JP5578126B2 - LIQUID DISCHARGE DEVICE, LIQUID DISCHARGE DEVICE MANUFACTURING METHOD, AND ACTUATOR DEVICE MANUFACTURING METHOD - Google Patents

Description

  The present invention relates to a liquid ejecting apparatus that ejects liquid, a method for manufacturing the liquid ejecting apparatus, and a method for manufacturing an actuator apparatus that includes a piezoelectric actuator.

  In the ink jet head described in Patent Document 1, a plurality of nozzles, a channel unit in which ink channels such as a plurality of pressure chambers communicating with the plurality of nozzles are formed, and piezoelectric sheets and piezoelectric sheets stacked on each other A plurality of individual electrodes formed to face a plurality of pressure chambers, and a piezoelectric actuator (piezoelectric unit) formed by a common electrode having a piezoelectric sheet sandwiched between the plurality of individual electrodes are stacked on each other. Laminated and bonded. Further, the electrode formed inside the piezoelectric actuator is drawn out to the upper surface of the piezoelectric actuator through a through hole, and is connected to the surface electrode formed on the upper surface of the piezoelectric actuator.

JP 2010-201870 A

  Here, as described in Patent Document 1, when the flow path unit and the piezoelectric actuator are stacked and bonded to each other, for example, the upper surface of the piezoelectric actuator is directed toward the flow path unit by a heater or the like. At this time, the adhesive protrudes from between the flow path unit and the piezoelectric actuator. When the protruding adhesive rises on the upper surface of the piezoelectric layer forming the uppermost layer and reaches the portion where the individual electrodes are formed on the upper surface of the piezoelectric layer, the ink ejection characteristics from the nozzles are reduced. There is a risk of fluctuation.

  When the surface electrode is formed on the piezoelectric layer forming the uppermost layer, the inventor of the present invention projects the flow path unit and the piezoelectric actuator because the surface electrode protrudes from the surface of the piezoelectric layer by the thickness. When adhering, the heater was in close contact with the surface electrode, and it was noticed that the flow of the adhesive rising on the upper surface of the piezoelectric actuator was blocked by the surface electrode in intimate contact with the heater.

  Therefore, the inventor of the present invention has a long surface electrode extending along the edge of the piezoelectric layer between the edge of the piezoelectric layer and the portion facing the individual electrode on the upper surface of the piezoelectric layer forming the uppermost layer. It was considered to prevent the adhesive that has risen on the upper surface of the piezoelectric layer forming the uppermost layer from reaching the portion where the individual electrode is formed.

  However, if such a long surface electrode is formed on the piezoelectric layer that forms the uppermost layer, the heating during the production of the piezoelectric actuator such as when the surface electrode is baked due to the difference in the linear expansion coefficient between the surface electrode and the piezoelectric layer. As a result, the piezoelectric actuator is greatly warped. Therefore, in this case, the warped piezoelectric actuator is extended to a flat state and bonded to the flow path unit, but when the warped piezoelectric actuator is extended to a flat state, a crack is generated in the piezoelectric layer. There is a possibility that the ejection characteristics of the piezoelectric actuator may fluctuate due to the stress applied to the piezoelectric layer when extended to a flat state, resulting in variations in the ejection characteristics of the ink from the nozzles.

  The object of the present invention is to prevent the adhesive that has risen on the surface opposite to the flow path unit or the base material of the piezoelectric actuator from reaching the portion facing the individual electrode, and It is an object of the present invention to provide a liquid ejecting apparatus capable of reducing warpage of a piezoelectric actuator, an actuator apparatus manufacturing apparatus, and a liquid ejecting apparatus with little variation in ejection characteristics of ink from nozzles.

According to a first aspect of the present invention, there is provided a liquid ejecting apparatus, wherein a flow path unit including a plurality of nozzles and a plurality of pressure chambers respectively communicating with the plurality of nozzles is formed, and is opposed to the plurality of pressure chambers. the arranged piezoelectric layer so as to be including piezoelectric body, a piezoelectric member first surface which is opposite to the flow path unit is formed by the piezoelectric layer, wherein the first of said piezoelectric layer Formed on a surface opposite to the surface and extending continuously across the plurality of pressure chambers, and formed on a portion of the first surface of the piezoelectric layer facing the plurality of pressure chambers. A plurality of individual electrodes formed, a lead-out portion for drawing the common electrode to the first surface, and a portion of the first surface located between an edge of the piezoelectric body and the plurality of individual electrodes. cage, piezoelectric which have a plurality of surface electrodes connected to the lead-out portion Comprising a actuator; wherein said channel unit and the piezoelectric actuator, and the facing surface of the piezoelectric body of the channel unit, arranged between the opposed surfaces of said channel unit of the piezoelectric, A surface electrode array formed by bonding a plurality of surface electrodes along the edge of the first surface of the piezoelectric body is bonded by an adhesive extending to a position overlapping with the edge of the piezoelectric body. A plurality of surface electrodes are formed so that a plurality of rows are formed from the first surface toward the center of the first surface, and the positions of gaps formed between the surface electrodes in the adjacent surface electrode rows are shifted from each other. It is characterized by being.
According to a second aspect of the present invention, there is provided a liquid ejection apparatus, wherein a flow path unit including a plurality of nozzles and a plurality of pressure chambers communicating with the plurality of nozzles is formed, and is opposed to the plurality of pressure chambers. A piezoelectric layer including a piezoelectric layer disposed on the side opposite to the flow path unit of the piezoelectric layer, and a surface opposite to the flow path unit by the cover layer. A piezoelectric body having a first surface formed thereon, a common electrode formed on one surface of the piezoelectric layer and continuously extending across the plurality of pressure chambers; and the common electrode of the piezoelectric layer; A plurality of individual electrodes respectively formed on portions of the opposite surface facing the plurality of pressure chambers, a lead-out portion for drawing the common electrode to the first surface, and the piezoelectric material of the first surface In a portion located between the edge and the plurality of individual electrodes A piezoelectric actuator having a plurality of surface electrodes connected to the lead portion, and the flow path unit and the piezoelectric actuator include a surface facing the piezoelectric body of the flow path unit, The piezoelectric body is disposed between the piezoelectric body and the surface facing the flow path unit, and is bonded by an adhesive extending to a position overlapping the edge of the piezoelectric body, and the surface electrode is the first surface of the piezoelectric body. A plurality of surface electrode arrays formed by being provided along the edges of the surface are formed from the edges toward the center of the first surface, and between the surface electrodes in the adjacent surface electrode arrays A plurality of the surface electrodes are formed such that the positions of the gaps formed on the surface are shifted from each other.

According to a third aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus, comprising: a channel unit in which a liquid channel including a plurality of nozzles and a plurality of pressure chambers respectively communicating with the plurality of nozzles is formed; and the plurality of pressures a piezoelectric body containing an arranged piezoelectric layer to the chamber facing the piezoelectric body first surface is formed is a surface opposite to the channel unit by the piezoelectric layer, wherein the piezoelectric layer A common electrode formed on the surface opposite to the first surface and continuously extending across the plurality of pressure chambers, and a portion of the first surface of the piezoelectric layer facing the plurality of pressure chambers a plurality of individual electrodes formed on said common electrode and the lead portion to draw in said first surface, said being formed on the first surface, pressure conductive to have a connection surface electrode on the lead-out portion comprising an actuator, wherein the said channel unit piezoelectric The actuator is disposed between the surface of the flow path unit facing the piezoelectric body and the surface of the piezoelectric body facing the flow path unit, and extends to a position overlapping the edge of the piezoelectric body. A method of manufacturing a liquid ejection device bonded with an agent, wherein a plurality of the surface electrodes are formed on a portion of the first surface located between an edge of the piezoelectric body and the plurality of individual electrodes Applying an adhesive to at least one of the forming step, the surface of the flow path unit facing the piezoelectric body, and the surface of the piezoelectric body facing the flow path unit, and flattening An adhesive step of pressing the first surface toward the flow channel unit with a pressing surface and bonding the flow channel unit and the piezoelectric actuator with an adhesive, and in the surface electrode forming step, The surface electrode is the piezoelectric A plurality of surface electrode rows formed by being provided along the edge of the first surface of the first surface from the edge toward the center of the first surface, and in the adjacent surface electrode row, A plurality of the surface electrodes are formed such that the positions of the gaps formed between the surface electrodes are shifted from each other.
According to a fourth aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus, comprising: a channel unit in which a liquid channel including a plurality of nozzles and a plurality of pressure chambers respectively communicating with the plurality of nozzles is formed; A piezoelectric body including a piezoelectric layer disposed so as to face a chamber and a cover layer laminated on the opposite side of the piezoelectric layer from the flow path unit, wherein the cover layer is opposite to the flow path unit. A piezoelectric body having a first surface formed thereon, a common electrode formed on one surface of the piezoelectric layer, continuously extending across the plurality of pressure chambers, and the piezoelectric layer A plurality of individual electrodes respectively formed on portions of the surface opposite to the common electrode facing the plurality of pressure chambers, a lead-out portion for drawing the common electrode to the first surface, and formed on the first surface A surface electrode connected to the lead portion and And the flow path unit and the piezoelectric actuator are disposed between a surface of the flow path unit facing the piezoelectric body and a surface of the piezoelectric body facing the flow path unit. A method of manufacturing a liquid discharge apparatus bonded by an adhesive extending to a position overlapping with an edge of the piezoelectric body, the edge of the first surface between the edge of the piezoelectric body and the plurality of individual electrodes. A surface electrode forming step of forming a plurality of the surface electrodes in a portion located at a position, a surface facing the piezoelectric body of the flow path unit, and a surface facing the flow path unit of the piezoelectric body at least An adhesive is applied to any one of the surfaces, and the first surface is pressed toward the flow path unit with a flat pressing surface to bond the flow path unit and the piezoelectric actuator with an adhesive. Adhesion process In the surface electrode forming step, a surface electrode array formed by providing a plurality of the surface electrodes along the edge of the first surface of the piezoelectric body is arranged from the edge to the center of the first surface. A plurality of the surface electrodes are formed so that the positions of the gaps formed between the surface electrodes in the adjacent surface electrode rows are shifted from each other.

An actuator device manufacturing method according to an eighth aspect of the present invention is a piezoelectric body including a base material and a piezoelectric layer disposed so as to face the base material, and is a surface opposite to the base material by the piezoelectric layer. A piezoelectric body having a first surface formed thereon, a common electrode formed on a surface opposite to the first surface of the piezoelectric layer, and the common electrode on the first surface of the piezoelectric layer. A plurality of individual electrodes formed so as to sandwich the piezoelectric layer, a lead portion for drawing the common electrode to the first surface, and a surface formed on the first surface and connected to the lead portion comprising a pressure electrostatic actuator for chromatic and electrodes, and between the substrate and the piezoelectric actuator, and the facing surface of the piezoelectric body of the substrate, the surface facing the said substrate of the piezoelectric By an adhesive extending to a position overlapping the edge of the piezoelectric body A method of manufacturing a wearing been actuator device, of the first surface, the portion located between the edge and the plurality of individual electrodes of the piezoelectric, and the surface electrode forming step of forming a plurality of said surface electrode The adhesive is applied to at least one of the surface of the substrate facing the piezoelectric body and the surface of the piezoelectric body facing the substrate, and the flat pressing surface is used to apply the adhesive. A bonding step of pressing the first surface toward the substrate and bonding the substrate and the piezoelectric actuator with an adhesive, wherein in the surface electrode forming step, the surface electrode is formed of the piezoelectric body. A plurality of surface electrode rows formed by being provided along the edge of the first surface are formed in a plurality of rows from the edge toward the center of the first surface, and in the adjacent surface electrode row, Gap formed between surface electrodes Position is to be shifted from each other, and forming a plurality of said surface electrodes.
According to a ninth aspect of the present invention, there is provided a method for manufacturing an actuator device, comprising: a base material; a piezoelectric layer disposed so as to face the base material; and a cover layer laminated on the piezoelectric layer opposite to the base material. A piezoelectric body having a first surface that is opposite to the substrate by the cover layer, a common electrode formed on one surface of the piezoelectric layer, and the piezoelectric body A plurality of individual electrodes formed on the surface of the layer opposite to the common electrode so as to sandwich the piezoelectric layer between the common electrode, and an extraction portion for drawing the common electrode to the first surface; A piezoelectric actuator formed on the first surface and having a surface electrode connected to the lead portion; and the base material and the piezoelectric actuator are opposed to the piezoelectric body of the base material. The piezoelectric body is disposed between the surface facing the substrate. A method of manufacturing an actuator device bonded by an adhesive extending to a position overlapping with an edge portion of the piezoelectric body, wherein the actuator device is positioned between the edge of the piezoelectric body and the plurality of individual electrodes on the first surface. One of at least one of a surface electrode forming step of forming a plurality of the surface electrodes in a portion to be formed, a surface of the base material facing the piezoelectric body, and a surface of the piezoelectric body facing the base material A bonding step of applying an adhesive to the surface of the substrate and pressing the first surface toward the substrate with a flat pressing surface to bond the substrate and the piezoelectric actuator with an adhesive. In the surface electrode forming step, a surface electrode array formed by providing a plurality of the surface electrodes along the edge of the first surface of the piezoelectric body is directed from the edge toward the center of the first surface. Multiple rows are formed and adjacent In said surface electrode array, the position of the gap formed between the surface electrode is to be shifted from each other, and forming a plurality of said surface electrodes.

  According to these inventions, since the surface electrode formed on the first surface of the piezoelectric body protrudes from the first surface by the thickness thereof, a flat press is applied when the flow path unit and the piezoelectric actuator are bonded. When the first surface of the piezoelectric layer is pressed with a surface, the pressing surface is in close contact with the surface electrode. Therefore, a part of the adhesive that protrudes from between the flow path unit and the piezoelectric actuator and rises to the first surface of the piezoelectric body is blocked by the surface electrode in close contact with the pressing surface.

  On the other hand, the adhesive that has not been blocked by the surface electrodes flows into the gaps between the surface electrodes, but between the adjacent surface electrode arrays, the adhesive of the surface electrode arrays orthogonal to the direction from the edge of the piezoelectric body toward the individual electrodes. Since it flows in the column direction, it is difficult to reach a portion overlapping the individual electrode on the first surface.

  From the above, it is possible to prevent the adhesive protruding from between the flow path unit and the piezoelectric actuator from flowing into a portion facing the individual electrode on the first surface.

  Furthermore, since a plurality of surface electrodes are formed so that a plurality of surface electrode rows are formed, compared to a case where a surface electrode in which these surface electrodes are integrated instead of a plurality of surface electrodes is formed, Warpage of the piezoelectric actuator due to heating when manufacturing the piezoelectric actuator can be reduced. Therefore, when the flow path unit and the piezoelectric actuator are bonded, a crack occurs in the piezoelectric layer, or a large stress is applied to the portion of the piezoelectric layer facing the individual electrode, so that the driving characteristics of the piezoelectric actuator, that is, ink from the nozzle It is possible to prevent variations in the discharge characteristics.

According to a fifth aspect of the present invention, there is provided a method of manufacturing a liquid ejection apparatus according to the third or fourth aspect of the present invention, wherein the width of the gap between the adjacent surface electrode rows in the surface electrode formation step is the same. However, a plurality of the surface electrodes are formed so as to be larger than the width of the gap between the surface electrodes in each surface electrode row.

  According to the present invention, the adhesive flowing into the gap between the surface electrodes extends between the surface electrodes constituting each narrow surface electrode array extending in a direction from the edge of the piezoelectric body toward the portion overlapping the individual electrodes. Rather than the gap, it becomes easier to flow into the gap between the wide surface electrode rows extending in the direction perpendicular to the direction from the edge of the piezoelectric body to the portion overlapping the individual electrode. Therefore, it becomes more difficult for the adhesive to reach the portion overlapping the individual electrode on the first surface.

According to a sixth aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to any one of the third to fifth aspects, wherein the plurality of surface electrode arrays are formed in the surface electrode formation step. A plurality of the surface electrodes are formed such that the surface electrodes are arranged at a constant arrangement interval, and the positions of the surface electrodes in the adjacent surface electrode rows are shifted from each other by half the arrangement interval. It is characterized by that.

  According to the present invention, the gap between the surface electrodes constituting a certain surface electrode row and the gap between the surface electrodes constituting the surface electrode row adjacent to the surface electrode row located closest to the gap. Since the distance is uniform, it is difficult for the adhesive to reach the portion overlapping the individual electrode on the surface of the piezoelectric layer opposite to the flow path unit uniformly in any portion of the piezoelectric actuator.

According to a seventh aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to any one of the third to sixth aspects, wherein the piezoelectric body has a surface opposite to the flow path unit. The first layer includes the piezoelectric layer, and the plurality of individual electrodes are formed on the first surface. In the surface electrode formation step, the first surface includes a plurality of the surface electrodes. At the same time, the plurality of individual electrodes are formed.

  According to the present invention, since the surface electrode and the individual electrode can be formed simultaneously, the manufacturing process of the liquid ejection device can be simplified.

  According to the present invention, when the flow path unit and the piezoelectric actuator are bonded, the adhesive protruding from between the flow path unit and the piezoelectric actuator flows into the portion facing the individual electrode on the first surface. Can be prevented. Furthermore, the warp of the piezoelectric actuator due to heating during production can be reduced.

1 is a schematic configuration diagram of a printer according to an embodiment of the present invention. It is a top view of the inkjet head of FIG. It is the elements on larger scale of FIG. It is the IV-IV sectional view taken on the line of FIG. It is process drawing which shows the manufacture procedure of an inkjet head. It is a figure which shows the flow of the adhesive agent which rose up on the upper surface of the piezoelectric layer. FIG. 6 is a view corresponding to FIG. 4 of Modification 1;

  Hereinafter, preferred embodiments of the present invention will be described.

  As shown in FIG. 1, the printer 1 according to the present embodiment includes a carriage 2, an inkjet head 3, a paper transport roller 4, and the like. The carriage 2 reciprocates in the scanning direction along the guide member 5 extending in the scanning direction (left and right direction in FIG. 1). The inkjet head 3 is mounted on the carriage 2 and ejects ink from a plurality of nozzles 15 (see FIG. 2) formed on the lower surface thereof. The paper transport roller 4 transports the recording paper P in a paper feed direction (front direction in FIG. 1) orthogonal to the scanning direction.

  In the printer 1, printing is performed on the recording paper P by ejecting ink from the inkjet head 3 that reciprocates in the scanning direction together with the carriage 2 onto the recording paper P conveyed in the paper feeding direction by the paper conveying roller 4. Do.

  Next, the inkjet head 3 will be described. The ink jet head 3 as a liquid ejection apparatus according to the present invention has a substantially rectangular shape in plan view, and has ink channels such as nozzles 15 and pressure chambers 10 formed therein as shown in FIGS. A flow path unit 21 and a piezoelectric actuator 22 for applying pressure to the ink in the pressure chamber 10 are provided.

  The flow path unit 21 is formed by laminating four substantially rectangular plates 31 to 34. Here, of the four plates 31 to 34, the three plates 31 to 33 except for the plate 34 arranged at the lowermost position are made of a metal material such as stainless steel, and the plate 34 is a synthetic resin material such as polyimide. Consists of. Or the plate 34 may be comprised with the metal material similarly to the plates 31-33.

  The plate 31 is formed with a plurality of pressure chambers 10 having a substantially elliptical planar shape with the scanning direction as the longitudinal direction. The plurality of pressure chambers 10 are arranged in the paper feed direction to form a pressure chamber row 8, and such pressure chamber rows 8 are arranged in four rows in the scanning direction on the plate 31. .

  In the plate 32, substantially circular through holes 12 and 13 are formed in portions facing both ends in the longitudinal direction of the pressure chamber 10, respectively. A manifold channel 11 is formed in the plate 33. The manifold channel 11 extends in four rows in the paper feed direction corresponding to the four pressure chamber rows 8, and faces the substantially right half of the plurality of pressure chambers 10 constituting each pressure chamber row 8. Ink is supplied to the manifold channel 11 from an ink supply port 9 provided at the lower end thereof.

  The plate 33 is formed with a plurality of substantially circular through holes 14 at portions facing the plurality of through holes 13. In the plate 34, a plurality of nozzles 15 are formed at portions facing the plurality of through holes 14.

  In the flow path unit 21, the manifold flow path 11 communicates with the plurality of pressure chambers 10 via the through holes 12, and each pressure chamber 10 is connected to the nozzle 15 via the through holes 13 and 14. Communicate. That is, a plurality of individual ink flow paths are formed in the flow path unit 21 from the outlet of the manifold flow path 11 to the nozzle 15 via the pressure chamber 10.

  The piezoelectric actuator 22 includes a vibration plate 41, a piezoelectric layer 42, a plurality of individual electrodes 43, a common electrode 44, and the like. The diaphragm 41 is made of a piezoelectric material mainly composed of lead zirconate titanate, which is a mixed crystal of lead titanate and lead zirconate, and the flow channel unit is covered with an adhesive 55 so as to cover the plurality of pressure chambers 10. It is adhered to the upper surface of 21. Note that the diaphragm 41 may be made of a material other than the piezoelectric material, unlike the piezoelectric layer 42 described below.

  The piezoelectric layer 42 is made of the same piezoelectric material as that of the vibration plate 41, and is continuously formed on the upper surface of the vibration plate 41 across the plurality of pressure chambers 10. In the present embodiment, the combination of the diaphragm 41 and the piezoelectric layer 42 stacked on each other corresponds to the piezoelectric body according to the present invention. In this piezoelectric body, the piezoelectric layer 42 forms the uppermost layer, and the upper surface 42A of the piezoelectric layer 42 is the surface opposite to the flow path unit 21 of the piezoelectric body. A surface is formed.

  Each of the plurality of individual electrodes 43 has a substantially oval shape that is slightly smaller than the pressure chamber 10, and is formed on a portion of the upper surface of the piezoelectric layer 42 that faces a substantially central portion of the plurality of pressure chambers 10. Yes.

  Further, the end of each individual electrode 43 on the side opposite to the nozzle 15 (the right side in FIG. 2) extends to a portion that does not face the pressure chamber 10, and the tip thereof serves as a connection terminal 43A. A driver IC (not shown) is connected to the connection terminal 43A via a wiring member (not shown), and either the ground potential or the drive potential (for example, about 20V) is connected to the plurality of individual electrodes 43 by the driver IC. It is given selectively.

  The common electrode 44 is formed between the vibration plate 41 and the piezoelectric layer 42 (a surface different from the first surface of the piezoelectric layer 42), and the piezoelectric layer 42 is sandwiched between the plurality of individual electrodes 43, respectively. Yes. Here, the portion sandwiched between the individual electrode 43 and the common electrode 44 of the piezoelectric layer 42 is polarized in the thickness direction. Further, the common electrode 44 extends to the outer side (the edge side of the piezoelectric layer 42) than the region where the plurality of individual electrodes 43 are formed.

  A plurality of surface electrodes 45 are formed on the upper surface 42A of the piezoelectric layer 42 in the vicinity of the four edges 42B to 42E of the piezoelectric layer 42 so as to be positioned between the edges 42B to 42E and the plurality of individual electrodes 43, respectively. Has been. Each of the plurality of surface electrodes 45 is connected to the common electrode 44 through a through hole 46 serving as an extraction portion filled with a conductive material, whereby the common electrode 44 is extracted to the upper surface 42A.

  A plurality of surface electrodes 45 formed in the vicinity of the left and right edges 42B and 42C in FIG. 2 of the piezoelectric layer 42 are respectively arranged in the paper feed direction along the edges 42B and 42C. 47 are formed in three rows. The three surface electrode rows 47 are arranged along the scanning direction (formed from the edges 42B and 42C toward the center of the upper surface 42A of the piezoelectric layer 42).

  Here, each of the three surface electrode rows 47 is formed by arranging the surface electrodes 45 at a constant arrangement interval D in the paper feed direction, and forms the surface electrode rows 47 adjacent to each other. 45 are arranged so as to be shifted by D / 2 in the paper feeding direction. Accordingly, the positions of the gaps 48 between the surface electrodes 45 in the adjacent surface electrode rows 47 are shifted from each other in the paper feeding direction.

  Further, the width of the gap 48 between the surface electrodes 45 in each surface electrode row 47 is W1, and the width of the gap 49 between the adjacent surface electrode rows 47 is larger than the width W1 of the gap 48. It has become.

  A plurality of surface electrodes 45 formed in the vicinity of the upper and lower edges 42D and 42E in FIG. 2 of the piezoelectric layer 42 are respectively arranged in the scanning direction along the edges 42D and 42E. Are formed in three rows. The three surface electrode arrays 50 are arranged along the paper feed direction (formed from the edges 42D and 42E toward the center of the upper surface 42A of the piezoelectric layer 42).

  Here, each of the three surface electrode rows 50 is formed by arranging the surface electrodes 45 at a constant arrangement interval D in the scanning direction, and the surface electrode 45 forming the adjacent surface electrode row 50 is formed. They are arranged with a shift of D / 2 in the scanning direction. Thereby, the positions of the gaps 51 between the surface electrodes 45 in the adjacent surface electrode rows 50 are shifted from each other in the paper feeding direction.

  In addition, the width of the gap 51 between the surface electrodes 45 in each surface electrode row 50 is W1, and the width of the gap 52 between the adjacent surface electrode rows 47 is W2 larger than the width W1 of the gap 51. It has become.

  The plurality of surface electrodes 45 are connected to a driver IC (not shown) via a wiring member (not shown), and the common electrode 44 is always held at the ground potential by the driver IC.

  Here, a method for ejecting ink from the nozzle 15 by driving the piezoelectric actuator 22 will be described. In the inkjet head 3, the plurality of individual electrodes 43 are all held at the ground potential in advance. In order to eject ink from a certain nozzle 15, the potential of the individual electrode 43 corresponding to the nozzle 15 is switched from the ground potential to the driving potential.

  Then, due to the potential difference between the individual electrode 43 to which the drive potential is applied and the ground electrode held at the ground potential, an electric field in the thickness direction is generated in a portion sandwiched between these electrodes of the piezoelectric layer. Since the direction of the electric field is parallel to the polarization direction of the piezoelectric layer 42, this portion of the piezoelectric layer 42 contracts in the horizontal direction perpendicular to the thickness direction and faces the pressure chamber 10 of the piezoelectric layer 42 and the diaphragm 41. The portion is deformed so as to be convex toward the pressure chamber 10. As a result, the volume of the pressure chamber 10 is reduced and the pressure of the ink in the pressure chamber 10 is increased, and the ink is discharged from the nozzle 15 communicating with the pressure chamber 10 due to the increase in the pressure of the ink.

  Next, a method for manufacturing the inkjet head 3 will be described. In order to manufacture the inkjet head 3, first, as shown in FIG. 5A, the flow path unit 21 and the piezoelectric actuator 22 are separately manufactured.

  Here, the piezoelectric actuator 22 laminates and fires two piezoelectric sheets, which are the vibration plate 41 and the piezoelectric layer 42, on which a plurality of individual electrodes 43, a common electrode 44, a plurality of surface electrodes 45, and the like are formed. At this time, a plurality of individual electrodes 43 and a plurality of surface electrodes 45 are simultaneously formed on the upper surface of the piezoelectric sheet to be the piezoelectric layer 42 by printing (surface electrode forming step).

  Here, the individual electrode 43 and the surface electrode formed on the piezoelectric sheet to be the piezoelectric layer 42 slightly protrude from the upper surface 42A by the thickness, but the individual electrode 43 and the surface electrode 45 are simultaneously formed by printing. Since they are formed, the protruding amount of the individual electrode 43 and the surface electrode 45 from the upper surface 42A is substantially the same.

  At this time, in the present embodiment, since a plurality of surface electrodes 45 arranged at intervals are formed in the vicinity of the edges 42B to 42E of the upper surface 42A, a large surface electrode is formed. As compared with the above, when the piezoelectric sheet is fired, the stress applied to the piezoelectric layer 42 is reduced due to the difference in linear expansion coefficient between the piezoelectric layer 42 and the surface electrode 45. Accordingly, warpage of the piezoelectric actuator 22 due to firing can be reduced.

  Next, a thermosetting adhesive 55 is applied to at least one of the upper surface of the flow path unit 21 and the lower surface of the piezoelectric actuator 22. Subsequently, as shown in FIG. 5B, the flow path unit 21 and the piezoelectric actuator 22 are stacked, and the heater 60 is heated while pressing the upper surface 42 </ b> A of the piezoelectric layer 42 downward toward the flow path unit 21. By doing so, the flow path unit 21 and the piezoelectric actuator 22 are bonded by the adhesive 55 (bonding step).

  The heater 60 is made of a metal material or the like, and the lower surface thereof is a flat pressing surface 60A. When the upper surface 42A of the piezoelectric layer 42 is pressed by the pressing surface 60A of the heater 60, the individual electrode 43 slightly protruding from the upper surface 42A. The surface electrode 45 is in close contact with the pressing surface 60 </ b> A of the heater 60.

  At this time, by moving the heater 60 downward, the upper surface 42A may be pressed toward the flow path unit 21 by the pressing surface 60A, or a platform on which the flow path unit 21 and the piezoelectric actuator are installed may be used. The upper surface 42 </ b> A may be pressed toward the flow path unit 21 by the pressing surface 60 </ b> A by moving upward toward the fixed heater 60.

  When the upper surface of the piezoelectric layer 42 is pressed downward toward the flow path unit 21 by the heater 60, the adhesive 55 is interposed between the flow path unit 21 and the piezoelectric actuator 22 as shown in FIG. The protruding adhesive 55 protrudes to the upper surface 42A through the vibration plate 41 and the side surfaces of the piezoelectric layer 42.

  In the present embodiment, as described above, a plurality of surface electrodes 45 are formed in the vicinity of the edges 42 </ b> B to 42 </ b> E of the piezoelectric layer 42, and the plurality of surface electrodes 45 are connected to the pressing surface 60 </ b> A of the heater 60. It is in close contact. Accordingly, a part of the adhesive 55 rising to the upper surface 42A is blocked by the surface electrode 45 that is in close contact with the pressing surface 60A, whereby the adhesive 55 flows into the portion of the upper surface 42A where the individual electrode 43 is formed. Is prevented.

  Further, in the present embodiment, since the plurality of surface electrodes 45 are arranged with gaps 48, 49, 51, and 52, a part of the adhesive 55 is formed between these gaps 48 as shown in FIG. , 49, 51, 52 (in FIG. 6, the adhesive flowing into the gaps 48, 49 is shown). However, in the present embodiment, the adhesive 55 flows from the edges 42B to 42E of the piezoelectric layer 42 toward the portion where the surface electrode 45 is formed in the gaps 48 and 51, but in the gaps 49 and 52, It flows from the edges 42B to 42E of the piezoelectric layer 42 in a direction orthogonal to the direction toward the portion where the surface electrode 45 is formed.

  Therefore, the adhesive 55 flowing through the gaps 48, 49, 51, and 52 hardly reaches the portion of the upper surface 42A where the individual electrode 43 is formed.

  Furthermore, in this embodiment, since the width W2 of the gaps 49 and 52 is larger than the width W1 of the gaps 48 and 51, the adhesive 55 is changed from the narrow gaps 48 and 51 to the wide gaps 49 and 52. However, it is difficult to flow into the narrow gaps 48 and 51 from the wide gaps 49 and 52. Accordingly, the adhesive 55 is less likely to reach the portion of the upper surface 42A where the individual electrode 43 is formed.

  In this embodiment, since the adhesive 55 is prevented from reaching the portion of the upper surface 42A where the individual electrode 43 is formed, the ink ejection characteristics from the nozzles 15 vary. Can be prevented from occurring.

  Further, in the present embodiment, the surface electrodes 45 are arranged at a constant arrangement interval D in each surface electrode row 47, 50, and the surface electrodes 45 are arranged at an arrangement interval D in adjacent surface electrode rows 47, 50. Therefore, each gap 48 in a certain surface electrode row 47, 50 and the gap 48 between adjacent surface electrode rows 47, 50 that are closest to each gap 48 are arranged. All the distances in the arrangement direction of the surface electrodes 45 are D / 2. Therefore, it is possible to uniformly prevent the rising adhesive 55 from reaching the part facing the individual electrode 43 in the entire region of the edges 42B to 42E of the upper surface 42A.

  Further, when the piezoelectric actuator 22 is warped, when the flow path unit 21 and the piezoelectric actuator 22 are bonded, the warped piezoelectric actuator 22 is extended flat and bonded. However, in the present embodiment, as described above, the warpage of the piezoelectric actuator 22 is reduced by forming the plurality of surface electrodes 45.

  Therefore, when the flow path unit 21 and the piezoelectric actuator 22 are bonded, it is possible to prevent a large stress from being applied to the piezoelectric layer 42 by extending the piezoelectric actuator 22 flatly. As a result, cracks in the piezoelectric layer 42 and variations in the drive characteristics of the piezoelectric actuator 22, that is, the ink ejection characteristics from the nozzles 15, can be prevented.

  Next, modified examples in which various changes are made to the present embodiment will be described. However, description of components having the same configuration as in this embodiment will be omitted as appropriate.

  In the above-described embodiment, the surface electrodes 45 constituting the surface electrode rows 47 and 50 are arranged at a constant arrangement interval D, and in the adjacent surface electrode rows 47 and 50, the surface electrodes 45 are Although it has shifted by D / 2 in the arrangement direction, it is not limited to this.

  In other words, the arrangement interval of the surface electrodes 45 in each of the surface electrode rows 47 and 50 may not be constant, and in the adjacent surface electrode rows 47 and 50, the surface electrodes 45 are different from the half of the arrangement interval. It may be shifted by the length.

  In the above-described embodiment, the width W2 of the gaps 49 and 52 between the adjacent surface electrode rows 47 and 50 is equal to the width W1 of the gaps 48 and 51 between the surface electrodes 45 in each surface electrode row 47 and 50. However, the size relationship between the widths of the gaps 48 and 51 and the widths of the gaps 49 and 52 is not limited to this. For example, the width W1 of the gaps 48 and 51 and the width W2 of the gaps 49 and 52 are not limited thereto. And may be almost the same.

  Further, the widths of the plurality of gaps 48 and 51 are not limited to be the same, and the widths of the plurality of gaps 48 and 51 may be different from each other. Similarly, the widths of the plurality of gaps 49 and 52 are not limited to be the same, and the widths of the plurality of gaps 49 and 52 may be different from each other.

  In the above-described embodiment, three surface electrode rows 47 and 50 are arranged in the vicinity of the edges 42B to 42E of the piezoelectric layer 42. However, in the vicinity of the edges 42B to 42E of the piezoelectric layer 42, Each of the surface electrode rows 47 and 50 may be arranged in two rows or four or more rows.

  Further, in the above-described embodiment, the plurality of surface electrodes 45 are formed in the portions between the four edges 42B to 42E of the piezoelectric layer 42 and the plurality of individual electrodes 43. For example, the edge 42B , 42C and the plurality of individual electrodes 43, the surface electrode 45 may be formed only between some of the four edges 42B to 42E and the plurality of individual electrodes 43.

  In the above-described embodiment, the individual electrode 43 and the surface electrode 45 are simultaneously formed on the upper surface 42A by printing, whereby the individual electrode 43 and the surface electrode 45 protrude from the upper surface 42A to the same extent. However, it is not limited to this.

  For example, the individual electrode 43 and the surface electrode 45 may be formed in separate steps. Further, in this case, the surface electrode 45 may be formed so as to protrude larger than the individual electrode 43 from the upper surface 42A. Even in this case, since the pressing surface 60A of the heater 60 and the surface electrode 45 are in close contact with each other, the adhesive 55 protruding from between the flow path unit 21 and the piezoelectric actuator 22 is formed on the upper surface 42A as in the above-described embodiment. It is possible to prevent reaching the portion facing the individual electrode 43.

  In the above-described embodiment, the upper surface of the piezoelectric layer 42 sandwiched between the individual electrode 43 and the common electrode 44 is the upper surface 42A, but is not limited thereto. In one modified example (modified example 1), as shown in FIG. 7, a cover layer 71 made of the same piezoelectric material as the piezoelectric layer 42 is further formed on the upper surface of the piezoelectric layer 42, and the upper surface 71A of the cover layer 71 is This is the first aspect of the present invention.

  In Modification 1, the combination of the diaphragm 41, the piezoelectric layer 42, and the cover layer 71 corresponds to the piezoelectric body according to the present invention. The cover layer 71 may be made of a material other than the piezoelectric material.

  In addition, the upper surface 71A overlaps with a portion overlapping the position (see FIGS. 2 and 3) where the surface electrode 45 is formed in the above-described embodiment in plan view, that is, on the edge 71B of the cover layer 71 and the individual electrode 43. A plurality of surface electrodes 72 are formed in a portion between the opposing portions. An individual surface electrode 73 is formed on the upper surface 71 </ b> A at a portion facing the individual electrode 43.

  The plurality of surface electrodes 72 are respectively connected to the common electrode 44 through through holes 74 filled with a conductive material formed in the piezoelectric layer 42 and the cover layer 71, and the individual surface electrodes 73 are connected to the cover layer 71. Are connected to corresponding individual electrodes 43 through through holes 75 filled with a conductive material.

  Even in this case, the warpage of the piezoelectric actuator 22 at the time of firing can be reduced as in the above-described embodiment, and when the flow path unit 21 and the piezoelectric actuator 22 are bonded, the bonding that protrudes between them can be achieved. It is possible to prevent the agent 55 from reaching a portion of the cover layer 71 on the upper surface 71 </ b> A facing the individual electrode 43 and the individual surface electrode 73.

  In the above-described embodiment, the piezoelectric actuator 22 includes only one piezoelectric layer 42 sandwiched between the individual electrode 43 and the common electrode 44. However, the piezoelectric actuator 22 is stacked on each other. In addition, each may include a plurality of piezoelectric layers 42 sandwiched between the individual electrode 43 and the common electrode 44.

  However, in this case, in order to draw out the individual electrodes 43 formed on the piezoelectric layer 42 other than the uppermost piezoelectric layer 42, for example, the common electrode 44 is formed so as to avoid a portion facing the connection terminal 43A. There is a need to.

  In the above-described embodiment, the piezoelectric actuator is manufactured by firing the piezoelectric sheets stacked on each other. However, the piezoelectric actuator may be manufactured by another method that involves heating. Even in this case, similarly to the above-described embodiment, the stress applied to the piezoelectric layer 42 is reduced by the difference in the linear expansion coefficient between the piezoelectric layer 42 and the surface electrode 45 due to the heating at the time of manufacturing the piezoelectric actuator. Accordingly, it is possible to reduce warpage due to heating when the piezoelectric actuator 22 is manufactured.

  In the above description, the inkjet head for ejecting ink from the nozzle and the example in which the present invention is applied to the manufacture thereof have been described. It is also possible to apply. Furthermore, the present invention can also be applied to the manufacture of an apparatus (actuator apparatus) other than the liquid ejection apparatus in which the piezoelectric actuator is bonded to a substrate other than the flow path unit.

DESCRIPTION OF SYMBOLS 3 Inkjet head 10 Pressure chamber 15 Nozzle 21 Flow path unit 22 Piezoelectric actuator 41 Diaphragm 42 Piezoelectric layer 42A Upper surface 42B-42E Edge 43 Individual electrode 44 Common electrode 45 Surface electrode 46 Through hole 47, 50 Surface electrode row 48, 49, 51 52 gap 71 cover layer 71A upper surface 72 surface electrode 74 through hole

Claims (9)

A flow path unit in which a liquid flow path including a plurality of nozzles and a plurality of pressure chambers respectively communicating with the plurality of nozzles is formed;
It said plurality of A arranged piezoelectric layers including a piezoelectric body so as to face the pressure chamber, the piezoelectric member first surface which is opposite to the channel unit by the piezoelectric layer is formed, A common electrode formed on a surface opposite to the first surface of the piezoelectric layer and continuously extending over the plurality of pressure chambers; and the plurality of pressure chambers on the first surface of the piezoelectric layer. Between the plurality of individual electrodes respectively formed on portions facing each other, a lead-out portion for drawing out the common electrode to the first surface, and between the edge of the piezoelectric body and the plurality of individual electrodes on the first surface It is formed in a portion located, and a piezoelectric actuator which have a plurality of surface electrodes connected to the lead-out portion,
The flow path unit and the piezoelectric actuator are disposed between a surface of the flow path unit facing the piezoelectric body and a surface of the piezoelectric body facing the flow path unit, and an edge portion of the piezoelectric body It is bonded by an adhesive that extends to the position where it overlaps with
A plurality of surface electrode rows formed by providing a plurality of the surface electrodes along the edge of the first surface of the piezoelectric body are formed in a plurality of rows from the edge toward the center of the first surface, and adjacent to each other. A plurality of the surface electrodes are formed such that the positions of the gaps formed between the surface electrodes in the surface electrode row are shifted from each other.   A flow path unit in which a liquid flow path including a plurality of nozzles and a plurality of pressure chambers respectively communicating with the plurality of nozzles is formed;
  A piezoelectric body comprising: a piezoelectric layer disposed to face the plurality of pressure chambers; and a cover layer laminated on the opposite side of the piezoelectric layer from the flow path unit, wherein the flow path is formed by the cover layer. A piezoelectric body having a first surface that is the surface opposite to the unit; a common electrode that is formed on one surface of the piezoelectric layer and continuously extends across the plurality of pressure chambers; A plurality of individual electrodes respectively formed on portions of the surface of the piezoelectric layer opposite to the common electrodes facing the plurality of pressure chambers; a lead-out portion for drawing the common electrode to the first surface; and the first A piezoelectric actuator having a plurality of surface electrodes formed on a surface of the piezoelectric body and a portion located between the plurality of individual electrodes and connected to the lead portion;
  The flow path unit and the piezoelectric actuator are disposed between a surface of the flow path unit facing the piezoelectric body and a surface of the piezoelectric body facing the flow path unit, and an edge portion of the piezoelectric body It is bonded by an adhesive that extends to the position where it overlaps with
  A plurality of surface electrode rows formed by providing a plurality of the surface electrodes along the edge of the first surface of the piezoelectric body are formed in a plurality of rows from the edge toward the center of the first surface, and adjacent to each other. A plurality of the surface electrodes are formed such that the positions of the gaps formed between the surface electrodes in the surface electrode row are shifted from each other. A flow path unit in which a liquid flow path including a plurality of nozzles and a plurality of pressure chambers respectively communicating with the plurality of nozzles is formed;
A piezoelectric body including a piezoelectric layer disposed so as to face the plurality of pressure chambers , wherein the piezoelectric layer has a first surface which is a surface opposite to the flow path unit; A plurality of pressure chambers formed on a surface opposite to the first surface of the piezoelectric layer and continuously extending across the plurality of pressure chambers; and the plurality of pressure chambers on the first surface of the piezoelectric layer. A plurality of individual electrodes respectively formed on portions facing each other, a lead portion for drawing the common electrode to the first surface, and a surface electrode formed on the first surface and connected to the lead portion comprising a pressure electrostatic actuator for chromatic and, between the channel unit and the piezoelectric actuator, and the facing surface of the piezoelectric body of the channel unit, the opposing surface of said channel unit of the piezoelectric To the position where it overlaps the edge of the piezoelectric body. The method of manufacturing a liquid discharge apparatus that is adhered by adhesive extending,
A surface electrode forming step of forming a plurality of the surface electrodes in a portion of the first surface located between an edge of the piezoelectric body and the plurality of individual electrodes;
Apply adhesive to at least one of the surface of the flow path unit facing the piezoelectric body and the surface of the piezoelectric body facing the flow path unit, and use a flat pressing surface. An adhesive step of pressing the first surface toward the flow path unit and bonding the flow path unit and the piezoelectric actuator with an adhesive; and
In the surface electrode forming step, a plurality of surface electrode arrays formed by providing a plurality of the surface electrodes along the edge of the first surface of the piezoelectric body are formed from the edge toward the center of the first surface. A plurality of the surface electrodes are formed such that the positions of gaps formed between the surface electrodes in the adjacent surface electrode rows formed in a row are shifted from each other. Method.   A flow path unit in which a liquid flow path including a plurality of nozzles and a plurality of pressure chambers respectively communicating with the plurality of nozzles is formed;
  A piezoelectric body comprising: a piezoelectric layer disposed to face the plurality of pressure chambers; and a cover layer laminated on the opposite side of the piezoelectric layer from the flow path unit, wherein the flow path is formed by the cover layer. A piezoelectric body having a first surface that is the surface opposite to the unit; a common electrode that is formed on one surface of the piezoelectric layer and continuously extends across the plurality of pressure chambers; A plurality of individual electrodes respectively formed on portions of the surface of the piezoelectric layer opposite to the common electrodes facing the plurality of pressure chambers; a lead-out portion for drawing the common electrode to the first surface; and the first A piezoelectric actuator having a surface electrode connected to the lead portion, and the flow path unit and the piezoelectric actuator are opposed to the piezoelectric body of the flow path unit. The flow passage unit of the piezoelectric body Is disposed between the facing surfaces of the Tsu bets, a process for the preparation of the adhesive liquid ejecting apparatus by an adhesive which extends to a position overlapping the edge of the piezoelectric body,
  A surface electrode forming step of forming a plurality of the surface electrodes in a portion of the first surface located between an edge of the piezoelectric body and the plurality of individual electrodes;
  Apply adhesive to at least one of the surface of the flow path unit facing the piezoelectric body and the surface of the piezoelectric body facing the flow path unit, and use a flat pressing surface. An adhesive step of pressing the first surface toward the flow path unit and bonding the flow path unit and the piezoelectric actuator with an adhesive; and
  In the surface electrode forming step, a plurality of surface electrode arrays formed by providing a plurality of the surface electrodes along the edge of the first surface of the piezoelectric body are formed from the edge toward the center of the first surface. A plurality of the surface electrodes are formed such that the positions of gaps formed between the surface electrodes in the adjacent surface electrode rows formed in a row are shifted from each other. Method. In the surface electrode forming step, the plurality of surface electrodes are formed such that a width of a gap between adjacent surface electrode rows is larger than a width of a gap between the surface electrodes in each surface electrode row. The method for manufacturing a liquid ejection device according to claim 3 or 4 , wherein: In the surface electrode forming step, the surface electrodes constituting the plurality of surface electrode rows are arranged at a constant arrangement interval, and the position of the surface electrode in the adjacent surface electrode row is half of the arrangement interval. The method of manufacturing a liquid ejection device according to claim 3, wherein the plurality of surface electrodes are formed so as to be shifted from each other by a length. The piezoelectric body includes the piezoelectric layer in which a surface opposite to the flow path unit is the first surface,
The plurality of individual electrodes are formed on the first surface,
The liquid ejection apparatus according to claim 3 , wherein in the surface electrode formation step, the plurality of individual electrodes are formed simultaneously with the plurality of surface electrodes on the first surface. Method. A substrate;
A piezoelectric body including a piezoelectric layer disposed to face the base material, wherein the piezoelectric layer has a first surface that is a surface opposite to the base material formed by the piezoelectric layer, and the piezoelectric layer A common electrode formed on the surface opposite to the first surface, and a plurality of individual electrodes formed on the first surface of the piezoelectric layer so as to sandwich the piezoelectric layer between the common electrode and , a lead-out portion to draw the common electrode on the first surface, the is formed on the first surface, and a pressure electrostatic actuator to have a connection surface electrode on the lead-out portion, and the substrate The piezoelectric actuator is disposed between the surface of the base material facing the piezoelectric body and the surface of the piezoelectric body facing the base material, and extends to a position overlapping the edge of the piezoelectric body A manufacturing method of an actuator device bonded by an agent ,
A surface electrode forming step of forming a plurality of the surface electrodes in a portion of the first surface located between an edge of the piezoelectric body and the plurality of individual electrodes;
An adhesive is applied to at least one of the surface of the base material facing the piezoelectric body and the surface of the piezoelectric body facing the base material, and the flat pressing surface An adhesive step in which one surface is pressed toward the base material, and the base material and the piezoelectric actuator are adhered with an adhesive, and
In the surface electrode forming step, a plurality of surface electrode arrays formed by providing a plurality of the surface electrodes along the edge of the first surface of the piezoelectric body toward the center of the first surface from the edge. A method of manufacturing an actuator device, wherein a plurality of surface electrodes are formed such that the positions of gaps formed between the surface electrodes in the adjacent surface electrode rows formed in a row are shifted from each other. .   A substrate;
  A piezoelectric body including a piezoelectric layer disposed to face the base material and a cover layer laminated on the opposite side of the piezoelectric layer to the base material, the piezoelectric layer being opposite to the base material by the cover layer A piezoelectric body having a first surface formed thereon, a common electrode formed on one surface of the piezoelectric layer, and the common electrode on a surface opposite to the common electrode of the piezoelectric layer. A plurality of individual electrodes formed so as to sandwich the piezoelectric layer, a lead portion for drawing the common electrode to the first surface, and a surface formed on the first surface and connected to the lead portion A piezoelectric actuator having an electrode, wherein the substrate and the piezoelectric actuator are disposed between a surface of the substrate facing the piezoelectric body and a surface of the piezoelectric body facing the substrate. , Contact with an adhesive extending to a position overlapping the edge of the piezoelectric body A method of manufacturing a is an actuator device,
  A surface electrode forming step of forming a plurality of the surface electrodes in a portion of the first surface located between an edge of the piezoelectric body and the plurality of individual electrodes;
  An adhesive is applied to at least one of the surface of the base material facing the piezoelectric body and the surface of the piezoelectric body facing the base material, and the flat pressing surface An adhesive step in which one surface is pressed toward the base material, and the base material and the piezoelectric actuator are adhered with an adhesive, and
  In the surface electrode forming step, a plurality of surface electrode arrays formed by providing a plurality of the surface electrodes along the edge of the first surface of the piezoelectric body toward the center of the first surface from the edge. A method of manufacturing an actuator device, wherein a plurality of surface electrodes are formed such that the positions of gaps formed between the surface electrodes in the adjacent surface electrode rows formed in a row are shifted from each other. .

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