JP5696852B2 - Solder connection sheet and electronic component mounting method using the same - Google Patents

Solder connection sheet and electronic component mounting method using the same Download PDF

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JP5696852B2
JP5696852B2 JP2011235214A JP2011235214A JP5696852B2 JP 5696852 B2 JP5696852 B2 JP 5696852B2 JP 2011235214 A JP2011235214 A JP 2011235214A JP 2011235214 A JP2011235214 A JP 2011235214A JP 5696852 B2 JP5696852 B2 JP 5696852B2
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solder
sheet
hole
base material
connection sheet
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JP2013093465A (en
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真史 後藤
真史 後藤
豊隆 小林
豊隆 小林
哲広 堀田
哲広 堀田
南奈郎 姫野
南奈郎 姫野
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TDK Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member

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Description

本発明は、ハンダ接続シートおよびそれを用いた電子部品の実装方法に関する。   The present invention relates to a solder connection sheet and an electronic component mounting method using the same.

回路基板の上に半導体素子などの電子部品を実装する場合に、近年では、素子寸法が小さくなって電極間距離が狭くなり、且つ電極数が多くなる傾向にある。このような場合には、電子部品と回路基板との接合位置に導電材料を個別に供給することが困難になる。   In the case where electronic components such as semiconductor elements are mounted on a circuit board, in recent years, there is a tendency that the element size is reduced, the distance between the electrodes is reduced, and the number of electrodes is increased. In such a case, it becomes difficult to individually supply the conductive material to the joint position between the electronic component and the circuit board.

そのため、接続シートの貫通孔に予め導電材料を埋設しておき、回路基板と半導体素子との間に接続シートを挟んで接合を行う手法が存在する(特許文献1)。しかしながら従来では、樹脂の接続シートを用いているため、導電材料として、はんだ材を用いると、ハンダのリフロー加熱により、接続シートが溶融してしまい、ハンダによる接続が困難になるという課題を有している。また、樹脂シートは実装時の押圧で潰れにくいため接合を確実に行うためには貫通孔を導電材料で満たす必要があり、隣接する電極同士がブリッジしやすいという課題も存在する。   For this reason, there is a technique in which a conductive material is embedded in a through hole of a connection sheet in advance and the connection sheet is sandwiched between a circuit board and a semiconductor element to perform bonding (Patent Document 1). However, conventionally, since a resin connection sheet is used, if a solder material is used as the conductive material, the connection sheet melts due to reflow heating of the solder, making it difficult to connect with solder. ing. In addition, since the resin sheet is not easily crushed by pressing during mounting, it is necessary to fill the through hole with a conductive material in order to reliably perform bonding, and there is a problem that adjacent electrodes are easily bridged.

特開2003−31617号公報JP 2003-31617 A

本発明は、このような実状に鑑みてなされ、その目的は、電子部品に形成された電極端子間距離が狭い場合であっても、隣接する電極端子間を短絡させることなく、しかも容易且つ確実に、回路基板の接続用端子に電子部品の各電極端子を接続させることが可能なハンダ接続シートと、それを用いた電子部品の実装方法を提供することである。   The present invention has been made in view of such a situation, and the object thereof is easy and reliable without short-circuiting between adjacent electrode terminals even when the distance between electrode terminals formed in an electronic component is narrow. Another object is to provide a solder connection sheet capable of connecting each electrode terminal of an electronic component to a connection terminal of a circuit board, and a mounting method of an electronic component using the same.

上記目的を達成するために、本発明の第1の観点に係るハンダ接続シートは、
織布または不織布で構成してあり、表裏面を貫通する複数の貫通孔が所定パターンで形成してあるシート基材と、
前記貫通孔の内部に保持され、予めボール状に成形されたハンダ部材と、を有する。
In order to achieve the above object, the solder connection sheet according to the first aspect of the present invention is:
A sheet base material that is composed of a woven fabric or a non-woven fabric, and in which a plurality of through-holes penetrating the front and back surfaces are formed in a predetermined pattern;
A solder member that is held inside the through hole and is previously molded into a ball shape.

本発明の第1の観点では、シート基材が織布または不織布で構成してあることから、耐熱性が向上し、貫通孔の内部に埋設したハンダ部材を溶融させてボール形状に容易に成形することができる。予めボール状に成形されたハンダ部材を貫通孔の内部に保持させることで、安定したハンダ量の制御が可能であり、接続信頼性が向上する。   In the first aspect of the present invention, since the sheet base material is composed of a woven fabric or a non-woven fabric, the heat resistance is improved, and the solder member embedded in the through hole is melted to be easily formed into a ball shape. can do. By holding the solder member formed in a ball shape in advance in the through hole, it is possible to control the amount of solder stably, and the connection reliability is improved.

また、予めボール状に成形されたハンダ部材を貫通孔の内部に保持させることで、貫通孔の外周縁からはハンダ部材の表面が遠ざかり、隣接するハンダ部材同士のブリッジを防止することができる。しかも貫通孔の中心位置では、はんだ部材の表面がシート基材の表裏面よりも外側の空間へ向かって(電子部品と回路基板を接続する方向に)最も突出する形状となることから、ハンダ部材を介して、回路基板の接続用端子に電子部品の各電極端子を確実に接続させることができる。   Further, by holding the solder member formed in a ball shape in the inside of the through hole, the surface of the solder member is moved away from the outer peripheral edge of the through hole, and bridges between adjacent solder members can be prevented. Moreover, at the center position of the through hole, the solder member has a shape that protrudes most toward the space outside the front and back surfaces of the sheet base material (in the direction in which the electronic component and the circuit board are connected). Thus, each electrode terminal of the electronic component can be reliably connected to the connection terminal of the circuit board.

すなわち、本発明の第1の観点によれば、電子部品に形成された電極端子間距離が狭い場合であっても、ハンダ接続シートが間に介在された基板と電子部品とを相互に加圧および加熱するのみで、隣接する電極端子間を短絡させることなく、しかも容易且つ確実に、回路基板の接続用端子に電子部品の各電極端子を接続させることができる。   That is, according to the first aspect of the present invention, even when the distance between the electrode terminals formed on the electronic component is narrow, the substrate on which the solder connection sheet is interposed and the electronic component are pressed against each other. Moreover, each electrode terminal of the electronic component can be easily and reliably connected to the connection terminal of the circuit board without short-circuiting between the adjacent electrode terminals only by heating.

また、シート基材が織布または不織布で構成してあることから加圧変形性に優れている。そのため、ハンダ接続シートが間に介在された基板と電子部品とを相互に加圧および加熱する際には、一定以上の加圧力では加圧力にはよらずに、均一に圧縮変形させることが可能であり、しかも加圧後の厚みが一定になる。このため、加圧後の一定厚みで、シート基材が基板と電子部品の双方に対して密着する。そのため、基板と電子部品との接続後の位置精度が向上すると共に、耐熱衝撃性も向上し、接続信頼性が向上する。また、シート基材に形成する貫通孔の孔径やパターンを変更するのみで、様々なサイズのハンダバンプ形状に対応することも容易である。   Moreover, since the sheet | seat base material is comprised with the woven fabric or the nonwoven fabric, it is excellent in a pressure deformation property. Therefore, when pressing and heating the board and electronic component with the solder connection sheet interposed between them, it is possible to uniformly compress and deform with a certain level of pressure, regardless of the pressure. In addition, the thickness after pressurization is constant. For this reason, the sheet base material adheres to both the substrate and the electronic component with a constant thickness after pressing. Therefore, the positional accuracy after the connection between the substrate and the electronic component is improved, the thermal shock resistance is also improved, and the connection reliability is improved. Moreover, it is easy to cope with solder bump shapes of various sizes only by changing the hole diameter and pattern of the through holes formed in the sheet base material.

本発明の第2の観点に係るハンダ接続シートは、
織布または不織布で構成してあり、表裏面を貫通する複数の貫通孔が所定パターンで形成してあるシート基材と、
前記貫通孔の内部に保持され、前記貫通孔の内部体積よりも小さい体積のハンダ部材と、を有する。
The solder connection sheet according to the second aspect of the present invention is:
A sheet base material that is composed of a woven fabric or a non-woven fabric, and in which a plurality of through-holes penetrating the front and back surfaces are formed in a predetermined pattern;
A solder member held inside the through hole and having a volume smaller than the internal volume of the through hole.

本発明の第2の観点では、第1の観点と同様に、シート基材が織布または不織布で構成してあることから耐熱性および加圧変形性に優れている。そのため、ハンダ接続シートが間に介在された基板と電子部品とを相互に加圧および加熱する際には、シート基材が厚み方向に均一に圧縮変形され、シート基材が基板と電子部品の双方に対して良好に密着する。そのため、基板と電子部品との接続後の耐熱衝撃性も向上し、接続信頼性が向上する。   In the 2nd viewpoint of this invention, since the sheet | seat base material is comprised with the woven fabric or the nonwoven fabric similarly to the 1st viewpoint, it is excellent in heat resistance and pressure deformation property. Therefore, when the substrate and the electronic component with the solder connection sheet interposed therebetween are pressed and heated, the sheet base material is uniformly compressed and deformed in the thickness direction, and the sheet base material is formed between the substrate and the electronic component. Good adhesion to both sides. Therefore, the thermal shock resistance after the connection between the substrate and the electronic component is improved, and the connection reliability is improved.

また本発明の第2の観点では、貫通孔の内部には、貫通孔の内部体積よりも小さい体積のハンダ部材が保持してある。このため、安定したハンダ量の制御が可能であり、接続信頼性が向上する。また、ハンダ接続シートが間に介在された基板と電子部品とを相互に加圧および加熱する際に、織布または不織布で構成してあるハンダ接続シートの厚みが減少した後に、ハンダ部材が、回路基板の接続用端子と電子部品の各電極端子とに接触して溶融・合金化して両者を確実に接続し、しかも、隣接する電極端子間を短絡させることがない。   In the second aspect of the present invention, a solder member having a volume smaller than the internal volume of the through hole is held inside the through hole. Therefore, stable solder amount control is possible, and connection reliability is improved. Further, when the substrate and the electronic component between which the solder connection sheet is interposed are pressed and heated, after the thickness of the solder connection sheet made of woven fabric or nonwoven fabric is reduced, the solder member is The connection terminal of the circuit board and each electrode terminal of the electronic component are brought into contact with each other to be melted and alloyed so that they are securely connected, and the adjacent electrode terminals are not short-circuited.

したがって、本発明の第2の観点では、電子部品に形成された電極端子間距離が狭い場合であっても、ハンダ接続シートが間に介在された基板と電子部品とを相互に加圧および加熱するのみで、隣接する電極端子間を短絡させることなく、しかも容易且つ確実に、回路基板の接続用端子に電子部品の各電極端子を接続させることができる。また、シート基材に形成する貫通孔の孔径やパターンを変更するのみで、様々なサイズのハンダバンプ形状に対応することも容易である。   Therefore, in the second aspect of the present invention, even when the distance between the electrode terminals formed in the electronic component is narrow, the substrate and the electronic component with the solder connection sheet interposed therebetween are pressurized and heated mutually. Thus, it is possible to connect each electrode terminal of the electronic component to the connection terminal of the circuit board easily and reliably without short-circuiting between adjacent electrode terminals. Moreover, it is easy to cope with solder bump shapes of various sizes only by changing the hole diameter and pattern of the through holes formed in the sheet base material.

前記シート基材には、接着剤が含浸してあっても良い。シート基材に接着剤を含浸させることで、シート基材により基板と電子部品の密着性を向上させる。そのため、基板と電子部品との接続後の耐熱衝撃性も向上し、接続信頼性がさらに向上する。また、シート基材に接着剤を含浸させることで、シート基材の貫通孔にハンダ部材を保持し易くなる。   The sheet base material may be impregnated with an adhesive. By impregnating the sheet base material with the adhesive, the adhesion between the substrate and the electronic component is improved by the sheet base material. Therefore, the thermal shock resistance after the connection between the substrate and the electronic component is improved, and the connection reliability is further improved. Moreover, it becomes easy to hold | maintain a solder member in the through-hole of a sheet | seat base material by making a sheet | seat base material impregnate an adhesive agent.

前記接着剤は、前記貫通孔の内部にも充填してあり、前記貫通孔に充填してある接着剤が、前記ハンダ部材を前記貫通孔の内部に保持してあってもよい。このように構成することで、ボール形状のハンダ部材を貫通孔の内部に保持しやすくなる。   The adhesive may be filled in the through hole, and the adhesive filled in the through hole may hold the solder member inside the through hole. With this configuration, it becomes easy to hold the ball-shaped solder member inside the through hole.

なお、本発明の第1の観点では、ボール形状のハンダ部材を形成した後に、シート基材に接着剤を含浸および/または貫通孔に接着剤を充填させることが好ましい。順序が逆であると、ボール形状のハンダ部材を作製する際の熱により、接着剤が飛んでしまうからである。   In the first aspect of the present invention, it is preferable that after the ball-shaped solder member is formed, the sheet base material is impregnated with an adhesive and / or the through hole is filled with the adhesive. This is because if the order is reversed, the adhesive will fly off due to the heat when producing the ball-shaped solder member.

また、本発明の第2の観点では、貫通孔にハンダ部材を充填する前に、シート基材に接着剤を含浸させても良い。ハンダ部材を充填する前の状態で接着剤を含浸させる場合には、シート基材に均一に接着剤を含浸させることが容易である。   In the second aspect of the present invention, the sheet base material may be impregnated with an adhesive before the through hole is filled with the solder member. When the adhesive is impregnated before the solder member is filled, it is easy to uniformly impregnate the sheet base material with the adhesive.

前記接着剤は、フラックスの機能を有する成分を含んでいてもよい。接着剤がフラックスの成分を含んでいる場合には、ハンダ接続時に必要なフラックスを別に準備する必要がなくなる。   The adhesive may contain a component having a flux function. When the adhesive contains a flux component, it is not necessary to separately prepare a flux required for solder connection.

前記シート基材には、半硬化樹脂が含浸してあってもよい。半硬化樹脂は、基板実装時の加熱温度(たとえば220〜260℃)により、硬化が完了する樹脂であることが好ましいが、基板実装後にアフターキュアを行って硬化を完了させる形でも良い。半硬化樹脂の含浸は、接着剤と同様に、本発明の第1の観点では、ボール形状のハンダ部材を形成した後が好ましく、本発明の第2の観点では、ハンダ部材を充填する前の状態で行うことが好ましい。   The sheet base material may be impregnated with a semi-cured resin. The semi-cured resin is preferably a resin that completes curing depending on the heating temperature (for example, 220 to 260 ° C.) at the time of mounting the substrate, but it may be in a form in which the curing is completed by performing after-curing after mounting the substrate. In the first aspect of the present invention, the semi-cured resin impregnation is preferably performed after the ball-shaped solder member is formed, and in the second aspect of the present invention, before the solder member is filled. It is preferable to carry out in the state.

前記シート基材が不織布で構成してもよい。不織布で構成することにより、縦横で熱膨張係数の差が少なく、ハンダ溶融のための加熱時におけるハンダ部材の位置ズレが少ない。また、不織布で構成することにより、織布に比較して、密度自由度、潰れ性、生産性、貫通孔加工性などに優れている。密度自由度に優れていることから、接着剤や樹脂の含浸量に合わせて、繊維の密度を自由に設定することができる。また、潰れ性に優れていることから、電子部品に形成された電極端子間距離が狭い場合であっても、ハンダ接続シートを良好に圧縮させて、隣接する電極端子間を短絡させることなく、しかも容易且つ確実に、回路基板の接続用端子に電子部品の各電極端子を接続させることができる。   The sheet base material may be composed of a nonwoven fabric. By comprising a nonwoven fabric, the difference in thermal expansion coefficient between the length and breadth is small, and the positional deviation of the solder member during heating for melting the solder is small. Moreover, by comprising with a nonwoven fabric, it is excellent in a density freedom degree, crushability, productivity, through-hole processability, etc. compared with a woven fabric. Since the degree of freedom in density is excellent, the density of the fibers can be freely set according to the amount of the adhesive or resin impregnated. In addition, because it is excellent in crushability, even when the distance between the electrode terminals formed in the electronic component is narrow, it is possible to compress the solder connection sheet well without short-circuiting between the adjacent electrode terminals, In addition, each electrode terminal of the electronic component can be connected to the connection terminal of the circuit board easily and reliably.

前記シート基材の表面および/または裏面には、使用に際して剥離可能な剥離シートが積層してあってもよい。剥離シートが、貫通孔に保持してあるハンダ部材の落下を抑制して確実にハンダ部材を貫通孔の内部に保持させることができる。   A release sheet that can be peeled off during use may be laminated on the front surface and / or back surface of the sheet base material. The release sheet can securely hold the solder member inside the through hole by suppressing the fall of the solder member held in the through hole.

前記剥離シートにおける前記シート基材との剥離面には、粘着層が形成してあってもよい。粘着層を形成することで、貫通孔に保持してあるハンダ部材の落下を抑制して確実にハンダ部材を貫通孔の内部に保持させることができる。   An adhesive layer may be formed on the release surface of the release sheet from the sheet base material. By forming the adhesive layer, the solder member held in the through hole can be prevented from dropping and the solder member can be reliably held inside the through hole.

本発明に係る電子部品の実装方法は、
上記のいずれかに係るハンダ接続シートを、所定パターンの接続用端子が形成してある回路基板の表面と、電子部品の端子形成面との間に配置する工程と、
前記ハンダ接続シートが間に介在された前記基板と電子部品とを、相互に加圧および加熱する工程とを有する。
The electronic component mounting method according to the present invention includes:
Placing the solder connection sheet according to any of the above between a surface of a circuit board on which a connection terminal of a predetermined pattern is formed and a terminal formation surface of an electronic component;
And pressurizing and heating the substrate and the electronic component with the solder connection sheet interposed therebetween.

図1は本発明の一実施形態に係るハンダ接続シートの要部断面図である。FIG. 1 is a cross-sectional view of a main part of a solder connection sheet according to an embodiment of the present invention. 図2(A)〜図2(E)は図1に示すハンダ接続シートの製造方法の一例を示す概略断面図である。2 (A) to 2 (E) are schematic cross-sectional views showing an example of a method for manufacturing the solder connection sheet shown in FIG. 図3(A)〜図3(C)は図1に示すハンダ接続シートの使用方法の一例を示す概略断面図である。3 (A) to 3 (C) are schematic cross-sectional views illustrating an example of a method for using the solder connection sheet shown in FIG. 図4は図3(B)の要部拡大断面図である。FIG. 4 is an enlarged cross-sectional view of a main part of FIG. 図5(A)および図5(B)は本発明の他の実施形態に係るハンダ接続シートの要部断面図である。FIGS. 5A and 5B are cross-sectional views of the main part of a solder connection sheet according to another embodiment of the present invention. 図6(A)〜図6(D)は図5(A)および図5(B)に示すハンダ接続シートの製造方法の一例を示す概略断面図である。6 (A) to 6 (D) are schematic cross-sectional views showing an example of a method for manufacturing the solder connection sheet shown in FIGS. 5 (A) and 5 (B). 図7(A)〜図7(C)は図6(D)の続きの工程を示す概略断面図である。FIG. 7A to FIG. 7C are schematic cross-sectional views showing a step subsequent to FIG. 図8は本発明のさらに他の実施形態に係るハンダ接続シートの要部断面図である。FIG. 8 is a cross-sectional view of a main part of a solder connection sheet according to still another embodiment of the present invention. 図9(A)〜図9(D)は図8に示すハンダ接続シートの製造方法の一例を示す概略断面図である。9A to 9D are schematic cross-sectional views illustrating an example of a method for manufacturing the solder connection sheet illustrated in FIG.

以下、本発明を、図面に示す実施形態に基づき説明する。
第1実施形態
Hereinafter, the present invention will be described based on embodiments shown in the drawings.
First embodiment

図1に示すように、本発明の一実施形態に係るハンダ接続シート2は、織布または不織布で構成してあるシート基材4を有する。シート基材4には、その表面4aから裏面4bに向けて貫通する複数の貫通孔6が所定パターンで形成してある。   As shown in FIG. 1, a solder connection sheet 2 according to an embodiment of the present invention has a sheet substrate 4 made of a woven fabric or a non-woven fabric. A plurality of through holes 6 penetrating from the front surface 4a toward the back surface 4b are formed in the sheet base material 4 in a predetermined pattern.

本実施形態では、各貫通孔6は、シート基材4の表面4aから裏面4bに向けて内径が小さくなるテーパ状の貫通孔である。各貫通孔6の内部には、予めボール状に成形されたハンダ部材8が保持してある。ハンダ部材8の形状は、ボール形状であれば特に限定されず、球形に限らず断面が楕円状のボール形状、円錐台形状、砲弾形状、円柱形状、回転楕円体形状などであっても良い。ボール形状のハンダ部材8は、後述するようにリフロー熱処理により形成される。   In the present embodiment, each through hole 6 is a tapered through hole having an inner diameter that decreases from the front surface 4 a to the back surface 4 b of the sheet base material 4. Inside each through-hole 6, a solder member 8 previously formed in a ball shape is held. The shape of the solder member 8 is not particularly limited as long as it is a ball shape, and is not limited to a spherical shape, and may be a ball shape having an elliptical cross section, a truncated cone shape, a shell shape, a cylindrical shape, a spheroid shape, or the like. The ball-shaped solder member 8 is formed by reflow heat treatment as will be described later.

ボール形状のハンダ部材の外径d0(球形以外の場合には最小外径)は、シート基材4における貫通孔6の最小内径d2よりも大きくなり、貫通孔6の最大外径d1よりも小さくなるように決定される。外径d0が小さすぎると、貫通孔6からハンダ部材8が落下するおそれがあり、大きすぎると、隣接するハンダ部材とブリッジしてしまい、短絡の原因となりやすい。各貫通孔6に保持してあるハンダ部材8の体積は、各貫通孔6の体積よりも小さくても良いが、この実施形態では、大きくても良い。   The outer diameter d0 of the ball-shaped solder member (minimum outer diameter in the case of other than a spherical shape) is larger than the minimum inner diameter d2 of the through hole 6 in the sheet base material 4, and smaller than the maximum outer diameter d1 of the through hole 6. To be determined. If the outer diameter d0 is too small, the solder member 8 may fall from the through-hole 6, and if it is too large, it bridges with an adjacent solder member, which is likely to cause a short circuit. The volume of the solder member 8 held in each through hole 6 may be smaller than the volume of each through hole 6, but may be larger in this embodiment.

貫通孔6がテーパ状である場合には、貫通孔6の最小内径d2と、貫通孔6の最大外径d1と、シート基材4の厚みt1と、テーパ角度θ1との関係は、次の(1)式のように表せる。
tanθ1=(d1−d2)/(2×t1) … (1)
When the through hole 6 is tapered, the relationship among the minimum inner diameter d2 of the through hole 6, the maximum outer diameter d1 of the through hole 6, the thickness t1 of the sheet base material 4, and the taper angle θ1 is as follows. It can be expressed as (1).
tan θ1 = (d1−d2) / (2 × t1) (1)

シート基材4の厚みt1は、特に限定されないが、好ましくは10〜60μmであり、貫通孔6の最大外径d1は、好ましくは25〜300μm、テーパ角度θ1は、好ましくは60〜85度である。貫通孔6の大径側孔径d1、テーパ角度θ1、貫通孔6の形成パターンおよびシート基材4の厚みt1などは、用途に応じて自由に設定される。   The thickness t1 of the sheet substrate 4 is not particularly limited, but is preferably 10 to 60 μm, the maximum outer diameter d1 of the through hole 6 is preferably 25 to 300 μm, and the taper angle θ1 is preferably 60 to 85 degrees. is there. The large-diameter side hole diameter d1, the taper angle θ1, the formation pattern of the through-hole 6, the thickness t1 of the sheet substrate 4 and the like are freely set according to the application.

本実施形態では、シート基材4が織布または不織布で構成してあり、耐熱性、孔空け加工性および加工変形性に優れていることが好ましい。織布または不織布を構成する繊維は、特に限定されないが、耐熱性および絶縁性に優れ、低誘電率および低誘電正接であり、高周波特性に優れる繊維が好ましく、たとえばガラス繊維、BT(ビスマレイミドトリアジンの略)レジン、アラミド繊維、液晶ポリマー、炭素繊維、PPS(ポリフェニレンサルファイド)繊維、ポリイミド繊維、フッ素繊維、PEEK(ポリエーテルエーテルケトン)繊維などで構成されることが好ましい。   In this embodiment, it is preferable that the sheet | seat base material 4 is comprised with the woven fabric or the nonwoven fabric, and is excellent in heat resistance, hole-forming property, and work deformation property. The fiber constituting the woven fabric or the nonwoven fabric is not particularly limited, but is preferably a fiber excellent in heat resistance and insulation, low dielectric constant and low dielectric loss tangent, and excellent in high frequency characteristics, such as glass fiber, BT (bismaleimide triazine). Abbreviation) Resin, aramid fiber, liquid crystal polymer, carbon fiber, PPS (polyphenylene sulfide) fiber, polyimide fiber, fluorine fiber, PEEK (polyether ether ketone) fiber and the like are preferable.

シート基材4に要求される耐熱性は、ハンダ溶融時の温度に対する耐熱性であり、たとえば220〜260℃の温度で、溶融せずに形状を保持する程度の耐熱性が要求される。また、シート基材に要求される孔空け加工性は、レーザ加工などによる加工性に優れていることである。さらにシート基材における加工変形性は、シート基材の表裏面方向に作用する圧縮荷重に対して均一に圧縮変形することが要求される特性であり、圧縮荷重によらずに、最終厚みが一定厚みになるように、繊維の材質および編組手段が選択される。本実施形態では、シート基材4は、不織布で構成してある。   The heat resistance required for the sheet base material 4 is heat resistance with respect to the temperature at the time of solder melting. For example, at a temperature of 220 to 260 ° C., the heat resistance is required to maintain the shape without melting. Moreover, the drilling workability required for the sheet base material is excellent workability by laser processing or the like. Furthermore, the work deformability of the sheet base material is a characteristic that requires uniform compressive deformation against the compressive load acting in the front and back direction of the sheet base material, and the final thickness is constant regardless of the compressive load. The material of the fiber and the braiding means are selected so as to obtain a thickness. In this embodiment, the sheet | seat base material 4 is comprised with the nonwoven fabric.

シート基材4には、接着剤が含有してあることが好ましい。さらに、接着剤には、ハンダ接合時におけるフラックスの機能を有する成分を含んでいてもよい。接着剤がフラックスの成分を含んでいる場合には、ハンダ接続時に必要なフラックスを別に準備する必要がなくなる。   It is preferable that the sheet base material 4 contains an adhesive. Furthermore, the adhesive may contain a component having a flux function during solder bonding. When the adhesive contains a flux component, it is not necessary to separately prepare a flux required for solder connection.

また、シート基材4には、半硬化樹脂(Bステージ状態)が含浸してあってもよい。半硬化樹脂は、基板実装時の加熱温度(たとえば220〜260℃)により、硬化が完了する樹脂であることが好ましいが、基板実装後にアフターキュアを行って硬化を完了させる形でもよい。具体的には、半硬化樹脂としては、エポキシ系樹脂、シリコーン系樹脂、ポリイミド系樹脂、BTレジン系樹脂などが用いられる。シート基材4に接着剤および/または半硬化樹脂を含浸させることで、各貫通孔6の内部にハンダ部材8を保持しやすくなる。   The sheet base 4 may be impregnated with a semi-cured resin (B stage state). The semi-cured resin is preferably a resin that completes curing depending on the heating temperature (for example, 220 to 260 ° C.) at the time of mounting the substrate, but it may be in a form in which the curing is completed by performing after-curing after mounting the substrate. Specifically, an epoxy resin, a silicone resin, a polyimide resin, a BT resin resin, or the like is used as the semi-cured resin. By impregnating the sheet base material 4 with an adhesive and / or a semi-cured resin, the solder member 8 can be easily held inside each through hole 6.

ハンダ部材8としては、融点が183〜240°Cであるハンダが好ましく、融点付近に加熱することで、ハンダ部材8は、貫通孔6の内部でボール形状になる。   As the solder member 8, solder having a melting point of 183 to 240 ° C. is preferable. By heating near the melting point, the solder member 8 has a ball shape inside the through hole 6.

次に、図1に示すハンダ接続シート2の製造方法について、図2に基づき説明する。   Next, a method for manufacturing the solder connection sheet 2 shown in FIG. 1 will be described with reference to FIG.

図2(A)に示すように、まず、接着剤や半硬化樹脂などが含浸されていないシート基材4Aを準備する。その後、図2(B)に示すように、レーザ加工、パンチング加工、ドリル加工などにより、シート基材4Aに所定パターンで、テーパ状の貫通孔6を形成する。   As shown in FIG. 2A, first, a sheet substrate 4A that is not impregnated with an adhesive, a semi-cured resin, or the like is prepared. Thereafter, as shown in FIG. 2B, tapered through-holes 6 are formed in a predetermined pattern on the sheet base 4A by laser processing, punching processing, drill processing, or the like.

その後に、図2(C)に示すように、各貫通孔6に、流動状態のハンダ8Aを充填する。流動状態のハンダ8Aの充填は、たとえば印刷、ディスペンサでの塗布などの方法により行う。充填に際しては、ハンダ8Aが貫通孔6からはみ出るように充填しても良い。   After that, as shown in FIG. 2C, each through-hole 6 is filled with solder 8A in a fluid state. The solder 8A in a fluid state is filled by a method such as printing or application with a dispenser. When filling, the solder 8A may be filled so as to protrude from the through hole 6.

シート基材4Aの表面4aからのレーザ加工により貫通孔6を形成した場合には、テーパ状の貫通孔6を形成しやすく、充填されたハンダ8Aは、表面張力により、裏面4bから流れ出るおそれがない。   When the through hole 6 is formed by laser processing from the front surface 4a of the sheet base 4A, the tapered through hole 6 is easily formed, and the filled solder 8A may flow out from the back surface 4b due to the surface tension. Absent.

ハンダ8Aを充填する前に、貫通孔6には、予めフラックスを充填しておいても良い。また、シート基材4Aの表裏面には、予めハンダ這い上がり防止剤を塗布しておいても良い。さらに、シート基材4Aには、後述するリフロー処理の加熱時に昇華する材料を予め含浸させておき、シート基材4Aを補強しても良い。   Before filling the solder 8A, the through hole 6 may be filled with a flux in advance. Moreover, you may apply | coat the solder creep-up prevention agent beforehand to the front and back of the sheet | seat base material 4A. Further, the sheet base material 4A may be reinforced by preliminarily impregnating a material that sublimes when heated in a reflow process described later.

その後に、図2(D)に示すように、シート基材4Aと共にハンダ8Aを、ハンダ8Aの溶融温度以上に加熱(リフロー熱処理)して冷却すれば、貫通孔6の内部で、ボール状のハンダ部材8が得られ、貫通孔6に保持される。その後に、図2(E)に示すように、シート基材4Aに接着剤および/または半硬化樹脂を含浸させれば、図1に示すハンダ接続シート2が得られる。   Thereafter, as shown in FIG. 2D, if the solder 8A together with the sheet base material 4A is heated to a temperature higher than the melting temperature of the solder 8A (reflow heat treatment) and cooled, a ball-like shape is formed inside the through hole 6. A solder member 8 is obtained and held in the through hole 6. Thereafter, as shown in FIG. 2E, if the sheet base 4A is impregnated with an adhesive and / or a semi-cured resin, the solder connecting sheet 2 shown in FIG. 1 is obtained.

次に図1に示すハンダ接続シート2の使用方法の一例について、図3(A)〜図3(C)に基づき説明する。   Next, an example of a method of using the solder connection sheet 2 shown in FIG. 1 will be described based on FIGS. 3 (A) to 3 (C).

まず、図3(A)に示すように、電子部品としてのICチップ10とインターポーザ基板14との間にハンダ接続シート2を配置する。また、インターポーザ基板14とPCボードなどの回路基板20との間にも、ハンダ接続シート2を配置する。   First, as shown in FIG. 3A, the solder connection sheet 2 is disposed between the IC chip 10 as an electronic component and the interposer substrate 14. Further, the solder connection sheet 2 is also disposed between the interposer substrate 14 and the circuit board 20 such as a PC board.

ICチップ10とインターポーザ基板14との間に用いられるハンダ接続シート2と、インターポーザ基板14とPCボードなどの回路基板20との間に用いられるハンダ接続シート2とは、貫通孔6の形成パターンなどが異なるが、基本的には、同様な構成を有している。インターポーザ基板14は、ICチップ10に形成してある狭ピッチで配置された各電極端子12を、回路基板20の表面に比較的に広いピッチで配置された各接続用端子22に接続させるための基板である。   The solder connection sheet 2 used between the IC chip 10 and the interposer substrate 14 and the solder connection sheet 2 used between the interposer substrate 14 and the circuit board 20 such as a PC board include the formation pattern of the through holes 6. Basically, they have the same configuration. The interposer substrate 14 is used to connect the electrode terminals 12 formed on the IC chip 10 at a narrow pitch to the connection terminals 22 arranged on the surface of the circuit board 20 at a relatively wide pitch. It is a substrate.

インターポーザ基板14の表面には、ICチップ10に形成してある狭ピッチで配置された各電極端子12に対応して狭ピッチで配置してある接続用端子16が形成してあり、裏面には、回路基板20の表面に比較的に広いピッチで配置された各接続用端子22に対応する接続用端子18が形成してある。表裏面に形成してある接続用端子16と接続用端子18とは、基板14の内部の配線回路により、それぞれ電気的に接続してある。   On the front surface of the interposer substrate 14, connection terminals 16 arranged at a narrow pitch corresponding to the electrode terminals 12 arranged at a narrow pitch formed on the IC chip 10 are formed. The connection terminals 18 corresponding to the connection terminals 22 arranged on the surface of the circuit board 20 at a relatively wide pitch are formed. The connection terminals 16 and the connection terminals 18 formed on the front and back surfaces are electrically connected to each other by a wiring circuit inside the substrate 14.

まずは図3(B)に示すように、ICチップ10とインターポーザ基板14との間にハンダ接続シート2を配置した状態で、これらのICチップ10と基板14とを加圧加熱する。加圧力は、特に限定されず、図1に示すハンダ接続シート2におけるシート基材4の厚みt1が、圧縮変形して、図4に示す一定厚みt2となるまで圧縮される程度の加圧力が好ましい。厚みt2/t1は、好ましくは、2/3〜1/3である。   First, as shown in FIG. 3B, in a state where the solder connection sheet 2 is disposed between the IC chip 10 and the interposer substrate 14, the IC chip 10 and the substrate 14 are heated under pressure. The applied pressure is not particularly limited, and the applied pressure is such that the thickness t1 of the sheet base material 4 in the solder connecting sheet 2 shown in FIG. 1 is compressed and deformed until the thickness t1 becomes the constant thickness t2 shown in FIG. preferable. The thickness t2 / t1 is preferably 2/3 to 1/3.

また、加熱温度は、ハンダ部材8が溶融して、図4に示すように、電極端子12と接続用端子16とを、加熱加圧により変形したハンダ部材Bにより十分な接合強度で接続する温度であり、ハンダの溶融温度に対して、+10%〜+30%の温度であることが好ましい。   The heating temperature is a temperature at which the solder member 8 is melted and the electrode terminal 12 and the connection terminal 16 are connected with sufficient bonding strength by the solder member B deformed by heating and pressing, as shown in FIG. It is preferable that the temperature is + 10% to + 30% with respect to the melting temperature of the solder.

次に、図3(C)に示すように、インターポーザ基板14と回路基板20との間にハンダ接続シート2を配置した状態で、前述と同様にして、これらの基板14および20を加熱加圧する。それにより、ハンダ部材8が加熱加圧されて変形したハンダ部材8B(図4参照)により、図3に示す接続用端子18と接続用端子22とを十分な接合強度で接続する。なお、回路基板20には、その他の電子部品24が実装してあってもよい。   Next, as shown in FIG. 3C, with the solder connection sheet 2 disposed between the interposer substrate 14 and the circuit substrate 20, these substrates 14 and 20 are heated and pressurized in the same manner as described above. . Thereby, the connecting terminal 18 and the connecting terminal 22 shown in FIG. 3 are connected with sufficient bonding strength by the solder member 8B (see FIG. 4) which is deformed by heating and pressurizing the solder member 8. It should be noted that other electronic components 24 may be mounted on the circuit board 20.

本実施形態では、シート基材4が織布または不織布で構成してあることから、耐熱性が向上し、貫通孔6の内部に埋設したハンダ部材8Aを溶融させてボール形状のハンダ部材8に容易に成形することができる。予めボール状に成形されたハンダ部材8を貫通孔6の内部に保持させることで、安定したハンダ量の制御が可能であり、接続信頼性が向上する。   In this embodiment, since the sheet base material 4 is composed of a woven fabric or a non-woven fabric, the heat resistance is improved, and the solder member 8A embedded in the through hole 6 is melted to form a ball-shaped solder member 8. It can be easily molded. By holding the solder member 8 formed in a ball shape in advance in the through hole 6, it is possible to control the amount of solder stably, and the connection reliability is improved.

また、予めボール状に成形されたハンダ部材8を貫通孔6の内部に保持させることで、貫通孔6の外周縁からはハンダ部材8の表面が遠ざかり、隣接するハンダ部材同士のブリッジを防止することができる。しかも貫通孔6の中心位置では、はんだ部材8の表面がシート基材の表裏面よりも外側の空間へ向かって(電子部品と回路基板を接続する方向に)最も突出する形状となることから、ハンダ部材8を介して、基板14の接続用端子16にICチップ10の各電極端子12を確実に接続させることができる。   Further, by holding the solder member 8 formed in a ball shape in advance in the through hole 6, the surface of the solder member 8 moves away from the outer peripheral edge of the through hole 6, thereby preventing bridging between adjacent solder members. be able to. And in the center position of the through-hole 6, since the surface of the solder member 8 becomes the shape which protrudes most toward the space outside the front and back surfaces of the sheet base material (in the direction connecting the electronic component and the circuit board), Each electrode terminal 12 of the IC chip 10 can be reliably connected to the connection terminal 16 of the substrate 14 via the solder member 8.

すなわち、本実施形態によれば、ICチップ10に形成された電極端子12の相互間距離が狭い場合であっても、ハンダ接続シート2が間に介在された基板14とICチップ10とを相互に加圧および加熱するのみで、隣接する電極端子12の間を短絡させることなく、しかも容易且つ確実に、基板14の接続用端子16にICチップ10の各電極端子12を接続させることができる。   That is, according to the present embodiment, even when the distance between the electrode terminals 12 formed on the IC chip 10 is narrow, the substrate 14 and the IC chip 10 with the solder connection sheet 2 interposed therebetween are mutually connected. Each electrode terminal 12 of the IC chip 10 can be connected to the connection terminal 16 of the substrate 14 easily and reliably without short-circuiting between the adjacent electrode terminals 12 only by pressurizing and heating. .

また、シート基材4が織布または不織布で構成してあることから加圧変形性に優れている。そのため、ハンダ接続シート2が間に介在された基板14とICチップ10(基板14と基板20との間も同様、以下同じ)とを相互に加圧および加熱する際には、一定以上の加圧力では加圧力にはよらずに、均一に圧縮変形させることが可能であり、しかも加圧後の厚みが一定になる。   Moreover, since the sheet | seat base material 4 is comprised with the woven fabric or the nonwoven fabric, it is excellent in the pressure deformation property. For this reason, when the substrate 14 and the IC chip 10 (and the same applies to the substrate 14 and the substrate 20) with the solder connection sheet 2 interposed therebetween are mutually pressurized and heated, a certain amount or more is applied. The pressure can be uniformly compressed and deformed without depending on the applied pressure, and the thickness after pressurization becomes constant.

このため、加圧後の一定厚みで、シート基材2が基板14とICチップ10の双方に対して密着する。そのため、基板14とICチップ10との接続後の位置精度が向上すると共に、耐熱衝撃性も向上し、接続信頼性が向上する。また、シート基材4に形成する貫通孔6の孔径やパターンを変更するのみで、様々なサイズのハンダバンプ形状に対応することも容易である。   For this reason, the sheet base 2 is in close contact with both the substrate 14 and the IC chip 10 with a constant thickness after pressing. Therefore, the positional accuracy after the connection between the substrate 14 and the IC chip 10 is improved, the thermal shock resistance is also improved, and the connection reliability is improved. Moreover, it is easy to cope with solder bump shapes of various sizes by simply changing the hole diameter and pattern of the through holes 6 formed in the sheet base material 4.

特に、本実施形態では、シート基材4を不織布で構成することにより、縦横で熱膨張係数の差が少なく、ハンダ接続シート2を介在させてICチップ10と基板14とを加熱加圧する際に、ハンダ部材8の位置ズレが少ない。また、不織布で構成することにより、織布に比較して、密度自由度、潰れ性、生産性、貫通孔加工性などに優れている。   In particular, in the present embodiment, the sheet base material 4 is composed of a nonwoven fabric, so that there is little difference in thermal expansion coefficient in the vertical and horizontal directions, and when the IC chip 10 and the substrate 14 are heated and pressurized with the solder connection sheet 2 interposed therebetween. There is little misalignment of the solder member 8. Moreover, by comprising with a nonwoven fabric, it is excellent in a density freedom degree, crushability, productivity, through-hole processability, etc. compared with a woven fabric.

また本実施形態では、シート基材4には、接着剤が含浸してある。シート基材4に接着剤を含浸させることで、このシート基材4を有するハンダ接続シート4によれば、基板14とICチップ10との密着性を向上させる。そのため、基板14とICチップ10との接続後の耐熱衝撃性も向上し、接続信頼性がさらに向上する。また、シート基材4に接着剤を含浸させることで、シート基材4の貫通孔6にハンダ部材8を保持し易くなる。   In the present embodiment, the sheet base material 4 is impregnated with an adhesive. By impregnating the sheet base material 4 with an adhesive, the solder connection sheet 4 having the sheet base material 4 improves the adhesion between the substrate 14 and the IC chip 10. Therefore, the thermal shock resistance after the connection between the substrate 14 and the IC chip 10 is improved, and the connection reliability is further improved. Further, by impregnating the sheet base material 4 with the adhesive, the solder member 8 can be easily held in the through hole 6 of the sheet base material 4.

なお、本実施形態の製法では、図2(D)に示すように、ボール形状のハンダ部材8を形成した後に、図2(E)に示すように、シート基材4に接着剤を含浸させる。順序が逆であると、ボール形状のハンダ部材8を作製する際の熱により、接着剤が飛んでしまうからである。また、半硬化樹脂の含浸は、接着剤と同様に、ボール形状のハンダ部材8を形成した後が好ましい。順序が逆であると、ボール形状のハンダ部材8を作製する際の熱により、半硬化樹脂が硬化してしまい、使用時におけるハンダ接続シートの加圧圧縮特性が低下するおそれがある。   In the manufacturing method of the present embodiment, as shown in FIG. 2D, after the ball-shaped solder member 8 is formed, the sheet base material 4 is impregnated with an adhesive as shown in FIG. . This is because if the order is reversed, the adhesive will fly due to the heat generated when the ball-shaped solder member 8 is produced. Further, the impregnation with the semi-cured resin is preferably performed after the ball-shaped solder member 8 is formed, like the adhesive. If the order is reversed, the semi-cured resin is cured by heat when the ball-shaped solder member 8 is produced, and the pressure-compression characteristics of the solder connection sheet during use may be deteriorated.

本実施形態においては、図1に示すシート基材4の表面4aおよび/または裏面4b、好ましくは裏面4bには、使用に際して剥離可能な剥離シート30(図5A参照)が積層してあってもよい。剥離シート30が、貫通孔6に保持してあるハンダ部材8の落下を抑制して確実にハンダ部材8を貫通孔6の内部に保持させることができる。   In this embodiment, even if the peeling sheet 30 (refer FIG. 5A) which can be peeled in use is laminated | stacked on the surface 4a and / or the back surface 4b of the sheet | seat base material 4 shown in FIG. 1, Preferably the back surface 4b. Good. The release sheet 30 can suppress the fall of the solder member 8 held in the through hole 6 and reliably hold the solder member 8 inside the through hole 6.

剥離シート30におけるシート基材4との剥離面には、粘着層32(図5参照)が形成してあってもよい。粘着層32を形成することで、貫通孔6に保持してあるハンダ部材8の落下を抑制して確実にハンダ部材8を貫通孔6の内部に保持させることができる。   An adhesive layer 32 (see FIG. 5) may be formed on the release surface of the release sheet 30 from the sheet substrate 4. By forming the adhesive layer 32, the solder member 8 held in the through hole 6 can be prevented from dropping and the solder member 8 can be reliably held inside the through hole 6.

ハンダ接続シート2は、剥離シート30がシート基材4から剥離された後に、図3(A)〜図3(C)に示すICチップ10と基板14との間、または基板14および基板20の間に配置されて加熱加圧される。
第2実施形態
The solder connection sheet 2 is formed between the IC chip 10 and the substrate 14 shown in FIGS. 3A to 3C or between the substrate 14 and the substrate 20 after the release sheet 30 is peeled from the sheet base material 4. It is placed between and heated and pressurized.
Second embodiment

図5(A)または図5(B)に示すように、本発明の他の実施形態に係るハンダ接続シート2aまたは2bは、第1実施形態に係るハンダ接続シート2の変形例を示し、共通する部材には共通する符号を付し、共通する説明は一部省略し、相違点について特に説明する。   As shown in FIG. 5 (A) or FIG. 5 (B), a solder connection sheet 2a or 2b according to another embodiment of the present invention is a common modification of the solder connection sheet 2 according to the first embodiment. Common members are denoted by common reference numerals, common descriptions are partially omitted, and differences will be particularly described.

図5(A)に示すハンダ接続シート2aでは、支持シート4に形成してある貫通孔6の内部には、ボール状のハンダ部材8が配置してあり、しかも接着剤7が充填してある。さらに、支持シート4の裏面には、粘着層32を介して剥離シート30が剥離可能に粘着してある。   In the solder connection sheet 2a shown in FIG. 5A, a ball-shaped solder member 8 is disposed inside the through hole 6 formed in the support sheet 4, and the adhesive 7 is filled. . Furthermore, the release sheet 30 is adhered to the back surface of the support sheet 4 through the adhesive layer 32 so as to be peeled off.

図5(B)に示すハンダ接続シート2bでは、支持シート4に形成してある貫通孔6の内部には、ボール状のハンダ部材8が配置してあり、しかも接着剤7が充填してある。このハンダ接続シート2bでは、図5(A)に示すハンダ接続シート2aと異なり、剥離シート30が装着されていない。   In the solder connection sheet 2b shown in FIG. 5 (B), a ball-shaped solder member 8 is disposed inside the through hole 6 formed in the support sheet 4, and the adhesive 7 is filled. . In this solder connection sheet 2b, unlike the solder connection sheet 2a shown in FIG. 5A, the release sheet 30 is not mounted.

図5(A)に示すハンダ接続シート2aおよび図5(B)に示すハンダ接続シート2bの製造方法の一例を、図6および図7に基づき説明する。   An example of a method for manufacturing the solder connection sheet 2a shown in FIG. 5A and the solder connection sheet 2b shown in FIG. 5B will be described with reference to FIGS.

図6(A)に示すように、まず、接着剤や半硬化樹脂などが含浸されていないシート基材4Aを準備する。その後、図6(B)に示すように、レーザ加工などにより、シート基材4Aに所定パターンで、シート基材4Aの表面4aから裏面4bに向けて内径が小さくなるテーパ状の貫通孔6を形成する。   As shown in FIG. 6A, first, a sheet substrate 4A that is not impregnated with an adhesive, a semi-cured resin, or the like is prepared. Thereafter, as shown in FIG. 6 (B), a tapered through hole 6 having a predetermined pattern on the sheet base material 4A and having a smaller inner diameter from the front surface 4a to the back surface 4b of the sheet base material 4A is formed by laser processing or the like. Form.

その後に、図6(C)に示すように、粘着層32を介して剥離シート30を、シート基材4aの裏面4bに剥離可能に粘着させる。次に、図6(D)に示すように、各貫通孔6に、流動状態のハンダ8Aを充填する。流動状態のハンダ8Aの充填は、たとえば印刷などの方法により行う。充填に際しては、ハンダ8Aが貫通孔6からはみ出ないように面一となるように充填しても良い。   Thereafter, as shown in FIG. 6C, the release sheet 30 is detachably attached to the back surface 4b of the sheet substrate 4a via the adhesive layer 32. Next, as shown in FIG. 6D, each through-hole 6 is filled with solder 8A in a fluid state. The solder 8A in a fluid state is filled by a method such as printing. When filling, the solder 8A may be filled so as not to protrude from the through hole 6.

シート基材4Aの裏面4bに剥離シート30を装着した状態で、ハンダ8Aを貫通孔6に充填した場合には、充填されたハンダ8Aは、粘着層32および剥離シート30があるために、裏面4bから流れ出るおそれがない。剥離シート30は、シート基材4Aを補強する機能も有する。   In the state where the release sheet 30 is mounted on the back surface 4b of the sheet base 4A, when the solder 8A is filled in the through-hole 6, the filled solder 8A has the adhesive layer 32 and the release sheet 30. There is no fear of flowing out of 4b. The release sheet 30 also has a function of reinforcing the sheet base 4A.

その後に、図7(A)に示すように、シート基材4Aおよび剥離シート30と共にハンダ8Aを、ハンダ8Aの溶融温度以上に加熱して冷却すれば、貫通孔6の内部で、ボール状のハンダ部材8が得られ、貫通孔6に保持される。その後に、図7(B)に示すように、シート基材4Aに接着剤および/または半硬化樹脂を含浸させると共に、貫通孔6に接着剤を充填すれば、図5(A)に示すハンダ接続シート2aが得られる。   Thereafter, as shown in FIG. 7 (A), if the solder 8A together with the sheet base 4A and the release sheet 30 is heated and cooled to a temperature equal to or higher than the melting temperature of the solder 8A, a ball-like shape is formed inside the through hole 6. A solder member 8 is obtained and held in the through hole 6. Thereafter, as shown in FIG. 7B, if the sheet base material 4A is impregnated with an adhesive and / or a semi-cured resin, and the adhesive is filled in the through holes 6, the solder shown in FIG. A connection sheet 2a is obtained.

また、その後に、図7(C)に示すように、シート基材4から剥離シート30を除去すれば、図5(B)に示すハンダ接続シート2bが得られる。図7(C)に示すように、シート基材4から剥離シート30を除去した後には、シート基材4の裏面4bには、粘着層32が残存していても良い。   Moreover, if the peeling sheet 30 is removed from the sheet | seat base material 4 as shown in FIG.7 (C) after that, the soldering connection sheet | seat 2b shown in FIG.5 (B) will be obtained. As illustrated in FIG. 7C, the adhesive layer 32 may remain on the back surface 4 b of the sheet base material 4 after the release sheet 30 is removed from the sheet base material 4.

本実施形態では、接着剤7が、貫通孔6の内部にも充填してある。このように構成することで、ボール形状のハンダ部材8を貫通孔6の内部に保持しやすくなる。さらに接着剤7にフラックス機能を持たせることで、ハンダ部材8による端子間の接合が良好なものとなる。また本実施形態では、ボール状のハンダ部材8の外径d0(図1参照)は、貫通孔6の最小内径d2よりも小さくても良い。ハンダ部材8が接着剤7により貫通孔6の内部に保持されるからである。   In the present embodiment, the adhesive 7 is also filled in the through hole 6. With this configuration, the ball-shaped solder member 8 can be easily held inside the through hole 6. Further, by providing the adhesive 7 with a flux function, the bonding between the terminals by the solder member 8 becomes good. In the present embodiment, the outer diameter d0 (see FIG. 1) of the ball-shaped solder member 8 may be smaller than the minimum inner diameter d2 of the through hole 6. This is because the solder member 8 is held inside the through hole 6 by the adhesive 7.

なお、本実施形態の製法では、図7(A)に示すように、ボール形状のハンダ部材8を形成した後に、図7(B)に示すように、接着剤および/または半硬化樹脂をシート基材4に含浸させると共に、接着剤7を貫通孔6に充填させる。その理由は、前述した第1実施形態と同様であり、ボール形状のハンダ部材8を形成する際に、接着剤が除去されることを防止すると共に、半硬化樹脂が硬化することを防止するためである。
第3実施形態
In the manufacturing method of the present embodiment, after forming the ball-shaped solder member 8 as shown in FIG. 7 (A), an adhesive and / or a semi-cured resin is applied to the sheet as shown in FIG. The substrate 4 is impregnated and the adhesive 7 is filled in the through holes 6. The reason is the same as that of the first embodiment described above, in order to prevent the adhesive from being removed and to prevent the semi-cured resin from being cured when the ball-shaped solder member 8 is formed. It is.
Third embodiment

図8に示すように、本発明の他の実施形態に係るハンダ接続シート2cは、第1実施形態に係るハンダ接続シート2の変形例を示し、共通する部材には共通する符号を付し、共通する説明は一部省略し、相違点について特に説明する。   As shown in FIG. 8, a solder connection sheet 2c according to another embodiment of the present invention shows a modification of the solder connection sheet 2 according to the first embodiment, and common members are denoted by common reference numerals, Some of the common explanations are omitted, and the differences will be particularly explained.

図8に示すハンダ接続シート2cでは、各貫通孔6に保持してあるハンダ部材8Cは、溶融・冷却処理されてボール形状になる前のハンダ部材であり、ペースト状あるいは固化状態のいずれでもよく、各貫通孔6の内部体積よりも小さい体積となるように充填してある。たとえば各貫通孔6の内部体積をV1として、各ハンダ部材8Cの体積をV2とした場合には、V2/V1は、好ましくは0.95〜0.5、さらに好ましくは0.9〜0.6である。   In the solder connection sheet 2c shown in FIG. 8, the solder member 8C held in each through-hole 6 is a solder member before being formed into a ball shape by being melted and cooled, and may be in a paste form or a solidified state. The inner volume of each through hole 6 is filled to be smaller. For example, when the internal volume of each through hole 6 is V1, and the volume of each solder member 8C is V2, V2 / V1 is preferably 0.95 to 0.5, and more preferably 0.9 to 0.00. 6.

V2/V1の比が大きすぎると、このハンダ接続シート2cを、図3(A)〜図3(C)に示すICチップ10と基板14との間、あるいは基板14と基板20との間に介在させて使用する際に、シート基材4の圧縮変形と共にハンダ部材8Cが貫通孔6からはみ出し、隣接する貫通孔6のハンダ部材8Cとブリッジしてしまうおそれがある。また、V2/V1の比が小さすぎると、図3(A)〜図3(C)に示す端子12と端子16との間、あるいは端子18と端子22との間の接続が不十分になるおそれがあり好ましくない。   If the ratio of V2 / V1 is too large, the solder connection sheet 2c is moved between the IC chip 10 and the substrate 14 or between the substrate 14 and the substrate 20 shown in FIGS. 3 (A) to 3 (C). When intervening and using, the solder member 8C protrudes from the through hole 6 together with the compression deformation of the sheet base material 4 and may bridge with the solder member 8C of the adjacent through hole 6. If the ratio of V2 / V1 is too small, the connection between the terminal 12 and the terminal 16 or between the terminal 18 and the terminal 22 shown in FIGS. 3 (A) to 3 (C) becomes insufficient. There is a fear that it is not preferable.

次に、図8に示すハンダ接続シート2cの製造方法の一例を、図9(A)〜図9(D)に基づき説明する。   Next, an example of the manufacturing method of the solder connection sheet 2c shown in FIG. 8 is demonstrated based on FIG. 9 (A)-FIG. 9 (D).

図9(A)に示すように、まず、接着剤や半硬化樹脂などが含浸されていないシート基材4Aを準備する。その後、図9(B)に示すように、シート基材4Aに接着剤および/または半硬化樹脂を含浸させる。その後に、図9(C)に示すように、レーザ加工などにより、接着剤および/または半硬化樹脂を含浸させたシート基材4に、所定パターンで、シート基材4Aの表面4aから裏面4bに向けて内径が小さくなるテーパ状の貫通孔6を形成する。   As shown in FIG. 9A, first, a sheet substrate 4A that is not impregnated with an adhesive, a semi-cured resin, or the like is prepared. Thereafter, as shown in FIG. 9B, the sheet base material 4A is impregnated with an adhesive and / or a semi-cured resin. Thereafter, as shown in FIG. 9C, the sheet base material 4 impregnated with an adhesive and / or semi-cured resin by laser processing or the like is formed in a predetermined pattern from the front surface 4a to the rear surface 4b. A tapered through-hole 6 with a smaller inner diameter is formed.

その後に、図9(D)に示すように、各貫通孔6に、流動状態のハンダ部材8Cを充填することで、図8に示すハンダ接続シート2Cが得られる。流動状態のハンダ部材8Cの充填は、たとえば印刷、ディスペンサでの塗布などの方法により行う。充填に際しては、ハンダ部材8Cの体積が貫通孔6の内部体積よりも小さくなるように、スクリーン印刷などの充填方法が好ましい。   Thereafter, as shown in FIG. 9D, the solder connection sheet 2C shown in FIG. 8 is obtained by filling each through-hole 6 with a solder member 8C in a fluid state. The filling of the solder member 8C in a fluid state is performed by a method such as printing or application with a dispenser. At the time of filling, a filling method such as screen printing is preferable so that the volume of the solder member 8C is smaller than the internal volume of the through hole 6.

本実施形態のハンダ接続シート2cでは、貫通孔6の内部には、貫通孔6の内部体積よりも小さい体積のハンダ部材8Cが保持してある。このため、安定したハンダ量の制御が可能であり、接続信頼性が向上する。また、ハンダ接続シート2cが間に介在された基板14とICチップ10または基板20とを相互に加圧および加熱する際に、ハンダ接続シート2cの厚みが減少した後に、ハンダ部材8Cが、端子12と端子16(または端子18と端子22)とに接触して溶融・合金化して両者を確実に接続し、しかも、隣接する電極端子間を短絡させることがない。   In the solder connection sheet 2 c of the present embodiment, a solder member 8 </ b> C having a volume smaller than the internal volume of the through hole 6 is held inside the through hole 6. Therefore, stable solder amount control is possible, and connection reliability is improved. Further, when the substrate 14 and the IC chip 10 or the substrate 20 with the solder connection sheet 2c interposed therebetween are pressed and heated, the solder member 8C is connected to the terminal after the thickness of the solder connection sheet 2c is reduced. 12 and the terminal 16 (or the terminal 18 and the terminal 22) are brought into contact with each other to be melted and alloyed so that they are securely connected, and the adjacent electrode terminals are not short-circuited.

したがって、本実施形態では、電極端子間距離が狭い場合であっても、ハンダ接続シート2cが間に介在された基板14とICチップ10または基板20とを相互に加圧および加熱するのみで、隣接する電極端子間を短絡させることなく、しかも容易且つ確実に、回路基板14,20の接続用端子16,18,22にICチップ12の各電極端子12を接続させることができる。また、シート基材4に形成する貫通孔6の孔径やパターンを変更するのみで、様々なサイズのハンダバンプ形状に対応することも容易である。   Therefore, in the present embodiment, even when the distance between the electrode terminals is narrow, only the substrate 14 and the IC chip 10 or the substrate 20 with the solder connection sheet 2c interposed therebetween are pressed and heated to each other. Each electrode terminal 12 of the IC chip 12 can be connected to the connection terminals 16, 18, 22 of the circuit boards 14, 20 easily and reliably without short-circuiting between adjacent electrode terminals. Moreover, it is easy to cope with solder bump shapes of various sizes by simply changing the hole diameter and pattern of the through holes 6 formed in the sheet base material 4.

本実施形態では、貫通孔6にハンダ部材8Cを充填する前に、シート基材4に接着剤および/または半硬化樹脂を含浸させるので、シート基材4に均一に接着剤および/または半硬化樹脂を含浸させることが容易である。さらに、不織布などで構成してあるシート基材4に接着剤および/または半硬化樹脂を含浸させるので、シート基材4が補強され、その後に、レーザ加工などで貫通孔6を高精度で形成することが容易になる。   In this embodiment, the sheet base material 4 is impregnated with an adhesive and / or a semi-cured resin before the solder member 8C is filled in the through-hole 6, so that the sheet base material 4 is uniformly and / or semi-cured. It is easy to impregnate the resin. Further, since the sheet base 4 made of nonwoven fabric is impregnated with the adhesive and / or the semi-cured resin, the sheet base 4 is reinforced, and then the through holes 6 are formed with high accuracy by laser processing or the like. Easy to do.

なお、本実施形態では、ハンダ部材8Cを貫通孔6に充填する前に、図9(C)に示すシート基材4の裏面4bには、図5(A)に示す粘着層32を介して剥離シート30を剥離可能に粘着しても良い。   In this embodiment, before filling the through hole 6 with the solder member 8C, the back surface 4b of the sheet base material 4 shown in FIG. 9C is provided with the adhesive layer 32 shown in FIG. The release sheet 30 may be adhered to be peelable.

シート基材4の裏面4bに剥離シート30を装着した状態で、ハンダ8Aを貫通孔6に充填した場合には、充填されたハンダ8Aは、粘着層32および剥離シート30があるために、裏面4bから流れ出るおそれがない。剥離シート30は、シート基材4Aを補強する機能も有する。本実施形態では、ハンダ部材8Cには、フラックスの機能を有する成分を含んでいることが好ましい。   When the through-hole 6 is filled with the solder 8A with the release sheet 30 mounted on the back surface 4b of the sheet base material 4, the filled solder 8A has the adhesive layer 32 and the release sheet 30. There is no fear of flowing out of 4b. The release sheet 30 also has a function of reinforcing the sheet base 4A. In the present embodiment, the solder member 8C preferably contains a component having a flux function.

なお、本発明は、上述した実施形態に限定されるものではなく、本発明の範囲内で種々に改変することができる。   The present invention is not limited to the above-described embodiment, and can be variously modified within the scope of the present invention.

たとえば、シート基材4Aに含浸させる樹脂としては、半硬化樹脂に限らず、その他の樹脂を含浸させても良い。また、上述した第3実施形態においては、接着剤または樹脂を含浸させたシート基材4に、貫通孔6を形成したが、これらを含浸させる前のシート基材4Aに貫通孔6を形成しても良い。これらを含浸させる前のシート基材4Aにレーザ加工により貫通孔6を形成することで、レーザ加工による熱が樹脂や接着剤に悪影響を与えるおそれがない。   For example, the resin impregnated in the sheet base material 4A is not limited to the semi-cured resin, but may be impregnated with other resins. In the third embodiment described above, the through holes 6 are formed in the sheet base material 4 impregnated with the adhesive or the resin. However, the through holes 6 are formed in the sheet base material 4A before the impregnation. May be. By forming the through holes 6 by laser processing on the sheet base material 4A before impregnating them, there is no possibility that the heat by the laser processing adversely affects the resin and the adhesive.

2,2a,2b,2c… ハンダ接続シート
4,4A… シート基材
4a… 表面
4b… 裏面
6… 貫通孔
7… 接着剤
8,8A,8B,8C… ハンダ部材
10… ICチップ
12… 電極端子
14… インターポーザ基板
16,18,22… 接続用端子
20… 回路基板
2, 2a, 2b, 2c ... Solder connection sheet 4, 4A ... Sheet substrate 4a ... Front surface 4b ... Back surface 6 ... Through-hole 7 ... Adhesive 8, 8A, 8B, 8C ... Solder member 10 ... IC chip 12 ... Electrode terminal 14 ... Interposer board 16, 18, 22 ... Connection terminal 20 ... Circuit board

Claims (10)

織布または不織布で構成してあり、表裏面を貫通する複数の貫通孔が所定パターンで形成してあるシート基材と、
前記貫通孔の内部に保持され、予めボール状に成形されたハンダ部材と、を有するハンダ接続シートであって、
前記貫通孔の内部体積をV1、ボール形状になる前の前記ハンダ部材の体積をV2とした場合に、V2/V1が0.95〜0.5であることを特徴とするハンダ接続シート。
A sheet base material that is composed of a woven fabric or a non-woven fabric, and in which a plurality of through-holes penetrating the front and back surfaces are formed in a predetermined pattern;
A solder connection sheet that is held inside the through-hole and has a solder member molded in advance in a ball shape,
A solder connection sheet, wherein V2 / V1 is 0.95 to 0.5, where V1 is an internal volume of the through-hole and V2 is a volume of the solder member before becoming a ball shape .
前記シート基材には、接着剤が含浸してある請求項1に記載のハンダ接続シート。   The solder connection sheet according to claim 1, wherein the sheet base material is impregnated with an adhesive. 前記接着剤は、前記貫通孔の内部にも充填してあり、前記貫通孔に充填してある接着剤が、前記ハンダ部材を前記貫通孔の内部に保持してある請求項1または2に記載のハンダ接続シート。   3. The adhesive according to claim 1, wherein the adhesive is also filled in the through hole, and the adhesive filled in the through hole holds the solder member in the through hole. Solder connection sheet. 前記接着剤は、フラックスの機能を有する成分を含んでいる請求項2または3に記載のハンダ接続シート。   The solder connection sheet according to claim 2, wherein the adhesive contains a component having a flux function. 前記シート基材には、半硬化樹脂が含浸してある請求項1〜4のいずれかに記載のハンダ接続シート。   The solder connection sheet according to claim 1, wherein the sheet base material is impregnated with a semi-cured resin. 前記シート基材が不織布で構成してある請求項1〜5のいずれかに記載のハンダ接続シート。   The solder connection sheet according to any one of claims 1 to 5, wherein the sheet base material is composed of a nonwoven fabric. 前記シート基材の表面および/または裏面には、使用に際して剥離可能な剥離シートが積層してある請求項1〜6のいずれかに記載のハンダ接続シート。   The solder connection sheet according to any one of claims 1 to 6, wherein a release sheet that can be peeled off in use is laminated on the front surface and / or the back surface of the sheet base material. 前記剥離シートにおける前記シート基材との剥離面には、粘着層が形成してある請求項7に記載のハンダ接続シート。   The solder connection sheet according to claim 7, wherein an adhesive layer is formed on a release surface of the release sheet from the sheet base material. 請求項1〜6のいずれかに係るハンダ接続シートを、所定パターンの接続用端子が形成してある回路基板の表面と、電子部品の端子形成面との間に配置する工程と、
前記ハンダ接続シートが間に介在された前記基板と電子部品とを、相互に加圧および加熱する工程とを有する電子部品の実装方法。
Arranging the solder connection sheet according to any one of claims 1 to 6 between the surface of the circuit board on which the connection terminals of a predetermined pattern are formed and the terminal formation surface of the electronic component;
A method for mounting an electronic component, comprising the step of mutually pressing and heating the substrate and the electronic component with the solder connection sheet interposed therebetween.
前記ボール状に成形されたハンダ部材は、前記貫通孔の内部に流動状態のハンダを充填した後に前記ハンダの溶融温度以上に加熱して冷却して得られることを特徴とする請求項1〜8のいずれかに記載のハンダ接続シート。   9. The solder member formed into a ball shape is obtained by filling the through hole with solder in a fluid state and then heating and cooling to a temperature higher than the melting temperature of the solder. The solder connection sheet according to any one of the above.
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