JP5615386B2 - 基板への繰返しパターンの特徴の書込み - Google Patents

基板への繰返しパターンの特徴の書込み Download PDF

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Publication number
JP5615386B2
JP5615386B2 JP2012557176A JP2012557176A JP5615386B2 JP 5615386 B2 JP5615386 B2 JP 5615386B2 JP 2012557176 A JP2012557176 A JP 2012557176A JP 2012557176 A JP2012557176 A JP 2012557176A JP 5615386 B2 JP5615386 B2 JP 5615386B2
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JP
Japan
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region
features
compensation values
writing
write
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JP2012557176A
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English (en)
Japanese (ja)
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JP2013522806A5 (enExample
JP2013522806A (ja
Inventor
エム． カーソン，ダグラス
エム． カーソン，ダグラス
Original Assignee
ダグ カーソン アンド アソシエーツ，インク．
ダグ カーソン アンド アソシエーツ，インク．
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Publication of JP2013522806A publication Critical patent/JP2013522806A/ja
Publication of JP2013522806A5 publication Critical patent/JP2013522806A5/ja
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
    • G11B5/59633—Servo formatting
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
    • G11B5/59633—Servo formatting
    • G11B5/59638—Servo formatting apparatuses, e.g. servo-writers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
    • G11B5/59688—Servo signal format patterns or signal processing thereof, e.g. dual, tri, quad, burst signal patterns

Landscapes

  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Moving Of The Head To Find And Align With The Track (AREA)
  • Signal Processing For Digital Recording And Reproducing (AREA)
  • Electron Beam Exposure (AREA)
JP2012557176A 2010-03-08 2011-03-08 基板への繰返しパターンの特徴の書込み Expired - Fee Related JP5615386B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31159710P 2010-03-08 2010-03-08
US61/311,597 2010-03-08
PCT/US2011/027590 WO2011112610A1 (en) 2010-03-08 2011-03-08 Writing repeating patterns of features to a substrate

Publications (3)

Publication Number Publication Date
JP2013522806A JP2013522806A (ja) 2013-06-13
JP2013522806A5 JP2013522806A5 (enExample) 2014-04-24
JP5615386B2 true JP5615386B2 (ja) 2014-10-29

Family

ID=44531142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012557176A Expired - Fee Related JP5615386B2 (ja) 2010-03-08 2011-03-08 基板への繰返しパターンの特徴の書込み

Country Status (5)

Country Link
US (1) US8300505B2 (enExample)
JP (1) JP5615386B2 (enExample)
CN (1) CN102859594A (enExample)
SG (1) SG184003A1 (enExample)
WO (1) WO2011112610A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090118745A (ko) * 2008-05-14 2009-11-18 삼성전자주식회사 서보 패턴 오버헤드 최적화 방법 및 이를 이용한 디스크드라이브

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5450383A (en) * 1994-05-26 1995-09-12 International Business Machines Corporation Monitoring and adjusting laser write power in an optical disk recorder using pulse-width modulated power level checking signals
JP3469422B2 (ja) * 1996-02-23 2003-11-25 株式会社東芝 荷電ビーム描画方法及び描画装置
JP3729920B2 (ja) * 1996-03-18 2005-12-21 パイオニア株式会社 情報記録媒体並びにその記録装置及び再生装置
US20010028620A1 (en) * 1997-12-24 2001-10-11 Guerra John M. Information storage systems utilizing media with optically-differentiated data sites
US6014200A (en) * 1998-02-24 2000-01-11 Nikon Corporation High throughput electron beam lithography system
US6313476B1 (en) * 1998-12-14 2001-11-06 Kabushiki Kaisha Toshiba Charged beam lithography system
JP3783909B2 (ja) * 1999-05-20 2006-06-07 パイオニア株式会社 カッティング装置、情報記録媒体、情報記録装置及び情報記録方法並びに、カッティング方法
US8217304B2 (en) * 2001-03-29 2012-07-10 Gsi Group Corporation Methods and systems for thermal-based laser processing a multi-material device
US6738396B2 (en) * 2001-07-24 2004-05-18 Gsi Lumonics Ltd. Laser based material processing methods and scalable architecture for material processing
TW497138B (en) * 2001-08-28 2002-08-01 Winbond Electronics Corp Method for improving consistency of critical dimension
US6977791B2 (en) * 2002-03-23 2005-12-20 Kla-Tencor Technologies Corporation Media servowriting system
JP2004177783A (ja) * 2002-11-28 2004-06-24 Fuji Photo Film Co Ltd 電子ビーム描画方法
US7149043B2 (en) * 2002-12-27 2006-12-12 Matsushita Electric Industrial Co., Ltd. Methods for self-servowriting using write-current variation
AU2003303356A1 (en) * 2002-12-30 2004-07-22 Koninklijke Philips Electronics N.V. Determining lithographic parameters to optimise a process window
JP2005004906A (ja) * 2003-06-13 2005-01-06 Ricoh Co Ltd 情報記録方法及び情報記録装置
US6995940B2 (en) * 2003-07-22 2006-02-07 Matsushita Electric Industrial Co., Ltd. Systems for WORF improvement in conditional servowriting
US7526357B2 (en) * 2004-12-13 2009-04-28 The Aerospace Corporation Pulse modulation laser writing system
WO2007028241A2 (en) * 2005-09-07 2007-03-15 Universal Data Protection Corporation Method and system for data security of recording media
JP4476975B2 (ja) * 2005-10-25 2010-06-09 株式会社ニューフレアテクノロジー 荷電粒子ビーム照射量演算方法、荷電粒子ビーム描画方法、プログラム及び荷電粒子ビーム描画装置
JP4843425B2 (ja) * 2006-09-06 2011-12-21 エルピーダメモリ株式会社 可変成形型電子ビーム描画装置
JP5133087B2 (ja) * 2007-02-23 2013-01-30 株式会社ニューフレアテクノロジー 半導体装置の製造方法
JP2009237001A (ja) * 2008-03-26 2009-10-15 Fujifilm Corp 電子ビーム描画方法、微細パターン描画システム、凹凸パターン担持体の製造方法および磁気ディスク媒体の製造方法
JP2009245534A (ja) * 2008-03-31 2009-10-22 Fujifilm Corp インプリント用モールド構造体、並びに磁気記録媒体及びその製造方法
US8320690B2 (en) * 2010-06-10 2012-11-27 Ceva D.S.P. Ltd. System, data structure, and method for simultaneously retrieving multi-dimensional data with zero contention

Also Published As

Publication number Publication date
JP2013522806A (ja) 2013-06-13
SG184003A1 (en) 2012-10-30
US20110216433A1 (en) 2011-09-08
CN102859594A (zh) 2013-01-02
WO2011112610A1 (en) 2011-09-15
US8300505B2 (en) 2012-10-30

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