wound, may be washed with a solvent and then wound, or further, after being exposed to a photosensitive resin PHP and cured. It may be removed.
Here, since the cured photosensitive resin PHP is easily peeled off from the production stage tape MST, it is easier to remove the photosensitive resin PHP from the production stage tape MST when it is configured to be removed after curing than in the case of washing with a solvent. Can be removed.

Further, a spacer member that regulates the distance between the stamp tape STT and the production stage tape MST when the photosensitive resin PHP is spread is provided integrally with at least one of the stamp tape STT and the production stage tape MST. It is possible to prevent the surface used for manufacturing the stamp ST (concave / convex mold) from approaching the distance limited by the spacer member.
As the spacer member, for example, a belt-like member laminated on both ends in the width direction of the tape can be used. With such a spacer member, when the photosensitive resin PHP is spread, the liquid photosensitive resin PHP is used as the tape. It also functions as a stopper that restricts leakage from the end in the width direction.

Further, for example, the stamp tape STT is formed in a ring shape in which both ends are connected, and the first transfer means 200 transfers the ring-shaped stamp tape STT in one direction, so that a plurality of stamp STs (uneven type) formed on the stamp tape STT are formed. ) Can be selected and used.
Further, the configuration of the reel and the rotation shaft in the first transfer means 200 and the second transfer means 400 is not limited to that shown in FIG. 1, but the stamp tape STT and the production stage tape MST are made to face each other in parallel. In addition, it is only necessary that the used portion of the tape is retracted after the stamp is manufactured, and the unused portion of the tape can be transferred to the manufacturing area instead.

DESCRIPTION OF SYMBOLS 100 ... Stamp production apparatus 200 ... 1st transfer means 300 ... Application | coating means 400 ... 2nd transfer means 500 ... Light irradiation means PHP ... Photosensitive resin STT ... Stamp tape MST ... Production stage tape ST ... Stamp (uneven type)

Claims (4)

A first transfer means for transferring a production stage tape used for stamp production;
Application means for applying a photosensitive resin on the production stage tape;
A second transfer means for transferring a stamp tape which is a base member of the stamp and transmits photosensitive wavelength light;
Light irradiation means for irradiating photosensitive wavelength light of the photosensitive resin;
With
The photosensitive resin is irradiated with photosensitive wavelength light from the stamp tape side to the region corresponding to the stamp shape of the photosensitive resin spread between the production stage tape and the stamp tape. It is configured to form a stamp on the stamp tape by curing and separating the production stage tape and the stamp tape,
The adhesive property of the photosensitive resin after curing in the stamp tape is higher than that of the production stage tape, and after the curing, the production stage tape and the stamp tape are separated from each other, whereby the photosensitive resin after curing on the stamp tape side. And the stamp remains on the stamp tape, and after the stamp is formed, the non-photosensitive photosensitive resin adhering to the production stage tape is cured by exposure and then removed. Stamp making device. The first transfer means and the second transfer means are prepared for new production of a stamp, the used stage tape and the used part of the stamp tape are evacuated from the stamp production area, and the subsequent unused parts are transferred to the stamp production area. The stamp producing apparatus according to claim 1, wherein: 3. The stamp producing apparatus according to claim 1, wherein a height of the stamp is variably set by adjusting a distance between the production stage tape and the stamp tape at the time of spreading. The first transfer means and the second transfer means include a supply reel and a take-up reel,
Photosensitively sandwiched between the production stage tape stretched between the supply reel and the take-up reel and the stamp tape stretched between the supply reel and the take-up reel. Resin is extended, The stamp production apparatus as described in any one of Claims 1-3 characterized by the above-mentioned .

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