JP5717000B2 - Local dehumidification system - Google Patents

Description

The present invention relates to a local dehumidification system that locally forms an advanced low-humidity environment required for processing various workpieces such as a lithium battery production line,
Specifically, the adsorption rotor in a state in which the regeneration area through which the regeneration gas passes, the purge area through which the purge gas passes, and the treatment area through which the dehumidification target air passes are arranged in this order from the upper side in the rotation direction of the adsorption rotor. A suction rotor type dehumidifier sectioned in the rotation area of the sub-dry area, and supplying the dehumidified air sent from the treatment area to a local dry area surrounded by a partition wall in the sub-dry area area. The present invention relates to a local dehumidification system that adjusts an area to a low humidity state.

Conventionally, in this type of local dehumidification system, as shown in FIG. 5, the dehumidified air SA sent from the treatment area 11 of the adsorption rotor type dehumidifier 8 (that is, the ventilation rotor portion located in the treatment area 11 is ventilated). Then, air adsorbed by the adsorbent X and dehumidified is supplied to the local dry area 3 through the air supply path 19, and with the supply of the dehumidified air SA, the work inlet / outlet ports 4 and 5 as communication paths from the local dry area 3 are supplied. The dry area discharge air RA1 discharged through the work room 1 is received in the work room 1 as a sub dry area, and the work room discharge air RA2 discharged from the work room 1 to the return air passage 22A along with the reception of the dry area discharge air RA1 The outside air OA introduced through the outside air introduction path 23 is mixed, and this mixed air MA is used as the dehumidifying target air, so that the processing area 11 of the adsorption rotor dehumidifier 8 It had to be fed (see Patent Document 1).

Japanese Patent No. 4239437

   However, in the above-described conventional system, only the local dry area 3 is locally adjusted to a high low humidity state necessary for workpiece processing, so that the entire work chamber 1 is adjusted to a high low humidity state necessary for workpiece processing. Compared to the above, energy saving and cost reduction can be achieved effectively, but the consideration of the equipment characteristics and the air treatment mode of the adsorption rotor type dehumidifier 8 is still insufficient, resulting in energy saving and low cost. There is still room for improvement in achieving cost reduction more effectively or in adjusting the local dry area 3 to a more advanced low-humidity state.

   In view of this situation, the main problem of the present invention is that by adopting a rational system configuration, energy saving and cost reduction can be achieved more effectively, or the local dry area can be made more advanced with low humidity. It is in providing a local dehumidification system that can be adjusted to the condition.

The first characteristic configuration of the present invention is:
The rotation area of the adsorption rotor in a state where the regeneration area through which the regeneration gas passes, the purge area through which the purge gas passes, and the treatment area through which the dehumidification target air passes are arranged in this order from the upper side in the rotation direction of the adsorption rotor Equipped with a suction rotor type dehumidifier partitioned into
A local dehumidification system for supplying dehumidified air sent from the processing area to a local dry area formed by surrounding a partition wall within the sub dry area and adjusting the local dry area to a low humidity state,
According to the humidity distribution in the rotation direction of the adsorption rotor of the dehumidified air at the outlet of the processing area, the outlet of the processing area is divided into a first outlet from which the first dehumidified air having a high dehumidification is sent, and a second dehumidifying having a low dehumidification. It is divided into the second outlet from which air is sent out,
A first air supply path for supplying first dehumidified air sent from the first outlet to the local dry area, and a second supply for supplying second dehumidified air sent from the second outlet to the sub-dry area. setting the care path,
A part or all of the first exhausted air discharged from the local dry area with the supply of the first dehumidified air through the first air supply passage is configured to be received in the sub dry area through the communication path. .

   That is, (refer to FIG. 1), in the adsorption rotor type dehumidifier 8, there is a bias in the adsorption rotor rotation direction R in the humidity distribution of the dehumidified air SA at the outlet of the processing area 11 as a device characteristic. The dehumidified air SA1 having a high humidity and a low humidity and the dehumidified air SA2 having a relatively low dehumidification and a high humidity are sent in parallel from the outlet of the processing area 11.

   Therefore, in the above-described conventional system (see FIG. 5) in which the dehumidified air SA sent from the processing area 11 is simply supplied to the local dry area 3, the dehumidified air with high dehumidification sent in parallel from the outlet of the processing area 11 is used. Since SA1 and dehumidified air SA2 having low dehumidification are supplied to the local dry area 3 in a mixed state, dehumidified air SA having a higher average humidity than the dehumidified air SA1 having high dehumidification is supplied to the local dry room 3. The

   On the other hand, according to the above configuration (see FIG. 1), only the first dehumidified air SA1 with high dehumidification sent from the first outlet 11X is supplied to the local dry area 3, so that it is much lower than the conventional system. Humid dehumidified air can be supplied from the adsorption rotor type dehumidifier 8 to the local dry area 3, which makes it possible to lower the local dry area 3 more efficiently and effectively than the conventional system. Accordingly, energy saving and cost reduction can be achieved more effectively, or the local dry area 3 can be adjusted to a higher humidity level.

In addition, for the sub dry area 1 that forms the local dry area 3 in the area , the second dehumidified air SA2 sent from the second outlet 11Y is supplied, so that it is equal to or higher than the work chamber 1 in the conventional system. It can be in a low humidity state and can contribute to lowering the humidity of the local dry area 3, and in that sense, the second dehumidified air SA2 delivered from the second outlet 11Y is not wasted.

The second characteristic configuration of the present invention is:
Dividing the outlet of the processing area into two in the suction rotor rotation direction, an upper side outlet located on the upper side of the suction rotor rotation direction and a lower side outlet located on the lower side of the suction rotor rotation direction;
The upper outlet is the first outlet and the lower outlet is the second outlet.

   In other words, the humidity distribution of the dehumidified air SA at the outlet of the processing area 11 is generally slightly higher than the center of the processing area 11 in the suction rotor rotation direction R, as shown in the graph B of FIG. A humidity distribution is formed in which the portion on the side (that is, the portion closer to the purge area 10) is the bottom of the lowest humidity. This tendency increases particularly when the adsorption rotor portion is sufficiently cooled in the purge zone 10.

   Therefore, according to the above configuration in which the outlet of the processing area 11 is divided into the upper side outlet and the lower side outlet and the upper side outlet is the first outlet 11X, it is sent from the lower side outlet that is the second outlet 11Y. The first dehumidified air SA1 having a higher dehumidification and lower humidity than the second dehumidified air SA2 can be stably sent from the upper outlet as the first outlet 11X and supplied to the local dry area 3.

   Further, since the outlet of the processing area 11 is only divided into two in the suction rotor rotation direction R, the equipment structure of the suction rotor type dehumidifier 8 can be simplified, which is advantageous in terms of manufacturing and cost of the apparatus. obtain.

   In the implementation of this configuration, the outlet of the processing area 11 is divided into the upper side outlet and the lower side outlet, but the division is not limited to two equal parts. The opening range in the suction rotor rotation direction of the upper-side outlet is made smaller than the opening range in the suction rotor rotation direction of the lower-side outlet so that the following deep bottom portion is appropriately positioned within the opening range of the upper-side outlet. The opening ranges of the divided outlets in the rotation direction of the suction rotor may be different from each other.

The third characteristic configuration of the present invention is:
The outlet of the processing area is located between the upper side outlet located on the upper side of the suction rotor rotation direction, the lower side outlet located on the lower side of the suction rotor rotation direction, and the upper side outlet and the lower side outlet. Divided into three in the rotation direction of the suction rotor,
The central outlet is the first outlet, and the upper outlet and the lower outlet are the second outlet.

   As described above, the humidity distribution of the dehumidified air SA at the outlet of the processing area 11 is generally slightly greater than the center of the processing area 11 in the suction rotor rotation direction R as shown in the graph B of FIG. A humidity distribution is formed in which the upper-side portion (that is, the portion closer to the purge region 10) is the bottom of the lowest humidity.

   Therefore, (see FIG. 1), the outlet of the processing area 11 is divided into the upper outlet 11a, the central outlet 11c, and the lower outlet 11b, and the central outlet 11c is the first outlet 11X. The first dehumidified air SA1 having a higher dehumidification and lower humidity than the second dehumidified air SA2 delivered from the upper outlet 11a and the lower outlet 11b as the two outlets 11Y is sent from the central outlet 11c as the first outlet 11X. It can be stably delivered and supplied to the local dry area 3.

   Further, compared with the case where the outlet of the processing area 11 is divided into an upper side outlet and a lower side outlet, only the dehumidified air having high dehumidification near the bottom in the humidity distribution is more limited to the center as the first outlet 11X. It can be made to send out from the exit 11c, and, thereby, the local dry area 3 can be reduced in humidity more efficiently and effectively.

   In the implementation of this configuration, the outlet of the processing area 11 is divided into the upper side outlet 11a, the central outlet 11c, and the lower side outlet 11b, but the division is not limited to three equal parts. The opening range in the suction rotor rotation direction R of the central outlet 11c is set to the suction of the upper-side outlet 11a and the lower-side outlet 11b so that the bottom of the distribution and the subsequent deep bottom are appropriately positioned within the opening range of the central outlet 11c. The opening ranges in the suction rotor rotation direction of the three divided outlets may be different from each other, for example, by making it smaller than the opening range in the rotor rotation direction R.

The fourth characteristic configuration of the present invention is:
The outside air treatment zone for passing outside air, the partitioned form in the rotation range of the adsorption rotor arranged on the downstream side of the treatment zone with the adsorption rotor rotational direction,
A second exhaust air discharged from the sub-dry area to the return air passage in response to the supply of the second dehumidified air through the second air supply passage and the reception of the first exhaust air through the communication passage; and the outside air The dehumidification outside air sent out from the treatment area is mixed, and this mixed air is supplied to the treatment area as dehumidification target air.

   That is, as shown in FIG. 5, the non-dehumidified outside air OA is mixed with the second exhaust air RA2 (sub dry area exhaust air) exhausted from the sub dry area 1, and the mixed air is used as the dehumidification target air. In the method of delivering to the air (that is, the outside air mixing method similar to the conventional system described above), a large amount of moisture contained in the non-dehumidified outside air OA is discharged into the low-humidity second discharged air RA2 discharged from the sub-dry area 1. By diffusing, the humidity of the dehumidification target air supplied to the processing area 11 increases as a so-called mixing loss in terms of humidity, and the dehumidifying load in the processing area 11 increases.

   On the other hand, according to the above configuration (see FIG. 3), the outside air OA is dehumidified in advance using the outside air processing area 13 having a lower dehumidifying efficiency than the processing area 11, and the dehumidified outside air OA ′ and the sub-dry area 1 are dehumidified. Since the second discharged air RA2 to be discharged is mixed and the mixed air MA is supplied to the treatment area 11 as the dehumidified air, the mixing loss on the humidity surface due to the outside air mixing as described above is effectively reduced. Therefore, the dehumidifying load in the treatment area 11 can be effectively reduced.

   Thus, in combination with the promotion of low humidity in the local dry area 3 as described above by the division between the first outlet 11X and the second outlet 11Y, the local dry area 3 can be made more efficient and effective. It is possible to reduce the humidity, and accordingly, energy saving and cost reduction can be achieved more effectively, or the local dry area 3 can be adjusted to a higher humidity level.

The fifth characteristic configuration of the present invention is:
The first exhaust air discharged from the local dry area with the supply of the first dehumidified air through the first air supply passage is configured to be received in the sub dry area through the communication passage and the auxiliary chamber ,
A second processing area through which the second exhaust air discharged from the sub-dry area to the second return air passage passes is arranged on the lower side of the processing area in the rotation direction of the adsorption rotor and is divided into rotation areas of the adsorption rotor. Forming,
The auxiliary chamber exhaust air discharged from the auxiliary chamber to the first return air passage and the dehumidified second exhaust air sent from the second processing area are mixed, and the mixed air is used as the dehumidifying target air. It is in the point which has the composition which sends to.

   That is, as shown in FIG. 5, the first exhaust air RA1 (local dry area exhaust air) exhausted from the local dry area 3 is received by the sub dry area 1, and the second exhaust air discharged from the sub dry area 1 along with the reception is received. A method of supplying exhaust air RA2 (in other words, sub dry area exhaust air including local dry area exhaust air RA1) to the treatment area 11 as dehumidification target air (that is, a return air system similar to the above-described conventional system) ), The moisture generated in the sub-dry area 1 (for example, moisture released from the operator) diffuses into the low-humidity first exhaust air RA1 from the local dry area 3, thereby reducing the humidity associated with exhaust mixing. As a mixing loss, the humidity of the dehumidification target air supplied to the processing area 11 increases, and the dehumidifying load in the processing area 11 also increases.

On the other hand, according to the above configuration (see FIG. 1), the first exhaust air RA1 exhausted from the local dry area 3 is concurrently received in the sub dry area 1 through the communication passages 4 and 5 and the auxiliary chambers 6 and 7. Then, the second exhaust air RA2 exhausted from the sub-dry area 1 is dehumidified in advance using the second processing area 12 having a lower dehumidifying efficiency than the processing area 11, and this dehumidified second exhaust air RA2 'and the auxiliary chamber 6 and 7 is mixed with the auxiliary chamber exhaust air RA1 (that is, the low-humidity first exhaust air RA1 from the local dry area 3 received in the auxiliary chambers 6 and 7), and the mixed air MA is dehumidified air. Therefore, the mixing loss on the humidity side due to the exhaust mixing as described above can be effectively reduced, and the dehumidification load in the processing area 11 can be effectively reduced. Can do.

   As a result, the local dry area 3 is more efficiently and effectively reduced in humidity by the above-described promotion of lowering the humidity of the local dry area 3 by dividing the first outlet 11X and the second outlet 11Y. Accordingly, energy saving and cost reduction can be achieved more effectively, or the local dry area 3 can be adjusted to a more advanced low humidity state.

In this configuration, a part of the first exhaust air RA1 received from the local dry area 3 into the auxiliary chambers 6 and 7 is received in the sub dry area 1.

The sixth characteristic configuration of the present invention is:
An outside air processing area that allows the outside air to pass through is disposed on the lower side of the second processing area in the rotation direction of the suction rotor, and is partitioned in the rotation area of the suction rotor,
The dehumidified outside air sent from the outside air processing area, the auxiliary chamber exhaust air discharged from the auxiliary chamber to the first return air passage, and the dehumidified second exhaust air sent from the second processing area are mixed. Thus, the mixed air is supplied to the treatment area as dehumidification target air.

   According to this configuration (see FIG. 1), the second exhaust air RA2 discharged from the sub-dry area 1 is dehumidified in advance using the second processing area 12 having a lower dehumidifying efficiency than the processing area 11, and the outside air The OA is dehumidified in advance using the outside air treatment area 13 having a lower dehumidifying efficiency than the second treatment area 12, and the dehumidified second exhaust air RA2 ', the dehumidified outside air OA', and the auxiliary chamber exhaust air from the auxiliary chambers 6 and 7 Since RA1 (that is, low-humidity first exhausted air RA1 from the local dry area 3 received in the auxiliary chambers 6 and 7) is mixed, and the mixed air MA is supplied to the processing area 11 as dehumidification target air. It is possible to effectively reduce both the mixing loss on the humidity side due to the above-mentioned exhaust mixing and the mixing loss on the humidity side due to the above-mentioned outside air mixing, thereby dehumidifying the treatment area 11. Reduce load more effectively Rukoto can.

   Thus, in combination with the promotion of low humidity in the local dry area 3 as described above by the division between the first outlet 11X and the second outlet 11Y, the local dry area 3 is more efficiently and effectively reduced in humidity. Accordingly, energy saving and cost reduction can be achieved more effectively, or the local dry area 3 can be adjusted to a more advanced low humidity state.

   In the fifth or sixth feature configuration, a part of the first exhaust air RA1 that is directly discharged from the local dry area 3 to the area exhaust port 3b is combined with the auxiliary chamber exhaust air RA1 in the first return air passage. It may be guided to the processing area 11 through 20.

The seventh characteristic configuration of the present invention is:
There is an air supply switching means for switching to a state where a part or all of the second dehumidified air supplied to the sub dry area through the second air supply path is supplied to the local dry area.

According this configuration (see FIG. 1 or FIG. 3), for example, emergency door 28 provided on the partition wall 2 of the local dry areas 3 is opened, or, by, for example, there is a notice to be opened, sub dry area 1 Of the second dehumidified air SA2 supplied to the sub-dry area 1 through the second air supply passage 19b when external air such as air in the area enters the local dry area 3 or is predicted to enter. By switching the part or the whole to the state where the air supply switching means 26 and 27 supply to the local dry area 3, the pressure in the local dry area 3 is increased to prevent the outside air from entering the local dry area 3. can do.

That is, this makes it possible to effectively and reliably prevent the high humidity in the local dry area 3 caused by the opening of the emergency door 28 or the like.

   Incidentally, when the external air enters the local dry area 3, in order to prevent the external air from entering, the output of the fan that supplies the first dehumidified air SA1 to the local dry area 3 is increased. However, in this case, the air dehumidification in the processing area 11 is delayed with respect to the increase in the air volume due to the increase in fan output, and the humidity of the first dehumidified air SA supplied from the processing area 11 to the local dry area 3 is reduced. Even if it temporarily rises and it takes a long time for the humidity of the first dehumidified air SA1 to return to the required low humidity, even if it is possible to prevent the entry of external air into the local dry area 3 There is a possibility that high humidity in the local dry area 3 cannot be sufficiently prevented.

   On the other hand, according to the above configuration, since the second dehumidified air SA2 supplied to the sub dry area 1 is only switched to the state of supplying the local dry area 3, the air dehumidification delay as described above does not occur. As a result, intrusion of external air into the local dry area 3 can be prevented quickly, and high humidity in the local dry area 3 can be more reliably and effectively prevented.

   Note that the entire amount of the dehumidified air SA sent from the processing area 11 is simply distributed and supplied to the local dry zone 3 and the sub-dry zone 1 without distinction between the first and second dehumidified air SA1 and SA2. Switching to the state where the dehumidified air supplied to the sub-dry area 1 is supplied to the local dry area 3 when the emergency door 28 is opened or the like is normal even though the entry of external air into the local dry area 3 can be prevented. At this time, the humidity of the dehumidified air supplied to the local dry zone 3 becomes the average humidity at the outlet of the processing area 11 as described above. However, in this configuration, the dehumidified air sent from the first outlet 11X is normally high. Since only the dehumidified air SA1 is supplied, as described above, the local dry zone 3 can be more efficiently and effectively reduced in humidity during normal times.

System configuration diagram showing the first embodiment Graph showing the humidity distribution at the treatment area outlet System configuration diagram showing the second embodiment System configuration diagram showing another embodiment Configuration diagram of conventional local dehumidification system

[First Embodiment]
FIG. 1 shows a local dehumidification system. Reference numeral 1 denotes a work room for manufacturing a lithium battery, and a tunnel-like local dry area 3 surrounded by a partition wall 2 is formed in the work room 1. .

   A workpiece carry-in port 4 is formed at one end of the local dry area 3, and a work carry-out port 5 is formed at the other end of the local dry area 3. It is limited to be smaller than the internal cross-sectional area.

   The inside of the local dry area 3 is a series of workpiece transfer lines L that transfer the workpiece W through the workpiece loading / unloading ports 4 and 5, and the workpiece W loaded into the local dry area 3 through the workpiece loading / unloading port 4 is transferred to the local dry area 3. Is processed in a required low-humidity atmosphere, and the processed workpiece W is unloaded from the local dry area 3 through the workpiece unloading port 5.

   An inlet side auxiliary chamber 6 through which the workpiece W passes is formed at one end side of the local dry area 3 prior to passing through the workpiece carry-in port 4, and a work carry-out port 5 is provided at the other end side of the local dry area 3. An auxiliary chamber 7 on the exit side through which the passed work W passes is formed, and the opening area of the work inlet 6a of the inlet side auxiliary chamber 6 and the work outlet 7a of the outlet side auxiliary chamber 7 is also set in each auxiliary chamber 6, 7 is limited to be smaller than the internal cross-sectional area.

   The local dry area 3 is provided with an exhaust port 3b for exhausting the air in the area. Similarly, the auxiliary chambers 6 and 7 are also provided with auxiliary chamber exhaust ports 6b and 7b for discharging the indoor air.

   Reference numeral 8 denotes an adsorption rotor type dehumidifier for reducing the humidity of the local dry area 3. The dehumidifier 8 includes a breathable adsorption rotor 8a holding an adsorbent X, and includes a regeneration area 9, a purge area 10, and a treatment area. 11, the second processing area 12, and the outside air processing area 13 are arranged in the rotation area of the adsorption rotor 8 a in a state in which the five areas of the adsorption air rotor rotation direction R are arranged in that order.

   That is, in each of the processing area 11, the second processing area 12, and the outside air processing area 13, as the suction rotor 8a rotates, the air passes through these areas 11 to 13, and the passing air MA, RA2, and OA are respectively transmitted. By ventilating the adsorption rotor portions located in the areas 11 to 13, the passing air MA, RA2, and OA are dehumidified by moisture adsorption by the holding adsorbent X of the adsorption rotor parts, and the dehumidified air is removed from each area 11 to 11 13 is sent from the exit.

   Further, in the regeneration zone 9, as the adsorption rotor 8a rotates, the high temperature regeneration gas HA is passed through the regeneration zone 9, and the high temperature regeneration gas HA is passed through the adsorption rotor portion located in the regeneration zone 9. Then, the adsorbed moisture of the retained adsorbent X in the adsorption rotor portion (that is, the adsorbed moisture in the previous processing area 11, the second processing area 12, and the outside air processing area 13) is desorbed to the high temperature regeneration gas HA, thereby Then, the adsorbent X retained in the adsorption rotor portion is regenerated.

   In the purge area 10, as the adsorption rotor 8 a rotates, the purge gas PA is passed through the purge area 10, and the purge gas PA is passed through the adsorption rotor portion located in the purge area 10. The adsorption rotor portion (that is, the adsorption rotor portion whose temperature has been raised by passing through the previous regeneration zone) is cooled prior to the transition to the next processing zone 11, and the regeneration air HA remaining in the adsorption rotor portion is scavenged.

   In this dehumidifier 8, a part of the used regeneration gas HA ′ discharged from the regeneration zone 9 to the regeneration zone outlet passage 14 is guided to the regeneration heater 16 through the circulation passage 15, and the purge zone 10. The spent purge gas PA ′ discharged from the exhaust gas is led to the regeneration heater 16 through the purge zone outlet passage 17, and a portion HA ″ of the spent regeneration gas HA ′ and the spent purge gas PA ′ are The mixed gas is heated by the regeneration heater 16, and the mixed heated gas is supplied to the regeneration zone 9 through the regeneration zone inlet passage 18 as a high temperature regeneration gas HA.

   Further, among the used regeneration gas HA ′ discharged from the regeneration zone 9 to the regeneration zone outlet passage 14, those other than those led to the regeneration heater 16 through the circulation passage 15 are discharged to the outside through the regeneration zone outlet passage 14.

   Comparing the dehumidifying effect on the passing air MA, RA2 and OA in the three areas of the processing area 11, the second processing area 12, and the outside air processing area 13, respectively, the adsorption immediately after the regeneration process that has passed through the regeneration area 9 and the purge area 10 Although the dehumidifying effect is highest in the processing area 11 through which the rotor portion passes, when only the processing area 11 is viewed, the adsorption rotor type dehumidifier 8 generally shows the humidity distribution of the dehumidified air SA at the outlet of the processing area 11 as shown in FIG. As shown in the graph B, there is a bias in the rotation direction R of the adsorption rotor. In other words, dehumidified air SA1 with relatively high dehumidification and low humidity, and dehumidified air SA2 with relatively low dehumidification and high humidity. Are sent in parallel from the exit of the processing area 11.

   In consideration of this, in the dehumidifier 8 of the present example, the outlet of the treatment area 11 according to the humidity distribution, the first outlet 11X from which the first dehumidified air SA1 with high dehumidification is sent, and the second with low dehumidification are output. The first dehumidified air SA1 (for example, dehumidified air having a dew point temperature of −80 ° C.) sent from the first outlet 11X is divided into the second outlet 11Y from which the dehumidified air SA2 is sent out in the suction rotor rotation direction R. By supplying to the local dry area 3 through the air passage 19a, the local dry area 3 is adjusted to a low humidity state (for example, dew point temperature of −70 ° C. or lower) necessary for work processing.

Further, the second dehumidified air SA2 transmitted from the second outlet 11Y (e.g. dew point -60 ° C. dehumidified air), the the sub working chamber 1 of the chamber as the dry area (room excluding local dry areas 3) By supplying through the two air supply passages 19b, the working chamber 1 as the sub dry area is adjusted to a low humidity state (for example, a dew point temperature of −30 ° C. or lower) according to the local dry area 3.

   Specifically, in the dehumidifier 8 of this example, the above-described humidity distribution at the outlet of the processing area 11 is slightly more than the center of the processing area 11 in the suction rotor rotation direction R as shown in the graph B of FIG. According to the humidity distribution in which the bottom portion having the lowest humidity is formed in the upper part of the rotation direction R, the outlet of the processing area 11 is connected to the upper outlet 11a located on the upper side of the suction rotor rotation direction R; The lower side outlet 11b located on the lower side of the suction rotor rotation direction R and the central outlet 11c located between the upper side outlet 11a and the lower side outlet 11b are divided into three, and the humidity distribution among these divided outlets The central outlet 11c positioned corresponding to the bottommost part and the deeper part following the first outlet 11X is the first outlet 11X, and the upper outlet 11a and the lower outlet 11b are the second outlet 11Y.

   Strictly speaking, the opening range in the suction rotor rotation direction R of the three divided outlets 11a to 11c is such that the bottom part of the humidity distribution and the deep part following the humidity distribution are located in the opening range of the central outlet 11c. In particular, the opening range of the central outlet 11c in the suction rotor rotation direction R is smaller than the opening range of the lower outlet 11b in the suction rotor rotation direction R.

   That is, by supplying only the first dehumidified air SA1 having relatively high dehumidification and low humidity out of the dehumidified air SA sent out from the processing area 11 in this way, it is sent out from the processing area 11. Compared to supplying the entire amount of dehumidified air SA to the local dry area 3, the local dry area 3 can be reduced in humidity more effectively and efficiently.

Further, the second dehumidified air SA2 delivered from the second outlet 11Y is supplied into the working chamber 1 as a sub-dry area, and the working chamber 1 is also brought into a low humidity state in accordance with the local dry area 3, thereby locally The low humidity state in the dry area 3 can be maintained more stably.

   Note that the deviation in the rotation direction R of the adsorption rotor as described above occurs in the humidity distribution of the dehumidified air SA at the exit of the treatment area 11 because the dehumidification target air MA that has entered the adsorption rotor portion located in the treatment area 11 is the adsorption rotor. It is sent as dehumidified air SA from the outlet of the processing area 11 while being slightly shifted to the lower side of the suction rotor rotation direction R by the rotation of 8a, and the lower side of the suction rotor rotation direction R is also held in the processing area 11 Correlation with the fact that the amount of adsorbed moisture of the adsorbent X increases and the dehumidification effect gradually decreases, or that the adsorbing rotor portion immediately after the transition from the purge zone 10 to the processing zone 11 has not been sufficiently cooled, etc. It is inferred that this is one of the causes.

   The local dry area 3 is filled with the first dehumidified air SA1 having high dehumidification due to the ventilation resistance of the work carry-in / out entrances 4 and 5 whose opening area is limited and the presence of the auxiliary chambers 6 and 7 on the entrance and exit sides. Although retained, the first exhaust air RA1 exhausted from the local dry area 3 with the supply of the first dehumidified air SA1 through the first air supply passage 19a is partly supplied to the first return air passage 20 through the exhaust port 3b. The remaining portion is received in the auxiliary chambers 6 and 7 on the inlet side and the outlet side through the work loading / unloading ports 4 and 5 (an example of a communication path).

   A part of the first exhausted air RA1 from the local dry area 3 received in the auxiliary chambers 6 and 7 through the workpiece loading / unloading ports 4 and 5 is part of the workpiece inlet 6a and the outlet side auxiliary chamber 7 of the inlet side auxiliary chamber 6. The remaining part of the first exhaust air RA1 from the local dry area 3 received in the work room 1 as the sub dry area through the work outlet 7a and received in the auxiliary chambers 6 and 7 through the work carry-in / out openings 4 and 5 is the auxiliary room. Exhaust air is discharged to the first return air passage 20 through the auxiliary chamber exhaust ports 6 b and 7 b of the auxiliary chambers 6 and 7, and these auxiliary chamber exhaust air RA 1 is discharged through the exhaust port 3 b of the local dry area 3. Returned to the treatment area 11 through the first return air passage 20 together with the air R1.

   On the other hand, the operation as a sub-dry area with the supply of the second dehumidified air SA2 through the second air supply passage 19b and the reception of the first exhaust air RA1 through the auxiliary chambers 6 and 7 on the inlet side and outlet side. Part of the second exhaust air RA2 exhausted from the chamber 1 is exhausted outside the system through the exhaust passage 21, and the remaining part is sent to the second processing region 12 through the second return air passage 22 to be supplied to the second processing region 12. The air is dehumidified by ventilating the suction rotor portion located at 12.

   Further, the outside air OA guided through the outside air passage 23 is supplied to the outside air processing area 13 and is dehumidified by ventilating the suction rotor portion located in the outside air processing area 13.

   Then, the dehumidified second exhaust air RA2 ′ delivered from the second processing area 12 is merged with the first exhaust air RA1 guided by the first return air path 20 through the second processing area outlet path 24, and the outside air processing area 13 The dehumidified outside air OA ′ delivered from the air is combined with the first exhaust air RA1 guided by the first return air passage 20 through the outside air processing area outlet passage 25, and is thereby discharged from the exhaust port 3b of the local dry area 3. Low-humidity first exhaust air RA1, auxiliary chamber exhaust air RA1 (substantially low-humidity first exhaust air discharged from the local dry area 3) exhausted from the auxiliary chamber exhaust ports 6b and 7b, and the second treatment The dehumidified second exhaust air RA2 ′ sent out from the area 12 and the dehumidified outside air OA ′ sent out from the outside air processing area 13 are mixed, and the mixed air MA is used as the main dehumidifying target air (that is, the local dry area 3 and Feeding the treatment zone 11 as the raw air) dehumidified air SA supplied to the working chamber 1.

   That is, the dehumidified second exhausted air RA2 ′ previously dehumidified in the second processing area 12 having a lower dehumidifying effect than the processing area 11, and the dehumidified previously dehumidified in the outside air processing area 13 having a lower dehumidifying effect than the second processing area 12. The outside air OA ′ is mixed with the low-humidity first exhaust air RA1, and the mixed air MA is sent to the processing area 11 as the main dehumidifying air, so that the mixing loss on the humidity surface due to the outside air mixing and the exhaust mixing To reduce the dehumidification load in the treatment area 11 and thereby promote the reduction of humidity in the local dry area 3 by the division of the first outlet 11X and the second outlet 11Y described above. As a result, the local dry area 3 can be reduced in humidity more efficiently and effectively.

   As for the purge gas PA to be passed through the purge zone 10, a part of the dehumidified outside air OA 'sent from the outside air treatment zone 13 to the outside air treatment zone outlet passage 25 is partially removed from the outside air treatment zone outlet passage 25 to the purge zone inlet passage 25B. The separated dehumidified outside air OA ′ is passed through the purge zone 10 as a purge gas.

   The second air supply passage 19b for supplying the second dehumidified air SA2 to the work chamber 1 as a sub dry area is branched from the second air supply passage 19b and connected to the local dry area 3 as an air supply switching means. A normal air supply state in which the air supply path 26 is provided and the second dehumidified air SA2 is supplied to the work chamber 1 through the second air supply path 19b, and the second dehumidified air SA2 is branched from the second air supply path 19b. An air supply switching damper 27 is provided to switch the air supply state of the second dehumidified air SA2 to the emergency air supply state supplied to the local dry area 3 through 26.

   That is, when the emergency door 28 provided on the partition wall 2 of the local dry area 3 is opened, and the outside air such as the indoor air of the work room 1 enters the local dry area 3, The air supply switching damper 27 switches the supply state of the second dehumidified air SA2 from the normal supply state to the emergency supply state, and a part or all of the second dehumidified air SA2 is locally dried together with the first dehumidified air SA1. By supplying to the area 3, the internal pressure of the local dry area 3 is increased to prevent intrusion of external air into the local dry area 3, and the first and second dehumidified air SA1, in the intrusion prevention state The low humidity state of the local dry area 3 can be reliably and stably maintained by supplying SA2.

   When the emergency door 28 is opened, the supply air switching damper 27 is switched to change the supply state of the second dehumidified air SA2 from the normal supply state to the emergency supply state. The opening of the emergency door 28 is detected based on the pressure detection by detecting the opening of the door, detecting the pressure in the area of the local dry area 3 by the pressure sensor, and detecting the opening of the air supply switching damper. It is desirable to automatically switch 27.

   In FIG. 1, F indicates a fan, and V indicates a damper for adjusting the air volume.

[Second Embodiment]
FIG. 3 is suitable when the low humidity condition required for the local dry area 3 is relatively loose and high humidity, and the humidity difference condition between the local dry area 3 and the work room 1 as the sub-dry area is relatively small. A simple local dehumidification system is shown.

   In this simple local dehumidification system, the main differences from the local dehumidification system of the first embodiment are the second treatment area 12, the second return air passage 22, the exhaust port 3b of the local dry area 3, the auxiliary chamber exhaust. The mouths 6b and 7b are omitted.

   The first exhaust air RA1 exhausted from the local dry area 3 with the supply of the first dehumidified air SA1 through the first air supply passage 19a is entirely transferred from the workpiece carry-in / out ports 4 and 5 to the inlet side and the outlet side. It is received in the work room 1 as a sub-dry area through the auxiliary rooms 6 and 7.

   Further, the working chamber 1 as a sub-dry area is supplied with the supply of the second dehumidified air SA2 through the second air supply passage 19b and the reception of the first exhausted air RA1 through the auxiliary chambers 6 and 7 on the inlet side and the outlet side. A part of the second exhausted air RA2 discharged from the exhaust is discharged outside the system through the exhaust passage 21, and the remaining part is sent to the processing area 11 through the return air passage 22A.

   The dehumidified outside air OA ′ delivered from the outside air processing area 13 is merged with the second exhausted air RA2 in the return air path 22A through the outside air processing area outlet path 25A, whereby the second air from the work chamber 1 serving as a sub-dry area. The exhausted air RA2 and the dehumidified outside air OA ′ are mixed, and the mixed air MA is supplied to the processing area 11 as the main dehumidified air.

   In addition, about the component equivalent to the local dehumidification system of 1st Embodiment, the code | symbol same as the code | symbol used in 1st Embodiment is attached | subjected.

[Another embodiment]
Next, another embodiment will be listed.

   In each of the embodiments described above, the outlet of the processing area 11 is divided into the upper outlet 11a, the central outlet 11c, and the lower outlet 11b, and the central outlet 11c serves as the first outlet 11X, and the upper outlet 11a and the lower outlet 11b. The outlet 11b is set as the second outlet 11Y. Instead, the outlet of the processing area 11 is divided into the upper side outlet and the lower side outlet in the suction rotor rotation direction R, and the bottom of the humidity distribution is provided. The corresponding upper-side outlet may be the first outlet 11X, and the lower-side outlet may be the second outlet 11Y.

   The opening range ratio of the first outlet 11X and the second outlet 11Y in the suction rotor rotation direction can be adjusted according to a change in the condition, for example, by making it possible to adjust the opening range in the suction rotor rotation direction of each of the two or three divided outlets. May be adjusted.

   In the local dehumidification system of the first embodiment shown in FIG. 1, the first exhaust air RA1 (that is, the low-humidity exhaust air from the local dry area 3) guided by the first return air passage 20 without the outside air treatment area 13 is omitted. And the dehumidified second exhausted air RA2 ′ dehumidified in the second processing area 12 is supplied to the processing area 11 as the main dehumidifying air, or the first exhausted air RA1 guided by the first return air passage 20 Then, the mixed air of the dehumidified second exhaust air RA2 ′ dehumidified in the second treatment area 12 and the undehumidified outside air OA may be supplied to the treatment area 11 as the main dehumidification target air.

   Similarly, in the local dehumidification system of the second embodiment shown in FIG. 3, the outside air treatment area 13 is omitted, and only the second exhaust air RA2 guided by the return air passage 22A is sent to the treatment area 11 as the main dehumidification target air. Alternatively, the mixed air of the second exhausted air RA2 guided by the return air passage 22A and the non-dehumidified outside air OA may be supplied to the processing area 11 as the main dehumidified air.

   In the local dehumidification system of the second embodiment shown in FIG. 3, the auxiliary chambers 6 and 7 on the inlet side and the outlet side are omitted, and the first discharged air RA1 from the local dry area 3 is transferred to the work inlet of the local dry area 3. 4 or the work exit 5 may be directly received in the work chamber 1 as a sub-dry area.

The sub-dry area for supplying the second dehumidified air SA2 may be an area having any partition structure as long as it is an installation room for the local dry area 3 such as the work room 1 described above.

Further, in order to receive a part or all of the first exhausted air RA1 discharged from the local dry area 3 into the sub dry area 1 through the communication path , the communication path is not limited to the loading / unloading ports 4 and 5 of the workpiece W. The communication path may be of any application / structure.

   As shown in FIG. 4, in the local dehumidification system of the first embodiment shown in FIG. 1 and the local dehumidification system of the second embodiment shown in FIG. , 7 are formed by a bell mouth structured air passage 29 that gradually increases in diameter toward the inner side of the local dry area 3, whereby the local dry area 3 and the auxiliary chambers 6, 7 are formed. 7 may be suppressed so that the local dry area 3 can be stably maintained in a more uniform low-humidity state.

   Further, as shown in FIG. 4, the local dry area 3 and the adjacent area are supplied with respect to the supply of the first dehumidified air SA1 in the normal air supply state and the supply of the first and second dehumidified air SA1 and SA2 in the emergency air supply state. The differential pressure damper 30 that keeps the pressure in the local dry area 3 at a predetermined pressure by opening and closing the gas by the pressure difference between the local dry area 3 and discharging the excess air RA1 in the local dry area 3 to the adjacent area. Or a partition between the auxiliary chambers 6 and 7 which are adjacent areas, or a partition between the local dry area 3 and the work room 1 as a sub-dry area which is the adjacent area. In response to the reception of the first exhaust air RA1 from the local dry area 3 in the normal air supply state or the emergency air supply state, it opens and closes by the differential pressure between the auxiliary chambers 6 and 7 and the work chamber 1 as the sub dry area The differential pressure damper 31 that keeps the indoor pressure of the auxiliary chambers 6 and 7 at a predetermined pressure by discharging excess air in the auxiliary chambers 6 and 7 to the working chamber 1. You may make it equip with the partition part between.

   The use of the local dry area 3 is not limited to the manufacture of the lithium battery, and may be any use as long as the use requires a low humidity environment.

   The local dehumidification system according to the present invention can be applied to formation of a local low-humidity environment in various fields that require a local low-humidity environment.

HA Regeneration Gas 9 Regeneration Area PA Purge Gas 10 Purge Area MA Dehumidification Target Air 11 Processing Area R Adsorption Rotor Rotation Direction 8a Adsorption Rotor 8 Adsorption Rotor Dehumidifier SA Dehumidification Air 2 Partition Wall 3 Local Dry Area SA1 First Dehumidification Air 11X 1st exit SA2 2nd dehumidified air 11Y 2nd exit 19a 1st air supply path 1 Sub dry area 19b 2nd air supply path 11a Upper side exit 11b Lower side exit 11c Central exit RA1 1st exhaust air 4,5 Communication path OA outside air 13 outside air treatment area 22A return air path RA2 second exhaust air OA 'dehumidified outside air 6,7 auxiliary chamber 22 second return air path 12 second treatment area 20 first return air path RA1 auxiliary chamber exhaust air RA2' dehumidification second 2 Exhaust air 26, 27 Supply air switching means

Claims (7)

The rotation area of the adsorption rotor in a state where the regeneration area through which the regeneration gas passes, the purge area through which the purge gas passes, and the treatment area through which the dehumidification target air passes are arranged in this order from the upper side in the rotation direction of the adsorption rotor Equipped with a suction rotor type dehumidifier partitioned into
A dehumidifying local dehumidification system that supplies dehumidified air sent from the processing area to a local dry area formed by enclosing a partition wall in an area of a sub-dry area and adjusting the local dry area to a low humidity state. ,
According to the humidity distribution in the rotation direction of the adsorption rotor of the dehumidified air at the outlet of the processing area, the outlet of the processing area is divided into a first outlet from which the first dehumidified air having a high dehumidification is sent, and a second dehumidifying having a low dehumidification. It is divided into the second outlet from which air is sent out,
A first air supply path for supplying first dehumidified air sent from the first outlet to the local dry area, and a second supply for supplying second dehumidified air sent from the second outlet to the sub-dry area. setting the care path,
A local dehumidification system configured to receive a part or all of the first exhaust air discharged from the local dry area with the supply of the first dehumidified air through the first air supply path into the sub dry area through the communication path. . Dividing the outlet of the processing area into two in the suction rotor rotation direction, an upper side outlet located on the upper side of the suction rotor rotation direction and a lower side outlet located on the lower side of the suction rotor rotation direction;
The local dehumidification system according to claim 1, wherein the upper outlet is the first outlet and the lower outlet is the second outlet. The outlet of the processing area is located between the upper side outlet located on the upper side of the suction rotor rotation direction, the lower side outlet located on the lower side of the suction rotor rotation direction, and the upper side outlet and the lower side outlet. Divided into three in the rotation direction of the suction rotor,
The local dehumidification system according to claim 1, wherein the central outlet is the first outlet, and the upper outlet and the lower outlet are the second outlet. The outside air treatment zone for passing outside air, the partitioned form in the rotation range of the adsorption rotor arranged on the downstream side of the treatment zone with the adsorption rotor rotational direction,
A second exhaust air discharged from the sub-dry area to the return air passage in response to the supply of the second dehumidified air through the second air supply passage and the reception of the first exhaust air through the communication passage; and the outside air The local dehumidification system of any one of Claims 1-3 which is made into the structure which mixes with the dehumidification external air sent out from a process area, and sends this mixed air to the said process area as dehumidification object air. The first exhaust air discharged from the local dry area with the supply of the first dehumidified air through the first air supply passage is configured to be received in the sub dry area through the communication passage and the auxiliary chamber ,
A second processing area through which the second exhaust air discharged from the sub-dry area to the second return air passage passes is arranged on the lower side of the processing area in the rotation direction of the adsorption rotor and is divided into rotation areas of the adsorption rotor. Forming,
The auxiliary chamber exhaust air discharged from the auxiliary chamber to the first return air passage and the dehumidified second exhaust air sent from the second processing area are mixed, and the mixed air is used as the dehumidifying target air. The local dehumidification system according to any one of claims 1 to 3, wherein the local dehumidification system is configured to be fed to the water. An outside air processing area that allows the outside air to pass through is disposed on the lower side of the second processing area in the rotation direction of the suction rotor, and is partitioned in the rotation area of the suction rotor,
The dehumidified outside air sent from the outside air processing area, the auxiliary chamber exhaust air discharged from the auxiliary chamber to the first return air passage, and the dehumidified second exhaust air sent from the second processing area are mixed. 6. The local dehumidification system according to claim 5, wherein the mixed air is supplied to the treatment area as dehumidification target air.    7. An air supply switching means for switching to a state in which a part or all of the second dehumidified air supplied to the sub dry area through the second air supply path is supplied to the local dry area is provided. 2. A local dehumidification system according to item 1.

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