JP5611990B2 - 光電池 - Google Patents
光電池 Download PDFInfo
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- JP5611990B2 JP5611990B2 JP2011550642A JP2011550642A JP5611990B2 JP 5611990 B2 JP5611990 B2 JP 5611990B2 JP 2011550642 A JP2011550642 A JP 2011550642A JP 2011550642 A JP2011550642 A JP 2011550642A JP 5611990 B2 JP5611990 B2 JP 5611990B2
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- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 115
- 239000000758 substrate Substances 0.000 claims description 102
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 83
- 238000000034 method Methods 0.000 claims description 69
- 239000000463 material Substances 0.000 claims description 66
- 229910052732 germanium Inorganic materials 0.000 claims description 38
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 8
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 238000000227 grinding Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000003776 cleavage reaction Methods 0.000 claims description 3
- 230000007017 scission Effects 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 147
- 235000012431 wafers Nutrition 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 230000008569 process Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 8
- 238000012546 transfer Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000007704 transition Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009643 growth defect Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical group [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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Description
本発明から逸脱することなく、記載した実施形態に関して一連の変化および変形を施すことができることは明らかであろう。当該方法および構造は、太陽電池用途、熱起電力用途のみならず、光検出器および他の電子機器用途をも含め、種々の用途に使用することができる。
Claims (38)
- 第1光起電力接合を含み、前記接合が1つ以上の第1半導体層を含む光電池であって、
前記1つ以上の第1半導体層がGaAsに格子整合したSiGeのエピタキシャル成長層であり、
前記1つ以上の第1半導体層は、GaAs基板上にて当該GaAs基板と一体的にエピタキシャル成長した、ドープされたSi x Ge 1-x から形成され、ここで0.01≦x≦0.03である、光電池。 - 前記第1光起電力接合が2つの前記半導体層を使用して形成される、請求項1に記載の光電池。
- 前記2つの半導体層が反対型にドープされた、請求項2に記載の光電池。
- 前記第1光起電力接合上に配置され、前記第1光起電力接合より大きいバンドギャップを有する1つ以上のさらなる光起電力接合をさらに含む、請求項1ないし3のいずれかに記載の光電池。
- シリコン‐ゲルマニウムグレードが前記第1光起電力接合上に形成され、前記1つ以上のさらなる光起電力接合が、前記シリコン‐ゲルマニウムグレード上に形成された第2光起電力接合を含み、前記第2光起電力接合が、前記1つ以上の第1半導体層より高いシリコン含有量を有するSiGe材料のエピタキシャル成長層である1つ以上の第2半導体層を含み、前記シリコン‐ゲルマニウムグレードが下部及び上部境界のそれぞれで前記第1および第2光起電力接合の格子定数と整合するように形成されており、前記第2光起電力接合が0.85eVから1.05eVの間のバンドギャップを有する、請求項4に記載の光電池。
- 前記第1および第2光起電力接合のバンドギャップより大きいバンドギャップを有する1つ以上の付帯光起電力接合の一体形成された付帯構造をさらに含み、前記付帯構造が前記第2光起電力接合の上に位置し、かつそれと格子不整合である、請求項5に記載の光電池。
- 前記付帯構造がGaAsに格子整合する、請求項6に記載の光電池。
- 前記付帯光起電力接合の1つがGaAs光起電力接合であり、かつ前記付帯光起電力接合の別の1つがInGaP光起電力接合である、請求項7に記載の光電池。
- 前記1つ以上のさらなる光起電力接合が、前記第1光起電力接合と一体的に形成されたGaAs材料の光起電力接合を含む、請求項4に記載の光電池。
- 前記1つ以上のさらなる光起電力接合が、GaAs光起電力接合と一体的に形成されたInGaP材料の光起電力接合を含む、請求項9に記載の光電池。
- GaAsに格子整合したエピタキシャル成長SiGe層を含むゲルマニウム系第1光起電力接合と、エピタキシャル成長した中間GaAs系光起電力接合と、上部光起電力接合とを備え、前記エピタキシャル成長SiGe層は、GaAs基板上にて当該GaAs基板と一体的にエピタキシャル成長した、ドープされたSi x Ge 1-x から形成され、ここで0.01≦x≦0.03である、一体型トリプル接合太陽電池。
- GaAsに格子整合したエピタキシャル成長SiGe層を含むゲルマニウム系第1光起電力接合と、前記第1光起電力接合のSiGe層より高いシリコン含有量を有するエピタキシャル成長SiGe層を含む第2光起電力接合と、それぞれの面で前記第1および第2光起電力接合の格子定数に整合するように構成されたSiGeグレードとを備え、前記第1光起電力接合のエピタキシャル成長SiGe層は、GaAs基板上にて当該GaAs基板と一体的にエピタキシャル成長した、ドープされたSi x Ge 1-x から形成され、ここで0.01≦x≦0.03である、クワドロプル接合太陽電池。
- GaAs基板を提供するステップと、
前記GaAs基板に格子整合したSiGeからなる1つ以上のエピタキシャル成長第1半導体層を含む第1光起電力接合を前記GaAs基板上に形成するステップと、を含み、
前記1つ以上の第1半導体層が反対型にドープされたSixGe1-xから形成され、ここで0.01≦x≦0.03である、光電池を形成する方法。 - 前記第1半導体層が前記GaAs基板上に直接成長した、請求項13に記載の方法。
- 動作中に共通光電流が前記第1光起電力接合およびさらなる光起電力接合に流れるように、前記第1光起電力接合上に1つ以上のさらなる光起電力接合を形成するステップをさらに含む、請求項13または14に記載の方法。
- 前記GaAs基板の一部または全部を除去するステップをさらに含む、請求項13ないし15のいずれかに記載の方法。
- 前記除去ステップが、前記GaAs基板の少なくとも一部を機械的に又はエッチングにより除去するステップを含む、請求項16に記載の方法。
- 前記GaAs基板の少なくとも一部を機械的に除去する前記ステップが、イオン注入によって前記GaAs基板に劈開面を形成するステップを含む、請求項17に記載の方法。
- 前記劈開面を形成する前記ステップが、前記1つ以上の第1半導体層の最初の層の成長後、2番目の層もしくは前記1つ以上の第1半導体層の成長前に実行される、請求項18に記載の方法。
- 前記GaAs基板の少なくとも一部を機械的に除去する前記ステップが、前記GaAs基板を研削するステップを含む、請求項17ないし19のいずれかに記載の方法。
- 前記GaAs基板を除去するステップが、前記GaAs基板の少なくとも残存部分をエッチングするステップを含む、請求項16ないし20のいずれかに記載の方法。
- 前記GaAs基板を部分的にまたは全体的に代替ベースに交換するステップをさらに含む、請求項16ないし21のいずれかに記載の方法。
- 前記代替ベースがヒートシンクを含む、請求項22に記載の方法。
- 前記代替ベースがシリコンウェハを含む、請求項22に記載の方法。
- 前記1つ以上のさらなる光起電力接合が、前記第1半導体層より高いシリコン含有量を有するSiGe材料の1つ以上の第2エピタキシャル成長層を含む第2光起電力接合を備え、前記第2光起電力接合の成長前に、シリコン‐ゲルマニウムグレードが下部および上部境界のそれぞれで前記第1および第2光起電力接合の格子定数に整合するように、前記シリコン‐ゲルマニウムグレードを前記第1光起電力接合上に形成するステップをさらに含み、前記第2光起電力接合が0.85eVから1.05の間のバンドギャップを有する、請求項15ないし24のいずれかに記載の方法。
- 前記第1および第2光起電力接合のバンドギャップより大きいバンドギャップを有し、かつ前記第2光起電力接合と格子不整合である、1つ以上のエピタキシャル成長した付帯光起電力接合の付帯構造を形成するステップと、動作時に、共通光電流が前記第1、第2、および付帯光起電力接合を通過するように、前記付帯構造を前記第2光起電力接合の上に結合するステップとをさらに含む、請求項25に記載の方法。
- 前記付帯構造が付帯基板上に形成され、かつ前記結合ステップ後に前記付帯基板が除去される、請求項26に記載の方法。
- 前記付帯構造がGaAsに格子整合する、請求項26または27に記載の方法。
- 前記付帯光起電力接合の1つがGaAs材料の光起電力接合であり、かつ前記付帯光起電力接合の別の1つがInGaP材料の光起電力接合である、請求項26ないし28のいずれかに記載の方法。
- 前記1つ以上のさらなる光起電力接合が、前記ゲルマニウム系の第1光起電力接合と一体的に形成されたGaAs光起電力接合を含む、請求項15ないし24のいずれかに記載の方法。
- 前記1つ以上のさらなる光起電力接合が、前記GaAs接合と一体的に形成されたInGaP光起電力接合を含む、請求項30に記載の方法。
- ゲルマニウム材料の1つ以上の層を含む光起電力接合を備えた光電池を形成する方法であって、前記1つ以上の層をGaAs基板上に成長させるステップと、前記ゲルマニウム材料をエッチストップとして使用して前記GaAs基板を除去するステップとを含む方法。
- 前記除去ステップが、前記GaAs基板を剥離によって前記ゲルマニウム材料から機械的に分離するステップを含む、請求項32に記載の方法。
- 前記分離されたGaAs基板を、さらなる半導体装置の製造時にGaAsウェハとして再使用するステップをさらに含む、請求項33に記載の方法。
- 前記ゲルマニウム材料がSiGeである、請求項32ないし34のいずれかに記載の方法。
- 前記1つ以上の層がエピタキシャル成長する、請求項32ないし35のいずれかに記載の方法。
- 前記1つ以上の層が前記GaAs基板の表面に直接成長する、請求項36に記載の方法。
- 請求項13ないし37のいずれかのステップを含む方法を用いて形成された光電池。
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