JP5736095B1 - タッチプローブ - Google Patents
タッチプローブ Download PDFInfo
- Publication number
- JP5736095B1 JP5736095B1 JP2015035585A JP2015035585A JP5736095B1 JP 5736095 B1 JP5736095 B1 JP 5736095B1 JP 2015035585 A JP2015035585 A JP 2015035585A JP 2015035585 A JP2015035585 A JP 2015035585A JP 5736095 B1 JP5736095 B1 JP 5736095B1
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- probe
- displacement
- stylus
- touch probe
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000523 sample Substances 0.000 title claims abstract description 123
- 238000006073 displacement reaction Methods 0.000 claims abstract description 59
- 230000007246 mechanism Effects 0.000 claims abstract description 35
- 241001422033 Thestylus Species 0.000 claims abstract description 18
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 230000005856 abnormality Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 23
- 238000003754 machining Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Images
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
Description
Claims (5)
- スタイラスと、
前記スタイラスの先端部に形成された、被測定物と接触する測定子と、
前記スタイラス内に形成され、前記スタイラスの軸方向に垂直でかつ互いに直交する2方向に変位可能に構成された変位機構と、
前記2方向の各変位を検出する前記変位機構に設けられた変位検出部と、
を備え、
前記スタイラスは、前記変位機構を含めて一体形成されていることを特徴とするタッチプローブ。 - 前記変位機構は、前記互いに直交する2方向に揺動可能な支点を有する構造を有していることを特徴とする請求項1に記載のタッチプローブ。
- 前記変位検出部は、差動トランス式のトランスデューサによって構成されていることを特徴とする請求項1又は2に記載のタッチプローブ。
- 前記変位検出部の検出範囲を超える変位量を与える衝撃が前記スタイラスに生じた場合に、該衝撃を吸収するとともに再度スタイラスを元の位置に復帰させることができる逃げ機構を前記スタイラスの上部にさらに備えたことを特徴とする請求項1〜3のいずれかに記載のタッチプローブ。
- 前記逃げ機構は、接点構造を有し、該逃げ機構動作時には、異常として前記変位検出部が変位の読み込みを行わないことを特徴とする請求項4に記載のタッチプローブ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015035585A JP5736095B1 (ja) | 2015-02-25 | 2015-02-25 | タッチプローブ |
Applications Claiming Priority (1)
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---|---|---|---|
JP2015035585A JP5736095B1 (ja) | 2015-02-25 | 2015-02-25 | タッチプローブ |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011078710A Division JP5706216B2 (ja) | 2011-03-31 | 2011-03-31 | タッチプローブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5736095B1 true JP5736095B1 (ja) | 2015-06-17 |
JP2015127713A JP2015127713A (ja) | 2015-07-09 |
Family
ID=53487098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015035585A Active JP5736095B1 (ja) | 2015-02-25 | 2015-02-25 | タッチプローブ |
Country Status (1)
Country | Link |
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JP (1) | JP5736095B1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54150161A (en) * | 1978-05-17 | 1979-11-26 | Agency Of Ind Science & Technol | Two dimensional micro-displacement detector |
JPS568502A (en) * | 1979-05-01 | 1981-01-28 | Renishaw Electrical Ltd | Probe for measuring instrument |
JPS63131016A (ja) * | 1986-11-20 | 1988-06-03 | Mitsutoyo Corp | 測定方法 |
JPH08219753A (ja) * | 1995-02-14 | 1996-08-30 | Nikon Corp | 変位測定プローブ |
-
2015
- 2015-02-25 JP JP2015035585A patent/JP5736095B1/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54150161A (en) * | 1978-05-17 | 1979-11-26 | Agency Of Ind Science & Technol | Two dimensional micro-displacement detector |
JPS568502A (en) * | 1979-05-01 | 1981-01-28 | Renishaw Electrical Ltd | Probe for measuring instrument |
JPS63131016A (ja) * | 1986-11-20 | 1988-06-03 | Mitsutoyo Corp | 測定方法 |
JPH08219753A (ja) * | 1995-02-14 | 1996-08-30 | Nikon Corp | 変位測定プローブ |
Also Published As
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JP2015127713A (ja) | 2015-07-09 |
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