JP5620192B2 - Ozone gas sterilizer - Google Patents

Description

  The present invention relates to an ozone gas sterilization apparatus in which ozone gas is sterilized by penetrating an object to be sterilized.

  In medical, nursing, pharmaceutical and other institutions, various objects such as surgical tools, lab coats, masks, bedding, laboratory instruments, precision machines, etc. need to be sterilized. As a sterilization process, a high-temperature heat sterilization process has been widely used. However, high temperature heat sterilization cannot be performed on an object to be sterilized with poor heat resistance. Therefore, a low temperature sterilization method using ethylene oxide is conventionally known as a method for sterilizing an object to be sterilized that cannot be subjected to high temperature heat sterilization.

  On the other hand, the ethylene oxide has a problem in terms of safety because it has carcinogenicity in addition to acute toxicity and chronic toxicity. In addition, since it takes a long time to degas the residual gas, it has a weak point that it takes 10 hours or more for the treatment, and there is a problem in terms of efficiency. Therefore, the inventor of this application has been researching and developing for the realization of sterilization using ozone gas as a low-temperature sterilization technique that can be sterilized with high safety and efficiency. Non-patent document 1). The method of sterilization using ozone gas has the advantage of high safety and efficient sterilization.

  For such sterilization using ozone gas, research and development have been extensively conducted. In particular, the ozone gas sterilization under negative pressure described in Patent Documents 1 and 2 has a high sterilization effect even on sterilized objects that are difficult for gas to penetrate, such as the white coats, masks, and beddings illustrated above. Show.

JP 05-115540 A JP 2007-506484 A

Development of ozone sterilizer, Ishikawajima Harima Technical Report Vol.43 No.4 (2003-7), Yukihiro Kamase and 4 others

  One of the problems to be solved by the invention is a problem of selectivity of an ozone sterilization method suitable for an object to be sterilized. In other words, in the sterilization target exemplified above, fibers such as lab coats, masks, bedding, etc., and articles that are not likely to be damaged by vacuum such as surgical instruments, laboratory instruments, etc. Ozone gas sterilization under negative pressure is suitable for efficiently infiltrating ozone gas to the back. On the other hand, sterilized objects such as precision machines with sealed cavities inside, such as personal computers, may be damaged when subjected to negative pressure, so ozone gas sterilization under normal pressure is suitable.

  For these reasons, the inventors of this application have started research and development of an ozone gas sterilization apparatus that can selectively select negative pressure sterilization treatment and normal pressure sterilization treatment. However, the problem at this time is that the environmental conditions required during the sterilization process vary depending on whether the negative pressure sterilization process or the atmospheric sterilization process is performed. In other words, in the sterilization process using ozone gas, it is necessary to prepare environmental conditions for ozone to react efficiently. For example, Patent Documents 1 and 2 exemplify a condition that the relative humidity is 90% or more. The inventor of this application has also reported in Non-Patent Document 1 that such a high relative humidity enhances the sterilization effect. Moreover, patent document 2 is disclosing the value of 1-5 mg / l (relative humidity 90%) about the ozone concentration from which a favorable result is obtained. Furthermore, patent document 3 mentions ideal temperature conditions and vacuum pressure conditions. As described above, in sterilization using ozone gas, it is extremely important to prepare environmental conditions in which ozone reacts efficiently.

  On the other hand, the environmental conditions at which ozone reacts efficiently are relatively easily maintained during the normal pressure sterilization process, but easily change during the negative pressure sterilization process. For this reason, when commercializing an ozone gas sterilizer, it is important to create a mechanism for controlling environmental conditions so that ozone can react efficiently.

The present invention has been made in view of the above problems, and an object thereof to be able to create an environment condition that ozone can efficiently react.

The present invention is an ozone sterilization apparatus comprising a sterilizer that forms a sterilization chamber for containing the sterilized object hermetically therein, the ozone gas introducing portion for introducing the ozone gas into the sterilization chamber, the.

The present invention, in the above SL ozone sterilization apparatus wherein a humidifying tank disposed in the sterilization chamber, the introduction position of the ozone gas the ozone gas introducing part has, inside the dry gas supply is provided for in the outside of the reservoir water to the humidifying vessel A switching mechanism that selectively switches to a predetermined wet gas supply, and the switching mechanism switches to the wet gas supply, and the water stored in the humidification tank is controlled by heating to make the water temperature higher than the room temperature by a predetermined temperature. A humidity increasing mechanism for increasing the relative humidity in the sterilization chamber, a hygrometer for measuring the relative humidity in the sterilization chamber, and the relative humidity in the sterilization chamber measured by the hygrometer within a predetermined humidity range. the drying gas supply and said wet gas supply and humidity control means for controlling switching of, by the providing the, trimmed to environmental conditions in which the ozone can efficiently react The problem of to be and to resolve.

According to the present invention, it is possible to ozone is furnished environmental conditions that can effectively react for effective sterilization.

The front view which shows the external appearance of the ozone gas sterilizer which is one Embodiment. The schematic diagram which shows each part of the ozone gas sterilizer which is one Embodiment. The graph which shows the relationship between the temperature difference of the temperature in a sterilization chamber, and the water temperature in a humidification tank, and the humidity in a sterilization chamber. The block diagram which shows the electrical connection of the ozone gas sterilizer which is one Embodiment. The flowchart which shows the flow of the process which the control circuit of the ozone gas sterilizer which is one Embodiment performs. The timing chart which shows the relationship between the pressure in a sterilization chamber at the time of a negative pressure sterilization process, and ozone concentration with time. The timing chart which shows the relationship between the pressure in a sterilization chamber, and ozone concentration in the time of normal-pressure sterilization processing with time.

  An embodiment will be described with reference to the drawings.

  FIG. 1 is a front view showing the appearance of the ozone gas sterilizer 11. The ozone gas sterilizer 11 contains a sterilization chamber 31 for storing a sterilization object (not shown) in the upper part of a housing 21 for sterilization, a user interface 41 on the upper left side, and a machine room in the lower part. 51 is built-in.

  The sterilization cabinet 31 can be opened and closed by a door 32, and a sterilization chamber 33 (see FIG. 2) is formed inside the door 32. An object to be sterilized can be taken in and out of the sterilization chamber 33 by opening the door 32. In implementation, a door (not shown) may be provided on the back side of the housing 21 so that it can be used from both the front and back sides. The door 32 is rotatably supported by a hinge 34 and can be opened and closed with a handle 35. The door 32 can be locked by a lock mechanism 36 that locks the lock piece 35 a of the handle 35. When the handle 35 is rotated to lock the lock piece 35a, the door 32 is locked in a completely closed state, and the sterilization chamber 33 is kept airtight.

  The user interface 41 has a display 42. A touch panel 43 is stacked on the display 42, and various instructions can be transmitted to a control circuit 61 (see FIG. 4) to be described later by touch designation on the touch panel 43. In addition, the user interface 41 is provided with a recorder 44, a power switch 45, and an emergency stop switch 46.

  FIG. 2 is a schematic diagram showing each part of the ozone gas sterilizer 11. The ozone gas sterilization apparatus 11 includes an ozone gas introduction unit 101, a negative pressure generation unit 111, a heating unit 121, a humidification mechanism 131, a switching mechanism 141, a humidity measurement unit 151, an ozone concentration measurement unit 161, and a circulation fan 171. . Each will be described below.

  First, the ozone gas introduction unit 101 introduces ozone gas into the sterilization chamber 33. Such an ozone gas introduction unit 101 includes a PSA oxygen generator 102 and an ozone generator 103. Oxygen generated by the PSA oxygen generator 102 reaches the ozone generator 103 via the pipe P1, and is further guided from the ozone generator 103 to the sterilization chamber 33. The pipe P1 is bifurcated at a position between the ozone generator 103 and the sterilization chamber 33 and is branched into pipes P1a and P1b. The pipe P1a is opened and closed by the electromagnetic valve V1a, and the pipe P1b is opened and closed by the electromagnetic valve V1b. One pipe P1a has the air in the sterilization chamber 33 as the introduction position, and the other pipe P1b has the water in the sterilization chamber 33 as the introduction position. This will be described in detail in the description of the switching mechanism 141 described later.

  Another important component of the ozone gas introduction unit 101 is a HEPA filter 104. The HEPA filter 104 communicates with the inside of the sterilization chamber 33 via the pipe P2. The pipe P2 is opened and closed by the electromagnetic valve V2. When the electromagnetic valve V2 is opened, the inside of the sterilization chamber 33 communicates with the outside through the pipe P2 and the HEPA filter 104.

  The negative pressure generation unit 111 exhausts the gas in the sterilization chamber 33 to create a negative pressure in the sterilization chamber 33. The main part of the negative pressure generator 111 is an exhaust pump 112. The exhaust pump 112 communicates with the inside of the sterilization chamber 33 via the pipe P11, and exhausts the gas in the sterilization chamber 33 to the outside by the operation. Therefore, when the exhaust pump 112 is driven in a state where the inside of the sterilization chamber 33 is airtight, the inside of the sterilization chamber 33 becomes negative pressure.

  In the negative pressure generation unit 111, the solenoid valve V11, the drain tank 113, and the ozone decomposition unit 114 are arranged on the pipe P11 from the sterilization chamber 33 toward the exhaust pump 112. The electromagnetic valve V11 opens and closes the pipe P11 itself. The drain tank 113 is used for drawing and draining water (described later) stored in the sterilization chamber 33. The ozone decomposing unit 114 is for decomposing and releasing the ozone gas introduced into the sterilization chamber 33 by the ozone gas introduction unit 101 when the exhaust pump 112 evacuates the gas in the sterilization chamber 33. A branch pipe P12 branches from the pipe P11 between the ozone decomposition unit 114 and the exhaust pump 112, and an electromagnetic valve V12 is disposed in the branch pipe P12. The electromagnetic valve V12 opens and closes the branch pipe P12.

  Here, the ozone gas sterilization apparatus 11 of this Embodiment is provided with the water supply tank 134 for the water supply mentioned later. The negative pressure generating unit 111 connects the water supply tank 134 and the drain tank 113 by a pipe P13. The pipe P13 is opened and closed by an electromagnetic valve V13. The drain tank 113 is provided with a drain pipe P14 for draining the water accumulated inside. The drain pipe P14 is opened and closed by an electromagnetic valve V14 that functions as a drain valve.

  The heating unit 121 includes a temperature control heater 122 that generates heat when energized, and warms the internal space of the sterilization chamber 33 to raise the room temperature. In the sterilization process, the room temperature in the sterilization chamber 33 is adjusted to a range of 20 ° C to 50 ° C. Such temperature control is realized by a control circuit 61 that drives and controls the temperature control heater 122. The control circuit 61 recognizes the room temperature based on the output of the dry bulb temperature sensor S1 as a temperature sensor for measuring the room temperature in the sterilization chamber 33 so that the room temperature becomes a desired value in the range of 20 ° C to 50 ° C. The temperature control heater 122 is driven and controlled.

  The humidification mechanism 131 is a mechanism for increasing the relative humidity in the sterilization chamber 33. In order to increase the relative humidity, the humidity increasing mechanism 131 uses a temperature difference between room temperature and water temperature. In order to generate a temperature difference between the room temperature and the water temperature, the humidification mechanism 131 has a humidification tank 132 disposed in the sterilization chamber 33, and a humidity control heater 133 is disposed in the humidification tank 132. The humidifying tank 132 can be supplied with water from the above-described water supply tank 134 through a pipe P31 that can be opened and closed by two electromagnetic valves V31 and V32. That is, when the inside of the sterilization chamber 33 is set to a negative pressure while the electromagnetic valves V31 and V32 are opened, the water stored in the water supply tank 134 is sucked into the humidification tank 132, and water supply to the humidification tank 132 is performed. When the humidity control heater 133 is operated in this state, the water supplied into the humidification tank 132 can be heated. In the sterilization process, the water temperature in the humidifying tank 132 is adjusted to a range of 20 ° C to 50 ° C. Such temperature control is realized by a control circuit 61 that drives and controls the humidity control heater 133. The control circuit 61 recognizes the water temperature based on the output of the water temperature sensor S2 disposed in the humidification tank 132, and drives the humidity control heater 133 so that the water temperature becomes a desired value in the range of 20 ° C to 50 ° C. Control.

  FIG. 3 is a graph showing the relationship between the temperature difference between the temperature in the sterilization chamber 33 and the water temperature in the humidification tank 132 and the humidity in the sterilization chamber 33. As a result of the experiment, it has been found that when the water temperature in the humidification tank 132 is set higher than the room temperature in the sterilization chamber 33 by a predetermined temperature, the highest humidity can be set within a range where condensation does not occur. The relationship between the temperature difference between the water temperature and the room temperature and the humidity in the sterilization chamber 33 is as shown in the graph of FIG. 3, and condensation occurs when the temperature difference exceeds a predetermined temperature.

  Therefore, in the present embodiment, the control circuit 61 sets the water temperature in the humidifying tank 132 to be slightly higher than the room temperature in the sterilization chamber 33. The temperature difference in this case is determined according to the required relative humidity value. For example, if it is desired to obtain a relative humidity of 90% RH, the water temperature may be controlled to be higher than the room temperature by a predetermined temperature shown in the graph of FIG. 3, and if a relative humidity of 99% RH is desired. The water temperature may be controlled to be higher than the room temperature by a predetermined temperature shown in the graph of FIG.

  As shown in FIG. 2, the switching mechanism 141 is a mechanism for switching the introduction position of the ozone gas into the sterilization chamber 33 by the ozone gas introduction unit 101 to one or both of air and water. That is, as described above, the ozone gas introduction unit 101 branches the pipe P1 into two branches, one being the pipe P1a and the other being the pipe P1b. Therefore, the switching mechanism 141 opens the end portion of one pipe P1a into the air in the sterilization chamber 33, and opens the end portion of the other pipe P1b into the humidification tank 132 disposed in the sterilization chamber 33. Yes. In this way, the control circuit 61 controls the opening and closing of the electromagnetic valve V1a that opens and closes the one pipe P1a and the electromagnetic valve V1b that opens and closes the other pipe P1b, thereby introducing the ozone gas into the sterilization chamber 33. Can be switched to one or both of air and water. That is, if both the solenoid valve V1a and the solenoid valve V1b are opened, the piping P1a is opened to introduce ozone gas into the air, and the piping P1b is also opened to introduce ozone gas into the water. If the electromagnetic valve V1a is opened and the electromagnetic valve V1b is closed, only the pipe P1a is opened and ozone gas is introduced into the air. Thereby, dry gas is supplied into the sterilization chamber 33. Conversely, if the electromagnetic valve V1a is closed and the electromagnetic valve V1b is opened, only the pipe P1b is opened and ozone gas is introduced into the water. Thereby, wet gas is supplied into the sterilization chamber 33.

  The switching mechanism 141 has a bubbler 135 attached to the terminal end of the pipe P1b. Thereby, when ozone gas is discharged from the pipe P1b into the water in the humidification tank 132, bubbles containing ozone gas are generated. Bubbles containing ozone gas increase the contact area of ozone gas with respect to the water stored in the humidification tank 132.

  Here, in the present embodiment, in order to increase the humidity in the sterilization chamber 33, the humidification mechanism 131 and the switching mechanism 141 are used. That is, the humidity in the sterilization chamber 33 is a wet gas obtained by introducing oxygen from the PSA oxygen generator 102 or ozone gas generated by the ozone generator 103 into water heated in the humidification tank 132. Rise by feeding. Then, after supplying water into the humidification tank 132 by the humidification mechanism 131 and heating this, the introduction | transduction position of oxygen or ozone gas is prescribed | regulated only in water by the switching mechanism 141, The humidity in the sterilization chamber 33 is controlled. Can be raised.

  The humidity measuring unit 151 includes a hygrometer 152 that measures the relative humidity in the sterilization chamber 33. The hygrometer 152 measures the temperature of the wet bulb and the temperature of the dry bulb arranged in the sterilization chamber 33 and the pressure in the sterilization chamber 33, and calculates the relative humidity by the arithmetic processing of the control circuit 61 based on these measured values. . In order to realize such a hygrometer 152, the humidity measuring unit 151 arranges a wet bulb tank 153 inside the sterilization chamber 33 and is immersed in water (pure water) stored in the wet bulb tank 153. A wet bulb temperature sensor S3 is disposed in a wick WK made of cotton, and a pressure sensor S4 as a pressure gauge is disposed in the sterilization chamber 33. The wet bulb tank 153 communicates with the water supply tank 134 through a pipe P51 that can be opened and closed by the electromagnetic valve V51, and receives water from the water supply tank 134. In order to supply water to the wet bulb tank 153, the inside of the sterilization chamber 33 is set to a negative pressure while the electromagnetic valve V51 is opened. Then, the water stored in the water supply tank 134 is sucked into the wet bulb tank 153, and the wet bulb tank 153 is filled with water. As a result, the wick WK is immersed in the water in the wet bulb tank 153, and moisture flows into the wet bulb temperature sensor S3 covered with the wick WK. Accordingly, the hygrometer 152 can measure the wet bulb temperature with the wet bulb temperature sensor S3, measure the dry bulb temperature with the dry bulb temperature sensor S1, and measure the pressure in the sterilization chamber 33 with the pressure sensor S4. It becomes. Therefore, the humidity measuring unit 151 can calculate the relative humidity in the sterilization chamber 33 based on the measured values using the arithmetic processing function of the control circuit 61. As an example, the calculation of the relative humidity can be performed by the method described in the section of the ventilation / dryness meter in “JIS Z8806: 2001 Humidity-Measurement Method”.

  The relative humidity in the sterilization chamber 33 measured by the humidity measuring unit 151 is useful for maintaining the increased humidity in the sterilization chamber 33 in a desired range. That is, in order to maintain the increased humidity in the sterilization chamber 33 in a desired humidity environment, the switching mechanism 141 is used to change the introduction position of oxygen or ozone gas between water and air while referring to the measured value of relative humidity. It is sufficient to switch alternatively. More specifically, when the humidity in the sterilization chamber 33 becomes higher than the desired range, the dry gas is introduced by switching the oxygen or ozone gas introduction position to the air. Thereby, the humidity in the sterilization chamber 33 can be lowered. On the other hand, when the humidity in the sterilization chamber 33 is lower than the desired range, the introduction position of oxygen or ozone gas is switched to water to introduce wet gas. Thereby, the humidity in the sterilization chamber 33 can be raised.

  Here, in this Embodiment, the water supply operation | movement with respect to the humidification tank 132 of the humidification mechanism 131 and the water supply operation | movement with respect to the wet bulb tank 153 of the humidity measurement part 151 are related. That is, the humidifying tank 132 is formed to have a larger capacity than the wet bulb tank 153 and both are arranged next to each other so that the water overflowing from the wet bulb tank 153 can be supplied to the humidifying tank 132. Therefore, the water level in the humidifying tank 132 is monitored by, for example, a float switch (not shown), and when the float switch is turned on, the water supply operation from the water supply tank 134 is stopped. By doing so, the wet bulb tank 153 can be filled with full water, and the humidification tank 132 can be supplied with a desired amount of water.

  Note that the measurement output of the pressure sensor S4 is not only used for measuring the humidity in the sterilization chamber 33 but also for adjusting the vacuum pressure in the sterilization chamber 33. This will be described later.

  The ozone concentration measuring unit 161 includes an ozone concentration meter 162 that can measure the ozone concentration, and the ozone concentration meter 162 can measure the ozone concentration in the sterilization chamber 33. The ozone concentration meter 162 is disposed outside the sterilization chamber 33. Therefore, the ozone concentration measuring unit 161 includes an ozone concentration meter 162 and a circulation pump 163 in the circulation pipe P61 that exits from the sterilization chamber 33 and returns to the sterilization chamber 33. The gas in the sterilization chamber 33 is drawn into the circulation pump 163, circulates in the circulation pipe P61, and is used for ozone concentration measurement by the ozone concentration meter 162.

  The circulation fan 171 has a structure in which a fan 172 is attached to a rotation shaft of a motor (not shown) driven and controlled by the control circuit 61, and the gas in the sterilization chamber 33 is agitated by rotating the fan 172.

  FIG. 4 is a block diagram showing electrical connection of the ozone gas sterilizer 11. The control circuit 61 controls each part of the ozone gas sterilizer 11. As an example, the control circuit 61 is formed by a CPU in which various arithmetic processes are performed to centrally control each unit, a ROM in which a control program and the like are written, and a microcomputer in which a RAM is connected (see FIG. Not shown). The RAM records variable data in a rewritable manner and is used as a work area or the like. When such a microcomputer configuration is used as the control circuit 61, each of the above sections is connected to the control circuit 61 through an I / O (not shown) or the like so as to be able to transmit and receive signals. Alternatively, as another example, the control circuit 61 may be configured by an integrated circuit in which a sequence is fixedly recorded. In any case, the control circuit 61 has a configuration capable of taking in outputs from the dry bulb temperature sensor S1, the water temperature sensor S2, the wet bulb temperature sensor S3, and the pressure sensor S4 and controlling each part in accordance with a predetermined procedure. doing.

  Since each part connected to and controlled by the control circuit 61 is clearly shown in FIG. 4, sequential enumeration is avoided in order to avoid duplicate description.

  FIG. 5 is a flowchart showing the flow of processing executed by the control circuit 61 of the ozone gas sterilizer 11. In order to sterilize an object to be sterilized, prior to executing the process shown in the flowchart shown in FIG.

  As a manual operation by a human, first, the object to be sterilized is stored in the sterilization chamber 33 and the door 32 is closed. Before and after this, water (pure water) is supplied to the water supply tank 134. At this time, referring to the display on the display unit 42, whether to perform negative pressure sterilization or normal pressure sterilization is selected according to the type of sterilization target. For example, when trying to sterilize textiles such as lab coats, masks, and bedding, as well as surgical tools, laboratory instruments, and other items that are not likely to be damaged by vacuum, go to the inside of the fiber and the back of the gap between the instruments. In order to infiltrate ozone gas efficiently, a negative pressure sterilization process is selected. On the other hand, when trying to sterilize a precision machine having a sealed cavity, such as a personal computer, the sterilization at normal pressure is selected because there is a risk of damage if negative pressure is applied. The selection of the negative pressure sterilization process or the normal pressure sterilization process is performed by touch designation on the touch panel 43 (selection means). In the case of performing negative pressure sterilization, the number of vacuum aeration (see step S41) described later is also input. Thereafter, as shown in FIG. 5, the control circuit 61 determines which one of the negative pressure sterilization process and the normal pressure sterilization process has been selected (step S11).

  When the selection of the negative pressure sterilization process is determined (YES in step S11), the control circuit 61 executes a water supply process for the humidifying tank 132 and the wet bulb tank 153 (step S31). Refer to “Water Supply” in FIG. 6 described later. The control circuit 61 opens the electromagnetic valves V31 and V32 of the humidity increasing mechanism 131, the electromagnetic valve V51 of the humidity measuring unit 151, and the electromagnetic valve V11 of the negative pressure generating unit 111, and drives the exhaust pump 112. Thereby, the gas in the sterilization chamber 33 is exhausted to the outside, and water (pure water) stored in the water supply tank 134 is sucked into the pipes P31 and P51 and supplied to the humidification tank 132 and the wet bulb tank 153. . As described above, the wet bulb tank 153 can be filled with full water, and the humidification tank 132 can be supplied with a desired amount of water.

  Next, the control circuit 61 performs temperature control (step S32). Refer to “temperature control” in FIG. 6 described later. The control circuit 61 drives and controls the temperature adjustment heater 122 of the heating unit 121 to adjust the room temperature in the sterilization chamber 33, and drives and controls the humidity adjustment heater 133 of the humidity increasing mechanism 131 to supply water to the humidifying tank 132. Adjust the water temperature. At this time, both the room temperature and the water temperature are adjusted to be a constant temperature and a constant humidity in the range of 20 ° C to 50 ° C. However, as described above, the water temperature is adjusted slightly higher than the room temperature according to the value of the relative humidity required in the sterilization chamber 33.

  Next, the control circuit 61 performs humidity control (step S33). Refer to “humidity control” in FIG. 6 described later. The control circuit 61 opens only the solenoid valves V1b, V11, V12 and closes the other solenoid valves. Then, the PSA oxygen generator 102 is operated, and oxygen is blown into the water stored in the humidifying tank 132 through the bubbler 135. Thereby, the relative humidity in the sterilization chamber 33 can be raised to, for example, about 80 to 99% RH.

  Next, the control circuit 61 executes pressure control in the sterilization chamber 33 (step S34). Refer to “negative pressure” in FIG. 6 to be described later. The control circuit 61 opens the electromagnetic valve V11 and closes all other electromagnetic valves to drive the exhaust pump 112 of the negative pressure generating unit 111. Thereby, the gas in the sterilization chamber 33 is exhausted to the outside through the pipe P11, and the inside of the sterilization chamber 33 is negatively pressured. At this time, the control circuit 61 drives the exhaust pump 112 until the inside of the sterilization chamber 33 becomes a high vacuum of about −90 kPa to −20 kPa, and reaches a target value (hereinafter referred to as “control target value (kPa)”). Then stop the drive.

  However, the humidity of the sterilization chamber 33 is slightly reduced due to a decrease in the internal pressure. Therefore, prior to the subsequent introduction of ozone gas (step S35), the inside of the sterilization chamber 33 is humidified. For this purpose, the control circuit 61 operates the PSA oxygen generator 102 with the electromagnetic valve V1b opened and the other electromagnetic valves closed. Then, since the gas introduction position is defined in water, oxygen is blown into the humidification tank 132 through the bubbler 135, and oxygen containing moisture is supplied into the sterilization chamber 33. As a result, the humidity in the sterilization chamber 33, which has decreased with the decrease in internal pressure, is increased again. However, such a supply of oxygen into the sterilization chamber 33 lowers the degree of vacuum in the sterilization chamber 33 again. Therefore, the control circuit 61 intermittently drives the exhaust pump 112 and opens and closes the electromagnetic valve V11 in synchronization with the exhaust pump 112, or intermittently opens and closes the electromagnetic valve V11 by driving the exhaust pump 112 continuously. Do it. By repeating such a humidity increasing operation and a pressure reducing operation, the degree of vacuum and the relative humidity in the sterilization chamber 33 can be kept within a desired range. Refer to “Humidity adjustment under vacuum” in FIG. 6 for the above operation.

  Next, the control circuit 61 executes an ozone gas introduction process (step S35). Refer to “Ozone continuous generation” in FIG. 6 described later. At this time, the control circuit 61 opens the solenoid valves V1a and V1b and guides the oxygen generated by the PSA oxygen generator 102 to the sterilization chamber 33 via the pipe P1 (P1a and P1b). In this process, by operating the ozone generator 103, the gas led to the sterilization chamber 33 is made ozone gas. At this time, the control circuit 61 opens the electromagnetic valve V1 (either V1a or V1b). That is, when the humidity in the sterilization chamber 33 is higher than the target humidity, the electromagnetic valve V1a is opened, and when the humidity is low, the electromagnetic valve V1b is opened. Thereby, when the humidity in the sterilization chamber 33 is higher than the target humidity, the dry gas is supplied into the sterilization chamber 33 from the pipe P1a that opens to the air. When the humidity is lower than the target humidity, the pipe P1b that opens to the water is supplied. Wet gas is supplied from the bubbler 135 into the sterilization chamber 33.

  Here, what is important in the ozone gas introduction process is the ozone concentration and the CT value calculated by the ozone concentration (ppm) × time (min). The control circuit 61 takes in the output of the ozone concentration meter 162 and calculates a CT value (ozone concentration (ppm) × time (min)), and the ozone gas introduction unit 101 so that the CT value becomes a value necessary for sterilization. Is controlled. At this time, the CT value is calculated using the value of the ozone concentration at a time when the ozone concentration is constant. Even if the ozone concentration is rising or falling, numerical integration such as a trapezoidal formula is used. CT can be calculated.

  After that, the control circuit 61 supplies ozone gas to the sterilization chamber 33 until it reaches a preset CT value while executing environmental control in the sterilization chamber 33 (NO in step S36 and step S37).

  FIG. 6 is a timing chart showing the relationship between the pressure in the sterilization chamber 33 and the ozone concentration over time during the negative pressure sterilization process. By the process of step S34, the pressure in the sterilization chamber 33 starts to decrease from 0 (kPa) and reaches the control target value (kPa). As described above, the control circuit 61 stops driving the exhaust pump 112 when the pressure in the sterilization chamber 33 reaches the control target value (kPa). If the state at this moment is maintained, the pressure in the sterilization chamber 33 should maintain the control target value (kPa). On the other hand, when the pressure in the sterilization chamber 33 reaches the control target value (kPa), the control circuit 61 executes the ozone gas introduction process in step S35. At this time, the control circuit 61 calculates the CT value (ozone concentration (ppm) × time (min)) by taking the output of the ozone concentration meter 162, and monitors this CT value together with the ozone concentration. If the CT value reaches the target value, the process proceeds to the ozone gas discharge process (step S38). On the other hand, when the ozone concentration reaches the target value before the CT value reaches the target value, the driving of the ozone generator 103 is switched to intermittent driving. This timing is a transition from step S35 to step S36 in the flowchart of FIG. As shown in FIG. 6, when the ozone generator 103 is intermittently driven, the ozone concentration maintains a constant value. Rather, after the ozone concentration reaches the target value, the control circuit 61 intermittently drives the ozone generator 103 so as to maintain the ozone concentration. The period during which the driving of the ozone generator 103 is switched to intermittent driving is until the degree of vacuum in the sterilization chamber 33 reaches a predetermined value (hereinafter referred to as “control lower limit value (kPa)”). The driving of the generator 103 is switched again from intermittent driving to continuous driving. This is because, after the degree of vacuum in the sterilization chamber 33 reaches the control lower limit (kPa), the exhaust pump 112 is driven again to perform evacuation, so that the ozone concentration in the sterilization chamber 33 rapidly decreases. This will be described later.

  Here, when such ozone gas is introduced, attention is focused on the pressure in the sterilization chamber 33. As shown in FIG. 6, immediately after the control target value (kPa) is reached and the driving of the exhaust pump 112 is stopped, the pressure in the sterilization chamber 33 varies linearly toward 0 (kPa). This is because, after the pressure in the sterilization chamber 33 first reaches the control target value (kPa), oxygen generated by the PSA oxygen generator 102 is steady regardless of whether ozone is generated by the ozone generator 103. This is because it is continuously supplied into the sterilization chamber 33.

  The control circuit 61 takes in the output of the pressure sensor S4 and monitors the pressure in the sterilization chamber 33. When the pressure in the sterilization chamber 33 reaches the control lower limit value (kPa) which is the lower limit value of the control pressure, the control circuit 61 again performs negative pressure as one of the environmental controls in step S36 in the flowchart of FIG. Execute the conversion process. That is, the exhaust pump 112 of the negative pressure generating unit 111 is driven. As a result, the inside of the sterilization chamber 33 is again evacuated to the control target value (kPa) which is the target value. When the pressure in the sterilization chamber 33 reaches the control target value (kPa), the driving of the exhaust pump 112 is stopped again.

  At this time, in the sterilization chamber 33, ozone gas is also released to the outside by evacuation by driving the exhaust pump 112. For this reason, a decrease in the concentration of ozone gas occurs. Therefore, the control circuit 61 continuously operates the ozone generator 103 again to restore the ozone concentration to the target value. Thereafter, the ozone generator 103 is switched to intermittent operation, and the ozone concentration is maintained at the target value. In order to perform negative pressure in a shorter time, as another embodiment, ozone supply may be stopped while the exhaust pump 112 is being driven. To do this, while the exhaust pump 112 is being driven, the ozone generator 103 is stopped and the solenoid valves V1a and V1b are closed.

  Thus, the control circuit 61 adjusts the pressure in the sterilization chamber 33 and the ozone concentration until the target CT value is reached after introducing ozone gas into the sterilization chamber 33 (YES in steps S35 to S37 in the flowchart of FIG. 5). Repeat the adjustment. Here, the functions of the pressure adjusting means and the concentration adjusting means are executed.

  Next, in the present embodiment, the relative humidity adjustment in the sterilization chamber 33 is also executed as the environmental control in step S36 in the flowchart of FIG. In the present embodiment, while the sterilization target is being sterilized (NO in steps S35 to S37 in the flowchart of FIG. 5), the relative humidity value (% RH) also slightly varies. Therefore, the control circuit 61 drives and controls the switching mechanism 141 to selectively switch the supply of ozone gas or oxygen from the ozone gas introduction unit 101 into the sterilization chamber 33 between dry gas supply and wet gas supply. That is, the control circuit 61 can know the value of the relative humidity in the sterilization chamber 33 by the humidity measuring unit 151. Therefore, when the relative humidity in the sterilization chamber 33 reaches the target humidity, the electromagnetic valve V1a is opened and the electromagnetic valve V1b is closed, and the wet gas supply is switched to the dry gas supply. Thereby, relative humidity can be reduced. On the other hand, when the relative humidity in the sterilization chamber 33 is lower than the target humidity, the electromagnetic valve V1a is closed and the electromagnetic valve V1b is opened to switch from dry gas supply to wet gas supply. Thereby, relative humidity can be raised. Here, the function of the humidity adjusting means is executed.

  Further, in the present embodiment, the fan 172 is continuously driven during the sterilization process. Thereby, the temperature, relative humidity, and ozone concentration in the sterilization chamber 33 can be made uniform.

  Returning to the flowchart of FIG. After reaching the target CT value (YES in step S37), the control circuit 61 discharges ozone gas from the sterilization chamber 33 (step S38). That is, the solenoid valves V11, V12, and V2 are opened, all other solenoid valves are closed, and the exhaust pump 112 is driven. Thereby, while the air cleaned by the HEPA filter 104 is taken into the sterilization chamber 33, the ozone gas in the sterilization chamber 33 can be decomposed into oxygen by the ozone decomposition unit 114 and released to the outside.

  Next, the control circuit 61 executes drainage processing (step S39). In order to execute this, first, the solenoid valves V2, V13, V32 are opened, all other solenoid valves are closed, and the exhaust pump 112 is driven. Then, the inside of the drain tank 113 becomes negative pressure, and the water (pure water) stored in the humidification tank 132 is drawn into the drain tank 113 through the pipes P31 and P13. Next, the solenoid valves V2, V13, V51 are opened, all other solenoid valves are closed, and the exhaust pump 112 is driven. Then, the inside of the drain tank 113 becomes a negative pressure, and water (pure water) stored in the wet bulb tank 153 is drawn into the drain tank 113 through the pipes P51 and P13. Next, the solenoid valves V2, V13, V31 are opened, all other solenoid valves are closed, and the exhaust pump 112 is driven. Then, the inside of the drain tank 113 becomes negative pressure, and the water (pure water) accumulated in the water supply tank 134 is drawn into the drain tank 113 through the pipe P13. The water (pure water) drawn into the drain tank 113 can be drained to the outside from the drain pipe P14 by opening the solenoid valves V2, V11, V14.

  Next, the control circuit 61 executes a drying process (step S40). That is, the temperature control heater 122 of the heating unit 121 is driven to heat the inside of the sterilization chamber 33. Thereby, even if the amount of water (absolute humidity) in the sterilization chamber 33 does not change, the relative humidity decreases, so that condensation can be prevented.

  Next, the control circuit 61 executes evacuation aeration (ozone removal process) (step S41) until the preset number is increased (NO in step S42). That is, the electromagnetic valve V11 is opened and all other electromagnetic valves are closed, and the exhaust pump 112 is driven in this state. The driving of the exhaust pump 112 continues until the inside of the sterilization chamber 33 is in a high vacuum state that is a control target value (kPa). Thereby, the atmospheric gas in the sterilization chamber 33 is released to the outside. The control circuit 61 opens the electromagnetic valve V2 when the inside of the sterilization chamber 33 is in a high vacuum state that is a control target value (kPa). Then, clean air that has passed through the HEPA filter 104 flows into the sterilization chamber 33. As a result, the ozone gas that has permeated the sterilization target that is still in the sterilization chamber 33 can be sucked from the sterilization target, and can be decomposed and released by the ozone decomposition unit 114. Such evacuation aeration is executed until the preset number of times is increased (YES in step S42). In the vacuum aeration in step S41, the inside of the sterilization chamber 33 may be evacuated further than the control target value (kPa).

  Next, the control circuit 61 executes normal pressure aeration (ozone removal processing) for a preset time (step S43). That is, the solenoid valves V2 and V11 are opened and all other solenoid valves are closed, and the exhaust pump 112 is driven in this state. Thereby, the ozone gas remaining in the sterilization chamber 33 is discharged, and clean air that has passed through the HEPA filter 104 flows into the sterilization chamber 33. If the control circuit 61 executes the normal pressure aeration until the preset time has elapsed, the negative pressure sterilization process is terminated.

  On the other hand, when the control circuit 61 determines the selection of the normal pressure sterilization process (NO in step S11), the control circuit 61 performs a water supply process for the humidifying tank 132 and the wet bulb tank 153 (step S51). Refer to “Water Supply” in FIG. 7 described later. The control circuit 61 opens the electromagnetic valves V31 and V32 of the humidity increasing mechanism 131, V51 of the humidity measuring unit 151, and the electromagnetic valve V11 of the negative pressure generating unit 111, and drives the exhaust pump 112. Thereby, the gas in the sterilization chamber 33 is exhausted to the outside, and water (pure water) stored in the water supply tank 134 is sucked into the pipes P31 and P51 and supplied to the humidification tank 132 and the wet bulb tank 153. . As described above, the wet bulb tank 153 can be filled with full water, and the humidification tank 132 can be supplied with a desired amount of water.

  Next, the control circuit 61 executes temperature control (step S52). Refer to “temperature control” in FIG. 7 described later. The control circuit 61 drives and controls the temperature adjustment heater 122 of the heating unit 121 to adjust the room temperature in the sterilization chamber 33, and drives and controls the humidity adjustment heater 133 of the humidity increasing mechanism 131 to supply water to the humidifying tank 132. Adjust the water temperature. At this time, both the room temperature and the water temperature are adjusted to a constant temperature in the range of 20 ° C. to 50 ° C. (temperature adjusting means). However, as described above, the water temperature is adjusted slightly higher than the room temperature according to the value of the relative humidity required in the sterilization chamber 33. Thereby, the relative humidity in the sterilization chamber 33 can be raised to, for example, about 80 to 99% RH by executing the humidity control (step S53) in the next stage.

  Next, the control circuit 61 performs a humidification process (step S53). Refer to “humidity control” in FIG. 7 described later. The control circuit 61 opens the solenoid valves V1b, V11, and V12, and guides oxygen generated by the PSA oxygen generator 102 into the sterilization chamber 33 through the pipe P1b. In this way, wet oxygen gas that has taken in moisture while passing through the humidification tank 132 is supplied into the sterilization chamber 33, thereby increasing the humidity in the sterilization chamber 33. When the target humidity is reached, the control circuit 61 proceeds to the next process.

  Next, the control circuit 61 executes an ozone gas introduction process (step S54). Refer to “Ozone continuous generation” in FIG. 7 described later. The control circuit 61 opens the solenoid valves V1 (V1a or V1b), V11, and V12, and guides oxygen generated by the PSA oxygen generator 102 to the sterilization chamber 33 via the pipe P1 (P1a or P1b). In this process, by operating the ozone generator 103, the gas led to the sterilization chamber 33 is made ozone gas. At this time, the control circuit 61 opens one of the electromagnetic valve V1a and the electromagnetic valve V1b according to the relative humidity in the sterilization chamber 33. That is, when the humidity in the sterilization chamber 33 is higher than the target humidity, the electromagnetic valve V1a is opened, and when the humidity is low, the electromagnetic valve V1b is opened. Thereby, when the humidity in the sterilization chamber 33 is higher than the target humidity, the dry gas is supplied into the sterilization chamber 33 from the pipe P1a that opens to the air. When the humidity is lower than the target humidity, the pipe P1b that opens to the water is supplied. Wet gas is supplied from the bubbler 135 into the sterilization chamber 33.

  Here, what is important in the ozone gas introduction process is the ozone concentration and the CT value calculated by the ozone concentration (ppm) × time (min). The control circuit 61 takes in the output of the ozone concentration meter 162 and calculates a CT value (ozone concentration (ppm) × time (min)). The ozone gas introduction unit 101 is operated until the CT value reaches a value necessary for sterilization. Drive control. At this time, the CT value is calculated using the value of the ozone concentration at a time when the ozone concentration is constant. Even if the ozone concentration is rising or falling, numerical integration such as a trapezoidal formula is used. CT can be calculated.

  After that, the control circuit 61 supplies ozone gas to the sterilization chamber 33 until it reaches a preset CT value while executing environmental control in the sterilization chamber 33 (NO in Step S55 and Step S56).

  FIG. 7 is a timing chart showing the relationship between the pressure in the sterilization chamber 33 and the ozone concentration over time during the normal pressure sterilization process. During the normal pressure sterilization process, the pressure in the sterilization chamber 33 is maintained at 0 (kPa). When entering the ozone gas introduction step (step S54), the control circuit 61 drives the PSA oxygen generator 102 and the ozone generator 103. Thereby, the ozone concentration in the sterilization chamber 33 starts to rise. At this time, the control circuit 61 takes in the output of the ozone concentration meter 162, calculates the CT value (ozone concentration (ppm) × time (min)), and monitors the ozone concentration and the CT value. When the ozone concentration reaches the target value, the driving of the ozone generator 103 is switched to intermittent driving. This timing is a transition from step S54 to step S55 in the flowchart of FIG. As shown in FIG. 7, when the ozone generator 103 is intermittently driven, the ozone concentration maintains a constant value. Rather, after the ozone concentration reaches the target value, the control circuit 61 intermittently drives the ozone generator 103 so as to maintain the ozone concentration. The ozone generator 103 is switched to intermittent driving until the CT value reaches the target.

  Next, as the environmental control in step S55 in the flowchart of FIG. 5, in the present embodiment, the relative humidity in the sterilization chamber 33 is also adjusted. In the present embodiment, while the sterilization target is being sterilized (NO in steps S54 to S56 in the flowchart of FIG. 5), the value of relative humidity (% RH) also varies slightly. Therefore, the control circuit 61 drives and controls the switching mechanism 141 to selectively switch the supply of ozone gas or oxygen from the ozone gas introduction unit 101 into the sterilization chamber 33 between dry gas supply and wet gas supply. That is, the control circuit 61 can know the value of the relative humidity in the sterilization chamber 33 by the humidity measuring unit 151. Therefore, when the relative humidity in the sterilization chamber 33 reaches the target humidity, the electromagnetic valve V1a is opened and the electromagnetic valve V1b is closed, and the wet gas supply is switched to the dry gas supply. Thereby, relative humidity can be reduced. On the other hand, when the relative humidity in the sterilization chamber 33 is lower than the target humidity, the electromagnetic valve V1a is closed and the electromagnetic valve V1b is opened to switch from dry gas supply to wet gas supply. Thereby, relative humidity can be raised. Here, the function of the humidity adjusting means is executed.

  Further, in the present embodiment, the circulation fan 171 is continuously driven during the sterilization process. Thereby, the temperature, relative humidity, and ozone concentration in the sterilization chamber 33 can be made uniform.

  Returning to the flowchart of FIG. After reaching the target CT value (YES in step S56), the control circuit 61 discharges ozone gas from the sterilization chamber 33 (step S57). That is, the solenoid valves V11, V12, and V2 are opened, all other solenoid valves are closed, and the exhaust pump 112 is driven. Thereby, while the air cleaned by the HEPA filter 104 is taken into the sterilization chamber 33, the ozone gas in the sterilization chamber 33 can be decomposed into oxygen by the ozone decomposition unit 114 and released to the outside.

  Next, the control circuit 61 executes drainage processing (step S58). In order to execute this, first, the solenoid valves V2, V13, V32 are opened, all other solenoid valves are closed, and the exhaust pump 112 is driven. Then, the inside of the drain tank 113 becomes negative pressure, and the water (pure water) stored in the humidification tank 132 is drawn into the drain tank 113 through the pipes P31 and P13. Next, the solenoid valves V2, V13, V51 are opened, all other solenoid valves are closed, and the exhaust pump 112 is driven. Then, the inside of the drain tank 113 becomes a negative pressure, and water (pure water) stored in the wet bulb tank 153 is drawn into the drain tank 113 through the pipes P51 and P13. Next, the solenoid valves V2, V13, V31 are opened, all other solenoid valves are closed, and the exhaust pump 112 is driven. Then, the inside of the drain tank 113 becomes negative pressure, and the water (pure water) accumulated in the water supply tank 134 is drawn into the drain tank 113 through the pipe P13. The water (pure water) drawn into the drain tank 113 can be drained to the outside from the drain pipe P14 by opening the solenoid valves V2, V11, V14.

  Next, the control circuit 61 performs a drying process (step S59). That is, the temperature control heater 122 of the heating unit 121 is driven to heat the inside of the sterilization chamber 33. Thereby, even if the amount of water (absolute humidity) in the sterilization chamber 33 does not change, the relative humidity decreases, so that condensation can be prevented.

  Next, the control circuit 61 performs normal pressure aeration (ozone removal process) (step S60). That is, the solenoid valves V2 and V11 are opened and all other solenoid valves are closed, and the exhaust pump 112 is driven in this state. Thereby, while the clean air that has passed through the HEPA filter 104 is taken into the sterilization chamber 33, the ozone gas in the sterilization chamber 33 can be decomposed by the ozone decomposition unit 114 and released to the outside. Thereafter, the normal pressure sterilization process is terminated.

  As described above, according to the present embodiment, it is possible to easily select a sterilization process suitable for an object to be sterilized from the negative pressure sterilization process and the normal pressure sterilization process (in the flowchart of FIG. 5). Step S11). Even if the sterilization target cannot be expected to have a sufficient sterilization effect under normal pressure sterilization, ozone gas can penetrate into the sterilization target when negative pressure sterilization is selected. An effect can be obtained. In addition, since the control circuit 61 performs the functions of the humidity adjusting means, the pressure adjusting means, the concentration adjusting means, and the temperature adjusting means, it is effective to arrange environmental conditions that allow ozone gas to react efficiently in any selected sterilization process. Sterilization can be performed.

  Further, according to the present embodiment, water is moved only by the exhaust pump 112 and the electromagnetic valve V. This has the following advantages.

(1) No water pump is required.
For this reason, the structure of the apparatus is simplified.
In addition, when a water pump is used, there is no residual water in the water pump after the end of the operation, which is inevitable, and a mechanism for discharging the remaining water of the water pump is unnecessary. No priming is required.

(2) It is not a structure that moves water by gravity.
Thereby, the freedom degree of arrangement | positioning of various water tanks (the drain tank 113, the water supply tank 134, the humidification tank 132, the wet bulb tank 153) increases.
For example, the water supply tank 134 can be arranged at the lower part of the apparatus, and the drain tank 113 can be arranged at the upper part of the apparatus. When the water supply tank 134 is arranged at the lower part, it is not necessary to lift the water to a high position when water is put into the apparatus, so that work can be facilitated. Further, if the drain tank 113 is arranged at the upper part, it can be drained as it is into a normal sink (a sink), so that it can be installed without any special drainage work.
However, as another embodiment, the water supply tank 134 may be arranged on the upper side, the drain tank 113 may be arranged on the lower side, and the water may flow using gravity together.

  Further, according to the present embodiment, the temperature control of the sterilization chamber 31 is performed only by the temperature control heater 122. On the other hand, at the time of implementation, a refrigerator may be provided, and the temperature control heater 122 and the refrigerator may be used together to control the temperature more precisely.

  Furthermore, according to the present embodiment, the water temperature in the humidifying tank 132 is controlled only by the humidity control heater 133. In contrast, when the water temperature in the humidification tank 132 is excessively increased, the water temperature is lowered by partially discharging the water in the humidification tank 132 to the drain tank 113 and replenishing it from the water supply tank 134. In this way, each unit may be controlled.

31 Sterilization chamber 33 Sterilization chamber 101 Ozone gas introduction part 102 PSA type oxygen generator 103 Ozone generator 111 Negative pressure generation part 131 Humidification mechanism 132 Humidification tank 141 Switching mechanism 152 Hygrometer 153 Wet bulb tank 162 Ozone concentration meter S1 Dry bulb temperature Sensor (thermometer)
S4 Pressure sensor (pressure gauge)

Claims (10)

A sterilization cabinet that forms a sterilization chamber for airtight storage of objects to be sterilized;
An ozone gas introduction part for introducing ozone gas into the sterilization chamber;
A humidifying tank disposed in the sterilization chamber;
A switching mechanism that selectively switches the introduction position of the ozone gas that the ozone gas introduction unit has between a dry gas supply defined outside the water stored in the humidification tank and a wet gas supply defined inside;
A humidity increasing mechanism that increases the relative humidity in the sterilization chamber by switching to the wet gas supply by the switching mechanism and heating the water stored in the humidification tank to make the water temperature higher than the room temperature by a predetermined temperature. ,
A hygrometer for measuring the relative humidity in the sterilization chamber;
Humidity control means for switching and controlling the dry gas supply and the wet gas supply so that the relative humidity in the sterilization chamber measured by the hygrometer falls within a predetermined humidity range;
An ozone gas sterilization apparatus comprising: The hygrometer is
A function of measuring the pressure in the sterilization chamber;
A function of measuring the temperature of a wet bulb covered with a wick immersed in water stored in a wet bulb tank disposed in the sterilization chamber and the temperature of a dry bulb not immersed in water;
The a, calculates the relative humidity of the sterilizing chamber based on the pressure temperature and the previous SL sterilization chamber temperature and the dry-bulb of the measured the wet bulb,
The ozone gas sterilizer according to claim 1 . A negative pressure generating unit that exhausts the gas in the sterilization chamber to create a negative pressure in the sterilization chamber;
When sterilizing an object to be sterilized by introducing ozone gas into the sterilization chamber by the ozone gas introduction unit, a negative pressure sterilization process in which the sterilization chamber is made negative pressure by the negative pressure generating unit, and the sterilization chamber is not made negative pressure. A selection means that can selectively select autoclaving,
The ozone gas sterilizer according to claim 2, comprising: An ozone concentration meter for measuring the ozone concentration in the sterilization chamber;
Pressure adjusting means for intermittently controlling the negative pressure generating unit so that the measured pressure in the sterilization chamber falls within a predetermined negative pressure range during the negative pressure sterilization process;
In the negative autoclaved, and the concentration adjusting means ozone concentration of the sterilization chamber which is measured by the ozone concentration meter intermittently controls the ozone generator provided in the ozone gas inlet portion to a predetermined concentration range,
The ozone gas sterilizer according to claim 3, comprising: A negative pressure generating unit that exhausts the gas in the sterilization chamber to create a negative pressure in the sterilization chamber;
When sterilizing an object to be sterilized by introducing ozone gas into the sterilization chamber by the ozone gas introduction unit, a negative pressure sterilization process in which the sterilization chamber is made negative pressure by the negative pressure generating unit, and the sterilization chamber is not made negative pressure. A selection means that can selectively select autoclaving,
The ozone gas sterilizer according to claim 1, comprising: A pressure gauge for measuring the pressure in the sterilization chamber;
An ozone concentration meter for measuring the ozone concentration in the sterilization chamber;
Pressure adjusting means for intermittently controlling the negative pressure generating unit so that the pressure in the sterilization chamber measured by the pressure gauge falls within a predetermined negative pressure range during the negative pressure sterilization process;
In the negative autoclaved, and the concentration adjusting means ozone concentration of the sterilization chamber which is measured by the ozone concentration meter intermittently controls the ozone generator provided in the ozone gas inlet portion to a predetermined concentration range,
The ozone gas sterilizer according to claim 5 , comprising: As a post-treatment of the negative pressure sterilization process, a drying process is performed in which water in the sterilization chamber is drained and the sterilization chamber is heated.
The ozone gas sterilization apparatus according to any one of claims 3 to 6 , wherein As the post-treatment of the negative pressure sterilization process, after the drying process, the negative pressure generating unit performs an ozone removal process of making the sterilization chamber negative pressure to a predetermined vacuum level and then returning to normal pressure.
The ozone gas sterilizer according to claim 7. As a post-treatment of the sterilization process, a drying process is performed in which the water in the sterilization chamber is drained and the sterilization chamber is heated.
The ozone gas sterilizer according to claim 1 or 2. A thermometer for measuring the temperature in the sterilization chamber;
Temperature adjusting means for controlling the heating of the sterilization chamber so that the room temperature of the sterilization chamber measured by the thermometer is within a predetermined temperature range;
The provided, ozone sterilization apparatus according to any one of claims 1 to 9, characterized in that.

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