JP5724438B2 - ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法 - Google Patents

ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法 Download PDF

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Publication number
JP5724438B2
JP5724438B2 JP2011032991A JP2011032991A JP5724438B2 JP 5724438 B2 JP5724438 B2 JP 5724438B2 JP 2011032991 A JP2011032991 A JP 2011032991A JP 2011032991 A JP2011032991 A JP 2011032991A JP 5724438 B2 JP5724438 B2 JP 5724438B2
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Japan
Prior art keywords
halogen
gas
valve
containing gas
shock wave
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JP2011032991A
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English (en)
Japanese (ja)
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JP2012097892A (ja
JP2012097892A5 (https=
Inventor
章史 八尾
章史 八尾
智典 梅崎
智典 梅崎
啓太 中原
啓太 中原
雄太 武田
雄太 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
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Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to JP2011032991A priority Critical patent/JP5724438B2/ja
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to PCT/JP2011/070336 priority patent/WO2012046533A1/ja
Priority to KR1020137010336A priority patent/KR20130079553A/ko
Priority to EP11830466.6A priority patent/EP2626615A4/en
Priority to US13/878,292 priority patent/US20130221024A1/en
Priority to TW100136314A priority patent/TWI441998B/zh
Publication of JP2012097892A publication Critical patent/JP2012097892A/ja
Publication of JP2012097892A5 publication Critical patent/JP2012097892A5/ja
Application granted granted Critical
Publication of JP5724438B2 publication Critical patent/JP5724438B2/ja
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  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Pipe Accessories (AREA)
JP2011032991A 2010-10-08 2011-02-18 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法 Active JP5724438B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2011032991A JP5724438B2 (ja) 2010-10-08 2011-02-18 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法
KR1020137010336A KR20130079553A (ko) 2010-10-08 2011-09-07 할로겐 함유 가스 공급장치 및 할로겐 함유 가스 공급방법
EP11830466.6A EP2626615A4 (en) 2010-10-08 2011-09-07 DEVICE FOR SUPPLYING HALOGEN-CONTAINING GAS AND METHOD FOR SUPPLYING HALOGEN-CONTAINING GAS
US13/878,292 US20130221024A1 (en) 2010-10-08 2011-09-07 Halogen-containing gas supply apparatus and halogen-containing gas supply method
PCT/JP2011/070336 WO2012046533A1 (ja) 2010-10-08 2011-09-07 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法
TW100136314A TWI441998B (zh) 2010-10-08 2011-10-06 A halogen-containing gas supply device and a halogen-containing gas supply method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010228275 2010-10-08
JP2010228275 2010-10-08
JP2011032991A JP5724438B2 (ja) 2010-10-08 2011-02-18 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法

Publications (3)

Publication Number Publication Date
JP2012097892A JP2012097892A (ja) 2012-05-24
JP2012097892A5 JP2012097892A5 (https=) 2014-04-03
JP5724438B2 true JP5724438B2 (ja) 2015-05-27

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JP2011032991A Active JP5724438B2 (ja) 2010-10-08 2011-02-18 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法

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JP (1) JP5724438B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5899883B2 (ja) * 2011-01-26 2016-04-06 セントラル硝子株式会社 高圧ガスの供給方法、衝撃波減衰機構を有する機器及び高圧ガスの供給装置
US20200203127A1 (en) * 2018-12-20 2020-06-25 L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude Systems and methods for storage and supply of f3no-free fno gases and f3no-free fno gas mixtures for semiconductor processes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3424503C2 (de) * 1984-07-04 1986-05-07 Drägerwerk AG, 2400 Lübeck Druckstoß-Dämpfer in Druckgasleitungen
DE19531505B4 (de) * 1995-08-26 2006-07-06 Air Liquide Deutschland Gmbh Dosiervorrichtung zur Entnahme von Gasen aus einem Druckbehälter
US6257000B1 (en) * 2000-03-22 2001-07-10 Luping Wang Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
US20080000532A1 (en) * 2006-06-30 2008-01-03 Matthew Lincoln Wagner Low release rate cylinder package

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JP2012097892A (ja) 2012-05-24

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