JP5690243B2 - 透過型電子顕微鏡用の試料冷却ホルダー - Google Patents
透過型電子顕微鏡用の試料冷却ホルダー Download PDFInfo
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- JP5690243B2 JP5690243B2 JP2011171688A JP2011171688A JP5690243B2 JP 5690243 B2 JP5690243 B2 JP 5690243B2 JP 2011171688 A JP2011171688 A JP 2011171688A JP 2011171688 A JP2011171688 A JP 2011171688A JP 5690243 B2 JP5690243 B2 JP 5690243B2
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- Prior art keywords
- sample
- heat conducting
- electron microscope
- conducting rod
- transmission electron
- Prior art date
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- 238000001073 sample cooling Methods 0.000 title claims description 42
- 230000005540 biological transmission Effects 0.000 title claims description 27
- 239000003507 refrigerant Substances 0.000 claims description 29
- 238000001816 cooling Methods 0.000 claims description 26
- 239000004020 conductor Substances 0.000 claims description 13
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000000835 fiber Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 85
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012520 frozen sample Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- CYRMSUTZVYGINF-UHFFFAOYSA-N trichlorofluoromethane Chemical compound FC(Cl)(Cl)Cl CYRMSUTZVYGINF-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Description
1a 内壁
3 熱良導性材料層
6 パイプ部
7 熱伝導棒
8 冷媒槽
9 冷媒
11 試料
12 窓部
13 試料装着部
14 カートリッジ
15 弾性部材
17 駆動部
18 耐圧性容器
31 試料装着部
32 スライドキャップ
32a 窓部
32b スプリング
34 止具
35 試料
36 パイプ部
37 熱伝導棒
38 冷媒槽
Claims (4)
- 冷媒槽と、
該冷媒槽を貫通し、内壁が円筒状の空洞を有する冷却部と、
該冷却部の空洞内に、空洞の内壁との間に熱良導性材料層を挟んで移動自在に嵌合する熱伝導棒と、
該熱伝導棒を内部に収容するパイプ部と
を備え、
前記熱伝導棒は、先端に、試料を装着する試料装着部を有する透過型電子顕微鏡用の試料冷却ホルダー。 - 前記熱良導性材料層は、銅とアルミニウムのうち少なくとも1種を含む金属製の繊維層である請求項1に記載の透過型電子顕微鏡用の試料冷却ホルダー。
- 前記パイプ部は、先端に電子線が通過する窓部を備え、試料冷却ホルダーにおける窓部の位置が固定され、
前記熱伝導棒をパイプ部内で長手方向に前進または後進することにより、
試料を観察するときは、パイプ部の前記窓部を通過して電子線が試料に照射するように前記熱伝導棒を配置し、該熱伝導棒はパイプ部内で自在に回転させることができ、
試料を観察しないときは、パイプ部により試料を外気から遮断するように前記熱伝導棒を配置する
請求項1または2に記載の透過型電子顕微鏡用の試料冷却ホルダー。 - 試料装着部を取り付けるカートリッジを備え、試料装着部を取り付けたカートリッジを冷却した状態で熱伝導棒に装着する請求項1〜3のいずれかに記載の透過型電子顕微鏡用の試料冷却ホルダー。
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---|---|---|---|
JP2011171688A JP5690243B2 (ja) | 2011-08-05 | 2011-08-05 | 透過型電子顕微鏡用の試料冷却ホルダー |
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JP2011171688A JP5690243B2 (ja) | 2011-08-05 | 2011-08-05 | 透過型電子顕微鏡用の試料冷却ホルダー |
Publications (2)
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---|---|
JP2013037841A JP2013037841A (ja) | 2013-02-21 |
JP5690243B2 true JP5690243B2 (ja) | 2015-03-25 |
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JP2011171688A Active JP5690243B2 (ja) | 2011-08-05 | 2011-08-05 | 透過型電子顕微鏡用の試料冷却ホルダー |
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JP (1) | JP5690243B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8440982B1 (en) * | 2011-12-19 | 2013-05-14 | Korea Basic Science Institute | Cryo transfer holder for transmission electron microscope |
JP6173879B2 (ja) | 2013-10-28 | 2017-08-02 | 日本電子株式会社 | 荷電粒子線装置、および試料容器 |
KR101529145B1 (ko) * | 2014-08-05 | 2015-06-16 | 한국기초과학지원연구원 | 광학현미경과 전자현미경의 연계형 이미징 검출을 위해 초저온 전자현미경 시편장착 홀더를 포함하는 워크 스테이션과 이를 포함한 연계형 이미징 검출장치 및 이를 이용한 이미징 검출 방법과 이미징 시스템 |
EP3032564A1 (en) * | 2014-12-11 | 2016-06-15 | FEI Company | Improved cryogenic specimen holder for a charged particle microscope |
JP6279692B1 (ja) * | 2016-11-07 | 2018-02-14 | 株式会社メルビル | 試料ホルダー |
CN113335767A (zh) * | 2020-02-18 | 2021-09-03 | 中国科学院物理研究所 | 一种低温容器 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3123826B2 (ja) * | 1992-08-25 | 2001-01-15 | 日本電子株式会社 | 電子顕微鏡等の試料冷却ホルダ |
US5753924A (en) * | 1997-03-12 | 1998-05-19 | Gatan, Inc. | Ultra-high tilt specimen cryotransfer holder for electron microscope |
JP2000251819A (ja) * | 1999-03-04 | 2000-09-14 | Hitachi Ltd | 試料冷却ホルダー |
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- 2011-08-05 JP JP2011171688A patent/JP5690243B2/ja active Active
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