JP5695902B2 - 近接場ａｆｍ検出を用いたウェハスケールの非破壊的な表面下超音波顕微鏡法 - Google Patents

近接場ａｆｍ検出を用いたウェハスケールの非破壊的な表面下超音波顕微鏡法 Download PDF

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JP5695902B2
JP5695902B2 JP2010507726A JP2010507726A JP5695902B2 JP 5695902 B2 JP5695902 B2 JP 5695902B2 JP 2010507726 A JP2010507726 A JP 2010507726A JP 2010507726 A JP2010507726 A JP 2010507726A JP 5695902 B2 JP5695902 B2 JP 5695902B2
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sample
probe
ultrasound
ultrasonic
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JP2010527011A (ja
JP2010527011A5 (enExample
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ス、シャンミン
プレイター、クレイグ
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Bruker Nano Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode

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  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Immunology (AREA)
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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP2010507726A 2007-05-10 2008-05-12 近接場ａｆｍ検出を用いたウェハスケールの非破壊的な表面下超音波顕微鏡法 Active JP5695902B2 (ja)

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US91730107P 2007-05-10 2007-05-10
US60/917,301 2007-05-10
PCT/US2008/063462 WO2008141301A1 (en) 2007-05-10 2008-05-12 Non-destructive wafer-scale sub-surface ultrasonic microscopy employing near field afm detection

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JP2010527011A JP2010527011A (ja) 2010-08-05
JP2010527011A5 JP2010527011A5 (enExample) 2011-06-30
JP5695902B2 true JP5695902B2 (ja) 2015-04-08

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US (1) US8322220B2 (enExample)
EP (1) EP2150973B1 (enExample)
JP (1) JP5695902B2 (enExample)
WO (1) WO2008141301A1 (enExample)

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EP3291286A1 (en) * 2016-08-31 2018-03-07 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method of and system for performing defect detection on or characterization of a layer of a semiconductor element or semimanufactured semiconductor element
EP3290929A1 (en) * 2016-08-31 2018-03-07 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method for measuring damage of a substrate caused by an electron beam
US11815347B2 (en) * 2016-09-28 2023-11-14 Kla-Tencor Corporation Optical near-field metrology
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EP3396390A1 (en) 2017-04-24 2018-10-31 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Subsurface atomic force microscopy with guided ultrasound waves
JP6480979B2 (ja) 2017-05-10 2019-03-13 ファナック株式会社 計測装置
EP3422104A1 (en) 2017-06-29 2019-01-02 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method, atomic force microscopy system and computer program product
EP3480603A1 (en) * 2017-11-03 2019-05-08 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method of performing atomic force microscopy
CN111527438B (zh) 2017-11-30 2023-02-21 徕卡生物系统成像股份有限公司 冲击重新扫描系统
EP3644067A1 (en) * 2018-10-25 2020-04-29 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Frequency tracking for subsurface atomic force microscopy
EP3742178A1 (en) 2019-05-21 2020-11-25 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Heterodyne scanning probe microscopy method and scanning probe microscopy system
EP3745125A1 (en) 2019-05-27 2020-12-02 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Ultrasound sub-surface probe microscopy device and corresponding method
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
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Publication number Publication date
US20080276695A1 (en) 2008-11-13
JP2010527011A (ja) 2010-08-05
EP2150973B1 (en) 2020-05-06
WO2008141301A1 (en) 2008-11-20
EP2150973A4 (en) 2012-02-08
EP2150973A1 (en) 2010-02-10
US8322220B2 (en) 2012-12-04

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