JP5605284B2 - Method for manufacturing liquid ejection device and method for manufacturing piezoelectric actuator device - Google Patents

Method for manufacturing liquid ejection device and method for manufacturing piezoelectric actuator device Download PDF

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JP5605284B2
JP5605284B2 JP2011074967A JP2011074967A JP5605284B2 JP 5605284 B2 JP5605284 B2 JP 5605284B2 JP 2011074967 A JP2011074967 A JP 2011074967A JP 2011074967 A JP2011074967 A JP 2011074967A JP 5605284 B2 JP5605284 B2 JP 5605284B2
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piezoelectric layer
piezoelectric
edge
flow path
actuator
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JP2012206441A (en
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圭司 蔵
大樹 田中
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ブラザー工業株式会社
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The present invention relates to a method for manufacturing a liquid ejecting apparatus that ejects a liquid, and relates to the production how the actuator device including a piezoelectric actuator.
  In the ink jet head described in Patent Document 1, a plurality of nozzles, a channel unit in which ink channels such as a plurality of pressure chambers communicating with the plurality of nozzles are formed, and piezoelectric sheets and piezoelectric sheets stacked on each other A plurality of individual electrodes formed to face a plurality of pressure chambers, and a piezoelectric actuator (piezoelectric unit) formed by a common electrode having a piezoelectric sheet sandwiched between the plurality of individual electrodes are stacked on each other. It is glued.
JP 2010-201870 A
  Here, as described in Patent Document 1, when the flow path unit and the piezoelectric actuator are stacked and bonded to each other, for example, the upper surface of the piezoelectric actuator is directed toward the flow path unit by a heater or the like. At this time, the adhesive protrudes from between the flow path unit and the piezoelectric actuator and rises toward the upper surface of the piezoelectric actuator.
  On the other hand, the individual electrodes and the like formed on the upper surface of the piezoelectric actuator slightly protrude from the upper surface of the piezoelectric actuator by the thickness of the individual electrode, so that there is a slight amount corresponding to the thickness of the individual electrode between the heater and the piezoelectric actuator. There is a gap.
  Therefore, the rising adhesive flows into the upper surface of the piezoelectric actuator from this gap, and when the flowing adhesive reaches the portion where the electrode on the upper surface of the piezoelectric actuator is formed, the ink from the nozzle There is a risk that the ejection characteristics will fluctuate.
  Therefore, the inventor of the present invention, for example, in order to prevent the raised adhesive from flowing into the upper surface of the piezoelectric actuator, for example, the heater is formed of an elastic material such as rubber at a portion forming the pressing surface. For example, it is considered that the portion forming the pressing surface has elasticity, and the upper surface of the piezoelectric actuator is pressed by a heater arranged so that the pressing surface protrudes from the edge of the piezoelectric actuator.
  According to this, when the piezoelectric actuator is pressed by the heater, the portion forming the pressing surface of the heater is elastically deformed following the shape of the piezoelectric actuator, and the gap between the heater and the edge of the piezoelectric actuator is filled, The adhesive that protrudes from between the flow path unit and the piezoelectric actuator can be prevented from flowing into the upper surface of the piezoelectric actuator.
  However, when the portion forming the pressing surface has elasticity and the piezoelectric actuator is pressed by a heater arranged so that the pressing surface protrudes from the edge of the piezoelectric actuator, the piezoelectric material of the elastically deformed heater is used. The portion that protrudes from the edge of the actuator contacts the edge of the piezoelectric actuator from the side. Therefore, a force in the surface direction is applied to the edge of the piezoelectric actuator by the protruding portion of the heater. As a result, the force in the surface direction is transmitted to the portion facing the individual electrode near the edge of the piezoelectric actuator, resulting in variations in the drive characteristics of the piezoelectric actuator, and variations in the ink ejection characteristics between the nozzles. There is a fear.
An object of the present invention is to provide a liquid discharge capable of preventing variations in liquid discharge characteristics between nozzles while preventing the rising adhesive from flowing into the surface of the piezoelectric actuator opposite to the flow path unit. a method of manufacturing a device, and, while preventing the adhesive came up bidding flows into the opposite side of the base material of the piezoelectric actuator, producing how the actuator device capable of preventing variation in driving characteristics Is to provide.
According to a first aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus, comprising: a plurality of nozzles; a channel unit in which a liquid channel including a plurality of pressure chambers communicating with the plurality of nozzles is formed; and the plurality of pressures A piezoelectric layer disposed so as to face the chamber, and a plurality of individual electrodes respectively formed on a portion of the surface opposite to the flow path unit of the piezoelectric layer facing each pressure chamber, And a piezoelectric actuator bonded to the flow path unit with an adhesive, wherein the piezoelectric actuator includes an edge of the piezoelectric layer and the edge of the plurality of individual electrodes. A recess forming step of forming a recess opened on a surface opposite to the flow path unit of the piezoelectric layer in a portion located between the adjacent electrodes having the closest distance; and after the recess forming step, Hold space And a bonding step of bonding by an adhesive and said piezoelectric actuator and said flow path unit in a state, in the bonding step, at least part forming the pressing surface is elastic, the pressing surface the piezoelectric layer The surface of the piezoelectric layer opposite to the flow path unit is pressed toward the flow path unit by a pressing member disposed on the surface of the piezoelectric layer opposite to the flow path unit so as to protrude from the edge of the piezoelectric layer. It is characterized by doing.
According to a ninth aspect of the present invention, there is provided a manufacturing method of an actuator device comprising: a base material; a piezoelectric layer disposed so as to face the base material; and a plurality of piezoelectric layers formed on a surface of the piezoelectric layer opposite to the base material. of having individual electrodes, a manufacturing method of an actuator device provided with a piezoelectric actuator which is against wear to the substrate, the piezoelectric actuator, and the edge of the piezoelectric layer, of the plurality of individual electrodes A recess forming step of forming a recess opened in a surface opposite to the base material of the piezoelectric layer in a portion located between the adjacent electrodes having the closest distance to the edge, and after the recess forming step, A bonding step of bonding the base material and the piezoelectric actuator with an adhesive in a state where a space is held in the concave portion, and in the bonding step, at least a portion forming the pressing surface has elasticity, Push With the pressing member disposed on the surface of the piezoelectric layer opposite to the base so that the surface protrudes from the edge of the piezoelectric layer, the surface of the piezoelectric layer opposite to the base is directed toward the base And pressing.
  According to these inventions, when the flow path unit (base material) and the piezoelectric actuator are bonded, at least the portion that forms the pressing surface has elasticity, and the piezoelectric layer is protruded from the edge of the piezoelectric layer. When the surface of the piezoelectric layer opposite to the flow path unit (base material) is pressed toward the flow path unit (base material) by the pressing member disposed on the surface opposite to the flow path unit (base material), Since the portion of the pressing member made of an elastic material is elastically deformed and closely adheres to the edge of the piezoelectric layer following the piezoelectric layer, there is no gap between the edge of the piezoelectric layer and the pressing member, and the flow path unit (base material) It is possible to prevent the adhesive that protrudes from between the piezoelectric actuator and the piezoelectric actuator from flowing into the surface of the piezoelectric layer opposite to the flow path unit.
Furthermore, in the present invention, before pressing the surface of the piezoelectric layer opposite to the flow path unit (base material) by the pressing member, the piezoelectric actuator has a portion located between the edge of the piezoelectric layer and the proximity electrode. A concave portion having an opening on the opposite side to the flow path unit (base material) of the piezoelectric layer is formed , and the bonding process is performed with the space held in the concave portion. It is difficult for the force in the surface direction applied to the edge of the layer to be transmitted to the portion of the piezoelectric layer where the proximity electrode is formed. Therefore, it is possible to prevent variations in the discharge characteristics of the liquid from the plurality of nozzles (driving characteristics of the piezoelectric actuator).
According to a second aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus , further comprising a filling step of filling the concave portion with a filler after the bonding step . It is characterized by.
  According to the present invention, it is possible to prevent the piezoelectric layer from being cracked by filling the recess with the filler.
According to a third aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to the first aspect , wherein the piezoelectric actuator is formed on a surface of the piezoelectric layer on the flow path unit side, A common electrode facing the plurality of individual electrodes and extending to a position between an edge of the piezoelectric layer and the proximity electrode is further provided, and the piezoelectric layer penetrates in the thickness direction in the recess forming step. And forming the recess whose end on the flow channel unit side is closed by the common electrode, and in the bonding step, the common electrode is exposed through the recess and the flow channel unit. The piezoelectric actuator may further include a filling step of bonding the piezoelectric actuator with an adhesive and filling the concave portion with a filler after the bonding step .
Method of manufacturing an actuator device according to the tenth invention is the manufacturing method of the actuator device according to the ninth invention, the piezoelectric actuator, the is formed on a surface of the substrate side of the piezoelectric layer, wherein the plurality of A common electrode facing the individual electrode and extending to a position between the edge of the piezoelectric layer and the proximity electrode is further provided, and penetrates the piezoelectric layer in the thickness direction in the recess forming step . In addition, the concave portion whose end on the base material side is blocked by the common electrode is formed, and in the bonding step, the base electrode and the piezoelectric actuator are formed in a state where the common electrode is exposed through the concave portion. It is characterized by further comprising a filling step of bonding with an adhesive and filling the concave portion with a filler after the bonding step .
According to a fourth aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to the second or third aspect of the present invention, wherein the recess is filled with a conductive material as the filler in the filling step. The common electrode is drawn out to the surface of the piezoelectric layer opposite to the flow path unit. According to the present invention, the internal electrode is drawn out to the surface opposite to the channel unit of the piezoelectric layer by the conductive material filled in the recess having a larger area than that of a normal through hole. Is unlikely to occur.
According to a fifth aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to the fourth aspect of the present invention, wherein the filling step includes filling the concave portion with a conductive material at the same time as the plurality. The individual electrodes are formed.
  According to the present invention, since the individual electrodes can be formed simultaneously with the filling of the filler, the manufacturing process of the liquid ejection device is simplified.
According to a sixth aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to any one of the first to fifth aspects, wherein the plurality of pressure chambers and the plurality of individual electrodes are the piezoelectric layer. Are arranged along the edge of the piezoelectric layer, so that a plurality of the proximity electrodes are arranged along the edge of the piezoelectric layer. The concave portion extending along the edge of the piezoelectric layer is formed in a portion located between the adjacent electrodes.
  According to the present invention, when the plurality of individual electrodes are arranged along the edge of the piezoelectric layer, when the proximity electrode is arranged along the edge of the piezoelectric layer, the flow path unit and the piezoelectric actuator are When bonding, it is possible to make it difficult to transmit the force in the surface direction applied to the edge of the piezoelectric layer by the pressing member to a portion of the piezoelectric layer facing the plurality of adjacent electrodes.
According to a seventh aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to any one of the first to fifth aspects, wherein the plurality of pressure chambers and the plurality of individual electrodes are the piezoelectric layer. Are arranged along the edge of the piezoelectric layer, so that a plurality of the proximity electrodes are arranged along the edge of the piezoelectric layer. A plurality of the concave portions arranged along the edge of the piezoelectric layer is formed in a portion located between the adjacent electrodes.
  According to the present invention, when the plurality of individual electrodes are arranged along the edge of the piezoelectric layer, when the plurality of adjacent electrodes are arranged along the edge of the piezoelectric layer, the flow path unit and the piezoelectric actuator are The piezoelectric actuator is formed by forming a recess while making it difficult to transmit the force in the plane direction applied to the edge of the piezoelectric layer by the pressing member to the edge of the piezoelectric layer when bonding. A decrease in rigidity can be suppressed.
According to an eighth aspect of the present invention, there is provided a method of manufacturing a liquid ejection device according to the seventh aspect of the present invention, wherein in the recess formation step, each proximity electrode and the corresponding recess correspond to the piezoelectric layer. The recesses are individually formed for a plurality of the proximity electrodes so as to be aligned in a direction perpendicular to the edges of the adjacent electrodes.
  According to the present invention, when the plurality of recesses arranged along the edge of the piezoelectric layer is formed, the force in the plane direction applied to the edge of the piezoelectric layer by the pressing member is formed on the proximity electrode of the piezoelectric layer. It can be difficult to transmit to the part.
  According to the present invention, the adhesive that protrudes from between the flow path unit (base material) and the piezoelectric actuator flows into the surface of the piezoelectric layer opposite to the flow path unit (base material). Can be prevented. Furthermore, it is difficult for the surface force applied from the pressing member to the edge of the piezoelectric layer to be transmitted to the portion of the piezoelectric layer where the proximity electrode is formed, and liquid ejection characteristics from a plurality of nozzles (piezoelectric actuator driving characteristics) It is possible to prevent variations from occurring.
1 is a schematic configuration diagram of a printer according to an embodiment of the present invention. It is a top view of the inkjet head of FIG. It is the III-III sectional view taken on the line of FIG. It is a figure which shows the manufacture procedure of an inkjet head. FIG. 6 is a view corresponding to FIG. 4 of Modification 1; FIG. 10 is a diagram corresponding to FIG.
  Hereinafter, preferred embodiments of the present invention will be described.
  As shown in FIG. 1, the printer 1 according to the present embodiment includes a carriage 2, an inkjet head 3, a paper transport roller 4, and the like. The carriage 2 reciprocates in the scanning direction along the guide member 5 extending in the scanning direction (left and right direction in FIG. 1). The inkjet head 3 (liquid ejection head) is mounted on the carriage 2 and ejects ink from a plurality of nozzles 15 (see FIG. 2) formed on the lower surface thereof. The paper transport roller 4 transports the recording paper P in a paper feed direction (front direction in FIG. 1) orthogonal to the scanning direction.
  In the printer 1, printing is performed on the recording paper P by ejecting ink from the inkjet head 3 that reciprocates in the scanning direction together with the carriage 2 onto the recording paper P conveyed in the paper feeding direction by the paper conveying roller 4. Do.
  Next, the inkjet head 3 will be described. As shown in FIG. 2 and FIG. 3, the inkjet head 3 applies pressure to the ink in the pressure chamber 10 and the flow path unit 21 in which the ink flow paths (liquid flow paths) such as the nozzles 15 and the pressure chambers 10 are formed. And a piezoelectric actuator 22 for applying.
  The flow path unit 21 is formed by stacking four plates 31 to 34. Here, of the four plates 31 to 34, the three plates 31 to 33 except for the plate 34 arranged at the lowermost position are made of a metal material such as stainless steel, and the plate 34 is a synthetic resin material such as polyimide. Consists of. Or the plate 34 may be comprised with the metal material similarly to the plates 31-33.
  The plate 31 is formed with a plurality of pressure chambers 10 having a substantially elliptical planar shape with the scanning direction as the longitudinal direction. The plurality of pressure chambers 10 are arranged in the paper feed direction to form a pressure chamber row 8, and such pressure chamber rows 8 are arranged in four rows in the scanning direction on the plate 31. .
  In the plate 32, substantially circular through holes 12 and 13 are formed in portions facing both ends in the longitudinal direction of the pressure chamber 10, respectively. A manifold channel 11 is formed in the plate 33. The manifold channel 11 extends in four rows in the paper feed direction corresponding to the four pressure chamber rows 8, and faces the substantially right half of the plurality of pressure chambers 10 constituting each pressure chamber row 8. Ink is supplied to the manifold channel 11 from an ink supply port 9 provided at the lower end thereof.
  The plate 33 is formed with a plurality of substantially circular through holes 14 at portions facing the plurality of through holes 13. In the plate 34, a plurality of nozzles 15 are formed at portions facing the plurality of through holes 14.
  In the flow path unit 21, the manifold flow path 11 communicates with the plurality of pressure chambers 10 via the through holes 12, and each pressure chamber 10 is connected to the nozzle 15 via the through holes 13 and 14. Communicate. That is, a plurality of individual ink flow paths are formed in the flow path unit 21 from the outlet of the manifold flow path 11 to the nozzle 15 via the pressure chamber 10.
  The piezoelectric actuator 22 includes a vibration plate 41, a piezoelectric layer 42, a plurality of individual electrodes 43, a common electrode 44, and the like. The diaphragm 41 is made of a piezoelectric material mainly composed of lead zirconate titanate, which is a mixed crystal of lead titanate and lead zirconate, and the flow channel unit is covered with an adhesive 51 so as to cover the plurality of pressure chambers 10. It is adhered to the upper surface of 21. Note that the diaphragm 41 may be made of a material other than the piezoelectric material, unlike the piezoelectric layer 42 described below.
  The piezoelectric layer 42 is made of the same piezoelectric material as that of the vibration plate 41, and is continuously formed on the upper surface of the vibration plate 41 across the plurality of pressure chambers 10. The piezoelectric layer 42 forms the uppermost layer of the piezoelectric actuator 22.
  Each of the plurality of individual electrodes 43 has a substantially oval shape that is slightly smaller than the pressure chamber 10, and is formed on a portion of the upper surface 42 </ b> A of the piezoelectric layer 42 that faces a substantially central portion of the plurality of pressure chambers 10. ing. As a result, the plurality of individual electrodes 43 form four individual electrode rows 40 each formed by being arranged in the paper feed direction, like the pressure chamber 10.
  In the present embodiment, among the plurality of individual electrodes 43, the plurality of individual electrodes 43B constituting the rightmost individual electrode row 40 in FIG. 2 that is closest to the right edge 42B in FIG. A plurality of individual electrodes 43C constituting the leftmost individual electrode array 40 in FIG. 2 that are closest to the left edge 42C in FIG. 2 of the piezoelectric layer 42, and that are closest to the upper edge 42D in FIG. The four individual electrodes 43D arranged on the uppermost side in the drawing of the individual electrode row 40, and the lowermost side in the drawing of each individual electrode row 40 closest to the lower edge 42E of the piezoelectric layer 42 in FIG. The four individual electrodes 43E thus formed correspond to the proximity electrodes according to the present invention.
  Here, strictly, the individual electrodes 43D constituting the second and fourth individual electrode rows 40 from the left in FIG. 2 are more strictly than the individual electrodes 43D constituting the first and third individual electrode rows 40 from the left. Although separated from the edge 42D, the difference is about half of the interval between the nozzles 15 and is slight, so that the four individual electrodes 43D are substantially the individual electrodes closest to the edge 42D. .
  Similarly, the individual electrodes 43E constituting the first and third individual electrode rows 40 from the left in FIG. 2 are strictly more than the individual electrodes 43E constituting the second and fourth individual electrode rows 40 from the left. Although separated from the edge 42E, the difference is about half of the interval between the nozzles 15 and is small, so that the four individual electrodes 43E are substantially the individual electrodes closest to the edge 42D. .
  Further, the end of each individual electrode 43 on the side opposite to the nozzle 15 (the right side in FIG. 2) extends to a portion that does not face the pressure chamber 10, and the tip thereof serves as a connection terminal 45. A driver IC (not shown) is connected to the connection terminal 45 via a wiring member (not shown), and either the ground potential or the drive potential (for example, about 20 V) is connected to the plurality of individual electrodes 43 by the driver IC. It is given selectively.
  The common electrode 44 is continuously formed across the plurality of pressure chambers 10 between the diaphragm 41 and the piezoelectric layer 42 (the surface of the piezoelectric layer 42 on the flow path unit 21 side), and the plurality of individual electrodes 43. The piezoelectric layer 42 is sandwiched between the two. Here, the portion sandwiched between the individual electrode 43 and the common electrode 44 of the piezoelectric layer 42 is polarized in the thickness direction. Further, the common electrode 44 extends to the outside (between the edges 42B to 42E of the piezoelectric layer 42 and the individual electrodes 43B to 43E) from the region where the plurality of individual electrodes 43 are formed.
  The portions of the piezoelectric actuator 22 positioned between the edges 42B to 42E of the piezoelectric layer 42 and the individual electrodes 43B to 43E penetrate the piezoelectric layer 42, respectively, and the lower end thereof vibrates with the common electrode 44. Concave portions 46 </ b> B to 46 </ b> E closed by the plate 41 are formed. The recesses 46B and 46C extend along the paper feed direction substantially parallel to the edges 42B and 42C (along the edges 42B and 42C), respectively, and the recesses 46D and 46E are substantially parallel to the edges 42D and 42E, respectively. Extending along the scanning direction (along edges 42D, 42E).
  The recesses 46B to 46E are filled with a filler 47 made of a conductive material such as a metal paste or a conductive resin, and the upper surface of the filler 47 is a surface electrode 47A. As a result, the common electrode 44 is drawn out to the upper surface 42 </ b> A of the piezoelectric layer 42 by the filler 47. The surface electrode 47A is connected to a driver IC (not shown) via a wiring member (not shown), and the common electrode 44 is always held at the ground potential by the driver IC.
  Here, a method for ejecting ink from the nozzle 15 by driving the piezoelectric actuator 22 will be described. In the inkjet head 3, the plurality of individual electrodes 43 are all held at the ground potential in advance. In order to eject ink from a certain nozzle 15, the potential of the individual electrode 43 corresponding to the nozzle 15 is switched from the ground potential to the driving potential.
  Then, due to the potential difference between the individual electrode 43 to which the drive potential is applied and the ground electrode held at the ground potential, an electric field in the thickness direction is generated in a portion sandwiched between these electrodes of the piezoelectric layer. Since the direction of the electric field is parallel to the polarization direction of the piezoelectric layer 42, this portion of the piezoelectric layer 42 contracts in the horizontal direction perpendicular to the thickness direction and faces the pressure chamber 10 of the piezoelectric layer 42 and the diaphragm 41. The portion is deformed so as to be convex toward the pressure chamber 10. As a result, the volume of the pressure chamber 10 is reduced and the pressure of the ink in the pressure chamber 10 is increased, and the ink is discharged from the nozzle 15 communicating with the pressure chamber 10 due to the increase in the pressure of the ink.
  Next, a method for manufacturing the inkjet head 3 will be described. In order to manufacture the inkjet head 3, first, the flow path unit 21 and the piezoelectric actuator 22 are separately manufactured. Here, the piezoelectric actuator 22 is manufactured, for example, by laminating and firing two piezoelectric sheets that form the vibration plate 41 and the piezoelectric layer 42 on which the individual electrodes 43 and the common electrode 44 are formed. After the through holes to be the recesses 46B to 46E are formed in the piezoelectric sheet 42, the two piezoelectric sheets are laminated and baked, whereby the recesses 46B to 46E are formed as shown in FIG. The piezoelectric actuator 22 formed with is formed (concave forming step). However, the filling material 47 is not filled into the recesses 46B to 46E at this stage. In other words, at this stage, a part of the common electrode 44 is exposed through the recess.
  Next, as shown in FIG. 4A, after applying a thermosetting adhesive 51 to at least one of the upper surface of the flow path unit 21 and the lower surface of the piezoelectric actuator 22, the flow path unit 21 and the piezoelectric actuator are applied. 22, and the heater 60 (pressing member) is heated while pressing the upper surface 42 </ b> A of the piezoelectric layer 42 downward toward the channel unit 21, whereby the channel unit 21 and the piezoelectric actuator 22 are bonded to each other. Bonding is performed at 51 (bonding process).
  The heater 60 is provided with an elastic portion 62 made of an elastic material such as a rubber material on the lower surface of a heater body 61 made of a metal material or the like, and the lower surface of the elastic portion 62 presses the upper surface of the piezoelectric layer 42. It is a pressing surface 62A. That is, the heater 60 has elasticity at the portion where the pressing surface 62A is formed. At this time, the heater 60 is disposed such that the pressing surface 62 </ b> A protrudes from the edges 42 </ b> B to 42 </ b> E of the piezoelectric layer 42.
  At this time, the upper surface 42A of the piezoelectric layer 42 may be pressed toward the flow path unit 21 by the pressing surface 62A by moving the heater 60 downward, or the flow path unit 21 and the piezoelectric actuator 22 are installed. The upper surface 42 </ b> A of the piezoelectric layer 42 may be pressed toward the flow path unit 21 by the pressing surface 62 </ b> A by moving the fixed table or the like upward toward the fixed heater 60.
  When the upper surface 42A of the piezoelectric layer 42 is pressed downward toward the flow path unit 21 by such a heater 60, the elastic portion 62 follows the shape of the piezoelectric layer 42 as shown in FIG. Thus, it is elastically deformed so that the portion facing the piezoelectric layer 42 is recessed. Therefore, the edges 42B to 42E of the piezoelectric layer 42 are in close contact with the pressing surface 62A, and there is no gap between the heater 60 and the edges 42B to 42E of the piezoelectric layer 42.
  Here, when the upper surface 42 </ b> A of the piezoelectric layer 42 is pressed downward toward the flow path unit 21, the adhesive 51 protrudes from between the flow path unit 21 and the piezoelectric actuator 22. The side surface of the piezoelectric layer 42 rises toward the upper surface 42A. However, in the present embodiment, as described above, the edges 42B to 42E of the piezoelectric layer 42 and the pressing surface 62A are in close contact with each other, and there is no gap between them. It is prevented from flowing into the upper surface 42A of the layer 42. Accordingly, it is possible to prevent the adhesive 51 from reaching the portion of the upper surface 42 </ b> A of the piezoelectric layer 42 facing the individual electrode 43 and causing variations in the ink ejection characteristics from the corresponding nozzles 15.
At this time, since the elastic portion 62 is elastically deformed following the shape of the piezoelectric layer 42, the portion of the elastic portion 62 that protrudes from the edges 42 </ b> B to 42 </ b> E is located on the side of the piezoelectric layer 42. Therefore, a surface force F as indicated by an arrow in FIG. 4B is applied from the elastic portion 62 to the edges 42B to 42E of the piezoelectric layer 42. However, in the present embodiment, the concave portions 46B to 46E opened on the upper surface 42A of the piezoelectric layer 42 are respectively provided between the edges 42B to 42E of the piezoelectric layer 42 and the individual electrodes 43B to 43E during the bonding process. Therefore, the above-described plane direction force F is not transmitted to the portion of the piezoelectric layer 42 facing the individual electrodes 43 including the individual electrodes 43B to 43E. Accordingly, it is possible to prevent the ink ejection characteristics from the nozzles 15 corresponding to the individual electrodes 43 </ b> B to 43 </ b> E from fluctuating due to the force F and causing variations in the ink ejection characteristics from the plurality of nozzles 15. it can.
In the present embodiment, the concave portions 46B to 46E that are opened in the upper surface 42A of the piezoelectric layer 42 are formed in the bonding step, and therefore, slightly between the piezoelectric layer 42 and the elastic portion 62 of the heater 60. Even if the adhesive 51 flows, the adhesive 51 that has flowed flows into the recesses 46B to 46E, whereby the adhesive 51 reaches a portion of the upper surface 42A of the piezoelectric layer 42 that faces the individual electrode 43. Can be prevented.
  Then, after the flow path unit 21 and the piezoelectric actuator 22 are bonded, as shown in FIG. 3, the recesses 46 </ b> B to 46 </ b> E are filled with a filler 47 (filling step), thereby completing the inkjet head 3. At this time, since the recesses 46B to 46E are larger than normal through holes or the like, the common electrode 44 is pulled out to the upper surface 42A of the piezoelectric layer 42 by the filler 47 filled in the recesses 46B to 46E. The disconnection of the common electrode 44 is less likely to occur than when the common electrode 44 is drawn out to the upper surface 42A of the piezoelectric layer 42 through the hole.
  In addition, since the filling material 47 is filled in the recesses 46B to 46E, cracks are less likely to occur at the corners of the recesses 46B to 46E of the piezoelectric layer 42.
  Next, modified examples in which various changes are made to the present embodiment will be described. However, the description of the same configuration as the present embodiment will be omitted as appropriate.
  In one modified example (Modified Example 1), as shown in FIG. 5A, the recesses 46 </ b> B to 46 </ b> E are filled at the stage of manufacturing the piezoelectric actuator 22 before bonding the flow path unit 21 and the piezoelectric actuator 22. In addition to not filling the material 47, the individual electrodes 43 are not formed. In this state, as shown in FIGS. 5 (b) and 5 (c), the piezoelectric layer 42 of the piezoelectric layer 42 is formed. The upper surface 42 </ b> A is heated while being pressed by the heater 60 to bond the flow path unit 21 and the piezoelectric actuator 22. Then, after the flow path unit 21 and the piezoelectric actuator 22 are bonded, the individual electrodes 43 are formed on the upper surface 42A of the piezoelectric layer 42 at the same time as filling the recesses 46B to 46E by printing.
  In this case, since the filling of the filling material 47 into the recesses 46B to 46E and the formation of the individual electrodes 43 can be performed at the same time, the manufacturing process of the inkjet head 3 can be simplified.
  In the above-described embodiment, the recesses 46B and 46C extend in the paper feeding direction along the edges 42B and 42C of the piezoelectric layer 42, and the recesses 46D and 46E extend along the edges 42D and 42E of the piezoelectric layer 42. However, the present invention is not limited to this. In another modification (Modification 2), as shown in FIG. 6, the portions of the piezoelectric actuator 22 positioned between the edges 42 </ b> B and 42 </ b> C of the piezoelectric layer 42 and the individual electrodes 43 </ b> B and 43 </ b> C are respectively provided. A plurality of concave portions 71B and 71C arranged in the paper feeding direction (along the edges 42B and 42C) are formed.
  The plurality of recesses 71B and 71C are individually provided for the plurality of individual electrodes 43B and 43C, respectively, the individual electrode 43B and the corresponding recess 71B, and the individual electrode 43C and the corresponding recess 71C. Are aligned in the scanning direction orthogonal to the edges 42B and 42C of the piezoelectric layer 42, respectively.
  In addition, the piezoelectric actuators 22 are arranged along the scanning direction (along the edges 42D and 42E) at portions located between the edges 42D and 42E of the piezoelectric layer 42 and the individual electrodes 43D and 43E. A plurality of recesses 71D and 71E are formed.
  The plurality of recesses 71D and 71E are individually provided for the plurality of individual electrodes 43D and 43E, respectively, the individual electrode 43D and the corresponding recess 71D, and the individual electrode 43E and the corresponding recess 71E. Are arranged in the paper feed direction orthogonal to the edges 42D and 42E of the piezoelectric layer 42, respectively.
  When the concave portion is formed in the piezoelectric layer 42, the rigidity of the piezoelectric layer 42 is lowered, but the long concave portions 46B to 46E extending along the edges 42B to 42E of the piezoelectric layer 42 as in the above-described embodiment. Instead of forming the plurality of recesses 71B to 71E arranged along the edges 42B to 42E of the piezoelectric layer 42, it is possible to suppress a decrease in rigidity of the piezoelectric layer 42.
  However, in the case where the plurality of recesses 71B to 71E arranged along the edges 42B to 42E of the piezoelectric layer 42 are formed, the piezoelectric portion 22 is piezoelectrically bonded from the elastic portion 62 of the heater 60 when the flow path unit 21 and the piezoelectric actuator 22 are bonded. The surface-direction force F applied to the edge of the layer 42 is transmitted from between the adjacent recesses 71B to 71E to a portion inside the recesses 71B to 71E of the piezoelectric layer 42.
  However, in Modification 2, the individual electrodes 43B to 43E and the corresponding recesses 71B to 71E are arranged in the direction orthogonal to the edges 42B to 42E of the piezoelectric layer 42, respectively. Even if it is transmitted from between the recesses 71B to 71E to the inner side of the recesses 71B to 71E of the piezoelectric layer 42, it is difficult to transmit to the portion facing the individual electrode 43.
  In the second modification, the individual electrodes 43B to 43E and the corresponding recesses 71B to 71E are arranged in a direction perpendicular to the edges 42B to 42E of the piezoelectric layer 42. However, the individual electrodes 43B to 43E The corresponding recesses 71B to 71E may be shifted in the direction along the edges 42B to 42E of the piezoelectric layer 42, respectively.
  Furthermore, the plurality of recesses 71B to 71E are not limited to being provided individually for the plurality of individual electrodes 43B to 43E, respectively, and the number of the plurality of recesses 71B to 71E is the number of the individual electrodes 43B to 43E. The number may be larger or smaller.
  Further, in the above-described embodiment, the concave portions 46B to 46E are formed in the portions of the piezoelectric actuator 22 located between the four edges 42B to 42E of the piezoelectric layer 42 and the individual electrodes 43B to 43E, respectively. However, for example, only a part of the recesses 46B to 46E, such as only the recesses 46B and 46C, may be formed.
  Further, in the above-described embodiment, the through holes to be the recesses 46B to 46E are formed in the piezoelectric sheet before firing. However, after the piezoelectric sheet is formed by firing the piezoelectric sheet, the recesses 46B are formed by laser processing or the like. ~ 46E may be formed.
  In the above-described embodiment, the recesses 46B to 46E are filled with the filler 47 made of a conductive material, and the common electrode 44 is drawn out to the upper surface 42A of the piezoelectric layer 42 by the filler 47. Absent. For example, the recesses 46 </ b> B to 46 </ b> E may be filled with a non-conductive filler such as a synthetic resin, and the common electrode 44 may be drawn out to the upper surface 42 </ b> A of the piezoelectric layer 42 through a through hole provided in the piezoelectric layer 42. . Furthermore, it is not necessary to fill the recesses 46B to 46E with a filler. In these cases, since the common electrode 44 is not drawn out to the upper surface 42A of the piezoelectric layer 42 by the filler 47 filled in the recesses 46B to 46E, the recesses 46B to 46E penetrate the piezoelectric layer 42. It does not have to be.
  In the above-described embodiment, the plurality of individual electrodes 43 are arranged along the edges 42 </ b> B to 42 </ b> E of the piezoelectric layer 42. However, the arrangement of the plurality of individual electrodes 43 is not limited thereto. The individual electrodes 43 may be arranged in a direction inclined with respect to the edges 42 </ b> B to 42 </ b> E of the piezoelectric layer 42.
  In the above-described embodiment, the pressing surface 62A is formed by the elastic portion 62 made of an elastic material such as rubber of the heater 60. However, the present invention is not limited to this. In the heater, if the portion forming the pressing surface has elasticity, for example, the lower surface of the elastic portion 62 of the heater 60 is covered with a metal thin film, and the surface of this thin film becomes the pressing surface. It may be.
  In the above-described embodiment, the piezoelectric actuator 22 includes only one piezoelectric layer 42 on the upper surface of the vibration plate 41. However, the piezoelectric actuator 22 includes a plurality of piezoelectric layers stacked on the upper surface of the vibration plate 41. It may be. In this case, among the plurality of piezoelectric layers, the piezoelectric layer disposed at the uppermost layer corresponds to the piezoelectric layer according to the present invention.
  In the above description, the inkjet head for ejecting ink from the nozzle and the example in which the present invention is applied to the manufacture thereof have been described. It is also possible to apply. Furthermore, the present invention can also be applied to the manufacture of an apparatus (actuator apparatus) other than the liquid ejection apparatus in which the piezoelectric actuator is bonded to a substrate other than the flow path unit.
DESCRIPTION OF SYMBOLS 10 Pressure chamber 15 Nozzle 21 Flow path unit 22 Piezoelectric actuator 42 Piezoelectric layer 42A Upper surface 42B-42E Edge 43 Individual electrode 44 Common electrode 46B-46E Concave 47A Filler 60 Heater 62 Elastic part 62B Press surface 71B-71E Concave

Claims (10)

  1. A flow path unit in which a liquid flow path including a plurality of nozzles and a plurality of pressure chambers respectively communicating with the plurality of nozzles is formed;
    A piezoelectric layer disposed so as to face the plurality of pressure chambers, and a plurality of individual electrodes respectively formed on a portion of the surface of the piezoelectric layer opposite to the flow path unit facing each pressure chamber. And a piezoelectric actuator that is bonded to the flow path unit with an adhesive, and a method for manufacturing a liquid ejection device,
    In the portion of the piezoelectric actuator located between the edge of the piezoelectric layer and the adjacent electrode having the closest distance to the edge among the plurality of individual electrodes, the piezoelectric layer is opposite to the flow path unit. A recess forming step for forming a recess opened in the surface;
    An adhesive step of bonding the flow path unit and the piezoelectric actuator with an adhesive in a state where a space is held in the concave portion after the concave portion forming step ,
    In the bonding step, at least a portion forming the pressing surface has elasticity, and the pressing is disposed on the surface of the piezoelectric layer opposite to the flow path unit so that the pressing surface protrudes from the edge of the piezoelectric layer. A method of manufacturing a liquid ejection apparatus, comprising: pressing a surface of the piezoelectric layer opposite to the flow path unit with a member toward the flow path unit.
  2. The method for manufacturing a liquid ejection apparatus according to claim 1, further comprising a filling step of filling the concave portion with a filler after the bonding step .
  3. The piezoelectric actuator is
    A common electrode formed on a surface of the piezoelectric layer on the flow path unit side, facing the plurality of individual electrodes and extending to a position between an edge of the piezoelectric layer and the proximity electrode; Prepared,
    In the concave portion forming step, the piezoelectric layer is penetrated in the thickness direction, and the concave portion in which the end on the flow path unit side is closed with the common electrode,
    In the bonding step, the flow path unit and the piezoelectric actuator are bonded with an adhesive in a state where the common electrode is exposed through the recess,
    The method for manufacturing a liquid ejection apparatus according to claim 1, further comprising a filling step of filling the concave portion with a filler after the bonding step.
  4. In the filling step by filling a conductive material as the filler in the recess, to claim 2 or 3, characterized in that to draw the common electrode on the surface of the channel unit and the opposite side of the piezoelectric layer A method for manufacturing the liquid discharge apparatus described.
  5. 5. The method of manufacturing a liquid ejection device according to claim 4 , wherein, in the filling step, the plurality of individual electrodes are formed simultaneously with filling the concave portion with a conductive material by printing.
  6. By arranging the plurality of pressure chambers and the plurality of individual electrodes along the edge of the piezoelectric layer, a plurality of the proximity electrodes are arranged along the edge of the piezoelectric layer,
    In the recess forming step, the recess extending along the edge of the piezoelectric layer is formed in a portion of the piezoelectric actuator located between the edge of the piezoelectric layer and the plurality of proximity electrodes. The manufacturing method of the liquid discharge apparatus in any one of Claims 1-5 .
  7. By arranging the plurality of pressure chambers and the plurality of individual electrodes along the edge of the piezoelectric layer, a plurality of the proximity electrodes are arranged along the edge of the piezoelectric layer,
    Forming the plurality of recesses arranged along the edge of the piezoelectric layer in a portion of the piezoelectric actuator located between the edge of the piezoelectric layer and the plurality of proximity electrodes in the recess forming step; method for manufacturing a liquid ejecting apparatus according to any one of claims 1 to 5, wherein.
  8. Forming the recesses individually for the plurality of proximity electrodes so that each of the proximity electrodes and the corresponding recesses are aligned in a direction perpendicular to the edge of the piezoelectric layer in the recess forming step; The method for manufacturing a liquid ejection device according to claim 7 , wherein:
  9. A substrate;
    Piezoelectric layer disposed so as to face the substrate and having a plurality of individual electrodes formed on a surface thereof opposite to the base material of the piezoelectric layer, the piezoelectric actuators against wear to the substrate A method of manufacturing an actuator device comprising:
    A surface of the piezoelectric actuator opposite to the base material in a portion located between the edge of the piezoelectric layer and the adjacent electrode having the closest distance to the edge among the plurality of individual electrodes. A recess forming step for forming a recess opened in
    An adhesive step of bonding the base material and the piezoelectric actuator with an adhesive in a state where a space is held in the concave portion after the concave portion forming step ,
    In the bonding step, at least a portion forming the pressing surface has elasticity, and the pressing member is disposed on the surface of the piezoelectric layer opposite to the base so that the pressing surface protrudes from the edge of the piezoelectric layer. Thus, a method of manufacturing an actuator device, comprising pressing a surface of the piezoelectric layer opposite to the substrate toward the substrate.
  10.   The piezoelectric actuator is
      A common electrode formed on a surface of the piezoelectric layer on the substrate side, facing the plurality of individual electrodes and extending to a position between an edge of the piezoelectric layer and the proximity electrode; ,
      In the concave portion forming step, the piezoelectric layer penetrates the piezoelectric layer in the thickness direction, and the concave portion in which the end on the base material side is closed with the common electrode,
      In the bonding step, the base electrode and the piezoelectric actuator are bonded with an adhesive in a state where the common electrode is exposed through the recess,
      The method for manufacturing an actuator device according to claim 9, further comprising a filling step of filling the concave portion with a filler after the bonding step.
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