JP5581589B2 - Coating head cleaning method, paste coating method, and plasma display manufacturing method - Google Patents

Coating head cleaning method, paste coating method, and plasma display manufacturing method Download PDF

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JP5581589B2
JP5581589B2 JP2008530263A JP2008530263A JP5581589B2 JP 5581589 B2 JP5581589 B2 JP 5581589B2 JP 2008530263 A JP2008530263 A JP 2008530263A JP 2008530263 A JP2008530263 A JP 2008530263A JP 5581589 B2 JP5581589 B2 JP 5581589B2
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discharge port
coating
paste
coating head
discharge
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JPWO2008149758A1 (en
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啓史 長井
征典 植田
泰樹 清水
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Toray Industries Inc
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/26Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/22Applying luminescent coatings
    • H01J9/227Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/52Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools, brushes, or analogous members
    • B08B1/30
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0028Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517Cleaning of print head nozzles
    • B41J2/16535Cleaning of print head nozzles using wiping constructions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517Cleaning of print head nozzles
    • B41J2/16552Cleaning of print head nozzles using cleaning fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517Cleaning of print head nozzles
    • B41J2/16535Cleaning of print head nozzles using wiping constructions
    • B41J2002/1655Cleaning of print head nozzles using wiping constructions with wiping surface parallel with nozzle plate and mounted on reels, e.g. cleaning ribbon cassettes

Description

本発明は、塗布ヘッドの吐出口近傍に付着した塗液や塗布ペーストを、粘着テープを該塗布ヘッドに押圧し除去する塗布ヘッド清浄方法に関する。   The present invention relates to a coating head cleaning method for removing coating liquid and coating paste adhering to the vicinity of a discharge port of a coating head by pressing an adhesive tape against the coating head.

近年、DC型およびAC型プラズマディスプレイの開発が進み、すでに上市され、大きな市場を形成しつつある。プラズマディスプレイには画素の仕切り等の諸機能を持った構造体が形成されている。例えばAC型プラズマディスプレイは、前面基板と背面基板との間に備えられた放電空間内で対向するアノードおよびカソード電極間にプラズマ放電を生じさせ、放電空間内に封入されているXe−Ne混合ガスなどの放電ガスから発生した147nm、172nmといった非常に波長が短い紫外線を、放電空間内に設けた蛍光体に照射することにより表示を行うものである。   In recent years, DC type and AC type plasma displays have been developed and are already on the market, forming a large market. In the plasma display, a structure having various functions such as pixel partitioning is formed. For example, an AC type plasma display generates a plasma discharge between an anode and a cathode electrode facing each other in a discharge space provided between a front substrate and a rear substrate, and a Xe-Ne mixed gas sealed in the discharge space. The display is performed by irradiating a phosphor provided in the discharge space with ultraviolet rays having a very short wavelength such as 147 nm and 172 nm generated from a discharge gas such as the above.

その構造体は、放電の広がりを一定領域に抑え、表示を規定のセル内で行わせると同時に、かつ均一な放電空間を確保するために設けられ、隔壁(障壁、リブともいう)と呼ばれている。隔壁の形状は、一般にはおよそ幅20〜120μm、高さ50〜250μmのストライプ状や格子状のものなどがある。そして、蛍光体は、蛍光体粉末、有機バインダーおよび有機溶媒を主成分とする蛍光体ペーストとして、所定の隔壁間に塗布され、必要に応じ乾燥、焼成することによって蛍光体層を形成する。蛍光体ペーストを所定の隔壁間に塗布する方法としては、スクリーン印刷法、ディスペンサー法(ノズル法と呼ばれる場合もある)があり、材料ロスの少ないディスペンサー法が注目されている。   The structure is provided in order to suppress the spread of the discharge to a certain area and to perform display in a prescribed cell, and to ensure a uniform discharge space, and is called a partition (also referred to as a barrier or rib). ing. The shape of the partition generally includes a stripe shape or a lattice shape having a width of 20 to 120 μm and a height of 50 to 250 μm. The phosphor is applied as a phosphor paste containing phosphor powder, an organic binder, and an organic solvent as main components between predetermined barrier ribs, and dried and fired as necessary to form a phosphor layer. As a method for applying the phosphor paste between predetermined barrier ribs, there are a screen printing method and a dispenser method (sometimes called a nozzle method), and a dispenser method with little material loss is attracting attention.

ディスペンサー法による蛍光体ペースト塗布方法を示した模式図を図3に示す。ディスペンサー法とは、塗布ヘッド1の内部に蛍光体ペースト2を貯留する空間(マニホールド)を持ち、基板3に対向し相対的に移動しながら、その空間に接続された加圧配管4を通して圧力を制御された圧縮空気を導入することで吐出口5から蛍光体ペースト2を隔壁間内に吐出することで塗布する塗布方法である。基板ごとの間欠塗布となるので、毎回の塗布開始に際して塗布ヘッドからのペーストの吐出が再現性良く安定していることが重要である。   A schematic diagram showing a phosphor paste coating method by the dispenser method is shown in FIG. The dispenser method has a space (manifold) for storing the phosphor paste 2 in the coating head 1 and moves relative to the substrate 3 while applying pressure through a pressure pipe 4 connected to the space. This is a coating method in which the phosphor paste 2 is ejected into the partition walls from the ejection port 5 by introducing controlled compressed air. Since intermittent coating is performed for each substrate, it is important that the discharge of the paste from the coating head is stable with good reproducibility at the start of each coating.

このディスペンサー法による蛍光体ペーストの塗布は毎葉塗布であり、1枚の基板に塗布を行った後吐出口5からの蛍光体ペースト2の吐出を停止するが、その際吐出口5近傍の吐出口面6(塗布ヘッドの吐出口を含む面)に残留ペーストが付着しやすい。もし次の塗布を行う前に吐出口5近傍の吐出口面6に残留ペーストや異物が付着していたり、吐出口5近傍の吐出口面6に傷、凹みなどの損傷があると塗布再開時に吐出量のばらつきを生じたり、ペーストの吐出挙動が乱れたりするなど、塗布が不安定になりやすいという問題がある。その結果、塗布品位が大きく損なわれ不良品が大量に発生するので好ましくない。   The application of the phosphor paste by this dispenser method is a leaf-by-leaf application, and after the application to one substrate, the discharge of the phosphor paste 2 from the discharge port 5 is stopped. Residual paste tends to adhere to the exit surface 6 (the surface including the discharge port of the coating head). If residual paste or foreign matter adheres to the discharge port surface 6 in the vicinity of the discharge port 5 before the next application, or if the discharge port surface 6 in the vicinity of the discharge port 5 has damage such as a scratch or a dent, There is a problem that the coating tends to become unstable, such as variations in the discharge amount and disordered paste discharge behavior. As a result, the coating quality is greatly impaired, and a large number of defective products are generated.

このため吐出口5を含む吐出口面6を塗布前に十分に清浄な状態にしておくことが重要である。すなわち塗布前の塗布ヘッドの清浄が不可欠である。そのような塗布ヘッドの清浄方法として、従来、拭き取り部材を吐出口面に押し当てながら摺動させて残留ペーストや異物を拭き取る方法が知られている(特許文献1参照)。これは、図4に示すように織編物からなる拭き取り部材9を吐出口面6に押し当て部材10で押し当てつつ一定方向11に摺動させながら摩擦により吐出口5および吐出口面6に付着した残留ペースト8を拭き取る方法である。とくに、拭き取り効果の向上を目的として、たとえば超極細繊維の織編物をアセトンなどの清浄溶剤で湿潤させながら用いる拭取方法が知られている。
しかし、この方法は、拭き取り効果の高い超極細繊維の織編物のコストが高いという問題がある上、拭き取り部材によって拭き取られた蛍光体ペースト中に含まれる蛍光体粉末などの無機粉末を吐出口面と接触させた状態で摺動することにより、塗布ヘッド表面に図5に示すような擦り傷12が発生するという問題がある。塗布ヘッドにこのような傷が発生すると、塗布開始時点における塗液の吐出挙動が不安定になりやすく、塗布品位が大きく損なわれるので使用できなくなり、傷のない塗布ヘッドと交換せざるを得なくなる。
For this reason, it is important that the discharge port surface 6 including the discharge port 5 be sufficiently clean before coating. That is, it is essential to clean the coating head before coating. As a method for cleaning such an application head, conventionally, a method is known in which a wiping member is slid while pressing against a discharge port surface to wipe off residual paste and foreign matter (see Patent Document 1). As shown in FIG. 4, the wiping member 9 made of a woven or knitted fabric is pressed against the discharge port surface 6 by the pressing member 10 and is slid in a predetermined direction 11 while being attached to the discharge port 5 and the discharge port surface 6 by friction. This is a method of wiping off the remaining paste 8. In particular, for the purpose of improving the wiping effect, there is known a wiping method in which, for example, a woven or knitted fabric of ultra-fine fibers is wetted with a clean solvent such as acetone.
However, this method has a problem that the cost of the woven or knitted fabric of ultra-fine fibers having a high wiping effect is high, and the inorganic powder such as phosphor powder contained in the phosphor paste wiped by the wiping member is discharged from the discharge port. By sliding in contact with the surface, there is a problem that an abrasion 12 as shown in FIG. 5 occurs on the surface of the coating head. When such a scratch occurs in the coating head, the discharge behavior of the coating liquid at the start of coating tends to become unstable, and the coating quality is greatly impaired, so that it cannot be used and must be replaced with a coating head having no scratch. .

その上、一般的にディスペンサー法の塗布ヘッド1には、直径が50〜200μm程度の微細な吐出口5が1000〜4000個程度高精度に加工されており、非常に高価であるので、擦り傷の発生によるこのような塗布ヘッドの交換はプラズマディスプレイパネルの製造コストを著しく増大するので好ましくない。   In addition, the dispensing head 1 of the dispenser method generally has about 1000 to 4000 fine discharge ports 5 with a diameter of about 50 to 200 μm and is processed with high accuracy, and is very expensive. Such replacement of the coating head due to generation is not preferable because it significantly increases the manufacturing cost of the plasma display panel.

一方、織編物を用いて拭き取る方法ではなく、スクレーパーを用いて吐出口近傍の吐出口面に付着した蛍光体ペーストを掻き取って清浄する方法が知られている(特許文献2参照)。しかし、スクレーパーによる掻き取りは調整が煩雑であり、スクレーパーの磨耗による発塵が問題となりやすい。また、スクレーパーやスクレーパーによって掻き取られた蛍光体ペースト中に含まれる蛍光体粉末などの無機粉末により塗布ヘッドの吐出口近傍の吐出口面に擦り傷が発生する恐れがあるのでやはり好ましくない。   On the other hand, not a method of wiping using a woven or knitted fabric, but a method of using a scraper to scrape and clean the phosphor paste adhering to the discharge port surface in the vicinity of the discharge port (see Patent Document 2). However, scraping with a scraper is complicated to adjust, and dust generation due to wear of the scraper tends to be a problem. Moreover, since inorganic powder such as phosphor powder contained in the phosphor paste scraped by the scraper may cause scratches on the discharge port surface near the discharge port of the coating head, it is also not preferable.

また、掻き取りによる吐出口の損傷問題を解決するために、インクジェットノズルの吐出口面にインクジェット用低粘度低濃度の塗液を少量吐出することで、塗液の潤滑作用によってスクレーパーの摩耗および吐出口面の傷を防止する技術が知られている(特許文献3参照)。しかしながら、蛍光体ペーストのように固体微粒子を高濃度で含有する高粘度ペーストの場合、塗液の潤滑作用は十分ではなく却ってスクレーパーの摩耗および吐出口面の傷を悪化させてしまう。   In addition, in order to solve the problem of damage to the discharge port due to scraping, a small amount of low-viscosity and low-concentration coating liquid is discharged onto the discharge port surface of the inkjet nozzle, so that the scraper wears and discharges due to the lubricating action of the coating liquid. A technique for preventing damage to the exit surface is known (see Patent Document 3). However, in the case of a high-viscosity paste containing solid fine particles at a high concentration, such as a phosphor paste, the lubricating action of the coating liquid is not sufficient, and the wear of the scraper and the scratches on the discharge port surface are worsened.

他方、この様な摺動による吐出口面の傷を防止するため、インクジェットノズルの吐出口面に多孔質吸着材からなる清浄材をゴム等の押し当て部材で略垂直に押し当てた後、離間する技術が知られている(特許文献4参照)。しかしながら、蛍光体ペーストのように固体微粒子を高濃度で含有する高粘度ペーストの場合、多孔質吸着剤を押し当てただけでは十分な吸収、転写が起こらず、清浄不良が発生する。   On the other hand, in order to prevent the discharge port surface from being scratched by such sliding, a cleaning material made of a porous adsorbent is pressed on the discharge port surface of the inkjet nozzle substantially vertically with a pressing member such as rubber, and then separated. The technique to do is known (refer patent document 4). However, in the case of a high-viscosity paste containing a high concentration of solid fine particles such as a phosphor paste, sufficient absorption and transfer do not occur just by pressing a porous adsorbent, resulting in poor cleaning.

さらに、溶剤吸収能力のある粘着テープを、蛍光体ペーストが付着した塗布ヘッドの吐出口面に当接し、残留ペーストから溶剤成分を吸収することで残留ペーストを固化させ、その固化したペーストを粘着力で被清浄材表面から剥離転写する技術が知られている(特許文献5参照)。   Furthermore, the adhesive tape with solvent absorption ability is brought into contact with the discharge port surface of the coating head to which the phosphor paste is adhered, and the residual paste is solidified by absorbing the solvent component from the residual paste. A technique for peeling and transferring from the surface of a material to be cleaned is known (see Patent Document 5).

そこで、このような粘着テープを特許文献4記載の装置と同様な塗布ヘッド清浄装置に装着し、特許文献1記載の装置と同様な蛍光体塗布装置で実際に塗布を行った結果、蛍光体ペーストが完全には除去出来ず、塗布品位が著しく損なわれた。粘着テープの押し付け時間を延ばしたり、押し当て回数を複数回繰り返しても、除去不良は完全には解消できなかっただけでなく、逆に悪化する場合もあった。現象を詳しく分析した結果、次のことが分かった。   Therefore, such a pressure-sensitive adhesive tape is mounted on a coating head cleaning device similar to the device described in Patent Document 4, and is actually applied by a phosphor coating device similar to the device described in Patent Document 1, resulting in a phosphor paste. Could not be completely removed, and the coating quality was significantly impaired. Even if the pressing time of the adhesive tape was extended or the number of times of pressing was repeated a plurality of times, not only the removal failure could not be completely eliminated, but also worsened in some cases. Detailed analysis of the phenomenon revealed the following.

図6は、押し当て動作を1度のみ行う清浄方法における吐出口近傍の残留ペーストの付着状態を示す模式図である。まず、特許文献1記載の装置と同様な従来型塗布ヘッド清浄装置を用いて図6(a)のように吐出口近傍を清浄化した後、蛍光体ペーストを隔壁が形成された基板に正常に塗布した。塗布後の塗布ヘッド吐出口面6を観察したところ、図6(b)に示すように残留ペースト8a〜8cが形状、量とも不規則にばらついた塗液溜まりとして付着していた。数回の塗布を行ったところ、残留ペーストの付着状態は毎回異なっていた。
次に、上記の不規則にばらついた塗液溜まりが付着したノズル吐出口面6に対し、特許文献4記載の装置と同様な平坦なゴム押し当て部材で粘着テープを吐出口面に押し当てて転写を実施した後、清浄後のノズル吐出口面を観察したところ、図6(c)に示す以下のような状況を確認した。
FIG. 6 is a schematic diagram showing an adhesion state of residual paste in the vicinity of the discharge port in the cleaning method in which the pressing operation is performed only once. First, after cleaning the vicinity of the discharge port as shown in FIG. 6A using a conventional coating head cleaning device similar to the device described in Patent Document 1, the phosphor paste is normally applied to the substrate on which the barrier ribs are formed. Applied. When the coating head discharge port surface 6 after application was observed, as shown in FIG. 6B, the residual pastes 8a to 8c adhered as a coating liquid pool irregularly varying in shape and amount. When applied several times, the adhesion state of the residual paste was different each time.
Next, the pressure-sensitive adhesive tape is pressed against the discharge port surface with a flat rubber pressing member similar to the apparatus described in Patent Document 4 against the nozzle discharge port surface 6 to which the irregularly dispersed coating liquid reservoir has adhered. After the transfer, when the cleaned nozzle discharge port surface was observed, the following situation shown in FIG. 6C was confirmed.

少量の残留ペースト8aが付着した部分では粘着テープの押し当てている間に溶媒が粘着テープに吸収されることにより固化したペーストが吐出口近傍の吐出面に薄く強固に付着し、固着状態の付着物13aが残留していた。他方、多量の残留ペースト8bが付着した部分では粘着テープを押し当てている間の溶媒吸収による固化が十分出来ず液状ペーストが薄く残留し、湿潤状態の付着物13bが残留していた。すなわち、状態の異なる2種類の転写不良が発生していることを見出した。中程度の量の残留ペースト8cが付着した部分では、転写不良が発生せず、転写良好部分13cとなっていた。   In a portion where a small amount of the residual paste 8a is adhered, the paste solidified by the solvent being absorbed by the adhesive tape while the adhesive tape is being pressed adheres thinly and firmly to the discharge surface in the vicinity of the discharge port, and the fixed state is attached. The kimono 13a remained. On the other hand, in the portion where a large amount of residual paste 8b was adhered, solidification due to solvent absorption during pressing of the adhesive tape could not be sufficiently performed, and the liquid paste remained thin, and the wet deposit 13b remained. That is, it has been found that two types of transfer defects with different states occur. In the portion where the intermediate amount of the residual paste 8c adhered, no transfer failure occurred, and the transfer was a good portion 13c.

湿潤状態の付着物をさらに除去するため、再度粘着テープの押し当てを実施すると、湿潤状態の付着物は除去できたが、一度固着状態の付着物となった部分では、固化したペーストがノズル吐出口面にますます強固に付着し、その後粘着テープを用いて除去を試みても除去することが出来なかった。   When the adhesive tape was pressed again to further remove the wet deposit, the wet deposit could be removed. It adhered more and more firmly to the exit surface, and it could not be removed even after trying to remove it using an adhesive tape.

そこで、残留ペースト量とその量の残留ペーストを除去するのに最適な押し当て保持時間の関係を検討した結果、両者には正の相関関係があることが分かった。すなわち、残留ペースト量が少ない場合は短い押し当て保持時間が適しており、残留ペースト量が多い場合は長い押し当て保持時間が適していた。このため、少量の残留ペーストが付着した部分に合わせて押し当て保持時間を短くすると、その少量の残留ペーストが付着した部分の転写不良は良化するが、逆に、中程度の量の残留ペーストが付着した部分や多量の残留ペーストが付着した部分では湿潤状態の付着物が残留し、特に多量の残留ペーストが付着した部分での転写不良が悪化した。なお、押し当て保持時間とは、粘着テープを吐出口近傍の吐出口面に当接した後、引き剥がすまでの時間をいう。   Therefore, as a result of examining the relationship between the amount of residual paste and the optimum holding time for removing the amount of residual paste, it was found that there is a positive correlation between the two. That is, when the residual paste amount is small, a short pressing and holding time is suitable, and when the residual paste amount is large, a long pressing and holding time is suitable. For this reason, if the pressing and holding time is shortened according to the portion where the small amount of residual paste is adhered, the transfer failure of the portion where the small amount of residual paste is adhered is improved, but conversely, the medium amount of residual paste is A wet deposit remains in a portion where a large amount of paste has adhered, or a portion where a large amount of residual paste has adhered, and in particular, a transfer defect has deteriorated in a portion where a large amount of residual paste has adhered. The pressing holding time refers to the time until the adhesive tape is peeled off after coming into contact with the discharge port surface near the discharge port.

次に、多量の残留ペーストが付着した部分にあわせて押し当て時間を長くすると、その多量の残留ペーストが付着した部分の転写不良は良化するが、逆に、中程度の量の残留ペーストが付着した部分や少量の残留ペーストが付着した部分では固着状態の付着物が残留し、特に少量の残留ペーストが付着した部分での転写不良が悪化した。   Next, if the pressing time is increased in accordance with the portion where a large amount of residual paste is adhered, the transfer failure of the portion where the large amount of residual paste is adhered will be improved. Adhered matter remained in the adhering portion or a portion where a small amount of residual paste was adhered, and the transfer defect was particularly deteriorated in a portion where a small amount of the residual paste adhered.

発明者らは、上記2種類の転写不良に対していずれにも効果がある清浄条件を各種検討した結果、塗布ノズル表面に残留する不規則に付着した残留ペーストに対しては、1つの清浄条件やその繰り返しでは上記不規則に付着した残留ペーストの全てを除去することが出来ないという結論に至った。そこで、さらに検討を進めた結果、ついに本技術を発明するに及んだのである。
特開2002−126599号公報 特開2004−014393号公報 特開2006−247956号公報 特開2004−330027号公報 特開2001−353856号公報
As a result of various investigations on cleaning conditions that are effective for both of the above-described two types of transfer defects, the inventors have found that one cleaning condition is applied to the residual paste that remains irregularly on the coating nozzle surface. It was concluded that it was not possible to remove all of the residual paste adhering to the above irregularities by repeating the process. Therefore, as a result of further investigation, it finally came to invent the present technology.
JP 2002-126599 A JP 2004-014393 A Japanese Patent Laid-Open No. 2006-247756 JP 2004-330027 A JP 2001-353856 A

本発明は塗布ヘッドの吐出口および吐出口面に付着した塗液を粘着テープを用いて効率的に、塗布ヘッドを傷つけることなく除去することができる塗布ヘッドの清浄方法、それを用いたペースト塗布方法およびプラズマディスプレイの製造方法を提供することを目的とする。   The present invention relates to a coating head cleaning method capable of efficiently removing the coating liquid adhering to the ejection port and the ejection port surface of the coating head using an adhesive tape without damaging the coating head, and paste application using the same It is an object to provide a method and a method for manufacturing a plasma display.

上記課題を解決するための手段は、塗布ヘッドの吐出口近傍の吐出口面に付着した塗液を清浄する塗布ヘッド清浄方法であって、粘着テープを該吐出口近傍の吐出口面に略垂直方向に接近させ当接させた後略垂直方向に引き離す押し当て動作を1回以上行い、その後該吐出口から塗液を微量吐出する微量吐出動作を行い、さらに粘着テープを該吐出口近傍の吐出口面に略垂直方向に接近させ当接させた後略垂直方向に引き離す押し当て動作を1回以上行なうことを特徴とする塗布ヘッド清浄方法である。   Means for solving the above problem is a coating head cleaning method for cleaning the coating liquid adhering to the discharge port surface near the discharge port of the coating head, and the adhesive tape is substantially perpendicular to the discharge port surface near the discharge port. The contact operation is performed one or more times after being brought close to each other and brought into contact with each other and then pulled away in a substantially vertical direction. Thereafter, a minute discharge operation for discharging a small amount of coating liquid from the discharge port is performed, and the adhesive tape is further discharged to the discharge port near the discharge port. A method of cleaning an application head characterized in that a pressing operation of bringing a surface close to and in contact with a surface in a substantially vertical direction and then pulling it apart in a substantially vertical direction is performed one or more times.

本発明によると、従来の清浄技術では除去できなかった不規則にばらついた塗液溜まりが付着したノズル吐出口面であっても、粘着テープを用いた1回の押し当て動作やその繰り返しでは取りきれない残留塗液も含めて転写除去することができ、綺麗に清浄することができる上、摺動しないので傷を付けることもない。   According to the present invention, even if the nozzle discharge port surface has an irregularly dispersed coating liquid reservoir that could not be removed by conventional cleaning techniques, it can be removed by a single pressing operation using an adhesive tape or repeated operations. The remaining coating liquid that cannot be completely removed can be transferred and removed, and it can be cleaned cleanly and does not slide, so there is no damage.

本発明によると、微量吐出動作の前に行う1回以上の押し当て動作によって、多量の残留塗液が付着したした部分では湿潤状態の薄い付着物が残り、中程度の量の残留塗液が付着した部分では綺麗に拭き取れ、少量の残留塗液が付着した部分では固着状態の薄い付着物が残る。次に行う微量吐出動作によって、大きさのそろった、かつ小さな塗液溜まりが形成される。その後押し当て動作を1回以上行うことによって、微量吐出動作によって形成された塗液溜まりが除去される。このとき、微量吐出動作の前の押し当て動作で残留した薄い湿潤状態の付着物は、塗液溜まりと共にその後に行う押し当て動作で除去される。また、微量吐出動作の前の押し当て動作で強固に固着した部分も塗液溜まりに接することにより湿潤状態になるので、その後に行う押し当て動作で除去される。微量吐出動作前の押し当て動作で除去できていた部分は、塗液溜まりが新たに付着するがその後に行う押し当て動作で除去される。   According to the present invention, a thin deposit remains in a wet state in a portion where a large amount of residual coating liquid is adhered by one or more pressing operations performed before a micro discharge operation, and a medium amount of residual coating liquid is left. The adhering part can be wiped off cleanly, and in the part where a small amount of residual coating liquid has adhered, a thin adherent remains. A small coating liquid reservoir having a uniform size is formed by the micro discharge operation performed next. Thereafter, the pressing operation is performed once or more, thereby removing the coating liquid reservoir formed by the micro discharge operation. At this time, the thin wet deposits remaining in the pressing operation before the micro discharge operation are removed together with the coating liquid reservoir by the subsequent pressing operation. In addition, since the portion firmly fixed by the pressing operation before the micro-discharge operation is brought into a wet state by contacting the coating liquid reservoir, it is removed by the subsequent pressing operation. The portion that has been removed by the pressing operation before the micro discharge operation is removed by the pressing operation that is performed after that, although the coating liquid reservoir newly adheres.

本発明によると、従来の粘着転写技術では除去できなかった不規則にばらついた大きさの残留塗液が付着したノズル吐出口面でも、吐出口の近傍から綺麗に残留ペーストを除去することができる。   According to the present invention, it is possible to cleanly remove the residual paste from the vicinity of the discharge port even on the nozzle discharge port surface to which the residual coating liquid with irregularly dispersed sizes adhered that could not be removed by the conventional adhesive transfer technology. .

また、上記課題を解決するための手段は、各押し当て動作において、前記粘着テープを介して塗布ヘッド吐出口面と向かい合うように、弾性体からなる押し当て部材を押し当てる塗布ヘッド清浄方法である。   The means for solving the above problem is a coating head cleaning method in which a pressing member made of an elastic body is pressed so as to face the coating head discharge port surface via the adhesive tape in each pressing operation. .

また、前記塗液が蛍光体ペーストである上記記載の塗布ヘッド清浄方法である。   The coating head cleaning method as described above, wherein the coating liquid is a phosphor paste.

また、前記塗布ヘッドが、プラズマディスプレイ製造用蛍光体塗布ノズルである塗布ヘッド清浄方法である。   The coating head is a coating head cleaning method in which the coating head is a phosphor coating nozzle for manufacturing a plasma display.

また、前記塗布ヘッド清浄方法を用いて塗布ヘッドを清浄した後、塗布ヘッドから塗液を吐出して塗布を行うことを特徴とするペースト塗布方法である。   Further, the present invention is a paste coating method characterized in that after the coating head is cleaned using the coating head cleaning method, coating is performed by discharging a coating liquid from the coating head.

さらに、前記ペースト塗布方法を用いて蛍光体層を形成することを特徴とするプラズマディスプレイの製造方法である。   Further, the present invention is a method for manufacturing a plasma display, wherein a phosphor layer is formed using the paste application method.

本発明の塗布ヘッド清浄方法を用いると、簡便な方法でありながら塗布ヘッド吐出口面から残留塗液を確実に除去できるので、低コストでかつ簡便な塗布ヘッド清浄方法を提供することができる。また、塗布ヘッドの吐出口面を清浄材により摺動しないので、塗布ヘッドの吐出口面が損傷することがなく、高価な塗布ヘッドの寿命が著しく延びるという望ましい効果がある。   When the coating head cleaning method of the present invention is used, the residual coating liquid can be surely removed from the coating head discharge port surface even though it is a simple method, and thus a simple coating head cleaning method can be provided at low cost. Further, since the discharge port surface of the coating head is not slid by the cleaning material, there is a desirable effect that the discharge port surface of the coating head is not damaged and the life of the expensive coating head is remarkably extended.

本発明の塗布ヘッドの清浄方法の実施形態を示した模式図である。It is the schematic diagram which showed embodiment of the cleaning method of the coating head of this invention. 本発明の清浄方法における吐出口近傍の残留ペーストの付着状態を示した模式図である。It is the schematic diagram which showed the adhesion state of the residual paste of the discharge port vicinity in the cleaning method of this invention. ディスペンサー法による蛍光体ペースト塗布方法を示した模式図である。It is the schematic diagram which showed the fluorescent substance paste coating method by the dispenser method. 従来の塗布ヘッドの清浄方法を示した模式図である。It is the schematic diagram which showed the cleaning method of the conventional coating head. 吐出口近傍の擦り傷の状態を示した模式図である。It is the schematic diagram which showed the state of the abrasion near a discharge outlet. 押し当て動作を1度のみ行う清浄方法における吐出口近傍の残留ペーストの付着状態を示した模式図である。It is the schematic diagram which showed the adhesion state of the residual paste of the discharge opening vicinity in the cleaning method which performs a pressing operation only once.

符号の説明Explanation of symbols

1 塗布ヘッド
2 蛍光体ペースト
3 基板
4 加圧配管
5 吐出口
6 吐出口面
7 吐出されるペースト
8 残留ペースト
8a 少量の残留ペースト
8b 多量の残留ペースト
8c 中程度の量の残留ペースト
9 織編物からなる拭き取り部材
10 押し当て部材
11 摺動方向
12 擦り傷
13a 固着状態の付着物
13b 湿潤状態の付着物
13c 転写良好部分
14 粘着テープ
15 しわ伸ばしガイド
16 転写されたペースト
17 塗液溜まり
DESCRIPTION OF SYMBOLS 1 Coating head 2 Phosphor paste 3 Substrate 4 Pressurized piping 5 Discharge port 6 Discharge port surface 7 Discharged paste 8 Residual paste 8a Small amount of residual paste 8b Large amount of residual paste 8c Medium amount of residual paste 9 From woven or knitted fabric Wiping member 10 Pressing member 11 Sliding direction 12 Scratch 13a Adhered substance 13b Adhering substance 13c Wet adhering part 13c Good transfer part 14 Adhesive tape 15 Wrinkle-stretching guide 16 Transferred paste 17 Coating liquid reservoir

本発明は、塗布ヘッドの吐出口近傍の吐出口面に付着した塗液を、粘着テープを該塗布ヘッドに押し当て、ついで該粘着テープを該塗布ヘッドから引き離すことによって除去する工程を有する塗布ヘッド清浄方法に関する。   The present invention provides a coating head having a step of removing the coating liquid adhering to the discharge port surface near the discharge port of the coating head by pressing the pressure-sensitive adhesive tape against the coating head and then pulling the pressure-sensitive adhesive tape away from the coating head. It relates to a cleaning method.

本発明において塗布ヘッドとは、塗布装置を構成する塗布ノズルや口金などの部材であって、塗液を吐出するための吐出口を有する部材を指す。また吐出口とは、塗布ヘッドに供給された塗液が被塗布物に向かって吐出される開口を指す。さらに吐出口面とは、塗布ヘッド外面のうち吐出口周辺部を含む面、すなわち吐出口が開口する面を指す。また、吐出口近傍とは、吐出口外縁の近傍領域であり、この領域に塗液が残留したまま塗布すると、塗布品位が著しく損なわれる。   In the present invention, the coating head refers to a member having a discharge port for discharging a coating liquid, which is a member such as a coating nozzle or a base constituting the coating apparatus. The discharge port refers to an opening through which the coating liquid supplied to the coating head is discharged toward the object to be coated. Further, the discharge port surface refers to a surface including the peripheral portion of the discharge port on the outer surface of the coating head, that is, a surface on which the discharge port opens. Further, the vicinity of the discharge port is a region near the outer edge of the discharge port. If the coating liquid remains applied in this region, the coating quality is significantly impaired.

吐出口は単数であっても複数であっても良く、スリット状、円形、楕円形または多角形等、どのような形状であっても良いが、塗布ヘッドが後述のプラズマディスプレイ用蛍光体の塗布用塗布ヘッドである場合は、プラズマディスプレイにおいて1画面に必要な蛍光体層を少なくとも各色につき1回の吐出で塗布できるように、走査方向の画素数に応じた数以上の数(1000〜4000個程度)の円形の吐出口(直径50〜200μm程度)を塗布ヘッドの長手方向に配列して備えた塗布ヘッドであることが好ましい。   The discharge port may be singular or plural, and may have any shape such as a slit, a circle, an ellipse, or a polygon, but the coating head applies a phosphor for plasma display described later. In the case of a coating head for a plasma display, a phosphor layer necessary for one screen in a plasma display can be applied at least once for each color by a number more than the number according to the number of pixels in the scanning direction (1000 to 4000). It is preferable that the coating head is provided with circular discharge ports (about 50 to 200 μm in diameter) arranged in the longitudinal direction of the coating head.

本発明において押し当て動作とは、上述の粘着テープを吐出口面に略垂直方向に当接し、一定時間保持しながら塗液中の溶剤を粘着テープの粘着剤に吸収して塗液を固化し、略垂直方向に引き剥がすことにより固化した塗液を吐出口面から粘着テープに転写して除去することである。吐出口面に対し略垂直方向に当接し、摺動することなく保持し、略垂直方向に引き離すことによって、塗布ヘッドを傷つけることなく効率的に吐出口面に付着した塗液を除去することができる。   In the present invention, the pressing operation means that the above-mentioned adhesive tape is brought into contact with the discharge port surface in a substantially vertical direction and the coating liquid is solidified by absorbing the solvent in the coating liquid into the adhesive tape while holding for a certain period of time. The coating liquid solidified by peeling off in a substantially vertical direction is transferred from the discharge port surface to an adhesive tape and removed. By contacting the discharge port surface in a substantially vertical direction, holding it without sliding, and separating it in a substantially vertical direction, it is possible to efficiently remove the coating liquid adhering to the discharge port surface without damaging the coating head. it can.

本発明の塗布ヘッド清浄方法は塗布ヘッドとしてプラズマディスプレイ製造用蛍光体塗布ノズルを用い、塗液として蛍光体ペーストを用いることが好ましい。以下、プラズマディスプレイ製造用蛍光体塗布ノズルを用いて蛍光体ペーストを塗布する場合の塗布ヘッド清浄方法の例を説明するが、本発明はこれに限定されない。   In the coating head cleaning method of the present invention, it is preferable to use a phosphor coating nozzle for manufacturing a plasma display as the coating head and a phosphor paste as the coating liquid. Hereinafter, although the example of the coating head cleaning method in the case of apply | coating fluorescent substance paste using the fluorescent substance application nozzle for plasma display manufacture is demonstrated, this invention is not limited to this.

図1は、本発明の塗布ヘッドの清浄方法の実施形態を示した模式図である。
図1(a)は、塗布ヘッド1の吐出口面6に付着した残留ペースト8に、押し当て部材10を用いて粘着テープ14を押し当てている動作を模式的に示している。図1(b)は、図1(a)の長手方向に垂直な面での断面であり、しわ伸ばしガイド15が、押し当て部材10の前後で粘着テープにシワ、タルミが発生するのを防止する様子を示している。
FIG. 1 is a schematic view showing an embodiment of a coating head cleaning method of the present invention.
FIG. 1A schematically shows an operation in which the adhesive tape 14 is pressed against the residual paste 8 attached to the discharge port surface 6 of the coating head 1 using the pressing member 10. FIG. 1B is a cross section in a plane perpendicular to the longitudinal direction of FIG. 1A, and the wrinkle-stretching guide 15 prevents wrinkles and sagging on the adhesive tape before and after the pressing member 10. It shows how to do.

図1(c)、(d)は、図1(a)、(b)の当接状態から一定時間後に粘着テープ14を吐出口面6から引き剥がした状態を示し、残留ペースト8が粘着テープ14に転写された様子を模式的に示している。押し当て動作において制御する押し当て条件としては、押し当て圧力、押し込み量、押し当て保持時間、押し当て部材弾性率などがあるが、最も重要なのは押し当て保持時間である。   FIGS. 1C and 1D show a state in which the adhesive tape 14 has been peeled from the discharge port surface 6 after a predetermined time from the contact state of FIGS. 1A and 1B, and the residual paste 8 is the adhesive tape. 14 schematically shows a state where the image has been transferred. The pressing conditions controlled in the pressing operation include a pressing pressure, a pressing amount, a pressing holding time, a pressing member elastic modulus, and the most important is a pressing holding time.

上述したように、残留ペースト量と押し当て保持時間には正の相関関係があり、残留ペースト量が少ない場合は短い押し当て保持時間が適しており、残留ペースト量が多い場合は長い押し当て保持時間が適していることが、実験の結果判明した。   As described above, there is a positive correlation between the residual paste amount and the holding time, and a short pressing time is appropriate when the residual paste amount is small, and a long pressing hold when the residual paste amount is large. Experiments have shown that the time is appropriate.

本発明の塗布ヘッド清浄方法は、基板への塗布後に塗布ヘッドの吐出口近傍に不規則に乱れて残留したペーストを清浄するために、まず、図1に示すように、粘着テープを吐出口面に略垂直方向に当接し、塗液を概略固化させた後に略垂直方向に引き剥がす1回目の押し当て動作を行なう。1回目の押し当て動作で用いる押し当て条件は、残留ペーストの状況に合わせて適宜設定することができる。1回目の押し当て動作によって、多量の残留ペーストが付着した部分では湿潤状態の薄い付着物が残留し、中程度の量の残留ペーストが付着した部分では綺麗に拭き取れ、少量の残留ペーストが付着した部分では固着状態の薄い付着物が残る。次に説明する微量吐出動作の前に行う押し当て動作は1回であることが好ましいが、必要に応じて2回以上行っても良い。   In the coating head cleaning method of the present invention, an adhesive tape is first applied to the discharge port surface as shown in FIG. A first pressing operation is performed in which the coating liquid is substantially solidified, and the coating liquid is substantially solidified and then peeled off in a substantially vertical direction. The pressing condition used in the first pressing operation can be appropriately set according to the state of the residual paste. By the first pressing operation, wet thin deposits remain in the areas where a large amount of residual paste is adhered, and the areas where a moderate amount of residual paste is adhered are wiped cleanly and a small amount of residual paste is adhered. In the part, a thin adherent remains. The pressing operation performed before the micro discharge operation described below is preferably performed once, but may be performed twice or more as necessary.

図2は、本発明の清浄方法における吐出口近傍の残留ペーストの付着状態を示した模式図である。図2(a)は、微量吐出動作を行う前の吐出口面の残留ペーストの付着状態を示したものである。微量吐出動作を行う前に行った1回以上の押し当て動作によって、残留ペーストが綺麗に除去された転写良好部分13c、固着状態の付着物13aが残留した部分、湿潤状態の付着物13bが残留した部分が存在する。   FIG. 2 is a schematic view showing a state of adhesion of residual paste in the vicinity of the discharge port in the cleaning method of the present invention. FIG. 2A shows the state of adhesion of the residual paste on the discharge port surface before performing a minute discharge operation. Due to one or more pressing operations performed before the minute discharge operation, the transfer good portion 13c from which the residual paste has been removed cleanly, the portion where the adhered matter 13a remains, and the wet matter 13b remain. There is a part that.

次に吐出口から塗液を微量吐出する微量吐出動作を行う。図2(b)は微量吐出動作を行った後の吐出口面の残留ペーストの付着状態を示したものである。微量吐出動作によって、大きさを正確にかつ均一に制御された小さな塗液溜まり17が吐出口面6の吐出口5周辺部に形成される。元々、塗布ヘッドにはペーストを高精度で均一に吐出する機能が普通備わっているので、微量吐出動作のために特別な設備を別途設ける必要はなく、微量吐出動作の設定を設ければ良い。微量吐出の設定条件としては、ペースト粘度と吐出口での流動抵抗に合わせて適宜設定できる。例えば吐出圧300〜1000kPa、加圧時間0.01〜1sなどが好適に用いられる。微量吐出は、吐出口を覆うように塗液溜りを形成するのが好ましいが、それに限らず、少なくとも押し当て時にはペーストが吐出口を覆っていれば良い。   Next, a micro discharge operation for discharging a small amount of coating liquid from the discharge port is performed. FIG. 2B shows the state of adhesion of the residual paste on the discharge port surface after a small amount of discharge operation. A small coating liquid reservoir 17 whose size is accurately and uniformly controlled is formed in the periphery of the discharge port 5 on the discharge port surface 6 by a small amount of discharge operation. Originally, the application head normally has a function of uniformly discharging the paste with high accuracy, so that it is not necessary to provide a special facility for the minute discharge operation, and the setting of the minute discharge operation may be provided. The setting conditions for the small amount of discharge can be appropriately set according to the paste viscosity and the flow resistance at the discharge port. For example, a discharge pressure of 300 to 1000 kPa and a pressurization time of 0.01 to 1 s are preferably used. In the case of a small amount of discharge, it is preferable to form a coating liquid reservoir so as to cover the discharge port. However, the present invention is not limited to this, and it is sufficient that the paste covers the discharge port at least during pressing.

続いて、微量吐出動作の後に行う押し当て動作によって、微量吐出動作の前に残留していた薄い湿潤状態の付着物13bは、塗液溜まり17と共に除去される。微量吐出動作の前に残留していた固着状態の付着物13aは、塗液溜まりに接することにより湿潤状態となるため、微量吐出動作の後に行う押し当て動作で容易に除去される。微量吐出動作の前に行った押し当て動作により綺麗に除去できていた転写良好部分13cには塗液溜まり17が新たに形成されるが、微量吐出動作により形成される塗液溜まり17の残留ペースト量に合わせて微量吐出動作の後に行う押し当て動作の押し当て保持時間が設定されているので確実に除去される。   Subsequently, by the pressing operation performed after the micro discharge operation, the thin wet deposit 13b remaining before the micro discharge operation is removed together with the coating liquid reservoir 17. The adhering deposit 13a remaining before the minute discharge operation becomes wet when it comes into contact with the coating liquid reservoir, and is therefore easily removed by the pressing operation performed after the minute discharge operation. A coating liquid reservoir 17 is newly formed in the transfer-good portion 13c that has been cleanly removed by the pressing operation performed before the micro discharge operation, but the residual paste in the coating liquid reservoir 17 formed by the micro discharge operation. Since the pressing holding time of the pressing operation performed after the micro discharge operation is set according to the amount, it is surely removed.

このように、従来の粘着転写技術では除去できなかった不規則にばらついた大きさの残留ペーストが付着したノズル吐出口面でも、吐出口近傍から綺麗に残留ペーストを除去することができる。なお、微量吐出動作の後に行う押し当て動作は1回であることが好ましいが、必要に応じて2回以上行っても良い。   As described above, the residual paste can be clearly removed from the vicinity of the discharge port even on the surface of the nozzle discharge port to which the residual paste having irregularly dispersed sizes that could not be removed by the conventional adhesive transfer technique is attached. In addition, although it is preferable that the pressing operation performed after a trace amount discharge operation is one time, you may perform it twice or more as needed.

ところで、固着状態の付着物のうち、微量吐出動作の後の押し当て動作で除去されるのは、微量吐出動作で形成された塗液溜まりにより湿潤状態となる吐出口近傍のみであるので、吐出口から離れた位置にある固着状態の付着物の一部が残留したままとなる場合がある。しかしその場合でも、塗布に影響のないように吐出口近傍の清浄を十分達成するよう塗液溜まり17の大きさを適宜調整できるので問題ない。   By the way, since the adhering matter in the fixed state is removed only by the pressing operation after the micro discharge operation is in the vicinity of the discharge port which becomes wet due to the coating liquid pool formed by the micro discharge operation. There may be a case where a part of the adhered matter at a position away from the outlet remains. However, even in that case, there is no problem because the size of the coating liquid reservoir 17 can be appropriately adjusted so as to sufficiently clean the vicinity of the discharge port so as not to affect the application.

塗液溜りの大きさは、塗布ヘッドの吐出口径、吐出口間の距離すなわち吐出口ピッチによって適宜設定すれば良いが、例えばPDP蛍光体塗布用ノズルの場合の好適な吐出口径50〜200μ、吐出口ピッチ100〜1000μmに対して、そのような塗液溜まり17の大きさとしては、吐出口外縁より10μm以上、1000μm以下であると好ましい。10μmより小さいと、吐出口近傍の清浄が不十分で吐出再開時に吐出量のばらつきが生じたり、吐出されたペーストの形状を乱しやすく塗布が不安定になりやすい。1000μmより大きいと、微量吐出動作の後に行う押し当て動作で均一に除去することが困難になる。塗液溜まり17の大きさが、吐出口外縁より50μm以上、500μm以下であるとさらに好ましい。   The size of the coating liquid reservoir may be appropriately set according to the discharge port diameter of the coating head and the distance between the discharge ports, that is, the discharge port pitch. For example, a suitable discharge port diameter of 50 to 200 μm in the case of a PDP phosphor coating nozzle, With respect to the outlet pitch of 100 to 1000 μm, the size of the coating liquid reservoir 17 is preferably 10 μm or more and 1000 μm or less from the outer edge of the discharge port. If it is less than 10 μm, the vicinity of the discharge port is not sufficiently cleaned, causing variations in the discharge amount when discharging is resumed, and the shape of the discharged paste is likely to be disturbed, making the application unstable. If it is larger than 1000 μm, it will be difficult to remove uniformly by a pressing operation performed after a small amount of discharging operation. More preferably, the size of the coating liquid reservoir 17 is not less than 50 μm and not more than 500 μm from the outer edge of the discharge port.

さらに、塗液溜まりの大きさのバラツキは小さい方が好ましいがバラツキは1μm以上、100μm以下であることが好ましい。1μmより小さなバラツキを得るためには、非常に複雑で高価な吐出量制御手段が必要となり好ましくない。バラツキが100μmより大きいと、微量吐出動作の後に行う押し当て動作で均一に除去することが困難になる。   Further, the variation in the size of the coating liquid reservoir is preferably small, but the variation is preferably 1 μm or more and 100 μm or less. In order to obtain a variation smaller than 1 μm, a very complicated and expensive discharge amount control means is required, which is not preferable. If the variation is larger than 100 μm, it is difficult to remove uniformly by the pressing operation performed after the micro discharge operation.

以下、押し当て動作で用いられる押し当て条件の設定に影響する各種要素について説明するが、押し当て条件の設定はこれに限るものではないし、押し当て回数も適宜設定しても良い。   Hereinafter, various elements that affect the setting of the pressing condition used in the pressing operation will be described. However, the setting of the pressing condition is not limited to this, and the number of times of pressing may be set as appropriate.

押し当て保持時間としては、0.1秒〜10秒が好ましい。0.1秒より短いと、ペーストが十分固化できないので湿潤転写不良が発生しやすくなる。10秒より長いと、ペーストが固化されすぎるので固着転写不良が発生しやすくなる。より好ましくは、0.5秒〜5秒である。   The pressing and holding time is preferably 0.1 to 10 seconds. If the time is shorter than 0.1 seconds, the paste cannot be solidified sufficiently, and wet transfer failure tends to occur. If it is longer than 10 seconds, the paste is excessively solidified, so that a sticking transfer failure tends to occur. More preferably, it is 0.5 seconds to 5 seconds.

上記の押し当てをより確実なものとするため、粘着テープの裏側から塗布ヘッド吐出口面と向かい合うように、押し当て部材を略垂直方向に押し当てて粘着テープを当接することが好ましく、押し当て部材の当接面に弾性体を設けると、尚いっそう好ましい。   In order to make the above-mentioned pressing more reliable, it is preferable to press the pressing member in a substantially vertical direction so as to face the coating head discharge port surface from the back side of the pressure-sensitive adhesive tape. It is even more preferable that an elastic body is provided on the contact surface of the member.

押し当て部材を使用する場合は、例えば図1のように、押し当て部材10を粘着テープ14を介して、粘着テープの粘着剤層を塗布ヘッド1の吐出口面6に押し当てるように吐出口面6に対し略垂直方向に移動することにより押し当てて、吐出口5の近傍の吐出口面6に付着した残留ペースト8を粘着剤層に付着させ、ついで粘着テープ14を吐出口面6から引き離すことによって吐出口面6に付着した残留ペースト8を除去することができる。粘着テープ14を吐出口面6から引き離す際は、押し当て部材10を吐出口面6に対し略垂直方向に遠ざけるように引き離す。粘着テープ14にやや高めの張力を与える等して素早く引き離すと効果が大きい。   When the pressing member is used, for example, as shown in FIG. 1, the discharge port is configured such that the pressing member 10 is pressed against the discharge port surface 6 of the coating head 1 via the pressure-sensitive adhesive tape 14. The residual paste 8 adhered to the discharge port surface 6 in the vicinity of the discharge port 5 is adhered to the pressure-sensitive adhesive layer by being pressed by moving in a substantially vertical direction with respect to the surface 6, and then the adhesive tape 14 is removed from the discharge port surface 6. The residual paste 8 attached to the discharge port surface 6 can be removed by pulling apart. When the adhesive tape 14 is pulled away from the discharge port surface 6, the pressing member 10 is pulled away so as to be away from the discharge port surface 6 in a substantially vertical direction. If the adhesive tape 14 is pulled away quickly by giving a slightly higher tension, the effect is great.

好ましい押し当て圧力(接圧)は、0.01〜1MPaである。接圧が0.01MPaより小さいとペーストの均一な転写が不十分となる。また、1MPaより大きいと接圧機構に多大な負荷が発生するので好ましくなく、塗布ヘッドにもダメージが発生しやすくなるので好ましくない。0.05〜0.3MPaがさらに好ましい。接圧の測定には例えば富士写真フィルム社製感圧シート(商品名プレスケール)などが用いられる。または、接圧センサーを押し当て部材に組み合わせて設置し、接圧の計測結果を接圧動作のコントローラにフィードバックすることで均一な接圧を得ることができる。   A preferable pressing pressure (contact pressure) is 0.01 to 1 MPa. When the contact pressure is less than 0.01 MPa, uniform transfer of the paste becomes insufficient. On the other hand, when the pressure is higher than 1 MPa, a great load is generated on the contact pressure mechanism, which is not preferable, and the coating head is also easily damaged, which is not preferable. 0.05 to 0.3 MPa is more preferable. For example, a pressure sensitive sheet (trade name: Prescale) manufactured by Fuji Photo Film Co., Ltd. is used for measuring the contact pressure. Alternatively, the contact pressure sensor is installed in combination with the pressing member, and the contact pressure measurement result is fed back to the contact pressure operation controller to obtain a uniform contact pressure.

このような接圧は、特に塗布ヘッドの弾性体押し当て部材への押込み量が0mm〜5mmとなる場合に好適に実現できる。押込み量が0未満だと、接圧が発生しない状態が起きやすくなる。5mmより大きいと塗布ヘッドにダメージが発生しやすくなるので好ましくない。   Such contact pressure can be suitably realized particularly when the amount of pressing of the coating head into the elastic body pressing member is 0 mm to 5 mm. When the pushing amount is less than 0, a state in which no contact pressure is generated easily occurs. If it is larger than 5 mm, the coating head is liable to be damaged, which is not preferable.

押し当て部材を構成する弾性体としては、各種材料が使用できるが、ゴムが最も好ましい。各種ゴムが使用できるが、繰り返し当接しても残留ひずみなどダメージを受けず、回復が早いものが好ましい。このようなゴムの一例としてたとえばシリコーンゴムや天然ゴムをあげることができる。   Various materials can be used as the elastic body constituting the pressing member, but rubber is most preferable. Various rubbers can be used, but those that do not suffer damage such as residual strain even after repeated contact and are quick to recover are preferred. Examples of such rubbers include silicone rubber and natural rubber.

また、ペーストが付着しても劣化しにくいゴム材質が好ましい。ペーストとゴム材質のこの様な好適な組合せが選択できない場合は、ゴム表面にカバーフィルムなどを設けても良い。   Further, a rubber material that is not easily deteriorated even if a paste adheres is preferable. If such a suitable combination of paste and rubber material cannot be selected, a cover film or the like may be provided on the rubber surface.

ゴムの硬度としては、A20〜A60度(JIS K 6253(2006))が好ましい。A20度より小さいと接圧が不足気味になり湿潤転写不良が発生しやすくなる。また、A60度より大きいと弾性が損なわれ均一な接圧が得られないのみならず、塗布ヘッドにダメージが発生しやすくなるので好ましくない。より好ましくはA30〜A40度である。   The hardness of the rubber is preferably A20 to A60 degrees (JIS K 6253 (2006)). If it is smaller than A20 degrees, the contact pressure tends to be insufficient, and wet transfer failure tends to occur. On the other hand, if it is larger than A60 degrees, the elasticity is impaired and a uniform contact pressure cannot be obtained, and the coating head is liable to be damaged, which is not preferable. More preferably, it is A30 to A40 degrees.

押し当て部材当接面のゴムの硬度のバラツキが大きいと均一な接圧が得られないので、硬度のばらつきは小さい方が良いが、20度以下が好ましい。10度以下であればさらに好ましい。   If the variation in the hardness of the rubber on the pressing member contact surface is large, a uniform contact pressure cannot be obtained. Therefore, the variation in hardness is preferably small, but 20 degrees or less is preferable. More preferably, it is 10 degrees or less.

塗布ヘッドに吐出孔が列状に設けられている場合、押し当て部材の当接面の真直度は1mm以下であると均一な接圧が得られやすくなるので好ましい。0.5mm以下であればなお好ましい。また、押し当て部材の当接面の表面粗さは0.5mm以下であると均一な接圧が得られやすくなるので好ましい。0.1mm以下であればなお好ましい。   When the discharge holes are provided in a row in the coating head, it is preferable that the straightness of the contact surface of the pressing member is 1 mm or less because uniform contact pressure can be easily obtained. It is still more preferable if it is 0.5 mm or less. Further, the surface roughness of the abutting surface of the pressing member is preferably 0.5 mm or less because a uniform contact pressure is easily obtained. It is still more preferable if it is 0.1 mm or less.

また、ゴムの厚みとしては1〜30mmが好ましく、5〜15mmがさらに好ましい。1mmより小さい場合弾性が損なわれ適度な接圧が得られない。30mmより大きい場合、不要な材料が多くなる上、装置が大きくなり不経済である。   The rubber thickness is preferably 1 to 30 mm, and more preferably 5 to 15 mm. If it is smaller than 1 mm, the elasticity is impaired and an appropriate contact pressure cannot be obtained. If it is larger than 30 mm, unnecessary materials increase and the apparatus becomes large, which is uneconomical.

押し当て部材の当接面の断面形状は凸型であると、特に重要な吐出口部の接圧を確実にできるので好ましい。平面あるいは凹型だと接圧が不十分な部分が発生しやすくなり好ましくない。特に、当接面の形状が円筒面の一部であるといっそう好ましい。この場合、一列に並んだ吐出口近くで接圧が開始され、続いて吐出口周辺部へ拡大するのでペーストの広がりが均一化されるので好ましい。また、当接面の形状が円筒面の一部であると当接面の加工が容易になり、結果として真直度が向上するので好ましい。   It is preferable that the cross-sectional shape of the abutting surface of the pressing member is a convex shape because particularly important contact pressure of the discharge port portion can be ensured. If it is a flat surface or a concave shape, a portion with insufficient contact pressure tends to occur, which is not preferable. In particular, it is more preferable that the shape of the contact surface is a part of the cylindrical surface. In this case, the contact pressure is started near the discharge ports arranged in a row, and then expands to the periphery of the discharge port, which is preferable because the spread of the paste is made uniform. Further, it is preferable that the shape of the abutting surface is a part of the cylindrical surface, since the processing of the abutting surface becomes easy and as a result, straightness is improved.

円筒面の直径は10〜1000mmであると好ましい。10mmより小さいと吐出口位置が円筒の頂点からずれ易く、吐出口に適切な圧力がかからなくなるので好ましくない。1000mmより大きいと凸型の効果が薄れ、接圧不足の部分が発生しやすくなるので好ましくない。円筒面の直径が20〜100mmであるとさらに好ましい。円筒の頂点を吐出口の位置に合わせると、接圧が均一になりやすいのでなお好ましい。円筒の頂点と吐出口位置とのズレは小さい方が良いが5mm以下が好ましく、2mm以下がさらに好ましい。   The diameter of the cylindrical surface is preferably 10 to 1000 mm. If it is smaller than 10 mm, the position of the discharge port is liable to deviate from the top of the cylinder, and an appropriate pressure is not applied to the discharge port. If it is larger than 1000 mm, the convex effect is reduced, and a portion with insufficient contact pressure tends to occur, which is not preferable. More preferably, the diameter of the cylindrical surface is 20 to 100 mm. It is more preferable to match the top of the cylinder with the position of the discharge port because the contact pressure tends to be uniform. The deviation between the top of the cylinder and the position of the discharge port is preferably small, but is preferably 5 mm or less, and more preferably 2 mm or less.

本発明の押し当て動作の動作速度については、当接速度が1〜100mm/s、引き剥がし速度が10〜1000mm/sの時、最も効果的に転写できる。   Regarding the operation speed of the pressing operation of the present invention, transfer can be most effectively performed when the contact speed is 1 to 100 mm / s and the peeling speed is 10 to 1000 mm / s.

本発明に適用できる粘着テープは、ペーストと接する面の表面張力がペーストあるいはペースト溶剤のそれより大きいことが好ましい。粘着テープの表面張力がペーストより小さいと、ペーストが安定して転写できなくなる。   In the pressure-sensitive adhesive tape applicable to the present invention, the surface tension of the surface in contact with the paste is preferably larger than that of the paste or the paste solvent. If the surface tension of the adhesive tape is smaller than the paste, the paste cannot be transferred stably.

本発明に適用できる粘着テープは、幅広い塗液種類や付着量に対応するため適宜選択して使用することが出きる。粘着テープは基材と粘着剤層からなる構成であることが好ましく、粘着剤層が溶剤吸収性の粘着剤から構成される粘着テープである。これは、粘着剤がペーストあるいはペースト溶剤を吸収できるとペーストの流動性が低下(固化)し、著しく剥離転写しやすくなるので好ましい。このためには、粘着材の溶解度パラメータがペースト、あるいはペースト溶剤のそれと近い値であるのが好ましい。前記粘着テープの溶媒吸収能力は、面積1mあたり10mL以上であることが好ましく、20mL以上であることがより好ましい。溶媒吸収能力が面積1mあたり10mL未満であると溶媒吸収残りが生じやすくなる傾向がある。なお、粘着テープの溶媒吸収能力は、塗液を構成する溶媒中に浸績し1分間で吸収により増加した量により測定した値である。The pressure-sensitive adhesive tape applicable to the present invention can be appropriately selected and used in order to cope with a wide variety of coating liquid types and adhesion amounts. The pressure-sensitive adhesive tape is preferably composed of a base material and a pressure-sensitive adhesive layer, and the pressure-sensitive adhesive layer is a pressure-sensitive adhesive tape composed of a solvent-absorbing pressure-sensitive adhesive. It is preferable that the pressure-sensitive adhesive can absorb the paste or the paste solvent because the fluidity of the paste is reduced (solidified) and removably transferred. For this purpose, the solubility parameter of the adhesive material is preferably a value close to that of the paste or paste solvent. The solvent absorption capacity of the pressure-sensitive adhesive tape is preferably 10 mL or more, more preferably 20 mL or more per 1 m 2 of area. If the solvent absorption capacity is less than 10 mL per 1 m 2 , the solvent absorption residue tends to occur. In addition, the solvent absorption capability of an adhesive tape is the value measured by the amount increased by absorption in 1 minute after being immersed in the solvent which comprises a coating liquid.

前記粘着テープの溶媒吸収速度は、面積1mあたり1mL/秒以上であることが好ましく、3mL/秒以上であることがより好ましい。溶媒吸収速度が面積1mあたり1mL/秒未満であると、ペースト溶媒吸収に時間がかかりすぎ、装置のタクトが長くなる傾向がある。なお、粘着テープの溶媒吸収速度は塗液を構成する溶媒中にテープを浸績し、5秒間に溶媒分を吸収した重量増加分を単位面積あたり、単位時間あたりで割返すことによりにより測定した値である。The solvent absorption rate of the pressure-sensitive adhesive tape is preferably 1 mL / second or more, more preferably 3 mL / second or more per 1 m 2 of area. If the solvent absorption rate is less than 1 mL / second per 1 m 2 of area, it takes too much time to absorb the paste solvent, and the tact of the apparatus tends to be longer. The solvent absorption rate of the pressure-sensitive adhesive tape was measured by immersing the tape in the solvent constituting the coating liquid, and repeating the weight increase per unit area per unit time by absorbing the solvent for 5 seconds. Value.

さらに、前記粘着テープの粘着力は、20mm幅あたり0.5〜4.0Nであることが好ましく、2.0〜3.0Nであることがより好ましい。20mm幅あたりの粘着力が0.5N未満であると吐出口面に残ったペースト中の溶媒を吸収した後に残る固化物を除去しきれなくなる傾向があり、4.0Nをこえるとテープ剥離に時間がかかり、粘着剤層が粘着テープの基材から剥離する傾向がある。なお、該粘着テープの粘着力は、JIS Z 0237(2000)に準拠した方法で、厚さ25μmのPETフィルムと貼り合わせ、23℃、引張速度300mm/minで180°方向に引きはがして測定した値である。溶剤吸収後でも粘着力を有することが重要である。   Furthermore, the adhesive force of the adhesive tape is preferably 0.5 to 4.0 N per 20 mm width, and more preferably 2.0 to 3.0 N. If the adhesive strength per 20 mm width is less than 0.5 N, the solidified product remaining after absorbing the solvent in the paste remaining on the discharge port surface tends to be completely removed, and if it exceeds 4.0 N, it takes time to peel off the tape. The pressure-sensitive adhesive layer tends to peel from the base material of the pressure-sensitive adhesive tape. The adhesive strength of the adhesive tape was measured by bonding it to a PET film having a thickness of 25 μm and peeling it in a 180 ° direction at 23 ° C. and a tensile speed of 300 mm / min by a method according to JIS Z 0237 (2000). Value. It is important to have adhesive strength even after solvent absorption.

また、前記粘着テープの粘着剤層の厚みは、0.005〜0.3mmであることが好ましく、0.01〜0.15mmであることがより好ましい。粘着剤層の厚みが0.005mm未満であるとペースト中の溶媒を吸収しきれない傾向があり、0.3mmをこえるとテープの厚みが厚く、巻き長さが短くなり、交換が頻繁になる傾向がある。   Moreover, it is preferable that it is 0.005-0.3 mm, and, as for the thickness of the adhesive layer of the said adhesive tape, it is more preferable that it is 0.01-0.15 mm. If the thickness of the pressure-sensitive adhesive layer is less than 0.005 mm, there is a tendency that the solvent in the paste cannot be completely absorbed. Tend.

本発明に使用する粘着テープとしては、塗布ヘッドを損傷することなく押圧するために、弾力性を有し、粘着剤面が平滑であるものが好ましい。そのような粘着テープとしては、発泡粘着剤からなる粘着剤層を備えたものが好ましい。発泡粘着剤とは、粘着剤層に気泡(セル)または微細な空孔を有する粘着剤を意味し、弾力性を有するものである。たとえば、特開2000−169803号公報に開示されているものを使用することができる。   The pressure-sensitive adhesive tape used in the present invention is preferably one having elasticity and a smooth pressure-sensitive adhesive surface in order to press the coating head without damaging it. As such an adhesive tape, what was equipped with the adhesive layer which consists of foaming adhesives is preferable. The foamed adhesive means an adhesive having bubbles (cells) or fine pores in the adhesive layer, and has elasticity. For example, what is disclosed in JP 2000-169803 A can be used.

該粘着剤は、主成分として、アクリル系樹脂またはゴム系樹脂などが用いられる。該アクリル系樹脂とは、アクリル酸エステルを主モノマー成分とする共重合体であり、より具体的には粘着性を与えるガラス転移温度の低い主モノマーに、接着性、凝集力付与のためのコモノマー、さらに架橋性、粘着性改良のための官能基含有モノマーを共重合させたものである。   As the main component, an acrylic resin or a rubber resin is used for the adhesive. The acrylic resin is a copolymer having an acrylic ester as a main monomer component, and more specifically, a main monomer having a low glass transition temperature that gives tackiness, and a comonomer for imparting adhesiveness and cohesive force. Furthermore, a functional group-containing monomer for improving crosslinkability and adhesiveness is copolymerized.

主モノマーとしては、例えば、エチルアクリレート、ブチルアクリレート、2−エチルヘキシルアクリレート、イソオクチルアクリレート、イソノニルアクリレートなどがあげられる。コモノマーとしては、酢酸ビニル、アクリロニトリル、アクリルアミド、スチレン、メチルメタクリレート、メチルアクリレートなどがあげられる。官能基含有モノマーとしては、メタクリル酸、アクリル酸、イタコン酸などのカルボキシル基含有モノマー;ヒドロキシエチルメタクリレート、ヒドロキシプロピルメタクリレートなどのヒドロキシル基含有モノマー;ジメチルアミノエチルメタクリレートなどのアミノ基含有モノマー;アクリルアミド、メチロールアクリルアミドなどのアミド基含有モノマー;グリシジルメタクリレートなどのエポキシ基含有モノマー;無水マレイン酸などの酸無水物基含有モノマーなどがあげられる。   Examples of the main monomer include ethyl acrylate, butyl acrylate, 2-ethylhexyl acrylate, isooctyl acrylate, and isononyl acrylate. Examples of the comonomer include vinyl acetate, acrylonitrile, acrylamide, styrene, methyl methacrylate, and methyl acrylate. Examples of functional group-containing monomers include carboxyl group-containing monomers such as methacrylic acid, acrylic acid, and itaconic acid; hydroxyl group-containing monomers such as hydroxyethyl methacrylate and hydroxypropyl methacrylate; amino group-containing monomers such as dimethylaminoethyl methacrylate; acrylamide and methylol. Examples thereof include amide group-containing monomers such as acrylamide; epoxy group-containing monomers such as glycidyl methacrylate; and acid anhydride group-containing monomers such as maleic anhydride.

前記ゴム系樹脂としては、エラストマーを主成分とし、これに粘着付与剤樹脂、軟化剤、老化防止剤、充てん剤などを添加して得られるものがあげられる。該エラストマーとしては、ガラス転移点が低く、高い温度までゴム状平坦領域の広いポリマーであり、例えば、天然ゴム;イソプレンゴム、スチレン・ブタジエンゴム、スチレン・ブタジエンブロック共重合体、スチレン・イソプレンブロック共重合体、ブチルゴム、ポリイソブチレン、ポリビニルイソブチルエーテル、クロロプレンゴム、ニトリルゴム、グラフトゴムなどの合成ゴムまたは熱可塑性エラストマーがあげられるが、これらに限定されるものではない。   Examples of the rubber-based resin include those obtained by adding an elastomer as a main component and adding a tackifier resin, a softening agent, an anti-aging agent, a filler and the like thereto. The elastomer is a polymer having a low glass transition point and a wide rubber-like flat region up to a high temperature. For example, natural rubber; isoprene rubber, styrene / butadiene rubber, styrene / butadiene block copolymer, styrene / isoprene block copolymer. Examples include, but are not limited to, polymers, butyl rubber, polyisobutylene, polyvinyl isobutyl ether, chloroprene rubber, nitrile rubber, and synthetic rubber such as graft rubber or thermoplastic elastomer.

粘着性付与剤樹脂、軟化剤、老化防止剤、充てん剤としては、特に限定されず、公知・慣用のものを使用できる。例えば、付着性付与剤樹脂としては、ロジン系樹脂、テルペン系樹脂、石油樹脂(脂肪族系石油樹脂、芳香族系石油樹脂、水素添加石油樹脂)、クマロン・インデン樹脂、スチレン系樹脂などがあげられる。中でも、ゴム系樹脂としては、スチレン・イソプレンブロック共重合体や天然ゴム系エラストマーを主成分とするものが特に好ましい。   The tackifier resin, softening agent, anti-aging agent, and filler are not particularly limited, and known and commonly used ones can be used. For example, examples of adhesion imparting resins include rosin resins, terpene resins, petroleum resins (aliphatic petroleum resins, aromatic petroleum resins, hydrogenated petroleum resins), coumarone / indene resins, styrene resins, and the like. It is done. Among these, as the rubber-based resin, those mainly composed of a styrene / isoprene block copolymer or a natural rubber-based elastomer are particularly preferable.

本発明の塗布ヘッド清浄方法に用いる装置は、粘着テープがロール状から巻出されたものであり、該粘着テープを間欠的に供給する巻出し手段と、清浄後の粘着テープをロール状に巻き取る巻取り手段と、該粘着テープの張力を制御する手段と、該粘着テープの送り量を制御する手段と、テープ残量を検知する手段を有することが好ましい。   The apparatus used for the coating head cleaning method of the present invention is one in which the pressure-sensitive adhesive tape is unwound from a roll shape. The unwinding means for intermittently supplying the pressure-sensitive adhesive tape and the cleaned pressure-sensitive adhesive tape are wound in a roll shape. It is preferable to have winding means for taking up, means for controlling the tension of the adhesive tape, means for controlling the feed amount of the adhesive tape, and means for detecting the remaining amount of the tape.

粘着テープの張力としては特に限定しないが、10〜1000N/mが好ましい。10N/mより小さいと粘着テープ材の搬送が不安定になりシワが発生したり、押し当てが不均一になりやすい。1000N/mより大きいと高張力をかけるための駆動設備が大型化したり、装置負荷が増大し壊れやすくなるので好ましくない。30〜200N/mであればより好ましい。   Although it does not specifically limit as tension | tensile_strength of an adhesive tape, 10-1000 N / m is preferable. If it is less than 10 N / m, the conveyance of the adhesive tape material becomes unstable and wrinkles are likely to occur, or the pressing tends to be uneven. If it is larger than 1000 N / m, the driving equipment for applying high tension becomes large, or the load on the apparatus increases and it becomes fragile, which is not preferable. More preferably, it is 30 to 200 N / m.

公知の各種シワ伸ばし手段を設置したり、帯電を防止する手段を設置することも好ましい。特に、帯電量が1000kV以下であると、放電を防止しやすくなり、ゴミの吸着も防止しやすくなるので好ましい。100kV以下であればさらに好ましい。   It is also preferable to install various known wrinkle stretching means or a means for preventing charging. In particular, it is preferable that the charge amount is 1000 kV or less because it is easy to prevent discharge and it is easy to prevent the adsorption of dust. More preferably, it is 100 kV or less.

また、塗布不良が発生した場合などにペースト吐出の乱れが原因で吐出口面にペーストが多量に付着することがある。このような場合、粘着テープでは清浄を複数回繰り返す必要が有り、長時間を要するとともに粘着テープで押圧した際にペーストが大きく広がり、必要以上に塗布ヘッドを汚してしまう恐れがある。このような多量のペーストの付着に対して従来技術であった単糸繊度0.1デシテックス以下の超極細繊維の織編物による吐出口面の拭き取り清浄機構を備えておくことが生産効率上好ましい。   In addition, when a coating failure occurs, a large amount of paste may adhere to the discharge port surface due to disorder of paste discharge. In such a case, it is necessary to repeat cleaning several times with the pressure-sensitive adhesive tape, and it takes a long time, and when the pressure is pressed with the pressure-sensitive adhesive tape, the paste spreads greatly, and the application head may be unnecessarily soiled. It is preferable in terms of production efficiency to provide a mechanism for wiping and cleaning the discharge port surface with a woven or knitted fabric of ultrafine fibers having a single yarn fineness of 0.1 dtex or less, which has been a conventional technique for the adhesion of such a large amount of paste.

単糸繊度0.1デシテックス以下の超極細繊維の織編物を用いることでペースト中に数μm程度の微細な無機粉末を含有する場合にも拭き残り無く清浄することができる。この場合、さらに洗浄溶液を織編物に吐出して、ペーストをとりやすくすることも好ましい。   By using a woven or knitted fabric of ultrafine fibers having a single yarn fineness of 0.1 dtex or less, even when a fine inorganic powder of about several μm is contained in the paste, it can be cleaned without wiping. In this case, it is also preferable to discharge the cleaning solution onto the woven or knitted fabric so that the paste can be easily removed.

このように従来技術を組み合わせる場合であっても、織編物による拭き取りのみによる塗布ヘッド清浄方法と比較すると拭き取り時の摩擦量を大幅に低減できるため、塗布ヘッドの損傷を大幅に抑制することができる。   Even when combining conventional techniques in this way, the amount of friction at the time of wiping can be greatly reduced compared to the method of cleaning the application head by only wiping with a woven or knitted fabric, so that damage to the application head can be greatly suppressed. .

本発明は、特にペースト粘度が10〜100Pa・Sの場合に好適に適用することができる。10Pa・Sより小さいと塗布していないときにも塗布ヘッドからペーストがたれやすくなる傾向があり、付着量によっては転写残しが発生しやすくなるので好ましくない。また、100Pa・Sより大きいときは吐出圧が高くなりすぎ塗布速度を上げにくい傾向があるうえ、付着量によっては転写残しが発生しやすくなるので好ましくない。より好ましくは、20〜70Pa・Sである。なお、ペースト粘度は、ブルックフィールド型の粘度計を用いて、測定温度25℃、ずり速度2.4s−1で測定した値である。The present invention can be suitably applied particularly when the paste viscosity is 10 to 100 Pa · S. If it is less than 10 Pa · S, the paste tends to be dripped from the coating head even when it is not applied, and depending on the amount of adhesion, transfer residue tends to occur, which is not preferable. On the other hand, when the pressure is higher than 100 Pa · S, the discharge pressure tends to be too high and it is difficult to increase the coating speed. More preferably, it is 20-70 Pa * S. The paste viscosity is a value measured using a Brookfield viscometer at a measurement temperature of 25 ° C. and a shear rate of 2.4 s −1 .

また、塗液としては、プラズマディスプレイ製造に用いられる蛍光体ペースト、反射層用ペースト、誘電体ペースト、電極ペーストなど、塗布材料に合わせて選定すればよい。一例として、蛍光体ペーストとは、蛍光体粉末、バインダー、添加剤、溶媒などを含有するものである。   The coating liquid may be selected according to the coating material such as a phosphor paste, a reflective layer paste, a dielectric paste, and an electrode paste used in plasma display manufacturing. As an example, the phosphor paste contains phosphor powder, a binder, an additive, a solvent, and the like.

本発明は、公知の帯電塗布と組み合わせるとなお一層効果的である。帯電塗布とは、塗布ヘッドまたはペーストまたは基板のいずれかに電荷を付与し、静電気力を用いてペーストを基板に引き寄せる塗布方法である。帯電塗布においては、塗布終了後のノズル吐出面へのペーストの付着が少なくなる傾向があるので、本発明と組み合わせるとペーストの転写時間が短くでき、生産効率上非常に好ましい。   The present invention is even more effective when combined with known charge coating. Charge coating is a coating method in which a charge is applied to either a coating head, a paste, or a substrate, and the paste is drawn to the substrate using electrostatic force. In electrification coating, there is a tendency that the adhesion of the paste to the nozzle ejection surface after the completion of coating tends to be small.

本発明の塗布ヘッドが、プラズマディスプレイ製造用蛍光体塗布ノズルであるとさらに好ましく清浄できる。本発明の塗布ヘッド清浄方法を、一面毎に塗布の開始及び終了を行う枚葉方式の塗布に適用すると、従来技術では吐出口面が汚れていたり、拭き取り傷が発生したりして均一に塗布できなかった場合でも、吐出口面に傷なく、残留ペーストもなく清浄できるので非常に均一で高品位な塗布面を得ることができ好ましい。特にプラズマディスプレイ製造用蛍光体ペーストの塗布に用いると効果が大きいので好ましい。   When the coating head of the present invention is a phosphor coating nozzle for manufacturing a plasma display, it can be more preferably cleaned. When the coating head cleaning method of the present invention is applied to a single-wafer coating method in which coating is started and finished for each surface, the conventional technique uniformly coats the discharge port surface or causes wiping scratches. Even if it is not possible, it is possible to obtain a very uniform and high-quality coated surface because the discharge port surface can be cleaned without scratches and residual paste, which is preferable. In particular, it is preferable to use it for applying a phosphor paste for manufacturing a plasma display because the effect is great.

以下にプラズマディスプレイ用蛍光体塗布ヘッドの清浄に本発明を適用した実施例を説明するが本発明はかかる実施例のみに限定されるものではない。   Examples in which the present invention is applied to cleaning a phosphor coating head for plasma display will be described below, but the present invention is not limited to such examples.

使用した蛍光体ペーストは以下の方法で作成した。無機蛍光体粉末の重量比率を19として重量比率20のエチルセルロースの16重量%テルピネオール/ベンジルアルコール(3/1)溶液の中に分散・混合して蛍光体ペーストを作成した。用いた蛍光体粉末は赤色発光には(Y,Gd)BO:Eu、緑色発光にはZnSiO:Mn、青色発光にはBaMgAl1017:Euである。これらの各色蛍光体粉末の累積平均粒子径、および最大粒子径はR蛍光体:2.7μm、27μm、B蛍光体:3.7μm、27μm、G蛍光体:3.6μm、25μmである。また、それぞれの粘度はR蛍光体:52Pa・s、B蛍光体:39Pa・s、G蛍光体:40Pa・sである。The phosphor paste used was prepared by the following method. A phosphor paste was prepared by dispersing and mixing in a 16 wt% terpineol / benzyl alcohol (3/1) solution of ethyl cellulose having a weight ratio of 19 and a weight ratio of the inorganic phosphor powder of 19. The phosphor powder used is (Y, Gd) BO 3 : Eu for red light emission, ZnSiO 4 : Mn for green light emission, and BaMgAl 10 O 17 : Eu for blue light emission. The cumulative average particle size and the maximum particle size of each color phosphor powder are R phosphor: 2.7 μm, 27 μm, B phosphor: 3.7 μm, 27 μm, G phosphor: 3.6 μm, 25 μm. The respective viscosities are R phosphor: 52 Pa · s, B phosphor: 39 Pa · s, and G phosphor: 40 Pa · s.

該蛍光体を塗布する塗布ヘッドは孔径100μmの吐出口を塗布ヘッドの長手方向に1920個配列して有する塗布ヘッドであり、内部に空気によって200〜700kPaの圧力をかけ、基板に対する進行速度を20〜200mm/sの範囲内で変化させて蛍光体ペーストを吐出させることにより所定の隔壁間に蛍光体ペーストを充填する塗布ヘッドを用いた。   The coating head for coating the phosphor is a coating head having 1920 discharge holes with a hole diameter of 100 μm arranged in the longitudinal direction of the coating head, and a pressure of 200 to 700 kPa is applied to the inside by air to adjust the traveling speed to the substrate to 20 A coating head that fills the phosphor paste between predetermined barrier ribs by discharging the phosphor paste while changing within a range of ˜200 mm / s was used.

該塗布ヘッドの吐出口および吐出口面に付着した蛍光体ペーストの清浄に用いた粘着テープは以下の通りである。
粘着テープ:日東電工株式会社製:エレップクリーナ(登録商標)
また、繊維織編物は以下の通りである。
超極細繊維織編物:東レ株式会社製:トレシー(登録商標)
織編物を湿潤する洗浄溶剤として、アセトンを用いた。
The pressure-sensitive adhesive tape used for cleaning the phosphor paste adhered to the discharge port and the discharge port surface of the coating head is as follows.
Adhesive tape: Nitto Denko Corporation: ELEP Cleaner (registered trademark)
Moreover, the fiber woven or knitted fabric is as follows.
Super extra fine fiber knitted fabric: Toray Industries, Inc .: Toraysee (registered trademark)
Acetone was used as a cleaning solvent for wetting the woven or knitted fabric.

評価は以下のように行った。図6cに示すように残留ペーストが吐出孔の縁にかかると、正常な塗布が阻害される傾向がある。そこで、一連の清浄動作の後吐出孔面を観察し、残留ペーストの一部がその縁にかかる形で付着している吐出孔数の全吐出口に対する割合を調べ、10%以上を×、10%以下を○、1%以下を◎とした。   Evaluation was performed as follows. When the residual paste is applied to the edge of the discharge hole as shown in FIG. 6c, normal application tends to be hindered. Accordingly, the surface of the discharge holes is observed after a series of cleaning operations, and the ratio of the number of discharge holes in which a part of the residual paste adheres to the edges of the discharge holes is checked with respect to the total discharge ports. % Or less was marked with ◯, and 1% or less was marked with ◎.

実施例1
前記塗布ヘッドに、前述の通り作製した蛍光体ペーストを充填して、該塗布ヘッドを使用して蛍光体ペーストを所定の隔壁間に塗布した。その後、粘着テープをロール状にしたものを使用して、図1に示す方法で吐出口および吐出口面に蛍光体ペーストが付着した塗布ヘッドの清浄を行なった。塗布ヘッドの吐出口面に対向するように設置されたゴムロール(直径60mm、ショアーAゴム硬度30度、ゴム厚み10mm)を押し当て部材として用い、1回目の押し当て動作を実施した。粘着テープの粘着剤層を塗布ヘッドの吐出口および吐出口面に接触させ、粘着テープを塗布ヘッドに圧力0.2MPaで押圧しながら4秒間保持した後、押し当て部材を吐出口面から離間する方向に50mm/sで移動させながら、粘着テープに1kg/mの張力をかけて粘着面を吐出口面から引き剥がした。吐出口の約50%の部分に薄いペースト膜が残留した。
2回目の押し当ての前に、吐出口から塗液を微量吐出して各吐出口の近傍に直径約300μmの塗液溜まりを付着させる微量吐出動作を行った。
Example 1
The coating head was filled with the phosphor paste prepared as described above, and the phosphor paste was coated between predetermined partitions using the coating head. Thereafter, using a roll of adhesive tape, the discharge head and the coating head with the phosphor paste adhered to the discharge port surface were cleaned by the method shown in FIG. A first pressing operation was performed using a rubber roll (diameter 60 mm, Shore A rubber hardness 30 degrees, rubber thickness 10 mm) installed so as to face the discharge port surface of the coating head as a pressing member. The pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape is brought into contact with the discharge port and the discharge port surface of the coating head, and is held for 4 seconds while pressing the pressure-sensitive adhesive tape against the coating head at a pressure of 0.2 MPa, and then the pressing member is separated from the discharge port surface. While moving in the direction at 50 mm / s, a tension of 1 kg / m was applied to the adhesive tape to peel off the adhesive surface from the discharge port surface. A thin paste film remained in about 50% of the discharge port.
Prior to the second pressing, a small amount of coating liquid was discharged from the discharge port, and a small amount of discharge operation was performed in which a coating liquid reservoir having a diameter of about 300 μm was adhered in the vicinity of each discharge port.

引き続いて粘着テープを20mm送り、新しい粘着面を転写位置に移動させ2回目の押し当てを実施した。再び押し当て部材で粘着テープを塗布ヘッドに圧力0.2MPaで押圧しながら2秒間保持した後、押し当て部材を吐出口面から離間する方向に50mm/sで移動させながら、粘着テープに1kg/mの張力をかけて粘着面を吐出口面から引き剥がした。残留ペーストの付着した吐出口は約0.5%に減少した。2000回連続で清浄動作を実施したところ傷は発生しなかった。   Subsequently, the adhesive tape was fed 20 mm, the new adhesive surface was moved to the transfer position, and the second pressing was performed. The pressure-sensitive adhesive tape was again pressed against the coating head at a pressure of 0.2 MPa with the pressing member and held for 2 seconds, and then the pressure-sensitive adhesive tape was moved at a rate of 50 mm / s in a direction away from the discharge port surface, The pressure-sensitive adhesive surface was peeled off from the discharge port surface by applying a tension of m. The discharge port to which the residual paste adhered was reduced to about 0.5%. When the cleaning operation was carried out continuously 2000 times, no scratches were generated.

実施例2
押し当て部材に直径200mmのゴムロールを用いた。他は、実施例1と同じ条件で実施した。残留ペーストの付着した吐出口は約5%に減少した。2000回連続で拭き取りを実施したところ拭き取り傷は発生しなかった。
Example 2
A rubber roll having a diameter of 200 mm was used as the pressing member. The other conditions were the same as in Example 1. The discharge port to which the residual paste adhered was reduced to about 5%. When wiping was performed continuously 2000 times, no wiping scratches were generated.

実施例3
押し当て部材にショアーAゴム硬度60度のゴムロールを用いた。他は、実施例1と同じ条件で実施した。残留ペーストの付着した吐出口は約8%に減少した。2000回連続で拭き取りを実施したところ拭き取り傷は発生しなかった。
Example 3
A rubber roll having a Shore A rubber hardness of 60 degrees was used as the pressing member. The other conditions were the same as in Example 1. The discharge port to which the residual paste adhered was reduced to about 8%. When wiping was performed continuously 2000 times, no wiping scratches were generated.

比較例1
帯状拭き取り部材として繊維織編物を用い、特許文献1記載の摺動拭きを実施した。残留ペーストの付着した吐出口は約0.2%であったが、2000回連続で拭き取りを実施したところ強い拭き取り傷が発生し、使用不可となった。
Comparative Example 1
The sliding wiping described in Patent Document 1 was performed using a fiber woven or knitted fabric as the belt-shaped wiping member. The discharge port to which the residual paste adhered was about 0.2%, but when wiping was continuously carried out 2000 times, a strong wiping wound was generated and it became unusable.

比較例2
4秒押し当てに続いて、吐出口から塗液を微量吐出しないで2秒押し当てを実施した。他は、実施例1と同じ条件で実施した。残留ペーストの付着した吐出口は約20%に達し、使用不可であった。
Comparative Example 2
Subsequent to pressing for 4 seconds, pressing was performed for 2 seconds without discharging a small amount of coating liquid from the discharge port. The other conditions were the same as in Example 1. The discharge port to which the residual paste adhered reached about 20% and was unusable.

Figure 0005581589
Figure 0005581589

プラズマディスプレイあるいは液晶ディスプレイなど薄型ディスプレイの製造方法に好適である。   It is suitable for a method for manufacturing a thin display such as a plasma display or a liquid crystal display.

本発明は固体粒子を高濃度で含む高粘度ペーストへの適用が好適であるが、インクジェットなど低粘度吐液に対しても適用することができる。   The present invention is preferably applied to a high-viscosity paste containing solid particles at a high concentration, but can also be applied to a low-viscosity discharge liquid such as an ink jet.

Claims (6)

塗布ヘッドの吐出口近傍の吐出口面に付着した塗液を清浄する塗布ヘッド清浄方法であって、粘着テープを該吐出口近傍の吐出口面に略垂直方向に接近させ当接させた後略垂直方向に引き離す押し当て動作を1回以上行い、その後該吐出口から塗液を塗液溜りの大きさが吐出孔外縁から10〜1000μmとなるよう微量吐出する微量吐出動作を行い、さらに粘着テープを該吐出口近傍の吐出口面に略垂直方向に接近させ当接させた後略垂直方向に引き離す押し当て動作を1回以上行なうことを特徴とする塗布ヘッド清浄方法。 A coating head cleaning method for cleaning a coating liquid adhering to a discharge port surface in the vicinity of a discharge port of a coating head, wherein the adhesive tape is brought into contact with a discharge port surface in the vicinity of the discharge port in a substantially vertical direction and then substantially vertical. The pressing operation is performed once or more in the direction of separation, and then a small amount discharging operation is performed to discharge the coating liquid from the discharge port so that the size of the coating liquid reservoir is 10 to 1000 μm from the outer edge of the discharge hole. A coating head cleaning method, wherein a pressing operation of bringing the surface close to and in contact with a discharge port surface in the vicinity of the discharge port and then pulling it away in a substantially vertical direction is performed once or more. 各押し当て動作において、前記粘着テープを介して塗布ヘッド吐出口面と向かい合うように、弾性体からなる押し当て部材を押し当てる請求項1に記載の塗布ヘッド清浄方法。 The coating head cleaning method according to claim 1, wherein in each pressing operation, a pressing member made of an elastic body is pressed so as to face the coating head discharge port surface through the adhesive tape. 前記塗液が蛍光体ペーストである請求項1または2に記載の塗布ヘッド清浄方法。 The coating head cleaning method according to claim 1, wherein the coating liquid is a phosphor paste. 前記塗布ヘッドが、プラズマディスプレイ製造用蛍光体塗布ノズルである請求項1〜3のいずれかに記載の塗布ヘッド清浄方法。 The coating head cleaning method according to claim 1, wherein the coating head is a phosphor coating nozzle for manufacturing a plasma display. 請求項1〜4のいずれかに記載の塗布ヘッド清浄方法を用いて塗布ヘッドを清浄した後、塗布ヘッドから塗液を吐出して塗布を行うことを特徴とするペースト塗布方法。 A paste coating method, wherein the coating head is cleaned by using the coating head cleaning method according to claim 1, and then coating is performed by discharging a coating liquid from the coating head. 請求項5に記載のペースト塗布方法を用いて蛍光体層を形成することを特徴とするプラズマディスプレイの製造方法。 A method of manufacturing a plasma display, comprising forming a phosphor layer using the paste coating method according to claim 5.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11239750A (en) * 1998-02-25 1999-09-07 Toray Ind Inc Method and apparatus for applying coating liquid on uneven substrate, method and apparatus for producing plasma display
JPH11320900A (en) * 1993-01-26 1999-11-24 Matsushita Electric Ind Co Ltd Ink jet recording apparatus
JP2001348541A (en) * 2000-06-06 2001-12-18 Nitto Denko Corp Adhesive sheet for removing solvent-containing material
JP2006247956A (en) * 2005-03-09 2006-09-21 Fuji Xerox Co Ltd Liquid droplet ejection device and wiping method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
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JP4058969B2 (en) * 2002-03-15 2008-03-12 セイコーエプソン株式会社 Film forming apparatus, head cleaning method, device manufacturing apparatus and device
JP4320635B2 (en) * 2005-01-17 2009-08-26 セイコーエプソン株式会社 Droplet ejection apparatus and electro-optic device manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11320900A (en) * 1993-01-26 1999-11-24 Matsushita Electric Ind Co Ltd Ink jet recording apparatus
JPH11239750A (en) * 1998-02-25 1999-09-07 Toray Ind Inc Method and apparatus for applying coating liquid on uneven substrate, method and apparatus for producing plasma display
JP2001348541A (en) * 2000-06-06 2001-12-18 Nitto Denko Corp Adhesive sheet for removing solvent-containing material
JP2006247956A (en) * 2005-03-09 2006-09-21 Fuji Xerox Co Ltd Liquid droplet ejection device and wiping method

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