JP2012097892A5 - - Google Patents
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- Publication number
- JP2012097892A5 JP2012097892A5 JP2011032991A JP2011032991A JP2012097892A5 JP 2012097892 A5 JP2012097892 A5 JP 2012097892A5 JP 2011032991 A JP2011032991 A JP 2011032991A JP 2011032991 A JP2011032991 A JP 2011032991A JP 2012097892 A5 JP2012097892 A5 JP 2012097892A5
- Authority
- JP
- Japan
- Prior art keywords
- halogen
- containing gas
- gas supply
- shock wave
- external device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052736 halogen Inorganic materials 0.000 claims description 19
- 150000002367 halogens Chemical class 0.000 claims description 19
- 230000035939 shock Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 3
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims 1
- 229910052794 bromium Inorganic materials 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- 239000000460 chlorine Substances 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 229910052740 iodine Inorganic materials 0.000 claims 1
- 239000011630 iodine Substances 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 238000002485 combustion reaction Methods 0.000 description 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011032991A JP5724438B2 (ja) | 2010-10-08 | 2011-02-18 | ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法 |
| KR1020137010336A KR20130079553A (ko) | 2010-10-08 | 2011-09-07 | 할로겐 함유 가스 공급장치 및 할로겐 함유 가스 공급방법 |
| EP11830466.6A EP2626615A4 (en) | 2010-10-08 | 2011-09-07 | DEVICE FOR SUPPLYING HALOGEN-CONTAINING GAS AND METHOD FOR SUPPLYING HALOGEN-CONTAINING GAS |
| US13/878,292 US20130221024A1 (en) | 2010-10-08 | 2011-09-07 | Halogen-containing gas supply apparatus and halogen-containing gas supply method |
| PCT/JP2011/070336 WO2012046533A1 (ja) | 2010-10-08 | 2011-09-07 | ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法 |
| TW100136314A TWI441998B (zh) | 2010-10-08 | 2011-10-06 | A halogen-containing gas supply device and a halogen-containing gas supply method |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010228275 | 2010-10-08 | ||
| JP2010228275 | 2010-10-08 | ||
| JP2011032991A JP5724438B2 (ja) | 2010-10-08 | 2011-02-18 | ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012097892A JP2012097892A (ja) | 2012-05-24 |
| JP2012097892A5 true JP2012097892A5 (https=) | 2014-04-03 |
| JP5724438B2 JP5724438B2 (ja) | 2015-05-27 |
Family
ID=46390018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011032991A Active JP5724438B2 (ja) | 2010-10-08 | 2011-02-18 | ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5724438B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5899883B2 (ja) * | 2011-01-26 | 2016-04-06 | セントラル硝子株式会社 | 高圧ガスの供給方法、衝撃波減衰機構を有する機器及び高圧ガスの供給装置 |
| US20200203127A1 (en) * | 2018-12-20 | 2020-06-25 | L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude | Systems and methods for storage and supply of f3no-free fno gases and f3no-free fno gas mixtures for semiconductor processes |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3424503C2 (de) * | 1984-07-04 | 1986-05-07 | Drägerwerk AG, 2400 Lübeck | Druckstoß-Dämpfer in Druckgasleitungen |
| DE19531505B4 (de) * | 1995-08-26 | 2006-07-06 | Air Liquide Deutschland Gmbh | Dosiervorrichtung zur Entnahme von Gasen aus einem Druckbehälter |
| US6257000B1 (en) * | 2000-03-22 | 2001-07-10 | Luping Wang | Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas |
| US20080000532A1 (en) * | 2006-06-30 | 2008-01-03 | Matthew Lincoln Wagner | Low release rate cylinder package |
-
2011
- 2011-02-18 JP JP2011032991A patent/JP5724438B2/ja active Active
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