JP4320635B2 - Droplet ejection apparatus and electro-optic device manufacturing method - Google Patents

Description

  The present invention relates to a droplet discharge apparatus that performs drawing with a functional liquid on a work while moving the functional liquid droplet discharge head relative to the work set on a set table, a method for manufacturing an electro-optical device, an electro-optical device, And electronic devices.

  Conventionally, a main scanning movement table that moves a set table (substrate transfer table) on which a work (substrate) is set in the main scanning direction and a head unit equipped with a functional liquid droplet ejection head that discharges functional liquid in the sub scanning direction. A sub-scanning movement table for moving the main liquid droplet for discharging the functional droplet discharge head while moving the work in the main scanning direction with respect to the head unit via the set table, and the head unit for the work. 2. Related Art There is known a droplet discharge apparatus (film forming apparatus) that draws a predetermined pattern on a workpiece with a functional liquid by performing sub-scanning that moves in the sub-scanning direction.

In order to maintain drawing accuracy, the droplet discharge device wipes (wipes) the nozzle surface of the functional droplet discharge head with a wiping sheet, so that the ink adhered to the nozzle surface due to the discharge of the functional liquid is removed. A wiping unit (cleaning unit) for removal is provided. In the droplet discharge device, a predetermined position on the sub-scanning movement axis (on the movement trajectory of the head unit by the sub-scanning movement table) and deviating from the main scanning movement table is the wiping position of the wiping unit. In the case of performing the wiping process on the functional liquid droplet ejection head, the sub-scanning movement table is driven and placed on the main scanning movement axis (on the movement path of the head unit by the X-axis table) for the drawing process. The head unit that faces is moved to the wiping position.
JP 2004-202325 A

  As described above, in order to perform the wiping process with the conventional droplet discharge device, it is necessary to drive the sub-scanning movement table and move the head unit to the wiping position each time. In this case, it is necessary to drive the sub-scanning movement table while aligning with the driving of the main-scanning movement table accompanied by the discharge of the functional liquid so as not to adversely affect the drawing on the workpiece. There was a problem of prolongation. In particular, when it is necessary to frequently perform wiping due to the type of functional liquid used for drawing, the drawing efficiency of the workpiece is deteriorated, which is a problem.

  In recent years, the size of the workpiece has increased, and the drawing processing time required for one workpiece has increased. Along with this, since the amount of functional liquid adhering to the nozzle surface of the functional liquid droplet ejection head increases during the drawing process on the workpiece, it is conceivable to perform the wiping process in the middle of the drawing process. In this case, the time required for the wiping process is long, and the drawing process is significantly interrupted due to the wiping process. As a result, the drying conditions and the like of the functional liquid drawn on the work immediately before the wiping process and the functional liquid drawn on the work immediately after the wiping process are greatly different, and there is a possibility that streak may occur at the boundary.

  Accordingly, it is an object of the present invention to provide a droplet discharge device, a method of manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus that can reduce the time required for the wiping process and do not impair the drawing efficiency of the workpiece. Yes.

The liquid droplet ejection apparatus of the present invention draws the functional liquid droplet by driving the functional liquid droplet ejection head while moving the functional liquid droplet ejection head relative to the work set on the set table in the main scanning direction. In the liquid droplet ejection apparatus that performs the above , the main liquid movement head that moves the functional liquid droplet ejection head relative to the work set on the set table in the main scanning direction, and the functional liquid droplet ejection head, the functional liquid droplet ejection A wiping unit for wiping the nozzle surface of the head with a wiping sheet, and a flushing box for receiving waste discharge from the functional liquid droplet ejection head located in the liquid droplet ejection area between the set table and the wiping unit; the provided, wiping unit, primarily in the scanning direction, the main scanning shift with adjacent droplet ejection region set table is disposed Characterized in that it is disposed relative acceleration and deceleration regions of the set table and the functional liquid droplet ejection head according to the table.

  According to this configuration, the droplet discharge area in which the set table is disposed and the drawing wiping area in which the wiping unit is disposed are adjacent to each other in the main scanning direction. Using the relative movement in the main scanning direction, the functional liquid droplet ejection head can face the wiping unit. Therefore, it is possible to reduce the time required for the functional liquid droplet ejection head to face the wiping unit, and to shift from the drawing process for the workpiece to the wiping process using the wiping unit in a short time. That is, the time required for the wiping process can be shortened and the drawing efficiency for the workpiece can be increased.

In addition, since the time required for the wiping process is short, there is no streak between the lines of drawing performed before and after the wiping process. Accordingly, even during the drawing process for one workpiece, the functional liquid droplet ejection head can be appropriately subjected to the wiping process, and the functional liquid droplet ejection head can be maintained in an appropriate state. For this reason, the drawing accuracy can be stabilized and the yield can be improved.
In addition, since the flushing box is interposed between the set table and the wiping unit, waste discharge (flushing) is performed during the transition from the wiping operation to the drawing operation and during the transition from the drawing operation to the wiping operation. Can do. Thereby, it becomes possible to perform the waste discharge efficiently together with the wiping operation, and it is possible to effectively maintain and recover the function of the functional liquid droplet discharge head.

In this case, word Lee ping unit is preferably provided a pair so as to sandwich the set table in the main scanning direction.

  According to this configuration, the wiping unit can face the functional liquid droplet ejection head twice by the relative movement of the functional liquid droplet ejection head in the main scanning direction (once). That is, it is possible to perform the wiping process both before and after drawing on the workpiece. In addition, when the functional liquid droplet ejection head is reciprocally moved relative to the workpiece in the main scanning direction, the wiping unit is used in both cases of forward movement and backward movement. In both cases of main scanning forward and backward movements, it is possible to maintain and recover the function of the functional liquid droplet ejection head.

In this case, the apparatus further includes a control unit that controls the functional liquid droplet ejection head, the wiping unit, and the main scanning movement table, and the wiping unit has a wiping mechanism for wiping the nozzle surface using the wiping sheet. The control means drives and controls the main scanning movement table to relatively move the drawing wiping area to the functional liquid droplet ejection head, and performs wiping operation and discarding ejection on the nozzle surface of the functional liquid droplet ejection head. It is preferable that the drawing operation on the workpiece is continuously performed.

According to this configuration, by moving the functional liquid droplet ejection head relative to the wiping mechanism, the wiping sheet comes into sliding contact with the nozzle surface, and a wiping operation is performed. Since the wiping operation, the discarding discharge, and the drawing operation are performed continuously, there is no need to interrupt the relative movement of the functional droplet discharge head for the drawing operation, and the functional droplet discharge head is moved. Thus, the wiping operation (wiping) and the discarding discharge can be performed efficiently.

  In this case, the wiping unit further includes a wiping setting unit configured to set whether or not to perform the wiping operation on the functional liquid droplet ejection head, and the wiping unit wipes from the nozzle surface and the wiping position where the wiping sheet contacts the nozzle surface. It further includes an elevating mechanism that supports the wiping mechanism so as to be movable up and down with respect to a standby position for separating the sheet, and the control means can perform drive control of the elevating mechanism and perform a wiping operation by the wiping setting means. When set, it is preferable to raise the wiping mechanism to the wiping position.

  According to this configuration, whether or not to perform the wiping operation is set, and based on this, the wiping mechanism can be brought to either the wiping position or the standby position. A wiping operation (wiping) can be performed, and the wiping operation can be performed according to the actual situation according to the type of functional liquid introduced into the functional liquid droplet ejection head.

In these cases, the main scanning movement table, to the functional liquid droplet ejecting heads, set table, it is preferable to move the wiping unit and the flushing box in the main scanning direction.

According to this configuration, by driving the main scanning movement table, the set table , the wiping unit, and the flushing box can be moved in the main scanning direction with respect to the functional liquid droplet ejection head, and these are sequentially moved to the functional liquid droplets. By facing the discharge head, it is possible to efficiently perform drawing on the workpiece, wiping processing on the functional liquid droplet discharge head, and the like .

Method of manufacturing an electro-optical device of the present invention, using a liquid droplet ejection apparatus described above, characterized by forming the film-forming portion by the functional liquid droplet on the workpiece.

  According to these configurations, since the above-described droplet discharge device is used, it is possible to efficiently perform the wiping operation on the nozzle surface of the functional droplet discharge head during the drawing process and maintain it with high accuracy. A film forming portion can be formed and a yield can be improved, and an electro-optical device can be manufactured efficiently. Examples of the electro-optical device (device) include a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, and an electrophoretic display device. The electron emission device is a concept including a so-called FED (Field Emission Display) device or SED (Surface-Conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  Hereinafter, a droplet discharge device to which the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a so-called flat display production line, and by a droplet discharge method using a functional droplet discharge head (applying an inkjet method), a color filter or an organic EL of a liquid crystal display device. A light emitting element or the like to be each pixel of the device is formed.

  As shown in FIGS. 1 and 2, the droplet discharge device 1 has a head unit 16 equipped with a plurality of functional droplet discharge heads 53 (not shown), and performs drawing with functional droplets on a workpiece W. The apparatus 2, the maintenance device 3 for maintaining and maintaining the function of the functional liquid droplet ejection head 53, the functional liquid supply device 4 (not shown) for supplying the functional liquid to the drawing device 2 (functional liquid droplet ejection head 53), And a control device 5 (not shown) for overall control of the device. In the droplet discharge device 1, based on the control by the control device 5, the drawing device 2 performs a drawing process to draw a predetermined drawing pattern on the workpiece W, and the maintenance device 3 appropriately performs a maintenance process. Thus, the function maintenance / maintenance of the functional liquid droplet ejection head 53 is intended.

  As shown in FIG. 1, the drawing apparatus 2 is arranged on an X-axis support base 11 composed of a stone surface plate and the like, and is placed on the X-axis support base 11, and a work W is set in the main scanning direction. An X-axis table 12 for moving in the X-axis direction, a pair (two) of Y-axis support bases 14 spanned across the X-axis table 12 via a plurality of support columns 13, A Y-axis table 15 disposed on the shaft support base 14 and seven carriage units 51 on which a plurality of functional liquid droplet ejection heads 53 (not shown) are mounted. The Y-axis direction is the sub-scanning direction. The head unit 16 is supported by the Y-axis table 15 so as to be movable.

  In addition, while the position before this figure in FIG. 1 introduce | transduces the unprocessed workpiece | work W, it is a workpiece | work transfer position for collect | recovering the processed workpiece | work W, and the X-axis table 12 and the Y-axis table 15 The place where the heads intersect is the drawing position of the head unit 16 for drawing on the workpiece W.

  The drawing device 2 includes an air supply device (not shown) that supplies compressed air for driving and control, an air suction device (not shown) that sucks air to set the workpiece W, and a work W Various accessory devices such as a pair of workpiece recognition cameras 21 used for setting (position correction) and a head recognition camera (not shown) for correcting the position of the head unit 16 are provided.

  As shown in FIGS. 1 and 2, the X-axis table 12 includes a set table 31 for setting a workpiece W, an X-axis air slider 32 for supporting the set table 31 slidably in the X-axis direction, and an X-axis direction. A pair of left and right X-axis linear motors (not shown) that extend and move the workpiece W in the X-axis direction via the set table 31 and the X-axis linear motor are arranged in parallel to guide the movement of the X-axis air slider 32 A pair (two) of X-axis guide rails 33 and an X-axis linear scale (not shown) that are arranged in parallel with the X-axis guide rails 33 and for grasping the position of the workpiece W via the set table 31. I have.

  The set table 31 supports the suction table 34 for sucking and setting the work W by air suction from an air suction device, and the suction table 34 so as to be rotatable, and θ corrects the work W set on the suction table 34 by suction. The θ table 35 and the like are included (see FIG. 7). The workpiece W set on the suction table 34 is image-recognized by the pair of workpiece recognition cameras 21 and θ-corrected via the θ table 35.

  When the pair of X-axis linear motors are driven (synchronized), the X-axis air slider 32 moves in the X-axis direction while being guided by the pair of X-axis guide rails 33, and the work set on the set table 31 W moves in the X-axis direction.

  Although the details will be described later, a drawing flushing unit 91 (drawing flushing box 101) of the maintenance device 3 is supported on the set table 31, and a drawing wiping unit of the maintenance device 3 is supported on the X-axis air slider 32. 131 and a non-drawing flushing unit 92 are mounted.

  The Y-axis table 15 includes seven bridge plates 41 that are inserted and fixed through the seven carriage units 51 that constitute the head unit 16, and seven sets of 14 Y-axis sliders that support both ends of the seven bridge plates 41. (Not shown) and a pair of Y-axis linear motors (not shown) that are installed on the pair of Y-axis support bases 14 and move the bridge plate 41 in the Y-axis direction via seven sets of 14 Y-axis sliders. ) And a pair of Y-axis guide rails (illustrated) that are installed on the Y-axis support base 14 along with the Y-axis linear motor, support seven sets of 14 Y-axis sliders, and guide the movement of each Y-axis slider. And a Y-axis linear scale (not shown) provided in parallel with the Y-axis guide rail and for grasping the position of each carriage unit 51.

  When the pair of Y-axis linear motors are driven (synchronized), the Y-axis sliders simultaneously translate in the Y-axis direction using the pair of Y-axis guide rails as a guide. As a result, the bridge plate 41 moves in the Y-axis direction with both ends supported, and the carriage unit 51 moves in the Y-axis direction along with this. In this case, by controlling the driving of the Y-axis linear motor, each bridge plate 41 (each carriage unit 51) can be moved independently, and all seven bridge plates 41 can be moved to the head. It is also possible to move the unit 16 integrally.

  As shown in FIGS. 1 and 2, the head unit 16 is configured by aligning seven carriage units 51 that are similarly configured in the Y-axis direction. Each carriage unit 51 is configured such that twelve functional liquid droplet ejection heads 53 are mounted on a head plate 52 via a head holding plate (not shown) and supported by a carriage 54.

  As shown in FIG. 3, the head plate 52 is a thick plate made of stainless steel or the like and is formed in a substantially parallelogram in plan view. The head plate 52 is provided with openings (not shown) for positioning and mounting the functional liquid droplet ejection heads 53 via the head holding plate. Each of the head plate 52 has 12 functional liquid droplet ejection heads 53. Is mounted, nozzle rows (described later) of twelve functional liquid droplet ejection heads 53 are continuous (partially overlapped) in the Y-axis direction so as to form one divided drawing line. In the present embodiment, a step-like arrangement pattern in which the twelve functional liquid droplet ejection heads 53 are displaced in the X-axis direction and the Y-axis direction is employed. As long as the nozzle rows are continuous in the Y-axis direction, the arrangement pattern of the functional liquid droplet ejection heads 53 can be arbitrarily set.

  As shown in FIG. 4, the functional liquid droplet ejection head 53 (inkjet head) is a so-called two-unit type, and includes a functional liquid introduction unit 61 having two series of connecting needles 62, and 2 connected to the functional liquid introduction unit 61. A continuous head substrate 63 and a head main body 64 which is connected to the lower side of the functional liquid introducing portion 61 and has an in-head flow path filled with the functional liquid therein. The connection needle 62 is connected to the functional liquid supply device 4 (functional liquid tank) (not shown) and supplies the functional liquid to the functional liquid introduction unit 61. The head main body 64 includes a cavity 65 (piezo piezoelectric element) and a nozzle plate 66 having a nozzle surface 67 in which a large number of ejection nozzles 68 are opened. When the functional liquid droplet ejection head 53 is ejected, a functional liquid droplet is ejected from the ejection nozzle 68 by the pump action of the cavity 65 (a voltage is applied to the piezoelectric element).

  A large number of the discharge nozzles 68 are divided into two and aligned at an equal pitch (interval of about 140 μm) to form two divided nozzle rows, and the two divided nozzle rows are mutually half-pitch. The position is shifted by (about 70 μm). That is, the functional liquid droplet ejection head 53 is formed with nozzle rows at half pitch intervals by two divided nozzle rows, and high-resolution drawing is possible.

  The carriage 54 supports the head plate 52 (mounted with the functional liquid droplet ejection head 53), and the head plate 52 (functional liquid droplet ejection head 53) via the carriage body 71 is subjected to θ correction (θ rotation). A θ rotation mechanism 72 that supports the head plate 52 and a suspension member 73 that supports the head plate 52 on the Y-axis table 15 (each bridge plate 41) via the θ rotation mechanism 72 are provided. Although not shown, the suspension member 73 incorporates a head lifting mechanism (not shown) that lifts and lowers the head plate 52 via the θ rotation mechanism 72, and the head plate 52 (functional liquid droplet ejection head 53). The height position of the nozzle surface 67) can be adjusted.

  Then, the seven carriages 54 are respectively supported by the seven bridge plates 41, and the seven carriage units 51 are aligned in the Y-axis direction, whereby the head unit 16 is configured. In this case, each carriage unit 51 is imaged by the head recognition camera, and the θ rotation mechanism 72 of each carriage unit 51 is driven based on the image recognition. As a result, the position of each carriage unit 51 (head plate 52) in the horizontal plane is corrected, and in the head unit 16, one drawing line in which seven divided drawing lines of each carriage unit 51 are continuous in the Y-axis direction is formed. Is done.

  Here, a series of operations of the drawing apparatus 2 when performing drawing processing on the workpiece W will be described. First, the X-axis table 12 is driven, and the workpiece W is moved forward in the X-axis direction via the set table 31. In synchronization with the forward movement of the work W, the functional liquid droplet ejection heads 53 of the head unit 16 facing the drawing position are driven, and the functional liquid droplets are selectively ejected (drawn) onto the work W. . At this time, the set table 31 accelerates until reaching a predetermined speed, then moves at a constant speed and then decelerates to complete the forward movement of the workpiece W. In this embodiment, in order to stabilize the drawing accuracy, It is configured to perform drawing on the workpiece W while moving at a constant speed.

  When the forward movement of the workpiece W is completed, the Y-axis table 15 is driven, and the head unit 16 moves in the Y-axis direction by a predetermined distance. Then, the X-axis table 12 is driven again, and the functional liquid droplet ejection head 53 is driven in synchronism with the X-axis table 12 so that the work W is returned and the functional liquid droplets are selectively ejected onto the work W. Done. As described above, in the drawing apparatus 2, the movement of the workpiece W in the main scanning direction, the ejection driving (main scanning) of the functional liquid droplet ejection head 53 in synchronization therewith, and the movement of the head unit 16 in the sub scanning direction (sub scanning). By alternately repeating (scanning) and drawing, the drawing process for the workpiece W is performed.

  In the present embodiment, the drawing process is performed while repeating main scanning and sub-scanning. However, one drawing line of the head unit 16 is in the Y-axis direction of the maximum standard workpiece W that can be set on the set table 31. Since it corresponds to the width, it is possible to perform the drawing process in one main scan. In the present embodiment, the functional liquid droplet ejection head 53 is driven to discharge during the forward movement and the backward movement of the workpiece W. However, the ejection is driven only during the forward movement (or during the backward movement). It may be. In the main scanning of the present embodiment, the work W is moved in the X-axis direction with respect to the head unit 16, but the head unit 16 may be moved in the X-axis direction with respect to the work W. It is. Similarly, in the sub-scanning, instead of moving the head unit 16 in the Y-axis direction, the workpiece W can be moved in the Y-axis direction.

  Next, the maintenance device 3 will be described. The maintenance device 3 includes a flushing unit 81 that receives discarded discharge from the functional droplet discharge head 53, a suction unit 82 for forcibly discharging the functional liquid from the functional droplet discharge head 53, and the functional droplet discharge head 53. And a wiping unit 83 for wiping the nozzle surface 67. As shown in FIGS. 1 and 2, the drawing wiping unit 131 (described later) of the flushing unit 81 and the wiping unit 83 is mounted on the X-axis table 12 and the drawing unit 82 and the wiping unit 83 are not drawn. The wiping unit 132 (described later) is disposed on a maintenance base 84 that is detached from the X-axis table 12 and installed on the movement path of the head unit 16 by the Y-axis table 15.

  The flushing unit 81 receives the functional liquid discarded from the all-function liquid droplet ejection head 53 of the head unit 16 during a series of drawing processes on the (one) workpiece W, that is, the drawing flushing unit that receives the functional liquid for the drawing flushing. 91 and a functional liquid that is discarded and discharged from the all-function liquid droplet discharge head 53 of the head unit 16 when the drawing operation is temporarily stopped (when drawing is waiting), such as when the workpiece W is replaced, that is, non-working liquid. And a non-drawing flushing unit 92 for receiving a drawing flushing functional liquid.

  In the “disposal discharge”, the functional liquid having increased viscosity (due to vaporization or the like) is discharged from the discharge nozzle 68 of the functional liquid droplet discharge head 53, and a new functional liquid in good condition is supplied to the discharge nozzle 68. For this reason, by discarding the discharge from the (all) discharge nozzles 68 of the functional liquid droplet ejection head 53, the functional liquid droplet ejection head 53 can be maintained in an appropriate state.

  The drawing flushing unit 91 has a pair of drawing flushing boxes 101 that are supported by the set table 31 and receive the functional liquid. Each drawing flushing box 101 is formed in an elongated box shape having a rectangular shape in plan view with an absorbent material (not shown) laid on the bottom. Each drawing flushing box 101 is set via a box support member (not shown) so that its long side portion is along a pair of sides (peripheries) parallel to the Y-axis direction of the suction table 34. Table 35). In this case, the upper surface of the drawing flushing box 101 is substantially flush with the upper surface of the suction table 34. Therefore, when the workpiece W is reciprocated in the X-axis direction via the suction table 34, either immediately before the head unit 16 faces the workpiece W or immediately after the head unit 16 is separated from the workpiece W by one main scanning. In this case as well, the all-function liquid droplet ejection head 53 of the head unit 16 can sequentially face the drawing flushing box 101, and the drawing flushing functional liquid can be appropriately received.

  The non-drawing flushing unit 92 is mounted on the above-described X-axis air slider 32 and the non-drawing flushing box 111 which has an upper surface open and receives a functional liquid, and is supported by the X-axis air slider 32. A pair of box support members (not shown). The non-drawing flushing box 111 is formed in a rectangular shape in plan view with an open upper surface, and the non-drawing flushing box 111 of the head unit 16 is configured so that it can simultaneously receive non-drawing flushing from the all-function liquid droplet ejection head 53 of the head unit 16. The box is configured in a sufficiently large box shape that can include the full-function droplet discharge head 53.

  The pair of box support members support the non-drawing flushing box 111 so that the non-drawing flushing box 111 faces the head unit 16 located at the drawing position when the set table 31 faces the workpiece replacement position. During the replacement of W or the like, the non-drawing flushing can be performed by driving the full-function droplet discharge head 53 of the head unit 16 to be discharged.

  As shown in FIG. 1 and the like, seven suction units 82 are provided corresponding to each of the seven carriage units 51 of the head unit 16, and these are arranged in alignment on the maintenance frame 84. Each suction unit 82 has twelve caps 121 for closely contacting and sealing twelve functional liquid droplet ejection heads 53 (nozzle surfaces 67) mounted on the carriage unit 51 from below. Each functional liquid droplet ejection head 53 is supported via a cap lifting mechanism (not shown) that supports the individual caps 121 so that the cap 121 can be moved up and down, and separates the cap 121 from the functional liquid droplet ejection head 53. Suction means (ejector: not shown) for applying a suction force to the head.

  The suction of the functional liquid (forced discharge of the functional liquid) is performed in order to eliminate / prevent clogging of the functional liquid droplet ejection head 53 (ejection nozzle 68), and when the liquid droplet ejection apparatus 1 is newly installed, This is performed in order to fill the functional liquid droplet ejection head 53 with a functional liquid when the liquid droplet ejection head 53 is replaced. The cap 121 of the suction unit 82 is also used for storing the functional liquid droplet ejection head 53 when the liquid droplet ejection apparatus 1 is not in operation. In this case, the head unit 16 faces the suction unit 82, and the cap 121 is brought into close contact with the nozzle surface 67 of the functional liquid droplet ejection head 53, thereby sealing the nozzle surface 67 and the functional liquid droplet ejection head 53 (ejection). The drying of the nozzle 68) is prevented.

  The wiping unit 83 faces the functional liquid droplet ejection head 53 from below, and wipes the nozzle surface 67 of the functional liquid droplet ejection head 53 with the wiping sheet 141 (wiping). During the drawing process, a pair of drawing wiping units 131 configured to be wiping and a non-drawing wiping unit 132 that performs wiping during the non-drawing process, as in the case of performing after the suction of the functional liquid droplet ejection head 53 by the suction unit 82. And.

  As shown in FIGS. 1 and 2, the pair of drawing wiping units 131 are mounted on the X-axis air slider 32 so as to be adjacent along the long side of the pair of drawing flushing boxes 101 described above. Each drawing wiping unit 131 has a supply reel 143 for feeding out the wiping sheet 141 wound in a roll shape and a take-up reel 144 for taking up the fed wiping sheet 141, and winding up while feeding the wiping sheet 141 out. A wiping unit 145 having a wiping roller 146 that is rotatably supported so as to be parallel to the long side of the drawing flushing box 101 and circulates the wiping sheet 141 that has been fed out; The units 142 and 145 are moved up and down between a wiping position where the wiping roller 146 can come into contact with the nozzle surface 67 via the sheet 141 and a wiping standby position where the wiping roller 146 is separated from the nozzle surface 67. A unit elevating mechanism 147 that supports the unit freely. See Figure 7).

  When the main scanning of the drawing process is performed (the X-axis table 12 is driven) in a state where the unit lifting mechanism 147 raises the wiping roller 146 (in the wiping standby position) to the wiping position, the head unit The wiping sheet 141 slidably contacts (from the lower side) the nozzle surface 67 of the functional liquid droplet ejection head 53 mounted on 16 (direction perpendicular to the nozzle row direction of the functional liquid droplet ejection head 53: horizontal wiping). The nozzle surface 67 is sequentially wiped (in the direction). In this case, since the pair of drawing wiping units 131 are disposed so as to sandwich the pair of drawing flushing boxes 101, the head unit 16 is separated immediately before reaching the drawing flushing box 101 and separated in one main scan. Immediately after that, wiping can be performed. The width of the wiping sheet 141 and the length of the wiping roller 146 correspond to the length of one drawing line of the head unit 16, and the all-function liquid droplet ejection head 53 of the head unit 16 in one main scan. Can be wiped.

  Further, at the time of wiping the nozzle surface 67, the winding unit 142 may wipe the nozzle surface 67 while feeding the wiping sheet 141, or in a state in which the feeding of the wiping sheet 141 is stopped. The nozzle surface 67 may be wiped off. In the latter case, it is preferable that the wiping sheet 141 is appropriately fed out immediately before the start of wiping or immediately after the end of wiping, and the wiped sheet 141 that has been wiped off is suitably fed out.

  The non-drawing wiping unit 132 is arranged on the maintenance base 84 along with the seven suction units 82. The non-drawing wiping unit 132 is configured in substantially the same manner as the drawing wiping unit 131, but the cleaning liquid is supplied to the fed wiping sheet 141 on the sheet feeding path of the wiping sheet 141 from the feeding reel 143 to the wiping roller 146. A cleaning liquid supply unit 151 for spraying is provided. The cleaning liquid supply unit 151 has a spray head (not shown) for spraying the cleaning liquid across the width direction of the wiping sheet 141, and any nozzle surface 67 can be wiped with the wiping sheet 141 sprayed with the cleaning liquid. ing. (Here, the members corresponding to the respective members of the drawing wiping unit 131 of the non-drawing wiping unit 132 are given the same reference numerals as those attached to the drawing wiping unit 131).

  Further, the wiping sheet 141 and the wiping roller 146 applied to the non-drawing wiping unit 132 are configured corresponding to the length of each carriage unit 51 (head plate 52) in the X-axis direction, and non-drawing wiping is performed. The unit 132 is installed so that the wiping roller 146 is parallel to the X-axis direction. Therefore, when the Y-axis table 15 is driven with the wiping roller 146 facing the wiping position, the functional liquid droplet ejection head 53 is wiped (vertically wiped) in the nozzle row direction. The non-drawing wiping unit 132 is disposed closer to the drawing device 2 than the suction unit 82, and efficiently faces the head unit 16 (each carriage unit 51) that returns to the drawing position after being sucked by the suction unit 82. Wiping can be performed (see FIG. 7).

  The functional liquid supply device 4 is configured corresponding to each carriage unit 51 of the head unit 16, and has a functional liquid tank (not shown) that stores the functional liquid supplied to the functional liquid droplet ejection head 53. Two tank units (not shown), and seven valve units 161 each having a pressure adjusting valve 162 that adjusts the pressure of the functional liquid supplied from each tank unit (functional liquid tank) to the functional liquid droplet ejection head 53. ing.

  The control device 5 is composed of a personal computer or the like, and includes an input means (keyboard or the like) for performing data input and various settings, a display for visually confirming input data and various setting states, etc. (all are shown in the figure). (Omitted).

  Next, the main control system of the droplet discharge device 1 will be described with reference to FIG. The droplet discharge device 1 includes a drawing unit 171 having a drawing device 2, a maintenance unit 172 having a maintenance device 3, a detection unit 173 having various sensors of the drawing device 2 and the maintenance device 3, and performing various types of detection. A drive unit 174 having various drivers (a drawing driver for driving the drawing device 2 and a maintenance driver for driving the maintenance device 3) for driving each unit, and control of the entire droplet discharge device 1 connected to each unit And a control unit 175 (control device 5) for performing the above.

  The control unit 175 has an interface 181 for connecting the drawing device 2 and the maintenance device 3, a storage area that can be temporarily stored, a RAM 182 that is used as a work area for control processing, and various storage areas. ROM 183 for storing control programs and control data, drawing data for performing drawing processing on the workpiece W, various data from the drawing device 2 and the maintenance device 3, and the like for processing various data A hard disk 184 that stores programs and the like, a ROM 183, a CPU 185 that performs arithmetic processing on various data in accordance with programs stored in the hard disk 184, and a bus 186 that connects these to each other are provided.

  The control unit 175 inputs various data from the drawing device 2 and the maintenance device 3 through the interface 181 and is stored in the hard disk 184 (or sequentially read out by a CD-ROM drive or the like). Accordingly, the CPU 185 performs arithmetic processing, and outputs the processing result to the drawing apparatus 2, the maintenance apparatus 3, etc. via the interface 181 to control each means.

  As shown in FIG. 6, in the droplet discharge device 1 of the present embodiment, the area on the set table 31 is set as the actual drawing area 202, and the area on the pair of drawing flushing boxes 101 is set as the drawing flushing area 203. These regions 202 and 203 are combined to form a droplet discharge region 201 for receiving a functional liquid. An area adjacent to each drawing flushing area and facing the wiping roller 146 of the pair of drawing wiping units 131 is set as a drawing wiping area 211, and drawing wiping for the functional liquid droplet ejection head 53 is performed in this area. It has come to be.

  Thus, in the droplet discharge device 1 of the present embodiment, the drawing wiping region 211 is set adjacent to the droplet discharge region 201, and by using the movement of the X-axis air slider 32 accompanying main scanning, Drawing wiping, drawing flushing, and drawing on the workpiece W can be efficiently performed.

  With reference to FIGS. 6 and 7, a series of flows related to drawing wiping during main scanning, drawing flushing, and drawing on the workpiece W in the present embodiment will be described. Here, for convenience of explanation, among the pair of drawing wiping units 131 (drawing wiping area 211), the head unit side (the back side in the drawing in FIG. 1) is 131a (211a), and the workpiece repositioning position side. A description will be given assuming that 131b (211b) is (the front side in FIG. 1). Similarly, of the pair of drawing flushing units 91 (drawing flushing region 203), the head unit side is 91a (203a), and the workpiece transfer position side is 91b (203b).

  When the drawing process is started and the X-axis table 12 is driven for main scanning from the state of FIG. 7A, the drawing wiping unit 131 and the drawing flushing unit 91 are accompanied by the forward movement of the X-axis air slider 32. , And the set table 31 moves in the X-axis direction. As a result, the head unit 16 that has faced the non-drawing flushing unit 92 at the drawing position faces the drawing wiping area 211a, the drawing flushing area 203a, and the actual drawing area 202 in order, and the drawing wiping, drawing flushing, Drawing is performed continuously (see FIGS. 7B, 7C, and 7D).

  At this time, the control device 5 drives the unit elevating mechanism 147 in synchronization with the start of driving of the X-axis table 12, and moves the wiping roller 146 of the drawing wiping unit 131a until the drawing wiping area 211a reaches the drawing position. Keep it at the wiping position. Further, the control device 5 performs drive control of the functional liquid droplet ejection head 53 in synchronization with the drive of the X-axis table 12, and finishes the drawing wiping and draws the drawing flushing (from the functional liquid droplet ejection head 53 facing the drawing flushing area 203a). (Disposal discharge) is performed, and a predetermined drawing pattern is drawn on the functional droplet discharge head 53 facing the actual drawing area 202 after drawing flushing.

  After the drawing is completed, the driving of the X-axis table 12 is continued, and the drawing flushing area 203b and the drawing wiping area 211b face the head unit 16 (functional liquid droplet ejection head 53) after passing through the actual drawing area 202 (FIG. 7). (See (e) and (f)). In this case, the drive control of the functional liquid droplet ejection head 53 is performed so that the drawing flushing and the drawing wiping are performed again, and the wiping roller 146 of the drawing wiping unit 131b stands by at the wiping position. Then, after the drawing wiping area 211b passes the drawing position, the drive of the X-axis table 12 is stopped, and the forward movement of the X-axis air slider 32 ends.

  When the X-axis air slider 32 moves backward, an operation flow opposite to that when the X-axis slider moves forward is performed. By using the backward movement of the X-axis air slider 32, drawing wiping and drawing flushing by the drawing wiping unit 131b are performed. The drawing flushing to the unit 91b, the drawing to the workpiece W, the drawing flushing to the drawing flushing unit 91a, and the drawing wiping by the drawing wiping unit 131a are successively performed.

  As described above, in the droplet discharge device 1 of the present embodiment, the pair of drawing wiping units 131, the pair of drawing flushing units 91, and the set table 31 are disposed within the relative movement range of the head unit 16 by main scanning. Therefore, drawing wiping, drawing flushing, and drawing on the workpiece W are performed smoothly and continuously by a series of movements of the set table 31 (head unit 16) in the main scanning.

  The drawing wiping unit 131 (131a) is interposed between the non-drawing flushing unit 92 and the set table 31 in the X-axis direction (main scanning direction). For this reason, even if the nozzle surface 67 of the functional liquid droplet ejection head 53 is contaminated by the non-drawing flushing functional liquid (satellite) performed on the non-drawing flushing unit 92 before the drawing process is started, This can be wiped off by drawing wiping performed immediately before drawing. Accordingly, it is possible to effectively prevent the flying of functional droplets caused by dirt on the nozzle surface 67, maintain the drawing accuracy, and increase the yield.

  In the present embodiment, the drawing wiping unit 131 (wiping roller 146) is arranged in close proximity to the drawing flushing unit 91 and the set table 31, and drawing flushing and drawing are performed while drawing wiping. It is possible to perform drawing flushing and drawing wiping while drawing (see FIGS. 7C and 7E). Thus, by overlapping the drawing wiping and a part of the drawing flushing / drawing, these series of operations can be performed efficiently in a short time. Of course, when the drawing wiping has an adverse effect on the drawing on the workpiece W, the head unit 16 during the drawing wiping is adjusted to the actual drawing area by adjusting the distance between the drawing wiping unit 131 and the drawing flushing unit 91. It is also possible to adopt a configuration in which only the drawing flushing is overlapped in the drawing wiping.

  Further, as described above, drawing on the workpiece W is performed while the set table 31 is moving at a constant speed. Therefore, if the pair of drawing wiping units 131 is arranged corresponding to the acceleration area until the set table 31 reaches the constant speed movement and the deceleration area until the set table 31 stops from the constant speed movement, the set table 31 is provided. The time required for acceleration / deceleration can be efficiently used as the drawing wiping time, and the time required only for drawing wiping can be reduced.

  In the present embodiment, the drawing wiping is performed every time the head unit 16 faces the drawing wiping area 211 and the drawing flushing area 203. However, the execution timing of drawing wiping and drawing flushing is not limited to this. Rather, depending on the type of functional liquid to be introduced into the functional liquid droplet ejection head 53, etc. (whether drawing wiping and drawing flushing are performed at which stage in the main scanning and how often drawing wiping and drawing flushing are performed) (Including setting that only one of them is performed). (The wiping setting means described in the claims is constituted by the control device 5.) In accordance with this setting, the control device 5 drives the unit lifting mechanism 147 of the pair of drawing wiping units 131 and functions droplets. By controlling the ejection drive of the ejection head 53, drawing wiping and drawing flushing can be executed at the set execution timing.

  For example, the drawing wiping is set to be performed only before the drawing starts, and the head unit 16 is drawn once by the drawing wiping unit 131a before the drawing flushing area 203a when the main scanning is moved forward, and is drawn when the main scanning is moved backward. The drawing wiping may be performed once by the drawing wiping unit 131b before facing the flushing region 203b.

  In this case, the control device 5 raises the wiping roller 146 of the drawing wiping unit 131a to the wiping position at the time of forward movement of the main scanning, and causes the functional liquid droplet ejection head 53 of the head unit 16 facing the drawing flushing area a to move. When drawing wiping is performed and drawing wiping is completed, the wiping roller 146 of the drawing wiping unit 131a is lowered. On the other hand, the wiping roller 146 of the drawing wiping unit 131b is kept waiting at the standby position. Similarly, at the time of backward movement, the control device 5 causes the wiping roller 146 of the drawing wiping unit 131a to stand by at the standby position, and the wiping roller 146 of the drawing wiping unit 131b is raised to the wiping position to draw the drawing. After the drawing wiping by the wiping unit 131b is completed, the wiping roller 146 is lowered to the standby position.

  In the present embodiment, a pair (two) of drawing wiping units 131 are provided. However, when the frequency of drawing wiping is low, one (one) of drawing wiping units 131 is used. It is good also as a structure provided only with.

  Next, a droplet discharge device according to a second embodiment will be described. The droplet discharge device of the second embodiment is configured in substantially the same manner as that of the first embodiment, but the arrangement of the pair of drawing wiping units 131 and the pair of drawing flushing units 91 is different.

  Specifically, as shown in FIG. 8A, a pair of drawing wiping units 131 is disposed adjacent to the set table 31 (suction table 34), and outside the pair of drawing wiping units 131. A pair of drawing flushing units 91 is disposed adjacent to the. That is, in the droplet discharge device of the first embodiment, the drawing wiping unit 131 and the drawing flushing unit 91 are replaced.

  Thus, prior to drawing in the actual drawing area 202, the functional liquid droplet ejection head 53 can be efficiently maintained in the order of drawing flushing and drawing wiping. In other words, since the functional liquid contamination adhering to the nozzle surface 67 of the functional liquid droplet ejection head 53 is immediately wiped off by the drawing wiping due to the drawing flushing, it is possible to effectively prevent the drawing on the workpiece W from being adversely affected. However, in this case as well, as in the first embodiment, the execution timing (execution frequency) and execution order of drawing flushing and drawing wiping can be arbitrarily set, and the functional liquid droplet ejection head 53 is arranged in the order of drawing flushing and drawing wiping. Needless to say, maintenance other than maintenance is possible.

  The execution order (execution timing) of drawing flushing and drawing wiping is better depending on the type of functional liquid, and when it is preferable to perform drawing wiping immediately before drawing flushing, If it is preferable to perform drawing wiping immediately after drawing flushing using the droplet discharge device of the first embodiment, the droplet discharge device of the second embodiment may be used depending on the actual situation. Good.

  Further, in order to efficiently deal with drawing flushing and drawing wiping in any execution order, a pair of drawing flushing units 91 are further provided along the wiping roller 146 of the drawing wiping unit 131 of the first embodiment. (Drawing flushing box 101) may be provided, or a pair of drawing wiping units 131 may be provided along the drawing flushing box 101 of the second embodiment (see FIGS. 8B and 8C). .

  As described above, by changing the arrangement of the drawing flushing unit 91 and the drawing wiping unit 131 in accordance with the execution order (execution timing) of drawing flushing and drawing wiping, appropriate maintenance can be efficiently performed. Efficiency can be improved.

  In these cases, it is arbitrary whether the drawing flushing unit 91 and the drawing wiping unit 131 are supported by the set table 31 (suction table 34) or the X-axis air slider 32.

  Next, a third embodiment of the present invention will be described. The droplet discharge device of this embodiment is configured in substantially the same manner as the droplet discharge device of the first embodiment (or second embodiment), but differs in the configuration of the drawing wiping unit 131.

  Specifically, the drawing wiping unit of the present embodiment is configured in the same manner as the non-drawing wiping unit 132 (although the size is different), and includes a cleaning liquid supply unit 151 that supplies a cleaning liquid to the wiping sheet 141. . Therefore, it is possible to perform drawing wiping with the wiping sheet 141 sprayed with the cleaning liquid, and it is possible to reduce wiping residue during drawing wiping.

  However, since it is different for each functional liquid whether it is better to perform drawing wiping with the wiping sheet 141 supplied with the cleaning liquid, the supply timing of the cleaning liquid can be set together with the execution timing of the drawing wiping and the drawing flushing. Is preferred. Thus, not only whether or not the cleaning liquid is supplied at the time of drawing wiping, but also the drawing wiping performed before drawing on the work W is a wiping sheet sprayed with the cleaning liquid. ) Detailed maintenance such as dry wiping becomes possible.

  In the present embodiment, the cleaning liquid supply unit is provided in both of the pair of drawing wiping units 131. However, it is naturally possible to provide the cleaning liquid supply unit only in one of them.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 9 is a flowchart showing a manufacturing process of the color filter, and FIG. 10 is a schematic cross-sectional view of the color filter 600 (filter base body 600A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 602 is formed on a substrate (W) 601 as shown in FIG. The black matrix 602 is formed of metal chromium, a laminate of metal chromium and chromium oxide, or resin black. In order to form the black matrix 602 made of a metal thin film, a sputtering method, a vapor deposition method, or the like can be used. Further, when forming the black matrix 602 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in a bank formation step (S102), a bank 603 is formed in a state of being superimposed on the black matrix 602. That is, first, as shown in FIG. 10B, a resist layer 604 made of a negative transparent photosensitive resin is formed so as to cover the substrate 601 and the black matrix 602. Then, an exposure process is performed with the upper surface covered with a mask film 605 formed in a matrix pattern shape.
Further, as shown in FIG. 10C, the resist layer 604 is patterned by etching an unexposed portion of the resist layer 604 to form a bank 603. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 603 and the black matrix 602 below the bank 603 serve as partition wall portions 607b for partitioning the pixel regions 607a, and the colored layers (film forming portions) 608R, 608G, When forming 608B, the landing area of the functional droplet is defined.

The filter substrate 600A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 603, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 601 is lyophilic (hydrophilic), the droplets into each pixel region 607a surrounded by the bank 603 (partition wall portion 607b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S103), as shown in FIG. 10 (d), functional droplets are ejected by the functional droplet ejection head 53 to enter each pixel region 607a surrounded by the partition wall portion 607b. Let it land. In this case, the functional liquid droplet ejection head 53 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating) to form three colored layers 608R, 608G, and 608B. If the colored layers 608R, 608G, and 608B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 609 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 601 where the colored layers 608R, 608G, and 608B are formed, the protective film 609 is formed through a drying process.
Then, after forming the protective film 609, the color filter 600 proceeds to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 11 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 600 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 620, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 600 is the same as that shown in FIG. 10, the corresponding parts are denoted by the same reference numerals, and the description thereof is omitted.

The liquid crystal device 620 is roughly constituted by a color filter 600, a counter substrate 621 made of a glass substrate, and a liquid crystal layer 622 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them. The filter 600 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are disposed on the outer surfaces of the counter substrate 621 and the color filter 600 (surfaces opposite to the liquid crystal layer 622 side), and the polarizing plates positioned on the counter substrate 621 side are also provided. A backlight is disposed outside.

On the protective film 609 of the color filter 600 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 623 elongated in the left-right direction in FIG. 11 are formed at predetermined intervals. The color of the first electrode 623 A first alignment film 624 is formed so as to cover the surface opposite to the filter 600 side.
On the other hand, a plurality of strip-shaped second electrodes 626 elongated in a direction orthogonal to the first electrode 623 of the color filter 600 are formed on the surface of the counter substrate 621 facing the color filter 600 at a predetermined interval. A second alignment film 627 is formed so as to cover the surface of the two electrodes 626 on the liquid crystal layer 622 side. The first electrode 623 and the second electrode 626 are made of a transparent conductive material such as ITO.

The spacer 628 provided in the liquid crystal layer 622 is a member for keeping the thickness (cell gap) of the liquid crystal layer 622 constant. The sealing material 629 is a member for preventing the liquid crystal composition in the liquid crystal layer 622 from leaking to the outside. Note that one end portion of the first electrode 623 extends to the outside of the sealing material 629 as a lead-out wiring 623a.
A portion where the first electrode 623 and the second electrode 626 intersect with each other is a pixel, and the color layers 608R, 608G, and 608B of the color filter 600 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 623 and application of the first alignment film 624 are performed on the color filter 600 to create a portion on the color filter 600 side. Patterning of the electrode 626 and application of the second alignment film 627 are performed to create a portion on the counter substrate 621 side. Thereafter, a spacer 628 and a sealing material 629 are formed in a portion on the counter substrate 621 side, and the portion on the color filter 600 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 622 is injected from the inlet of the sealing material 629, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, the spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 600 side is bonded to the portion on the counter substrate 621 side, the sealing material The liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 629. In addition, the above-described sealing material 629 can be printed by the functional liquid droplet ejection head 53. Further, the first and second alignment films 624 and 627 can be applied by the functional liquid droplet ejection head 53.

FIG. 12 is a cross-sectional view of a principal part showing a schematic configuration of a second example of the liquid crystal device using the color filter 600 manufactured in the present embodiment.
The liquid crystal device 630 is significantly different from the liquid crystal device 620 in that the color filter 600 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 630 is generally configured by sandwiching a liquid crystal layer 632 made of STN liquid crystal between a color filter 600 and a counter substrate 631 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 631 and the color filter 600, respectively.

On the protective film 609 of the color filter 600 (on the liquid crystal layer 632 side), a plurality of strip-shaped first electrodes 633 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 633 is formed. A first alignment film 634 is formed so as to cover the surface on the layer 632 side.
A plurality of strip-shaped second electrodes 636 extending in a direction orthogonal to the first electrode 633 on the color filter 600 side are formed on the surface of the counter substrate 631 facing the color filter 600 at a predetermined interval. A second alignment film 637 is formed so as to cover the surface of the second electrode 636 on the liquid crystal layer 632 side.

The liquid crystal layer 632 is provided with a spacer 638 for keeping the thickness of the liquid crystal layer 632 constant, and a sealing material 639 for preventing the liquid crystal composition in the liquid crystal layer 632 from leaking to the outside. Yes.
Similarly to the liquid crystal device 620 described above, a portion where the first electrode 633 and the second electrode 636 intersect with each other is a pixel, and the colored layers 608R, 608G, and 608B of the color filter 600 are located in the portion that becomes the pixel. Is configured to do.

FIG. 13 shows a third example in which a liquid crystal device is configured using a color filter 600 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 650, the color filter 600 is arranged on the upper side (observer side) in the drawing.

The liquid crystal device 650 includes a color filter 600, a counter substrate 651 disposed so as to face the color filter 600, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 600. The polarizing plate 655 is generally configured by a polarizing plate 655 and a polarizing plate (not shown) disposed on the lower surface side of the counter substrate 651.
A liquid crystal driving electrode 656 is formed on the surface of the protective film 609 of the color filter 600 (the surface on the counter substrate 651 side). The electrode 656 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 660 described later is formed. An alignment film 657 is provided so as to cover the surface of the electrode 656 opposite to the pixel electrode 660.

  An insulating layer 658 is formed on the surface of the counter substrate 651 facing the color filter 600, and the scanning lines 661 and the signal lines 662 are formed on the insulating layer 658 so as to be orthogonal to each other. A pixel electrode 660 is formed in a region surrounded by the scanning lines 661 and the signal lines 662. Note that in an actual liquid crystal device, an alignment film is provided over the pixel electrode 660, but the illustration is omitted.

  In addition, a thin film transistor 663 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 660 and the scanning line 661 and the signal line 662. . The thin film transistor 663 is turned on / off by application of a signal to the scanning line 661 and the signal line 662 so that energization control to the pixel electrode 660 can be performed.

  The liquid crystal devices 620, 630, and 650 in the above examples have a transmissive configuration, but a reflective layer or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 14 is a cross-sectional view of an essential part of a display region (hereinafter simply referred to as a display device 700) of the organic EL device.

The display device 700 is schematically configured with a circuit element portion 702, a light emitting element portion 703, and a cathode 704 laminated on a substrate (W) 701.
In this display device 700, light emitted from the light emitting element portion 703 to the substrate 701 side is transmitted through the circuit element portion 702 and the substrate 701 and emitted to the observer side, and the light emitting element portion 703 is opposite to the substrate 701. After the light emitted to the side is reflected by the cathode 704, the light passes through the circuit element portion 702 and the substrate 701 and is emitted to the observer side.

  A base protective film 706 made of a silicon oxide film is formed between the circuit element portion 702 and the substrate 701, and an island-like semiconductor film 707 made of polycrystalline silicon is formed on the base protective film 706 (on the light emitting element portion 703 side). Is formed. In the left and right regions of the semiconductor film 707, a source region 707a and a drain region 707b are formed by high concentration cation implantation, respectively. A central portion where no cation is implanted is a channel region 707c.

  In the circuit element portion 702, a transparent gate insulating film 708 covering the base protective film 706 and the semiconductor film 707 is formed, and a position corresponding to the channel region 707c of the semiconductor film 707 on the gate insulating film 708 is formed. For example, a gate electrode 709 made of Al, Mo, Ta, Ti, W or the like is formed. A transparent first interlayer insulating film 711 a and second interlayer insulating film 711 b are formed on the gate electrode 709 and the gate insulating film 708. Further, contact holes 712a and 712b are formed through the first and second interlayer insulating films 711a and 711b and communicating with the source region 707a and the drain region 707b of the semiconductor film 707, respectively.

A transparent pixel electrode 713 made of ITO or the like is patterned and formed on the second interlayer insulating film 711b in a predetermined shape, and the pixel electrode 713 is connected to the source region 707a through the contact hole 712a. .
A power supply line 714 is disposed on the first interlayer insulating film 711a, and the power supply line 714 is connected to the drain region 707b through the contact hole 712b.

  Thus, the driving thin film transistors 715 connected to the pixel electrodes 713 are formed in the circuit element portion 702, respectively.

The light emitting element portion 703 includes a functional layer 717 stacked on each of the plurality of pixel electrodes 713, and a bank portion 718 provided between each pixel electrode 713 and the functional layer 717 to partition each functional layer 717. It is roughly structured.
The pixel electrode 713, the functional layer 717, and the cathode 704 provided on the functional layer 717 constitute a light emitting element. Note that the pixel electrode 713 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 718 is formed between the pixel electrodes 713.

Bank unit 718, for example SiO, and SiO _2, the inorganic bank layer is formed of an inorganic material such as TiO _2, 718a (first bank layer), stacked on the inorganic bank layer 718a, an acrylic resin, such as polyimide resin It is composed of an organic bank layer 718b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank portion 718 is formed on the peripheral edge of the pixel electrode 713.
Between each bank portion 718, an opening 719 that gradually expands upward with respect to the pixel electrode 713 is formed.

The functional layer 717 includes a hole injection / transport layer 717a formed on the pixel electrode 713 in a stacked state in the opening 719 and a light emitting layer 717b formed on the hole injection / transport layer 717a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 717b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 717a has a function of transporting holes from the pixel electrode 713 side and injecting them into the light emitting layer 717b. The hole injection / transport layer 717a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 717b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material insoluble in the hole injection / transport layer 717a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 717b. By using the light emitting layer 717b, the light emitting layer 717b can be formed without re-dissolving the hole injection / transport layer 717a.

  The light emitting layer 717b is configured such that holes injected from the hole injection / transport layer 717a and electrons injected from the cathode 704 are recombined in the light emitting layer to emit light.

  The cathode 704 is formed so as to cover the entire surface of the light emitting element portion 703, and plays a role of flowing current to the functional layer 717 in a pair with the pixel electrode 713. Note that a sealing member (not shown) is disposed on the cathode 704.

Next, a manufacturing process of the display device 700 will be described with reference to FIGS.
As shown in FIG. 15, the display device 700 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 16, an inorganic bank layer 718a is formed on the second interlayer insulating film 711b. The inorganic bank layer 718a is formed by forming an inorganic film at a formation position and then patterning the inorganic film using a photolithography technique or the like. At this time, a part of the inorganic bank layer 718 a is formed so as to overlap with the peripheral edge of the pixel electrode 713.
When the inorganic bank layer 718a is formed, an organic bank layer 718b is formed on the inorganic bank layer 718a as shown in FIG. This organic bank layer 718b is also formed by patterning using a photolithography technique or the like, similarly to the inorganic bank layer 718a.
In this way, the bank portion 718 is formed. Accordingly, an opening 719 that opens upward with respect to the pixel electrode 713 is formed between the bank portions 718. The opening 719 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 718aa of the inorganic bank layer 718a and the electrode surface 713a of the pixel electrode 713. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 713.
In addition, the lyophobic treatment is performed on the wall surface 718s of the organic bank layer 718b and the upper surface 718t of the organic bank layer 718b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 717 is formed using the functional liquid droplet ejection head 53, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functioning liquid droplets from overflowing from the opening 719.

  The display device base 700A is obtained through the above steps. The display device base 700A is placed on the set table 31 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 18, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 53 to each opening 719 that is a pixel region. Discharge inside. After that, as shown in FIG. 19, a drying treatment and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 717a on the pixel electrode (electrode surface 713a) 713.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 717a, a hole injection / transport layer 717a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 717a has a low affinity for the nonpolar solvent, the hole injection / transport layer 717a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 717a. There is a possibility that the injection / transport layer 717a and the light emitting layer 717b cannot be adhered to each other or the light emitting layer 717b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 717a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in forming the light emitting layer or a similar solvent is applied on the hole injection / transport layer 717a, and this is applied. This is done by drying.
By performing such a treatment, the surface of the hole injection / transport layer 717a is easily adapted to the nonpolar solvent, and in the subsequent process, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 717a.

  Then, as shown in FIG. 20, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 20)) is used as a functional droplet. A predetermined amount is driven into the opening 719). The second composition driven into the pixel region spreads on the hole injection / transport layer 717a and fills the opening 719. Even if the second composition deviates from the pixel region and lands on the upper surface 718t of the bank portion 718, the upper composition 718t is subjected to the liquid repellent treatment as described above, and thus the second composition An object is easy to roll into the opening 719.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, and the nonpolar solvent contained in the second composition is evaporated. As shown in FIG. 21, the hole injection / transport layer 717a A light emitting layer 717b is formed thereon. In the case of this figure, a light emitting layer 717b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 53, as shown in FIG. 22, the same steps as in the case of the light emitting layer 717b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 717b corresponding to green (G)) is formed. Note that the order in which the light-emitting layers 717b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 717, that is, the hole injection / transport layer 717 a and the light emitting layer 717 b are formed on the pixel electrode 713. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 23, a cathode 704 (counter electrode) is formed on the entire surface of the light emitting layer 717b and the organic bank layer 718b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 704 is configured, for example, by laminating a calcium layer and an aluminum layer.
On top of the cathode 704, an Al film and an Ag film as electrodes, and a protective layer such as SiO ₂ and SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 704 in this way, the display device 700 is obtained by performing other processing such as sealing processing and wiring processing for sealing the upper portion of the cathode 704 with a sealing member.

Next, FIG. 24 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 800). In the figure, the display device 800 is shown with a part thereof cut away.
The display device 800 includes a first substrate 801, a second substrate 802, and a discharge display portion 803 formed between the first substrate 801 and the second substrate 802, which are disposed to face each other. The discharge display unit 803 includes a plurality of discharge chambers 805. Among the plurality of discharge chambers 805, the three discharge chambers 805 of the red discharge chamber 805R, the green discharge chamber 805G, and the blue discharge chamber 805B are arranged to form one pixel.

Address electrodes 806 are formed in stripes at predetermined intervals on the upper surface of the first substrate 801, and a dielectric layer 807 is formed so as to cover the address electrodes 806 and the upper surface of the first substrate 801. On the dielectric layer 807, partition walls 808 are provided so as to be positioned between the address electrodes 806 and along the address electrodes 806. The partition 808 includes one extending on both sides in the width direction of the address electrode 806 as shown, and one not shown extending in a direction orthogonal to the address electrode 806.
A region partitioned by the partition 808 is a discharge chamber 805.

  A phosphor 809 is disposed in the discharge chamber 805. The phosphor 809 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 809R is located at the bottom of the red discharge chamber 805R, and the green discharge chamber 805G. A green phosphor 809G and a blue phosphor 809B are disposed at the bottom and the blue discharge chamber 805B, respectively.

On the lower surface of the second substrate 802 in the figure, a plurality of display electrodes 811 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 806. A dielectric layer 812 and a protective film 813 made of MgO or the like are formed so as to cover them.
The first substrate 801 and the second substrate 802 are bonded so that the address electrodes 806 and the display electrodes 811 face each other in a state of being orthogonal to each other. The address electrode 806 and the display electrode 811 are connected to an AC power source (not shown).
When the electrodes 806 and 811 are energized, the phosphor 809 emits light in the discharge display portion 803, and color display is possible.

In the present embodiment, the address electrode 806, the display electrode 811, and the phosphor 809 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 806 in the first substrate 801 will be exemplified.
In this case, the following steps are performed with the first substrate 801 placed on the set table 31 of the droplet discharge device 1.
First, the liquid material (functional liquid) containing the conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 53. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 806 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 806 has been exemplified in the above, the display electrode 811 and the phosphor 809 can also be formed through the above steps.
In the case of forming the display electrode 811, as in the case of the address electrode 806, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 809, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional droplet ejection head 53, and corresponding. Land in the color discharge chamber 805.

Next, FIG. 25 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 900). In the figure, a part of the display device 900 is shown as a cross section.
The display device 900 is schematically configured to include a first substrate 901 and a second substrate 902 that are arranged to face each other, and a field emission display portion 903 formed therebetween. The field emission display unit 903 includes a plurality of electron emission units 905 arranged in a matrix.

  A first element electrode 906a and a second element electrode 906b constituting the cathode electrode 906 are formed on the upper surface of the first substrate 901 so as to be orthogonal to each other. In addition, a conductive film 907 having a gap 908 is formed in a portion partitioned by the first element electrode 906a and the second element electrode 906b. In other words, the first element electrode 906a, the second element electrode 906b, and the conductive film 907 constitute a plurality of electron emission portions 905. The conductive film 907 is made of, for example, palladium oxide (PdO), and the gap 908 is formed by forming after forming the conductive film 907.

  An anode electrode 909 facing the cathode electrode 906 is formed on the lower surface of the second substrate 902. A lattice-shaped bank portion 911 is formed on the lower surface of the anode electrode 909, and a phosphor 913 is disposed in each downward opening 912 surrounded by the bank portion 911 so as to correspond to the electron emission portion 905. Yes. The phosphor 913 emits fluorescence of any color of red (R), green (G), and blue (B), and each opening 912 has a red phosphor 913R, a green phosphor 913G, and a blue color. The phosphors 913B are arranged in the predetermined pattern described above.

  The first substrate 901 and the second substrate 902 configured as described above are bonded together with a minute gap. In this display device 900, electrons that jump out of the first element electrode 906 a or the second element electrode 906 b serving as the cathode through the conductive film (gap 908) 907 are formed on the phosphor 913 formed on the anode electrode 909 serving as the anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 906a, the second element electrode 906b, the conductive film 907, and the anode electrode 909 can be formed using the droplet discharge device 1 and each color. The phosphors 913R, 913G, and 913B can be formed using the droplet discharge device 1.

  The first element electrode 906a, the second element electrode 906b, and the conductive film 907 have the planar shape shown in FIG. 26A. When these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 906a, the second element electrode 906b, and the conductive film 907 are previously formed. Next, the first element electrode 906a and the second element electrode 906b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 907 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 907, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 901 and the second substrate 902 and a lyophobic process on the bank portions 911 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is an external perspective view of a droplet discharge device according to an embodiment of the present invention. It is a front view of the droplet discharge device concerning an embodiment of the present invention. It is a top view around a head plate. It is explanatory drawing of a functional droplet discharge head, (a) is the external appearance perspective view, (b) is sectional drawing when a functional droplet discharge head is mounted | worn with a head plate. It is the block diagram explaining the main control system of the droplet discharge apparatus. It is explanatory drawing around an X-axis table. FIG. 5 is a diagram showing a positional relationship between a functional liquid droplet ejection head that changes in a drawing process, a set table, a drawing wiping unit, and a drawing flushing unit. It is explanatory drawing of 2nd Embodiment of this invention, and is the top view which showed the X-axis table periphery. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge device 5 Control apparatus 12 X-axis table 31 Set table 53 Functional droplet discharge head 67 Nozzle surface 83 Wiping unit 101 Drawing flushing box 141 Wiping sheet 145 Wiping unit 146 Wiping roller 147 Unit raising / lowering mechanism 201 Droplet discharging Area 211 Drawing wiping area W Workpiece

Claims (6)

In a liquid droplet ejection apparatus that performs drawing with a functional liquid by driving the functional liquid droplet ejection head while ejecting the functional liquid droplet ejection head relative to the workpiece set on the set table in the main scanning direction.
A main scanning movement table that relatively moves the functional liquid droplet ejection head in the main scanning direction with respect to the workpiece set on the set table;
A wiping unit that faces the functional liquid droplet ejection head and wipes the nozzle surface of the functional liquid droplet ejection head with a wiping sheet ;
A flushing box that is disposed between the set table and the wiping unit and receives waste discharge from the functional droplet discharge head disposed in the droplet discharge region, and
The wiping unit is adjacent to a droplet discharge region in which the set table is disposed in the main scanning direction, and is a relative acceleration / deceleration region of the set table and the functional droplet discharge head by the main scanning movement table. droplet discharge apparatus characterized by being arranged to. 2. The liquid droplet ejection apparatus according to claim 1, wherein a pair of the wiping units are provided so as to sandwich the set table in the main scanning direction. And further comprising a control means for controlling the functional liquid droplet ejection head, the wiping unit, and the main scanning movement table,
The wiping unit has a wiping mechanism for wiping the nozzle surface using the wiping sheet,
The control means drives and controls the main scanning movement table to move the drawing wiping region relative to the functional liquid droplet ejection head, while wiping the functional liquid droplet ejection head with respect to the nozzle surface and discarding. The liquid droplet ejection apparatus according to claim 1 , wherein the ejection and the drawing operation on the workpiece are continuously performed. Further comprising wiping setting means for setting whether or not to perform the wiping operation on the functional liquid droplet ejection head;
The wiping unit further includes an elevating mechanism that supports the wiping mechanism so as to be movable up and down between a wiping position where the wiping sheet is brought into contact with the nozzle surface and a standby position where the wiping sheet is separated from the nozzle surface. Have
The control means performs drive control of the lifting mechanism and raises the wiping mechanism to the wiping position when the wiping setting means is set to perform the wiping operation. Item 4. The droplet discharge device according to Item 3. The main scanning movement table, with respect to the functional liquid droplet ejecting heads, the set table, wherein the wiping unit and the flushing box to one of claims 1 to 4, characterized in that moving in the main scanning direction Droplet discharge device. Method of manufacturing an electro-optical device characterized by claims 1 to using the liquid droplet ejecting apparatus according to any one of 5, to form a film-forming portion by the functional liquid droplet on said workpiece.

Images