JP2007203481A - Inkjet type recording head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a connection structure of a wiring material electrically stable although a suction hand space for carrying an actuator is prepared. <P>SOLUTION: A common surface electrode 34 connected in common to a plurality of energy generating parts of the actuator 30 is set in the form of a strip along the periphery at each of both ends of the actuator 30. Common electrode terminals 35 are formed thereon with a space 34a held at a nearly center part of the common surface electrode 34. A flexible wiring material 40 has common electrode lands 61 formed at a position corresponding to each common electrode terminal 35 and at a position corresponding to the space 34a of a nearly center part of discrete surface electrodes 36. Bump electrodes are set thereon. Each common electrode terminal 35 and the nearly center part 34a of the common surface electrode 34 are connected to the corresponding bump electrode. The space 34a is utilized as the suction hand space for carrying the actuator. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a connection structure of a wiring member for supplying power to an actuator in an ink jet recording head.

  2. Description of the Related Art Conventionally, an ink jet recording head has a plurality of nozzles arranged in a row as in Patent Document 1, and a pressure chamber corresponding to each nozzle and a pressure to be discharged are pressure chambers. And an actuator having a plurality of energy generating portions (energy generating means in Patent Document 1) applied to the wire and a wiring material (wiring board in Patent Document 1) having wiring for supplying power to the energy generating portion. In addition, a plurality of individual electrode terminals (individual surface electrodes in Patent Document 1) individually connected to each energy generating unit are formed in a row parallel to the nozzle row and commonly connected to the plurality of energy generating units. Common electrode terminals (common surface electrodes in Patent Document 1) are formed at the outermost ends in the longitudinal direction of the actuator in a direction orthogonal to the nozzle rows. In the wiring material, individual electrode lands (individual junction electrodes in Patent Document 1) are formed at positions facing a plurality of individual electrode terminals, and common electrode lands (common junction electrodes in Patent Document 1) are formed at positions facing the common electrode terminals. In addition, the common electrode land is formed to extend in a band shape in a direction substantially orthogonal to the row at the extended position of the row formed by the individual electrode terminals. In addition, a driving circuit for driving the actuator is mounted in the middle of the wiring material extending direction, and each wiring connected to the individual electrode land passes between adjacent individual electrode lands and has a strip-shaped common. It extends so as to be substantially parallel to the side edge of the electrode land, and is connected to the drive circuit. A bump electrode is provided on each land, and each bump is overlapped with each terminal, and the actuator and the wiring material are joined by being joined to the bump electrode.

JP 2005-161760 A

  In recent years, miniaturization, high resolution, and high speed performance of ink jet recording have been demanded. Increasing the number of nozzles of an ink jet recording head and increasing the density have responded to higher resolution and higher speed. I came. For this reason, the number of energy generating parts and electrode terminals corresponding to each nozzle also increases, and the corresponding electrode land of the wiring material also increases correspondingly, the number of wiring patterns increases, and the width of the wiring material is increased accordingly. Or, it was necessary to make the wiring thin and to narrow the interval between the wirings.

  By the way, in the manufacturing process of the actuator, it is necessary to lift the actuator by using a suction tool and transport it to the next process. On the surface on which each electrode terminal of the actuator is formed (surface to be joined to the wiring material) It was necessary to provide a space (hereinafter referred to as a suction hand space) for contacting the suction tool in a space where no electrode terminal is formed (see FIG. 6).

  However, along with the downsizing, higher resolution, and higher speed of inkjet printers, the actuators are also downsized, and the electrode terminals are increased and densified as described above. It is difficult to provide an area that is occupied by an area formed at a position and that is necessary as a suction hand space at a position where the actuator can be lifted in a balanced manner. As a preferred position, since all the common electrode terminals are connected to the same potential portion via the common electrode land, it is considered to reduce the number of common electrode terminals and secure an area as a suction hand space. It is done. However, in such a space where the common electrode terminal is not formed, the common electrode land (bump electrode) of the wiring material is not formed correspondingly, so the connection point between the actuator and each common electrode of the wiring material is reduced. The pattern that connects each energy generating unit and the common electrode in the recording head is extremely thin and fine, so that the resistance is large and the number of connection points is reduced. This means that a voltage is uniformly applied to a plurality of energy generating units. There is a problem that it becomes impossible to do so and becomes electrically unstable.

  In order to solve the above-described problems, an object of the present invention is to provide an electrically stable wiring material connection structure while providing a space for carrying an actuator.

  The ink jet recording apparatus according to claim 1, wherein a plurality of individual electrode terminals for pressure application corresponding to a plurality of energy generating units for ejecting ink and individually connected to the respective energy generating units on the surface thereof And an actuator in which a common electrode terminal connected in common to each of the energy generating portions is formed, and one end portion is overlapped on the surface of the actuator, and the plurality of individual electrodes are drawn in a direction parallel to the surface. An individual electrode land corresponding to a terminal and a wiring material on which a plurality of common electrode lands are formed corresponding to the common electrode terminal are joined in association with the terminals and the lands. In the ink jet type recording head, the actuator is configured such that each of the energy generations is provided on both ends of the actuator with the plurality of individual electrode terminals interposed therebetween. A plurality of common electrode terminals are formed on the surface electrode at intervals, and the wiring material corresponds to the plurality of common electrode terminals. The common electrode land is formed at each position and a position corresponding to the surface electrode between the plurality of common electrode terminals, a bump electrode is provided on each land, and each terminal and each land are connected to each other. Correspondingly, the surface electrode between the plurality of common electrode terminals and the corresponding common electrode land are made to correspond to each other and bonded by the bump electrode.

  In an ink jet recording apparatus according to a second aspect of the invention, in the first aspect, a predetermined interval between two of the plurality of common electrode terminals is set larger than an interval between the other common electrode terminals. The common electrode land is formed at a position corresponding to the surface electrode within a large interval, and both of the corresponding land are joined by the bump electrode.

  According to a third aspect of the present invention, in the ink jet recording apparatus according to the second aspect, the large interval is provided at a plurality of locations so as to surround the center of the actuator.

  According to a fourth aspect of the present invention, there is provided the ink jet recording apparatus according to the third aspect, wherein the plurality of large intervals are provided symmetrically with respect to a center line of the surface having the surface electrode of the actuator.

  The ink jet recording apparatus according to claim 5, wherein in any one of claims 2 to 4, a mark with which the tool for transporting the actuator comes into contact with the large interval of the actuator and a portion adjacent thereto. Is made of the same material as the surface electrode.

  In the ink jet recording apparatus according to claim 6, in any one of claims 1 to 5, the actuator is configured by stacking a plurality of sheet-like materials including a piezoelectric material, and the plurality of energy generating units are arranged in the same. A plurality of portions of the piezoelectric material are provided, and the individual electrode terminals are provided in a plurality of rows in a substantially planar shape on the surface of the laminate, and the surface electrodes are provided along a pair of opposing side edges of the surface of the laminate. A plurality of common electrode terminals are provided on the surface electrode along the longitudinal direction of the band at intervals from each other.

  According to the first aspect of the present invention, the connection of the common electrode between the actuator and the wiring member is not limited to the connection between the plurality of common electrode terminals and the common electrode land, and the surface electrode having the common electrode terminal on the surface and the common electrode. It can be ensured also by connection with the electrode land, and the electrical resistance value can be reduced by a large number of connections, and the connection can be made electrically stably. As a result, even if the interval between the common electrode terminals of the actuator is widened, the actuator and the wiring material can be electrically and stably connected. When the actuator is transported in the manufacturing process, it is transported at or near the common electrode terminal interval. It is easy to bring the tool into contact.

  According to the second aspect of the present invention, when the actuator is transported in the manufacturing process by increasing the distance between two adjacent adjacent electrodes among the plurality of common electrode terminals, the distance between the common electrode terminals or the vicinity thereof In this case, it is possible to secure a space for contacting the conveying tool. Further, the common electrode land is formed at a position corresponding to the surface electrode within the large interval, and the corresponding both are joined by the bump electrode, whereby the actuator and the wiring material can be electrically connected stably.

  According to the third aspect of the present invention, when the actuator is transported in the manufacturing process, a plurality of spaces are provided so as to surround the center of the actuator so as to surround the space between the common electrode terminals or in the vicinity thereof. And the actuator can be transported stably.

  According to the invention described in claim 4, when the actuator is transported in the manufacturing process, the space where the transport tool abuts at or near the interval between the common electrode terminals is set to the center line of the surface having the surface electrode of the actuator. In contrast, it can be secured symmetrically, and the actuator can be transported stably.

  According to the fifth aspect of the present invention, the tool for transporting the actuator is brought into contact with the mark, so that it can be transported without damaging the terminals of other parts of the actuator. Moreover, by forming the mark with the same material as the surface electrode, the mark can be easily formed simultaneously with the formation of the surface electrode.

  According to the invention described in claim 6, in the structure in which the actuator is configured by laminating a plurality of sheet-like materials including the piezoelectric material, the structure of each of the above claims can be suitably implemented.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the side from which ink is ejected is the lower surface and the downward direction, and the opposite side is the upper surface and the upward direction.

  The ink jet recording apparatus is not shown, but a head holder that functions as a carriage is attached to a guide shaft, and recording is performed on the head holder by discharging ink from nozzles 25 formed on the lower surface of the head holder. A head 1 and an ink tank containing ink of each color, for example, black B, cyan C, magenta M, and yellow Y, are mounted on the tower and reciprocally scanned along the recording paper in the width direction (X direction in FIG. 1). However, printing is performed by driving the actuator 30 (FIG. 1) of the recording head 1.

  The recording head 1 is similar to the known one described in Japanese Patent Laid-Open No. 2003-80709. As shown in FIG. 1, the recording head 1 includes a cavity unit 20 having a nozzle surface on the lower surface of which a plurality of nozzles 25 are arranged in the Y direction. A plate-type actuator 30 that selectively applies discharge pressure to the ink in the cavity unit 20 is joined via an adhesive sheet, and a flexible flexible wiring member 40 is further attached to the upper surface of the actuator 30. And the other end is parallel to the surface and drawn out in the X direction, and further has a drive circuit 49 mounted thereon.

  The cavity unit 20 is configured by stacking a plurality of thin plates 21 and joining them with an adhesive as shown in FIG. A plurality of nozzles 25 are arranged in a staggered arrangement in the longitudinal direction (Y direction) of the cavity unit 20 on the lowermost plate 21a, and 2 for each ink color at an appropriate interval in the direction orthogonal to the cavity unit (X direction). Each column is provided. The uppermost plate 21f has a plurality of pressure chambers 23 that are elongated in plan view, one end portion in the longitudinal direction (X direction) communicates with the plurality of nozzles 25, and the other end portion is connected to the manifold flow. It is formed in communication with the path 22. The manifold channel 22 is formed through the thickness of the two plates 21d, is long in the longitudinal direction (Y direction) of the cavity unit 20, and extends along the staggered arrangement direction (Y direction) of the nozzles 25. ing. By covering the upper surface of the two plates 21d with the plate 21e and the lower surface with the plate 21c, the manifold channel 22 is formed in a hermetically sealed manner, and ink can be stored. The plurality of pressure chambers 23 are formed in a staggered arrangement in the longitudinal direction (Y direction) of the cavity unit 20 in correspondence with the nozzle rows, and two rows for each ink color in a direction perpendicular to the cavity unit (X direction). A total of eight pressure chamber rows are formed.

  In addition, ink supply ports 17 are provided on the upper surface of the cavity unit 20 for each ink color, and each ink supplied from an ink tank (not shown) is supplied to the ink supply port 17 and extends from the ink in the cavity unit 20. The ink that has flowed into the manifold flow path 22 is distributed to the plurality of pressure chambers 23 through the communication holes formed in the plate 21e, and reaches each nozzle 25 corresponding to each pressure chamber 23. In the embodiment, the thin plate 21 of the cavity unit 20 has a thickness of about 50 to 150 μm, the plate 21 having a plurality of nozzles 25 is made of synthetic resin such as polyimide, and the other plates 21 are 42% nickel alloy. Made of steel plate. The plurality of nozzles 25 have a minute diameter of about 20 μm.

  Next, the actuator 30 will be described. As shown in FIG. 2, the actuator 30 includes a plurality of ceramic layers 31 including a lowermost ceramic layer covering the plurality of pressure chambers 23, and the arrangement of the plurality of pressure chambers 23 from the pressure chamber 23 side of the cavity unit 20. It is configured by stacking in a direction perpendicular to the surface. The thickness of one ceramic layer is about 30 μm and is a piezoelectric ceramic such as PZT. Narrow individual electrodes 33 are formed on the upper surface (wide surface) of the ceramic layers 31b of the even-numbered stages from the bottom among the ceramic layers 31 at locations corresponding to the pressure chambers 23 in the cavity unit 20, respectively. It is formed in a staggered arrangement in 20 Y directions, and a plurality of rows are arranged in a direction (X direction) perpendicular thereto. A common electrode 32 common to the plurality of pressure chambers 23 is formed on the upper surface (wide surface) of the odd-numbered ceramic layers 31 a from the bottom. The individual electrodes 33 and the common electrode 32 are alternately arranged with at least one ceramic layer 31 interposed therebetween except for the lowermost ceramic layer, and face each other. The cavity unit 20 and the actuator 30 are bonded and fixed so that each individual electrode 33 in the actuator 30 and each pressure chamber 23 in the cavity unit 20 face each other.

  In addition, the actuator 30 uses a portion of the ceramic layer 31 between the individual electrode 33 and the common electrode 32 facing each other in the stacking direction of the plurality of ceramic layers 31 as an energy generation unit, and a drive circuit 49 described later selectively By applying a voltage between the electrode 33 and the common electrode 32, the energy generating part corresponding to the applied individual electrode 33 is distorted in the stacking direction, and this displacement changes the volume of the pressure chamber 23, A pressure and a pressure wave for ejecting ink are generated, and the ink is ejected from the nozzle 25.

  That is, the energy generating units are arranged in the column direction (Y direction) corresponding to the same column with the same number as the number of pressure chambers 23. In addition, the energy generating portions are formed long in the longitudinal direction of the pressure chamber 23 in the X direction, and the adjacent energy generating portions are similar to the arrangement of the pressure chambers 23 and are arranged in a staggered manner, and each ink color is in the X direction. Are arranged in two columns.

  Further, the individual surface electrode 36 and the common surface electrode 34 corresponding to the individual electrode 33 and the common electrode 32 are formed on the upper surface of the uppermost layer of the actuator 30 as shown in FIGS. Each surface electrode 36, 34 is electrically conductive filled in a through hole (not shown) penetrating in the stacking direction of the stacked ceramic layers 31, as in the known configuration described in Japanese Patent Laid-Open No. 2003-80709. The individual electrodes 33 and the common electrode 32 are electrically connected to each other through the conductive material. The individual surface electrode 36 is substantially parallel to the individual electrode 33 and has a narrow rectangular shape with substantially the same shape, but is shorter than the length of the individual electrode 33 in the X direction. Similarly to the rows of nozzles 25 (pressure chambers 23), two rows are provided in the X direction for each ink color along the longitudinal direction (Y direction) of the actuator 30, and the two pairs of pairs are staggered. It is lined up to be. The row of individual surface electrodes 36 also corresponds to the row of individual electrodes 33. Further, the common surface electrode 34 is formed in a strip shape along the outer periphery of the outermost ends in the longitudinal direction (Y direction) of the uppermost surface of the actuator 30.

  On the individual surface electrode 36 and the common surface electrode 34, corresponding to the individual electrode land 60 and the common electrode land 61, which will be described later, formed on the bonding surface (lower surface) of the flexible wiring member 40, Each common electrode terminal 35 is provided. The individual electrode terminal 37 has a narrow rectangular shape that is substantially the same width as the individual surface electrode 36 and is short in the length direction, and each individual electrode terminal 37 in each column (one column in the Y direction in FIG. 3) The surface electrodes 36 are alternately arranged near one end or the other end in the longitudinal direction (X direction). That is, they are arranged in a staggered pattern. Therefore, as shown in FIG. 3, the individual electrode terminals 37 arranged in a zigzag manner extending in the Y direction are arranged in eight rows in the X direction. Further, the common electrode terminals 35 have a narrow rectangular shape that is the same shape as the individual electrode terminals 37, and are arranged on the strip-shaped common surface electrode 34 at intervals in the X direction. In the present embodiment, seven common electrode terminals 35 are arranged in the X direction on the common surface electrodes 34 at the outermost ends in the Y direction, and adjacent to each other at a substantially central portion (substantially central portion in the X direction of the actuator 30). The two common electrode terminals 35b and 35c are arranged so that the interval between them is larger than the interval between the other common electrode terminals 35. The surface on the common surface electrode 34 within this large interval was used as a suction hand space 34a. The suction hand space 34a is similarly formed at the other outermost end in the Y direction of the actuator 30, and is formed at two locations so as to be symmetrical with respect to the center of the actuator 30 (FIGS. 3 and 6). .

  The individual surface electrode 36 and the common surface electrode 34 are formed by screen printing with a silver-palladium conductive member, and the individual electrode terminal 37 and the common electrode terminal 35 are formed on the individual surface electrode 36 and the common surface electrode 34. It is formed by printing silver. When the surface electrodes 36 and 34 are printed and formed on the uppermost ceramic layer 31 of the piezoelectric actuator, laminated with the other ceramic layers 31 and fired, the surface electrodes 36 and 34 are altered and bump electrodes described later. Bondability with 63 will deteriorate. Therefore, after firing the actuator, the electrode terminals 37 and 35 are printed on the surface electrodes 36 and 34 to improve the bonding between the electrode terminals 37 and 35 and the bump electrode 63.

  In the manufacturing process of the actuator 30, after printing the electrode terminals 37 and 35 on the surface electrodes 36 and 34, before the silver of the electrode terminals 37 and 35 is solidified, the suction hand space 34a of the actuator 30 The suction tool 80 is pressed, sucked and lifted, and moved to the next step (FIG. 5). Therefore, the suction hand space 34a is provided at a position avoiding the electrode terminals 37 and 35.

  Next, a flexible wiring member 40 will be described as an example of a wiring board for electrically joining the plurality of individual electrode terminals 37 and the common electrode terminal 35. As shown in FIG. 1, a flexible wiring member 40 having a plurality of wiring patterns 47 and 48 for transmitting a control signal from the outside is electrically connected by joining one end thereof to the upper surface of the uppermost layer of the actuator 30. The other end is drawn in a direction (X direction) orthogonal to the row of terminals 37, and a drive circuit 49 is mounted on the flexible wiring member 40 in the drawn direction. The drive circuit 49 selectively applies a voltage between the individual electrode 33 and the common electrode 32 based on the print data, and the ink is ejected from the nozzle 25 as described above by the application of the voltage.

  As shown in FIG. 4B, the flexible wiring member 40 has a copper foil, which will be described later, on one side of a strip-like base material 50 made of a flexible synthetic resin material (for example, polyimide resin). A plurality of individual electrode lands 60, a plurality of common electrode lands 61, and a plurality of wiring patterns 46, 47, 48 are formed of a photoresist or the like, and these surfaces are electrically insulating and flexible. Is covered with a coverlay 51 made of a synthetic resin (for example, polyimide resin). A driving circuit 49 is mounted on the upper surface of the base material 50 in the direction (X direction) in which the flexible wiring material 40 is drawn out. The wiring pattern 47 is provided on the input side of the driving circuit 49 and the wiring pattern 48 is provided on the output side. And the common electrode conducting wire 46 is connected. The individual electrode land 60 and the common electrode land 61 are formed at positions corresponding to the individual electrode terminal 37 and the common electrode terminal 35, respectively, and are connected to the wiring pattern 48 and the common electrode conductor 46. The wiring pattern 47 and the common electrode conductor 46 are connected to the outermost connection terminal 52 in the direction in which the flexible wiring member 40 is drawn. The common electrode conducting wire 46 is connected to the ground potential via the connection terminal 52. Further, the base member 50 is formed with holes 53 (openings) at portions corresponding to the island-like individual electrode lands 60 and the common electrode lands 61 to expose the lands 60 and 61, and bump electrodes are formed on the lands 60 and 61. 63 is fixed.

  A plurality of island-like individual electrode lands 60 and common electrode lands 61 are formed corresponding to the individual electrode terminals 37 and the common electrode terminals 35 of the actuator 30, and the individual electrode lands 60 are arranged extending in the Y direction. Eight rows of individual electrode lands 60 are arranged in the X direction. Each wiring pattern 48 connected to the plurality of individual electrode lands 60 extends through the interval between the plurality of individual electrode lands 60 with an appropriate interval in the X direction, is integrated in the drive circuit 49, and is substantially parallel to the X direction. And a bent portion extending between the two adjacent individual electrode lands 60 at an angle with respect to the X direction. The interval between the wiring patterns is appropriately determined depending on the number of wiring patterns and the interval between the individual electrode lands 60.

  Further, the common electrode land 61 extends in the X direction from the drive circuit 49 and is arranged in the X direction on the common electrode conducting wire 46 formed along the outer periphery of the outermost ends of the flexible wiring member 40 in the Y direction. . Since the common electrode lands 61 are provided and connected at positions corresponding to the common electrode terminals 35 at both ends of the actuator 30, the same number of seven common electrode lands 61 as the terminals 35 should be formed at the corresponding positions. However, in this embodiment, the common electrode land 61 is formed at a position corresponding to the common electrode terminal 35, and the common electrode land 61b corresponding to the common electrode terminals 35b and 35c adjacent to each other with the suction hand space 34a interposed therebetween. Common electrode lands 61a are also formed between 61c, and a total of eight are arranged. This will be described later. Further, the common electrode conducting wire 46 is formed in a band shape so as to be overlapped substantially parallel to the common surface electrode 34 of the actuator 30. Further, the bump electrode 63 provided on the individual electrode land 60 and the common electrode land 61 is adhered by melting a conductive brazing material such as solder. The bump electrodes 63 on the individual electrode lands 60 and the common electrode lands 61 of the flexible wiring member 40 are overlapped, heated and pressed in correspondence with the individual electrode terminals 37 and the common electrode terminals 35 of the actuator 30. Thus, the bump electrode 63 is melted, and the corresponding lands 60 and 61 and the terminals 37 and 35 are electrically and mechanically connected.

  Next, the connection between the above-described common electrode terminal 35 and the corresponding common electrode land 61 (bump electrode 63) will be described with reference to FIG. As shown in FIG. 3 and FIG. 5A, the flexible wiring member 40 is in contrast to the suction hand space 34a at the substantially central portion of the common surface electrode 34 formed by increasing the interval between the common electrode terminals 35b and 35c. The common electrode land 61a and the bump electrode 63a are formed at the corresponding positions. As shown in FIG. 5B, when the actuator 30 and the flexible wiring member 40 are connected, the common electrode terminals 35 and the common electrode lands 61 correspond to each other in parallel, and the bump electrodes 63 are melted and pushed. The common electrode land 61a is connected to the common surface electrode 34a by contacting and melting the bump electrode 63a with the common surface electrode 34a of the suction hand space 34a. That is, if the common electrode terminal 35 and the common electrode land 61 (bump electrode 63) are not formed correspondingly in order to secure the suction hand space position, the connection points are reduced. However, as in the present embodiment, the suction hand space 34a is reduced. Since the common surface electrode 34 can be connected to the common electrode land 61a (bump electrode 63a), the number of connection points is increased, the resistance value is reduced, and an electrically stable connection can be achieved.

  In the present embodiment, the two suction hand spaces 34a are provided on the center line of the actuator 30, but a plurality of suction hand spaces 34a may be provided. In particular, it should be provided symmetrically with respect to the center line.

  Next, another embodiment will be described with reference to FIGS. FIG. 7 is a plan view of the outer edge of one end in the Y direction on the top surface of the actuator 30 of another embodiment, and FIG. 8 is a cross-sectional view of the process of connecting the flexible wiring member 40 to the actuator 30 (a). The top view (b) of the flexible wiring material 40 is shown. The actuator 30 is configured in the same manner as in the previous embodiment, and an individual electrode 33 is formed at a corresponding position of the pressure chamber 23, and a common electrode 32 is also formed in the same manner. Surface electrodes 36 and 34 and electrode terminals 37 and 35 are formed on the uppermost surface of the actuator 30, and dummy individual surfaces to be described later are located near the outermost ends in the Y direction of the actuator 30 as shown in FIG. An electrode 36b is formed. In a part of the area where the dummy individual surface electrode 36b is formed, two circular suction hand spaces 70 described later are provided at positions symmetrical to each other with respect to the center line of the actuator 30 in the X direction. Yes.

  The dummy individual surface electrodes 36b are positioned corresponding to two to three pressure chambers 23 connected to both ends of the manifold channel 22 in the longitudinal direction (Y direction). The pressure chamber 23 is set not to be used for the recording operation in order to avoid non-ejection due to bubbles staying at both ends of the manifold channel 22, and the dummy individual surface electrode 36 b corresponding thereto is electrically connected to the wiring pattern 48. Individual surface electrodes that are not connected.

  Among the dummy individual surface electrodes 36b, dummy individual surface electrodes 36b1 at both ends in the X direction, that is, four dummy individual surface electrodes 36b1 (two not shown) positioned at the extreme end of the diagonal line of the actuator 30 are arranged on the dummy individual surface electrode 36b1. An electrode terminal 37b1 is formed and connected to a common electrode land 61e1 (bump electrode 63e1) on a common electrode conducting wire 46 of the flexible wiring member 40 described later as shown in FIG. For this reason, the dummy individual surface electrode 36b1 is not applied with a voltage for ejecting ink. However, since the dummy individual surface electrode 36b1 is provided at the four corners of the actuator 30 and joined to the flexible wiring member 40, the flexible wiring member 40 and the actuator 30 are provided. It plays a role in preventing peeling.

  Similarly to the previous embodiment, the common surface electrode 34 of the actuator 30 is formed in a strip shape along the outer periphery of the outermost ends in the Y direction, and the common electrode terminals 35 are provided at appropriate intervals thereon. Further, the common surface electrode 34 is provided with a notch 34b slightly on the left side in the X direction (left hand side in FIG. 7), and a positioning mark for overlappingly connecting the actuator 30 and the flexible wiring member 40. 71 is printed in the same material as the surface electrodes 34 and 36 in a circle simultaneously with the printing of the electrodes.

  The suction hand space 70 is formed in a space formed by shortening the length of a part of the dummy individual electrodes 36b2 in the area where the dummy individual electrodes 36b are formed. The distance between the electrode terminals 35b and 35c is larger than the distance between the other common electrode terminals 35. This large interval is formed as a work space for dealing with a positional shift of the suction tool 80 with respect to the suction hand space 70 or for bringing the suction tool 80 closer to the actuator 30. In other words, the suction hand space 70 is another electrode formed between the dummy individual surface electrode 36b on the extreme end side in the X direction and the dummy individual surface electrode 36b2 which is adjacent to the dummy individual surface electrode 36b2 in the X direction and short in the X direction. It is formed at a larger interval than the interval. Since the suction hand space 70 is also formed on the outer edge of the other end in the Y direction of the actuator 30, four suction hand spaces 70 are installed symmetrically with respect to the center line of the actuator 30. Thus, the suction tool 80 is brought into contact, and the actuator 30 can be sucked and transported in a balanced manner. The adsorption area 70 is formed of the same material as the surface electrodes 36 and 34, and is printed together when the surface electrodes 36 and 34 are screen-printed. As described above, the suction hand space 70 is installed at a position corresponding to the dummy individual surface electrode 36 corresponding to the plurality of pressure chambers 23 that are not used for ink discharge. The suction hand space 70 may be provided at a position corresponding to the corresponding individual surface electrode 36.

  As shown in FIG. 8, the flexible wiring member 40 forms electrode lands 60 and 61 and bump electrodes 63 corresponding to the electrode terminals 35 and 36 as in the previous embodiment. Further, the common electrode conducting wire 46 is formed in a strip shape so as to be overlapped substantially in parallel with the common surface electrode 34. In the present embodiment, the extended portion 46a is provided at the extreme ends in the X direction, A common electrode land 61e1 (bump electrode 63e1) connected to the individual electrode terminal 37b1 of the dummy individual surface electrode 36b1 of the actuator 30 described above is formed.

  Further, as in the previous embodiment, the flexible wiring member 40 is connected to the common electrode lead wire 46 from the hole 53 (opening) corresponding to the portion of the common surface electrode 34 between the common electrode terminals 35b and 35c spaced apart from each other. The common electrode land 61a is exposed, and the bump electrode 63 is provided on the common electrode land 61a. As described above, the individual electrode land 60 (bump electrode 63) is not formed at a position corresponding to the dummy individual electrode 36b that is not used for ink ejection. Further, the individual electrode land 60 (bump electrode 63) of the flexible wiring member 40 with respect to the suction hand space 70 is not formed.

  Positioning marks 72 are also formed on both ends of the flexible wiring member 40 in the Y direction at positions overlapping the positioning marks 71 on both ends of the actuator 30 in the Y direction. Semi-circular cutouts 51b and 46b are formed in the coverlay 51 and the common electrode conductor 46 of the flexible wiring member 40, and positioning marks 72 are formed on the exposed base member 50 by the electrodes 46 and 60. And the same copper material as the electrode. Then, the positioning mark 71 of the actuator 30 is formed slightly larger than the positioning mark 72 of the flexible wiring member 40, and each land 60 (bump electrode 63) is formed by overlapping both marks in parallel through the transparent base material 50. The terminals 35 and 36 are accurately positioned.

  In this state, as in the above-described embodiment, the flexible wiring member 40 is pressed against the actuator 30 and heated to melt the bump electrode 63 and connect them. At this time, the bump electrode 63a located outside the suction hand space 70 is also brought into contact with and melted on the common surface electrode 34 between the common electrode terminals 35b and 35c, and the electrical connection between the common surface electrode 34 and the common electrode conductor 46 is achieved. One of the connection points is reserved.

In this way, by devising the connection structure between the actuator 30 and the flexible wiring member 40, the terminals and the lands (bump electrodes) necessary for both are installed at the necessary locations, and the adsorption necessary for the manufacturing process of the actuator 30 is performed. A hand space 70 can be provided. As the actuator 30, in addition to the piezoelectric material of the above-described embodiment, an actuator that generates ink discharge pressure with static electricity, an electrical heating element, or the like can be used.

2 is an exploded perspective view of the recording head 1. FIG. FIG. 2 is a cross-sectional view of the recording head 1 along AA. 3 is a plan view of the uppermost surface of the actuator 30. FIG. 4 is a plan view of the lower surface of the flexible wiring member 40. FIG. It is a figure which shows a mode that the bump electrode 63 corresponding to the common electrode terminal part 61 is connected. It is a figure which shows a mode that the actuator 30 is attracted | sucked. It is a top view of the uppermost surface of the actuator 30 of another Example. (A) Sectional drawing explaining the joining process of the flexible wiring material 40 of another Example and the actuator 30, (b) The top view of the flexible wiring material 40.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Recording head 20 Cavity unit 23 Pressure chamber 30 Actuator 33 Individual electrode 35 Common electrode terminal 34a Suction hand space 36 Individual surface electrode 37 Individual electrode terminal 40 Flexible wiring material 48 Wiring pattern 49 Drive circuit 60 Individual electrode land 61 Common electrode land 63 Bump Electrode 70 Suction hand space 71, 72 Positioning mark 80 Suction device

Claims (6)

Corresponding to a plurality of energy generating units for ejecting ink, a plurality of individual electrode terminals for voltage application individually connected to the respective energy generating units on the surface thereof, and commonly connected to each of the energy generating units An actuator having a common electrode terminal formed thereon,
One end portion is overlaid on the surface of the actuator, and is pulled out in a direction parallel to the surface. The individual electrode land corresponds to the plurality of individual electrode terminals, and the plurality of common electrode lands correspond to the common electrode terminal. A wiring material on which is formed,
In the ink jet recording head that joins the plurality of terminals and the plurality of lands correspondingly,
The actuator has, on its surface, a surface electrode commonly connected to each of the energy generating portions at both ends sandwiching the plurality of individual electrode terminals, and the plurality of common electrode terminals are formed on the surface electrode. Forming at intervals,
The wiring material forms the common electrode land at each position corresponding to the plurality of common electrode terminals and at a position corresponding to the surface electrode between the plurality of common electrode terminals, on each of the lands. Bump electrodes are provided,
The terminals and the lands are associated with each other, the surface electrodes between the plurality of common electrode terminals are associated with the corresponding common electrode lands, and they are joined by the bump electrodes. An ink jet recording head.   An interval between two adjacent adjacent electrodes among the plurality of common electrode terminals is set larger than an interval between other common electrode terminals, and the common electrode land is disposed at a position corresponding to the surface electrode within the larger interval. The ink jet recording head according to claim 1, wherein the ink jet recording head is formed and the corresponding two are joined by the bump electrode.   The ink jet recording head according to claim 2, wherein the large interval is provided at a plurality of locations so as to surround a center of the actuator.   4. The ink jet recording head according to claim 3, wherein the plurality of large intervals are provided symmetrically with respect to a center line of a surface having a surface electrode of the actuator.   The mark which the tool for conveying the said actuator contact | abuts in the said large space | interval of the said actuator and the location adjacent to it is formed with the same material as the said surface electrode, The Claim 2-4 An ink jet recording head according to any one of the above. The actuator is configured by laminating a plurality of sheet-like materials including a piezoelectric material, the plurality of energy generating units are configured by a plurality of portions of the piezoelectric material, and the individual electrode terminals are provided on the surface of the stacked body. The surface electrode is provided in a strip shape along a pair of opposing side edges of the surface of the laminate, and the plurality of common electrode terminals along the longitudinal direction of the strip shape on the surface electrode. The ink jet recording head according to claim 1, wherein the ink jet recording head is provided at intervals.

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