JP5762239B2 - Substrate processing system, substrate supply order determination method, program, recording medium - Google Patents

Description

  The present invention relates to a substrate processing technique for performing processing on a substrate conveyed by each of a plurality of conveyance units arranged in parallel by a functional unit provided for each conveyance unit, and in particular, a plurality of substrates to each conveyance unit. The order of supply is determined.

  The component mounting machine described in Patent Document 1 includes two mounting heads for mounting components on a board while arranging two lanes for carrying the board in parallel. In such a component mounting machine, two lanes and two mounting heads can be associated with each other, and each mounting head can mount a component on a board that has been transported through the corresponding lane. Furthermore, multiple types of boards can be produced by sequentially supplying multiple types of boards to each of the multiple lanes and mounting the components on the multiple types of boards carried by each lane. Can do.

  However, since the width of the substrate may be different depending on the type, it is preferable that the width of the lane can be adjusted according to the width of the substrate when dealing with the production of various types of substrates. Therefore, for example, application of the technique described in Patent Document 2 can be considered. That is, in Patent Document 2, one lane is configured by two conveyors, at least one of which is configured to be movable, and the width of the lane can be adjusted by appropriately moving the movable conveyor.

JP 2009-239257 A JP 2011-114044 A

  By the way, when the width of the transport unit such as the lane is made variable, the width of the transport unit increases as the width of the substrate to be transported increases. Therefore, when a wide substrate is simultaneously transported to both transport units arranged in parallel to each other, the distance between the transport units is narrowed, and the distance between the substrates transported by the transport units is also narrow. There is a case. In such a case, since the two functional units perform processing on substrates that are close to each other, depending on the situation, these functional units may interfere with each other.

  In avoiding such mutual interference of the functional units, one functional unit moves away from the other functional unit while one functional unit is close to the other functional unit side as the substrate is processed. It is effective to evacuate. However, such a saving operation of the functional unit causes a decrease in throughput.

  The present invention has been made in view of the above problems, and when performing processing on a substrate transported by each of a plurality of transport units arranged in parallel by a function unit provided in each transport unit, the functional unit is retracted. An object is to provide a technique for suppressing the occurrence of an operation and improving the throughput.

In order to achieve the above object, the substrate processing system according to the present invention is arranged in parallel with each other, and sequentially feeds substrates having a width in the Y-axis direction in the X-axis direction orthogonal to the Y-axis direction. The first and second transport units, the first functional unit that performs processing on the substrate transported by the first transport unit to the first processing position, and the second processing adjacent to the first processing position in the Y-axis direction. A substrate processing mechanism having a second functional unit that performs processing on a substrate that has been transported to a position by the second transport unit; and a determination unit that determines a transport order of the substrates to the first and second transport units. The width of the first and second transport units in the Y-axis direction can be adjusted according to the width of the substrate that each transports, and the width of the first or second transport unit is increased to increase the first width. And the spacing between the substrates at each of the second processing positions decreases and the substrate In the mechanism, each of the first and second functional units is arranged in an exclusive area where simultaneous entry of the first functional unit and the second functional unit is prohibited in order to avoid mutual interference. While one of them is entering, the other is withdrawn from the exclusive area, and the determining unit determines whether or not the first and second transport units can produce each of the plurality of types of substrates to be supplied. Based on the cycle time, the number of sheets to be produced, and the setup time required to produce the substrate, the expected production time required for production in the production unit that can produce the first and second conveyance units is calculated. Based on the calculation result, the time required to produce a plurality of substrates to which the first transport unit is allocated while changing the types of substrates to be allocated to the first and second transport units, and a plurality of times to which the second transport unit is allocated Necessary to produce board And determining the type of substrate to be assigned to the first and second transport units so that the difference is minimized, and a plurality of types assigned to one of the first and second transport units. When the substrate is supplied from a substrate of a wide variety, and the substrate is supplied from a substrate of a narrow variety among a plurality of types assigned to the other, the transfer order of the substrate to the first and second transfer units is set for each product type. It is determined based on information indicating the width of the substrate .

In the substrate supply order determination method according to the present invention, first and second substrates arranged in parallel to each other are sequentially transported in the X-axis direction orthogonal to the Y-axis direction, respectively, to the substrates having a width in the Y-axis direction. A transport unit, a first functional unit that performs processing on a substrate transported by the first transport unit to the first processing position, and a second transport unit at a second processing position adjacent to the first processing position in the Y-axis direction. A substrate processing mechanism having a second functional unit that performs processing on the substrate that has been transported, and the width that the first and second transport units have in the Y-axis direction depends on the width of the substrate that each transports And the width of the first or second transport unit is increased, so that the distance between the substrates at the first and second processing positions is reduced. In the substrate processing mechanism, the first and second functions are reduced. Each of the parts has a first machine to avoid mutual interference. In contrast to the substrate processing system in which one of the first and second functional units enters the exclusive region where simultaneous entry of the first and second functional units is prohibited, the other retreats from the exclusive region. And a substrate supply order determination method for determining the order of substrate transport to the second transport unit, in order to achieve the above-mentioned purpose , the production at each of the first and second transport units for a plurality of types of substrates to be supplied The expected production required when the product is produced by a transportable part of the first and second transport units based on the cycle time, the number of sheets produced, and the setup time required to produce one substrate. Time required for producing a plurality of substrates to which the first transport unit is allocated while changing the types of substrates to be allocated to the first and second transport units, based on the time calculation step and the calculation result of the expected production time And second Determining a difference from a time required to produce a plurality of substrates to which the feeding unit is allocated, and determining a type of substrate to be allocated to the first and second transport units so that the difference is minimized; When one of the second transfer units is supplied from a substrate of a wide variety among the plurality of assigned varieties, and the other is supplied from a substrate of a narrow variety of the plurality of assigned varieties, And a step of determining the order of transporting the substrates to the first and second transport units based on information indicating the width of each type of substrate .

  In addition, a program according to the present invention is characterized in that, in order to achieve the above object, a computer executes each process included in the substrate supply order determination method.

  In addition, a recording medium according to the present invention is characterized in that the program is recorded in order to achieve the object.

  As described above, in the substrate processing system to which the present invention (substrate processing system, substrate supply order determination method, program, recording medium) is applied, the first and second transport units that sequentially transport the substrate in the X-axis direction are parallel to each other. Is arranged. The first functional unit performs processing on the substrate transported to the first processing position by the first transport unit, while the second functional unit performs processing on the substrate transported to the second processing position. Two functional units execute processing. Here, the first processing position and the second processing position are adjacent to each other in the Y-axis direction orthogonal to the X-axis direction. And the width | variety which the 1st and 2nd conveyance part has in the said Y-axis direction can be adjusted according to the width | variety of the board | substrate which each conveys. Therefore, when the width of the first or second transport unit is increased, the distance between the two substrates at the first and second processing positions is decreased.

  In such a configuration, when a wide substrate is simultaneously transferred to both the first and second transfer units arranged in parallel to each other, the interval between these transfer units is reduced, and each transfer unit In some cases, the distance between the substrates transferred to the first and second processing positions is also narrowed. In such a case, since the two functional units perform processing on substrates that are close to each other, depending on the situation, these functional units may interfere with each other. Therefore, each of the first and second functional units includes an exclusive area where simultaneous entry of the first functional unit and the second functional unit is prohibited in order to avoid mutual interference. While one is entering, the other is configured to retreat from the exclusive area. However, such a saving operation of the functional unit causes a decrease in throughput.

  On the other hand, in this invention, the board | substrate kind supplied to a 1st and 2nd conveyance part is acquired, and one side is supplied from a board | substrate with a wide width | variety to the 1st and 2nd conveyance part, and to the other If the substrate is supplied from a narrow variety of substrates, the order of substrate conveyance to the first and second conveyance units is determined. Therefore, when a wide substrate is supplied to one of the first and second transfer units, a narrow substrate is supplied to the other transfer unit. As a result, it is possible to suppress the occurrence of a situation in which a wide substrate is simultaneously supplied to both the first and second transfer units, and the interval between the substrates transferred to the first and second processing positions becomes narrow, and throughput is reduced. It is possible to improve.

  Moreover, you may comprise so that the display part which displays the combination determined by the determination part may further be provided. By providing such a display unit, the operator can confirm the determined combination and appropriately execute the setup operation.

  The number of substrate processing mechanisms is not limited to one. Therefore, a plurality of substrate processing mechanisms may be arranged along the first and second transfer units.

  Various specific configurations of the first and second functional units that process the substrate are conceivable. Thus, for example, each of the first and second functional units may be configured to have a mounting head for mounting components on the substrate as processing on the substrate. At this time, each of the first and second functional units may be configured to have a camera that images the substrate as a process for the substrate.

  It is possible to suppress the occurrence of the saving operation of the functional unit and improve the throughput.

It is a block diagram which shows typically the electric constitution of the substrate processing system which can apply this invention. It is a top view which shows typically the mechanical structure of the substrate processing system which can apply this invention. It is a top view which shows typically schematic structure of a mounting machine. FIG. 6 is a plan view partially showing the configuration of the mounting machine in order to explain the retracting operation of the head unit. It is a flowchart which shows the determination flow of a board | substrate supply order. It is a figure which shows the information referred with the flowchart of FIG. 5 as a table | surface. It is a figure which shows an example of the board | substrate conveyance order determined by the host computer.

  FIG. 1 is a block diagram schematically showing an electrical configuration of a substrate processing system to which the present invention can be applied. FIG. 2 is a plan view schematically showing a mechanical configuration of a substrate processing system to which the present invention is applicable. In FIG. 2 and the drawings to be described later, XYZ orthogonal coordinate axes with the vertical direction as the Z axis are shown as appropriate. Hereinafter, the arrow direction of each coordinate axis is appropriately referred to as a positive direction, and the direction opposite to the arrow of each coordinate axis is appropriately referred to as a negative direction.

  In this substrate processing system 1, a printing machine 100, two mounting machines 200, and a reflow furnace 300 arranged in series in the X-axis direction (FIG. 2), which is a substrate transport direction, are integrated by a host computer 400 (FIG. 1). A schematic configuration to control is provided. The host computer 400 includes a CPU (Central Processing Unit) 401 that controls arithmetic processing and a memory 402 that stores various types of information. The host computer 400 accesses a recording medium 410 such as a CD (Compact Disc), a DVD (Digital Versatile Disc), or a USB (Universal Serial Bus) memory, and reads a program 420 from the recording medium 410 (not shown). ). Then, the host computer 400 appropriately issues commands to the control units 110, 210, and 310 of the substrate processing apparatuses 100, 200, and 300 according to the program 420 thus read. On the other hand, each control part 110,210,310 controls the operation | movement of each part of the corresponding substrate processing apparatus 100,200,300 according to this instruction | command, and performs a predetermined | prescribed process. In addition, the host computer 400 includes an input device 440 such as a keyboard and a mouse, in addition to a display 430 that appropriately displays information to the worker.

  As shown in FIG. 2, the substrate processing system 1 has a configuration in which two substrate transport systems Cb and Cf that sequentially transport the substrate S to each of the substrate processing apparatuses 100, 200, and 300 are arranged in parallel. . More specifically, each of the substrate processing apparatuses 100, 200, and 300 has a dual lane structure in which two lanes 4 f and 4 b including a pair of conveyors 2 are arranged in parallel. Each of these two lanes 4f and 4b transports the substrate S received from the outside of the apparatus in the negative X-axis direction in the positive X-axis direction and moves it to the processing position in the apparatus, and then performs processing at the processing position. The received substrate S is transported in the positive direction of the X axis and carried out of the apparatus. Further, in order to transfer the substrate S between the substrate processing apparatuses 100, 200, and 300, two lanes 4f and 4b are also arranged in parallel between the substrate processing apparatuses 100, 200, and 300. Each of these two lanes 4f and 4b is for transferring the substrate received from the lanes 4f and 4b of the upstream device in the X-axis positive direction to the lanes 4f and 4b of the downstream device in the X-axis positive direction. Thus, the substrate transport system Cf is configured by the plurality of lanes 4f arranged linearly in the X-axis direction, and the substrate transport system Cb is configured by the plurality of lanes 4b arranged linearly in the X-axis direction.

  Thus, in the substrate processing system 1, the two substrate transport systems Cf and Cb are arranged in parallel and aligned in the Y-axis direction. For each of these substrate transport systems Cf and Cb, for example, a substrate feeder described in Japanese Patent Application Laid-Open No. 2007-080223 or the like sequentially supplies a plurality of substrates S, and each of the substrate transport systems Cf and Cb is sequentially supplied. The substrate S to be transferred is transported. Then, each of the printing machine 100, the two mounting machines 200, and the reflow furnace 300 arranged along the substrate transport systems Cf and Cb performs a predetermined process on the substrate S sequentially transported by the substrate transport systems Cf and Cb. Run.

  Specifically, the printing machine 100 has a configuration as described in, for example, Japanese Patent Application Laid-Open No. 2011-15122, and the lanes 4f and 4b are transferred to a predetermined processing position with respect to the substrate S. The solder paste is printed. Further, as will be described later, the mounting machine 200 mounts components on a printed board S that has been transported to a predetermined processing position by the lanes 4f and 4b. In addition, the reflow furnace 300 performs reflow on the component-mounted board S that has been transported to a predetermined processing position by the lanes 4f and 4b.

  Next, the configuration of the mounting machine 200 will be described in detail. FIG. 3 is a plan view schematically showing a schematic configuration of the mounting machine. As shown in the figure, in the mounting machine 200, the four conveyors 2 are arranged in the Y-axis direction in parallel with each other. The two conveyors 2 on the Y axis positive direction side constitute the lane 4b, and the two conveyors 2 on the Y axis negative direction side constitute the lane 4f. Among these four conveyors 2, the two outer conveyors 2 are fixed fixed conveyors, while the two middle conveyors 2 are movable conveyors configured to be movable in the Y-axis direction. Accordingly, by appropriately moving the movable conveyor 2 in the Y-axis direction, the interval in the Y-axis direction of the two conveyors 2 constituting the lanes 4f and 4b can be adjusted. That is, each of the lanes 4f and 4b can support both ends of the substrate S in the Y-axis direction by the two conveyors 2 whose intervals are adjusted according to the width Ws of the substrate S in the Y-axis direction. . In other words, the width W4 in the Y-axis direction of each of the lanes 4f and 4b composed of these two conveyors can be adjusted according to the width Ws that the substrate S has in the Y-axis direction. Each of the lanes 4f and 4b transports the substrate S received from the outside of the apparatus to predetermined processing positions Pf and Pb, and receives component mounting by the head units 5f and 5b described later at the processing positions Pf and Pb. The unloaded substrate S is carried out of the apparatus. As shown in FIG. 3, the processing positions Pf and Pb on which the substrate S receives component mounting are adjacent to each other in the Y-axis direction, and the substrates W at the processing positions Pf and Pb are spaced in the Y-axis direction. Adjacent to each other with ΔS.

  Two component supply units 6 are arranged on each side of the lanes 4f and 4b in the Y-axis direction. A plurality of tape feeders 61 are attached to each component supply unit 6. Each of the tape feeders 61 is provided with a reel (not shown) around which a tape that stores and holds electronic components at a constant pitch is wound, and the electronic components can be supplied by the tape feeders 61. As a result, electronic components can be picked up by the head units 5f and 5b described later.

  The mounting machine 200 is provided with two head units 5f and 5b corresponding to the two lanes 4f and 4b. Each head unit 5f, 5b is movable in the XY plane by a moving mechanism (not shown) and holds three mounting heads 51 arranged in the X-axis direction. This mounting head 51 has a suction nozzle (not shown) for sucking components attached to its lower end. When the head unit 5f, 5b picks up a component from the tape feeder 61 by the suction nozzle, the head unit 5f, 5b moves to above the substrate S at the processing positions Pf, Pb and mounts the component on the substrate S. Specifically, the head unit 5f mounts the components picked up from the tape feeder 61 on the lower side of FIG. 3 on the substrate S that the lane 4f has transported to the processing position Pf, and the head unit 5b has the lower side of FIG. The components picked up from the tape feeder 61 are mounted on the substrate S that the lane 4b has transported to the processing position Pb.

  A camera 52 is attached to each of the head units 5f and 5b. This camera 52 is for imaging the bad mark Mb and fiducial mark Mf on the substrate S. That is, when the substrate S is transported to the processing positions Pf and Pb, each of the head units 5f and 5b moves above the substrate S to be mounted on the component before mounting the components, The camera 52 is positioned above the marks Mb and Mf. In this state, the camera 52 images each of the marks Mb and Mf. Note that the imaging results of the marks Mb and Mf are processed by the control unit 210 (FIG. 1) provided in the mounting machine 200. Specifically, the control unit 210 determines the quality of the board S based on the imaging result of the bad mark Mb, determines whether or not to perform component mounting on the board, and also determines the fiducial mark. Based on the imaging result of Mf, the relative positional relationship between the head units 5f and 5b and the substrate S is determined, and the position of the head units 5f and 5b during component mounting is controlled.

  Incidentally, in the above-described component mounting process and mark imaging process, each substrate S is fixed to the processing positions Pf and Pb by fixing means (not shown). That is, each substrate S that has been transported to the processing positions Pf and Pb is subjected to component mounting processing and mark imaging processing while being fixed in position by the fixing means. When these processes are completed, the position of the substrate S is released, and the substrate S is transferred from the processing positions Pf and Pb toward the outside of the apparatus.

  Thus, in this mounting machine 200, the lanes 4f and 4b (substrate transport systems Cf and Cb) for sequentially transporting the substrates S in the X-axis direction are arranged in parallel with each other. Then, each head unit 5f, 5b mounts a component on the substrate S that has been transported by the lanes 4f, 4b to the processing positions Pf, Pb adjacent in the Y-axis direction. At this time, the width W4 that the lanes 4f and 4b have in the Y-axis direction can be adjusted according to the width Ws that the substrate W to be transported has in the Y-axis direction. Therefore, as the width of the lanes 4f and 4b increases, the distance ΔS between the two substrates S at the processing positions Pf and Pb decreases.

  In such a configuration, when the wide substrate S is simultaneously transferred to both the lanes 4f and 4b, the width W4 of the lanes 4f and 4b is increased, and accordingly, the processing positions Pf and Pb are increased. In some cases, the interval ΔS between the substrates S that have been transported to each other becomes narrower. In such a case, a series of processes such as imaging of the marks Mb and Mf and component mounting are performed in parallel on the substrate S in which the two head units 5f and 5b are close to each other. The units 5f and 5b may interfere with each other. Therefore, in this embodiment, in order to avoid mutual interference, an exclusive area in which simultaneous entry of the head units 5f and 5b is prohibited is appropriately provided. And while one of the head units 5f and 5b is entering the exclusive area, the other is configured to retreat from the exclusive area. This evacuation operation will be described in detail with reference to FIG.

  FIG. 4 is a plan view partially showing the configuration of the mounting machine in order to explain the retracting operation of the head unit. In FIG. 4, a wide substrate S is positioned at both of the processing positions Pf and Pb of the lanes 4f and 4b, and the interval ΔS between the two substrates S is narrow. In such a case, in the mounting machine 200, the exclusive region Re is set in a range where the substrates S face each other in the Y-axis direction or in the vicinity thereof. The specific setting method of the exclusive area Re can be variously modified. For example, the exclusive area Re is set so as to include the area between the two substrates S in the Y-axis direction, or the head units 4f and 4b are provided. A trajectory that moves in accordance with a series of processes may be obtained for each head unit 4f, 4b, and the exclusive region Re may be set so as to include a range where these trajectories overlap. The head units 4f and 4b are prohibited from entering the exclusive area Re set in this way. Therefore, while one of the head units 4f and 4b enters the exclusive area Re, the other retreats from the exclusive area Re. Thus, mutual interference between the head units 4f and 4b is avoided.

  As described above, in this embodiment, the head units 4f and 4b are appropriately retracted from the exclusive area Re, thereby avoiding mutual interference between the head units 4f and 4b. However, such retracting operation of the head units 4f and 4b causes a decrease in throughput. Therefore, in this embodiment, as will be described below, by optimizing the order in which the substrates S are supplied to the substrate transport systems Cf and Cb, the occurrence of the retracting operation of the head units 4f and 4b is suppressed, The throughput is improved.

  FIG. 5 is a flowchart showing a flow of determining the substrate supply order. FIG. 6 is a diagram showing information referred to in the flowchart of FIG. 5 as a table. The flowchart shown in FIG. 5 is recorded on the recording medium 410 as the program 420, and the host computer 400 reads the program 420 from the recording medium 410 and executes the flowchart shown in FIG. Below, the case where seven types of substrates A to G (FIG. 6) are produced by the substrate processing system 1 will be described as an example.

  When the substrate supply order determination flow is started, in step S10, information related to restrictions on each of the substrate processing apparatuses 100, 200, and 300 is acquired. This information is information indicating the type of the substrate S that can be processed by each of the substrate processing apparatuses 100, 200, and 300, and is stored in the control units 110, 210, and 310 of the substrate processing apparatuses 100, 200, and 300. Therefore, the host computer 400 obtains this information from each control unit 110, 210, 310. Further, in step S11, based on the information acquired in this way, the substrate transport systems Cf and Cb that can execute processing are determined for each of the substrate types A to G. As a result, in the example shown in the table of FIG. 6, it is determined that the substrate S of the type D cannot be produced by the substrate carrying system Cf and can be produced only by the substrate carrying system Cb. Further, it is determined that other types of substrates S can be produced by either of the substrate transport systems Cf and Cb.

  In subsequent step S12, information relating to the number of production for each board type A to G, the cycle time for each board type A to G, and the setup time is acquired. These pieces of information are input in advance into the host computer 400 by the operator via the input device 440 and stored in the memory 402, and the host computer 400 reads these pieces of information from the memory 402 in step S12. Incidentally, the cycle time is an expected time required for producing one substrate S by the substrate processing system 1. In the example shown in the table of FIG. 6, the cycle times when the substrates S of the substrate types A to G are produced in the substrate transfer systems Cf and Cb are described. The setup time is an expected time required for changing the mask of the printing machine 100 and changing the parts of the component supply unit 6 of the mounting machine 200, which is required when the board type is changed. In the example shown in the table of FIG. 6, the setup time is uniformly set to 900 [seconds]. At this time, if components corresponding to a plurality of board types are set in the component supply unit 6 in advance, it is not necessary to reset the components in the component supply unit 6 every time the board type changes, and the component supply of the mounting machine 200 is performed. The time required for the replacement of the part 6 can be shortened or omitted.

  In the next step S13, the host computer 400 assigns the substrate types to be produced by the substrate transport systems Cf and Cb so that the total expected production time is leveled by the substrate transport systems Cf and Cb. Here, the total expected production time is the time required for each substrate transport system Cf, Cb to finish producing all the substrates S of the substrate type assigned to each. Using the example shown in the table of FIG. 6, the operation in step S13 will be specifically described as follows.

  That is, a value obtained by multiplying the cycle time of the substrate S by the number of produced substrates S is obtained for each of the substrate types A to G for each of the substrate transport systems Cf and Cb, and is stored in the memory 402 as the expected production time for each substrate type. Is done. Based on the value stored in the memory 402, the total expected production time is calculated by adding the total of the expected production time and the total setup time of each assigned board type for each of the board transport systems Cf and Cb. Is done. Specifically, the total expected production time in each of the substrate transfer systems Cf and Cb is calculated while changing the substrate type assigned to each of the substrate transfer systems Cf and Cb, and the total expected production time of the substrate transfer systems Cf and Cb is calculated. It is required to assign a board type that minimizes the difference.

  Thus, when the assignment of substrate types to the substrate transfer systems Cf and Cb is determined in step S13, the order of supplying the assigned types of substrates S to the substrate transfer systems Cf and Cb is determined. S14 to S19 are executed. In the following description, it is assumed that the substrate types B, C, E, and G are assigned to the substrate transfer system Cf and the substrate types A, D, and F are assigned to the substrate transfer system Cb in step S13.

  In step S14, the width Ws of the substrate S of each type A to G is acquired. This information is input in advance to the host computer 400 by the operator via the input device 440 and stored in the memory 402. The host computer 400 reads this information from the memory 402 in step S14. In step S15, the host computer sequentially supplies the substrate transport system Cf from the wide variety of substrates S to the substrate transport system Cf, and sequentially supplies the substrate S from the narrow product variety to the substrate transport system Cb. , The order of substrate transport to Cb is determined (FIG. 7).

  Here, FIG. 7 is a diagram showing an example of the board transfer order determined by the host computer, and the size relationship between the board widths Ws of the various types assigned to the board transfer system Cf is E> B> C> G. Yes, this corresponds to the case where the size relationship of the substrate width Ws of each product type assigned to the substrate transport system Cb is A <D <C. Further, FIG. 7 also shows the setup work performed when the board type is switched.

  In step S16, the substrate supply order determined in step S15 is displayed on the display 430 of the host computer 400. Therefore, the operator can appropriately perform setup so that the substrates S are transported in the determined substrate supply order based on the display result of the display 430.

  As described above, in this embodiment, the substrate type to be supplied to the substrate transfer systems Cf and Cb is acquired (step S13), and one of the substrate transfer systems Cf and Cb is supplied from a wide variety of substrates S. When the substrate is supplied to the other side from a narrow-type substrate S, the order of substrate transfer to the substrate transfer systems Cf and Cb is determined (step S15). For this reason, when the wide substrate S is supplied to one of the substrate transfer systems Cf and Cb, the narrow substrate S is supplied to the other substrate transfer system. As a result, it is possible to suppress the occurrence of a situation in which the wide substrate S is simultaneously supplied to both the substrate transport systems Cf and Cb, and the interval ΔS between the substrates S transported to the substrate transport systems Cf and Cb is reduced. Throughput can be improved.

  In this embodiment, a display 430 for displaying the combination determined by the host computer 400 is further provided. By providing such a display 430, the operator can confirm the determined combination and appropriately execute the setup work.

Others As described above, in this embodiment, the substrate processing system 1 corresponds to the “substrate processing system” of the present invention, the mounting machine 200 corresponds to the “substrate processing apparatus” of the present invention, and the program 420 corresponds to “ The recording medium 410 corresponds to a “program” and the “recording medium” of the present invention. The substrate transport systems Cf and Cb (lanes 4f and 4b) correspond to the “first and second transport units” of the present invention, and the head units 5f and 5b serve as the “first and second functional units” of the present invention. The “substrate processing mechanism” of the present invention is configured from the head units 5f and 5b, the host computer 400 corresponds to the “determining unit” of the present invention, the display 430 corresponds to the “display unit” of the present invention, The mounting head 51 corresponds to the “mounting head” of the present invention, and the camera 52 corresponds to the “camera” of the present invention.

  The present invention is not limited to the above-described embodiments, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the above embodiment, the present invention is applied to the substrate processing system 1 including the mounting machine 200 including the head units 5f and 5b equipped with the mounting head 51 as the “substrate processing apparatus” of the present invention. explained. However, the specific configuration of the “substrate processing apparatus” of the present invention is not limited to this. Therefore, the substrate processing apparatus, for example, replaces the mounting head 51 with a dispenser for applying an adhesive or the like to the substrate on the head unit 5f, 5b, or an inspection camera for inspecting the substrate with the head unit 5f, You may equip with 5b. Alternatively, in the substrate processing apparatus, one head unit 5f may be equipped with the mounting head 51, and the other head unit 5b may be equipped with a dispenser or an inspection camera.

  Various modifications can also be made to specific configurations of the substrate processing system 1, the mounting machine 200, and the like. Therefore, for example, the number of mounting machines 200 and the number of members constituting the mounting machine 200 can be changed. Furthermore, various modifications can be employed for the number of substrate types, the shape and size of the substrate S, and the position and number of fiducial marks Mf and bad marks Mb on the substrate S.

  In the above embodiment, in order to make the width W4 of the lanes 4f and 4b variable, the conveyors 2 (the middle of the four conveyors 2 arranged in the Y-axis direction) are arranged in the adjacent portions of the lanes 4f and 4b. The two conveyors 2) were configured to be movable. However, the configuration for changing the width W4 of the lanes 4f and 4b is not limited to this, and various modifications are possible. Therefore, for example, the conveyor 2 on the Y axis positive direction side (or the Y axis negative direction side) of each of the lanes 4f and 4b is configured to be movable, or all four conveyors 2 constituting the lanes 4f and 4b are configured to be movable. Or may be configured.

  In the above embodiment, the substrate transport systems Cf and Cb transport the substrate S in the same direction (X-axis positive direction). However, for example, the present invention can also be applied to the substrate processing system 1 in which the substrate transport systems Cf and Cb transport the substrate S in opposite directions (one is in the positive direction of the X axis and the other is in the negative direction of the X axis). is there.

DESCRIPTION OF SYMBOLS 1 ... Substrate processing system 100 ... Printing machine 200 ... Mounting machine 300 ... Reflow furnace 400 ... Host computer 430 ... Display 410 ... Recording medium 420 ... Program Cf ... Substrate conveyance system Cb ... Substrate conveyance system 4f ... Lane 4b ... Lane 2 ... Conveyor 5f ... Head unit 5b ... Head unit 51 ... Mounting head 52 ... Camera S ... Substrate

Claims (8)

A first and a second transport unit arranged in parallel with each other to sequentially transport a substrate having a width in the Y-axis direction supplied to each in an X-axis direction orthogonal to the Y-axis direction;
A first functional unit that performs processing on the substrate that has been transported to the first processing position by the first transport unit, and the second transport to a second processing position that is adjacent to the first processing position in the Y-axis direction. A substrate processing mechanism having a second functional unit that performs processing on the substrate conveyed by the unit;
A determination unit that determines a transfer order of the substrates to the first and second transfer units;
The width that the first and second transport units have in the Y-axis direction can be adjusted according to the width of the substrate that each transports,
As the width of the first or second transport unit increases, the distance between the substrates at the first and second processing positions decreases.
In the substrate processing mechanism, each of the first and second function units is in an exclusive area where simultaneous entry of the first function unit and the second function unit is prohibited in order to avoid mutual interference. While one of the first and second functional units enters, the other retreats from the exclusive area,
The determination unit
For the plurality of types of substrates to be supplied, determine whether each of the first and second transport units can be produced, and based on the cycle time, the number of produced sheets, and the setup time required to produce one substrate, Calculating an expected production time required for production in a production unit that can produce the first and second conveyance units;
Based on the calculation result of the expected production time, the time required for producing the plurality of substrates to which the first transport unit is allocated while changing the type of the substrate to be allocated to the first and second transport units The difference between the time required to produce the plurality of substrates to which the second transport unit is allocated is obtained, and the type of the substrate to be allocated to the first and second transport units so that the difference is minimized. Decide
One of the first and second transport units is supplied from the substrate of a wide variety among the plurality of varieties allocated to one, and the one of the narrow varieties among the plurality of varieties allocated to the other When supplied from a substrate, the substrate processing system is characterized in that the transfer order of the substrate to the first and second transfer units is determined based on information indicating the width of each type of the substrate .   The substrate processing system according to claim 1, further comprising a display unit that displays the combination determined by the determination unit.   The substrate processing system according to claim 1, wherein a plurality of the substrate processing mechanisms are arranged along the first and second transfer units.   4. The substrate processing system according to claim 1, wherein each of the first and second functional units includes a mounting head that mounts a component on the substrate as processing on the substrate. 5.   5. The substrate processing system according to claim 4, wherein each of the first and second functional units includes a camera that images the substrate as processing on the substrate. The first and second transport units arranged in parallel to each other sequentially transport the substrates having a width in the Y-axis direction supplied to each in the X-axis direction orthogonal to the Y-axis direction, and the first processing position at the first processing position. The first functional unit that performs processing on the substrate transported by the first transport unit, and the second transport unit transported to the second processing position adjacent to the first processing position in the Y-axis direction. A substrate processing mechanism having a second functional unit that performs processing on the substrate, and the width that the first and second transport units have in the Y-axis direction depends on the width of the substrate that each transports And the width of the first or second transport unit is increased, so that the distance between the substrates at the first and second processing positions is reduced. In the substrate processing mechanism, Each of the first and second functional units is While one of the first and second functional units enters the exclusive area where simultaneous entry of the first functional unit and the second functional unit is prohibited in order to avoid mutual interference, the other A substrate supply order determination method for determining a transfer order of the substrates to the first and second transfer units for a substrate processing system that is retracted from the exclusive area,
For the plurality of types of substrates to be supplied, determine whether each of the first and second transport units can be produced, and based on the cycle time, the number of produced sheets, and the setup time required to produce one substrate, A step of calculating an expected production time required for production in a production unit that can produce the first and second conveyance units;
Based on the calculation result of the expected production time, the time required for producing the plurality of substrates to which the first transport unit is allocated while changing the type of the substrate to be allocated to the first and second transport units The difference between the time required to produce the plurality of substrates to which the second transport unit is allocated is obtained, and the type of the substrate to be allocated to the first and second transport units so that the difference is minimized. A step of determining;
One of the first and second transport units is supplied from the substrate of a wide variety among the plurality of varieties allocated to one, and the one of the narrow varieties among the plurality of varieties allocated to the other And a step of determining the order of transport of the substrate to the first and second transport units based on information indicating the width of the substrate of each type when supplied from the substrate. Substrate supply order determination method.   A program causing a computer to execute each of the steps included in the substrate supply order determination method according to claim 6.   A recording medium on which the program according to claim 7 is recorded.

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