JP5667236B2 - Ultrasonic cleaning equipment - Google Patents

Description

  The present invention relates to an ultrasonic cleaning apparatus that cleans an object to be cleaned using ultrasonic waves, and in particular, various ultrasonic cleaning tools can be easily replaced, and vibration frequency and power corresponding to the ultrasonic cleaning tool can be easily replaced. The present invention also relates to an ultrasonic cleaning apparatus that can automatically check various conditions necessary for cleaning.

  2. Description of the Related Art Conventionally, cleaning is performed by immersing an object to be cleaned in a cleaning tank storing a cleaning liquid and vibrating an ultrasonic vibrator provided at the bottom of the cleaning tank. In addition, since a large-sized object to be cleaned cannot be immersed in a cleaning tank, a handy type ultrasonic cleaning tool that jets a cleaning liquid is used for these objects to be cleaned. The hand-held type ultrasonic cleaning tool is used for preventing reattachment of dust on a semiconductor wafer, for example, depending on the characteristics and material of the object to be cleaned.

  As described above, the form of the ultrasonic vibrator used for each object to be cleaned is different, and an oscillator is prepared for each ultrasonic vibrator or internal adjustment of the oscillator is performed. For this reason, the cost for preparation of the oscillator for each ultrasonic transducer is high, and internal adjustment of the oscillator is required for each ultrasonic transducer, so that the work efficiency is poor.

  For this reason, Patent Document 1 discloses an ultrasonic vibration device that can be replaced with a vibrator having the same frequency or a vibrator having a different frequency without adjusting the inside of the oscillator body or replacing the oscillator body.

JP 2010-75867 A

  In the ultrasonic vibration device disclosed in Patent Document 1, cleaning is performed without replacing the oscillator main body by replacing the connection unit having the output transformer and the coil capacitor with respect to the vibrator having the same frequency or the vibrator having a different frequency. Is possible.

  However, in a hand-held ultrasonic cleaning tool or the like, since the cleaning liquid is supplied to the cleaning tool, it is necessary to manage the cleaning liquid. For example, before the start of cleaning, if the cleaning liquid is insufficient during cleaning, it becomes empty and causes a failure or the like. In addition, the object to be cleaned may be poorly cleaned and the yield may be reduced. Further, in an ultrasonic cleaning apparatus using a handy type ultrasonic cleaning tool, portability is important, and it is required to be usable with a battery without using a commercial power source.

  Therefore, in order to solve these problems, the present invention can easily replace various ultrasonic cleaning tools, and vibration frequency, power, etc. corresponding to the replaced ultrasonic cleaning tool are automatically set. An object of the present invention is to provide an ultrasonic cleaning apparatus capable of confirming various conditions necessary for the above.

In order to achieve the above goal, the ultrasonic cleaning apparatus of the present invention includes an ultrasonic cleaning tool having an ultrasonic vibrator and an oscillator that vibrates the ultrasonic vibrator of the ultrasonic cleaning tool. An ultrasonic cleaning apparatus provided with a kind of ultrasonic cleaning tool, wherein at least an identification number relating to each ultrasonic cleaning tool, a vibration frequency of an ultrasonic vibrator, an allowable input power, and a jet are injected into the ultrasonic cleaning tool comprising a storage medium storing the flow rate of data per unit of the cleaning solution time, recognizes the type of the ultrasonic cleaning tool reads data of the storage medium, the vibration frequency of the ultrasonic transducers of the ultrasonic cleaning tool, And a controller that checks whether the allowable input power can be output , determines whether the cleaning operation is possible, and outputs the determination result.

  The ultrasonic cleaning apparatus according to the present invention further includes a tank for storing a cleaning liquid. The ultrasonic cleaning apparatus includes a liquid level sensor in the tank, and reads data relating to a flow rate per unit time of the cleaning liquid sprayed from the storage medium. The remaining amount of the cleaning liquid in the tank is detected from the liquid level sensor in the inside, and the cleaning possible time is displayed.

  The ultrasonic cleaning apparatus of the present invention has a flow meter between the ultrasonic cleaning tool and the tank, detects a cleaning liquid used per unit time from the flow meter during cleaning, and a liquid level sensor in the tank The remaining amount of the cleaning liquid in the tank is detected and the possible cleaning time is calculated.

The ultrasonic cleaning device has a rechargeable battery, it checks the remaining capacity of the battery before starting washing, characterized in that to calculate the cleaning time possible from the remaining amount of the battery.

  According to the present invention, the ultrasonic cleaning apparatus has a memory that stores data related to an ultrasonic cleaning tool that can be read by the oscillator, the oscillator recognizes the type of the ultrasonic cleaning tool from the read data, In accordance with the current conditions regarding the conditions necessary for cleaning, such as the amount of cleaning liquid, according to the type of ultrasonic cleaning tool, determine whether the cleaning operation is possible, and display the cleaning operation based on the determination result. Alternatively, since an alarm indicating that the cleaning operation is not possible is output, appropriate cleaning can always be performed, and defective cleaning or the like can be prevented.

  Further, since the oscillator reads the data in the memory and controls the oscillator based on the read data, adjustment of the oscillator or the like is unnecessary, which is excellent in convenience and has high working efficiency.

  In addition, an ultrasonic cleaning device using a hand-held ultrasonic cleaning tool that injects cleaning liquid is equipped with a tank for cleaning liquid, the flow rate used by the ultrasonic cleaning tool is stored in the memory, and the liquid level sensor is stored in the tank for cleaning liquid. By providing this, the amount of the cleaning liquid in the cleaning liquid tank can be confirmed before the start of cleaning, and thereby the time available for cleaning can be known. Further, when the amount of the cleaning liquid in the cleaning liquid tank is small, an alarm indicating that the cleaning operation is not possible is output, so that emptying can be prevented.

  In addition, the ultrasonic cleaning apparatus of the present invention includes a cleaning liquid tank and a battery, so that a cleaning operation can be performed where there is no utility. Moreover, it is excellent in portability and the place to wash is not limited.

  Further, when the cleaning liquid supply utility is connected to the tank of the ultrasonic cleaning apparatus, an automatic water supply function of checking the signal from the liquid level sensor and automatically supplying water to the tank becomes possible.

It is a block diagram which shows the structure of the ultrasonic cleaning apparatus in 1st Embodiment by this invention. It is a block diagram which shows the structure of the ultrasonic cleaning apparatus in 2nd Embodiment by this invention. It is a table | surface which shows the list | wrist of the flow volume in various ultrasonic cleaning tools, allowable input electric power, washable time, etc. It is a flowchart which shows the detection operation | movement of an ultrasonic cleaning tool at the time of switching of the ultrasonic cleaning tool of the ultrasonic cleaning apparatus in 1st Embodiment. It is a flowchart which shows the detection operation | movement of an ultrasonic cleaning tool at the time of switching of the ultrasonic cleaning tool of the ultrasonic cleaning apparatus in 2nd Embodiment.

  Hereinafter, an embodiment for carrying out an ultrasonic cleaning apparatus according to the present invention will be described with reference to the drawings. The ultrasonic cleaning apparatus according to the present invention is an apparatus for cleaning an object to be cleaned by ultrasonically vibrating an ultrasonic vibrator of an ultrasonic cleaning tool with an oscillator and applying ultrasonic vibration to a cleaning liquid. The ultrasonic cleaning tool can be easily replaced, vibration frequency, power, etc. corresponding to the ultrasonic cleaning tool are automatically set, and various conditions necessary for cleaning are checked before starting cleaning. It is.

[First Embodiment]
FIG. 1 is a block diagram showing the configuration of the ultrasonic cleaning apparatus according to the first embodiment of the present invention. As shown in FIG. 1, the ultrasonic cleaning device 1 includes an ultrasonic cleaning device main body 2, an ultrasonic cleaning tool 8, and a connection box 6. The ultrasonic cleaning device main body 2 includes an oscillator 3, a power supply unit 20, a cleaning liquid tank 25, and a control unit 5. The oscillator 3 applies high-frequency power for generating ultrasonic vibration to the ultrasonic cleaning tool 8 and is configured to output the frequency and power of the high-frequency power according to various ultrasonic cleaning tools 8. ing.

  As will be described later with reference to FIG. 3, there are various types of ultrasonic cleaning tools 8, which are properly used depending on the size, characteristics, material, etc. For example, the spot shower type ultrasonic cleaning tool 8 shown in FIG. 3 has a built-in ultrasonic vibrator, and sprays a cleaning liquid to which ultrasonic waves are applied from a nozzle attached to the tip portion from the tip of the nozzle to be cleaned. Is to wash. A cleaning liquid is supplied from the cleaning liquid tank 25 to the ultrasonic cleaning tool 8.

  The connection box 6 is provided for each ultrasonic cleaning tool 8, and an output adjustment circuit (not shown) that adjusts the power from the output circuit (not shown) of the oscillator 3 to an output corresponding to the ultrasonic cleaning tool 8. )have. The connection box 6 has a built-in storage medium (memory) 7. The memory 7 has an identification number (ID) of the ultrasonic cleaning tool 8, a frequency for driving the ultrasonic cleaning tool 8, and an ultrasonic cleaning tool 8. The allowable input power value, the flow rate of the cleaning liquid to be used, and the like are stored. Note that the storage medium (memory) 7 is not limited to the connection box 6 and may be provided in the oscillator 3 or the control unit 5 so as to be removable.

  The oscillator 3 is modulated by a frequency oscillation circuit (not shown) capable of varying the oscillation frequency, a signal modulation circuit (not shown) that modulates a high-frequency signal from the frequency oscillation circuit, and a signal modulation circuit. A driver (not shown) for outputting the high-frequency signal to the output circuit, an output circuit (not shown) for amplifying the high-frequency signal from the driver and outputting it to the output adjustment circuit of the connection box 6, and control of each circuit And a control circuit 4 for performing the above. The output circuit is configured such that the magnitude (power) of power amplification can be varied. The control circuit 4 of the oscillator 3 reads the data in the memory 7 built in the memory 7 provided in the connection box 6, specifies the ultrasonic cleaning tool 8 from the read data, and responds to the ultrasonic cleaning tool 8. The frequency of the high frequency power is set in the frequency oscillation circuit, and the power for driving the ultrasonic cleaning tool 8 is set in the output circuit.

  The control unit 5 controls the ultrasonic cleaning apparatus 1 and is composed of a microcomputer including a CPU, a memory, and the like. Further, the control unit 5 has a display unit (not shown) for displaying a cleaning possible time, an alarm, and the like. The control unit 5 is configured to control the cleaning operation by checking the remaining amount of cleaning liquid for cleaning. The control circuit 4 and the control unit 5 of the oscillator 3 are collectively referred to as a control unit.

  The power supply unit 20 supplies power to the oscillator 3, the control unit 5, the pump 29, and the like, and includes a converter 21 and a battery 22. The power is supplied through the converter 21. An AC power source 34 and a battery 22 can be connected to the converter 21 as a power source. When the AC power source 34 as the utility 32 is input to the converter 21, the AC power source 34. Supply the necessary power from. The converter 21 controls the battery 22 to be charged by the AC power source 34. The battery 22 supplies power to the ultrasonic cleaning apparatus 1 in a place where the AC power supply 34 cannot be secured, and power is supplied from the battery 22 to the ultrasonic cleaning apparatus 1 via the converter 21. The utility refers to power supplied from the outside to the ultrasonic cleaning apparatus 1 and cleaning liquid.

  Further, the converter 21 has a built-in battery remaining amount meter so that the power that can be supplied from the battery 22 can be read from the control unit 5. Furthermore, the converter 21 outputs to the control unit 5 whether the output power is supplied from the AC power supply 34 or from the battery 22.

  The cleaning liquid tank 25 stores the cleaning liquid, and the cleaning liquid is supplied to the ultrasonic cleaning tool 8 by the pump 29 at the time of cleaning. In addition, the ultrasonic cleaning apparatus 1 can use the cleaning liquid stored in the external cleaning liquid storage tank 33 by connecting to the external cleaning liquid storage tank 33 that stores the cleaning liquid as the utility 32, and can perform cleaning for a long time. It becomes possible. The supply of the cleaning liquid from the external cleaning liquid storage tank 33 to the cleaning liquid tank 25 is performed via a valve 28 that can be controlled by the control unit 5.

  Pipes from the cleaning liquid tank 25 and the external cleaning liquid storage tank 33 are connected to the pump 29, and any cleaning liquid from the cleaning liquid tank 25 or the external cleaning liquid storage tank 33 is supplied from the pump 29 to the ultrasonic cleaning tool 8. The

  The cleaning liquid tank 25 is provided with a liquid level sensor, and the control unit 5 can know the remaining amount of the cleaning liquid tank 25 from the liquid level sensor. Further, when an external cleaning liquid storage tank 33 that stores cleaning liquid as utility 32 is connected to the cleaning liquid tank 25 of the ultrasonic cleaning apparatus 1, the signal from the liquid level sensor is checked and automatically sent to the cleaning liquid tank 25. An automatic water supply function for supplying water is also possible.

  Further, a flow meter 27 is provided on the pipe for supplying the cleaning liquid to the ultrasonic cleaning tool 8, and the control unit 5 can detect the flow rate of the cleaning liquid supplied to the ultrasonic cleaning tool 8.

[Second Embodiment]
The ultrasonic cleaning apparatus 1 described above includes the connection box 6 having a memory for each ultrasonic cleaning tool 8, but the ultrasonic cleaning apparatus in which the output adjustment circuit of the connection box 6 is built in the oscillator 52 is illustrated. 2 will be described. FIG. 2 is a block diagram showing the configuration of the ultrasonic cleaning apparatus according to the second embodiment of the present invention. In addition, about the same thing as the component of the ultrasonic cleaning apparatus 1 shown in FIG. 1, the same code | symbol is used and the detailed description regarding a structure is abbreviate | omitted.

  As shown in FIG. 2, the ultrasonic cleaning device 50 includes an ultrasonic cleaning device main body 51 and an ultrasonic cleaning tool 8. The oscillator 52 of the ultrasonic cleaning apparatus main body 51 includes a plurality of output adjustment circuits 53, and is configured to select any one of the output adjustment circuits. For example, the first output adjustment circuit 53a is assigned for spot showers, and the second output adjustment circuit 53b is assigned for slit showers.

  The oscillator 52 is modulated by a frequency oscillation circuit (not shown) capable of changing the oscillation frequency, a signal modulation circuit (not shown) that modulates a high-frequency signal from the frequency oscillation circuit, and a signal modulation circuit. A driver (not shown) for outputting the high-frequency signal to the output circuit, an output circuit (not shown) for amplifying the high-frequency signal from the driver and outputting it to the output adjustment circuit 53, and control for controlling each circuit Circuit 54. The output circuit is configured such that the magnitude (power) of power amplification can be varied. The control circuit 54 of the oscillator 52 reads the data in the memory 7 built in the memory 7 provided in the ultrasonic cleaning tool 8, identifies the ultrasonic cleaning tool 8 from the read data, and sets the ultrasonic cleaning tool 8 to the ultrasonic cleaning tool 8. The frequency of the corresponding high frequency power is set in the frequency oscillation circuit, and the power for driving the ultrasonic cleaning tool 8 is set in the output circuit. Further, the output adjustment circuit 53 suitable for the ultrasonic cleaning tool 8 is selected. The control circuit 54 and the control unit 5 of the oscillator 3 are collectively referred to as a control unit.

  The memory 7 provided in the connection box 6 of the ultrasonic cleaning apparatus 1 is provided in the ultrasonic cleaning tool 8 so that the data in the memory 7 is read from the oscillator 52. Thereby, the corresponding output adjustment circuit can be selected from the number of the output adjustment circuit stored in the memory 7. Note that the storage medium (memory) 7 is not limited to the ultrasonic cleaning tool 8 and may be provided in the oscillator 52 or the control unit 5 so as to be removable. Further, the ultrasonic cleaning apparatus shown in FIGS. 1 and 2 may be configured to read data in the memory 7 provided in the connection box 6 or the ultrasonic cleaning tool 8 by the control unit 5 as a control unit.

  As described above, since the ultrasonic cleaning apparatus 50 according to the second embodiment includes the output adjustment circuit in the oscillator 52, it is not necessary to attach the output adjustment circuit to each ultrasonic cleaning tool 8. The cleaning device 50 can be easily handled.

  The ultrasonic cleaning apparatus shown in FIGS. 1 and 2 shows a configuration in which the control unit 5 and the oscillator are separated from each other, but the control unit 5 and the oscillator are integrally configured to function the control unit 5. May be provided in the oscillator. For example, the control circuit of the oscillator as the control unit reads the data of the storage medium, recognizes the type of the ultrasonic cleaning tool, and sets conditions necessary for cleaning according to the type of the ultrasonic cleaning tool. .

[Various ultrasonic cleaning tools]
Next, the flow rate, allowable input power, possible cleaning time, etc. in various ultrasonic cleaning tools will be described with reference to FIG. FIG. 3 is a table showing a list of flow rates, allowable input power, possible cleaning time, and the like in various ultrasonic cleaning tools. As shown in FIG. 3, the ultrasonic cleaning tool 8 shows a spot shower, a slit shower, a small line shower, a throwing vibrator, and a horn vibrator. The flow rate, power, and washing in each ultrasonic cleaning tool 8 are shown. Indicates possible time. Note that the capacity of the cleaning liquid tank 25 of the ultrasonic cleaning apparatus is 40 L (liters).

  The spot shower shown in FIG. 3 has a cylindrical case, and a nozzle is attached to the tip of the case. In the case, an ultrasonic transducer having a disc-shaped diaphragm is arranged facing the rear end of the nozzle. A liquid supply port for supplying a cleaning liquid is formed on the side surface of the case. The cleaning liquid supplied from the liquid supply port and the ultrasonic wave radiated from the ultrasonic vibrator are ejected from the tip of the nozzle to clean the object to be cleaned arranged in front of the nozzle. In addition, the detail regarding a spot shower is disclosed by patent 3256198 as an example.

  In the spot shower, as shown in FIG. 3, the flow rate of the cleaning liquid during cleaning is 1.5 L / min (minutes), and the possible cleaning time is about 20 minutes when the cleaning liquid tank is used. The allowable input power from the oscillator to the spot shower ultrasonic transducer is 30 W (watts).

  In the slit shower shown in FIG. 3, an ultrasonic vibrator is fixed to the outside of the bottom surface of the case, and the cleaning liquid is supplied from the cleaning liquid supply port on one side so as to fill the case. The supplied cleaning liquid is ejected from the cleaning liquid spout. In addition, the reflector is disposed in the case so as to face the ultrasonic transducer, and the surface of the ultrasonic transducer and the reflector are disposed so as to be slightly separated from each other as the cleaning liquid outlet is approached. As a result, reflection is repeated between the ultrasonic vibrator and the reflecting plate and focused on the cleaning liquid jet outlet, and the ultrasonic wave cooperates with the jetted cleaning liquid to improve the cleaning ability for the object to be cleaned under the cleaning liquid jet outlet. Acts as follows. In addition, the detail regarding a slit shower is disclosed by patent 298970 as an example.

  In the slit shower, as shown in FIG. 3, the flow rate of the cleaning liquid during cleaning is 3 L / min (minutes), and the possible cleaning time is about 10 minutes when the cleaning liquid tank is used. The allowable input power from the oscillator to the ultrasonic vibrator of the slit shower is 100 W (Watt).

  The small line shower shown in FIG. 3 includes a substantially rectangular parallelepiped waveguide, a vibrator formed in a rectangular plate shape and bonded to the waveguide on one side by an adhesive, etc., and an upper surface of the waveguide The surface opposite to the surface having the vibrator, that is, the surface for oscillating ultrasonic waves is used as the lower side. The waveguide body resonates with the ultrasonic vibration generated by the vibrator and acts as a member that transmits the ultrasonic vibration to a cleaning fluid such as pure water supplied by the liquid supply device. The liquid supply apparatus includes a liquid supply member that supplies a cleaning fluid such as pure water from the traveling direction side of the substrate as an object to be cleaned, a suction member that sucks the cleaning fluid by the action of a pump, and the like. In addition, the detail regarding a small line shower is disclosed by patent 3075356 as an example.

  As shown in FIG. 3, the small line shower has a cleaning liquid flow rate of 10 L / min (minutes) and cannot be handled by the cleaning liquid tank. For this reason, the washable time is not limited by using utility. The allowable input power from the oscillator to the vibrator of the small line shower is 200 W (Watt).

  The small throwing vibrator shown in FIG. 3 has a diaphragm having a constant thickness, and a vibration surface is formed on one surface of the diaphragm. A plurality of bolt-clamped Langevin transducers (BL transducers) are bonded on the other surface of the diaphragm, and the plurality of BL transducers apply ultrasonic vibrations to the vibrating surface. The small throwing vibrator is used by throwing it into the cleaning tank and irradiating the cleaning liquid in the cleaning tank with ultrasonic waves from the vibration surface. Note that details regarding the small throwing vibrator are disclosed in Japanese Patent Laid-Open No. 2012-125743 as an example.

  Since the small throwing vibrator is used in a dipping cleaning tank as shown in FIG. 3, no cleaning liquid is ejected from the small throwing vibrator. For this reason, the washable time is not limited by using the washing liquid in the washing tank. The allowable input power from the oscillator to the BL vibrator of the small throwing vibrator is 100 W (Watt).

  The horn transducer shown in FIG. 3 is used in a collected deposit inspection sample collection device that samples deposits adhering to the surface to be inspected, and is provided at the tip of the ultrasonic transducer section and the ultrasonic transducer section. The horn part. A supply / discharge hole connected to the supply / discharge line is provided at the center of the horn. The supply / discharge port hole is connected to the supply / discharge pipe line, and supplies the recovered solution to the floor and collects the recovered solution from the floor. Note that details regarding the horn vibrator are disclosed in Japanese Patent No. 41244763 as an example.

  In the horn vibrator, as shown in FIG. 3, the amount of liquid supplied to the deposit is 10 mL / time, and the liquid can be used several thousand times. The allowable input power from the oscillator to the ultrasonic transducer of the horn transducer is 50 W (watts).

  As described above, the spot shower, the slit shower, and the horn vibrator perform the cleaning by ejecting the cleaning liquid from the ultrasonic cleaning tool 8 and recover the adhering matter, so that the cleaning liquid can be supplied from the cleaning liquid tank. However, since the small line shower has a flow rate of 10 L / min, the cleaning time is short when the cleaning liquid tank is used. Therefore, the cleaning is performed when the utility power is connected, that is, when the external cleaning liquid storage tank 33 is connected. Judge that it is possible. The small line shower cannot be driven by the battery 22 because the allowable input power from the oscillator is as large as 200 W. Therefore, it is checked whether an external AC power supply 34 is supplied as a power supply, and the small line shower is driven by the AC power supply 34. Further, since the small throwing vibrator is thrown into the washing tank and used, it is not necessary to supply the washing liquid.

[Detection Operation of Ultrasonic Cleaning Tool in First Embodiment]
Next, the detection operation of the ultrasonic cleaning tool when switching the ultrasonic cleaning tool will be described with reference to FIG. FIG. 4 is a flowchart showing the detection operation of the ultrasonic cleaning tool when switching the ultrasonic cleaning tool of the ultrasonic cleaning apparatus according to the first embodiment. Note that the flowchart shown in FIG. 4 does not use utility. That is, the cleaning liquid is supplied from the cleaning liquid tank 25 and the power is supplied from the battery 22.

  As shown in FIG. 4, first, the ultrasonic cleaning apparatus 1 connects the connection box 6 of the ultrasonic cleaning tool 8 and the wiring of the memory 7 to the oscillator 3 (step S1). Next, the control circuit 4 of the oscillator 3 reads data relating to the ultrasonic cleaning tool 8 from the memory 7 attached to the connection box 6 (step S2). Data read by the oscillator 3 includes the ID of the ultrasonic cleaning tool 8, the oscillation frequency, the allowable input power, the phase setting, the oscillation mode, the flow rate of the cleaning liquid, the power consumption, and the like.

  As a result, the oscillator 3 recognizes the ultrasonic cleaning tool 8. The oscillator 3 checks whether the connected ultrasonic cleaning tool 8 is compatible based on the read data. That is, it is checked whether the frequency data read from the memory 7 is a frequency that can be oscillated, and whether the allowable input power of the ultrasonic transducer can be output (step S3). If it is determined that either the frequency or the allowable input power cannot be handled, the process proceeds to step S10, where an alarm output and an error display are performed.

  Next, when it is determined that it can be handled, the frequency for driving the ultrasonic cleaning tool 8 is set in the oscillation circuit (not shown) of the oscillator 3, and the ultrasonic cleaning tool 8 is determined from the allowable input power of the ultrasonic cleaning tool 8. The power (output power) necessary for driving the ultrasonic transducer is set in the output circuit. In addition, in order for the output circuit to output power most efficiently to the ultrasonic transducer, the phase of the output voltage and current is set. In the phase setting, data obtained at the time of prior adjustment is set. Further, an oscillation mode that can be used with the ultrasonic cleaning tool 8 is also set (step S4). The oscillation mode is a sine wave, FM modulation, sweep oscillation, or the like.

  Next, the control unit 5 communicates with the oscillator 3 to receive the amount of cleaning liquid per minute necessary for cleaning and the power consumption required for the ultrasonic cleaning apparatus 1 from the oscillator 3 (step S5).

  The control unit 5 reads data from the liquid level sensor 26 provided in the cleaning liquid tank 25, and calculates the cleaning possible time based on the flow rate of the cleaning liquid per minute of the ultrasonic cleaning tool 8 (step). S6).

  When the power supply is battery driven, the remaining amount of power of the battery 22 is read from the battery remaining amount meter, the amount of power that can be supplied is checked, and the drive time by the battery is calculated (step S7). That is, in the case of battery drive, it is determined whether or not the battery capacity can be dealt with based on the power consumption of the ultrasonic cleaning device 1.

  It is checked whether the cleaning time calculated in step S6 and the battery driving time calculated in step S7 are equal to or longer than a predetermined time (step S8).

  If the cleaning operation is possible, the control unit 5 displays the cleaning possible time on the display unit and notifies that the cleaning is possible (step S9). The start signal is turned on with a foot switch or the like to start cleaning. At the start of cleaning, a soft start operation is performed. In the soft start operation, the cleaning liquid is first supplied at the start of cleaning, and then the ultrasonic vibrator is driven after a predetermined time has elapsed. Thereby, it is possible to prevent the ultrasonic vibrator from being blown away.

  On the other hand, when the cleaning time is short or the capacity of the battery 22 is small, an alarm output and error display are performed on the display unit, and the cleaning operation is not performed (step S10). Further, when a large flow rate is required, connection of utility power such as the external cleaning liquid storage tank 33 is urged.

  In the above flowchart, if the power source and the cleaning liquid are always connected as utility, cleaning can be started without executing step S5 and subsequent steps. Further, when one of the power source and the cleaning liquid is not always connected as utility, the cleaning possible time is calculated to determine whether cleaning is possible.

[Detection Operation of Ultrasonic Cleaning Tool in Second Embodiment]
Next, the detection operation of the ultrasonic cleaning tool when switching the ultrasonic cleaning tool of the ultrasonic cleaning device in the second embodiment will be described with reference to FIG. FIG. 5 is a flowchart showing the detection operation of the cleaning tool when the cleaning tool is switched in the ultrasonic cleaning apparatus according to the second embodiment. The flowchart shown in FIG. 5 does not use utility. That is, the cleaning liquid is supplied from the cleaning liquid tank 25 and the power is supplied from the battery 22.

  As shown in FIG. 5, first, the ultrasonic cleaning device 50 connects the wiring of the ultrasonic cleaning tool 8 and the memory 7 to the oscillator 52 (step S20). Next, the control circuit 54 of the oscillator 52 reads data relating to the ultrasonic cleaning tool 8 from the memory 7 attached to the ultrasonic cleaning tool 8 (step S21). Data read by the oscillator 52 includes the ID of the ultrasonic cleaning tool 8, the oscillation frequency, the allowable input power, the designation of the output adjustment circuit, the phase setting, the oscillation mode, the flow rate of the cleaning liquid, the power consumption, and the like.

  Thereby, the oscillator 52 recognizes the ultrasonic cleaning tool 8. The oscillator 52 checks whether the connected ultrasonic cleaning tool 8 is compatible based on the read data. That is, it is checked whether the frequency data read from the memory 7 is an oscillating frequency, whether the designated output adjustment circuit is incorporated, and whether the allowable input power of the ultrasonic transducer can be output (step). S22). When it is determined that any one of the frequency, the output adjustment circuit, and the allowable input power cannot be handled, the process proceeds to step S29, where alarm output and error display are performed.

  Next, when it is determined that the response is possible, the frequency for driving the ultrasonic cleaning tool 8 is set in the oscillation circuit of the oscillator 52, and a predetermined output adjustment circuit is selected from the data relating to the output adjustment circuit read from the memory 7. The ultrasonic cleaning tool 8 is connected. Further, the power (output power) necessary for driving the ultrasonic transducer of the ultrasonic cleaning tool 8 is set in the output circuit from the allowable input power of the ultrasonic cleaning tool 8. In addition, in order for the output circuit to output power most efficiently to the ultrasonic transducer, the phase of the output voltage and current is set. In the phase setting, data obtained at the time of prior adjustment is set. Further, an oscillation mode that can be used by the ultrasonic cleaning tool 8 is also set (step S23). The oscillation mode is a sine wave, FM modulation, soup oscillation, or the like.

  Next, the control unit 5 communicates with the oscillator 52 and receives from the oscillator 52 the amount of cleaning liquid per minute necessary for cleaning and the power consumption required for the ultrasonic cleaning device 50 (step S24).

  The control unit 5 reads data from the liquid level sensor 26 provided in the cleaning liquid tank 25, and calculates the cleaning possible time based on the flow rate of the cleaning liquid per minute of the ultrasonic cleaning tool 8 (step). S25).

  When the power supply is battery driven, the remaining amount of power of the battery 22 is read from the battery remaining amount meter, the amount of power that can be supplied is checked, and the drive time by the battery is calculated (step S26). That is, in the case of battery drive, it is determined whether or not the battery capacity can be dealt with based on the power consumption of the ultrasonic cleaning device 50.

  It is checked whether the cleaning time calculated in step S25 and the battery driving time calculated in step S26 are equal to or longer than a predetermined time (step S27).

  If the cleaning operation is possible, the control unit 5 displays the cleaning possible time on the display unit and notifies that the cleaning is possible (step S28). The start signal is turned on with a foot switch or the like to start cleaning. At the start of cleaning, a soft start operation is performed. In the soft start operation, the cleaning liquid is first supplied at the start of cleaning, and then the ultrasonic vibrator is driven after a predetermined time has elapsed. Thereby, it is possible to prevent the ultrasonic vibrator from being blown away.

  On the other hand, when the cleaning time is short or the battery capacity is low, an alarm output and error display are performed on the display unit, and the cleaning operation is not performed (step S29). Further, when a large flow rate is required, connection of utility power such as the external cleaning liquid storage tank 33 is urged.

  In the above flowchart, if the power source and the cleaning liquid are always connected as utility, cleaning can be started without executing step S24 and subsequent steps. Further, when one of the power source and the cleaning liquid is not always connected as utility, the cleaning possible time is calculated to determine whether cleaning is possible.

  Further, a control unit in which the control unit and the control circuit of the oscillator are integrated is provided outside the oscillator, and the control unit is provided with the functions of the control unit and the control circuit of the oscillator. Read the data of the storage medium to recognize the type of ultrasonic cleaning tool, and according to the type of ultrasonic cleaning tool, it is possible to perform cleaning operation in light of the current status of the ultrasonic cleaning device related to the conditions required for cleaning It is also possible to determine whether or not and output the determination result.

  As described above, according to the present invention, the ultrasonic cleaning apparatus has a memory that stores data related to the ultrasonic cleaning tool that can be read by the oscillator, and the oscillator determines the type of the ultrasonic cleaning tool from the read data. The control unit 5 determines whether or not the cleaning operation is possible and outputs a display indicating that the cleaning operation is possible or an alarm indicating that the cleaning operation is not possible based on the determination result. It is possible to prevent defective cleaning and the like.

  Further, since the oscillator reads the data in the memory and controls the oscillator based on the read data, adjustment of the oscillator or the like is unnecessary, which is excellent in convenience and has high working efficiency. The oscillator control circuits 4 and 54 may be provided integrally with the oscillator as in the embodiment, but may be provided separately or may be provided integrally with the control unit 5.

  In addition, an ultrasonic cleaning device using a hand-held ultrasonic cleaning tool that injects cleaning liquid is equipped with a tank for cleaning liquid, the flow rate used by the ultrasonic cleaning tool is stored in the memory, and the liquid level sensor is stored in the tank for cleaning liquid. By providing this, the amount of the cleaning liquid in the cleaning liquid tank can be confirmed before the start of cleaning, and thereby the time available for cleaning can be known. Further, when the amount of the cleaning liquid in the cleaning liquid tank is small, an alarm indicating that the cleaning operation is not possible is output, so that emptying can be prevented.

  In addition, the ultrasonic cleaning apparatus of the present invention includes a cleaning liquid tank and a battery, so that a cleaning operation can be performed where there is no utility. Moreover, it is excellent in portability and the place to wash is not limited.

  Further, when the cleaning liquid supply utility is connected to the tank of the ultrasonic cleaning apparatus, an automatic water supply function of checking the signal from the liquid level sensor and automatically supplying water to the tank becomes possible.

  The present invention can be embodied in many forms without departing from its essential characteristics. Therefore, it is needless to say that the above-described embodiment is exclusively for description and does not limit the present invention.

DESCRIPTION OF SYMBOLS 1,50 Ultrasonic cleaning apparatus 2,51 Ultrasonic cleaning apparatus main body 3,52 Oscillator 4,54 Control circuit 5 Control unit 6 Connection box 7 Storage medium (memory)
8 Ultrasonic Cleaning Tool 20 Power Supply Unit 21 Converter 22 Battery 25 Cleaning Liquid Tank 26 Liquid Level Sensor 27 Flow Meter 28 Valve 29 Pump 32 Power 33 External Cleaning Liquid Storage Tank 34 Commercial Power Supply (AC Power Supply)
53 Output Adjustment Circuit 53a First Output Adjustment Circuit 53b Second Output Adjustment Circuit

Claims (4)

An ultrasonic cleaning apparatus having an ultrasonic cleaning tool having an ultrasonic vibrator and an oscillator that vibrates the ultrasonic vibrator of the ultrasonic cleaning tool and having a plurality of types of ultrasonic cleaning tools that can be replaced. And
Wherein the ultrasonic cleaning tool, at least, an identification number for each ultrasonic cleaning tools, the vibration frequency of the ultrasonic vibrator, comprising allowable input power, a storage medium storing the flow rate of data per unit of the cleaning liquid injection time,
Recognizes the type of the reading data of the storage medium ultrasonic cleaning tools, the vibration frequency of the ultrasonic transducers of the ultrasonic cleaning tool, is washed operable state to check whether the allowable input power can be output An ultrasonic cleaning apparatus comprising: a control unit that determines whether or not and outputs the determination result. The ultrasonic cleaning apparatus has a tank for storing a cleaning liquid, and includes a liquid level sensor in the tank, reads data relating to a flow rate per unit time of the cleaning liquid sprayed from the storage medium, and stores the liquid in the tank 2. The ultrasonic cleaning apparatus according to claim 1 , wherein a remaining amount of cleaning liquid in the tank is detected from a surface sensor and a cleaning possible time is displayed. The ultrasonic cleaning apparatus has a flow meter between the ultrasonic cleaning tool and the tank, detects a cleaning liquid to be used per unit time from the flow meter during cleaning, and detects a cleaning liquid in the tank from a liquid level sensor in the tank. The ultrasonic cleaning apparatus according to claim 2 , wherein a remaining cleaning liquid amount is detected and a possible cleaning time is calculated. The ultrasonic cleaning device has a rechargeable battery, wash checks the remaining amount of the battery before starting, claims, characterized in that to calculate the cleaning time possible from the remaining amount of the battery claim 1 of the claims 3, ultrasonic cleaning apparatus according to any one.

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