JP5678670B2 - 超音波センサー、触覚センサー、および把持装置 - Google Patents
超音波センサー、触覚センサー、および把持装置 Download PDFInfo
- Publication number
- JP5678670B2 JP5678670B2 JP2011000977A JP2011000977A JP5678670B2 JP 5678670 B2 JP5678670 B2 JP 5678670B2 JP 2011000977 A JP2011000977 A JP 2011000977A JP 2011000977 A JP2011000977 A JP 2011000977A JP 5678670 B2 JP5678670 B2 JP 5678670B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- sensor
- reflector
- unit
- elastic film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005540 biological transmission Effects 0.000 claims description 98
- 238000001514 detection method Methods 0.000 claims description 85
- 239000000758 substrate Substances 0.000 claims description 64
- 238000004364 calculation method Methods 0.000 claims description 59
- 238000003860 storage Methods 0.000 claims description 29
- 238000003491 array Methods 0.000 claims description 24
- 239000012528 membrane Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 10
- 239000013598 vector Substances 0.000 description 67
- 238000010008 shearing Methods 0.000 description 53
- 239000004744 fabric Substances 0.000 description 39
- 238000000034 method Methods 0.000 description 22
- 230000008569 process Effects 0.000 description 20
- 238000005259 measurement Methods 0.000 description 15
- 238000012545 processing Methods 0.000 description 15
- XEEYBQQBJWHFJM-RNFDNDRNSA-N iron-60 Chemical compound [60Fe] XEEYBQQBJWHFJM-RNFDNDRNSA-N 0.000 description 14
- 238000010586 diagram Methods 0.000 description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 9
- 230000008054 signal transmission Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- 235000008429 bread Nutrition 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 230000001902 propagating effect Effects 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 description 4
- 238000004898 kneading Methods 0.000 description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- -1 Polydimethylsiloxane Polymers 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000002033 PVDF binder Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/25—Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/081—Touching devices, e.g. pressure-sensitive
- B25J13/082—Grasping-force detectors
- B25J13/083—Grasping-force detectors fitted with slippage detectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
- B25J19/026—Acoustical sensing devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
- G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
- G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Robotics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Toxicology (AREA)
- Human Computer Interaction (AREA)
- Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Manipulator (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011000977A JP5678670B2 (ja) | 2011-01-06 | 2011-01-06 | 超音波センサー、触覚センサー、および把持装置 |
| US13/332,794 US9127999B2 (en) | 2011-01-06 | 2011-12-21 | Ultrasonic sensor, tactile sensor, grasping apparatus, and electronic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011000977A JP5678670B2 (ja) | 2011-01-06 | 2011-01-06 | 超音波センサー、触覚センサー、および把持装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012141256A JP2012141256A (ja) | 2012-07-26 |
| JP2012141256A5 JP2012141256A5 (enExample) | 2014-02-13 |
| JP5678670B2 true JP5678670B2 (ja) | 2015-03-04 |
Family
ID=46454194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011000977A Expired - Fee Related JP5678670B2 (ja) | 2011-01-06 | 2011-01-06 | 超音波センサー、触覚センサー、および把持装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9127999B2 (enExample) |
| JP (1) | JP5678670B2 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5990929B2 (ja) | 2012-02-24 | 2016-09-14 | セイコーエプソン株式会社 | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置 |
| WO2014018116A1 (en) * | 2012-07-26 | 2014-01-30 | Changello Enterprise Llc | Ultrasound-based force sensing and touch sensing |
| WO2014018121A1 (en) | 2012-07-26 | 2014-01-30 | Changello Enterprise Llc | Fingerprint-assisted force estimation |
| WO2014018115A1 (en) | 2012-07-26 | 2014-01-30 | Changello Enterprise Llc | Ultrasound-based force sensing of inputs |
| WO2014035479A2 (en) | 2012-08-30 | 2014-03-06 | Changello Enterprise Llc | Auto-baseline determination for force sensing |
| CN208212011U (zh) * | 2016-08-31 | 2018-12-11 | 北京先通康桥医药科技有限公司 | 一种电容式mems传感器阵列 |
| JP6991791B2 (ja) | 2017-08-25 | 2022-01-13 | キヤノン株式会社 | 複合センサ |
| EP3778153B1 (en) * | 2018-03-27 | 2025-01-08 | Sony Group Corporation | Control device, control method, and program |
| JP7259247B2 (ja) * | 2018-09-28 | 2023-04-18 | セイコーエプソン株式会社 | 制御装置、ロボットシステム、及びロボット |
| US11333634B2 (en) | 2019-10-23 | 2022-05-17 | Industrial Technology Research Institute | Signal sensing module and ultrasonic probe using the same |
| US11772262B2 (en) * | 2019-10-25 | 2023-10-03 | Dexterity, Inc. | Detecting slippage from robotic grasp |
| US11607816B2 (en) | 2019-10-25 | 2023-03-21 | Dexterity, Inc. | Detecting robot grasp of very thin object or feature |
| JP7297696B2 (ja) * | 2020-01-27 | 2023-06-26 | 株式会社東芝 | 検出装置及び収束部材 |
| JP7546272B2 (ja) * | 2020-05-07 | 2024-09-06 | 株式会社ブイ・テクノロジー | テンション計測装置とテンション計測方法 |
| CN114101201B (zh) * | 2021-11-04 | 2022-07-08 | 江苏理工学院 | 一种自动识别并分类汽车零部件的清洗装置及方法 |
| JP7737144B2 (ja) * | 2022-01-24 | 2025-09-10 | 株式会社ブイ・テクノロジー | テンション計測装置及びテンション計測方法 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6034295A (ja) * | 1983-08-03 | 1985-02-21 | 株式会社日立製作所 | 皮膚感覚センサ |
| US4555953A (en) * | 1984-04-16 | 1985-12-03 | Paolo Dario | Composite, multifunctional tactile sensor |
| JPS61207938A (ja) * | 1985-03-13 | 1986-09-16 | Tokyo Univ | 音弾性被膜を用いた応力測定方法 |
| US5553500A (en) * | 1994-10-26 | 1996-09-10 | Bonneville Scientific Incorporated | Triaxial normal and shear force sensor |
| JP3871293B2 (ja) | 1999-03-10 | 2007-01-24 | 学校法人慶應義塾 | ハンド又はマニピュレータによる物体把持制御方法 |
| WO2003042686A1 (fr) * | 2001-11-14 | 2003-05-22 | Kabushiki Kaisha Toshiba | Echographe, transducteur ultrasons, instrument d'examen et dispositif d'ultrasonographie |
| FR2858406B1 (fr) * | 2003-08-01 | 2005-10-21 | Centre Nat Rech Scient | Capteur, dispositif et procede visant a mesurer la pression d'interface entre deux corps |
| JP4035515B2 (ja) * | 2004-05-18 | 2008-01-23 | ミネベア株式会社 | 光学式変位センサおよび外力検出装置 |
| JP4876240B2 (ja) * | 2005-01-28 | 2012-02-15 | 国立大学法人 東京大学 | 触覚センサ及びその製造方法 |
| JP4708979B2 (ja) | 2005-11-28 | 2011-06-22 | ニッタ株式会社 | 光学式触覚センサ |
| JP2009053040A (ja) * | 2007-08-27 | 2009-03-12 | Jtekt Corp | 超音波センサおよびセンサ付き転がり軸受装置 |
| US7804742B2 (en) * | 2008-01-29 | 2010-09-28 | Hyde Park Electronics Llc | Ultrasonic transducer for a proximity sensor |
| JP5293557B2 (ja) | 2008-12-17 | 2013-09-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波トランスデューサーアレイ及び超音波デバイス |
| JP5499479B2 (ja) | 2009-01-13 | 2014-05-21 | セイコーエプソン株式会社 | 電子機器 |
| JP5206432B2 (ja) | 2009-01-13 | 2013-06-12 | セイコーエプソン株式会社 | 検出装置及び電子機器 |
| JP5434109B2 (ja) | 2009-02-06 | 2014-03-05 | セイコーエプソン株式会社 | 超音波センサーユニット |
| JP5310119B2 (ja) | 2009-03-06 | 2013-10-09 | セイコーエプソン株式会社 | 超音波センサーユニット |
| JP5177033B2 (ja) | 2009-03-18 | 2013-04-03 | セイコーエプソン株式会社 | 入力装置、及び電子機器 |
| JP2010244119A (ja) | 2009-04-01 | 2010-10-28 | Seiko Epson Corp | 入力補助装置、及び入力装置 |
| JP2011104472A (ja) | 2009-11-13 | 2011-06-02 | Seiko Epson Corp | 超音波洗浄装置、及び超音波洗浄装置の洗浄方法 |
| JP5445065B2 (ja) * | 2009-11-25 | 2014-03-19 | セイコーエプソン株式会社 | 剪断力検出素子、触覚センサー、および把持装置 |
| JP6089499B2 (ja) * | 2012-08-28 | 2017-03-08 | セイコーエプソン株式会社 | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置 |
-
2011
- 2011-01-06 JP JP2011000977A patent/JP5678670B2/ja not_active Expired - Fee Related
- 2011-12-21 US US13/332,794 patent/US9127999B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20120174672A1 (en) | 2012-07-12 |
| US9127999B2 (en) | 2015-09-08 |
| JP2012141256A (ja) | 2012-07-26 |
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