JP5760413B2 - 電子機器 - Google Patents
電子機器 Download PDFInfo
- Publication number
- JP5760413B2 JP5760413B2 JP2010273256A JP2010273256A JP5760413B2 JP 5760413 B2 JP5760413 B2 JP 5760413B2 JP 2010273256 A JP2010273256 A JP 2010273256A JP 2010273256 A JP2010273256 A JP 2010273256A JP 5760413 B2 JP5760413 B2 JP 5760413B2
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- JP
- Japan
- Prior art keywords
- arm
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 230000005284 excitation Effects 0.000 claims description 31
- 239000013078 crystal Substances 0.000 description 81
- 239000010453 quartz Substances 0.000 description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 36
- 238000000034 method Methods 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000001413 cellular effect Effects 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 125000002066 L-histidyl group Chemical group [H]N1C([H])=NC(C([H])([H])[C@](C(=O)[*])([H])N([H])[H])=C1[H] 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010273256A JP5760413B2 (ja) | 2010-12-08 | 2010-12-08 | 電子機器 |
US13/044,106 US20110227658A1 (en) | 2010-03-16 | 2011-03-09 | Resonator element, piezoelectric device, and electronic device |
CN201110070435.XA CN102195610B (zh) | 2010-03-16 | 2011-03-16 | 振动片、压电装置、以及电子设备 |
US13/962,288 US20140001921A1 (en) | 2010-03-16 | 2013-08-08 | Resonator element, piezoelectric device, and electronic device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010273256A JP5760413B2 (ja) | 2010-12-08 | 2010-12-08 | 電子機器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012124693A JP2012124693A (ja) | 2012-06-28 |
JP2012124693A5 JP2012124693A5 (enrdf_load_stackoverflow) | 2014-01-09 |
JP5760413B2 true JP5760413B2 (ja) | 2015-08-12 |
Family
ID=46505692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010273256A Expired - Fee Related JP5760413B2 (ja) | 2010-03-16 | 2010-12-08 | 電子機器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5760413B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015008353A (ja) * | 2013-06-24 | 2015-01-15 | セイコーエプソン株式会社 | 振動素子、振動デバイス、電子機器、移動体、および振動素子の製造方法 |
TWI634742B (zh) | 2013-11-16 | 2018-09-01 | 精工愛普生股份有限公司 | 振動片、振動子、振盪器、電子機器及移動體 |
JP6892744B2 (ja) * | 2015-08-24 | 2021-06-23 | 日東電工株式会社 | 積層光学フィルム、積層光学フィルムの製造方法、光学部材、および画像表示装置 |
JP2018061286A (ja) * | 2017-12-08 | 2018-04-12 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3931662B2 (ja) * | 2001-01-15 | 2007-06-20 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
JP4356366B2 (ja) * | 2003-06-10 | 2009-11-04 | セイコーエプソン株式会社 | 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器 |
JP4301201B2 (ja) * | 2005-04-27 | 2009-07-22 | セイコーエプソン株式会社 | 圧電発振器 |
JP4207873B2 (ja) * | 2004-09-24 | 2009-01-14 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイス |
JP5045890B2 (ja) * | 2007-02-28 | 2012-10-10 | セイコーエプソン株式会社 | 圧電振動片 |
-
2010
- 2010-12-08 JP JP2010273256A patent/JP5760413B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2012124693A (ja) | 2012-06-28 |
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