JP5627537B2 - Component supply device, component supply method, and component inspection device - Google Patents

Description

  The present invention relates to a component supply device, a component supply method, and a component inspection device.

  In a component inspection apparatus that inspects various components such as a semiconductor chip, a tray on which a large number of components to be inspected are taken out from a magazine on the component supply side, and this tray is conveyed to a component supply position P1, The components are transferred one by one from the tray to a testing table of a testing apparatus that performs component inspection. When all the parts to be inspected in the tray become empty as the inspection progresses, the empty tray is returned to and stored in the magazine on the part supply side, and the tray loaded with the next part is set to the part supply position P1. Then, the parts are transferred again to the inspection table. In the following description, a tray on which a component is mounted is referred to as a component mounting tray, an empty tray on which no component is mounted is referred to as an empty tray, and the tray is simply referred to as a tray unless otherwise distinguished.

  On the other hand, after the inspection of each part is completed, the part determined to be non-defective is transferred to the tray that is transported to the part unloading position P2, and the part determined to be defective is transferred to the defective product storage box. When the tray at the part unloading position P2 is full of parts determined to be non-defective, the part mounting tray is transported to and stored in the part unloading side magazine, and the next empty tray is stored in the part unloading side magazine. Then, the components determined to be non-defective are mounted on the empty tray again after being conveyed from the component to the component unloading position P2.

  In such a component inspection apparatus, in order to avoid useless waiting time when the trays are switched to the magazines on the component supply side and the component carry-out side, in the conventional technology, the component supply position P1 is used. A tray standby position is installed in front of and behind the component unloading position P2, and the component mounting tray at the component supply position P1 or the component unloading position P2 and the empty tray at the standby position are rotated and replaced. The thing provided with the rotation mechanism is proposed (for example, refer to the following patent documents 1).

  According to this prior art, during component inspection, on the component supply side, the component mounting tray is conveyed from the component supply side magazine to the component supply position P1 in front of the inspection table, and on the component unloading side, the empty tray is unloaded. Since it is possible to carry and wait in advance from the magazine on the side to the component unloading position P2, it is possible to reduce the waiting time that occurs when the tray is switched to each magazine on the component supply side and the component unloading side. .

Special Publication WO2008-090976

  However, a tray rotating mechanism that replaces the component mounting tray and the empty tray by replacing the tray mounting position by placing a standby position of the tray in front of the component supply position P1 and behind the component unloading position P2 as in the conventional technique described above. When provided, a mechanism for transporting the tray between the magazine on the component supply side and the component supply position P1, a mechanism for transporting the tray between the magazine on the component carry-out side and the component carry-out position P3, and the tray described above It is necessary to prevent the rotating mechanisms from mechanically interfering with each other. Therefore, when viewed in plan, the arrangement space of each mechanism becomes large, and there is a problem that the whole apparatus becomes large and difficult to downsize. .

  The present invention has been made in order to solve the above-described problems, and can avoid a wasteful waiting time when replacing a tray on which a component is mounted with a magazine. It is an object of the present invention to provide a component supply device, a component supply method, and a component inspection device that can reduce the size of the device and reduce the size of the device.

The component supply device according to the present invention includes a magazine for stocking a plurality of trays on which components are mounted, a tray transfer mechanism for loading and unloading the tray with respect to the magazine, and the tray transfer mechanism from the magazine to the tray transfer position. A tray transport mechanism is provided for receiving the transported tray and transporting it to a predetermined component supply position, and the tray is placed at the tray transfer position for delivering the tray between the tray transfer mechanism and the tray transport mechanism. A tray retraction mechanism that temporarily holds and retreats from the planar operation range of the tray transfer mechanism or the tray transport mechanism is provided above the tray transfer mechanism or the tray transport mechanism . .

Further, the component supply method according to the present invention uses the component supply device described above, and transports an empty tray that has been emptied by supplying components at the component supply position to the tray transfer position by the tray transport mechanism, The tray retraction mechanism is temporarily retracted vertically above the tray transfer mechanism and the tray transport mechanism , and in this state, the component transfer tray is taken out from the magazine by the tray transfer mechanism. Then, the empty tray that has been retracted by the tray retracting mechanism is transferred to the tray transfer mechanism during the period until the component mounting tray becomes empty at the component supplying position. The empty tray is stored in the magazine, and the component mounting tray in the magazine is held by the tray transfer mechanism, and the next component mounting tray is stored. It is characterized by performing the conveyance preparation.

  The component inspection apparatus according to the present invention includes the component supply device having the above-described configuration and a testing device that performs an inspection of each component mounted on the component mounting tray conveyed to the component supply position. It is characterized by that.

According to the present invention, the tray retracting mechanism is provided above the tray transfer mechanism and the tray transport mechanism, so that the tray transfer operation by the tray transfer mechanism and the tray transport operation of the tray transport mechanism do not interfere with each other. Thus, it is possible to smoothly store the empty tray in the magazine and take out the component mounting tray from the magazine. For this reason, unlike the prior art, it is not necessary to provide a tray rotating mechanism that replaces the component mounting tray and the empty tray by installing a standby position of the tray in front of the component supply position. Therefore, it is possible to reduce the size of the apparatus and to reduce the size of the apparatus.

Moreover, when replacing the tray with the magazine on the component supply side, the component loading tray is removed from the magazine while the empty tray is temporarily retracted above the tray transfer mechanism and tray transport mechanism by the tray retract mechanism. During the period until the component mounting tray is emptied at the component supply position, the empty tray that has been evacuated by the tray evacuation mechanism is stored in the magazine, and the component mounting tray in the magazine Next, when the tray in the component supply position becomes an empty tray, the empty tray is temporarily retracted again by the tray retracting mechanism, and the next component mounting tray is immediately placed in the magazine. And can be supplied to the component supply position. For this reason, when the tray is replaced with the magazine, it is possible to minimize the occurrence of a wasteful waiting time, and the throughput is improved.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan layout view showing an overall schematic configuration of a component inspection apparatus according to Embodiment 1 of the present invention. The tray used with the apparatus is shown, The figure (a) is a top view, The figure (b) is a front view, The figure (c) is a side view. It is a schematic plan view which shows the state which pulled out the tray which mounted components by the tray transfer mechanism which comprises the apparatus. It is a schematic side view which shows the state which pulled out the tray which mounted components by the tray transfer mechanism which comprises the apparatus. It is a schematic plan view which shows the state which inserted the tray support arm of the tray transfer mechanism which comprises the apparatus into the magazine. It is a schematic front view which shows the state which inserted the tray support arm of the tray transfer mechanism which comprises the apparatus into the magazine. It is a schematic side view which shows the state which inserted the tray support arm of the tray transfer mechanism which comprises the apparatus into the magazine. It is explanatory drawing which expands and shows the relationship of the delivery of the tray by the shelf in a magazine, and a tray support arm. It is a schematic front view which shows each structure of the tray conveyance mechanism and tray evacuation mechanism which comprise the component inspection apparatus which concerns on Embodiment 1 of this invention, and the arrangement | positioning relationship between these each mechanism and a tray transfer mechanism. FIG. 10 is a schematic side view of FIG. 9. It is explanatory drawing which shows the procedure of tray conveyance operation | movement of the components inspection apparatus which concerns on Embodiment 1 of this invention. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus. It is explanatory drawing which shows a part of tray conveyance operation state by the component inspection apparatus.

Embodiment 1 FIG.
FIG. 1 is a plan layout view showing an overall schematic configuration of a component inspection apparatus according to Embodiment 1 of the present invention.

  The component inspection apparatus according to the first embodiment includes a testing device A that performs inspection of various components 1 such as a semiconductor chip, a component supply device B that supplies the component 1 to the testing device A, and a testing device A. A component unloading device C for unloading the component 1 after the inspection is provided.

  The above-described testing apparatus A individually takes out the components to be inspected from the inspection table 6 on which the component 1 to be inspected is placed and the component mounting tray 2 to be supplied from the component supply device B. A component pick-up mechanism (not shown) having a robot arm or the like that transports and picks up the inspected component 1 from the inspection table 6 and transfers it to the component carry-out device C. Each component 1 placed on the inspection table 6 Are equipped with inspection equipment (not shown) for inspecting various electrical characteristics.

  The component supply apparatus B loads and unloads the tray 2 with respect to the magazine 3 that stocks a large number of trays 2 on which the components 1 are mounted, and transfers the tray 2 to and from the tray transport mechanism 5 described later. The tray transfer mechanism 4 and the component mounting tray 2 transferred by the tray transfer mechanism 4 are transported to the component supply position P1 immediately before the inspection table 6 of the testing apparatus A, and all the components are supplied to the inspection table 6. The tray transport mechanism 5 that transports the empty tray 2 after being transferred to the tray transfer position P3 adjacent to the magazine 3, and the planar transfer mechanism 4 and the tray transport mechanism 5 that temporarily hold the empty tray. A tray retracting mechanism 7 for retracting from the operating range is provided.

  On the other hand, the parts unloading device C is a magazine 12 for stocking a large number of trays loaded with components after inspection by the testing device A, and each of the components determined to be non-defective products transferred to the component unloading position P2 by the testing device A. A tray transport mechanism 13 that is mounted on the tray 2 and transports it to the tray transfer position P4, and a tray transfer mechanism that receives the tray 2 transported to the tray transfer position P4 by the tray transport mechanism 13 and stores it in the magazine 12 ( (Not shown), and a temporary storage place 9 for temporarily storing non-defective parts after inspection is provided between the testing device A and the parts unloading position P2. In addition, a defective product storage box 11 is provided for storing parts determined to be defective after the inspection.

  The structure of the magazine 12, the tray transfer mechanism (not shown), and the tray transport mechanism 13 constituting the component carry-out device C are the same as the magazine 3, the tray transfer mechanism 4, and the tray transport mechanism constituting the component supply device B. This is basically the same as each structure of No. 5. Therefore, here, the configuration on the component supply device B side will be mainly described. For convenience of explanation, directions orthogonal to each other on the horizontal plane are defined as an X-axis direction and a Y-axis direction, and a vertical direction orthogonal to the horizontal plane is defined as a Z-axis direction.

  Here, as shown in FIG. 2, the tray 2 includes a component mounting plate 2a on which a large number of components 1 are mounted, and a flange portion provided at the front and rear ends of the component mounting plate 2a along the X-axis direction. 2b. The component placement plate 2a is provided with positioning holes 2c that fit into protrusions provided on a shelf, which will be described later of the magazine 3, and a tray placement table of the tray transport mechanism 5, at two front and rear positions, and each flange portion 2b. Are provided with positioning holes 2d for fitting with protrusions 4e provided on a later-described tray support arm 4c of the tray transfer mechanism 4.

  As shown in FIG. 4, in the magazine 3 on the component supply side, shelves 3b for stocking a large number of trays 2 are provided in multiple stages along the Z-axis direction in a housing 3a, and each shelf 3b is a shelf fixing plate 3c. These shelves 3b and shelf fixing plates 3c are integrally moved up and down along the Z-axis direction by a drive motor (none of which is shown) along a guide member provided on the housing 3a. It is configured to move. Each shelf 3b is provided with a pair of positioning projections 3d provided on the component placement plate 2a of the tray 2 and fitted in the positioning holes 2c described above and back and forth along the X-axis direction.

  The tray transfer mechanism 4 follows the Y-axis direction while maintaining a constant distance between the magazine 3 and the tray transfer position P3 immediately above the tray transport mechanism 5 without changing the height of the tray 2 in the Z-axis direction. Configured to move. That is, the tray transfer mechanism 4 has a pair of left and right guide rails 4a extending to the vicinity of the housing 3a of the magazine 3 along the Y-axis direction, as shown in FIGS. A sliding member 4b that is driven along the guide rail 4a by a drive motor (not shown) is installed between 4a, and a pair of left and right trays that extend along the Y-axis direction are mounted on the sliding member 4b. Each base end portion of the tray support arm 4c is attached so as to be movable along the X-axis direction, and a pair of cylinders 4d for expanding and reducing the distance between the pair of tray support arms 4c is attached. A pair of positioning projections 4e that are provided on the flange portion 2b of the tray 2 and are fitted into the positioning holes 2d are provided at the tip of the tray support arm 4c.

  Here, paying attention to the relationship of tray transfer between the magazine 3 and the tray transfer mechanism 4, only the tray support arm 4c is placed in the housing 3a of the magazine 3 as shown in a partially enlarged view in FIG. When the tray 2 is taken out from the magazine 3 by inserting the shelf 3b on which the tray 2 is placed in the magazine 3, the tray transfer mechanism 4 is inserted into the gap between the shelf 3b and the flange portion 2b of the tray. Since the tray support arm 4c can be inserted, when the rack 3b is lowered after the space between the left and right sides of the tray support arm 4c is narrowed by the cylinder 4d, the protrusion 4e at the tip of the tray support arm 4c is formed on the flange portion 2b of the tray 2. The protrusion 3d of the shelf 3b of the magazine 3 is disengaged from the positioning hole 2c of the component placing plate 2a while being fitted into the positioning hole 2d. Thereby, since the tray 2 is placed on the tray support arm 4c, the tray support arm 4c on which the tray 2 is placed can be pulled out from the magazine 3.

  On the contrary, when the tray support arm 4c on which the tray 2 is placed is inserted into the housing 3a of the magazine 3 and the tray 2 is stored in the magazine 3, when the shelf 3b of the magazine 3 is slightly raised, the projection 3d fits into the positioning hole 2c of the component mounting plate 2a, and the shelf 3b pushes up the bottom of the component mounting plate 2a, so that the protrusion 4e at the tip of the tray support arm 4c is positioned in the positioning hole 2d of the flange portion 2b of the tray 2. Deviate from. Therefore, the tray 2 is placed on the shelf 3b, and the interval between the tray support arms 4c of the tray transfer mechanism 4 can be increased by the cylinder 4d. Thus, the tray support arm 4c is released from the tray placement state and can be pulled out from the magazine 3 alone.

  The tray transport mechanism 5 horizontally moves along the X-axis direction between the component supply position P1 immediately before the inspection table 6 of the testing apparatus A and the tray transfer position P3 adjacent to the magazine 3, and the tray transfer position. It is configured to move up and down along the Z-axis direction within a range that does not interfere with the tray transfer mechanism 4 at P3.

  That is, as shown in FIG. 9 and FIG. 10, the tray transport mechanism 5 includes a guide shaft 5a extending along the X-axis direction from the component supply position P1 to the tray transfer position P3. A tray placing table 5b on which the tray 2 is placed. Further, a stage 5c driven along the guide shaft 5a by a drive motor (not shown) is slidably provided on the guide shaft 5a of the tray transport mechanism 5, and the tray mounting table 5b is moved up and down on the stage 5c. A pair of table elevating mechanisms 5d are integrally attached. Here, the table lifting mechanism 5d mounts the tray mounting table 5b on the tray support arm 4c along the Z-axis direction so as not to interfere with the movement of the tray 2 along the Y-axis direction by the tray transfer mechanism 4. For example, a rack and pinion mechanism (not shown) and a drive motor for driving the rack and pinion mechanism are used. The tray mounting table 5b is provided with a pair of positioning projections 5e inserted in the positioning holes 2c of the component mounting plate 2a of the tray 2 at the front and rear along the X-axis direction.

  Here, paying attention to the transfer relationship of the tray 2 between the tray transfer mechanism 4 and the tray transfer mechanism 5, the tray is placed on the tray support arm 4c of the tray transfer mechanism 4 at the tray transfer position P3. When the tray mounting table 5b is lifted by the table lifting mechanism 5d of the tray transport mechanism 5, the projection 5e of the tray mounting table 5b is fitted into the positioning hole 2c of the component mounting plate 2a, and the tray The protrusion 4e at the tip of the tray support arm 4c of the transfer mechanism 4 is disengaged from the positioning hole 2d of the flange portion 2b of the tray 2. Therefore, the tray 2 is placed on the tray placement table 5b, and the interval between the tray support arms 4c of the tray transfer mechanism 4 can be increased by the cylinder 4d, whereby the tray support arm 4c is The tray is released.

  On the other hand, when the tray 2 is placed on the tray placement table 5b of the tray transport mechanism 5 at the tray transfer position P3, if the tray placement table 5b is raised by the table lifting mechanism 5d, the tray Since the tray support arm 4c can be inserted into the gap between the two flange portions 2b, the horizontal distance between the two tray support arms 4c is narrowed by the cylinder 4d and the tray mounting table 5b is lowered by the table lifting mechanism 5d. Let Then, the protrusion 4e at the tip of the tray support arm 4c is fitted into the positioning hole 2d of the flange portion 2b of the tray 2, and the protrusion 5e of the tray mounting table 5b is removed from the positioning hole 2c of the component mounting plate 2a of the tray 2. . Therefore, the tray placement state by the tray placement table 5b is released, and the tray 2 is placed on the tray support arm 4c.

  The tray retracting mechanism 7 temporarily holds the empty tray 2 and retracts it so as not to interfere with the planar operation range of the tray transfer mechanism 4 and the tray transport mechanism 5. Is provided. That is, the tray retracting mechanism 7 includes a plurality of suction pads 7a for sucking the tray 2, a pad mounting member 7b to which the suction pads 7a are fixed, and the pad mounting member 7b ascending and descending along the Z-axis direction. And a pad lifting mechanism 7c for adjusting the height position of the suction pad 7a. Here, the suction pad 7a is connected to a vacuuming device (not shown) and sucks and holds the component placing plate 2a of the tray 2. The pad lifting mechanism 7c includes, for example, a rack and pinion mechanism (not shown). It is comprised by the drive motor to drive.

  When the tray support arm 4c of the tray transfer mechanism 4 holds the tray at the tray transfer position P3, the pad lifting mechanism 7c has the suction pad 7a above the position of the held tray 2. In the state where the tray mounting table 5b is lowered by the table lifting mechanism 5d of the tray transport mechanism 5, the suction pad 7a is placed on the tray mounting table 5b. It is configured to be movable up and down so as to descend to a position where it abuts.

  Next, in the component inspection apparatus having the above-described configuration, the tray conveying operation accompanying the component inspection will be described with reference to the operation procedure explanatory diagram shown in FIG. 11 and the state explanatory diagrams of the respective parts shown in FIGS. To do. Note that a series of control operations of each mechanism of the apparatus is performed by, for example, sequence control by a computer (not shown).

  When the component mounting tray 2 is transported to the component supply position P1 adjacent to the testing device A by the tray transport mechanism 5 of the component supply device B, the component pickup mechanism including a robot arm (not shown) of the testing device A is used. The components 1 mounted on the component mounting tray 2 are transferred to the inspection table 6 one by one. When various electrical characteristics of each component 1 placed on the inspection table 6 are inspected by an inspection device (not shown), the inspected component 1 is taken out from the inspection table 6 by the component pickup mechanism, and the components are carried out. Transferred to device C.

  Here, on the component supply side, when all the components 1 in the tray 2 conveyed to the component supply position P1 by the tray conveyance mechanism 5 are transferred to the testing apparatus A and become the empty tray 2, the empty tray 2 is transferred to the tray. It is conveyed by the mechanism 5 from the component supply position P1 to the tray transfer position P3 (see FIG. 12).

  When the empty tray 2 is transported to the tray transfer position P3, the suction pad 7a of the tray retracting mechanism 7 is lowered by the pad elevating mechanism 7c and mounted on the tray mounting table 5b. The empty tray 2 is abutted against the mounting plate 2a and sucked by the suction pad 7a (see FIGS. 11 (a), (b), and FIG. 13). When the empty tray 2 is sucked by the suction pad 7a, the empty tray 2 is lifted in the Z-axis direction to a position above the operation range along the Y-axis direction of the tray transfer mechanism 4 by the pad lifting mechanism 7c and retracted. (See FIGS. 11 (c) and 14).

  In the state where the empty tray 2 is retracted by the tray retracting mechanism 7, the component mounting tray 2 is already placed on the tray support arm 4c, as will be described later, so that the drive motor of the tray transfer mechanism 4 is activated. The sliding member 4b is moved along the guide rail 4a. As a result, the component mounting tray 2 placed on the tray support arm 4c is taken out of the magazine 3 and conveyed to the external tray transfer position P3 (FIGS. 11C, 11D, 15 and 3). FIG. 4).

  Thus, when the component mounting tray 2 is transferred to the tray transfer position P3 by the tray transfer mechanism 4, the tray mounting table 5b of the tray transport mechanism 5 that has already been moved to the tray transfer position P3 is the table. It is raised by the elevating mechanism 5d (see FIGS. 11 (d), (e), and FIG. 16). Thereby, the protrusion 5e of the tray mounting table 5b is fitted into the positioning hole 2c of the component mounting plate 2a, and the bottom surface of the component mounting plate 2a of the component mounting tray 2 is brought into contact with the upper surface of the tray mounting table 5b. Thereby, the protrusion 4e at the tip of the tray support arm 4c is removed from the positioning hole 2d of the flange portion 2b of the tray 2, and the component mounting tray 2 is placed on the tray placing table 5b. Therefore, the tray support arm 4c is released from the tray placement state by expanding the interval between the tray support arms 4c of the tray transfer mechanism 4 by the cylinder 4d (see FIG. 17).

  Next, after the tray mounting table 5b on which the component mounting tray 2 is mounted is lowered by the table elevating mechanism 5d (see FIGS. 11 (f), (g), and FIG. 18), the stage 5c is moved to the tray mounting table. 5b is conveyed along the guide shaft 5a to the component supply position P1, and the transfer of the component 1 to the inspection table 6 by the testing apparatus A is resumed (see FIG. 19).

  While the transfer of the component 1 to the testing device A is resumed, the empty tray 2 is stored in the magazine 3 on the component supply side and the component mounting tray 2 is held by the tray support arm 4c in the following procedure. To the state. The procedure will be described below.

  First, the interval between the tray support arms 4c of the tray transfer mechanism 4 is narrowed by the cylinder 4d (see FIG. 20). Subsequently, the empty tray 2 sucked by the suction pad 7a of the tray retracting mechanism 7 is lowered to the height of the tray support arm 4c of the tray transfer mechanism 4 by the pad lifting mechanism 7c (see FIG. 11 (G)). When the suction of the empty tray 2 by the suction pad 7a is stopped, the protrusion 4e at the tip of the tray support arm 4c is inserted into the positioning hole 2d of the flange portion 2b of the empty tray 2, and the empty tray 2 is supported by the tray support arm 4c. (See FIG. 11 (h) and FIG. 21). Thus, when the empty tray 2 is supported by the tray support arm 4c, the suction pad 7a is raised by the pad lifting mechanism 7c of the tray retracting mechanism 7, and is retracted from the operation range along the Y-axis direction of the tray transfer mechanism 4. Each shelf 3b and shelf fixing plate 3c of the magazine 3 are integrally raised along the Z-axis direction by a drive motor (not shown) (see FIGS. 11 (L) and 22).

  Next, with the empty tray 2 supported by the tray support arm 4c, the slide member 4b is slid along the guide rail 4a in the Y-axis direction by a drive motor (not shown) to bring the tray support arm 4c into the magazine 3. Insert (refer to FIG. 11 (nu), (le)). At that time, when the shelf 3b of the magazine 3 is slightly raised, the projection 3d is inserted into the positioning hole 2c of the component placing plate 2a, and the component placing plate 2a of the empty tray 2 is brought into contact with the upper surface of the shelf 3b and lifted. Therefore, the protrusion 4e at the tip of the tray support arm 4c is disengaged from the positioning hole 2d of the flange portion 2b of the tray 2. Accordingly, since the empty tray 2 is placed on the shelf 3b, the interval between the tray support arms 4c is increased by the cylinder 4d, and the tray support arm 4c is released from the tray placement state. Subsequently, by moving the sliding member 4b along the guide rail 4a by the drive motor, the tray support arm 4c is independently pulled out from the magazine 3 to the tray transfer position P3 (FIG. 11 (W)).

  Subsequently, each shelf 3b and shelf fixing plate 3c of the magazine 3 are integrally raised one step along the Z-axis direction by a drive motor (not shown), and the shelf 3b on which the component mounting tray 2 is placed is brought to the tray removal height. Pull it up (see FIG. 11 (a)). In that case, the shelf 3 b on which the next component mounting tray 2 is placed reaches the height of the tray support arm 4 c of the tray transfer mechanism 4.

  In this state, the sliding member 4b is slid in the Y-axis direction along the guide rail 4a by a drive motor (not shown), and the tray support arm 4c is inserted into the magazine 3 (FIG. 11 (f), FIG. 5, FIG. (See FIG. 7). At that time, if the shelf 3b on which the component mounting tray of the magazine 3 is placed is slightly raised, the tray support arm 4c can be inserted into the gap between the shelf 3b and the flange portion 2b of the component mounting tray 2, The rack 3b is lowered after the distance between the left and right of the tray support arm 4c is narrowed by the cylinder 4d. As a result, the protrusion 4e at the tip of the tray support arm 4c is fitted into the positioning hole 2d of the flange portion 2b of the component mounting tray 2, and the protrusion 3d of the shelf 3b of the magazine 3 is disengaged from the positioning hole 2c of the component placing plate 2a. . As a result, in the magazine 3, the component mounting tray 2 is placed on the tray support arm 4c (see FIG. 11A).

  In this way, while the parts 1 in the tray 2 at the parts supply position P1 are transferred to the testing apparatus A and inspected by the above-described series of operations, the empty tray 2 is removed from the parts supply side magazine. 3 and the component mounting tray 2 can be held by the tray support arm 4c. When the tray 2 at the component supply position P1 becomes the empty tray 2, the empty tray 2 is moved to the tray retracting mechanism. By temporarily retracting again at 7, the component mounting tray 2 full of the next component 1 can be immediately removed from the magazine 3 and supplied to the component supply position P1. As a result, when the tray 2 is replaced with the magazine 3, it is possible to minimize the occurrence of a wasteful waiting time, and the component supply throughput is improved.

  Next, the unloading operation of the component 1 by the component unloading device C provided on the component unloading side will be described.

  When the inspection of the component 1 placed on the inspection table 6 of the testing device A is completed, each component 1 after the inspection is inspected one by one by the component pickup mechanism including a robot arm (not shown) of the testing device A. It is taken out from the table 6 and once transferred to the temporary place 9.

  Then, the component 1 determined to be defective is immediately conveyed to the defective product storage box 11, while the component determined to be non-defective is moved from the empty tray 2 to the component unloading position P2 by the tray conveying mechanism 13 on the component unloading side. If it has already arrived, the components determined to be non-defective are sequentially mounted on the empty tray 2 by the above-described component pickup mechanism. When the tray 2 becomes full with the components 1 determined to be non-defective, the tray 2 is transported to the tray transfer position P4 by the tray transport mechanism 13 and then stored in the magazine 12 by the tray transfer mechanism (not shown).

  Next, after the empty tray 2 is taken out from the magazine 12 to the tray transfer position P4 by the tray transfer mechanism, it is transferred to the component carry-out position P2 by the tray transfer mechanism 13. In the middle of transporting the empty tray 2 to the component unloading position P2 using the tray transfer mechanism and the tray transport mechanism 13, the component 1 determined to be non-defective is temporarily stored in the temporary placement place 9. When the new empty tray 2 arrives at the component unloading position P2, the component 1 in the temporary placement place 9 is transferred to the empty tray 2.

  In addition, since the tray 2 is loaded and unloaded from the magazine by the tray transfer mechanism of the component unloading device C and the tray 2 is transported by the tray transport mechanism 13, the operation is basically the same as that of the component supply device B. Detailed description is omitted here.

  As described above, on the component unloading side, the non-defective product is stored until the new empty tray 2 is transported to the component unloading position P2 after the component loading tray 2 that is fully loaded at the component unloading position P2 is stored in the magazine 3. Since the determined component 1 can be temporarily stored in the temporary placement place 9, it is possible to minimize the occurrence of a wasteful waiting time when the tray 2 is replaced with the magazine 3.

In the first embodiment, it has been described that the raising / lowering of the shelf 3b of the magazine 3, the raising / lowering of the tray mounting table 5b, the sliding of the tray support arm 4c, and the sliding of the stage 5c are all operated by a drive motor. However, the present invention is not limited to this, and other well-known linear motion mechanisms such as an air cylinder mechanism can be employed.
Further, the present invention is not limited to the aspect of the first embodiment, and various modifications can be made without departing from the spirit of the present invention.

A testing device, B component supply device, C component unloading device,
P1 parts supply position, P2 parts carry-out position, P3, P4 tray transfer position,
1 part, 2 trays, 3 magazines, 4 tray transfer mechanism, 5 tray transfer mechanism, 6 inspection table, 7 tray retraction mechanism, 9 temporary storage place, 12 magazine,
13 Tray transport mechanism.

Claims (5)

A magazine for stocking a plurality of trays on which components are mounted, a tray transfer mechanism for inserting / removing a tray to / from the magazine, and the tray transferred from the magazine to the tray transfer position by the tray transfer mechanism. In a component supply apparatus equipped with a tray conveyance mechanism that conveys to a component supply position of
A planar operating range of the tray transfer mechanism and the tray transport mechanism by temporarily holding the tray at the tray transfer position where the tray is transferred between the tray transfer mechanism and the tray transport mechanism. A component supply device, wherein a tray retracting mechanism for retracting from a tray is provided above the tray transfer mechanism and the tray transport mechanism . The tray retraction mechanism includes a suction pad that sucks the tray, and a lifting mechanism that lifts and lowers the suction pad in a vertical direction perpendicular to a planar operation range of the tray transfer mechanism and the tray transport mechanism. The component supply apparatus according to claim 1, wherein: A component supply method using the component supply apparatus according to claim 1 or 2,
The empty tray that has been emptied by supplying the components at the component supply position is transported to the tray transfer position by the tray transport mechanism, and the tray transfer mechanism and the tray are temporarily moved vertically by the tray retracting mechanism. In this state, the component loading tray is taken out from the magazine by the tray transfer mechanism and conveyed to the component supply position by the tray conveyance mechanism, and the component mounting tray is empty at the component supply position. The empty tray that has been evacuated by the tray evacuation mechanism is transferred to the tray transfer mechanism to store the empty tray in the magazine, and the component mounting tray in the magazine. In a state where the tray is held by the tray transfer mechanism to prepare for the conveyance of the next component mounting tray. A testing apparatus that includes the component supply device according to claim 1 or 2 and that inspects each component mounted on a component mounting tray conveyed to the component supply position. Parts inspection equipment. A component unloading device for unloading the components after the inspection by the testing device is provided. The component unloading device is a magazine for stocking a plurality of trays on which the components tested by the testing device are mounted, and the components by the testing device. A tray transport mechanism for loading each component transferred to the carry-out position onto the tray and transporting it to the tray transfer position, and a tray transfer mechanism for receiving the tray transported to the tray transfer position by the tray transport mechanism and storing it in the magazine. 5. A temporary storage place is provided between the testing device and the parts unloading position, and a temporary storage place for temporarily storing the parts after the inspection is provided. Parts inspection equipment.

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