JP4349244B2 - Ultrasonic cleaning equipment - Google Patents

Description

  The present invention relates to an ultrasonic cleaning apparatus that is suitably implemented for oral cleaning, and that cleans an arbitrary site to be cleaned using vibration energy of ultrasonic waves in a relatively low frequency range.

  For example, FIG. 8 shows a so-called nozzle shower type ultrasonic cleaning apparatus that performs cleaning by transmitting ultrasonic vibration generated by an ultrasonic vibrator to a portion to be cleaned through liquid discharged from a nozzle. There is something like this. The ultrasonic cleaning device 111 discharges the cleaning liquid 113 from the spot or slit-shaped discharge port 112, radiates and propagates ultrasonic waves in the megahertz band into the cleaning liquid 113, and the object to be cleaned is in contact with the cleaning liquid 113. 114 is effectively operated.

  That is, in this ultrasonic cleaning apparatus 111, the ultrasonic vibrator 116 is attached to the bottom 115c of the ultrasonic transmission body 115 formed by closing one end of the cylindrical portion 115a with the end plate 115b, and the cylindrical portion 115a The outer peripheral surface is in close contact with the inner peripheral surface of the housing 117, and a storage portion 119 is formed by a cylindrical nozzle 118 attached to the tip of the housing 117, and the storage portion 119 is illustrated via a conduit 120. The cleaning liquid 113 is supplied from a pump that does not. As a result, the ultrasonic vibration 121 generated from the bottom 115 c of the ultrasonic transmission body 115 propagates through the cleaning liquid 113 and reaches the object 114 to be cleaned, and removes the surface contamination 122 together with the cleaning liquid 113.

  However, in this prior art, the object 114 to be cleaned is a semiconductor element or the like, and the surface dirt 122 is a minute dust or the like. The vibration frequency of the ultrasonic transducer 116 is 500 kHz to 5 MHz. At such a high frequency, the wavelength of the ultrasonic vibration is short, so that the ultrasonic vibration can be repeatedly reflected in the nozzle 118 and concentrated at the narrow nozzle 118 to be emitted to the object 114 to be cleaned. For this reason, the nozzle 118 can be narrowed down to a taper of about 1/5 of the diameter of the bottom 115c of the ultrasonic transmission body 115, for example.

  However, at such a high frequency, it is out of the cavitation region, and strong dirt such as plaque and sebum in the oral cavity cannot be removed (peeled). In order to remove the strong dirt in the oral cavity, cavitation generated by low-frequency ultrasonic vibration using low-frequency ultrasonic waves having a large vibration amplitude, for example, several tens of kHz, preferably about 20 to 60 kHz. It is necessary to use a shock wave generated when bubbles are broken.

Therefore, Patent Document 1 proposes such a low-frequency ultrasonic cleaning apparatus. The schematic structure is shown in FIG. The ultrasonic vibration generated by the ultrasonic transducer 101 is magnified by the ultrasonic transmission body 102 and radiated to the resonance chamber 103, superimposed on the water supplied from the water supply port 104, and then cleaned from the nozzle 105. Given to.
JP-A-57-65370

  However, in the above-described ultrasonic cleaning apparatus according to the prior art, the frequency of the ultrasonic vibration is considered to be 15 to 100 kHz from FIG. 9, but since the nozzle 105 is not spread, it has a long wavelength (low frequency). Sound waves are thought to disappear. That is, since such low-frequency ultrasonic waves are not reflected in the nozzle, it is necessary to form the nozzle widely. However, if the nozzles are formed wide and the ultrasonic vibrations are emitted toward the site to be cleaned, the water in the nozzles easily flows out. In particular, when starting with a violent water flow similar to a normal cleaning state at the time of starting, bubbles enter water in the nozzle. As a result, there is a problem in that the propagation efficiency of ultrasonic waves is significantly reduced. The bubbles gradually disappear, but may not completely disappear.

  An object of the present invention is to remove an air bubble that causes attenuation of the ultrasonic wave from an ultrasonic wave propagation path in an ultrasonic cleaning apparatus of a low frequency type, and to clean the portion to be cleaned efficiently. Is to provide.

The ultrasonic cleaning apparatus of the present invention supplies a liquid to a nozzle having an ultrasonic radiation surface inside, and causes the liquid to flow out of a discharge port formed in the nozzle and to come into contact with a site to be cleaned. In the low-frequency ultrasonic cleaning apparatus that forms a propagation path and cleans the portion to be cleaned, the discharge port is formed with a folded portion that is folded inward , at least at the time of activation. And a discharge control means for suppressing the discharge amount of the liquid as compared with the cleaning state .

  According to the above configuration, for example, a liquid is supplied to a nozzle formed in a horn shape toward the discharge port side, and the ultrasonic wave propagation path is obtained by allowing the liquid to flow out of the discharge port and contact with the site to be cleaned. And radiating a relatively low ultrasonic wave having a large vibration amplitude of, for example, several tens of kHz, preferably about 20 to 60 kHz, from the ultrasonic radiation surface formed in the nozzle, thereby cleaning the oral cavity or the like. In a so-called nozzle shower type low-frequency ultrasonic cleaning apparatus that removes strong stains on a part, a folded portion that is folded inward is formed at the discharge port.

  Therefore, at the start-up time when the liquid is not stored in the nozzle, the liquid is first stored in the nozzle by the turning-back portion, and is ejected from the discharge port when it is full. As a result, bubbles are not generated as soon as the liquid is ejected from the discharge port from immediately after startup, and the nozzle is filled (stored) with liquid without bubbles, so that it can be cleaned. Can move. Therefore, bubbles that cause attenuation of the ultrasonic waves can be eliminated from the ultrasonic wave propagation path, and the portion to be cleaned can be efficiently cleaned.

Moreover, even without least at startup, by providing the ejection control means for suppressing the discharge amount of liquid than cleaning state, during the start-up liquid is not stored in the nozzle, the liquid is filled in gradually To the nozzle Go. As a result, the nozzles are filled (stored) with a liquid free of bubbles without generating bubbles that may occur when starting up with the same intense water flow as in the normal cleaning state, and then the normal cleaning state is entered. be able to. Therefore, bubbles that cause attenuation of the ultrasonic waves can be eliminated from the ultrasonic wave propagation path, and the portion to be cleaned can be cleaned more efficiently.

  As in the case of the start-up, when shifting from a state where the liquid in the nozzle is low to a normal cleaning state, for example, when shifting from a high pressure cleaning mode in which dirt is removed with a violent water flow to a normal cleaning mode, a massage effect Even when the water flow is increased or decreased to switch from a weak state to a strong state, the discharge amount may be similarly suppressed so as to store the liquid in the nozzle.

  Furthermore, in the ultrasonic cleaning apparatus of the present invention, the nozzle is formed in a horn shape toward the discharge port side, and the folded portion has an end plate having an area larger than the ultrasonic radiation surface. It is characterized by comprising.

  According to said structure, when the said folding | turning part is formed with the end plate which has an opening part in center part, since this end plate obstruct | occludes a part of discharge outlet in order to store a liquid in a nozzle, In addition, by forming the shape so as to have an opening having an area larger than the ultrasonic radiation surface, it is possible to store the liquid in the nozzle while ensuring the propagation path of the ultrasonic wave from the ultrasonic radiation surface. it can.

  Moreover, in the ultrasonic cleaning apparatus of the present invention, the turning-back portion is made of a mesh plate.

  According to said structure, a liquid can be stored in a nozzle, ensuring the propagation path of the ultrasonic wave from the said ultrasonic radiation surface.

The ultrasonic cleaning device of the present invention, as described above, in the so-called nozzle shower type low frequency ultrasonic cleaning device, in the discharge port, forming a folded portion folded back inward , Discharge control means is provided that suppresses the amount of liquid discharged at least at the time of startup compared to the cleaning state .

  Therefore, at the start-up time when the liquid is not stored in the nozzle, the liquid is first stored in the nozzle by the turning-back portion, and is ejected from the discharge port when it is full. As a result, bubbles are not generated as soon as the liquid is ejected from the discharge port from immediately after startup, and the nozzle is filled (stored) with liquid without bubbles, so that it can be cleaned. Can move. Therefore, bubbles that cause attenuation of the ultrasonic waves can be eliminated from the ultrasonic wave propagation path, and the portion to be cleaned can be efficiently cleaned.

In addition, since the discharge control means suppresses the liquid discharge amount more than the cleaning state at least at the start-up, the liquid gradually fills the nozzle at the start-up when the liquid is not stored in the nozzle. The nozzle can be filled (stored) with a liquid without bubbles without generating bubbles that would occur when starting up with the same intense water flow as in the normal cleaning state, and then the normal cleaning state can be entered. it can. Therefore, bubbles that cause attenuation of the ultrasonic waves can be eliminated from the ultrasonic wave propagation path, and the portion to be cleaned can be cleaned more efficiently.

[Embodiment 1]
FIG. 1 is a cross-sectional view showing an internal configuration of an ultrasonic cleaning apparatus 1 according to the first embodiment of the present invention. The ultrasonic cleaning apparatus 1 is roughly arranged in a housing 2 and a nozzle 3 attached to the tip thereof, an ultrasonic vibrator 4 arranged in the housing 2, and arranged in the housing 2 and nozzle 3. In addition, an ultrasonic transmission body (horn) 5 having one end connected to the ultrasonic transducer 4, a drive circuit 6 for driving the ultrasonic transducer 4, and a liquid (cleaning agent) applied to the nozzle 3. And a liquid supply unit 7 for supplying water.

  The housing 2 and the nozzle 3 are made of an insulating material such as a synthetic resin, and the housing 2 is formed in a cone shape (diaphragm shape) that tapers from the tubular portion on the base end side toward the nozzle 3 side. The nozzle 3 is formed to be inclined, for example, by 45 ° from the distal end portion of the housing 2. Thus, when the user cleans the oral cavity while holding the ultrasonic cleaning apparatus 1 in his / her hand, the user can raise the oral cavity in a good posture without greatly raising the arm or lowering the face. Such a narrow part can be cleaned. The nozzle 3 includes a storage space 11 that stores liquid therein, and a discharge port 12 that discharges (spouts) the liquid stored in the storage space 11 to the outside.

  FIG. 2 is a cross-sectional view for explaining the shape of the nozzle 3 in detail. The nozzle 3 is formed in a horn shape toward the discharge port 12, and it should be noted that an end plate 13 is provided at the tip thereof. The end plate 13 is formed by turning the tip of the nozzle 3 inward by 90 °, closes the outer peripheral portion of the nozzle 3, and opens at the central portion as the discharge port 12. When the outer diameter of the ultrasonic transducer 4 is a, the inner diameter of the tip of the nozzle 3 is b, and the outer diameter of the discharge port 12 is c, a ≦ b, preferably a≈b, and b: c≈10: 12, preferably b: c = 10: 12.

  That is, the end plate 13 closes the tip of the nozzle 3 that expands in a horn shape, but secures an opening having an area larger than the ultrasonic radiation surface 5 a of the ultrasonic transducer 4. As a result, a part of the liquid flowing out from the nozzle 3 can be dammed and the liquid can be stored in the nozzle 3 while ensuring a propagation path of the ultrasonic wave from the ultrasonic radiation surface 5a. It is like that. For example, the outer diameter a of the ultrasonic transducer 4 is 10 mm, the inner diameter b of the tip portion of the nozzle 3 is 12 mm, and the outer diameter c of the discharge port 12 is 10 mm.

  The ultrasonic vibrator 4 is made of a piezoelectric vibrator made of a ceramic material such as lead titanate or quartz, and utilizes thickness vibration. The ultrasonic transmission body 5 is formed in a substantially truncated cone shape by a metal material, amplifies the ultrasonic vibration from the ultrasonic transducer 4, and radiates it from the ultrasonic radiation surface 5a. The ultrasonic transducer 4 is attached to the lower bottom surface 5d of the ultrasonic transmission body 5, and a portion 5b serving as a vibration node (minimum amplitude) is formed to protrude from the housing 2 on the lower bottom surface 5d side. The upper bottom surface side which is supported by the body 2c and becomes the ultrasonic radiation surface 5a is bent by 45 ° and faces the storage space 11. Accordingly, the ultrasonic radiation surface 5a is also inclined by 45 °, and ultrasonic waves are emitted in the inclination direction. In addition, as a suitable metal material which comprises this ultrasonic transmission body 5, light metals, such as titanium and aluminum, and its light alloy can be used.

  The tip of the ultrasonic transmission body 5 is airtightly held and fixed to the inner peripheral surface of the housing 2 by a holding member 14 made of an elastic body. The holding member 14 is preferably made of a material that maintains desired elasticity against repeated expansion and contraction and is hard to be cured, and is realized by an O-ring made of rubber. Corresponding to the holding member 14 made of the O-ring, a concave groove may be formed on the outer peripheral surface of the ultrasonic transmission body 5 to which the holding member 14 is fastened. Similarly, on the housing 2 side, a concave groove may be formed in a portion where the holding member 14 is in close contact with the inner peripheral surface. The depth of each concave groove is desirably about 1 mm or less, for example. Alternatively, instead of the concave groove, a pair (two strips) of protrusions that sandwich the holding member 14 made of the O-ring on the outer peripheral surface of the ultrasonic transmission body 5 or the inner peripheral surface of the housing 2 may be used.

  In the ultrasonic vibration, the vibration amplitude of the ultrasonic radiation surface 5a of the ultrasonic transmission body 5 is the largest, for example, about 20 μm at 40 kHz. Therefore, preferably, the difference between the outer diameter of the ultrasonic transmission body 5 and the outer diameter of the holding member 14 may be determined according to the amount of expansion / contraction due to vibration, the elasticity of the holding member 14, and the like. It is desirable to make it. In this way, the liquid for transmitting the ultrasonic wave is stored only in the storage space 11 so that the liquid does not flood the side surface and the ultrasonic transducer 4 other than the ultrasonic radiation surface 5 a of the ultrasonic transmission body 5. In addition, it can be hermetically sealed.

  The drive circuit 6 is configured by mounting electronic components constituting an oscillation circuit or the like on a circuit board. In the present embodiment, the drive circuit 6 is driven by a battery (not shown), but can be driven by a commercial power source. The drive circuit 6 radiates relatively low ultrasonic waves having a large vibration amplitude of, for example, several tens of kHz, preferably about 20 to 60 kHz, from the ultrasonic radiation surface 5a, and removes strong dirt on the site to be cleaned such as the oral cavity. (Peel). The configuration and operation of the drive circuit 6 will be described in detail later.

  The liquid supply unit 7 includes a tank 21 that stores liquid, a pump 22, and a pipe line 23. One end of the pipe line 23 is connected to the pump 22, bent around the inside of the housing 2, and then routed in the present invention. In the present invention, the central part of the ultrasonic transmission body 5 connected to the ultrasonic transducer 4 is used. And the other end faces the storage space 11 from the center of the ultrasonic radiation surface 5a of the ultrasonic transmission body 5. This pipe 23 is also formed by bending a portion in the nozzle 3 of the ultrasonic transmission body 5 to cause resistance against the liquid. As a result, the central portion of the ultrasonic radiation surface 5a is formed as described above. The liquid can be discharged from. A drive circuit which is a discharge control means for driving the pump 22 is provided in the drive circuit 6 for driving the ultrasonic transducer 4, and its operation will be described in detail later.

  In the above description, although the tank 21 is mounted on the ultrasonic cleaning apparatus 1, a large tank may be separately placed on a washstand or the like and one end of the pipe line 23 may be connected. Alternatively, one end of the pipe line 23 may be directly connected to a tap. When directly connected to a faucet, a valve for controlling the intermittent flow of water and the amount of water is used instead of the pump 22.

  In the ultrasonic cleaning apparatus 1 configured as described above, it should be noted that when the pump 22 and its drive circuit 6 serving as the discharge means are turned on, as shown in FIG. Every second, the liquid reservoir mode, the ultrasonic cleaning mode, and the high-pressure cleaning mode are repeated in this order.

  In the liquid reservoir mode, the liquid is supplied from the pump 22 at a flow rate lower than that of the ultrasonic cleaning mode, for example, 50 cc / min, and as shown in FIG. In this mode, the liquid is stored in the storage space 11 of the nozzle 3. In the ultrasonic cleaning mode, the number of rotations of the pump 22 is increased, and liquid is supplied at a flow rate of, for example, 50 to 150 cc / min. A propagation path of the ultrasonic wave 25 is created to the cleaning part 26, and the dirt 27 such as plaque and sebum is firmly removed by the shock wave generated when the cavitation bubbles generated by the ultrasonic vibration are destroyed (peeling). ) Mode. In the high-pressure cleaning mode, the number of rotations of the pump 22 is further increased in FIG. 4C, and as shown by reference numeral 28, liquid is ejected from the nozzle 3 at a higher flow rate than in the ultrasonic cleaning mode. In this mode, dirt 27 peeled off in the ultrasonic cleaning mode and large dirt 29 such as food residues that cannot be removed in the ultrasonic cleaning mode are washed away.

  In this way, by performing the liquid storage mode after the high pressure washing mode in which air may enter the storage space 11 due to the start-up in which the liquid does not accumulate in the storage space 11 of the nozzle 3 and the high pressure water flow, The liquid gradually fills the storage space 11. As a result, when the ultrasonic cleaning mode is performed, the storage space 11 is filled with a liquid without bubbles without generating bubbles that are generated when starting with a violent water flow similar to a normal cleaning state (storage). ) And then the ultrasonic cleaning mode can be entered. Therefore, bubbles that cause attenuation of the ultrasonic waves can be eliminated from the ultrasonic wave propagation path, and the portion to be cleaned 26 can be efficiently cleaned. In addition, by repeating a series of modes, it is possible to perform effective cleaning with a single unit for any dirt that is insufficient with ultrasonic waves alone.

  Here, the provision of the end plate 13 inhibits the propagation of ultrasonic waves. However, when formed with the dimensional ratio as described above, the transmission rate of ultrasonic waves is reduced by about 10 to 20%. When bubbles are generated in the propagation path, it is reduced by 60% or more. Therefore, it is extremely effective to provide the end plate 13 to perform liquid storage and form a propagation path without bubbles.

  Further, as in the case of the start-up or high-pressure washing mode, when moving from the state where the liquid in the storage space 11 is reduced to the ultrasonic washing mode, for example, the strength of the water flow is increased with the aim of a massage effect (with the high-pressure washing mode). In the case where the water flow is switched from a weak state to a strong state, etc., the discharge amount may be similarly suppressed so as to store the liquid in the storage space 11. The time and amount of water in each of the above modes are examples, and may be determined as appropriate.

  In the high-pressure cleaning mode, the ultrasonic wave may be emitted from the ultrasonic transducer 4, but the liquid is ejected vigorously from the substantially central portion of the ultrasonic radiation surface 5a. As described above, there is a possibility that the liquid does not spread over the entire ultrasonic radiation surface 5a, and there is a possibility that the liquid ejected vigorously includes air. Therefore, the cleaning effect by radiating ultrasonic waves cannot be expected so much, and the ultrasonic transducer 4 may be overheated, so it is preferable not to emit ultrasonic waves.

[Embodiment 2]
FIG. 5 is a cross-sectional view showing the internal configuration of the ultrasonic cleaning apparatus 31 according to the second embodiment of the present invention. The ultrasonic cleaning device 31 is similar to the ultrasonic cleaning device 1 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted. It should be noted that in the ultrasonic cleaning device 31, a net plate 34 is provided at the tip of the nozzle 33 instead of the end plate 13. An opening 35 is formed at the center of the mesh plate 34. The inner diameter of the opening 35 is larger than the diameter of the liquid in the high-pressure cleaning mode as shown in FIG. 6C. The roughness of the mesh is preferably about 1 mm that does not greatly block the ultrasonic wave propagation path and can provide a liquid storage effect. In the case where only the ultrasonic cleaning mode is performed without using the high pressure cleaning mode, the opening 35 is not formed, and the entire surface may be a mesh plate.

  FIG. 6 is a diagram for explaining the state in each mode in the ultrasonic cleaning device 31 configured as described above. In the ultrasonic cleaning device 31 as well as the ultrasonic cleaning device 1 described above, when the power is turned on, the liquid reservoir mode shown in FIG. The sonic cleaning mode and the high pressure cleaning mode shown in FIG. 6C are repeated in this order.

  In the liquid reservoir mode, liquid is supplied from the pump 22 at a lower flow rate than in the ultrasonic cleaning mode, and the liquid is stored in the storage space 11 of the nozzle 33 by the action of the mesh plate 34. In the ultrasonic cleaning mode, the flow rate of the liquid increases, and the liquid passes through the mesh plate 34 and reaches the site to be cleaned 26. In the high-pressure cleaning mode, the flow rate of the liquid is further increased and ejected vigorously from the conduit 23 and passes through the opening 35 of the mesh plate 34 to reach the site 26 to be cleaned.

  Even when the mesh plate 34 is used in this manner, the ultrasonic wave propagation efficiency is slightly reduced, as in the case of the end plate 13, but a liquid reservoir is used to cause attenuation of the ultrasonic wave from the ultrasonic wave propagation path. Thus, the to-be-cleaned portion 26 can be efficiently cleaned. In addition, by repeating a series of modes, it is possible to perform effective cleaning with a single unit for any dirt that is insufficient with ultrasonic waves alone.

[Embodiment 3]
FIG. 7 is a graph for explaining the operation of the drive circuit in the ultrasonic cleaning apparatus according to the third embodiment of the present invention. In the present embodiment, the drive circuit has a function of detecting the quality of the liquid reservoir when performing the ultrasonic cleaning mode. The ultrasonic transducer 4 is driven at a constant voltage and at the constant frequency by a drive circuit. The ultrasonic wave propagation speed (impedance of the propagation path) varies depending on whether or not the ultrasonic radiation surface 5a is immersed in the liquid, and the drive current of the ultrasonic transducer 4 changes. The drive circuit of the present embodiment detects the change in the drive current, and when the ultrasonic radiation surface 5a is exposed to the air in the ultrasonic cleaning mode, the liquid reservoir mode is performed again, and the ultrasonic cleaning mode is restored. To do.

  Specifically, when the ultrasonic radiation surface 5a is immersed in a liquid, the relationship between the driving frequency and the impedance is as shown in FIG. 7A, and when exposed to the air, the relationship is as shown in FIG. As shown. Specifically, the ultrasonic transducer 4 is driven at a constant voltage, and the drive frequency is set near the resonance point fr or the antiresonance point fa. In this state, when the ultrasonic radiation surface 5a is exposed to the air, as shown in FIGS. 7 (a) to 7 (b), the impedance is drastically lowered when driven near the resonance point fr. Therefore, the drive current increases, and when driving near the anti-resonance point fa, the impedance increases rapidly, and thus the drive current decreases. By detecting this current change, the drive circuit can detect whether the liquid reservoir is good or not, and can move to the ultrasonic cleaning mode after the completion of the liquid reservoir is detected.

  Therefore, even if the liquid flows out of the storage space 11 by the user turning the ultrasonic cleaning device away from the mouth and facing down during the ultrasonic cleaning, the liquid storage mode is performed again, which is effective. Ultrasonic cleaning can be performed.

  Further, when the ultrasonic vibrator 4 is vibrated near the end timing of the liquid reservoir mode and it is detected that the ultrasonic radiation surface 5a is immersed in the liquid, the time specified in the mode has not elapsed. Alternatively, the mode may be switched to the ultrasonic cleaning mode, or may not be switched to the ultrasonic cleaning mode if the ultrasonic radiation surface 5a is not immersed in the liquid even after the time specified in the mode has elapsed. Thereby, it is possible to cope with a change in pump discharge pressure due to the remaining amount of the tank 21.

It is sectional drawing which shows the internal structure of the ultrasonic cleaning apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing for demonstrating in detail the nozzle shape in the ultrasonic cleaning apparatus shown in FIG. It is a figure for demonstrating the operation mode of the ultrasonic cleaning apparatus of this invention. It is a figure for demonstrating operation | movement of the ultrasonic cleaning apparatus shown in FIG. It is sectional drawing which shows the internal structure of the ultrasonic cleaning apparatus which concerns on the 2nd Embodiment of this invention. It is a figure for demonstrating operation | movement of the ultrasonic cleaning apparatus shown in FIG. It is a graph for demonstrating operation | movement of the drive circuit in the ultrasonic cleaning apparatus which concerns on the 3rd Embodiment of this invention. It is sectional drawing which shows the internal structure of the ultrasonic cleaning apparatus of a prior art. It is sectional drawing which shows the internal structure of the ultrasonic cleaning apparatus of another prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,31 Ultrasonic cleaning apparatus 2 Housing 3 Nozzle 4 Ultrasonic transducer 5 Ultrasonic transmission body 5a Ultrasonic radiation surface 6 Drive circuit 7 Liquid supply part 11 Storage space 12 Discharge port 13 End plate 14 Holding member 21 Tank 22 Pump 23 Pipeline

Claims (3)

A liquid is supplied to a nozzle having an ultrasonic radiation surface inside, and an ultrasonic wave propagation path is formed by allowing the liquid to flow out from a discharge port formed in the nozzle and to come into contact with a portion to be cleaned. In the ultrasonic cleaning device of the low frequency type that was designed to clean the part,
The discharge port is formed with a folded portion folded back inward ,
An ultrasonic cleaning apparatus comprising: a discharge control unit that suppresses a discharge amount of liquid more than at a cleaning state at least at startup . Wherein the nozzle is formed in a horn shape toward the discharge port side, the fold-back necrosis unit, according to claim 1 Symbol mounting, characterized in that it consists end plate having an opening area greater than the ultrasonic radiation surface Ultrasonic cleaning device. The fold necrosis unit, according to claim 1 Symbol placement of the ultrasonic cleaning device, characterized in that it consists of mesh plate.

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