JP5722808B2 - Peeling device, peeling system, peeling method and peeling program - Google Patents

Description

  Embodiments disclosed herein relate to a peeling apparatus, a peeling system, a peeling method, and a peeling program.

  In recent years, for example, in the semiconductor device manufacturing process, semiconductor substrates such as silicon wafers and compound semiconductor wafers have become larger and thinner. A large-diameter and thin semiconductor substrate may be warped or cracked during transportation or polishing. For this reason, after a support substrate is bonded to a semiconductor substrate and reinforced, a transport or polishing process is performed, and then a process of peeling the support substrate from the semiconductor substrate is performed.

  As a technique for peeling the support substrate from the semiconductor substrate, a liquid is sprayed between the semiconductor substrate and the support substrate at a spray pressure larger than the bonding strength between the semiconductor substrate and the support substrate. A technique for performing peeling has been proposed (see, for example, Patent Document 1).

JP-A-9-167724

  However, when the substrate is peeled off using the above-described technique, the liquid is ejected with a large ejection pressure, so that the semiconductor substrate or the support substrate may be damaged. Such a problem is a problem that may also occur in a manufacturing process such as SOI (Silicon On Insulator) that involves peeling of the substrate.

  An object of one embodiment is to provide a peeling apparatus, a peeling system, a peeling method, and a peeling program capable of appropriately performing a substrate peeling process.

Peeling device according to one embodiment of the embodiment includes a first holding portion, and a second holding portion, and the adsorption moving unit, a moving mechanism, and a control unit. The first holding unit holds the first substrate by suction. The second holding unit sucks and holds the central portion of the second substrate bonded to the first substrate . Before Symbol suction moving unit, to the second adsorbing part of the area of the outer peripheral portion of the second substrate held by the holding portion in a direction away said part of the area from the plate surface of the first substrate Move. The moving mechanism moves the second holding unit and the suction moving unit in a direction away from the first holding unit. The controller is configured to move the second holding unit and the suction moving unit by the moving mechanism and pull the central part and the partial area away from the first substrate. Thus, an operation of further pulling the partial area in a direction away from the first substrate is executed.

  According to one aspect of the embodiment, it is possible to provide a peeling apparatus, a peeling system, a peeling method, and a peeling program that can appropriately perform a peeling process of a substrate.

FIG. 1 is a schematic plan view showing the configuration of the peeling system according to the first embodiment. FIG. 2 is a schematic side view of the polymerization substrate. FIG. 3 is a schematic side view showing the configuration of the peeling apparatus according to the first embodiment. FIG. 4 is a schematic plan view illustrating configurations of the second holding unit and the suction moving unit. FIG. 5 is a schematic enlarged perspective view of a portion H1 shown in FIG. FIG. 6 is a diagram illustrating a suction region by the second holding unit and a suction region by the suction moving unit. FIG. 7 is a flowchart showing a peeling processing procedure by the peeling system. FIG. 8A is an explanatory diagram (No. 1) of a peeling operation by the peeling apparatus according to the first embodiment. FIG. 8B is an explanatory diagram (part 2) of the peeling operation performed by the peeling apparatus according to the first embodiment. FIG. 8C is an explanatory diagram (No. 3) of the peeling operation by the peeling apparatus according to the first embodiment. FIG. 9 is a diagram illustrating another configuration of the cylinder in the suction moving unit. FIG. 10 is a diagram illustrating another configuration of the main body in the suction moving unit. FIG. 11 is a schematic side view showing the configuration of the peeling apparatus according to the second embodiment. FIG. 12 is a schematic plan view illustrating the configuration of the suction moving unit according to the second embodiment. FIG. 13 is a schematic side view showing the configuration of the peeling apparatus according to the third embodiment. FIG. 14 is an explanatory diagram of a peeling operation by the peeling apparatus according to the third embodiment. FIG. 15 is a schematic side view showing the configuration of the peeling apparatus according to the fourth embodiment. FIG. 16 is an explanatory diagram of the insertion operation of the sharp member. FIG. 17 is a schematic side view showing the configuration of the peeling apparatus according to the fifth embodiment. FIG. 18 is a schematic plan view showing the configuration of the peeling system according to the sixth embodiment. FIG. 19A is a schematic diagram (part 1) illustrating a manufacturing process of an SOI substrate. FIG. 19B is a schematic diagram (part 2) illustrating the manufacturing process of the SOI substrate.

  Hereinafter, embodiments of a peeling device, a peeling system, a peeling method, and a peeling program disclosed in the present application will be described in detail with reference to the accompanying drawings. In addition, this invention is not limited by embodiment shown below.

(First embodiment)
<1. Peeling system>
First, the configuration of the peeling system according to the first embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a schematic plan view showing a configuration of a peeling system according to the first embodiment, and FIG. 2 is a schematic side view of a superposed substrate. In the following, in order to clarify the positional relationship, an X-axis direction, a Y-axis direction, and a Z-axis direction that are orthogonal to each other are defined, and the positive direction of the Z-axis is defined as a vertically upward direction.

  The peeling system 1 according to the first embodiment peels a superposed substrate T (see FIG. 2) in which a substrate to be processed W and a support substrate S are bonded by an adhesive G into a substrate to be processed W and a support substrate S. To do. Hereinafter, of the plate surfaces of the substrate W to be processed, the plate surface that is bonded to the support substrate S via the adhesive G is referred to as “bonding surface Wj”, and the plate surface opposite to the bonding surface Wj is referred to as “ It is referred to as “non-bonding surface Wn”. In addition, among the plate surfaces of the support substrate S, the plate surface on the side bonded to the substrate W to be processed via the adhesive G is referred to as “bonding surface Sj”, and the plate surface on the opposite side to the bonding surface Sj is referred to as “ This is referred to as “non-joint surface Sn”.

  The substrate W to be processed is a substrate in which a plurality of electronic circuits are formed on a semiconductor substrate such as a silicon wafer or a compound semiconductor wafer, and the plate surface on the side where the electronic circuits are formed is used as a bonding surface Wj. Further, the target substrate W is thinned by polishing the non-joint surface Wn, for example. On the other hand, the support substrate S is a substrate having substantially the same diameter as the substrate W to be processed, and supports the substrate W to be processed. As the support substrate S, for example, a compound semiconductor wafer or a glass substrate can be used in addition to a silicon wafer.

  As shown in FIG. 1, the peeling system 1 includes a carry-in / out station 10, a first transfer area 20, a peeling processing station 30, a second transfer area 40, and a control device 50. The carry-in / out station 10 and the peeling processing station 30 are arranged side by side in the Y-axis direction via the first transfer region 20. Further, the second transfer area 40 is disposed on the X axis negative direction side of the carry-in / out station 10, the first transfer area 20, and the peeling processing station 30.

  In the peeling system 1, the superposed substrate T carried into the carry-in / out station 10 is transferred to the peeling processing station 30 via the first transfer region 20, and is peeled into the target substrate W and the support substrate S at the peeling processing station 30. The The substrate to be processed W after peeling is transferred to the post-processing station M via the second transfer region 40, and the support substrate S after peeling is transferred to the carry-in / out station 10 via the first transfer region 20. In the peeling system 1, the substrate W to be processed that has become defective can be transported to the carry-in / out station 10 via the first transport region 20.

  In the carry-in / out station 10, a cassette Cw in which a plurality of substrates to be processed W are accommodated, a cassette Cs in which a plurality of support substrates S are accommodated, and a cassette Ct in which a plurality of superposed substrates T are accommodated are outside the peeling system 1. It is carried in and out. The loading / unloading station 10 is provided with a cassette mounting table 11. The cassette mounting table 11 is provided with a plurality of cassette mounting plates 12 a to 12 c on which the cassettes Cw, Cs, and Ct are mounted. .

  In the first transfer area 20, the substrate W to be processed, the support substrate S, and the superposed substrate T are transferred between the carry-in / out station 10 and the peeling processing station 30. In the first transfer region 20, a first transfer device 21 that transfers the substrate to be processed W, the support substrate S, and the superposed substrate T is installed.

  The first transfer device 21 includes a transfer arm 22 that can move in the horizontal direction, move up and down in the vertical direction, and turn around the vertical direction, and a fork 23 attached to the tip of the transfer arm 22. It is a robot. The first transport device 21 holds the substrate using the fork 23 and transports the substrate held by the fork 23 to a desired place by the transport arm 22.

  In the peeling processing station 30, peeling of the superposed substrate T, cleaning of the target substrate W and the supporting substrate S after peeling, and the like are performed. In the peeling processing station 30, a peeling device 31, a delivery chamber 32, a first cleaning device 33, and a second cleaning device 34 are arranged in the positive direction of the X axis in the first cleaning device 33, the delivery chamber 32, the peeling device 31, The second cleaning device 34 is arranged in this order.

  In the peeling apparatus 31, a peeling process for peeling the superposed substrate T transported by the first transport apparatus 21 into the target substrate W and the support substrate S is performed. The configuration of the peeling device 31 and the specific content of the peeling process will be described in detail later with reference to FIGS.

  In the delivery chamber 32, a second transfer device 35 for transferring the target substrate W peeled from the superposed substrate T in the peeling device 31 to the first cleaning device 33 is installed. The second transport device 35 includes a Bernoulli chuck, and transports the substrate W to be processed to the first cleaning device 33 in a non-contact state using the Bernoulli chuck.

  The Bernoulli chuck ejects gas from an ejection port provided on the suction surface toward the plate surface of the substrate to be processed W, and the gas flow velocity changes according to the distance between the suction surface and the plate surface of the substrate to be processed W. This is a holding unit that holds and holds the substrate W to be processed in a non-contact state using a change in negative pressure accompanying the change.

  The first cleaning device 33 cleans the target substrate W transported by the second transport device 35. The to-be-processed substrate W cleaned by the first cleaning device 33 is transferred to the post-processing station M through the second transfer area 40, and a predetermined post-processing is performed in the post-processing station M. The predetermined post-process includes, for example, a process for mounting the substrate to be processed W and a process for dicing the substrate to be processed W for each chip.

  The second cleaning device 34 cleans the support substrate S peeled from the superposed substrate T in the peeling device 31. The support substrate S cleaned by the second cleaning device 34 is transferred to the carry-in / out station 10 by the first transfer device 21.

  The second transfer area 40 is provided between the peeling processing station 30 and the post-processing station M. In the second transfer area 40, a third transfer device 42 that can move on a transfer path 41 extending in the Y-axis direction is installed, and the substrate W to be processed is transferred between the peeling processing station 30 and the post-processing station M. Done. Similar to the second transport device 35, the third transport device 42 transports the substrate W to be processed in a non-contact state using a Bernoulli chuck.

  The control device 50 is a device that controls the operation of the peeling system 1. The control device 50 is a computer, for example, and includes a control unit and a storage unit (not shown). The storage unit stores a program for controlling various processes such as a peeling process. The control unit controls the operation of the peeling system 1 by reading and executing the program stored in the storage unit.

  The program may be recorded on a computer-readable recording medium and installed in the storage unit of the control device 50 from the recording medium. Examples of the computer-readable recording medium include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnetic optical disk (MO), and a memory card.

  Below, the specific structure of the peeling apparatus 31 and the peeling operation | movement of the superposition | polymerization board | substrate T performed using the peeling apparatus 31 are demonstrated.

<2. Configuration of peeling apparatus>
First, the structure of the peeling apparatus 31 is demonstrated with reference to FIGS. FIG. 3 is a schematic side view showing the configuration of the peeling apparatus 31 according to the first embodiment, and FIG. 4 is a schematic plan view showing the configurations of the second holding unit and the suction moving unit according to the first embodiment. FIG. 5 is a schematic enlarged perspective view of the H1 portion shown in FIG. FIG. 6 is a diagram illustrating a suction region by the second holding unit and a suction region by the suction moving unit.

  As shown in FIG. 3, the peeling device 31 includes a processing container 100 that can seal the inside. A loading / unloading port (not shown) is formed on the side surface of the processing container 100, and via this loading / unloading port, the polymerization substrate T is loaded into the processing container 100, and the target substrate W and the support substrate S after peeling are removed. Unloading from the processing container 100 is performed. For example, an opening / closing shutter is provided at the loading / unloading port, and the inside of the processing container 100 can be sealed with the opening / closing shutter.

  The peeling apparatus 31 includes a first holding unit 110, a second holding unit 120, an adsorption moving unit 130, and a moving mechanism 140, which are disposed inside the processing container 100. The first holding unit 110 is provided above the second holding unit 120 and the suction moving unit 130 and is disposed at a position facing the second holding unit 120 and the suction moving unit 130. Further, the second holding unit 120 and the suction moving unit 130 are supported by the moving mechanism 140 and moved in the vertical direction by the moving mechanism 140.

  The 1st holding | maintenance part 110 is a holding | maintenance part which adsorbs and hold | maintains the to-be-processed substrate W which comprises the superposition | polymerization board | substrate T, for example, can use a porous chuck | zipper. The first holding unit 110 includes a substantially disc-shaped main body 111 and a suction surface 112 provided on the lower surface of the main body 111. The suction surface 112 has substantially the same diameter as the superposed substrate T, and abuts on the upper surface of the superposed substrate T, that is, the non-joint surface Wn of the substrate W to be processed. The adsorption surface 112 is formed of a porous body such as silicon carbide or a porous ceramic, for example.

  A suction space 113 that communicates with the outside through the suction surface 112 is formed inside the main body 111. The suction space 113 is connected to an intake device 115 such as a vacuum pump via an intake pipe 114. The first holding unit 110 holds the substrate to be processed W by adsorbing the non-bonding surface Wn of the substrate to be processed W to the suction surface 112 using the negative pressure generated by the intake air of the intake device 115. In addition, although the example using a porous chuck | zipper was shown as the 1st holding | maintenance part 110, it is not limited to this. For example, an electrostatic chuck may be used as the first holding unit 110.

  A support part 105 supported by the ceiling surface of the processing container 100 is disposed above the first holding part 110, and the upper surface of the first holding part 110 is supported by the support part 105. In addition, it is good also considering the processing container 100 as a support part, without providing the support part 105. FIG. For example, the upper surface of the first holding unit 110 may be supported by directly contacting the ceiling of the processing container 100.

  The 2nd holding | maintenance part 120 is a holding | maintenance part which adsorbs and hold | maintains 1st area | region E1 (refer FIG. 6) which is a center part among the support substrates S which comprise the superposition | polymerization board | substrate T. As shown in FIGS. 3 and 4, the second holding unit 120 includes a disk-shaped main body 121 and support members 123 and 124 that connect the main body 121 to the moving mechanism 140. The support member 123 supports the center of the main body 121, and the support member 123 supports the outer periphery of the main body 121.

  The main body 121 is made of a metal member such as aluminum. As shown in FIG. 4, the main body 121 has a smaller diameter than the superposed substrate T. For example, the main substrate 121 has a diameter of 300 mm and the main body 121 has a diameter of 240 mm. Further, as shown in FIG. 3, an adsorption space 122 and a plurality of through holes 127 that communicate with the adsorption space 122 from the upper surface are formed inside the main body 121, and an intake pipe 125 is provided in the adsorption space 122. An intake device 126 such as a vacuum pump is connected to the via.

  The second holding unit 120 holds the support substrate S by adsorbing the first region E <b> 1 of the support substrate S facing the upper surface of the main body 121 using the negative pressure generated by the intake air of the intake device 126. For example, a porous chuck or an electrostatic chuck can be used as the main body 121 of the second holding unit 120.

  The suction moving unit 130 holds the support substrate S by sucking the second region E2 (see FIG. 6) which is a part of the outer peripheral portion of the non-joint surface Sn of the support substrate S, and further 2. Pull the region E2 vertically downward. As shown in FIGS. 3 and 4, the suction moving unit 130 has a main body 131 formed of an elastic member such as rubber and a base end fixed to the moving mechanism 140, and supports the main body 131 movably. A cylinder 132.

  As shown in FIG. 4, the main body 131 is formed in an arc shape in the longitudinal direction along the circumferential direction of the second holding unit 120. Specifically, the main body portion 131 is formed such that a portion corresponding to the outer edge of the support substrate S is arcuate along the outer edge of the support substrate S and gradually widens toward the outer edge of the support substrate S. As shown in FIG. 5, it is formed in a concave shape having an opening on the support substrate S side. As shown in FIG. 5, an intake port 133 is formed on the bottom surface of the concave portion of the main body 131, and an intake device 135 such as a vacuum pump is connected to the intake port 133 via an intake pipe 134.

  The adsorption moving unit 130 holds the support substrate S by adsorbing the second region E2 of the support substrate S facing the upper surface of the main body 131 using the negative pressure generated by the intake of the intake device 135. Further, the suction moving unit 130 moves the second region E2 of the support substrate S vertically downward by moving the main body 131 vertically downward by the cylinder 132 in a state where the second region E2 of the support substrate S is suctioned. Let

  The adsorption moving unit 130 is provided with a load cell (not shown), and the adsorption moving unit 130 can detect a load applied to the cylinder 132 by the load cell. The suction moving unit 130 can pull the second region E2 while controlling the vertical downward force applied to the second region E2 of the support substrate S based on the detection result by the load cell.

  The moving mechanism 140 includes a support member 141 that supports the second holding unit 120 and the suction moving unit 130, a drive unit 142 that supports the lower surface of the central portion of the support member 141, and a plurality of surfaces that support the lower surface of the outer peripheral portion of the support member 141. A support member 143 and a base 144 that supports the drive unit 142 and the support member 143 are provided. The drive unit 142 includes a drive mechanism having, for example, a ball screw (not shown) and a motor (not shown) that drives the ball screw, and the second holding unit 120 and the suction moving unit 130 are vertically moved by the drive mechanism. Move up and down in the direction. The support member 143 is configured to be extendable and contractible in the vertical direction.

  In addition, a plurality of through holes (not shown) are provided on the upper surface of the second holding unit 120, and a plurality of lifting pins (not shown) are lifted and lowered in the vertical direction from these through holes, thereby overlapping the polymerization substrate. T or support substrate S can be supported and lifted from below. Thereby, a board | substrate can be easily delivered between the forks 23 of the 1st conveying apparatus 21, etc. FIG.

  The moving mechanism 140 may be configured to move the second holding unit 120 in the horizontal direction. For example, a drive mechanism having a ball screw (not shown) and a motor (not shown) for driving the ball screw is provided on the base 144, and the drive unit 142 and the column member 143 are moved in the horizontal direction. The second holding unit 120 may be moved in the horizontal direction.

<3. Operation of peeling system>
Next, the operation of the peeling system 1 will be described. The operation of the peeling system 1 is performed by the control device 50 and includes a peeling operation by the peeling device 31. FIG. 7 is a flowchart showing a peeling process procedure by the peeling system 1, and FIGS. 8A to 8C are explanatory diagrams (No. 1) to (No. 3) of the peeling operation by the peeling device 31.

  First, the 1st conveyance apparatus 21 (refer FIG. 1) arrange | positioned at the 1st conveyance area | region 20 performs the process which carries in the superposition | polymerization board | substrate T to the peeling apparatus 31 based on control of the control apparatus 50 (step S101 of FIG. 7). ).

  In the process of step S <b> 101, first, the first transport device 21 takes out the superposed substrate T accommodated in the cassette Ct at the carry-in / out station 10 using the fork 23. The superposed substrate T is held on the fork 23 of the first transfer device 21 with the substrate W to be processed positioned on the upper surface and the support substrate S positioned on the lower surface. Then, the first transport device 21 carries the superposed substrate T taken out from the cassette Ct into the peeling device 31 of the peeling processing station 30.

  Next, the peeling device 31 performs a process of sucking and holding the superposed substrate T by the first holding unit 110 and the second holding unit 120 based on the control of the control device 50 (step S102 in FIG. 7).

  In the process of step S <b> 102, first, the second holding unit 120 of the peeling device 31 sucks and holds the overlapped substrate T carried by the first transfer device 21 by the intake operation of the intake device 126. That is, the peeling device 31 holds the superposed substrate T by adsorbing the lower surface of the superposed substrate T by the second holding unit 120.

  Next, the peeling device 31 raises the second holding unit 120 by the moving mechanism 140 to bring the upper surface of the superposed substrate T into contact with the suction surface 112 of the first holding unit 110. The first holding unit 110 causes the upper surface of the superposed substrate T to be adsorbed to the adsorption surface 112 by the intake operation by the intake device 115.

  As a result, the upper and lower surfaces of the superposed substrate T are adsorbed by the first holding unit 110 and the second holding unit 120, respectively. That is, the substrate W to be processed is sucked and held by the first holding unit 110 and the support substrate S is sucked and held by the second holding unit 120. In such a holding state, almost the entire non-bonding surface Wn of the substrate to be processed W is adsorbed by the first holding unit 110, and the non-bonding surface Sn of the support substrate S is held by the second holding unit 120. Of these, the first region E1 is adsorbed.

  The process for adsorbing and holding the superposed substrate T by the first holding unit 110 and the second holding unit 120 is not limited to the above method. For example, after the upper surface side of the superposed substrate T carried in by the first transport device 21 is sucked and held by the first holding unit 110, the lower surface side of the superposed substrate T can be sucked and held by the second holding unit 120.

  Next, the peeling device 31 performs a process of pulling the first region E1 of the support substrate S held by the second holding unit 120 in a direction away from the target substrate W based on the control of the control device 50 (FIG. 7). Step S103).

  In the process of step S103, the moving mechanism 140 moves the second holding unit 120 vertically downward as shown in FIG. 8A. The moving mechanism 140 is provided with a load cell (not shown), and the moving mechanism 140 is configured to hold the second holding unit 120 when the load cell detects that a load of a predetermined value or more is applied to the second holding unit 120. The movement of the unit 120 in the vertically downward direction is stopped. As a result, a predetermined tensile force is applied to the lower surface of the support substrate S by the second holding unit 120.

  The load cell is not necessarily used. For example, when the second holding unit 120 is moved vertically downward by a predetermined distance by the moving mechanism 140, the movement of the second holding unit 120 in the vertical downward direction is stopped. Also good.

  Next, the peeling device 31 pulls the second region E2 of the support substrate S under the control of the control device 50 in a state where the first region E1 of the support substrate S is pulled by the second holding unit 120. A process of pulling in the direction away from is performed (step S104 in FIG. 7).

  In the process of step S104, the suction moving unit 130 of the second holding unit 120 sucks and moves the second region E2 of the support substrate S vertically downward as shown in FIG. 8B.

  Specifically, the suction moving unit 130 moves the main body 131 vertically downward by the operation of the cylinder 132. As a result, the upper surface of the suction moving unit 130 moves to a position below the upper surface of the second holding unit 120, and the second region E2 of the support substrate S is stronger than the first region E1 of the support substrate S. Pulled vertically downward.

  Thereby, the portion of the second region E2 of the support substrate S is peeled off from the substrate W to be processed. In addition, since the first region E1 of the non-joint surface Sn of the support substrate S is pulled vertically downward, the second region E2 of the support substrate S is peeled from the substrate to be processed W, so that FIG. As shown, the entire bonding surface Sj of the support substrate S is peeled from the bonding surface Wj of the substrate W to be processed.

  Further, the outer peripheral portion of the non-joint surface Sn of the support substrate S is not supported in any region other than the second region E2 supported by the suction moving unit 130. Therefore, when the portion of the second region E2 of the support substrate S is moved vertically downward by the suction moving unit 130, the region adjacent to the second region E2 in the outer peripheral portion of the support substrate S is also the second region E2. It moves vertically downward as it moves vertically downward. As a result, the separation from the substrate to be processed W can be promoted even in the region adjacent to the second region E2.

  In addition, since an electronic circuit is formed on the bonding surface Wj of the substrate to be processed W, if the substrate to be processed W and the support substrate S are to be peeled at a time, a large load is applied to the bonding surfaces Wj and Sj. The electronic circuit on the joint surface Wj may be damaged.

  On the other hand, in the peeling system 1 according to the first embodiment, the outer peripheral portion of the superposed substrate T is peeled off by further pulling the outer peripheral portion of the superposed substrate T in a state where the superposed substrate T is pulled as a whole. The polymerization substrate T is continuously peeled from the peeled portion. Accordingly, a large load is not applied to the joint surfaces Wj and Sj, and damage to the electronic circuit during the peeling operation can be suppressed.

  In the peeling device 31, since the main body 131 of the suction moving unit 130 is made of an elastic member such as rubber, the outer periphery of the support substrate S when the outer periphery of the support substrate S is peeled off from the substrate W to be processed. It can suppress that force is suddenly applied to a part. Therefore, this also can suppress the load applied to the joint surfaces Wj and Sj, and suppress damage to the electronic circuit during the peeling operation.

  In the above description, the suction of the second region E2 by the suction moving unit 130 has been described as starting from the process of step S104. However, the timing of the suction of the second region E2 by the suction moving unit 130 is not limited to this, for example, starting from the process of step S102 or the process of step S103 and continuing to step S104. Also good.

  Next, the first transport device 21 and the second transport device 35 perform a process of unloading the target substrate W and the support substrate S from the peeling device 31 based on the control of the control device 50. (Step S105 in FIG. 7). In this process, the first transport device 21 performs a process of unloading the support substrate S after the peeling from the peeling device 31 and transporting it to the second cleaning device 34. Further, the second transport device 35 performs a process of unloading the substrate to be processed W from the peeling device 31 and transporting it to the first cleaning device 33.

  Here, the process of step S104 will be described more specifically. In the process of step S104, the peeling apparatus 31 executes, for example, a “continuation mode” in which the outer peripheral portion of the superposed substrate T is pulled at once and a “repetitive mode” in which the outer peripheral portion of the superposed substrate T is intermittently repeatedly pulled. Can do. The peeling device 31 selectively executes processing in the continuous mode and processing in the repeat mode based on the control of the control device 50.

  In the case of the processing in the continuous mode, the peeling device 31 continuously operates the cylinder 132 to move the main body 131 downward vertically until the outer peripheral portion of the overlapped substrate T is peeled off. Thereby, the force which pulls the 2nd area | region E2 of the support substrate S vertically downward becomes large gradually, and the outer peripheral part of the superposition | polymerization board | substrate T peels. In this continuous mode, the main body 131 is continuously moved vertically downward, so that the peeling process can be performed quickly.

  On the other hand, in the case of processing in the repeat mode, the peeling device 31 repeatedly moves the main body 131 vertically downward and vertically upward until the outer peripheral portion of the overlapped substrate T is peeled off. By such repeated operation, the bonding force at the outer peripheral portion of the superposed substrate T is gradually weakened, and finally the outer peripheral portion of the superposed substrate T is peeled off. In this repeat mode, compared to the processing in the continuous mode, the force that pulls the second region E2 of the support substrate S vertically downward can be suppressed, so that the load on the joint surfaces Wj and Sj can be further suppressed.

  Further, in the case of processing in the repeat mode, the peeling device 31 can keep the force for pulling the second region E2 of the support substrate S vertically downward constant, but may increase in steps according to the number of repetitions. it can. Moreover, the peeling apparatus 31 can also change the force which pulls the 2nd area | region E2 of the support substrate S vertically downward by repetition of strength.

  In the above description, it has been described that the peeling device 31 peels the superposed substrate T by further pulling the outer peripheral portion of the superposed substrate T in a state where the superposed substrate T is pulled as a whole. However, the peeling by the peeling device 31 is not limited to this, and various peeling operations are possible based on the control of the control device 50.

  For example, the peeling apparatus 31 can perform the process of step S104 from the state of step S102, and then can perform the process of step S103. Thereby, since the 1st area | region E1 of the superposition | polymerization board | substrate T will be pulled after the outer peripheral part of the superposition | polymerization board | substrate T peels, the load concerning the 1st area | region E1 of the superposition | polymerization board | substrate T can be suppressed.

  Also, the peeling device 31 repeats the process of step S103 and the process of step S104 in order from the state of step S102 until the entire superposed substrate T is peeled, or the process of step S104 and the process of step S103 are repeated in order. You can also. Thereby, the force pulling the second region E2 of the support substrate S vertically downward can be suppressed.

  In the above description, the main body 131 of the suction moving unit 130 is moved in the vertical direction by the cylinder 132. However, the moving direction of the main body 131 by the cylinder 132 is not limited to this.

  For example, the moving direction of the main body 131 by the cylinder 132 may be a moving direction as shown in FIG. FIG. 9 is a diagram illustrating another configuration of the cylinder 132 in the suction moving unit 130. As shown in FIG. 9, the moving direction of the main body 131 by the cylinder 132 may be an oblique direction with respect to the vertically downward direction and close to the center of the support substrate S. By pulling the outer periphery of the support substrate S closer to the center of the support substrate S, the outer edge of the support substrate S can be pulled more strongly, and peeling of the outer periphery of the superposed substrate T can be promoted.

  In the above description, the example in which the main body 131 of the suction moving unit 130 is formed of an elastic member such as rubber has been described. For example, the main body 131 of the suction moving unit 130 is formed of a metal member such as aluminum. Also good. Further, a porous member such as a porous body such as silicon carbide or a porous ceramic may be disposed above the concave portion of the main body 131.

  Moreover, although the shape shown in FIG. 4 and FIG. 5 was demonstrated as an example as the main-body part 131 of the adsorption | suction movement part 130, the structure of the main-body part 131 of the adsorption | suction movement part 130 is not limited to this. For example, the main body 131A as shown in FIG. FIG. 10 is a diagram illustrating another configuration of the main body in the suction moving unit 130.

  In the main body 131A shown in FIG. 10, the side surface facing the second holding unit 120 and the side surface not facing the second holding unit 120 are each formed in a convex curved shape. Further, in the main body 131 </ b> A, as in the main body 131 shown in FIG. 4, the portion corresponding to the outer edge of the support substrate S is arcuate along the outer edge of the support substrate S and toward the outer edge of the support substrate S. The width is gradually increased.

  By the way, in 1st Embodiment mentioned above, an example of the structure and operation | movement of the peeling apparatus was illustrated. However, there are various variations in the configuration and operation of the peeling apparatus. Therefore, in the following embodiments, other variations will be shown.

  Moreover, in each embodiment shown below, the same code | symbol is attached | subjected to the component corresponding to the component of 1st Embodiment mentioned above, and the description which overlaps with 1st Embodiment is abbreviate | omitted suitably. .

(Second Embodiment)
In the peeling apparatus 31 according to the first embodiment, the example in which the suction moving unit that sucks and pulls the outer periphery of the support substrate S is described as one suction moving unit 130, but a plurality of suction moving units may be provided. In the following, an example in which a plurality of suction moving parts are provided and the superposed substrate T is peeled off will be described. FIG. 11 is a schematic side view showing the configuration of the peeling apparatus according to the second embodiment, and FIG. 12 is a schematic plan view showing the configuration of the suction moving unit according to the second embodiment.

  As shown in FIGS. 11 and 12, the peeling device 31 </ b> A according to the second embodiment includes a plurality of suction moving units 230 a to 230 d (hereinafter collectively referred to as suction moving units 230) arranged at predetermined intervals in the circumferential direction. There is). The peeling apparatus 31 </ b> A performs the peeling operation of the superposed substrate T by operating these suction moving units 230 a to 230 d.

  Each suction moving unit 230 has the same configuration as that of the suction moving unit 130 according to the first embodiment, and includes a main body 231 and a cylinder 232. As shown in FIG. 12, each suction moving unit 230 faces the outer periphery of the main body 121 of the second holding unit 120 with a predetermined interval, and is arranged around the outer periphery of the main body 121 at a predetermined interval. In addition, each suction moving unit 230 is provided with an intake port (not shown) connected to the intake device, similarly to the suction moving unit 130 according to the first embodiment.

  The suction moving unit 230a and the suction moving unit 230c are in a point-symmetrical position with respect to the center of the second holding unit 120, and the suction moving unit 230b and the suction moving unit 230d are with respect to the center of the second holding unit 120. Are point-symmetrical.

  In the peeling apparatus 31 </ b> A, the main body 231 can be moved by a separate cylinder 232 so that each suction moving unit 230 can be operated independently. Therefore, the peeling device 31A can simultaneously operate the plurality of suction moving units 230, and can also operate each suction moving unit 230 individually.

  Here, an example of the peeling operation by the peeling device 31A will be described. In the case of the process in the continuous mode, the peeling device 31A executes, for example, a process selected from the following first to third continuous modes.

  The first continuation mode is a processing mode in which the outer peripheral portion of the support substrate S is simultaneously pulled by the plurality of suction moving units 230. In this first continuous mode, the outer peripheral portion of the support substrate S can be pulled simultaneously at a plurality of locations, so that the outer peripheral portion of the support substrate S can be peeled off more quickly than when the outer peripheral portion of the support substrate S is pulled at one location. Can be done.

  The second continuation mode is a processing mode in which the pulling operations of the plurality of suction moving units 230 are performed one by one. In the second continuation mode, when the superposed substrate T cannot be peeled off by one suction moving unit 230, the other suction moving unit 230 is operated, and a plurality of outer peripheral portions of the support substrate S are simultaneously pulled. I can't. Therefore, the load applied to the joint surfaces Wj and Sj can be suppressed. Note that the plurality of suction movement units 230 may be divided into a plurality of groups, and the suction movement unit 230 may be pulled for each group.

  The third continuation mode is a processing mode in which an operation of sequentially increasing the number of suction moving units 230 to be operated is performed until the outer peripheral portion of the support substrate S is peeled off. In the third continuous mode, when the outer peripheral portion of the support substrate S does not peel off, the load on the bonding surfaces Wj and Sj is applied to the superposed substrate T that is easily peeled off in order to increase the number of suction moving units 230 to be operated. Can be suppressed.

  Moreover, in the case of the process by repetition mode, 31 A of peeling apparatuses perform the process selected from the 1st-3rd repetition mode shown below, for example. The first to third repetition modes are processing modes for performing operations corresponding to the first to third continuation modes, respectively.

  In the first repeat mode, the peeling device 31A repeatedly performs the process of simultaneously pulling the outer peripheral portion of the support substrate S by the plurality of suction moving units 230 until the outer peripheral portion of the support substrate S is peeled off.

  In the second repeat mode, the peeling device 31A repeatedly performs a process of performing the pulling operation of the plurality of suction moving units 230 one by one or for each group until the outer peripheral portion of the support substrate S is peeled off. For example, the peeling device 31A performs a process of alternately pulling the outer peripheral portion of the support substrate S between the set of suction moving units 230a and 230c and the set of suction moving units 230b and 230d.

  In the third repetition mode, the peeling device 31A repeatedly performs an operation of sequentially increasing the number of suction moving units 230 to be operated.

  Thus, in the peeling apparatus 31A according to the second embodiment, since the plurality of suction moving units 230 are provided and the plurality of suction moving units 230 perform the peeling operation, the peeling operation of the superposed substrate T can be easily performed. Can do. In the above description, it has been described that the operation mode of the suction moving unit 230 can be selected in the peeling device 31A. However, the present invention is not limited to this, and the operation mode of the suction moving unit 230 is one. There may be.

  Moreover, although the example which operates each adsorption | suction movement part 230 independently was demonstrated in the above-mentioned, it is not limited to this. For example, the plurality of main body portions 231 may be moved by one cylinder 232 to move the plurality of suction moving portions 230 integrally.

  In the above description, the example in which the four suction moving units 230 are arranged at predetermined intervals around the circumference has been described. However, the number and arrangement of the suction moving units 230 are not limited to this, and can be changed as appropriate. It is. In addition, various shapes can be adopted for the shape of the main body 231 of the suction moving unit 230 as in the first embodiment. Further, the movement direction of the main body 231 is not limited to the vertical movement as in the first embodiment. For example, the main body 231 is inclined with respect to the vertical downward direction, and the support substrate S It may be closer to the center (see FIG. 9).

(Third embodiment)
In the peeling apparatuses 31 and 31A described above, the example in which the first holding unit 110 is fixed to the ceiling of the support unit 105 or the processing container 100 has been described. However, the first holding unit 110 is supported by the support unit 105 or the processing container via an elastic member. It can also be supported on 100 ceilings. Below, the example which makes the support part 105 support the 1st holding | maintenance part 110 via an elastic member is demonstrated. Here, an example in which an elastic member that supports the first holding unit 110 is added to the peeling device 31A of the second embodiment will be described, but the first holding unit is added to the peeling device 31 of the first embodiment. An elastic member supporting 110 may be added.

  FIG. 13 is a schematic side view showing the configuration of the peeling apparatus according to the third embodiment, and FIG. 14 is an explanatory diagram of the peeling operation by the peeling apparatus according to the third embodiment.

  As shown in FIG. 13, in the peeling device 31 </ b> B according to the third embodiment, a plurality of elastic members 307 are arranged between the support part 105 and the first holding part 110. The plurality of elastic members 307 are formed of, for example, a spring member, and are arranged on the outer periphery of the first holding unit 110 with a predetermined interval around the circumference.

  In the peeling apparatus 31B configured as described above, for example, it is assumed that the amount of movement of each suction moving unit 230 in the vertically downward direction of the cylinder 232 is varied. In this case, as illustrated in FIG. 14, the elastic member 307 causes the suction surface 112 of the first holding unit 110 to be inclined toward the cylinder 232 that has a large amount of movement downward in the vertical direction.

  Accordingly, a part of the force applied to the outer peripheral portion of the support substrate S by the adsorption moving unit 230 can be absorbed by the first holding unit 110 including the elastic member 307, and thereby, the outer peripheral portion of the support substrate S is rapidly increased. It can suppress that force is added. In addition, even when the main body 231 is moved vertically downward while keeping the amount of movement of the cylinders 232 of the suction moving parts 230 vertically downward, a part of the force applied to the outer peripheral part of the support substrate S is similarly applied. It can be absorbed by the first holding part 110 including the elastic member 307.

  Thus, in the peeling apparatus 31B according to the third embodiment, since the plurality of elastic members 307 are disposed between the support portion 105 and the first holding portion 110, a force is rapidly applied to the outer peripheral portion of the support substrate S. Can be prevented from being added.

(Fourth embodiment)
In the above-described peeling device, in order to further promote peeling of the superposed substrate T, for example, a sharp member such as a blade may be used to cut a side surface of the superposed substrate T. Below, the example in the case of notching the side surface of the superposition | polymerization board | substrate T using a sharp member is demonstrated. Here, although the example which adds the structure which cuts into the side surface of the superposition | polymerization board | substrate T with respect to the peeling apparatus 31 of 1st Embodiment is demonstrated, with respect to the peeling apparatuses 31A and 31B of 2nd and 3rd embodiment, Thus, it is possible to add a configuration in which a cut is made on the side surface of the superposed substrate T.

  FIG. 15 is a schematic side view showing the configuration of the peeling apparatus according to the fourth embodiment. As illustrated in FIG. 15, the peeling device 31 </ b> C according to the fourth embodiment further includes a cutting unit 170 and an imaging unit 180 in addition to the configuration of the peeling device 31 of the first embodiment. The cut portion 170 is provided at a position corresponding to the suction moving portion 130.

  The cut portion 170 includes a rail 171 extending in the Y-axis direction, a moving portion 172 that moves along the rail 171, a sharp member 173 provided on an end surface of the moving portion 172 on the side facing the overlapping substrate T, a rail And an elevating part 174 for elevating and lowering 171 in the vertical direction.

  The sharp member 173 is, for example, a blade, and is provided on the moving portion 172 so that the tip protrudes toward the superposed substrate T. As the blade, for example, a razor blade, a roller blade, an ultrasonic cutter, or the like can be used. In addition, generation | occurrence | production of the particle at the time of making a cut | incision with respect to the superposition | polymerization board | substrate T can be suppressed by using a ceramic-resin type blade or a fluorine-coated blade.

  The imaging unit 180 is, for example, a CCD (Charge Coupled Device) camera, and images the side surface of the overlapping substrate T on the side where the notch unit 170 is provided. The imaging data of the imaging unit 180 is output to the control device 50 (see FIG. 1).

  The control device 50 drives the lifting / lowering unit 174 based on the imaging data input from the imaging unit 180 to arrange the sharp member 173 so as to be included in the height range of the adhesive G. Thereafter, the control device 50 inserts the sharp member 173 into the adhesive G on the superposed substrate T.

  Here, the insertion operation of the sharp member 173 performed by the peeling device 31C based on the control of the control device 50 will be specifically described with reference to FIG. FIG. 16 is an explanatory diagram of the insertion operation of the sharp member 173. In FIG. 16, the shape of the tip of the sharp member 173 is a mountain shape for easy understanding, but the shape of the sharp member 173 is not limited to the illustrated shape.

  The peeling device 31 </ b> C moves the sharp member 173 to a position where the tip of the sharp member 173 contacts the side surface of the superposed substrate T by driving the moving unit 172. Thereafter, the peeling device 31C further moves the moving unit 172 toward the superposed substrate T side. Accordingly, the sharp member 173 is inserted into the adhesive G on the superposed substrate T along the direction D1 toward the center P of the superposed substrate T.

  Thus, after the moving part 172 is stopped once at a position where the sharp member 173 contacts the side surface of the superposed substrate T, the sharp part 173 is inserted again into the superposed substrate T by moving the moving part 172 again. The impact transmitted to the superposed substrate T when the member 173 is inserted can be reduced. Further, the cut portion 170 is provided at a position corresponding to the suction moving portion 130. That is, the sharp member 173 is inserted into the joint portion between the second region E2 of the support substrate S and the substrate W to be processed. For this reason, it is possible to make a cut at the position where the suction moving unit 130 peels off, and the peeling process of the superposed substrate T can be performed more reliably.

  The peeling device 31C can also move the sharp member 173 along the circumferential direction D2 of the superposed substrate T after inserting the sharp member 173 into the superposed substrate T. By doing in this way, a bigger notch can be made with respect to the superposition | polymerization board | substrate T. FIG. In such a case, the cut portion 170 only needs to further include a configuration for moving the sharp member 173 along the circumferential direction D2 of the overlapped substrate T in the moving portion 172.

  Further, the cutting process by the sharp member 173 is performed at any timing until the superposed substrate T is separated into the target substrate W and the support substrate S by the first holding unit 110 and the second holding unit 120. Also good. For example, the peeling device 31C performs a cutting process after the first holding unit 110 and the second holding unit 120 suck and hold the overlapped substrate T and before the suction moving unit 130 pulls the second region E2 of the support substrate S. Alternatively, the cutting process may be performed while pulling the second region E2 of the support substrate S by the suction moving unit 130. Further, the peeling device 31C may perform the cutting process only when the superposed substrate T cannot be peeled as a result of the peeling operation by the suction movement of the suction moving unit 130.

  As described above, the peeling device 31C according to the fourth embodiment can perform the peeling process of the superposed substrate T more reliably by performing the cutting process by the sharp member 173. Here, an example in which the sharp member 173 is a cutter such as a cutter has been described, but the sharp member is not necessarily required to be a cutter. For example, the sharp member may be a tubular needle body such as a hypodermic needle. The sharp member may be a wire.

(Fifth embodiment)
Moreover, in each embodiment mentioned above, the example in the case of peeling the superposition | polymerization board | substrate T at normal temperature was demonstrated. However, the peeling apparatus can also promote peeling of the superposed substrate T by utilizing a temperature difference generated by heating or cooling one of the target substrate W and the support substrate S in the superposed substrate T.

  Here, the example in the case of heating the support substrate S side of the superposition | polymerization board | substrate T is demonstrated with reference to FIG. FIG. 17 is a schematic side view showing the configuration of the peeling apparatus according to the fifth embodiment, and a part of the second holding unit is schematically shown as a cross-sectional view. In addition, although the example which adds the structure which heats the support substrate S side of the superposition | polymerization board | substrate T with respect to the peeling apparatus 31 of 1st Embodiment is demonstrated here, 31 A of peeling apparatuses of 2nd-4th embodiment are demonstrated. The structure which heats the support substrate S side of the superposition | polymerization board | substrate T with respect to -31C can also be added.

  As shown in FIG. 17, the second holding unit 220 of the peeling apparatus 31 </ b> D according to the fifth embodiment includes a heating mechanism 128 inside the main body 121 in addition to the second holding unit 120 according to the first embodiment. Is provided. The heating mechanism 128 is, for example, a heater, and heats the support substrate S sucked and held by the main body 121 to a predetermined temperature. In addition, the 1st holding | maintenance part 110 which adsorbs and holds the to-be-processed substrate W side of the superposition | polymerization board | substrate T shall not be provided with a heating mechanism.

  When the superposed substrate T is sucked and held by the second holding unit 220, the support substrate S side of the superposed substrate T is heated by the heating mechanism 128. As a result, the support substrate S expands relative to the substrate W to be processed, and a shift occurs between the support substrate S and the substrate W to be processed, so that peeling of the superposed substrate T can be promoted. Moreover, since the adhesive G by the side of the support substrate S softens by heating the support substrate S, peeling of the superposition | polymerization board | substrate T can be accelerated | stimulated also by this.

  Moreover, in order to give a temperature difference to the superposition | polymerization board | substrate T, it is preferable to heat the support substrate S rapidly. Therefore, in the second holding unit 220, the heating mechanism 128 may be operated immediately before starting the peeling of the superposed substrate T, and the support substrate S may be heated instantaneously.

  Further, the first holding unit 110 may be provided with a cooling mechanism using, for example, a heat pump or a Peltier element. Thereby, the relative expansion | swelling with respect to the to-be-processed substrate W of the support substrate S can be accelerated | stimulated more, and the inhibitory effect with respect to thermal oxidation can also be heightened.

  In addition, the second holding unit 220 is not provided with a heating mechanism, the first holding unit 110 is provided with a heating mechanism or a cooling mechanism, and the superposed substrate T is adsorbed and held by the first holding unit 110. The substrate W to be processed may be heated or cooled instantaneously. In addition to providing the second holding unit 220 with the heating mechanism 128, the suction moving unit 130 may be further provided with a heating mechanism.

(Sixth embodiment)
By the way, the structure of a peeling system is not limited to the structure shown in FIG. 1, A various structure can be taken. Therefore, another configuration of the peeling system will be described with reference to FIG. FIG. 18 is a schematic plan view showing the configuration of the peeling system according to the sixth embodiment.

  As shown in FIG. 18, the peeling system 1 </ b> A according to the sixth embodiment further includes an inspection device 60. Moreover, 1 A of peeling systems which concern on 6th Embodiment are provided with 40 A of 2nd conveyance areas instead of the 2nd conveyance area 40 shown in FIG. In the second transport region 40A, a third transport device 42A that can move on a transport path 41A extending in the X-axis direction is installed. Note that the third transport apparatus 42A transports the substrate W to be processed in a non-contact state using, for example, a Bernoulli chuck, similarly to the third transport apparatus 42 shown in FIG.

  The inspection device 60 is a device that performs surface inspection on the substrate W to be processed, such as whether the electronic circuit formed on the bonding surface Wj is not damaged or there is no residue of the adhesive G.

  In the peeling system 1A, the substrate to be processed W cleaned by the first cleaning device 33 is taken out from the first cleaning device 33 by the third transfer device 42A and transferred to the inspection device 60. The substrate W transferred to the inspection apparatus 60 is subjected to surface inspection by the inspection apparatus 60. And the to-be-processed substrate W by which abnormality, such as damage of an electronic circuit and the residue of the adhesive agent G, was discovered, is returned to the 1st washing | cleaning apparatus 33 by the 3rd conveying apparatus 42A, and the 1st washing | cleaning apparatus by the 1st conveying apparatus 21 It is conveyed from 33 to the loading / unloading station 10.

  On the other hand, the to-be-processed substrate W in which no abnormality is found by the inspection apparatus 60 is transferred to the post-processing station M by the third transfer apparatus 42A, and post-processing such as mounting and dicing is performed by the post-processing station M. Thus, the peeling system may further include an inspection device that performs surface inspection on the substrate to be processed W after peeling.

  In the peeling system 1A according to the sixth embodiment, since the inspection apparatus 60 is disposed between the first cleaning device 33 and the post-processing station M, the substrate W to be processed in which no abnormality is found is processed in the post-processing station. It can be conveyed to M. Thereby, throughput can be improved.

(Other embodiments)
In each of the embodiments described above, an example in which the superposed substrate to be peeled is the superposed substrate T in which the substrate to be processed W and the support substrate S are bonded by the adhesive G has been described. However, the superposition | polymerization board | substrate used as the peeling object of a peeling apparatus is not limited to this superposition | polymerization board | substrate T. FIG. For example, in the peeling apparatus of each embodiment described above, in order to generate an SOI (Silicon On Insulator) substrate, a superposed substrate in which a donor substrate on which an insulating film is formed and a substrate to be processed are bonded is targeted for peeling. It is also possible.

  Here, an SOI substrate manufacturing method will be described with reference to FIGS. 19A and 19B. FIG. 19A and FIG. 19B are schematic views showing the manufacturing process of the SOI substrate. As shown in FIG. 19A, the superposition substrate TA for forming the SOI is formed by bonding the donor substrate D and the handle substrate H. The donor substrate D is a substrate in which the insulating film 5 is formed on the surface and the hydrogen ion implantation layer 6 is formed at a predetermined depth near the surface. As the handle substrate H, for example, a silicon wafer, a glass substrate, a sapphire substrate, or the like can be used.

  In the peeling apparatus of each embodiment described above, for example, by holding the handle substrate H by the first holding unit and holding the donor substrate D by the second holding unit, by pulling the outer peripheral portion of the polymerization substrate TA, A mechanical impact is applied to the hydrogen ion implantation layer 6 formed on the donor substrate D. Thereby, as shown in FIG. 19B, the silicon-silicon bond in the hydrogen ion implantation layer 6 is cut, and the silicon layer 7 is peeled from the donor substrate D. As a result, the insulating film 5 and the silicon layer 7 are transferred to the upper surface of the handle substrate H, and the SOI substrate WA is formed. It is preferable that the handle substrate H is held by the first holding unit and the donor substrate D is held by the second holding unit, but the donor substrate D is held by the first holding unit and the handle is held by the second holding unit. The substrate H may be held.

  In the above-described embodiment, an example in which the target substrate W and the support substrate S are bonded using the adhesive G has been described. However, the adhesive G is applied to the entire bonding surfaces Wj and Sj. Alternatively, it may be applied only to a part of the joint surfaces Wj and Sj. When the adhesive G is applied only to a part of the bonding surfaces Wj and Sj, it is preferable to apply the adhesive G only to the outer peripheral portions of the substrate W and the support substrate S. Further, the joint surfaces Wj and Sj may be divided into a plurality of regions, and adhesives having different adhesive strength may be applied to each region.

  In the above-described embodiment, the processing target substrate W is held by the first holding unit and the supporting substrate S is held by the second holding unit. However, the supporting substrate S is held by the first holding unit, The substrate W to be processed may be held by the second holding unit. In addition, when the to-be-processed substrate W is thinned, it is suitable to hold | maintain the to-be-processed substrate W with a 1st holding | maintenance part, and hold | maintain the support substrate S with a 2nd holding | maintenance part.

  In the above-described embodiment, the example in which the non-joint surface Sn of the support substrate S is pulled by the second holding unit by moving the second holding unit vertically downward has been described. However, the present invention is not limited to this. . For example, the non-joint surface Sn of the support substrate S may be pulled by the second holding unit by moving the first holding unit vertically upward with respect to the second holding unit.

  Moreover, although embodiment mentioned above demonstrated the example which performs the peeling process of the superposition | polymerization board | substrate T in the direction where the plate | board surface of the superposition | polymerization board | substrate T is extended in a horizontal direction, it is not limited to this. For example, the peeling process of the superposed substrate T may be performed in a direction in which the plate surface of the superposed substrate T extends in the vertical direction, and the superposed substrate T in a direction other than the horizontal direction or the vertical direction. The peeling process may be performed.

  In the above-described embodiment, the suction moving units 130 and 230 are supported by the support member 141 of the moving mechanism 140, and the suction moving units 130 and 230 can be moved in the vertical direction by the moving mechanism 140. However, the suction moving units 130 and 230 may be supported by, for example, the bottom surface of the processing container 100 or the base 144 of the moving mechanism 140 without being supported by the moving mechanism 140. In this case, it is desirable that the control device 50 moves the suction moving units 130 and 230 in the vertical direction in synchronization with the moving mechanism 140 in some controls.

  Further effects and modifications can be easily derived by those skilled in the art. Thus, the broader aspects of the present invention are not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

DESCRIPTION OF SYMBOLS 1, 1A peeling system 10 Carry-in / out station 20 1st conveyance area 30 Peeling processing station 40 2nd conveyance area 31, 31A-31D Peeling apparatus 50 Control apparatus 105 Support part 110 1st holding part 120,220 2nd holding part 130, 230a to 230d Suction moving portion 170 Cut portion 307 Elastic member E1 First region E2 Second region D Donor substrate H Handle substrate S Support substrate W Substrate

Claims (12)

A first holding unit for holding the first substrate by suction;
A second holding part for sucking and holding a central part of the second substrate bonded to the first substrate;
Adsorbing a partial area of the outer peripheral portion of the second substrate held by the previous SL second holding portion, a suction moving unit that moves in a direction away said part of the area from the plate surface of the first substrate ,
A moving mechanism for moving the second holding unit and the suction moving unit in a direction away from the first holding unit;
In a state where the second holding unit and the suction moving unit are moved by the moving mechanism and the central part and the part of the region are pulled away from the first substrate, the part of the suction is moved by the suction moving unit. And a controller that performs an operation of further pulling the region away from the first substrate . The adsorption moving unit is
The peeling apparatus according to claim 1, wherein the partial area of the second substrate is moved in a direction away from the first substrate and closer to a center portion of the second substrate. The peeling apparatus according to claim 1, comprising a plurality of the suction moving units. The peeling apparatus according to claim 3, wherein the plurality of suction moving units operate independently of each other. The peeling apparatus according to claim 1, further comprising a support portion that supports an outer peripheral portion of the first holding portion via an elastic member. The adsorption moving unit is
6. The method according to claim 1, wherein the partial region is continuously moved in a direction away from the first substrate until the partial region of the second substrate is peeled off from the first substrate. The peeling apparatus as described in any one. The adsorption moving unit is
The operation of moving the partial area in a direction away from the first substrate is repeatedly performed until the partial area of the second substrate is peeled off from the first substrate. The peeling apparatus as described in any one of these. The peeling apparatus according to any one of claims 1 to 7 , further comprising: a notch portion for making a notch in a joint portion between the first substrate and the second substrate. The peeling device according to claim 8 , wherein the cut portion is provided at a position corresponding to the suction moving portion. A loading / unloading station on which a superposed substrate in which the first substrate and the second substrate are bonded is placed;
A transport device for transporting the superposed substrate placed on the carry-in / out station;
A peeling station including a peeling device for peeling the superposed substrate transported by the transport device;
The peeling device is
A first holding unit that holds the first substrate by suction;
A second holding part for sucking and holding a central part of the second substrate bonded to the first substrate;
Adsorbing a partial area of the outer peripheral portion of the second substrate held by the previous SL second holding portion, a suction moving unit that moves in a direction away said part of the area from the plate surface of the first substrate ,
A moving mechanism for moving the second holding unit and the suction moving unit in a direction away from the first holding unit;
In a state where the second holding unit and the suction moving unit are moved by the moving mechanism and the central part and the part of the region are pulled away from the first substrate, the part of the suction is moved by the suction moving unit. And a control unit that executes an operation of further pulling the region in a direction away from the first substrate . A step of holding the first substrate by a first holding unit that holds the first substrate by suction;
A second holding part that sucks and holds the central part of the second substrate bonded to the first substrate, and a part of the outer periphery of the second substrate is sucked and the part of the first part is taken as the first part. A step of holding the second substrate by a suction moving unit that moves in a direction away from the plate surface of the substrate;
The moving mechanism of the previous second holding portion SL and the suction moving unit is moved in a direction away from said first holding portion, to the front second holding portion SL and the suction moving unit is moved in a direction away from said first holding portion Process ,
The central portion and the partial region of the second substrate are pulled away from the first substrate by moving the second holding portion and the suction moving portion away from the first holding portion. A step of further pulling the partial area away from the first substrate by the suction moving unit in a state;
The peeling method characterized by including. A procedure of holding the first substrate by a first holding unit that holds the first substrate by suction;
A second holding part that sucks and holds the central part of the second substrate bonded to the first substrate, and a part of the outer periphery of the second substrate is sucked and the part of the first part is taken as the first part. A procedure for holding the second substrate by a suction moving unit that moves the substrate in a direction away from the plate surface ;
The moving mechanism of the previous second holding portion SL and the suction moving unit is moved in a direction away from said first holding portion, to the front second holding portion SL and the suction moving unit is moved in a direction away from said first holding portion and procedures,
The central portion and the partial region of the second substrate are pulled away from the first substrate by a procedure of moving the second holding portion and the suction moving portion away from the first holding portion. A peeling program for causing the computer to execute a procedure of further pulling the partial area in a direction away from the first substrate by the suction moving unit .

Images