JP5596997B2 - Head gimbal assembly - Google Patents

Description

  The present invention relates to a head gimbal assembly that records various information on a recording medium using light, particularly near-field light.

  2. Description of the Related Art In recent years, information recording / reproducing apparatuses in information processing equipment are exposed to a demand for recording and reproducing a larger amount of information while downsizing the apparatus itself. For this reason, the recording density of information recording media, such as magnetic media of hard disk drives, is increasing year by year. In order to meet such a high recording density, it is necessary to make a magnetic domain (a small magnet provided on the recording medium) smaller and close to one recording unit. Due to the influence and surrounding thermal energy, the recorded magnetic domain may unintentionally reverse. In order to suppress such a phenomenon, a material having a strong holding force has been adopted for the recording medium. A recording medium having a strong holding force cannot reverse the magnetic domain unless recording with a larger magnetic field at the time of recording instead of suppressing an unintended reversal phenomenon, which makes recording difficult.

  In order to solve such a problem, a method has been proposed in which only the magnetic domains to be recorded are heated and heated to reduce the coercive force to perform rewrite recording by irradiating light. As the recording density increases year by year, the magnetic domain itself to be recorded has become very small, so it is focused and heated to a size less than the wavelength of light, which has been the limit in conventional optical systems. Is required. To realize this, by using near-field light, it is possible to collect light in a smaller area, and to realize a higher recording density than that of a conventional optical information recording / reproducing device or the like. It is said.

  Various information recording / reproducing apparatuses using such an optically assisted magnetic recording method have been proposed. As an example, the configuration shown in Patent Document 1 is known. In this configuration, a head slider provided with a recording element that generates near-field light is scanned on the recording medium, and the head slider is arranged at a desired position on the recording medium. Then, by controlling both the near-field light emitted from the recording element and the recording magnetic field generated from the recording coil mounted on the head slider, the magnetic domain on the recording medium can be changed and information can be rewritten and recorded. It is.

  Such a recording element equipped with a head slider requires means for supplying light of sufficient intensity from the outside. Known examples of the light supply means include an optical fiber and a thin-film optical waveguide disclosed in Patent Document 1, a suspension board with circuit including an optical waveguide, electrical wiring, and a light emitting element disclosed in Patent Document 2.

Japanese Patent No. 3903365 Japanese Patent No. 4162697

  However, in the above-described light supply means according to Patent Document 1, since the optical components such as the prism and the optical coupler are arranged on the back surface of the head slider as viewed from the recording medium, the overall height of the head slider increases and the flying height on the recording medium is increased. Sometimes the head slider swings greatly. Therefore, in order to avoid contact with the recording medium, the distance to the medium increases, and the intensity of near-field light coupled to the recording medium decreases. Therefore, there is a possibility that the magnetic domains cannot be sufficiently heated and rewriting recording cannot be performed.

  Further, a groove is provided on the back surface of the slider head in order to store the optical fiber and the optical waveguide. On the surface of the slider head on the recording medium side, a fine structure for floating the slider head is formed by an air flow between the recording medium and the slider head. For this reason, if the groove is formed on the back surface of the slider head, the flatness tolerance of the slider head surface on the recording medium side increases, the flying performance of the slider head deteriorates, and the proximity to the recording medium becomes difficult. For this reason, similarly, there is a possibility that the magnetic domains cannot be sufficiently heated and rewritable recording cannot be performed.

  Further, in the light supply means according to Patent Document 2, since the optical waveguide is formed on the suspension that holds the head slider, the core that propagates the light must be configured with a very small radius of curvature. With such a core configuration having a small radius of curvature, a light propagation loss occurs in a portion having a small radius of curvature. Therefore, the light intensity supplied to the head slider is reduced, and as a result, the intensity of the generated near-field light is also reduced proportionally. Similarly to the above, there is a possibility that rewriting recording may fail because the magnetic domains cannot be sufficiently heated.

  Therefore, the present invention has been made in view of such circumstances, and the object thereof is to realize both stable and high-intensity light supply to the near-field light element provided on the slider and stable floating on the slider. It is to provide a head gimbal assembly.

In order to achieve the above object, the present invention provides the following means.
The head gimbal assembly according to the present invention includes a flexible member extending along the surface of the recording medium, a plate-like flexible substrate fixed to the flexible member, and the surface of the recording medium. A head gimbal assembly comprising a slider fixed to a deflecting member and a near-field light generating element provided on the slider, and recording information on a recording medium using the near-field light generated by the near-field light generating element The flexible substrate includes a light supply unit that supplies light used to generate the near-field light, is provided on an end surface side of the light supply unit, and intersects the optical axis of the optical waveguide. And a reflection part that reflects the light to the near-field light generating element. Accordingly, since the optical waveguide and the reflecting portion can be provided within the thickness range of the flexible substrate, the overall thickness can be reduced and light can be reliably reflected to the near-field light generating element. Therefore, high intensity near-field light can be generated, and at the same time, the slider can be stably floated, and the recording medium and the slider can be brought close to each other. Therefore, high-density and stable rewrite recording can be realized.

  In the head gimbal assembly according to the present invention, the reflecting portion is a slope provided at a position intersecting the optical axis of the light supply portion, and the slope reflecting the light emitted from the light supply portion is provided. It has the notch which has, It is characterized by the above-mentioned. Thereby, since the function of reflecting light can be formed simply by providing a cutout in the flexible substrate, the overall configuration can be simplified, and manufacturability can be improved.

  The head gimbal assembly according to the present invention is characterized in that the flexible member includes a suspension and a flexure provided in the suspension and having a substantially U-shaped opening, and the slider is provided in the flexure. To do.

  Accordingly, stable electrical signal communication to the slider and high intensity and stable light supply to the near-field light generating element can be performed, and at the same time, the overall height of the slider itself hardly changes. For this reason, high-intensity near-field light can be generated, and at the same time, the slider can be stably floated, and the recording medium and the slider can be brought close to each other. Therefore, high-density and stable rewrite recording can be realized.

  The head gimbal assembly according to the present invention is characterized in that at least a part of the light supply unit is an optical waveguide.

  Thereby, high energy and stable light can be supplied to the near-field light generating element mounted on the slider, and high-intensity near-field light can be generated. Therefore, high-density and stable rewrite recording can be realized.

  The head gimbal assembly according to the present invention is characterized in that at least a part of the light supply unit is a semiconductor laser.

  Thereby, the optical path length between the semiconductor laser as the light source and the near-field light generating element is shortened, and high light energy can be supplied to the near-field generating element. Therefore, high intensity near-field light can be generated. Further, since the optical waveguide is not mounted on the flexure, the flexure bending rigidity can be reduced, and the slider support rigidity can be lowered. Therefore, the slider can easily follow the vibration of the recording medium, and the slider can be floated very close to the recording medium.

  In the head gimbal assembly according to the present invention, the flexible substrate includes an electrical wiring connected to the slider.

  The head gimbal assembly according to the present invention is characterized in that a plurality of the electrical wirings are provided in the flexible substrate, and a part of the electrical wirings and the semiconductor laser are electrically connected.

  As a result, an electric signal can be supplied to the semiconductor laser without restricting the movement of the flexure, so that stable light can be supplied to the near-field light generating element. Therefore, stable rewrite recording can be realized.

  The head gimbal assembly according to the present invention is used to join the slider and the flexible substrate, and the surface facing the slider is closer to the slider than the surface facing the slider of the semiconductor laser. It has a protruding slider joint.

  Thereby, since the semiconductor laser and the slider are not directly fixed, stress such as a load is not applied to the semiconductor laser by the movement of the slider. For this reason, it becomes possible to supply stable and high intensity light. Therefore, high-density and stable rewrite recording can be realized.

  The head gimbal assembly according to the present invention is characterized in that a metal film is provided on the slope of the notch.

  Thereby, the reflectance on the inclined surface is improved and more light is incident on the near-field light generating element, so that high-intensity near-field light can be generated. Therefore, high-density and stable rewrite recording can be realized.

  In the head gimbal assembly according to the present invention, the notch is provided inside the flexible substrate and a connection pad provided on the flexible substrate for electrically connecting the slider and the electric wiring. Further, the suspension is installed at the tip of the suspension from a connection point with the electrical wiring.

  Thereby, a notch can be formed without cutting the electrical wiring. Thus, stable electrical signal communication to the slider and high intensity and stable light supply to the near-field light generating element can be performed. Therefore, high-density and stable rewrite recording can be realized.

  In the head gimbal assembly according to the present invention, the optical waveguide bridges the opening provided in the flexure.

  Thereby, since the optical waveguide can be arranged linearly, the loss of light propagating through the optical waveguide is reduced. Therefore, the intensity of the generated near-field light is increased, and stable writing / recording can be realized.

  The head gimbal assembly according to the present invention is characterized in that the light supply unit has a thickness equal to or less than a thickness of the flexible substrate.

  According to the head gimbal assembly of the present invention, the near-field light element mounted on the slider and the light source provided outside the slider can be connected with high efficiency, and at the same time, stable slider flying can be realized. Therefore, a high performance information recording / reproducing apparatus can be provided.

1 is a configuration diagram showing an embodiment of an information recording / reproducing apparatus using a head gimbal assembly according to a first embodiment of the present invention. It is a block diagram which shows the head gimbal assembly which concerns on the 1st Embodiment of this invention. It is sectional drawing explaining the head gimbal assembly which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the manufacturing method of the head gimbal assembly which concerns on the 1st Embodiment of this invention. It is sectional drawing explaining the head gimbal assembly which concerns on the 2nd Embodiment of this invention. It is sectional drawing explaining the head gimbal assembly which concerns on the 3rd Embodiment of this invention. It is sectional drawing explaining the head gimbal assembly which concerns on the 4th Embodiment of this invention. It is explanatory drawing which shows the manufacturing method of the head gimbal assembly which concerns on the 5th Embodiment of this invention. It is a block diagram explaining an example of the head gimbal assembly which concerns on the 6th Embodiment of this invention. It is sectional drawing explaining an example of the head gimbal assembly which concerns on the 6th Embodiment of this invention. It is sectional drawing explaining an example of the head gimbal assembly which concerns on the 6th Embodiment of this invention.

(First embodiment)
Hereinafter, a first embodiment according to the present invention will be described with reference to FIGS. FIG. 1 is a block diagram showing an information recording / reproducing apparatus 1 using a head gimbal assembly according to the present invention. The information recording / reproducing apparatus 1 is an apparatus that performs writing on a recording medium D having a magnetic recording layer by a heat-assisted magnetic recording method.

  As shown in FIG. 1, in the information recording / reproducing apparatus 1, a suspension 3 to which a slider 2 is fixed is fixed to a carriage 11. The slider 2 and the suspension 3 are collectively referred to as a head gimbal assembly 12. The disc-shaped recording medium D is rotated in a predetermined direction by the spindle motor 7. The carriage 11 is rotatable about the pivot 10 and is rotated by an actuator 6 controlled by a control signal from the control unit 5, so that the slider 2 can be disposed at a predetermined position on the surface of the recording medium D. The housing 9 has a box shape made of aluminum or the like (in FIG. 1, the peripheral wall surrounding the periphery of the housing 9 is omitted for easy understanding), and the above components are stored therein. The spindle motor 7 is fixed to the bottom surface of the housing 9. The slider 2 has a magnetic pole (not shown) that generates a magnetic field toward the recording medium D, a near-field light generating element (not shown) that generates a near-field light spot, and a reproduction that reproduces information recorded on the recording medium D. It has an element (not shown). The magnetic pole and the reproducing element are connected to the control unit 5 via the flexible substrate 13 laid along the suspension 3 and the carriage 11, the terminal 14 provided on the side surface of the carriage 11, and the flat cable 4. The control unit 5 includes an electronic circuit and a laser connected to the electronic circuit, the electrical wiring in the flexible substrate 13 and the electronic circuit of the control unit 5 are electrically connected, and the laser and the optical waveguide are optically connected. It is connected to the.

  One recording medium D may be provided, but a plurality of recording media may be provided as shown in FIG. As the number of recording media D increases, the number of head gimbal assemblies 12 also increases. Although FIG. 1 shows a configuration in which the head gimbal assembly 12 is provided only on one side of the recording medium D, it may be provided on both sides. Therefore, the number of head gimbal assemblies 12 is at most twice the number of recording media D. As a result, the recording capacity of the information recording / reproducing apparatus can be increased and the apparatus can be downsized.

  FIG. 2 is an enlarged view of the head gimbal assembly 12 according to the present invention. The suspension 3 includes a base plate 201, a hinge 202, a load beam 203, and a flexure 204, which are made of a thin stainless steel plate. The base plate 201 is fixed to the carriage 11 by mounting holes 201a provided in a part thereof. The hinge 202 connects the base plate 201 and the load beam 203. The hinge 202 is thinner than the base plate 201 and the load beam 203, and the suspension 3 is bent around the hinge 202. The flexure 204 is an elongated member fixed to the load beam 203 and the hinge 202, is thinner than the load beam 203 and the base plate 201, and is provided with a substantially U-shaped opening 205, so that the flexure 204 can be easily bent. A substantially rectangular parallelepiped slider 2 is fixed to the tip of the flexure 204.

  The surface opposite to the surface fixed to the flexure 204 in the surface of the slider 2 is a surface facing the recording medium D. This surface is a surface that generates a pressure for the slider 2 to rise from the viscosity of the air flow generated by the rotating recording medium D, and is called ABS (Air Bearing Surface). An uneven shape (not shown) is provided on the ABS, and a desired pressure distribution is generated between the slider 2 and the recording medium D. The slider 2 floats in a desired state due to the balance between the positive pressure for separating the slider 2 from the recording medium D, the negative pressure for attracting the slider 2 to the recording medium D, and the pressing force of the suspension 3. The minimum clearance between the recording medium D and the slider 2 is about 10 nm or less. The pressing force by the suspension 3 is mainly generated by the elasticity of the hinge 202. Further, since the hinge 202 and the flexure 204 are bent with respect to the undulation of the surface of the recording medium D, a desired floating state can be maintained.

  A flexible substrate 13 is provided on the flexure 204, and an electrical wiring 302 and an optical waveguide core 303 are provided inside the flexible substrate 13. The core 303 of the optical waveguide is installed by bridging the opening 205 of the flexure 204, and a notch 310 is provided on the end surface of the core 303 on the slider 2 side. In addition, the electrical wiring 302 is connected to the connection pad 320. The notch 310 is provided on the tip (free end) side of the suspension 3 from the connection point between the electric wiring 302 and the connection pad 320. Thereby, the notch 310 can be formed without cutting or deforming the electric wiring 302. The notch 310 constitutes a reflecting portion.

  The electric wiring 302 of the flexible substrate 13 is electrically connected to the slider 2 via the connection pad 320, and the core 303 is optically connected to the slider 2 via the notch 310. Since the electrical wiring 302 and the core 303 of the flexible substrate 13 are electrically and optically connected to the control unit 5, respectively, the electronic circuit of the control unit 5 and the laser and the slider 2 are electrically and optically connected. Will be.

  FIG. 3 is a cross-sectional view of the flexure 204, the flexible substrate 13, and the slider 2. It is a cross section in a plane parallel to the YZ plane in FIG. The flexible substrate 13 includes a base clad layer 301 formed on the flexure 204, a core 303 formed on the base clad layer 301, a cover clad layer 305 covering the core 303, and an electric wiring formed on the cover clad layer 305. 302, the cover layer 304 covering the electrical wiring 302, and a notch 310 provided at the end of the core 303. The base clad layer 301 and the cover clad layer 305 have the same optical refractive index, and the core 303, the base clad layer 301, and the cover clad layer 305 are formed by accurately managing the optical refractive index to form an optical waveguide. To do. The electric wiring 302 is made of a material such as copper, aluminum, or gold. The cover clad layer 305 and the cover layer 304 serve to insulate the electric wiring 302. All of the base clad layer 301, the cover layer 304, the core 303, and the cover clad layer 305 are made of a resin such as polyimide. The inclined surface of the notch 310 has an angle of 45 ° with respect to the flexure 204, and a thin film such as gold or aluminum is provided on the inclined surface to constitute a reflective film 311.

  Since the core 303 inside the flexible substrate 13 is linear or curved with a large radius of curvature, the light propagating through the core 303 propagates to the notch 310 with almost no attenuation.

  The light emitted from the core 302 propagates in the notch 310 through the air, then is reflected by the reflective film 311 provided on the slope of the notch 310, and enters the near-field light generating element 210 provided on the slider 2. The light incident on the near-field light generating element 210 generates near-field light on the ABS surface of the slider 2 and heats a fine area of the recording medium D.

  The electric wiring 302 is electrically connected to an electric pad, a magnetic pole, and a reproducing element (not shown) provided on the side surface of the slider 2 through a solder bump 401.

  Thereby, the magnetic pole and reproducing element provided on the slider 2 can be controlled by a signal from the electronic circuit of the control unit 5, and the near-field light of the near-field light generating element 210 provided near the magnetic pole can be controlled. Since a desired area of the recording medium D can be heated, information on the recording medium D can be recorded and reproduced.

  FIG. 4 shows a manufacturing process of the head gimbal assembly of the present invention, particularly a manufacturing method of the flexible substrate 13 and a connection fixing method of the flexible substrate 13 and the slider 2. The cross section in a plane parallel to the YZ plane in FIG. 2 is shown.

  Photosensitive polyimide is applied on a stainless steel sheet. Exposure and development are performed to form a base clad layer 301 (FIG. A). After the resist is applied, exposed and developed thereon, the core 303 is formed (FIG. B). After removing the resist, photosensitive polyimide is applied, exposed and developed to form a cover clad layer 305 (FIG. C). Next, the base clad layer 301, the core 303, and the cover clad layer 305 are cut out using a slitter cutter having an inclination of 45 ° on one side to form a notch 310 at a predetermined position (FIG. D). After the slope portion is protected with a resist, aluminum is deposited on the slope portion to form a reflective film 311 (FIG. E). After the resist is removed, another resist is applied, exposed and developed, and then the electrical wiring 302 is formed of copper (FIG. F). After removing the resist, a photosensitive polyimide is applied, exposed and developed to form a cover layer 304 (FIG. G). Thereby, the flexible substrate 13 is formed.

  After the entire flexible substrate 13 is protected with a resist or the like, a stainless steel thin plate is etched to form a flexure 204 (FIG. H). After the resist is removed, the load beam of the suspension and flexure 204 separately prepared are fixed by laser welding. A solder bump 401 is printed on the exposed portion of the electrical wiring 302, and a thermosetting adhesive is applied to the cover layer 304 (FIG. I). The slider 2 is positioned at a predetermined position on the flexible substrate 13 and heated. The solder bump 401 is melted, and the electric wiring 302 and the electric wiring of the slider 2 are electrically connected, and the slider 2 is fixed to the cover layer 304 with a thermosetting adhesive (FIG. J).

  With such a configuration, light from the laser can be incident on the near-field light generating element with almost no attenuation, and high-intensity near-field light can be emitted from the slider. Further, since no large optical component is mounted on the slider, the overall height of the slider hardly changes. Therefore, the slider can be stably levitated and the slider and the recording medium can be brought close to each other. Therefore, since the distance between the magnetic pole, the near-field light element, the reproducing element and the recording medium D can be kept constant, accurate and stable recording / reproducing can be realized.

  Further, since the flexible substrate 13 can integrally form the electrical connection parts with the electrical wiring, the optical waveguide, and the near-field light generating element, a low-cost configuration is possible.

(Second Embodiment)
Hereinafter, a second embodiment of the present invention will be described with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted. This embodiment is different from the first embodiment in that the notch 310 is filled with an adhesive 402.

  With such a configuration, the bonding area between the slider 2 and the flexible substrate 13 is widened, and the bonding strength can be increased. Further, by using an optical adhesive, particularly an adhesive having an index of refraction equivalent to that of the core 303 of the optical waveguide, the reflected light at the end face of the core 303 is reduced, and the notch 310 and near-field light are generated. The amount of light incident on the element 210 is increased, and a larger near-field light can be generated.

(Third embodiment)
A third embodiment according to the present invention will be described below with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted. This embodiment is different from the first embodiment in that the slope angle of the notch 310 is different.

  As shown in FIG. 6, the slope of the notch 310 is not limited to 45 °, and can be configured at about 60 °. In this case, by providing a grating in the near-field light generating element 210, the traveling direction of light obliquely incident on the near-field light generating element 210 is propagated in a direction perpendicular to the ABS surface of the slider 2. Can do. At the same time, a region for providing the electrical wiring 302 between the notch 301 and the connection pad 320 can be secured. Therefore, when forming the notch 310, the plurality of flexible substrates 13 can be collectively processed with a slitter cutter or the like.

  Further, by forming the slope of the notch 310 in a concave shape, a concave mirror can be formed, and it is possible to collect the light and make it incident on the near-field light generating element 210.

  In addition, although the description has been given using the notch 301 as an example of the reflective portion, it is needless to say that the present invention is not limited to this. For example, the tip of the core 303 may be cut obliquely, and the light may be reflected using the slope of the tip. Further, the angle of the inclined surface with respect to the optical axis is more preferably an angle that reflects light under total reflection conditions.

(Fourth embodiment)
Hereinafter, a fourth embodiment according to the present invention will be described with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted. This embodiment is different from the first embodiment in that the end face of the core 303 of the optical waveguide is formed on a slope.

  As shown in FIG. 7, the end surface of the core 303 of the optical waveguide is configured with an inclination of about several degrees. With such a configuration, even if the light propagating through the core 303 is reflected by the end face, the reflected light does not propagate to the laser because it is not the propagation mode of the optical waveguide. For this reason, since the laser oscillates stably, stable light can be supplied to the optical waveguide, and thus to the near-field light generating element, and stable near-field light can be generated.

(Fifth embodiment)
Hereinafter, a fifth embodiment of the present invention will be described with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted. This embodiment is different from the first embodiment in the positional relationship between the core 303 and the electric wiring 302 in the flexible substrate 13.
FIG. 8 shows a manufacturing process for configuring the core 303 and the bottom surface of the electric wiring 302 on the same plane. In addition, the cross section in a plane parallel to the XZ plane in FIG. 2 is shown.

  Specifically, photosensitive polyimide is applied on a stainless steel thin plate. Exposure and development are performed to form a base clad layer 301 (FIG. A). After the resist is applied, exposed and developed thereon, the core 303 is formed (FIG. B). After removing the resist, another resist is applied, exposed and developed, and then the electrical wiring 302 is formed of copper (FIG. C). After removing the resist, photosensitive polyimide is applied, exposed and developed to form a cover clad layer 305 (FIG. D). In the subsequent manufacturing process, similarly to the manufacturing process described above, a slitter cutter having an inclination of 45 ° on one side is used to cut out the electric wiring 302, the base clad layer 301, the core 303, and the cover clad layer 305, A notch 310 is formed at the position. Thereafter, the stainless steel thin plate is etched to form a flexure. This and the suspension load beam are fixed by laser welding. Solder bumps are printed on the exposed portions of the electrical wiring 302, and a thermosetting adhesive is applied to the cover layer 304 to fix and electrically connect the slider.

  Thereby, in the flexible substrate 13, arrangement | positioning of the core 303 and the electrical wiring 302 is not limited to the structure of 1st Embodiment, It can comprise by arbitrary arrangement | positioning. In addition, the flexible substrate 13 can be made thin, and the flexure 204 is less likely to inhibit deformation due to the rigidity of the flexible substrate 13. Therefore, since the slider can follow the recording medium, the slider can be floated very close to the recording medium.

(Sixth embodiment)
A sixth embodiment according to the present invention will be described below with reference to FIGS. The same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted. This embodiment is different from the first embodiment in that a light supply unit 330 is provided in the flexible substrate 13.

  FIG. 9 shows a part of the flexure 204 of the present embodiment, and FIG. 10 shows a cross section (YZ plane in FIG. 9) of the flexible substrate 13 and the slider 2.

  Specifically, a light supply unit 330, a plurality of electrical wirings 302, and a slider joint 340 are provided inside the flexible substrate 13. The light supply unit 330 includes an optical waveguide core 303 and a semiconductor laser 331. The electrical wiring 302 is electrically connected to the connection pad 320 and the laser connection pad 321, respectively. The slider joint 340 is provided around the semiconductor laser 331 and has a height higher than the height of the semiconductor laser 331 in the Z direction. Thereby, the slider joint portion 340 is formed so that the surface facing the slider 2 protrudes to the slider 2 side than the surface facing the slider 2 of the semiconductor laser 331.

  The slider 2 is fixed to the flexible substrate 13 by being bonded to the slider joint 340 and the cover clad layer 305.

  The laser connection pad 321 and the semiconductor laser 331 are electrically connected, and the semiconductor laser 331 oscillates and emits light by an electric signal supplied from the laser connection pad 321. Light emitted from the semiconductor laser 331 enters the core 303 of the optical waveguide, is reflected by the notch 310, and enters the near-field light generating element 210 provided on the slider 2.

  In addition, as shown in FIG. 11, the light supply unit 330 can be configured by only the semiconductor laser 331. The light emitted from the semiconductor laser 331 oscillates as it enters the notch 310 and enters the near-field light generating element 210 provided on the slider 2.

  With such a configuration, the optical path length between the semiconductor laser 331 as a light source and the near-field light generating element 210 is shortened, and high light energy can be supplied to the near-field generating element 210. Therefore, high intensity near-field light can be generated. Further, the structure in which the core of the optical waveguide bridges the opening 205 of the flexure 204 is eliminated, and the support rigidity of the slider 2 can be lowered. Therefore, the slider 2 can easily follow the vibration of the recording medium, and the slider 2 can be floated very close to the recording medium. Thereby, stable and reliable information recording can be realized. Further, since the semiconductor laser 331 and the slider 2 are not directly fixed, no stress such as a load is applied to the semiconductor laser 331 by the movement of the slider 2. For this reason, it becomes possible to supply stable and high intensity light.

  It should be noted that the technical scope of the present invention is not limited to the above-described embodiments, and includes those in which various modifications are made to the above-described embodiments without departing from the spirit of the present invention. In other words, the configuration described in the above-described embodiment is merely an example, and can be changed as appropriate. Moreover, it is also possible to employ | adopt combining each embodiment mentioned above suitably.

  Note that the light supply unit is provided inside the flexible substrate 13 and preferably has the same thickness as the flexible substrate 13 or a thickness smaller than the thickness.

D recording medium 1 information recording / reproducing apparatus 2 slider 3 suspension 11 carriage 12 head gimbal assembly 13 flexible substrate 204 flexure 210 near-field light generating element 302 electrical wiring 303 core 310 notch 311 reflective film 320 connection pad 321 laser connection pad 330 Light supply unit 331 semiconductor laser 340 slider joint

Claims (11)

A deflecting member extending along the surface of the recording medium;
A plate-like flexible substrate fixed to the flexible member;
A slider that faces the surface of the recording medium and is fixed to the flexible member;
A near-field light generating element provided on the slider;
A head gimbal assembly that records information on a recording medium using near-field light generated by the near-field light generating element,
The flexible substrate is
A light supply unit that supplies light used to generate the near-field light;
Provided on an end face side of the light supply unit, and a notch that form a concave slope condensing light,
A head gimbal assembly, comprising: a reflection portion provided on a surface of the cutout facing the end surface side of the light supply portion and reflecting the light to the near-field light generating element. The flexible substrate includes a plurality of electrical wirings connected to the slider,
The head gimbal assembly according to claim 1, wherein the notch is formed between the plurality of electrical wirings.   The head gimbal assembly according to claim 2, wherein a metal film is provided on the slope of the notch. The flexible substrate includes electrical wiring connected to the slider,
The notch is connected to the suspension from a connection point between a connection pad provided on the flexible board and the electric wiring provided inside the flexible board to electrically connect the slider and the electric wiring. The head gimbal assembly according to claim 2, wherein the head gimbal assembly is installed on a front end side of the head gimbal. The flexible member is
Suspension,
A flexure provided in the suspension and having a substantially U-shaped opening;
The head gimbal assembly according to claim 1, wherein the slider is provided in the flexure. 6. The head gimbal assembly according to claim 5 , wherein the optical waveguide is installed by bridging the opening provided in the flexure.   The head gimbal assembly according to claim 1, wherein at least a part of the light supply unit is an optical waveguide.   The head gimbal assembly according to claim 1, wherein at least a part of the light supply unit is a semiconductor laser. The head gimbal assembly of claim 8 in which the part of the respective front Symbol electrical wiring and the semiconductor laser is characterized by being electrically connected. The slider is used for bonding the slider and the flexible substrate, and a surface facing the slider has a slider joint that protrudes closer to the slider than a surface facing the slider of the semiconductor laser. The head gimbal assembly according to claim 9 .   The head gimbal assembly according to claim 1, wherein the light supply unit has a thickness equal to or less than a thickness of the flexible substrate.

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