JP5606429B2 - Joining method, program, computer storage medium, joining apparatus and joining system - Google Patents

Description

  The present invention relates to a bonding method, a program, a computer storage medium, a bonding apparatus, and a bonding system for bonding substrates together.

  In recent years, semiconductor devices have been highly integrated. When a plurality of highly integrated semiconductor devices are arranged in a horizontal plane and these semiconductor devices are connected by wiring to produce a product, the wiring length increases, thereby increasing the wiring resistance and wiring delay. There is concern about becoming.

  Thus, it has been proposed to use a three-dimensional integration technique in which semiconductor devices are stacked three-dimensionally. In this three-dimensional integration technique, two semiconductor wafers (hereinafter referred to as “wafers”) are bonded using, for example, a bonding apparatus. For example, the bonding apparatus includes a chamber that accommodates two wafers arranged vertically (hereinafter, the upper wafer is referred to as an “upper wafer” and the lower wafer is referred to as a “lower wafer”), And a push pin that presses the center portion of the upper wafer, and a spacer that supports the outer periphery of the upper wafer and can be retracted from the outer periphery of the upper wafer. When such a bonding apparatus is used, the wafers are bonded to each other in a vacuum atmosphere in order to suppress the generation of voids between the wafers. Specifically, first, in a state where the upper wafer is supported by the spacer, the central portion of the upper wafer is pressed by the push pin, and the central portion is brought into contact with the lower wafer. Thereafter, the spacer supporting the upper wafer is retracted, and the entire surface of the upper wafer is brought into contact with the entire surface of the lower wafer and bonded together (Patent Document 1).

JP 2004-207436 A

  However, in the bonding apparatus described in Patent Document 1, there are irregularities on the surface of a holding member such as a table on which the lower wafer is placed, or there are particles or the like on the surface of the holding member. The surface may not be flat. In such a case, when the upper wafer and the lower wafer are bonded together, vertical bonding occurs in the bonded wafers.

  Further, when the bonding apparatus described in Patent Document 1 is used, when the center portion of the upper wafer is pressed by the push pin, the upper wafer is only supported by the spacer, so that the upper wafer is horizontal with respect to the lower wafer. There is a possibility that the position of the direction is shifted.

  This invention is made | formed in view of this point, and when joining board | substrates, it aims at suppressing the distortion | strain of the vertical direction of a board | substrate joined, or the position shift of a horizontal direction at least.

In order to achieve the above object, the present invention is a bonding method for bonding substrates together using a bonding apparatus, wherein the bonding apparatus vacuums and holds the first substrate on the lower surface. A holding member; a second holding member that is provided below the first holding member, and that sucks and holds the second substrate on the upper surface by suction; and a first holding member that is provided on the first holding member. A pressing member that presses the center portion of the substrate, and a guide member that holds the first substrate by suction and fixes the horizontal position of the first substrate, and is movable in the vertical direction. bonding method, a first substrate held by the first holding member, the arrangement step of facing a second substrate held by the second holding member at a predetermined interval, then the The evacuation of the first substrate by the first holding member is stopped, and the first pulling is performed by the guide member. Holding the substrate by suction, lowering the first substrate while pressing the central portion of the first substrate by the pushing member, and bringing the central portion of the first substrate into contact with the central portion of the second substrate a pressing step of pressing by, then, in a state where the center portion of the center portion of the first substrate and the second substrate is pressed toward the outer periphery from the center of the first substrate, the first substrate And a bonding step of sequentially bonding the second substrate, and controls at least evacuation of the first substrate by the first holding member or evacuation of the second substrate by the second holding member. Thus, the vertical distortion or the horizontal position of the superposed substrate where at least the first substrate and the second substrate are bonded is controlled.

  According to the present invention, for example, even when the surface of the second holding member is not flat, at least evacuation of the first substrate by the first holding member or evacuation of the second substrate by the second holding member is controlled. By doing so, the influence of the low flatness in the surface of the 2nd holding member can be suppressed, and substrates can be joined. For this reason, the distortion of the vertical direction of a superposition | polymerization board | substrate can be suppressed. Further, by controlling at least the evacuation of the first substrate by the first holding member or the evacuation of the second substrate by the second holding member, the horizontal positions of the first substrate and the second substrate are controlled. The horizontal displacement between the first substrate and the second substrate can be suppressed. As described above, according to the present invention, when the substrates are bonded to each other, at least vertical distortion or horizontal displacement of the bonded substrates can be suppressed.

  After the center portion of the first substrate and the second substrate is joined in the pressing step, the evacuation of the second substrate by the second holding member may be stopped.

As a reference example, the first holding member is partitioned into a plurality of regions from the central portion toward the outer peripheral portion, and vacuuming of the first substrate can be set for each region. In the pressing step, Stop evacuation of the first substrate in the central region of the first holding member, and press the central portion of the first substrate and the central portion of the second substrate by the pushing member, In the bonding step, with the central portion of the first substrate and the central portion of the second substrate being pressed, the vacuuming of the first substrate in the outer peripheral region of the first holding member is stopped, The first substrate may be sequentially brought into contact with the second substrate from the center portion of the first substrate toward the outer peripheral portion, and the first substrate and the second substrate may be bonded.

  You may control the said predetermined space | interval in the said arrangement | positioning process, and control the distortion or the horizontal direction position of a superposition | polymerization board | substrate at least.

  The pressing pressure of the pressing member in the pressing step may be controlled to control at least the vertical distortion or the horizontal position of the superposed substrate.

  You may control the distortion | strain of the vertical direction of a superposition | polymerization board | substrate by controlling the flatness or surface roughness of the surface of a said 2nd holding member at least.

  The vertical strain of the superposed substrate may be controlled by controlling the bonding speed of the first substrate and the second substrate in the bonding step.

  A plurality of suction ports for evacuating the second substrate are formed on the surface of the second holding member at the center portion and the outer peripheral portion, and the center portions of the first substrate and the second substrate in the pressing step. , The second substrate may be evacuated by the central suction port, and the second substrate evacuation by the outer peripheral suction port may be stopped.

  According to another aspect of the present invention, there is provided a program that operates on a computer of a control unit that controls the joining apparatus in order to cause the joining apparatus to execute the joining method.

  According to another aspect of the present invention, a readable computer storage medium storing the program is provided.

According to another aspect of the present invention, there is provided a bonding apparatus for bonding substrates, wherein a first holding member that vacuum-sucks and holds a first substrate on a lower surface, and a lower portion of the first holding member. provided, and a second holding member for attracting and holding by the second substrate is evacuated to the top surface, provided on the first holding member, a pressing member for pressing a central portion of the first substrate, the A first substrate held by the first holding member; and a first substrate held by the first holding member; and a first substrate held by the first holding member; And disposing the second substrate held by the two holding members opposite to each other at a predetermined interval, and then evacuating the first substrate by the first holding member is stopped by the guide member. The first substrate is sucked and held, and the central portion of the first substrate is pushed by the pushing member. Lowers the first substrate while a pressing step of pressing by contacting the central portion of the first substrate and the center portion of the second substrate, then, the center portion and the second first substrate The first substrate and the second substrate are sequentially joined from the central portion of the first substrate toward the outer peripheral portion in a state where the central portion of the first substrate is pressed. 1 holding member, the second holding member , the pushing member and the guide member are controlled, and at least the vertical distortion or the horizontal direction of the superposed substrate in which the first substrate and the second substrate are joined A control unit that controls at least evacuation of the first substrate by the first holding member or evacuation of the second substrate by the second holding member so as to control the position. Yes.

  The controller controls the second substrate to stop evacuation of the second substrate by the second holding member after the central portions of the first substrate and the second substrate are joined in the pressing step. The holding member may be controlled.

As a reference example, the first holding member is partitioned into a plurality of regions from the central portion toward the outer peripheral portion, and vacuuming of the first substrate can be set for each region. In the pressing step, evacuation of the first substrate in the central region of the first holding member is stopped, and the central portion of the first substrate and the central portion of the second substrate are brought into contact with each other by the pressing member. In a state where the central portion of the first substrate and the central portion of the second substrate are pressed in the joining step, the first substrate is evacuated in the outer peripheral region of the first holding member. The first substrate is brought into contact with the second substrate sequentially from the central portion of the first substrate toward the outer peripheral portion, and the first substrate and the second substrate are joined together. One holding member and the pushing member may be controlled.

  The control unit may control the predetermined interval in the arranging step so as to control at least a vertical distortion or a horizontal position of the superposed substrate.

  The control unit may control a pressing pressure of the pressing member in the pressing step so as to control at least a vertical distortion or a horizontal position of the superposed substrate.

  The control unit may control at least the flatness or the surface roughness of the surface of the second holding member so as to control the vertical strain of the superposed substrate.

  The control unit may control a bonding speed between the first substrate and the second substrate in the bonding step so as to control a vertical strain of the superposed substrate.

  A plurality of suction ports for evacuating the second substrate are formed on the surface of the second holding member at the center portion and the outer peripheral portion thereof, and the control unit is configured to connect the first substrate and the second substrate in the pressing step. After the central portion of the substrate is bonded, the second substrate is evacuated by the suction port of the central portion, and the evacuation of the second substrate by the suction port of the outer peripheral portion is stopped. The two holding members may be controlled.

  According to another aspect of the present invention, there is provided a bonding system including the bonding apparatus, a processing station including the bonding apparatus, a first substrate, a second substrate, or a first substrate and a second substrate. A plurality of superposed substrates bonded to each other, and a loading / unloading station for loading / unloading the first substrate, the second substrate, or the superposed substrate with respect to the processing station. A surface modification device for modifying the surface to which the first substrate or the second substrate is bonded, and a surface hydrophilicity for hydrophilizing the surface of the first substrate or the second substrate modified by the surface modification device. And a transfer region for transferring the first substrate, the second substrate, or the polymerization substrate to the surface modification device, the surface hydrophilization device, and the bonding device, and the bonding In the apparatus, the surface of the surface hydrophilizing apparatus is It is characterized by bonding a first substrate and a second substrate which is hydrated.

  According to the present invention, when the substrates are bonded to each other, at least vertical distortion or horizontal displacement of the bonded substrates can be suppressed.

It is a top view which shows the outline of a structure of the joining system concerning this Embodiment. It is a side view which shows the outline of the internal structure of the joining system concerning this Embodiment. It is a side view which shows the outline of a structure of an upper wafer and a lower wafer. It is a longitudinal cross-sectional view which shows the outline of a structure of a surface modification apparatus. It is a top view of a lower electrode. It is a longitudinal cross-sectional view which shows the outline of a structure of a surface hydrophilization apparatus. It is a cross-sectional view which shows the outline of a structure of a surface hydrophilization apparatus. It is a cross-sectional view which shows the outline of a structure of a joining apparatus. It is a longitudinal cross-sectional view which shows the outline of a structure of a joining apparatus. It is a side view which shows the outline of a structure of a position adjustment mechanism. It is a top view which shows the outline of a structure of a reversing mechanism. It is a side view which shows the outline of a structure of the inversion mechanism. It is a side view which shows the outline of a structure of the inversion mechanism. It is a side view which shows the outline of a structure of a holding | maintenance arm and a holding member. It is a longitudinal cross-sectional view which shows the outline of a structure of an upper chuck | zipper and a lower chuck | zipper. It is the top view which looked at the upper chuck from the lower part. It is the top view which looked at the lower chuck from the upper part. It is a flowchart which shows the main processes of a wafer joining process. It is explanatory drawing which shows a mode that the position of the horizontal direction of an upper wafer and a lower wafer is adjusted. It is explanatory drawing which shows a mode that the position of the vertical direction of an upper wafer and a lower wafer is adjusted. It is explanatory drawing which shows a mode that an upper wafer is lowered | hung. It is explanatory drawing which shows a mode that the center part of an upper wafer and the center part of a lower wafer are contacted, and are pressed. It is explanatory drawing which shows a mode that the upper wafer and the lower wafer were joined. It is a longitudinal section showing an outline of composition of an upper chuck and a lower chuck concerning other embodiments. It is explanatory drawing which shows a mode that the position of the vertical direction of an upper wafer and a lower wafer is adjusted. It is explanatory drawing which shows a mode that the center part of an upper wafer and the center part of a lower wafer are contacted, and are pressed. It is explanatory drawing which shows a mode that an upper wafer is sequentially contact | abutted to a lower wafer. It is explanatory drawing which shows a mode that the surface of the upper wafer and the surface of the lower wafer were made to contact | abut. It is explanatory drawing which shows a mode that the upper wafer and the lower wafer were joined.

  Embodiments of the present invention will be described below. FIG. 1 is a plan view showing the outline of the configuration of the joining system 1 according to the present embodiment. FIG. 2 is a side view illustrating the outline of the internal configuration of the joining system 1.

In the interface system 1, bonding the wafer W _U, W _L as substrate, for example two as shown in FIG. Hereinafter, the wafer disposed on the upper side is referred to as “upper wafer W _U ” as the first substrate, and the wafer disposed on the lower side is referred to as “lower wafer W _L ” as the second substrate. Further, a bonding surface to which the upper wafer W _U is bonded is referred to as “front surface W _U1 ”, and a surface opposite to the front surface W _U1 is referred to as “back surface W _U2 ”. Similarly, the bonding surface to which the lower wafer W _L is bonded is referred to as “front surface W _L1 ”, and the surface opposite to the front surface W _L1 is referred to as “back surface W _L2 ”. Then, in the bonding system 1, by joining the upper wafer W _U and _the lower wafer W _L, to form the overlapped wafer W _T as a polymerization substrate.

As shown in FIG. 1, the bonding system 1 carries in and out cassettes C _U , C _L , and C _T that can accommodate a plurality of wafers W _U and W _L and a plurality of superposed wafers W _T , respectively, with the outside. The loading / unloading station 2 and the processing station 3 including various processing apparatuses that perform predetermined processing on the wafers W _U , W _L , and the overlapped wafer W _T are integrally connected.

The loading / unloading station 2 is provided with a cassette mounting table 10. The cassette mounting table 10 is provided with a plurality of, for example, four cassette mounting plates 11. The cassette mounting plates 11 are arranged in a line in the horizontal X direction (vertical direction in FIG. 1). These cassette mounting plates 11, cassettes _C U to the outside of the interface system _1, C L, when loading and unloading the _{C T,} a cassette _{C U,} C L, it is possible to place the _{C T} . Thus, carry-out station 2, a wafer over multiple W _U, a plurality of lower wafer W _L, and is configured to be held by a plurality of overlapped wafer W _T. The number of cassette mounting plates 11 is not limited to the present embodiment, and can be arbitrarily determined. One of the cassettes may be used for collecting abnormal wafers. That is a cassette a wafer abnormality occurs in the bonding of the upper wafer W _U and _the lower wafer W _L, it can be separated from the other normal overlapped wafer W _T by various factors. In the present embodiment, among the plurality of cassettes C _T, using a one cassette C _T for the recovery of the abnormal wafer, and using other cassettes C _T for the accommodation of a normal overlapped wafer W _T.

In the loading / unloading station 2, a wafer transfer unit 20 is provided adjacent to the cassette mounting table 10. The wafer transfer unit 20 is provided with a wafer transfer device 22 that is movable on a transfer path 21 extending in the X direction. The wafer transfer device 22 is also movable in the vertical direction and around the vertical axis (θ direction), and includes cassettes C _U , C _L , C _T on each cassette mounting plate 11 and a third of the processing station 3 described later. The wafers W _U and W _L and the superposed wafer W _T can be transferred between the transition devices 50 and 51 in the processing block G3.

  The processing station 3 is provided with a plurality of, for example, three processing blocks G1, G2, and G3 including various devices. For example, a first processing block G1 is provided on the front side of the processing station 3 (X direction negative direction side in FIG. 1), and on the back side of the processing station 3 (X direction positive direction side in FIG. 1) Two processing blocks G2 are provided. Further, a third processing block G3 is provided on the loading / unloading station 2 side of the processing station 3 (Y direction negative direction side in FIG. 1).

For example, in the first processing block G1, a surface modification device 30 for modifying the surfaces W _U1 and W _L1 of the wafers W _U and W _L is disposed. In this embodiment, the surface modification apparatus 30, the wafer _W U, the surface _W of _{W L U1,} by cutting the coupling of SiO ₂ in the _{W L1,} then the surface _W U1 to easily be hydrophilic, W _{Reform L1} .

For example, the second processing block G2 includes, for example, a surface hydrophilizing device 40 that hydrophilizes the surfaces W _U1 and W _L1 of the wafers W _U and W _L with pure water and cleans the surfaces W _U1 and W _{L1. U,} bonding device 41 for bonding the W _L are arranged side by side in the horizontal direction of the Y-direction in this order from the carry-out station 2 side.

For example, the third processing block G3, the wafer _W U as shown in FIG. 2, _{W L,} a transition unit 50, 51 of the overlapped wafer _{W T} are provided in two tiers from the bottom in order.

  As shown in FIG. 1, a wafer transfer region 60 is formed in a region surrounded by the first processing block G1 to the third processing block G3. For example, a wafer transfer device 61 is disposed in the wafer transfer region 60.

The wafer transfer device 61 has, for example, a transfer arm that can move around the vertical direction, horizontal direction (Y direction, X direction), and vertical axis. The wafer transfer device 61 moves in the wafer transfer region 60, and adds wafers W _U , W _L , and W to predetermined devices in the surrounding first processing block G1, second processing block G2, and third processing block G3. You can transfer the overlapping wafer _{W T.}

Next, the configuration of the surface modification device 30 described above will be described. As shown in FIG. 4, the surface modification device 30 has a processing container 70 that can be sealed inside. The side surface of the wafer transfer area 60 side of the processing container 70, the wafer W _U, the transfer port 71 of W _L is formed, the gate valve 72 is provided in the transfer port 71.

A lower electrode 80 for placing the wafers W _U and W _L is provided inside the processing container 70. The lower electrode 80 is made of a conductive material such as aluminum. Below the lower electrode 80, for example, a drive unit 81 including a motor or the like is provided. The lower electrode 80 can be moved up and down by the drive unit 81.

A heat medium circulation channel 82 is provided inside the lower electrode 80. A heat medium whose temperature is adjusted to an appropriate temperature by a temperature adjusting means (not shown) is introduced into the heat medium circulation passage 82 via a heat medium introduction pipe 83. The heat medium introduced from the heat medium introduction pipe 83 circulates in the heat medium circulation channel 82, whereby the lower electrode 80 is adjusted to a desired temperature. The heat of the lower electrode 80, the wafer W _U which is placed on the upper surface of the lower electrode _80, is transmitted to the W _L, the wafer W _U, W _L is adjusted to a desired temperature.

  The temperature adjustment mechanism for adjusting the temperature of the lower electrode 80 is not limited to the heat medium circulation channel 82, and other mechanisms such as a cooling jacket and a heater can also be used.

The upper part of the lower electrode 80 is configured as an electrostatic chuck 90 for electrostatically attracting the wafers W _U and W _L. The electrostatic chuck 90 has a structure in which a conductive film 93 such as a copper foil is disposed between two films 91 and 92 made of a polymer insulating material such as polyimide resin. The conductive film 93 is connected to a high-voltage power source 96 through a wiring 94 and a filter 95 such as a coil. At the time of the plasma processing, a high voltage set to an arbitrary DC voltage is cut from the high voltage power source 96 by the filter 95 and applied to the conductive film 93. Thus by the Coulomb force generated by the high voltage applied to the conductive film 93, wafer W _U to the upper surface (the upper surface of the electrostatic chuck 90) of the lower electrode _80, W _L is brought into electrostatic attraction.

The upper surface of the lower electrode 80, the wafer W _U, a plurality of heat transfer gas supply holes 100 for supplying a heat transfer gas toward the rear surface of the W _L is provided. As shown in FIG. 5, the plurality of heat transfer gas supply holes 100 are uniformly arranged in a plurality of concentric circles on the upper surface of the lower electrode 80.

As shown in FIG. 4, a heat transfer gas supply pipe 101 is connected to each heat transfer gas supply hole 100. The heat transfer gas supply pipe 101 communicates with a gas supply source (not shown), and a heat transfer gas such as helium is transferred from the gas supply source to the upper surface of the lower electrode 80 and the back surfaces W _U2 and W of the wafers W _U and W _L. It is supplied to a minute space formed between _L2 . Thereby, heat is efficiently transmitted from the upper surface of the lower electrode 80 to the wafers W _U and W _L.

Incidentally, the wafer W _U, if sufficient heat is efficiently transferred to W _L may be omitted heat transfer gas supply holes 100 and the heat transfer gas supply pipe 101.

Around the upper surface of the lower electrode 80, the wafer W _U which is placed on the upper surface of the lower electrode _80, so as to surround the outer periphery of W _L, the annular focus ring 102 is disposed. The focus ring 102 is made of an insulating or conductive material that does not attract reactive ions, and acts so that the reactive ions are effectively incident only on the inner wafers W _U and W _L.

  An exhaust ring 103 provided with a plurality of baffle holes is disposed between the lower electrode 80 and the inner wall of the processing container 70. By the exhaust ring 103, the atmosphere in the processing container 70 is uniformly exhausted from the processing container 70.

  A power feed rod 104 made of a hollow conductor is connected to the lower surface of the lower electrode 80. A first high-frequency power source 106 is connected to the power feed rod 104 via a matching unit 105 made of, for example, a blocking capacitor. During the plasma processing, a high frequency voltage of 2 MHz, for example, is applied to the lower electrode 80 from the first high frequency power supply 106.

  An upper electrode 110 is disposed above the lower electrode 80. The upper surface of the lower electrode 80 and the lower surface of the upper electrode 110 are arranged in parallel with each other with a predetermined distance therebetween. A distance between the upper surface of the lower electrode 80 and the lower surface of the upper electrode 110 is adjusted by the driving unit 81.

  A second high-frequency power source 112 is connected to the upper electrode 110 via a matching unit 111 made of, for example, a blocking capacitor. During the plasma processing, a high frequency voltage of 60 MHz, for example, is applied to the upper electrode 110 from the second high frequency power supply 112. As described above, the high frequency voltage is applied to the lower electrode 80 and the upper electrode 110 from the first high frequency power source 106 and the second high frequency power source 112, thereby generating plasma in the processing container 70.

  A high voltage power supply 96 that applies a high voltage to the conductive film 93 of the electrostatic chuck 90, a first high frequency power supply 106 that applies a high frequency voltage to the lower electrode 80, and a second high frequency power supply that applies a high frequency voltage to the upper electrode 110. 112 is controlled by the control part 300 mentioned later.

  A hollow portion 120 is formed inside the upper electrode 110. A gas supply pipe 121 is connected to the hollow portion 120. The gas supply pipe 121 communicates with a gas supply source 122 that stores processing gas therein. In addition, the gas supply pipe 121 is provided with a supply device group 123 including a valve for controlling the flow of the processing gas, a flow rate adjusting unit, and the like. Then, the flow rate of the processing gas supplied from the gas supply source 122 is controlled by the supply device group 123 and is introduced into the hollow portion 120 of the upper electrode 110 via the gas supply pipe 121. For example, oxygen gas, nitrogen gas, argon gas or the like is used as the processing gas.

  A baffle plate 124 for promoting uniform diffusion of the processing gas is provided inside the hollow portion 120. The baffle plate 124 is provided with a large number of small holes. On the lower surface of the upper electrode 110, a large number of gas jets 125 for ejecting a processing gas from the hollow portion 120 into the processing container 70 are formed.

  An intake port 130 is formed below the processing container 70. An intake pipe 132 that communicates with a vacuum pump 131 that reduces the atmosphere inside the processing container 70 to a predetermined degree of vacuum is connected to the intake port 130.

Note that below the lower electrode 80, the wafer W _U, the lift pins for supporting and elevating the the W _L from below (not shown) is provided. The elevating pin is inserted through a through hole (not shown) formed in the lower electrode 80 and can protrude from the upper surface of the lower electrode 80.

Next, the structure of the surface hydrophilization apparatus 40 mentioned above is demonstrated. As shown in FIG. 6, the surface hydrophilizing device 40 has a processing container 150 capable of sealing the inside. The side surface of the wafer transfer area 60 side of the processing chamber 150, the wafer _W U, the transfer port 151 of the _{W L} is formed as shown in FIG. 7, the opening and closing a shutter 152 is provided to the out port 151.

A spin chuck 160 that holds and rotates the wafers W _U and W _L is provided at the center of the processing container 150 as shown in FIG. The spin chuck 160 has a horizontal upper surface, and the upper surface is, for example, the wafer W _U, suction port for sucking the W _L (not shown) is provided. By suction from the suction port, the wafers W _U and W _L can be sucked and held on the spin chuck 160.

  The spin chuck 160 has a chuck driving unit 161 including, for example, a motor, and can be rotated at a predetermined speed by the chuck driving unit 161. The chuck driving unit 161 is provided with an elevating drive source such as a cylinder, and the spin chuck 160 can be moved up and down.

Around the spin chuck 160, there is provided a cup 162 that receives and collects the liquid scattered or dropped from the wafers W _U and W _L. Connected to the lower surface of the cup 162 are a discharge pipe 163 for discharging the collected liquid and an exhaust pipe 164 for evacuating and exhausting the atmosphere in the cup 162.

  As shown in FIG. 7, a rail 170 extending along the Y direction (left and right direction in FIG. 7) is formed on the X direction negative direction (downward direction in FIG. 7) side of the cup 162. For example, the rail 170 is formed from the outside of the cup 162 on the Y direction negative direction (left direction in FIG. 7) to the outside on the Y direction positive direction (right direction in FIG. 7). For example, a nozzle arm 171 and a scrub arm 172 are attached to the rail 170.

The nozzle arm 171, pure water nozzle 173 is supported for supplying pure water to the wafer _W U, _{W L} as shown in FIGS. The nozzle arm 171 is movable on the rail 170 by a nozzle driving unit 174 shown in FIG. As a result, the pure water nozzle 173 can move from the standby unit 175 installed on the outer side of the cup 162 on the positive side in the Y direction to the upper part of the center of the wafers W _U and W _L in the cup 162. _U, movable on _{W L} wafer _W U, in the radial direction of _{W L.} The nozzle arm 171 can be moved up and down by a nozzle driving unit 174, and the height of the pure water nozzle 173 can be adjusted.

  As shown in FIG. 6, a supply pipe 176 that supplies pure water to the pure water nozzle 173 is connected to the pure water nozzle 173. The supply pipe 176 communicates with a pure water supply source 177 that stores pure water therein. The supply pipe 176 is provided with a supply device group 178 including a valve for controlling the flow of pure water, a flow rate adjusting unit, and the like.

A scrub cleaning tool 180 is supported on the scrub arm 172. At the tip of the scrub cleaner 180, for example, a plurality of thread-like or sponge-like brushes 180a are provided. The scrub arm 172 is movable on the rail 170 by a cleaning tool driving unit 181 shown in FIG. 7, and the scrub cleaning tool 180 is moved from the outside of the cup 162 in the negative Y direction side to the wafer W _U in the cup 162. it can be moved to above the central portion of the W _L. Further, the scrub arm 172 can be moved up and down by the cleaning tool driving unit 181, and the height of the scrub cleaning tool 180 can be adjusted.

  In the above configuration, the pure water nozzle 173 and the scrub cleaning tool 180 are supported by separate arms, but may be supported by the same arm. Further, the pure water nozzle 173 may be omitted and pure water may be supplied from the scrub cleaning tool 180. Further, the cup 162 may be omitted, and a discharge pipe that discharges liquid to the bottom surface of the processing container 150 and an exhaust pipe that exhausts the atmosphere in the processing container 150 may be connected. Further, in the surface hydrophilizing device 40 having the above configuration, an antistatic ionizer (not shown) may be provided.

Next, the structure of the joining apparatus 41 mentioned above is demonstrated. As shown in FIG. 8, the bonding apparatus 41 includes a processing container 190 that can seal the inside. The side surface of the wafer transfer area 60 side of the processing vessel 190, the wafer _W U, _{W L,} the transfer port 191 of the overlapped wafer _{W T} is formed, close shutter 192 is provided to the out port 191.

The inside of the processing container 190 is divided into a transport region T1 and a processing region T2 by an inner wall 193. The loading / unloading port 191 described above is formed on the side surface of the processing container 190 in the transfer region T1. In addition, on the inner wall 193, a loading / unloading port 194 for the wafers W _U and W _L and the overlapped wafer W _T is formed.

A transition 200 for temporarily placing the wafers W _U and W _L and the superposed wafer W _T is provided on the positive side in the X direction of the transfer region T1. The transition 200 is formed in, for example, two stages, and any two of the wafers W _U , W _L , and the superposed wafer W _T can be placed at the same time.

A wafer transfer mechanism 201 is provided in the transfer area T1. As shown in FIGS. 8 and 9, the wafer transfer mechanism 201 has a transfer arm that can move around the vertical direction, the horizontal direction (Y direction, X direction), and the vertical axis, for example. Then, the wafer transfer mechanism 201 can transport wafers _W U, _{W L,} the overlapped wafer _{W T} between the inside transfer region T1, or a transfer region T1 and the processing region T2.

A position adjustment mechanism 210 that adjusts the horizontal direction of the wafers W _U and W _L is provided on the X direction negative direction side of the transfer region T1. Position adjusting mechanism 210 includes a base 211, as shown in FIG. 10, the wafer _W U, _{W L} and a holding portion 212 for holding and rotating suction, detection for detecting a position of the notch portion of the wafer _W U, _{W L} Part 213. Then, the position adjusting mechanism 210, the wafer _W U sucked and held by the holding portion 212, the detection unit 213 while rotating the _{W L} by detecting the position of the notch portion of the wafer _W U, _{W L,} the notch Are adjusted to adjust the horizontal orientation of the wafers W _U and W _L.

Further, in the transfer region T1 is inverting mechanism 220 for inverting the front and rear surfaces of the upper wafer W _U is provided. Inverting mechanism 220 has a holding arm 221 which holds the upper wafer _{W U,} as shown in FIGS. 11 to 13. The holding arm 221 extends in the horizontal direction (Y direction in FIGS. 11 and 12). Also the holding arm 221 is provided on the holding member 222 for holding the upper wafer W _U, for example four positions. As shown in FIG. 14, the holding member 222 is configured to be movable in the horizontal direction with respect to the holding arm 221. Also on the side surface of the holding member 222, the cutout 223 for holding the outer peripheral portion of the upper wafer W _U is formed. Then, these holding members 222 can be held by sandwiching the upper wafer W _U.

As shown in FIGS. 11 to 13, the holding arm 221 is supported by a first driving unit 224 including, for example, a motor. By this first drive unit 224, the holding arm 221 is rotatable around a horizontal axis. The holding arm 221 is rotatable about the first drive unit 224 and is movable in the horizontal direction (Y direction in FIGS. 11 and 12). Below the first drive unit 224, for example, a second drive unit 225 including a motor or the like is provided. The second driving unit 225 allows the first driving unit 224 to move in the vertical direction along the support pillar 226 extending in the vertical direction. This way the first driving unit 224 the second driving unit 225, _the upper wafer W _U held by the holding member 222 is movable in the vertical direction and the horizontal direction together with the pivotable about a horizontal axis. Further, the upper wafer W _U held by the holding member 222 can move around the first drive unit 224 and move from the position adjusting mechanism 210 to an upper chuck 230 described later.

The processing region T2, a chuck 230 on as a first holding member for sucking and holding the upper wafer W _U at the lower surface as shown in FIGS. 8 and 9, the suction holding and mounting the lower wafer W _L with the upper surface A lower chuck 231 is provided as a second holding member. The lower chuck 231 is provided below the upper chuck 230 and is configured to be disposed so as to face the upper chuck 230. That is, the lower wafer W _L held on the wafer W _U and the lower chuck 231 on which is held by the upper chuck 230 is adapted to be placed opposite.

  The flatness of the surfaces of the upper chuck 230 and the lower chuck 231 is small, for example, 11.9 μm. Therefore, the surfaces of the upper chuck 230 and the lower chuck 231 are substantially flat.

The surface of the lower chuck 231 is nickel plated. The nickel plating is mirror finished. In this case, the surface roughness of the surface of the lower chuck 231 is, for example, a center line average roughness (Ra) of 1.95 μm and a ten-point average roughness (Rz) of 10.2 μm. Here The inventors have studied intensively in order to suppress distortion in the vertical direction of the joined are overlapped wafer W _T has been found that the surface roughness of the lower chuck 231 is reasonably required. For example, when the surface roughness of the lower chuck 231 is too small, that is, if the surface is too smooth, the lower wafer W _L is sucked and held along the surface shape of the lower chuck 231. Therefore, although the surface of the lower chuck 231 as described above is substantially flat, since it has a slight flatness, lower wafer W _L is distorted in the vertical direction. On the other hand, for example, when the surface roughness of the lower chuck 231 is too large, that is, if the surface is too rough, the influence of the roughness of the lower chuck 231, the lower wafer W _L is distorted in the vertical direction. Therefore, it is preferable that the surface roughness of the lower chuck 231 is appropriate. According to the inventors, it has been found that the planar roughness is appropriate.

In addition, the surface of the upper chuck 230 is also subjected to mirror plating nickel plating similarly to the surface of the lower chuck. In such a case, it is possible to also suppress deflection of the vertical direction of the upper wafer W _U.

The upper chuck 230 is supported by a support member 232 provided on the ceiling surface of the processing vessel 190 as shown in FIG. The support member 232 supports the outer peripheral portion of the upper surface of the upper chuck 230. A chuck driving unit 234 is provided below the lower chuck 231 via a shaft 233. The lower chuck 231 can be moved up and down in the vertical direction and moved in the horizontal direction by the chuck driving unit 234. Further, the lower chuck 231 is rotatable about the vertical axis by the chuck driving unit 234. Below the lower chuck 231, the lift pins for lifting and supporting the lower wafer W _L from below (not shown) is provided. The elevating pin is inserted through a through hole (not shown) formed in the lower chuck 231 and can protrude from the upper surface of the lower chuck 231.

As shown in FIG. 15, the upper chuck 230 is divided into a plurality of, for example, three regions 230a, 230b, and 230c. These regions 230a, 230b, and 230c are provided in this order from the center of the upper chuck 230 toward the outer periphery as shown in FIG. The region 230a has a circular shape in plan view, and the regions 230b and 230c have an annular shape in plan view. Each region 230a, 230b, the 230c, the suction port 240a for sucking and holding the upper wafer _{W U,} 240b, 240c are formed independently of each other. Each suction port 240a, 240b, 240c has an annular shape in plan view. Further, as shown in FIG. 15, suction tubes 241a, 241b, and 241c are connected to the suction ports 240a, 240b, and 240c, respectively. Different vacuum pumps 242a, 242b, 242c are connected to the suction tubes 241a, 241b, 241c, respectively. Thus, the upper chuck 230, each region 230a, 230b, and is capable of setting the vacuum of the upper wafer _{W U} per 230c.

A through hole 243 that penetrates the upper chuck 230 in the thickness direction is formed at the center of the upper chuck 230. Center of the upper chuck 230 corresponds to the central portion of the upper wafer W _U which is attracted to and held on the on the chuck 230. And the pushing pin 251 of the pushing member 250 mentioned later is penetrated by the through-hole 243. As shown in FIG.

On the upper surface of the upper chuck 230, pressing member 250 for pressing the central portion of the upper wafer W _U it is provided. The pushing member 250 has a cylinder structure, and includes a pushing pin 251 and an outer cylinder 252 that serves as a guide when the pushing pin 251 moves up and down. The push pin 251 can be moved up and down in the vertical direction through the through hole 243 by, for example, a drive unit (not shown) incorporating a motor. The pressing member 250, the wafer W _U to be described _later, at the time of bonding of W _L, can be pressed by contacting the center portion of the center and lower wafer W _L of the upper wafer W _U.

The distal end portion of the upper wafer W _U side in pressing pin 251 of the pressing member 250, guide member 253 for attracting and holding the on the wafer W _U is provided. A vacuum pump 255 is connected to the guide member 253 via a push pin 251 and a suction pipe 254 connected to the base end of the push pin 251. For this reason, the push pin 251 has a hollow structure so that air flows therethrough. The guide member 253 can be held by suction on the wafer W _U fixes the horizontal position of the on the wafer W _U. Further, as the push pin 251 moves up and down in the vertical direction, the guide member 253 is also movable in the vertical direction.

The upper chuck 230, the upper imaging member 256 for imaging the surface _{W L1} of the lower wafer _{W L} is provided. For the upper imaging member 256, for example, a wide-angle CCD camera is used. Note that the upper imaging member 256 may be provided on the upper chuck 230.

As shown in FIG. 17, the lower chuck 231 is divided into a plurality of, for example, two regions 231a and 231b. These regions 231a and 231b are provided in this order from the center of the lower chuck 231 toward the outer periphery. The region 231a has a circular shape in plan view, and the region 231b has an annular shape in plan view. Each region 231a, the 231b, the suction port 260a for sucking and holding the lower wafer _{W L,} 260b are formed independently of each other. The suction port 260 a is formed at the center of the lower chuck 231. A plurality of suction ports 260b are formed on the same circumference in the outer peripheral portion of the lower chuck 231. Each suction port 260a, 260b has a circular shape with a minute diameter, for example, a diameter of 0.3 mm in plan view. Further, suction pipes 261a and 261b are connected to the suction ports 260a and 260b, respectively, as shown in FIG. Different vacuum pumps 262a and 262b are connected to the suction tubes 261a and 261b, respectively. Therefore, the lower chuck 231, each region 231a, and is capable of setting the vacuum of the lower wafer _{W L} per 231b.

The lower chuck 231 is provided with a lower imaging member 263 that images the surface W _U1 of the upper wafer W _U as shown in FIG. For the lower imaging member 263, for example, a wide-angle CCD camera is used. Note that the lower imaging member 263 may be provided on the lower chuck 231.

The above joining system 1 is provided with a control unit 300 as shown in FIG. The control unit 300 is a computer, for example, and has a program storage unit (not shown). The program storage unit stores a program for controlling processing of the wafers W _U and W _L and the overlapped wafer W _{T in} the bonding system 1. The program storage unit also stores a program for controlling operations of driving systems such as the above-described various processing apparatuses and transfer apparatuses to realize later-described wafer bonding processing in the bonding system 1. The program is recorded on a computer-readable storage medium H such as a computer-readable hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnetic optical desk (MO), or a memory card. May have been installed in the control unit 300 from the storage medium H.

Next, a method for bonding the wafers W _U and W _L performed using the bonding system 1 configured as described above will be described. FIG. 18 is a flowchart showing an example of main steps of the wafer bonding process.

First, the cassette C _U, the cassette C _L accommodating the lower wafer W _L of the _plurality, and the empty cassette C _T is a predetermined cassette mounting plate 11 of the carry-out station 2 accommodating the wafers W _U on the plurality Placed on. Thereafter, _the upper wafer W _U in the cassette C _U is taken out by the wafer transfer device 22 is conveyed to the transition unit 50 of the third processing block G3 in the processing station 3.

Then the upper wafer W _U is transferred to the surface modification apparatus 30 of the first processing block G1 by the wafer transfer apparatus 61. Surface modifying apparatus 30 upper wafer W _U carried into is placed transferred from the wafer transfer unit 61 on the upper surface of the lower electrode 80. Thereafter, the wafer transfer device 61 leaves the surface modification device 30 and the gate valve 72 is closed.

Thereafter, the vacuum pump 131 is operated, and the atmosphere inside the processing container 70 is reduced to a predetermined degree of vacuum, for example, 67 Pa to 333 Pa (0.5 Torr to 2.5 Torr) through the air inlet 130. Then, processing on the wafer W _U as described below, the atmosphere in the processing chamber 70 is maintained at the predetermined degree of vacuum.

Further, a high voltage set to, for example, a DC voltage of 2500 V is applied from the high voltage power source 96 to the conductive film 93 of the electrostatic chuck 90. By the Coulomb force generated by thus high voltage applied to the electrostatic chuck 90, the upper wafer W _U is is electrostatically adsorbed on the upper surface of the lower electrode 80. Further, the upper wafer W _U electrostatically attracted to the lower electrode 80 is maintained at a predetermined temperature, for example, 25 ° C. to 30 ° C. by the heat medium in the heat medium circulation channel 82.

  Thereafter, the processing gas supplied from the gas supply source 122 is uniformly supplied into the processing container 70 from the gas outlet 125 on the lower surface of the upper electrode 110. Then, a high frequency voltage of 2 MHz, for example, is applied from the first high frequency power supply 106 to the lower electrode 80, and a high frequency voltage of 60 MHz, for example, is applied from the second high frequency power supply 112 to the upper electrode 110. As a result, an electric field is formed between the upper electrode 110 and the lower electrode 80, and the processing gas supplied into the processing container 70 is turned into plasma by the electric field.

This process gas plasma (hereinafter sometimes referred to as “process plasma”) cuts the SiO ₂ bond so that the surface W _U1 of the upper wafer W _U on the lower electrode 80 is then easily hydrophilized. And the organic matter on the surface W _U1 is removed. At this time, the oxygen gas plasma in the processing plasma mainly contributes to the removal of organic substances on the surface W _U1 . Further, the oxygen gas plasma can promote the oxidation of the surface W _U1 of the upper wafer W _U , that is, the hydrophilization. Further, the argon gas plasma in the processing plasma has a certain amount of high energy, and organic substances on the surface W _U1 are positively (physically) removed by the argon gas plasma. Further, the argon gas plasma has an effect of removing residual moisture contained in the atmosphere in the processing vessel 70. In this way, the surface W _U1 of the upper wafer W _U is modified by the processing plasma (step S1 in FIG. 18).

Then the upper wafer W _U is transferred to a surface hydrophilizing apparatus 40 of the second processing block G2 by the wafer transfer apparatus 61. Surface hydrophilizing device wafer after being carried into the 40 W _U is the passed suction holding the wafer transfer apparatus 61 to the spin chuck 160.

Subsequently, the pure water nozzle 173 of the standby unit 175 is moved to above the center of the upper wafer W _U by the nozzle arm 171, and the scrub cleaning tool 180 is moved onto the upper wafer W _U by the scrub arm 172. Thereafter, while rotating the upper wafer _{W U} by the spin chuck 160, for supplying pure water onto the upper wafer _{W U} from the pure water nozzle 173. Then, hydroxyl groups adhere to the surface W _U1 of the upper wafer W _U , and the surface W _U1 is hydrophilized. Further, the surface W _U1 of the upper wafer W _U is cleaned by pure water from the pure water nozzle 173 and the scrub cleaning tool 180 (step S2 in FIG. 18).

Then the upper wafer W _U is transferred to the bonding apparatus 41 of the second processing block G2 by the wafer transfer apparatus 61. Upper wafer _{W U} which is carried into the joining device 41 is conveyed to the position adjusting mechanism 210 by the wafer transfer mechanism 201 via the transition 200. Then the position adjusting mechanism 210, the horizontal orientation of the upper wafer _{W U} is adjusted (step S3 in FIG. 18).

Thereafter, the upper wafer _{W U} is transferred from the position adjusting mechanism 210 to the holding arm 221 of the inverting mechanism 220. Subsequently, in transfer region T1, by reversing the holding arm 221, the front and back surfaces of the upper wafer W _U is inverted (step S4 in FIG. 18). That is, the surface W _U1 of the upper wafer W _U is directed downward.

Thereafter, the holding arm 221 of the reversing mechanism 220 rotates around the first driving unit 224 and moves below the upper chuck 230. The upper wafer _{W U} is transferred to the upper chuck 230 from the reversing mechanism 220. The upper wafer W _U has its rear surface W _U2 sucked and held on the upper chuck 230 (step S5 in FIG. 18). At this time, all of the vacuum pumps 242a, 242b, operates the 242c, all regions 230a of the upper chuck 230, 230b, in 230c, are evacuated upper wafer _{W U.} Upper wafer W _U stands on the chuck 230 to the lower wafer W _L to be described later is transferred to the bonding apparatus 41. Incidentally, when sucking and holding the upper wafer W _U above the chuck 230, may perform evacuation of the upper wafer W _U by the guide member 253 may have to stop the evacuation. In the present embodiment, evacuation by the guide member 253 is stopped.

During the processing of steps S1~S5 described above on the wafer W _U is being performed, the processing of the lower wafer W _L Following the on wafer W _U is performed. First, the lower wafer W _L in the cassette C _L is taken out by the wafer transfer device 22 is conveyed to the transition unit 50 in the processing station 3.

Lower wafer _{W L} then is conveyed to the surface modification apparatus 30 by the wafer transfer apparatus 61, the surface _{W L1} of the lower wafer _{W L} is reformed (Step S6 in FIG. 18). Note that modification of the surface _{W L1} of the lower wafer _{W L} in step S6 is the same as step S1 of the aforementioned.

Thereafter, the lower wafer _{W L} is transferred to the surface hydrophilizing apparatus 40 by the wafer transfer apparatus 61, the surface _{W L1} of the lower wafer _{W L} is the surface _{W L1} together is hydrophilized is cleaned (FIG. 18 step S7 ). Incidentally, hydrophilic and cleaning of the surface W _L1 of the lower wafer W _L in step S7, to omit the detailed description is the same as step S2 of the above-described.

Thereafter, the lower wafer _{W L} is transported to the bonding apparatus 41 by the wafer transfer apparatus 61. Lower wafer _{W L} which is transported to the bonding unit 41 is conveyed to the position adjusting mechanism 210 by the wafer transfer mechanism 201 via the transition 200. Then the position adjusting mechanism 210, the horizontal orientation of the lower wafer _{W L} are adjusted (step S8 in FIG. 18).

Thereafter, the lower wafer _{W L} is transferred to the lower chuck 231 by the wafer transfer mechanism 201, it is attracted and held by the lower chuck 231 (step S9 in FIG. 18). At this time, all of the vacuum pumps 262a, actuates the 262b, all the regions 231a of the lower chuck 231, in 231b, are evacuated lower wafer _{W L.} The surface _{W L1} of the lower wafer _{W L} is to face upwards, the back surface _{W L2} of the lower wafer _{W L} is sucked and held by the lower chuck 231.

Next, the adjusted horizontal position of the wafer W _U and the lower wafer held by the lower chuck 231 W _L after being held by the upper chuck 230. As shown in FIG. 19, a plurality of predetermined reference points A, for example, four or more reference points A are formed on the surface W _L1 of the lower wafer W _L , and similarly, predetermined on the surface W _U1 of the upper wafer W _U. A plurality of, for example, four or more reference points B are formed. As these reference points A and B, for example, predetermined patterns formed on the wafers W _L and W _U are used, respectively. Then, by moving the upper imaging member 256 in the horizontal direction, the surface _{W L1} of the lower wafer _{W L} is imaged. Further, the lower imaging member 263 is moved in the horizontal direction, and the surface W _U1 of the upper wafer W _U is imaged. Thereafter, the position of the reference point A of the lower wafer W _L the upper imaging member 256 are displayed on the image captured, and the position of the reference point B of the wafer W _U on the lower imaging member 263 is displayed in the image captured Consistently, the horizontal position of the lower wafer W _L by the lower chuck 231 (including the horizontal direction) is adjusted. That is, the chuck drive unit 234 to move the lower chuck 231 in the horizontal direction is adjusted horizontal position of the lower wafer W _L. Horizontal position of the upper wafer _{W U} and the lower wafer _{W L} is adjusted in this way (step S10 in FIG. 18). Note that the lower chuck 230 may be moved instead of moving the upper imaging member 256 and the lower imaging member 263.

The horizontal direction of the wafers W _U and W _L is adjusted by the position adjusting mechanism 210 in steps S3 and S8, but fine adjustment is performed in step S10. In the step S10 of the present embodiment, the predetermined patterns formed on the wafers W _L and W _U are used as the reference points A and B. However, other reference points can be used. For example, the outer peripheral portion and the notch portion of the wafers W _L and W _U can be used as the reference points.

Thereafter, the chuck drive unit 234 raises the lower chuck 231 as shown in FIG. 20, to place the lower wafer W _L to a predetermined position. In this case, as the distance D between the surface _{W U1} of the surface _{W L1} and the upper wafer _{W U} of the lower wafer _{W L} is a predetermined distance, for example 80Myuemu～200myuemu, placing the lower wafer _{W L.} Vertical position of the upper wafer _{W U} and the lower wafer _{W L} is adjusted in this way (step S11 in FIG. 18). In the step S5~ step S11, all areas 230a of the upper chuck 230, 230b, in 230c, are evacuated upper wafer _{W U.} Similarly, in step S9~ step S11, all the regions 231a of the lower chuck 231, in 231b, are evacuated lower wafer _{W L.}

Thereafter, the suction pipe 241a in the upper chuck 230 as shown in FIG. 21, 241b, 241c (the suction port 240a, 240b, 240c) to stop the evacuation of _the upper wafer _{W U} from the upper by the guide member 253 wafers _{W U} Start vacuuming. That is, by stopping the suction holding of the upper wafer _{W U} by the upper chuck 230, for attracting and holding the upper wafer _{W U} by the guide member 253. Then, by pressing the pin 251 of the pressing member 250, while pressing the center portion of the upper wafer W _U lowering the on wafer W _U. At this time, a predetermined load, for example, 200 g to 750 g is applied to the push pin 251. Further, upon lowering of the pressing pin 251, it is never shifted horizontal position of the upper wafer W _U with respect to the lower wafer W _L by the guide member 253. Then, the pressing member 250 as shown in FIG. 22, it is brought into contact with the central portion of the central portion and the lower wafer _{W L} of the upper wafer _{W U} is pressed (step S12 in FIG. 18). At this time, the surface _{W L1} of the surface _{W U1} and the lower wafer _{W L} of the upper wafer _{W U} is in contact with the entire surface.

Thereafter, the bonding is started between the central portion of the central portion and the lower wafer W _L of _the upper wafer W _U which pressed (thick line portion in FIG. 22). That is, since the surface W _U1 of the upper wafer W _U and the surface W _L1 of the lower wafer W _L are respectively modified in steps S1 and S6, first, van der Waals force is generated between the surfaces W _U1 and W _L1 , The surfaces W _U1 and W _L1 are joined to each other. Thereafter, since the surface W _U1 of the upper wafer W _U and the surface W _L1 of the lower wafer W _L have been hydrophilized in steps S2 and S7, respectively, the hydrophilic groups between the surfaces W _U1 and W _L1 are hydrogen-bonded. _U1 and _WL1 are firmly joined to each other.

When the center of the central portion and the lower wafer _{W L} of the upper wafer _{W U} is joined to, and maintain the suction from the suction pipe 261a of the center portion of the lower chuck 231 (suction port 260a), the outer peripheral portion 261b Suction from (suction port 260b) is stopped. Then, for example, even when the surface of the lower chuck 231 to hold the lower wafer W _L has a slight flatness, since the outer peripheral portion of the lower wafer W _L is not held by suction on the lower chuck 231, the lower wafer W _L itself Vertical distortion can be suppressed. Further, since the central portion of the lower wafer W _L is sucked and held by the lower chuck 231, the lower wafer W _L does not move. Therefore, it is not shifted horizontal position of the lower wafer W _L for the upper wafer W _U.

Then, in a state where the center portion of the center and lower wafer W _L of the upper wafer W _U is pressed toward the peripheral portion from the central portion of the upper wafer W _U, coupled sequentially spreads described above. The diffusion of the bonding at this time is performed at an appropriate bonding speed. For example, if welding speed is too fast, the tip portion of the bonding spreading, so-called bonding wave collapses, void is generated between the upper wafer W _U and _the lower wafer W _L. Also the welding speed is too fast, since the shape of the upper wafer W _U resulting in proceeds and joined before matching the shape of the lower wafer W _L, easily distorted in the vertical direction is generated in the bonded overlapped wafer W _T Become. On the other hand, for example, when the joining speed is too slow, the joining strength becomes weak. If the post-contact speed is too slow, the throughput of the bonding process also decreases. Therefore, bonding diffusion is performed at an appropriate bonding speed.

The bonding speed described above is determined based on the processing conditions of the plasma processing when modifying the surfaces W _U1 and W _L1 of the wafers W _U and W _L in the steps S1 and S6. That is, when the wafers W _U and W _L are exposed to strong plasma for a long time, the surface W _U1 and W _L1 are further modified. Then, since the hydrophilicity of the surfaces W _U1 and W _L1 also progresses, the joining speed increases. On the other hand, the wafer _W U, _{if W L} is exposed briefly to the weak plasma, the surface _{W U1, W} reforming without much progress _L1, surface _{W U1, W} nor much progress hydrophilized _L1, joining The speed is slow.

Thus, _the upper wafer _{W U} and _the lower wafer _{W L} is bonded as shown in FIG. 23 (step S13 in FIG. 18). Then, stop the vacuuming of the upper wafer _{W U} by the guide member 253 to raise the pressing member 250 to the upper chuck 230. Further, by stopping the evacuation of the lower wafer _{W L} from the suction pipe 261a (suction port 260a) in the lower chuck 231 to stop the suction holding of the lower wafer _{W L} by the lower chuck 231.

The upper wafer W _U and _the lower wafer W _L overlapped wafer bonded W _T is transferred to the transition unit 51 by the wafer transfer apparatus 61, then carry out by the wafer transfer apparatus 22 of the station 2 of a predetermined cassette mounting plate 11 It is conveyed to the cassette _{C T.} Thus, a series of wafers _W U, bonding process of _{W L} is completed.

According to the above embodiment, after being joined by pressing the central portion of the central portion and the lower wafer W _L of the upper wafer W _U in step S12, the lower wafer W from outside of the suction port 260a of the lower chuck 231 while maintaining the _L evacuated to stop the evacuation of the lower wafer W _L from the suction port 260b of the outer peripheral portion. Then, for example, even when the surface of the lower chuck 231 to hold the lower wafer W _L has a slight flatness, since the outer peripheral portion of the lower wafer W _L is not held by suction on the lower chuck 231, the lower wafer W _L itself Vertical distortion can be suppressed. Accordingly, it is possible to suppress distortion in the vertical direction of the upper wafer W _U and overlapped wafer W _T to the lower wafer W _L are joined. Further, since the central portion of the lower wafer W _L is sucked and held by the lower chuck 231, the lower wafer W _L does not move. Therefore, it is possible to suppress the horizontal position displacement of the lower wafer W _L for the upper wafer W _U.

Furthermore, since the flatness of the surface of the lower chuck 231 is extremely small, the flatness of the surface of the lower chuck 231 is for very small, it is possible to suppress distortion in the vertical direction of the lower wafer W _L. Therefore, it is possible to suppress the distortion of the vertical overlapped wafer W _T.

Further, since the surface roughness of the lower chuck 231 is also suitable, it is possible to further suppress the distortion in the vertical direction of the lower wafer W _L. That is, for example, the surface roughness of the lower chuck 231 is not too small, the surface is not smooth, it is possible to suppress distortion in the vertical direction of the lower wafer W _L itself. Furthermore, for example, because is not too large surface roughness of the lower chuck 231, the surface only coarse, lower wafer W _L is not affected roughness of the lower chuck 231. Therefore, it is possible to suppress the distortion of the vertical overlapped wafer W _T.

Further, since the surfaces W _U1 and W _L1 of the wafers W _U and W _L are appropriately modified, the bonding speed between the upper wafer W _U and the lower wafer W _L can be made appropriate. Therefore, since welding speed is not too fast, it is possible to suppress the distortion of the vertical overlapped wafer W _T. Further, the void does not occur between the upper wafer W _U and _the lower wafer W _L. Further, since welding speed is not too slow, while maintaining an appropriate bonding strength between the upper wafer W _U and _the lower wafer W _L, the throughput of the bonding process can be secured.

The suction port 260a formed on the surface of the lower chuck 231, since 260b is having a fine diameter, these suction ports 260a, never lower wafer _{W L} is bent in the vertical direction by 260b.

In addition, when the inventors have studied intensively to suppress the distortion of the vertical overlapped wafer W _T, in order to further suppress the horizontal misalignment, surface W _L1 and the upper wafer W _U of the lower wafer W _L It was found that the distance D between the surface W _U1 and the load (pressing pressure) of the pressing member 250 may be controlled. Specifically, the distance D as in the present embodiment as 80Myuemu～200myuemu, if the load of the pressing member 250 and 200G～750g, the vertical distortion and horizontal position displacement of the overlapped wafer _{W T} It turned out that it can suppress.

In the step S12, while sucking and holding the upper wafer W _U by the guide member 253, since lowering the upper wafer W _U while pressing the center portion of the upper wafer W _U by pressing member 250, the upper wafer W _U is brought into contact with the central portion and the central portion of the lower wafer W _L of the time of pressing, it is not possible to the upper wafer W _U bends. Therefore, it is possible to suppress the distortion of the vertical overlapped wafer W _T.

In the step S12, in a state in which the upper wafer W _U sucked and held by the guide member 253, lowers the upper wafer W _U while pressing the center portion of the upper wafer W _U by pressing member 250, the on the wafer W it can be pressed by contacting the central portion of the central portion and the lower wafer W _L of _U. Then, for example, even when there is air between the upper wafer W _U and the lower wafer W _L , when the upper wafer W _U is lowered, the horizontal position of the upper wafer W _U with respect to the lower wafer W _L is lowered by the guide member 253. There is no deviation. Therefore, the wafers W _U and W _L can be appropriately bonded.

In the step S13, in a state where the center portion of the center and lower wafer W _L of the upper wafer W _U is pressed toward the peripheral portion from the central portion of the upper wafer W _{U, the} upper wafer W _U and _the lower wafer W _L can be joined sequentially. Then, for example, even if the air is present which can be a void between the upper wafer W _U and _the lower wafer W _L, always the outer peripheral portion side of the point the air that is in contact with the upper wafer W _U and the lower wafer W _L Therefore, the air can be released from the central portion to the outer peripheral portion between the wafers W _U and W _L. Thus, the wafer _W U, can suppress the generation of voids between _{W L,} it is possible to more suitably joined wafers _W U, the _{W L} together.

In addition, according to the present embodiment, it is not necessary to use a vacuum atmosphere for bonding the wafers W _U and W _L as in the prior art, so that the bonding of the wafers W _U and W _L can be performed efficiently in a short time. And the throughput of the wafer bonding process can be improved.

Further, in addition to the bonding apparatus 41, the bonding system 1 hydrophilizes the surface W _U1 and W _L1 and the surface modifying apparatus 30 that modifies the surfaces W _U1 and W _L1 of the wafers W _U and W _L and the surface W _U1 and W _L1. Since the surface hydrophilizing device 40 for cleaning the surfaces W _U1 and W _L1 is also provided, the wafers W _U and W _L can be efficiently bonded in one system. Accordingly, the throughput of the wafer bonding process can be further improved.

In joining device 41 of the above embodiment, the bonding method of the upper wafer W _U and _the lower wafer W _L may be used are not other joining methods limited to the above embodiment.

  For example, as shown in FIG. 24, the guide member 253, the suction tube 254, and the vacuum pump 255 of the above embodiment are omitted from the upper wafer 230, and a bonding apparatus having the same configuration as the bonding apparatus 41 of the above embodiment is used. .

In this case, after the horizontal position of the upper wafer W _U and the lower wafer W _L is adjusted in a step S10, in step S11, raises the lower chuck 231 as shown in FIG. 25, predetermined the lower wafer W _L Place at the position. In this case, as the distance D between the surface _{W U1} of the surface _{W L1} and the upper wafer _{W U} of the lower wafer _{W L} is a predetermined distance, for example 80Myuemu～200myuemu, placing the lower wafer _{W L.} Thus the vertical position of the upper wafer W _U and the lower wafer W _L is adjusted. Since steps S1 to S10 are the same as steps S1 to S10 in the above embodiment, detailed description is omitted.

Then, to stop the operation of the vacuum pump 242a, and stops the evacuation of _the upper wafer _{W U} from the suction pipe 241a (suction port 240a) in the region 230a of the central portion as shown in FIG. 26. At this time, the outer region 230b and the region 230c, the upper wafer _{W U} is held by suction is evacuated. Thereafter, by lowering the pressing pin 251 of the pressing member 250, while pressing the center portion of the upper wafer W _U lowering the on wafer W _U. At this time, a predetermined load, for example, 200 g to 750 g is applied to the push pin 251. Then, the pressing member 250 is pressed by abutting the central portion of the central portion and the lower wafer _{W L} of the upper wafer _{W U} (step S12 in FIG. 18).

Then, the bonding is started between the central portion of the central portion and the lower wafer W _L of _the upper wafer W _U which pressed (thick line portion in FIG. 26). That is, since the surface W _U1 of the upper wafer W _U and the surface W _L1 of the lower wafer W _L are respectively modified in steps S1 and S6, first, van der Waals force is generated between the surfaces W _U1 and W _L1 , The surfaces W _U1 and W _L1 are joined to each other. Thereafter, since the surface W _U1 of the upper wafer W _U and the surface W _L1 of the lower wafer W _L have been hydrophilized in steps S2 and S7, respectively, the hydrophilic groups between the surfaces W _U1 and W _L1 are hydrogen-bonded. _U1 and _WL1 are firmly joined to each other.

When the center of the central portion and the lower wafer _{W L} of the upper wafer _{W U} is joined to, and maintain the suction from the suction pipe 261a of the center portion of the lower chuck 231 (suction port 260a), the outer peripheral portion 261b Suction from (suction port 260b) is stopped. Then, for example, even when the surface of the lower chuck 231 to hold the lower wafer W _L has a slight flatness, since the outer peripheral portion of the lower wafer W _L is not held by suction on the lower chuck 231, the lower wafer W _L itself Vertical distortion can be suppressed. Further, since the central portion of the lower wafer W _L is sucked and held by the lower chuck 231, the lower wafer W _L does not move. Therefore, you are not shifted horizontal position of the lower wafer W _L for the upper wafer W _U.

Then, while pressing the center portion of the center and lower wafer _{W L} of the upper wafer _{W U} by pressing member 250 as shown in FIG. 27, to stop the operation of the vacuum pump 242b, the suction tube 241b in the region 230b stopping evacuation of the upper wafer _{W U} from (suction port 240b). Then, _the upper wafer _{W U} held in the region 230b falls onto the lower wafer _{W L.} Thereafter, to stop the operation of the vacuum pump 242c, stops the evacuation of _the upper wafer _{W U} from the suction pipe 241c in the area 230c (suction port 240c). Thus toward the peripheral portion from the central portion of the upper wafer W _U, stop evacuation of the upper wafer W _U, the upper wafer W _U comes into contact successively dropped onto the lower wafer W _L. Then, the above-described bonds are sequentially expanded by the van der Waals force between the surfaces W _U1 and W _L1 and the bonding by hydrogen bonding. The diffusion of bonding at this time is performed at an appropriate bonding speed as in the above embodiment. Thus, contact with the surface _{W U1} and the surface _{W L1} of the lower wafer _{W L} of the upper wafer _{W U} is entirely as shown in FIG. 28, _the upper wafer _{W U} and _the lower wafer _{W L} is bonded (step of FIG. 18 S13 ).

Thereafter, the pushing member 250 is raised to the upper chuck 230 as shown in FIG. Moreover, by stopping the evacuation of the lower wafer _{W L} from the suction pipe 261a (suction port 260a) in the lower chuck 231 to stop the suction holding of the lower wafer _{W L} by the lower chuck 231.

The upper wafer W _U and _the lower wafer W _L overlapped wafer bonded W _T is transferred to the transition unit 51 by the wafer transfer apparatus 61, then carry out by the wafer transfer apparatus 22 of the station 2 of a predetermined cassette mounting plate 11 It is conveyed to the cassette _{C T.} Thus, a series of wafers _W U, bonding process of _{W L} is completed.

Can also in this embodiment, while suppressing the distortion of the vertical Similarly overlapped wafer W _T in the above embodiment, to suppress the horizontal misalignment between the upper wafer W _U and _the lower wafer W _L .

In this embodiment, in step S13, in a state of pressing by contacting the central portion of the central portion and the lower wafer W _L of the upper wafer W _U by pressing member 250, the center portion of the upper wafer W _U toward the outer circumferential portion, to stop the evacuation of the upper wafer W _U, the upper wafer W _U are sequentially abut on the lower wafer W _L, it is possible to bond the upper wafer W _U and _the lower wafer W _L. Then, the region 230b, when stopping the evacuation of the upper wafer W _U in 230c, since the central portion of the central portion and the lower wafer W _L of the upper wafer W _U is pressed in contact with, for example, the upper wafer W even if there is air between the _U and the lower wafer W _L, never deviated in the horizontal direction position of the upper wafer W _U against the lower wafer W _L. Therefore, the wafers W _U and W _L can be appropriately bonded.

Further, during the in step S13, since the upper wafer W _U toward the peripheral portion from the central portion of the upper wafer W _U is by sequentially abutting on the lower wafer W _L, for example, the upper wafer W _U and the lower wafer W _L even if the air which can be a void is present, the air will be the upper wafer W _U is present at all times on the outer peripheral portion side of the portion where is in contact with the lower wafer W _L. Then, the air can escape from the central portion to the outer peripheral portion between the wafers W _U and W _L. Thus, the wafer _W U, can suppress the generation of voids between _{W L,} it is possible to more suitably joined wafers _W U, the _{W L} together.

As described above, when the joining method shown in FIGS. 20 to 23 is performed using the joining apparatus 41 shown in FIG. 15 (hereinafter referred to as the first embodiment), it is shown in FIG. by using the bonding apparatus 41 shown in FIGS. 25 29 (hereinafter, referred to. second embodiment) a, while suppressing the distortion of the vertical both overlapped wafer W _T, and the upper wafer W _U it is possible to suppress the horizontal misalignment between the lower wafer W _L. In this regard, the first embodiment does not deflect the upper wafer W _U, is particularly useful to suppress the distortion of the vertical overlapped wafer W _T. Specifically, for example, for the BSI model (Back Side Illumination), because it is important that to suppress distortion in the vertical direction of the overlapped wafer _{W T,} the first embodiment is useful. Meanwhile, in the second embodiment, since the upper wafer W _U it is firmly attracted and held by the upper chuck 230, particularly useful to suppress the horizontal position displacement of the lower wafer W _L for the upper wafer W _U It becomes. Specifically, for example, for a NAND flash memory having a through silicon via (TSV), it is important to suppress the positional deviation in the horizontal direction, so the second embodiment is useful. become.

In the above embodiment, and both control the flatness and surface roughness of the surface of the lower chuck 231, but not control the vertical deformation of the lower wafer W _L, the flatness of the surface of the lower chuck 231 or Only one of the surface roughness may be controlled. In such a case, although the degree of suppressing the distortion in the vertical direction of the lower wafer W _L is smaller, thereby improving the degree of freedom of selecting a chuck which can be used to lower chuck 231.

In the above embodiment, the surface of the lower chuck 231 is mirror-plated nickel plated, but the surface of the lower chuck 231 is limited to nickel plating as long as it has the appropriate predetermined surface roughness described above. It can take various forms. For example, the surface of the lower chuck 231 may be coated with PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer) which is a fluororesin. The PFA is preferably blasted. Even such a case, the surface of the lower chuck 231 has a predetermined surface roughness, it is possible to suppress distortion in the vertical direction of the lower wafer W _L.

In the above embodiment, the suction ports 240 a, 240 b, 240 c of the upper chuck 230 have an annular shape in plan view, but the suction in the upper chuck 230 is similar to the suction ports 260 a, 260 b in the lower chuck 230. The mouth has a circular shape, and may be formed at the center and the outer periphery of the upper chuck 230. In such a case, it is possible to the upper wafer W _U without be bent in the vertical direction, further to suppress the distortion of the vertical overlapped wafer W _T.

In the above-described embodiment, the oxygen gas plasma is used in the surface reforming apparatus 30, but a nitrogen gas plasma may be used instead. The inventors have studied intensively, more in the case of using the plasma of the nitrogen gas than with oxygen gas plasma is, the bonding strength of the upper wafer W _U and _the lower wafer W _L was found to be stronger. On the other hand, towards the case of using the plasma of oxygen gas than with plasma of the nitrogen gas was found to be more suppress distortion in the vertical direction of the overlapped wafer W _T. Therefore, it is preferable to use oxygen gas or nitrogen gas properly according to the required specifications.

  In the above embodiment, the lower chuck 231 can be moved up and down in the vertical direction and movable in the horizontal direction by the chuck driving unit 234, but the upper chuck 230 can be moved up and down in the vertical direction or moved in the horizontal direction. You may comprise. Further, both the upper chuck 230 and the lower chuck 231 may be configured to be vertically movable and movable in the horizontal direction.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the idea described in the claims, and these naturally belong to the technical scope of the present invention. It is understood. The present invention is not limited to this example and can take various forms. The present invention can also be applied to a case where the substrate is another substrate such as an FPD (flat panel display) other than a wafer or a mask reticle for a photomask.

1 joining system 2 unloading station 3 treatment station 30 the surface modification apparatus 40 surface hydrophilizing apparatus 41 welding device 60 the wafer transfer area 230 on the chuck 231 lower chuck 250 pressing member 253 guide members 260a, 260b suction port 300 controller W _U on the wafer W _L under wafer W _T polymerization wafer

Claims (17)

A bonding method for bonding substrates using a bonding apparatus,
The joining device includes:
A first holding member that evacuates and holds the first substrate on the lower surface;
A second holding member that is provided below the first holding member and vacuum-holds and holds the second substrate on the upper surface;
A pressing member provided on the first holding member and pressing a central portion of the first substrate;
A guide member that sucks and holds the first substrate to fix the position of the first substrate in the horizontal direction and is movable in the vertical direction ;
The joining method is:
An arrangement step of disposing the first substrate held by the first holding member and the second substrate held by the second holding member to face each other at a predetermined interval;
Thereafter, evacuation of the first substrate by the first holding member is stopped, the first substrate is sucked and held by the guide member, and the central portion of the first substrate is pressed by the pushing member. A pressing step of lowering the first substrate and bringing the central portion of the first substrate into contact with the central portion of the second substrate ;
Thereafter, the first substrate and the second substrate are sequentially joined from the center portion of the first substrate toward the outer peripheral portion in a state where the center portion of the first substrate and the center portion of the second substrate are pressed. And a joining step to
Polymerization in which at least the first substrate and the second substrate are joined by controlling at least evacuation of the first substrate by the first holding member or evacuation of the second substrate by the second holding member. A bonding method characterized by controlling vertical distortion or horizontal position of a substrate. The vacuuming of the second substrate by the second holding member is stopped after the central portions of the first substrate and the second substrate are joined in the pressing step. Joining method. The joining method according to claim 1 or 2 , wherein the predetermined interval in the arranging step is controlled to control at least a vertical distortion or a horizontal position of the superposed substrate. The bonding according to any one of claims 1 to 3 , wherein the pressing pressure of the pressing member in the pressing step is controlled to control at least a vertical distortion or a horizontal position of the superposed substrate. Method. At least the second to control the flatness or surface roughness of the surface of the holding member, and controlling the vertical deformation of the laminated substrate bonding method according to any one of claims 1-4 . First substrate and to control the welding speed of the second substrate in the bonding step, and controlling the vertical deformation of the laminated substrate bonding method according to any one of claims 1 to 5 . The surface of the second holding member is formed with a plurality of suction ports for evacuating the second substrate at the center and the outer periphery thereof,
After the central portion of the first substrate and the second substrate is joined in the pressing step, the second substrate is evacuated by the suction port of the central portion, and the second suction by the suction port of the outer peripheral portion is maintained. characterized by stopping the evacuation of the substrate bonding method according to any one of claims 1-6. For execution by the welding apparatus is bonding method according to any one of claims 1 to 7 program running on the control unit of the computer for controlling the bonding apparatus. A readable computer storage medium storing the program according to claim 8 . A joining device for joining substrates,
A first holding member that evacuates and holds the first substrate on the lower surface;
A second holding member that is provided below the first holding member and vacuum-holds and holds the second substrate on the upper surface;
A pressing member provided on the first holding member and pressing a central portion of the first substrate;
A guide member which holds the first substrate by suction and fixes the horizontal position of the first substrate and is movable in the vertical direction;
An arrangement step of disposing the first substrate held by the first holding member and the second substrate held by the second holding member to face each other at a predetermined interval, and then the first holding The evacuation of the first substrate by the member is stopped, the first substrate is sucked and held by the guide member, and the first substrate is lowered while pressing the central portion of the first substrate by the pushing member. Then, the pressing step of pressing the central portion of the first substrate and the central portion of the second substrate in contact with each other , and then the central portion of the first substrate and the central portion of the second substrate are pressed. In the state, the first holding member, the second substrate, and the bonding step of sequentially bonding the first substrate and the second substrate from the center portion of the first substrate toward the outer peripheral portion. holding member, to control the pressing member and the guide member, and at least a first substrate and a second group In order to control the vertical strain or the horizontal position of the superposed substrate to which the first substrate is bonded, at least the first substrate is evacuated by the first holding member or the second substrate is evacuated by the second holding member. And a controller for controlling evacuation. The controller controls the second substrate to stop evacuation of the second substrate by the second holding member after the central portions of the first substrate and the second substrate are joined in the pressing step. The joining apparatus according to claim 10 , wherein the holding member is controlled. The bonding according to claim 10 or 11 , wherein the control unit controls the predetermined interval in the arranging step so as to control at least a vertical distortion or a horizontal position of the superposed substrate. apparatus. Wherein the control unit, to control the vertical distortion or horizontal position of at least the polymerization substrate, and controlling the pressing pressure of the pressing member in the pressing step, the claims 10-12 The joining apparatus in any one. Wherein the control unit, to control the vertical deformation of the laminated substrate, and controlling the flatness or surface roughness of the surface of at least the second holding member, one of the claims 10-13 A joining apparatus according to claim 1. Wherein the control unit, to control the vertical deformation of the laminated substrate, and controlling the welding speed of the first substrate and the second substrate in the bonding step, one of the claims 10-14 A joining apparatus according to claim 1. The surface of the second holding member is formed with a plurality of suction ports for evacuating the second substrate at the center and the outer periphery thereof,
The control unit maintains the evacuation of the second substrate by the suction port of the central portion after the central portion of the first substrate and the second substrate are joined in the pressing step, and sucks the outer peripheral portion. and controlling the second holding member so as to stop the evacuation of the second substrate by mouth, the bonding apparatus according to any one of claims 10-15. A joining system comprising the joining device according to any one of claims 10 to 16 ,
A processing station comprising the joining device;
Each of the first substrate, the second substrate, or a plurality of superposed substrates bonded with the first substrate and the second substrate can be held, and the first substrate, the second substrate, or the superposed over the processing station. A loading / unloading station for loading and unloading substrates,
The processing station is
A surface modification device for modifying a surface to which the first substrate or the second substrate is bonded;
A surface hydrophilizing device for hydrophilizing the surface of the first substrate or the second substrate modified by the surface modifying device;
A transport region for transporting the first substrate, the second substrate, or the polymerization substrate to the surface modification device, the surface hydrophilization device, and the bonding device;
In the bonding apparatus, the first substrate and the second substrate whose surfaces have been hydrophilized by the surface hydrophilizing apparatus are bonded to each other.

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