JP5576090B2 - Soldering method and apparatus - Google Patents

Soldering method and apparatus Download PDF

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JP5576090B2
JP5576090B2 JP2009246482A JP2009246482A JP5576090B2 JP 5576090 B2 JP5576090 B2 JP 5576090B2 JP 2009246482 A JP2009246482 A JP 2009246482A JP 2009246482 A JP2009246482 A JP 2009246482A JP 5576090 B2 JP5576090 B2 JP 5576090B2
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誠 権田
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黒田テクノ株式会社
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本発明は、超音波振動を用いた半田付け方法及び装置に関する。   The present invention relates to a soldering method and apparatus using ultrasonic vibration.

半田付けの対象となる部材は種々あり、そのなかでも、プリント基板などと違って、合金結合等をしないガラスやセラミック等の基材にリード線等を半田付けする場合があるが、このような部材への半田付けは、単に溶融半田を付着させても、表面に溶着させることが難しい。   There are various members to be soldered. Among them, unlike printed boards, there are cases where lead wires are soldered to a base material such as glass or ceramic that does not have an alloy bond, etc. Soldering to a member is difficult to weld to the surface even if molten solder is simply attached.

このため、振動子と、振動子からの振動が伝えられて超音波振動するチップと、チップを加熱する加熱手段とを備え、加熱され且つ超音波振動するチップの先端側を基材の表面に押付けながら半田付け作業を行う特許文献1及び2に示す半田付け装置が公知になっている。   For this reason, a vibrator, a chip that transmits vibration from the vibrator and ultrasonically vibrates, and a heating means that heats the chip are provided, and the tip of the heated and ultrasonically vibrated chip is placed on the surface of the substrate. Patent Documents 1 and 2 that perform soldering work while pressing are known.

特開2001−102610号公報JP 2001-102610 A 特開平7−204838号公報JP-A-7-204838

しかし、上記特許文献1の半田付け装置では、チップを先端側に有する鏝の内部にヒータを設けることにより加熱手段を構成しており、チップに超音波振動を伝える際の振動特性が鏝内部のヒータによって変化し、チップを円滑に超音波振動させる上で、妨げになる場合があるという課題がある。   However, in the soldering apparatus of the above-mentioned patent document 1, the heating means is configured by providing a heater inside the bag having the tip on the tip side, and the vibration characteristics when transmitting ultrasonic vibration to the chip are within the bag. There is a problem that it may be hindered when the chip is changed by the heater and the chip is ultrasonically vibrated smoothly.

一方、特許文献2の半田付け装置では、鏝の周囲にコイル状の抵抗線を巻き付けることにより構成される電気ヒータを加熱手段とし、上記導線に電気を流した際に発生するジュール熱によってチップを加熱するが、抵抗線から鏝の周囲に伝わった熱は、鏝の軸心側に伝わった後にチップ側に伝導されるため、チップ側への熱伝導が遅くなる他、鏝の表面への抵抗線の接触が良好でない場合にもチップ側への熱伝導が遅くなる。このことにより、鏝を移動させて基材上に半田付けを行う際にチップ側から基材側に移動する熱量に対して、チップ側に伝導させる熱量が不足することがあり、円滑な半田付け作業を行うことが困難な場合があるという課題がある。   On the other hand, in the soldering apparatus of Patent Document 2, an electric heater configured by winding a coiled resistance wire around a ridge is used as a heating means, and a chip is formed by Joule heat generated when electricity is passed through the conducting wire. Heat is transmitted, but the heat transferred from the resistance wire to the periphery of the cocoon is transferred to the chip side after being transmitted to the axis side of the cocoon, so the heat conduction to the chip side is slow, and the resistance to the surface of the cocoon Even when the line contact is not good, the heat conduction to the chip side becomes slow. As a result, the amount of heat conducted to the chip side may be insufficient with respect to the amount of heat that moves from the chip side to the base material side when performing soldering on the base material by moving the wrinkles, and smooth soldering There is a problem that it may be difficult to work.

本発明は、上記課題を解決し、振動子と、振動子からの振動が伝えられて超音波振動するチップと、チップを加熱する加熱手段とを備え、該チップによってガラス、セラミック、TTOマスク、その他、難半田付金属等に対して半田付けを行う際、チップを円滑に超音波振動させるとともに加熱させ、効率的に半田付け作業を行うことが可能な半田付け方法及び装置を提供することを目的とする。   The present invention solves the above-described problem, and includes a vibrator, a chip that is ultrasonically vibrated by transmission of vibrations from the vibrator, and a heating unit that heats the chip. Glass, ceramic, TTO mask, Another object is to provide a soldering method and apparatus capable of performing soldering work efficiently by smoothly ultrasonically vibrating and heating a chip when soldering to a difficult-to-solder metal or the like. Objective.

上記課題を解決するため本発明は、第1に、振動子12と、振動子12からの振動が伝えられて超音波振動するチップ7と、チップ7を加熱する加熱手段8とを備え、チップ7によって半田付け作業を行う半田付け装置であって、チップ7を導体によって構成し、電磁誘導によって起電力を生じさせることによりチップ7を発熱させるコイルを、前記加熱手段8とし、先端側に前記チップ7を有する鏝6をコイル8の内周側に挿通させ、チップ7の外周面と、コイル8の内周面との間にクリアランスを形成することにより、チップ7とコイル8とを非接触な状態とし、該非接触状態で前記チップ7を超音波振動させることを特徴としている。   In order to solve the above problems, the present invention firstly includes a vibrator 12, a chip 7 that is ultrasonically vibrated by transmission of vibration from the vibrator 12, and a heating means 8 that heats the chip 7. 7 is a soldering apparatus for performing soldering work, and the coil 7 is made of a conductor, and a coil for generating heat by generating electromotive force by electromagnetic induction is used as the heating means 8, and the coil is disposed on the tip side. By inserting the flange 6 having the chip 7 into the inner peripheral side of the coil 8 and forming a clearance between the outer peripheral surface of the chip 7 and the inner peripheral surface of the coil 8, the chip 7 and the coil 8 are not contacted with each other. The chip 7 is ultrasonically vibrated in the non-contact state.

第2に、基板1の配線方向にスライド移動する可動フレーム4を設け、前記鏝6を、超音波振動可能に、該可動フレーム4に支持し、前記コイル8を可動フレーム4側に固定することにより、上記鏝6が可動フレーム4及びコイル8に対して超音波振動することを特徴としている。   Secondly, a movable frame 4 that slides in the wiring direction of the substrate 1 is provided, the collar 6 is supported by the movable frame 4 so as to be capable of ultrasonic vibration, and the coil 8 is fixed to the movable frame 4 side. Thus, the cage 6 is ultrasonically vibrated with respect to the movable frame 4 and the coil 8.

第3に、前記鏝6は、基板1の半田付け作業時における可動フレーム4の移動方向に傾斜し、前記チップ7の先端面が、基板1に面接触するように鏝6の軸心に対して傾斜したことを特徴としている。   Third, the flange 6 is inclined in the moving direction of the movable frame 4 during the soldering operation of the substrate 1, and the tip surface of the chip 7 is in contact with the substrate 1 with respect to the axis of the flange 6. It is characterized by being inclined.

第4に、チップ側に半田コーティングされたリード線21又は線状の半田11を繰出す繰出し手段9を備えたことを特徴としている。   The fourth feature is that a feeding means 9 for feeding the lead wire 21 or the linear solder 11 coated with solder on the chip side is provided.

第5に、チップ7の少なくとも先端側が、モリブデン又はモリブデン合金によって構成されていることを特徴としている。 Fifth, at least the tip side of the chip 7 is made of molybdenum or a molybdenum alloy .

第6に、振動子12からの振動により超音波振動されるとともに加熱手段8により加熱されるチップ7によって半田付け作業を行う半田付け方法であって、導体によってチップ7を構成し、電磁誘導によって起電力を生じさせることにより該チップ7を発熱させるコイルによって前記加熱手段8を構成し、先端側に前記チップ7を有する鏝6を、コイル8の内周側に挿通させ、チップ7の外周面とコイル8の内周面との間にクリアランスを形成することにより、チップ7とコイル8とを非接触な状態とし、該非接触状態で前記チップ7を超音波振動させることを特徴としている。 Sixth, there is a soldering method in which a soldering operation is performed by a chip 7 that is ultrasonically vibrated by the vibration from the vibrator 12 and heated by the heating means 8, and the chip 7 is constituted by a conductor, and by electromagnetic induction The heating means 8 is configured by a coil that generates heat by generating an electromotive force, and a flange 6 having the tip 7 on the tip side is inserted into the inner peripheral side of the coil 8. By forming a clearance between the coil 7 and the inner peripheral surface of the coil 8, the chip 7 and the coil 8 are brought into a non-contact state, and the chip 7 is ultrasonically vibrated in the non-contact state.

本発明によれば、導体によりなるチップ自体が電磁誘導によって発熱するため、チップの振動特性を殆ど変化させること無く、チップ全体を迅速且つ効率的に加熱させることが可能になるため、半田付け作業をよりスムーズに行うことができるという効果がある。   According to the present invention, since the chip itself made of a conductor generates heat by electromagnetic induction, it becomes possible to quickly and efficiently heat the entire chip without substantially changing the vibration characteristics of the chip. There is an effect that can be performed more smoothly.

また、コイルによって電磁誘導手段を構成し、先端側に前記チップを有する鏝をコイルの内周側に挿通させた状態で、該チップを超音波振動させれば、大きな起電力によってより迅速にチップを加熱することが可能であるとともに、コイルの内周側のスペースを利用して鏝を配置するため、全体をコンパクトにすることができるという効果がある。   In addition, if the electromagnetic induction means is constituted by a coil and the tip having the tip on the tip side is inserted into the inner peripheral side of the coil and the tip is vibrated ultrasonically, the tip can be more quickly generated by a large electromotive force. Can be heated, and the scissors are arranged using the space on the inner peripheral side of the coil, so that the entire structure can be made compact.

さらに、コイルと接触しないように該コイルの内周側に鏝を挿通させれば、チップの超音波振動によって、加熱手段を構成する部材が破損等することが防止されるとともに、加熱手段を構成する部材をチップ側に取付ける手間が無くなり、製造コストを低く抑えることも可能になる。   Furthermore, if a scissors is inserted into the inner peripheral side of the coil so as not to come into contact with the coil, the ultrasonic vibration of the chip prevents the member constituting the heating means from being damaged, and the heating means is configured. This eliminates the trouble of mounting the member to be mounted on the chip side, and makes it possible to keep the manufacturing cost low.

なお、チップの少なくとも先端側を高い熱伝率を有する導体、具体的にはモリブデン又はモリブデン合金によって構成すれば、チップの耐摩耗性や熱伝導効率が向上するとともに、チップをより円滑に超音波振動させることが可能になるという効果がある。 Incidentally, a conductor having at least tip end side with high heat transfer rate of the chip, be constructed specifically by molybdenum or molybdenum alloy, thereby improving the efficiency of the wear resistance and thermal conductivity of the chip, the chip more smoothly Ultra There is an effect that the sound wave can be vibrated.

本発明を適用した半田付け装置の構成を模式的に示す側面図である。It is a side view which shows typically the structure of the soldering apparatus to which this invention is applied. チップ及び加熱手段の構成を示す半田付け装置の要部拡大図である。It is a principal part enlarged view of the soldering apparatus which shows the structure of a chip | tip and a heating means. 他の実施例を示す鏝の要部側面図である。It is a principal part side view of the bag which shows another Example.

以下、図示する例に基づき本発明の実施形態について説明する。
図1は、本発明を適用した半田付け装置の構成を模式的に示す側面図であり、図2は、チップ及び加熱手段の構成を示す半田付け装置の要部拡大図である。図示する半田付け装置は、基板(基材)1を載置するとともに固定フレーム2の一部を構成する載置台3と、載置台3上の基板1に対して配線方向(前後方向)にスライド移動する可動フレーム4と、可動フレーム4に上下動可能に支持された上下方向の鏝6と、鏝6の先端部となる下端部に設けられたチップ(鏝先)7側を加熱する加熱手段8と、チップ7側に線状の半田(糸半田)11を繰り出す繰出し装置(繰出し手段)9とを備えている。
Hereinafter, embodiments of the present invention will be described based on illustrated examples.
FIG. 1 is a side view schematically showing a configuration of a soldering apparatus to which the present invention is applied, and FIG. 2 is an enlarged view of a main part of the soldering apparatus showing a configuration of a chip and heating means. The illustrated soldering apparatus places a substrate (base material) 1 and slides in a wiring direction (front-rear direction) with respect to a mounting table 3 constituting a part of a fixed frame 2 and the substrate 1 on the mounting table 3. Heating means for heating the movable frame 4 that moves, the vertical ridge 6 that is supported by the movable frame 4 so as to be movable up and down, and the tip (tip) 7 side provided at the lower end that is the tip of the ridge 6 8 and a feeding device (feeding means) 9 for feeding linear solder (thread solder) 11 to the chip 7 side.

上記基板1は、透明電力として用いられるITO(酸化インジウムすず)、ガラス、セラミック、酸化膜又は難ハンダ付金属等の無機材料からなり、平面視方形状に成形されている。   The substrate 1 is made of an inorganic material such as ITO (indium tin oxide), glass, ceramic, oxide film, or a metal with difficulty soldering used as transparent power, and is formed in a shape in a plan view.

上記鏝6は、先端側の上記チップ7と、基端部側の振動子12と、基端が振動子12に一体的に連接されるとともに先端がチップ7に一体的に連接される上下方向に延びる円柱状のホーン13とを備えており、可動フレーム4と一体的に上記配線方向に移動するとともに、可動フレーム4に対して上下動するように構成されている。   The flange 6 includes the tip 7 on the distal end side, the vibrator 12 on the proximal end side, and the vertical direction in which the proximal end is integrally connected to the vibrator 12 and the distal end is integrally connected to the chip 7. And a column-shaped horn 13 that extends in the direction of the wiring, and moves in the wiring direction integrally with the movable frame 4 and moves up and down with respect to the movable frame 4.

振動子12は、上下方向の円柱状に形成され、中途部にピエゾ等の電歪素子12aを有し、超音波発振器(図示しない)から発生させた高周波電力によって超音波振動するように構成されている。   The vibrator 12 is formed in a cylindrical shape in the vertical direction, has an electrostrictive element 12a such as a piezo in the middle, and is configured to vibrate ultrasonically by high-frequency power generated from an ultrasonic oscillator (not shown). ing.

ホーン13は、振動子12からの超音波振動を、振動子12側箇所から中途部を介してチップ7側箇所に伝播させることにより、チップ7に伝えるように構成されており、振動子12側箇所は、振動子12と略同一径の基端から先端側に向かって径が小さくなるテーパ状に形成されて超音波振動の振幅を増幅させる増幅部16となり、中途部及びチップ7側箇所は、増幅部16の最小径である先端径と略同一の径を有する円柱状に形成された伝播部17となる。   The horn 13 is configured to transmit the ultrasonic vibration from the vibrator 12 to the chip 7 side by propagating from the vibrator 12 side part to the chip 7 side part through the midway part. The location is an amplifying portion 16 that is formed in a tapered shape with a diameter that decreases from the proximal end to the distal end side, which is substantially the same diameter as the transducer 12, and amplifies the amplitude of the ultrasonic vibration. The propagation part 17 is formed in a cylindrical shape having a diameter substantially the same as the tip diameter, which is the minimum diameter of the amplification part 16.

チップ7は、振動子12の径よりは小さく且つホーン13の伝播部16の径よりは大きい径を有した上下方向の円柱状に形成されており、ホーン13の伝播部17とはR面6aによって滑らかに連接されている。   The chip 7 is formed in a vertical cylindrical shape having a diameter smaller than the diameter of the vibrator 12 and larger than the diameter of the propagation portion 16 of the horn 13, and the propagation surface 17 of the horn 13 is the R surface 6 a. Are connected smoothly.

上記形状の鏝6の内、少なくともホーン13及びチップ7は導体である鉄や銅から構成されており、特に、チップ7は少なくとも先端部7aがモリブデン(Mo)やモリブデン合金等の高い熱伝率を有する導体によって構成されている。特に、モリブデンは、耐摩耗性も良好で、熱伝導の効率も高く、導体としても優れた特性を有し、超音波振動特性も良好な物質である。なお、チップ7全体をモリブデンやモリブデン合金等によって構成してもよいし、チップ7の表面をモリブデンやモリブデン合金等によりコーティングしてもよい。 Among the shapes trowel of 6, at least the horn 13 and the chip 7 is constituted by iron or copper which is a conductor, in particular, the chip 7 is at least the tip portion 7a is higher heat transfer guide of such as molybdenum (Mo) or a molybdenum alloy It is comprised by the conductor which has a rate. In particular, molybdenum, wear resistance was good, the efficiency of thermal conduction is high, has excellent characteristics as a conductor, an ultrasonic vibration properties are also good materials. The entire chip 7 may be made of molybdenum, molybdenum alloy, or the like, or the surface of the chip 7 may be coated with molybdenum, molybdenum alloy, or the like.

上記繰出し装置9は、糸半田11が巻き付けられるリールから構成され、リール9から繰出された糸半田11は、ガイド部材であるガイド筒18の内周側に挿通され、該ガイド筒18によって上述のチップ7と基板1との間にスペースに案内される。ちなみに、リール9が回転駆動されることにより、リール9に巻き付けられた糸半田11が順次、ガイド筒18側に繰出されていく。   The feeding device 9 is composed of a reel around which the thread solder 11 is wound, and the thread solder 11 fed from the reel 9 is inserted into the inner peripheral side of the guide cylinder 18 that is a guide member. A space is guided between the chip 7 and the substrate 1. Incidentally, when the reel 9 is rotationally driven, the thread solder 11 wound around the reel 9 is sequentially fed out to the guide tube 18 side.

上記加熱手段8は、上下方向に延びる円筒状のコイルからなり、該コイル8は形状が略固定され弾性変形しないように構成されている。このコイル8を構成する線状の導体8aを、支持ブラケット19を介して、可動フレーム4側に取付けることにより、コイル8が可動フレーム4側に支持固定されている。ちなみに、鏝6を可動フレーム4に支持する部材に、この導体8aを支持して、コイル8を鏝6と一体で上下動するように構成してもよい。   The heating means 8 is composed of a cylindrical coil extending in the vertical direction, and the coil 8 is substantially fixed in shape and is not elastically deformed. The coil 8 is supported and fixed to the movable frame 4 side by attaching the linear conductor 8 a constituting the coil 8 to the movable frame 4 side via the support bracket 19. Incidentally, the conductor 8 a may be supported on a member that supports the flange 6 on the movable frame 4, and the coil 8 may be moved up and down integrally with the flange 6.

上述の鏝6は、上方側から該コイル8内周側に挿通されており、半田線11をチップ7の先端によって基板1に押圧した状態で該チップを超音波振動させる半田付け作業時には、チップ7の先端側を除く殆どの部分がコイル8の内周側に位置し、コイル8の内周面と、鏝6のチップ7外周面とは、非接触な状態で近接している。   The above-mentioned flange 6 is inserted from above into the inner peripheral side of the coil 8, and during the soldering operation in which the chip is ultrasonically vibrated while the solder wire 11 is pressed against the substrate 1 by the tip of the chip 7, 7 is located on the inner peripheral side of the coil 8, and the inner peripheral surface of the coil 8 and the outer peripheral surface of the tip 7 of the flange 6 are close to each other in a non-contact state.

そして、コイル8に交流電圧を印加すると、コイル8の内周側の磁界が経時的に変化して導体から構成されるチップ7及びホーン13等に起電力が生じる。この起電力によりチップ7内やホーン13内に過電流が生じ、チップ7自体がジュール熱によって発熱する。すなわち、コイル8は電磁誘導手段を構成し、この電磁誘導手段8がチップ7を誘導加熱する加熱手段となる。   When an AC voltage is applied to the coil 8, the magnetic field on the inner peripheral side of the coil 8 changes with time, and an electromotive force is generated in the chip 7, the horn 13, and the like composed of conductors. Due to this electromotive force, an overcurrent is generated in the chip 7 or the horn 13, and the chip 7 itself generates heat due to Joule heat. That is, the coil 8 constitutes an electromagnetic induction means, and this electromagnetic induction means 8 serves as a heating means for induction heating the chip 7.

上記構成の半田付け装置を用いた半田付け方法について説明すると、載置台3上の基板1から離間するようにチップ7を上方側に移動させた後、可動フレーム4をスライド移動させチップ7の先端を基板1の半田付け箇所に位置させる。続いて、繰出し装置9によって、チップ7と基板1の間に糸半田11を繰出し、この繰出された糸半田11をチップ11の先端によって基板1に押圧し、チップ7をコイル8による誘導加熱によって発熱させるとともに振動子12によって超音波振動させることにより、糸半田11を基板1上に溶着させる。   The soldering method using the soldering apparatus having the above configuration will be described. After the chip 7 is moved upward so as to be separated from the substrate 1 on the mounting table 3, the movable frame 4 is slid to move the tip of the chip 7. Is positioned at a soldering position of the substrate 1. Subsequently, the feeding device 9 feeds the thread solder 11 between the chip 7 and the substrate 1, presses the fed thread solder 11 against the substrate 1 by the tip of the chip 11, and the chip 7 is induced by induction heating by the coil 8. The yarn solder 11 is welded onto the substrate 1 by generating heat and oscillating ultrasonically with the vibrator 12.

そして、可動フレーム4をスライド移動駆動させ、鏝6を配線方向に移動させることにより、基板1上に配線方向に延びる帯状の半田を形成する。ちなみに、この基板1の帯状半田の上にリード線(導線)を載置して加熱することにより、基板1へのリード線の半田付けを行う。   Then, the movable frame 4 is slid and driven, and the collar 6 is moved in the wiring direction, whereby a strip-like solder extending in the wiring direction is formed on the substrate 1. Incidentally, a lead wire (conductive wire) is placed on the belt-like solder of the substrate 1 and heated to solder the lead wire to the substrate 1.

以上のように構成される本半田付け装置によれば、電磁誘導による起電力によって、チップ7自体を発熱させることにより、チップ7の温度を偏りなく迅速に上昇させることができるため、チップ7の加熱不足によって、半田付け作業の効率が低下することが防止される。また、チップ7の周面はコイル8によって覆われるため、チップ7側からの放熱が抑制され、より効率的にチップ7を加熱することが可能になる。   According to the present soldering apparatus configured as described above, the temperature of the chip 7 can be quickly raised without unevenness by causing the chip 7 itself to generate heat by electromotive force caused by electromagnetic induction. It is prevented that the efficiency of the soldering operation is reduced due to insufficient heating. Further, since the peripheral surface of the chip 7 is covered with the coil 8, heat radiation from the chip 7 side is suppressed, and the chip 7 can be heated more efficiently.

なお、繰出し装置9から繰出して基板1に溶着させる溶着部材を、糸半田11とする例につき説明したが、糸半田11に代えて、表面に半田がコーティングされたリード線(導線)21を用いてもよい。この場合に上述の方法を実施すると、基板1上に配線方向に沿ってリード線21が半田付けされる。ちなみに、この場合、繰出されて基板1からはみ出たリード線21の先端部21aを挟持して保持する保持部材22を、固定フレーム側に固着された取付ブラケット23に設けてもよい。   The welding member fed from the feeding device 9 and welded to the substrate 1 has been described as the thread solder 11. However, instead of the thread solder 11, a lead wire (conductive wire) 21 whose surface is coated with solder is used. May be. In this case, when the above-described method is performed, the lead wire 21 is soldered on the substrate 1 along the wiring direction. Incidentally, in this case, a holding member 22 that holds and holds the distal end portion 21a of the lead wire 21 that is extended and protrudes from the substrate 1 may be provided on the mounting bracket 23 fixed to the fixed frame side.

この保持部材22によってリード線21の先端部21aを挟持させれば、可動フレーム4を保持部材22から離間する側にスライド移動させることにより、繰出し装置9を回転駆動させること無く、リード線21を繰出し装置9から繰出すことが可能になる。   If the leading end portion 21a of the lead wire 21 is held by the holding member 22, the lead wire 21 can be moved without causing the feeding device 9 to rotate by sliding the movable frame 4 away from the holding member 22. It becomes possible to feed out from the feeding device 9.

次に、図3に基づき本発明の別実施形態について、上述の例と異なる点を説明する。
図3は、別実施例を示す鏝の要部側面図である。図示する鏝6は、先端部から基端部に向かって半田付け作業時における可動フレーム4の移動方向側に傾斜している。これに加えて、チップ7の先端面が基板1側に面接触するように、鏝6の軸心に対して傾斜しており、これによって、半田付け作業時における鏝6の移動抵抗が低減される。
Next, points different from the above-described example will be described with reference to FIG.
FIG. 3 is a side view of an essential part of a bag showing another embodiment. The trough 6 illustrated inclines toward the moving direction side of the movable frame 4 during the soldering operation from the distal end portion toward the proximal end portion. In addition to this, the tip surface of the chip 7 is inclined with respect to the axis of the flange 6 so as to come into surface contact with the substrate 1, thereby reducing the movement resistance of the flange 6 during the soldering operation. The

1 基板(基材)
4 可動フレーム
6 鏝
7 チップ(鏝先)
8 コイル(加熱手段,電磁誘導手段)
9 繰出し装置(繰出し手段,リール)
11 糸半田(線状の半田)
12 振動子
21 リード線(導線)
1 Substrate (base material)
4 Movable frame 6 7 7 Tip (tip)
8 Coils (heating means, electromagnetic induction means)
9 Feeding device (feeding means, reel)
11 Yarn solder (Linear solder)
12 vibrator 21 lead wire (conductive wire)

Claims (6)

振動子(12)と、振動子(12)からの振動が伝えられて超音波振動するチップ(7)と、チップ(7)を加熱する加熱手段(8)とを備え、チップ(7)によって半田付け作業を行う半田付け装置であって、チップ(7)を導体によって構成し、電磁誘導によって起電力を生じさせることによりチップ(7)を発熱させるコイルを、前記加熱手段(8)とし、先端側に前記チップ(7)を有する鏝(6)をコイル(8)の内周側に挿通させ、チップ(7)の外周面と、コイル(8)の内周面との間にクリアランスを形成することにより、チップ(7)とコイル(8)とを非接触な状態とし、該非接触状態で前記チップ(7)を超音波振動させる半田付け装置。   An oscillator (12), a chip (7) that is ultrasonically vibrated by transmission of vibration from the oscillator (12), and a heating means (8) that heats the chip (7) are provided, and the chip (7) A soldering apparatus for performing a soldering operation, wherein the coil (7) is made of a conductor, and a coil that generates heat by generating electromotive force by electromagnetic induction is the heating means (8), A flange (6) having the tip (7) on the tip side is inserted into the inner peripheral side of the coil (8), and a clearance is provided between the outer peripheral surface of the tip (7) and the inner peripheral surface of the coil (8). A soldering device for forming the chip (7) and the coil (8) in a non-contact state by forming and ultrasonically vibrating the chip (7) in the non-contact state. 基板(1)の配線方向にスライド移動する可動フレーム(4)を設け、前記鏝(6)を、超音波振動可能に、該可動フレーム(4)に支持し、前記コイル(8)を可動フレーム(4)側に固定することにより、上記鏝(6)が可動フレーム(4)及びコイル(8)に対して超音波振動する請求項1の半田付け装置。   A movable frame (4) slidably moved in the wiring direction of the substrate (1) is provided, the hook (6) is supported on the movable frame (4) so as to be capable of ultrasonic vibration, and the coil (8) is movable frame. The soldering device according to claim 1, wherein the flange (6) ultrasonically vibrates with respect to the movable frame (4) and the coil (8) by being fixed to the (4) side. 前記鏝(6)は、基板(1)の半田付け作業時における可動フレーム(4)の移動方向に傾斜し、前記チップ(7)の先端面が、基板(1)に面接触するように鏝(6)の軸心に対して傾斜した請求項2の半田付け装置。   The flange (6) is inclined in the moving direction of the movable frame (4) during the soldering operation of the substrate (1), and the tip surface of the chip (7) is in surface contact with the substrate (1). The soldering apparatus according to claim 2, wherein the soldering apparatus is inclined with respect to the axis of (6). チップ側に半田コーティングされたリード線(21)又は線状の半田(11)を繰出す繰出し手段(9)を備えた請求項1,2又は3の半田付け装置。   4. The soldering apparatus according to claim 1, further comprising feeding means (9) for feeding out a lead wire (21) or a linear solder (11) coated with solder on the chip side. チップ(7)の少なくとも先端側が、モリブデン又はモリブデン合金によって構成されている請求項1,2,3又は4の半田付け装置。 The soldering device according to claim 1, 2, 3, or 4, wherein at least the tip side of the chip (7) is made of molybdenum or a molybdenum alloy . 振動子(12)からの振動により超音波振動されるとともに加熱手段(8)により加熱されるチップ(7)によって半田付け作業を行う半田付け方法であって、導体によってチップ(7)を構成し、電磁誘導によって起電力を生じさせることにより該チップ(7)を発熱させるコイルによって前記加熱手段(8)を構成し、先端側に前記チップ(7)を有する鏝(6)を、コイル(8)の内周側に挿通させ、チップ(7)の外周面とコイル(8)の内周面との間にクリアランスを形成することにより、チップ(7)とコイル(8)とを非接触な状態とし、該非接触状態で前記チップ(7)を超音波振動させる半田付け方法。   A soldering method in which a soldering operation is performed by a chip (7) that is ultrasonically vibrated by vibration from a vibrator (12) and heated by a heating means (8), and the chip (7) is constituted by a conductor. The heating means (8) is constituted by a coil that generates heat by electromagnetic induction to generate heat from the tip (7), and the flange (6) having the tip (7) on the tip side is provided with a coil (8). ) Is inserted into the inner peripheral side of the chip (7) and a clearance is formed between the outer peripheral surface of the chip (7) and the inner peripheral surface of the coil (8), so that the chip (7) and the coil (8) are not contacted with each other. A soldering method in which the chip (7) is ultrasonically vibrated in a non-contact state.
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