JP5663175B2 - プラズマ処理装置 - Google Patents

プラズマ処理装置 Download PDF

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Publication number
JP5663175B2
JP5663175B2 JP2010039379A JP2010039379A JP5663175B2 JP 5663175 B2 JP5663175 B2 JP 5663175B2 JP 2010039379 A JP2010039379 A JP 2010039379A JP 2010039379 A JP2010039379 A JP 2010039379A JP 5663175 B2 JP5663175 B2 JP 5663175B2
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waveguide
circular
electric field
plasma
stub
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JP2011176146A (ja
JP2011176146A5 (enExample
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田村　仁
仁 田村
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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  • Drying Of Semiconductors (AREA)
JP2010039379A 2010-02-24 2010-02-24 プラズマ処理装置 Active JP5663175B2 (ja)

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JP2010039379A JP5663175B2 (ja) 2010-02-24 2010-02-24 プラズマ処理装置

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JP2010039379A JP5663175B2 (ja) 2010-02-24 2010-02-24 プラズマ処理装置

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JP2011176146A JP2011176146A (ja) 2011-09-08
JP2011176146A5 JP2011176146A5 (enExample) 2013-04-04
JP5663175B2 true JP5663175B2 (ja) 2015-02-04

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9279505B2 (en) 2011-09-05 2016-03-08 Shanghai Hongy An Returnable Transit Packagings Co., Ltd. Valve core assembly and valve adopting the valve core assembly

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6470515B2 (ja) * 2014-07-08 2019-02-13 株式会社日立ハイテクノロジーズ プラズマ処理装置およびプラズマ処理方法
JP6442242B2 (ja) 2014-11-17 2018-12-19 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP6388554B2 (ja) * 2015-03-05 2018-09-12 株式会社日立ハイテクノロジーズ プラズマ処理装置
WO2023248347A1 (ja) * 2022-06-21 2023-12-28 株式会社日立ハイテク プラズマ処理装置および加熱装置
CN118830063A (zh) * 2023-02-15 2024-10-22 株式会社日立高新技术 等离子处理装置以及等离子处理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4837854B2 (ja) * 2001-09-28 2011-12-14 東京エレクトロン株式会社 整合器およびプラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9279505B2 (en) 2011-09-05 2016-03-08 Shanghai Hongy An Returnable Transit Packagings Co., Ltd. Valve core assembly and valve adopting the valve core assembly

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JP2011176146A (ja) 2011-09-08

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