JP5565986B2 - X-ray fluorescence analyzer - Google Patents

Description

  The present invention relates to a fluorescent X-ray analyzer for substances. In particular, the present invention relates to a fluorescent X-ray analysis apparatus for environmentally hazardous substances mixed in parts used in electrical and electronic equipment composed of various compositions.

  In recent years, the danger of environmentally hazardous substances contained in components constituting electric and electronic equipment has been pointed out, and the number of countries or states that limit the content of these environmentally hazardous substances according to laws and regulations is increasing. For example, since 1996, EU countries have prohibited the use of parts containing 1000 ppm or more of cadmium (Cd), lead, mercury, specific brominated flame retardants, and hexavalent chromium (Cd is 100 ppm) according to the RoHS directive. Similar laws are being enforced in China and the United States. For this reason, it is indispensable for electrical and electronic equipment manufacturers to confirm that each part does not contain environmentally hazardous substances that exceed regulatory limits.

  As a method for measuring the element content, it is common to use a fluorescent X-ray analyzer that has a sensitivity of several tens of ppm and can be measured in a relatively short time without being destroyed.

  X-ray fluorescence analysis is to analyze the element content of a measurement object by irradiating the measurement object with X-rays and measuring the fluorescent X-ray emitted from the measurement object. In an analysis apparatus using this type of analysis method, a procedure for quantifying the concentration of an element contained in an object to be measured is generally well known. First, the measurement time of fluorescent X-rays is set and measurement is started. After the set time elapses, the concentration of contained elements is calculated based on the measurement results. Then, the result is displayed. On the other hand, for example, as disclosed in Patent Document 1, the measurement end point is not ended only at the set time, but the variation in the actual measurement value of the fluorescent X-ray is less than the measurement accuracy set in advance. There is also a method in which the measurement is terminated at a point in time, the concentration is calculated, and the result is displayed.

International Publication No. 2005/106440 Pamphlet

  The result measured by the above method is attached to the device with the name and lot number of the device to be measured, an image that displays the setting status of the device to be measured, measurement conditions, measurement data, and other additional information. Is stored in the data storage part.

  In order to confirm that each component used does not contain environmentally hazardous substances that exceed the regulation value, electrical and electronic component manufacturers perform regular measurements by sampling, etc., even if they have measured results. There is a need to do. However, in a composite part composed of two or more kinds of parts represented by a plated product or a chip part, the measurement result may differ depending on the measurement conditions at the time of measurement and how the parts are set. Therefore, it is necessary to perform change point management indicating abnormality in manufacturing by making these conditions the same as the previous measurement and arranging the periodic measurement results in time series.

  However, in order to perform the above management, it is difficult with the current X-ray fluorescence analyzer. For example, when a new delivered part is to be measured, it is necessary to output the past measurement conditions and measurement images to paper or the like and to set the measurement conditions and parts while checking the information. In addition, in order to confirm a plurality of past measurement results, reference data must be extracted from an enormous amount of paper information. For this reason, there is a problem that it takes a very long time to set the measurement conditions for one part and to set the part.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a fluorescent X-ray analyzer capable of performing easy change point management by comparison with past measurement information.

  The X-ray fluorescence analyzer of the present invention irradiates a measurement object with X-rays and measures the fluorescent X-rays generated from the measurement object, thereby analyzing the constituent elements of the measurement object. An apparatus for inputting specific information for specifying an object to be measured, an imaging unit for acquiring a measurement site image of the object to be measured, and at least the measurement object after measurement of fluorescent X-rays A display unit that displays an analysis result, and a database that accumulates past measurement information associated with the specific information, and the measurement information includes a measurement site image of the object to be measured and an analysis result, At the time of setting the measurement conditions for fluorescent X-rays, the display unit inputs at least the measurement site image of the measurement object obtained by the imaging unit and the measurement information stored in the database from the input unit. Measurement corresponding to specific information A measurement site image of the measurement object included in a report at the time of past measurement can be displayed at the same time, and the input unit includes a plurality of specific information of the measurement object from at least an upper hierarchy and a lower hierarchy. The database can be classified and input by a plurality of hierarchies, and the database can store the plurality of specific information classified by the plurality of hierarchies.

  Further, in the fluorescent X-ray analysis apparatus of the present invention, when the specific information is input from the input unit, the display unit lists a plurality of past measurement site images of the object to be measured corresponding to the specific information. It can be displayed.

  Furthermore, the fluorescent X-ray analysis apparatus of the present invention is characterized in that the display unit can display the past measurement site images of the objects to be measured displayed in a list in order of the measurement sites with the oldest measurement date and time. To do.

  Further, in the fluorescent X-ray analyzer of the present invention, the measurement information includes a measurement required time at the time of measurement corresponding to the object to be measured, and the display unit performs the past measurement corresponding to the object to be measured. The remaining measurement time obtained by subtracting the measurement elapsed time at the time of measurement from the required time can be displayed at the time of measurement.

  Further, in the fluorescent X-ray analyzer of the present invention, the measurement information further includes information on measurement conditions of the object to be measured, and the display unit includes the specific information when setting the measurement conditions of fluorescent X-rays. Of the measurement information associated and stored in the database, the measurement conditions at the time of past measurement of the object to be measured are further displayed.

  Further, in the fluorescent X-ray analysis apparatus of the present invention, the display unit, after measurement of fluorescent X-rays, of the measurement object among the measurement information stored in the database in association with the specific information. The analysis results at the time of past measurement are simultaneously displayed on the screen.

  The fluorescent X-ray analysis apparatus of the present invention further includes a determination unit that determines whether or not the content of a specific substance out of the constituent elements of the object to be measured exceeds a predetermined threshold, and the analysis result is The determination unit includes a determination result, the display unit further displays the determination result after measurement of fluorescent X-rays, and the input unit is capable of editing the determination result. .

  Furthermore, in the fluorescent X-ray analysis apparatus of the present invention, the input unit can input the reason for the editing during the editing, and the display unit displays the determination result before the editing and the reason for the editing. It can be displayed.

  In the fluorescent X-ray analysis apparatus according to the present invention, the specific substance is an environmentally hazardous substance regulated by a RoHS directive.

  According to the X-ray fluorescence analyzer of the present invention, it is possible to provide an X-ray fluorescence analyzer capable of performing easy change point management by comparing with past measurement result information.

It is a schematic block diagram of the fluorescent X-ray analyzer which concerns on the reference technique 1 of this invention. It is a flowchart for demonstrating operation | movement of the fluorescent X-ray-analysis apparatus which concerns on the reference technique 1 of this invention. It is a figure which shows the display part at the time of the measurement condition setting of the fluorescent X-ray-analysis apparatus which concerns on the reference technique 1 of this invention. It is a figure which shows the display part after the measurement of the fluorescent X ray analyzer which concerns on the reference technique 1 of this invention. It is a schematic block diagram of the fluorescent X-ray-analysis apparatus which concerns on the reference technique 2 of this invention. It is a flowchart for demonstrating operation | movement of the fluorescent-X-ray-analysis apparatus which concerns on the reference technique 2 of this invention. It is a figure which shows the display part after the measurement of the fluorescent X ray analyzer which concerns on the reference technique 2 of this invention. It is a schematic block diagram of the fluorescent X-ray-analysis apparatus which concerns on the reference technique 3 of this invention. It is a figure which shows the display part after the measurement of the fluorescent X-ray-analysis apparatus which concerns on the reference technique 3 of this invention. It is a flowchart for demonstrating operation | movement (setting preparation of specific information) of the fluorescent X-ray analyzer which concerns on Embodiment 1 of this invention. It is a flowchart for demonstrating operation | movement (specific information input at the time of a measurement) of the fluorescent X-ray analyzer which concerns on Embodiment 1 of this invention. In the fluorescent X-ray analyzer which concerns on Embodiment 1 of this invention, it is a figure which shows the input column display of the input item of specific information. It is a flowchart for demonstrating operation | movement (selection of specific information) of the fluorescent X-ray-analysis apparatus which concerns on Embodiment 2 of this invention. In the fluorescent X-ray analyzer which concerns on Embodiment 2 of this invention, it is a figure which shows a list display part (list display means). It is a perspective view which shows a to-be-measured object in the fluorescent X-ray-analysis apparatus which concerns on Embodiment 2 of this invention. In the fluorescent X-ray analysis apparatus which concerns on Embodiment 2 of this invention, it is explanatory drawing which shows the display change of a list display part (list display means). It is a figure which shows the example of a display of estimated remaining time in the fluorescent X ray analysis apparatus which concerns on Embodiment 3 of this invention. It is a flowchart for demonstrating operation | movement (display of estimated remaining time) of the fluorescent X-ray analyzer which concerns on Embodiment 3 of this invention. It is a figure which shows the example of the information which accumulated the past measurement information in the fluorescent X-ray-analysis apparatus which concerns on Embodiment 4 of this invention. In the fluorescent X-ray analyzer which concerns on Embodiment 4 of this invention, it is a figure which shows the example of a display of an analysis result. In the fluorescent X-ray analyzer which concerns on Embodiment 4 of this invention, it is a figure which shows the example of the information which accumulated the past measurement information, and edit history information.

Specific embodiments of the present invention will be described below with reference to the drawings.
In addition, what attached | subjected the same code | symbol in drawing may abbreviate | omit description. Further, the drawings schematically show each component for easy understanding. Therefore, the shape and the like may not be accurately displayed.

(Reference technology 1)
First, the configuration of the fluorescent X-ray analyzer 200 will be described.
FIG. 1 is a schematic configuration diagram of a fluorescent X-ray analyzer 200 according to Reference Technique 1 of the present invention.

  In FIG. 1, an X-ray fluorescence analyzer 200 includes an input unit 201 for inputting data, a calculation unit 202 for performing various calculations, an X-ray generation unit 203 for irradiating a measurement object 205 with a primary X-ray 204, and a measurement object. A detection unit 207 that detects secondary X-rays (fluorescence X-rays) 206 from 205, a display unit 208 that displays various data, a database 209, and an imaging unit 210 that images a measurement site of the object 205 to be measured. Yes.

  The input unit 201 includes a keyboard or the like that allows the measurer to input specific information and measurement conditions of the object to be measured 205. The identification information is information for identifying the object to be measured 205 such as the name of the part to be measured and the product number.

  The calculation unit 202 includes various signal processing circuits. The calculation unit 202 sets the irradiation time in the X-ray generation unit 203 based on the specific information input by the input 201, the measurement conditions, or the like, or based on the spectrum of the secondary X-ray 206 detected by the detection unit 207. And an arithmetic function for performing quantitative analysis of each component. Further, the calculation unit 202 has a determination unit 211. The determination unit 211 determines whether or not the content of the specific substance in each component exceeds a predetermined threshold with respect to the analysis result of the object to be measured 205. As specific substances, this reference technology targets environmentally hazardous substances regulated by the RoHS directive. The specific substance can be appropriately changed and can be registered and stored.

  The display unit 208 is composed of a liquid crystal display, for example. When setting the measurement conditions, the display unit 208 displays, for example, an input screen for measurement conditions, a measurement site image of the object 205 to be measured, and the like. In addition, after the measurement, an analysis result or the like by the calculation unit 202 is displayed.

  The database 209 is composed of, for example, a hard disk. The database 209 stores measurement information such as analysis results by the calculation unit 202 and measurement conditions (also referred to as measurement recipes). The measurement conditions include the irradiation time and irradiation intensity of the primary X-ray 204, the measurement time of the secondary X-ray 206, and the like.

  The imaging unit 210 includes an imaging lens, an imaging element, and the like. The imaging unit 210 captures an image of the measurement site of the DUT 205 placed on the sample table (not shown) and displays the image on the display unit 208. The imaging unit 210 can display the measurement site image of the device under test 205 on the display unit 208 in real time. Further, after determining the measurement site, the imaging unit 210 can acquire a measurement site image and save it in the database 209 as one piece of measurement information.

Measurement information such as analysis results, measurement conditions, and measurement site images is stored in the database 209 in association with the input specific information.
The configuration of the fluorescent X-ray analyzer 200 has been described above.

  Next, the operation of the fluorescent X-ray analyzer 200 will be described.

  FIG. 2 is a flowchart for explaining the operation of the fluorescent X-ray analysis apparatus 200 according to Reference Technique 1.

First, in step S <b> 1, the measurer inputs specific information that is the product number or name of the part to be measured from the input unit 201.
In step S2, the past measurement information in the database 209 is searched based on the specific information input in step S1.
In step S3, the corresponding measurement information for the past three times is displayed on the display unit 208. The measurement information displayed here is a measurement recipe, a measurement site image of the object 205 to be measured, and the like.

  In step S4, the measurer sets the object 205 to be measured on the sample table. Note that the object to be measured 205 may be set in advance. In step S <b> 4, a measurement site image of the object 205 to be measured set on the sample stage is captured by the imaging unit 210 and displayed on the display unit 208 in real time. FIG. 3 is a diagram showing the display unit 208 when setting the measurement conditions for fluorescent X-rays. As shown in FIG. 3, the display unit 208 simultaneously displays past measurement site images of the object 205 to be measured displayed in step S3. Thus, the measurer can set the measured object 205 in the same position and in the same direction as when the measurement object 205 was measured in the past while referring to the past measurement site images.

  In step S5, a measurement recipe corresponding to the object to be measured 205 is selected from the measurement recipes stored in the database 209. At this time, based on the input specific information, the measurement recipe for the previous measurement is initially selected.

  In step S6, fluorescent X-ray analysis is performed on the object 205 to be measured. Specifically, first, according to the selected measurement recipe, the X-ray generation unit 203 irradiates the DUT 205 with X-rays for a predetermined time. Then, the detection unit 207 detects fluorescent X-rays emitted from the object 205 to be measured. The computing unit 202 quantifies the concentration of the element contained in the measured object 205 based on the detected fluorescent X-ray spectrum or the like.

In step S7, the analysis result is displayed on the display unit 208. FIG. 4 is a diagram showing the display unit 208 after measurement of fluorescent X-rays. As shown in FIG. 4, the displayed analysis result is the content for each specific substance contained in the DUT 205 and the determination result determined by the determination unit 211. Moreover, based on the input specific information, the past three analysis results are displayed simultaneously. In addition to these analysis results, other information may be displayed.
Thereafter, the process proceeds to step S8, where analysis results and measurement conditions are accumulated in the database 209, and the process is terminated.

  The fluorescent X-ray analysis apparatus 200 according to the present reference technique that operates according to the steps described above has the following effects in particular.

  The intensity of the fluorescent X-ray is affected by the surface state and shape of the sample to be measured. Therefore, even for the same object to be measured, the measured value fluctuates greatly only by changing the position and orientation set on the sample stage, and the change point management by comparison with the past measurement information cannot be performed. On the other hand, as shown in step S4, the fluorescent X-ray analysis apparatus 200 can set the object to be measured 205 while confirming the image. Therefore, since the accuracy of the position and orientation can be increased, the variation in the fluorescent X-ray measurement value that occurs due to the difference in the position and orientation can be suppressed. As a result, the accuracy of change point management can be improved.

The measurement recipe defines conditions for generating X-rays, types of measurement elements, quantitative methods, and the like. When the measurement is performed under different measurement conditions, even if the objects to be measured are the same, the values are completely different, and the change point management becomes impossible. When there are few types of measurement recipes, there are still few errors in selection, but normally ten or more types of measurement recipes are created, so the possibility of erroneous selection of measurement recipes during selection cannot be denied. In order to prevent this, in the X-ray fluorescence analyzer 200, as shown in step S5, the measurement recipe for the previous measurement is initially selected based on the input specific information. This function can prevent erroneous selection of a measurement recipe and improves operability.
Of course, it is possible to change the initially selected measurement recipe.
The operation of the fluorescent X-ray analyzer 200 has been described above.

  In this reference technology, the analysis results include the content for each specific substance contained in the object to be measured and the determination result determined by the determination unit, but further includes other analysis results. May be. For example, you may have the graph which compared the spectrum for every specific substance contained in a to-be-measured object.

  In addition to the above, the measurement conditions may include the set voltage and current to the X-ray generation unit 203, the type of calibration curve used for spectrum quantification, and the like.

(Reference technology 2)
Next, a fluorescent X-ray analysis apparatus 300 according to Reference Technology 2 of the present invention will be described. The X-ray fluorescence analyzer 300 according to the reference technique 2 is different from the X-ray fluorescence analyzer 200 according to the reference technique 1 in that it has a determination result correction function.

  FIG. 5 is a schematic configuration diagram of a fluorescent X-ray analyzer 300 according to Reference Technology 2 of the present invention. The X-ray fluorescence analysis apparatus 300 has substantially the same configuration as the X-ray fluorescence analysis apparatus 200 according to the reference technique 1, but the determination result can be corrected by the input unit 301. Other configurations are almost the same as those of the fluorescent X-ray analysis apparatus 200 of the reference technique 1, and thus description thereof is omitted. In FIG. 5, the input unit 301 in the fluorescent X-ray analysis apparatus 300 is the input unit 201 in FIG. 1, the calculation unit 302 is the calculation unit 202 in FIG. 1, and the X-ray generation unit 303 is the X-ray generation unit in FIG. 203, the detection unit 307 is the detection unit 207 of FIG. 1, the display unit 308 is the display unit 208 of FIG. 1, the database 309 is the database 209 of FIG. 1, and the imaging unit 310 is the imaging unit 210 of FIG. The unit 311 corresponds to the determination unit 211 in FIG.

  Next, the operation of the X-ray fluorescence analyzer 300 will be described.

FIG. 6 is a flowchart for explaining the operation of the fluorescent X-ray analyzer 300 according to Reference Technique 2. Steps S1 to S8 are almost the same as the operation of the fluorescent X-ray analysis apparatus 200, and thus description thereof is omitted. Here, the case where the process proceeds to step S9 after step S7 will be described.
In step S9, the determination result displayed on the display unit 308 is corrected. The corrected determination result is displayed in a form in which it is understood that the correction has been made, for example, by changing the background color of the display location or by performing a shading process.

In step S10, the reason for correcting the determination result can be input. By storing the reason for correction, the reason for correction can be confirmed when the analysis result is read later.
Thereafter, the process proceeds to step S8, where analysis results and measurement conditions are accumulated in the database 309, and the process is terminated.

  The characteristic effects of the X-ray fluorescence analysis apparatus 300 according to the present reference technique including the determination result correction steps S9 and S10 described above will be described below.

  FIG. 7 shows an example of a result display on the display unit 308 in step S7 when a brominated flame retardant-containing plastic part is measured as the object 305 to be measured. The display unit 308 displays analysis results for environmentally hazardous substances regulated in advance by the RoHS directive in the form of a table. As the analysis result, the pass / fail judgment result for the content measurement value and the regulation value of the substance is automatically displayed. Further, the display unit 308 displays the past three analysis results extracted by the search function before measurement on the same screen. In the analysis result of FIG. 7, the part where the background color is changed indicates that the result was edited after each measurement.

  In the RoHS inspection, it contains cadmium (Cd), lead (Pb), mercury (Hg), polybrominated biphenyl, polybrominated diphenyl ether (hereinafter referred to as specific bromine (Br)), hexavalent chromium (Cr). investigate. Various analysis apparatuses such as a fluorescent X-ray apparatus, a gas chromatograph mass spectrometer, and an inductively coupled plasma emission analyzer are used for content analysis of the substance. However, from the viewpoints of operability and cost, usually, the contained elements are first quantitatively analyzed with a fluorescent X-ray analyzer, and the contents of cadmium, lead, mercury, bromine and chromium elements are measured. Among the obtained measurement results, the three elements of cadmium, lead and mercury can be regarded as the content as they are. However, the measurement results of bromine and chromium only indicate the content of each element, and not all of them exist as specific bromine or hexavalent chromium. Therefore, in the result of X-ray fluorescence analysis, if bromine element or chromium element exceeding the standard value is obtained, further detailed analysis will be performed unless it is clearly found that specific bromine or hexavalent chromium is not used. Is normal.

  As described above, the result of containing bromine and chromium and the result of containing specific bromine and hexavalent chromium in the X-ray fluorescence analysis do not always coincide with each other.

  FIG. 7 shows the fluorescent X-ray measurement results of the brominated flame retardant-containing plastic part. The part to be measured contains about several percent of tetrabromobisphenol-A as a brominated flame retardant. Therefore, the measurement result of bromine element is 100,000 ppm. Since the RoHS directive prohibits the inclusion of 1000 ppm or more of specific bromine, “x” is displayed if the measurement result exceeds 1000 in the automatic determination for bromine element content in the fluorescent X-ray apparatus. However, since the contained substance tetrabromobisphenol-A does not correspond to the specific bromine, it is not a RoHS directive designated substance. Therefore, no further detailed analysis is required. Therefore, although the determination result is “x”, the component can be used without any problem in practice. Without knowing this fact, if only the automatically displayed result is referred to, there is a possibility that it may be erroneously determined that countermeasures against leakage of load substance-containing parts to the market should be taken by looking at only the notation “x”. That is, there is a possibility that the same sample that was measured last time will be measured again or a high-precision analysis will be performed. Further, if this exception is not known, there is a possibility of investigating a cause that has not caused a problem in the past if past data is also accumulated by the “x” determination. Re-analysis, high-precision analysis, and surveys are a waste of time and money.

  The X-ray fluorescence analyzer 300 has a function of manually correcting this “x” determination to “◯” and a function of writing the reason for correction. By editing the result using this function, it is clear at a glance that when the result is judged at a later date, the measured part may contain a specified substance in a larger amount than the specified value. Judgment can be performed quickly and reliably.

(Reference technology 3)
FIG. 8 is a schematic configuration diagram of a fluorescent X-ray analyzer according to Reference Technology 3 of the present invention.

  The X-ray fluorescence analyzer 400 according to Reference Technology 3 is different from the X-ray fluorescence analyzer 300 according to Reference Technology 2 in that a plurality of X-ray fluorescence analyzers share a database. In the X-ray fluorescence analyzer 400, the configuration and operation of each X-ray fluorescence analyzer 300 are the same as those of the X-ray fluorescence analyzer according to the reference technique 2.

  In the X-ray fluorescence analyzer 400, each X-ray fluorescence analyzer 300 can independently perform analysis. The obtained measurement information (analysis result, measurement condition, measurement site image, etc.) is transferred to the database 409 and stored. The frequency of accumulation is performed for each analysis. In this reference technique, the configuration is such that one database 409 is shared, but the present invention is not limited to this. For example, a database may be provided for each X-ray fluorescence analyzer together with a shared database. In such a configuration, data is periodically transferred from each database to a shared database, and the data is accumulated. The frequency of accumulation may be performed for each analysis, but may be periodically performed, for example, once an hour or once a day.

  Next, the operation of the fluorescent X-ray analyzer 400 will be described.

  In the X-ray fluorescence analyzer 400, the operation of each X-ray fluorescence analyzer 300 is the same as the operation described in the reference technique 2. However, in the database 409, in addition to the measurement information from one fluorescent X-ray analyzer 300, measurement information from the other fluorescent X-ray analyzer 300 is also stored. Therefore, the latest measurement information can be displayed among the measurement information obtained by a plurality of fluorescent X-ray analyzers.

  FIG. 9 shows an example of a result display on the display unit 308 when a brass component is measured as the object 305 to be measured in one fluorescent X-ray analyzer 300. The display unit 308 displays analysis results for environmentally hazardous substances regulated in advance by the RoHS directive in the form of a table. As the analysis result, the pass / fail judgment result for the content measurement value and the regulation value of the substance is automatically displayed. Further, the display unit 308 displays the past three analysis results extracted by the search function before measurement on the same screen. In the analysis result of FIG. 9, the part where the background color is changed indicates that the result was edited after each measurement.

  In the RoHS inspection, it contains cadmium (Cd), lead (Pb), mercury (Hg), polybrominated biphenyl, polybrominated diphenyl ether (hereinafter referred to as specific bromine (Br)), hexavalent chromium (Cr). investigate. Various analysis apparatuses such as a fluorescent X-ray apparatus, a gas chromatograph mass spectrometer, and an inductively coupled plasma emission analyzer are used for content analysis of the substance. However, from the viewpoint of operability and cost, usually, the contained element is first quantitatively analyzed with a fluorescent X-ray analyzer. If bromine element and chromium element are detected more than the standard value, further detailed analysis is performed.

  As shown in FIG. 9, the brass component as the object to be measured contains 1500 ppm or more of lead element. On the other hand, since the RoHS directive prohibits the inclusion of 1000 ppm or more of the lead element, “x” is displayed in the automatic determination. However, in the exemption items of the RoHS directive, lead content in brass materials is allowed up to 40000 ppm due to material purity problems. Therefore, the lead element determination result is originally determined as “◯” by exemption, and no further analysis is required. Therefore, although the displayed determination result is “x”, the part can be used without any problem in practice. If you refer only to the automatically displayed results without knowing this exemption, there is a possibility of misjudging that you should take countermeasures against leakage of parts containing load substances to the market only by referring to the notation “x”. . That is, there is a possibility that the same sample that was measured last time will be measured again or a high-precision analysis will be performed. Further, if this exception is not known, there is a possibility of investigating a cause that has not caused a problem in the past if past data is also accumulated by the “x” determination. Re-analysis, high-precision analysis, and surveys are a waste of time and money.

  The X-ray fluorescence analyzer 300 has a function of manually correcting this “x” determination to “◯” and a function of writing the reason for correction. By editing the result using this function, it is clear at a glance that when the result is judged at a later date, the measured part may contain a specified substance in a larger amount than the specified value. Judgment can be performed quickly and reliably.

  In the present reference technique, the analysis results for the past three times do not display only the past analysis results of one fluorescent X-ray analysis apparatus 300. That is, by sharing the database 409, it is possible to display the past measurement results of another fluorescent X-ray analyzer even in the fluorescent X-ray analyzer that has not actually been measured in the past. With such a configuration, the results of analysis performed in the past by any X-ray fluorescence analyzer can be shared and displayed by other X-ray fluorescence analyzers, and the accuracy of change point management can be further improved. become able to.

  In this reference technology, the database 409 is shared by two fluorescent X-ray analyzers, but is not limited to two. Three or more fluorescent X-ray analyzers may share a database.

  Further, the shared database location may be provided separately from the plurality of fluorescent X-ray analyzer main bodies, or may be incorporated into any one main body. In short, as long as past measurement information can be shared among a plurality of devices, the arrangement location is not particularly limited.

  In all reference techniques, examples of “◯” and “×” notation are shown as the result determination, but are not limited thereto. For example, another notation such as “Δ” may be used, or determination may be made using numbers.

(Embodiment 1)
Next, the fluorescent X-ray analysis apparatus according to Embodiment 1 of the present invention will be described with reference to FIGS.

  In the X-ray fluorescence spectrometer according to the first embodiment, the input unit 301 can input a plurality of pieces of specific information of the object to be measured 305 by classifying them into a plurality of hierarchies including at least an upper hierarchy and a lower hierarchy. The database 309 is different from the reference technique 2 in that a plurality of specific information can be classified and stored in the plurality of layers.

For example, preparation for setting specific information will be described with reference to the flowchart of FIG.
First, the input unit 301 inputs how many levels of hierarchical information the specific information of the device under test 305 is configured (step S41). For example, if the hierarchy information has 3 levels, 3 entries are entered. Next, the names of elements constituting the specific information are input in order from the upper layer (step S42). For example, three item names “product” as the upper hierarchy, “product number” as the middle hierarchy, and “measurement part name” as the lower hierarchy are input. Further, the database 309 stores the number of input specific information and the name of the element (step S43).

Next, specific information input during measurement will be described with reference to the flowchart of FIG.
First, the number of specific information and the name of the input item of specific information are read from the database 309 (step S44). Next, as shown in FIG. 12, the calculation unit (device control unit) 302 displays an input item (input field) of specific information on the display unit 308 so as to be inputable (step S45). Further, the measurement operator inputs each piece of specific information (product, product number, measurement site name) to the input items on the display unit 308 (step S445).

  As described above, in the present embodiment, the input unit 301 can input a plurality of specific information of the device under test 305 classified into a plurality of hierarchies, and the database 309 can input a plurality of specific information to the plurality of specific information. Since the data can be classified and stored according to the hierarchy, input according to the form of the device under test 305 and the operation rules of the apparatus user is possible.

(Embodiment 2)
Next, a fluorescent X-ray analysis apparatus according to Embodiment 2 of the present invention will be described with reference to FIGS.

  As shown in FIGS. 13 to 15, in the X-ray fluorescence spectrometer according to the second embodiment, when the display unit 508 receives specific information from the input unit 301, the measurement object 505 corresponding to the specific information is displayed. A plurality of past measurement site images can be displayed as a list, and the display unit 508 can display past measurement site images of the object to be measured 505 displayed in a list in the order of measurement sites with the oldest measurement date and time. This is different from the first embodiment.

  That is, the fluorescent X-ray analysis apparatus according to the present embodiment, as specific information selection means, as shown in FIG. 14, a list display section (list display means) that displays candidate data for a hierarchy for performing a selection operation. ) 508a, an image display unit 508b for displaying an image of the device under test 505 in the list, a data selection unit 508c which is a button mark for selecting arbitrary data in the list, and the selected specific information are displayed. The specific information display unit 508d is displayed on the display unit 508 by the calculation unit (device control unit) 302. In addition, the X-ray fluorescence spectrometer according to the present embodiment displays on the display unit 508 the image of the object to be measured 505 and the measurement conditions at the time of measurement when selecting the specific information of the last hierarchy (lower hierarchy). Measurement operation is performed.

For example, the present embodiment will be described with reference to the flowchart of specific information shown in FIG. First, the fluorescent X-ray analysis apparatus according to the present embodiment searches for measurement information using selected specific information from the database 309 that accumulates past measurement information, lists options for the selection target hierarchy, and FIG. As illustrated, the specific information is output to the list display unit 508a of the display unit 508 (step S51).
In other words, when a higher-level product is selected, a list of product names is output as specific information. In addition, when selecting a product number that is a middle hierarchy, a list of product numbers in a selected product that is an upper hierarchy is output. Further, when the measurement part name which is the lower hierarchy is selected, a list of measurement part names in the selected product of the upper hierarchy and the product number of the middle hierarchy is output.

  Next, when the last hierarchy (lower hierarchy) is selected (step S52), the image with the latest date is displayed on the display unit 508 as shown in FIG. Step S53). In addition, in order to make it easy to understand, FIG. 16 shows a display when the object to be measured 505 is a dice-shaped object shown in FIG.

  Next, when the operator designates a button mark (data selection unit 508c) for selecting a list on the display unit 508 on the screen and confirms the selection (step S54), the calculation unit (device control unit) 302 The selected specific information is output to the specific information display unit 508d of the display unit 508 (step S55). Next, when the last hierarchy (lower hierarchy) is selected (step S56), the calculation unit (device control unit) 302 prepares for measurement based on the measurement conditions of the selected list (step S57).

  As described above, in the present embodiment, when specific information is input through the input unit 301, a plurality of past measurement site images of the object 505 corresponding to the specific information can be displayed as a list, so that the number of measurements can be grasped. , Know the amount to be measured.

Further, in the present embodiment, the display unit 508 can display the past measurement site images of the object to be measured 505 displayed in a list in the order of the measurement site with the oldest measurement date and time.
That is, as shown in FIG. 16, the list display unit (list display unit) 508a of the input unit 301 controlled by the calculation unit 302 serving as a measurement control unit performs measurement when selecting the last layer of the specific information of the device under test 505. Display selection items in order of date. At this time, the operator selects an item with an old date and performs measurement work.
Further, when the measurement is completed, the list display unit (list display means) 508a again displays the selection items in order from the oldest measurement date when selecting the last layer of the specific information of the device under test 505.

  For example, when an image of Top (measurement site name 1) is displayed as the measurement site of the object 505 having the oldest measurement date in the list displayed at the left end of FIG. When the displayed button mark (data selection unit 508c) is designated on the screen and the selection is confirmed, measurement is started with the measurement site and measurement conditions in this list. After this measurement, the measurement date of Top (measurement site name 1), which is the measurement site of the object to be measured 505, is updated to the latest measurement date.

  Therefore, when the operator performs the next measurement and selects the last layer of the specific information, the list of Top (measurement site name 1) that is the measurement site of the object 505 is displayed at the right end of the display unit 508. The list of right side (measurement site name 5), which is the second measurement site displayed from the left last time, is displayed at the left end as the oldest measurement site. Then, when the operator again designates the button mark (data selection unit 508c) displayed in the leftmost list on the screen and confirms the selection, the measurement is started with the measurement site and measurement conditions in this list.

  As described above, in the present embodiment, the display unit 508 can display the past measurement site images of the object to be measured 505 displayed in a list in order of the measurement sites with the oldest measurement date and time, so that the operator is displayed in a list. By always selecting and measuring the end of the sample, it is always possible to easily select and measure the old measurement site. Therefore, when the operation order is instructed by the apparatus, the burden on the operator can be reduced, and it is possible to concentrate on the analysis and to perform measurement without omission.

(Embodiment 3)
Next, a fluorescent X-ray analysis apparatus according to Embodiment 3 of the present invention will be described with reference to FIGS.

  As shown in FIGS. 17 to 18, the X-ray fluorescence spectrometer according to Embodiment 3 includes measurement required time for measurement corresponding to the object 305 to be measured. This is different from the reference technique 1 in that an estimated remaining time (measurement remaining time) obtained by subtracting a measurement elapsed time at the time of measurement from a past measurement required time corresponding to the measurement object 305 can be displayed at the time of measurement.

  That is, the display of the estimated remaining time (measurement remaining time) will be described with reference to the flowchart shown in FIG. 18. First, the specific information of the device under test 305 is set in advance, and measurement is started (step S61). Next, the calculation unit (measurement control unit) 302 retrieves the corresponding measurement result from the database 309 in which past measurement information is accumulated as shown in FIG. 19, extracts the data of the latest measurement date, and measures the measurement time. Is read (step S62). Further, the calculation unit (device control unit) 302 subtracts the elapsed time of the currently performed measurement from the previous measurement actual time, and sequentially outputs the estimated remaining time to the display unit 308 as shown in FIG. indicate.

  As described above, in this embodiment, the display unit 308 can display the measurement remaining time obtained by subtracting the measurement elapsed time at the time of measurement from the past measurement required time corresponding to the measurement object 305. The estimated measurement end time can be predicted.

(Embodiment 4)
Next, a fluorescent X-ray analyzer according to Embodiment 4 of the present invention will be described with reference to FIGS.

  As shown in FIG. 20, the X-ray fluorescence spectrometer according to the fourth embodiment is different from the reference technique 3 in that the display unit 308 can display the determination result before editing and the reason for editing. That is, in the present embodiment, as shown in FIG. 21, information that accumulates past measurement information in the database 309 and editing history information that accumulates determination results, editing reasons, editor names, and the like are stored. When the calculation unit 302 as a measurement control unit outputs the analysis result to the display unit 308, it can be set so that the determination result before editing is displayed again and the reason for editing the determination result is also displayed. is there. For example, as illustrated in FIG. 20, when the determination result is edited because it corresponds to the RoHS application exclusion, “RoHS application exclusion” is displayed in the analysis result.

  As described above, in the present embodiment, the display unit 308 can display the determination result before editing and the reason for editing, so the state before the change can be confirmed, and for what reason the determination result has been changed. It can be confirmed and is evidence.

  The X-ray fluorescence analyzer according to the present invention is particularly useful in the field where the analysis of contained materials in parts is performed regularly.

200, 300, 400 X-ray fluorescence analyzer 201, 301 Input unit 202, 302 Calculation unit 203, 303 X-ray generation unit 204, 304 Primary X-ray 205, 305, 505 DUT 206, 306 Secondary X-ray 207, 307 Detection unit 208, 308, 508 Display unit 209, 309, 409 Database 210, 310 Imaging unit 211, 311 Determination unit

Claims (7)

A fluorescent X-ray analyzer for analyzing constituent elements of the object to be measured by irradiating the object to be measured with X-rays and measuring fluorescent X-rays generated from the object to be measured,
An input unit for inputting specific information for specifying an object to be measured;
An imaging unit for obtaining a measurement site image of the object to be measured;
After the measurement of the fluorescent X-ray, at least a display unit for displaying the analysis result of the object to be measured;
A database of past measurement information associated with specific information, and
The measurement information includes a measurement site image of the object to be measured and an analysis result,
At the time of setting the measurement conditions for fluorescent X-rays, the display unit inputs at least the measurement site image of the measurement object obtained by the imaging unit and the measurement information stored in the database at the input unit. The measurement site image at the time of past measurement of the object to be measured included in the measurement information corresponding to the specified information can be displayed at the same time,
The input unit is capable of classifying and inputting the plurality of specific information of the device under test into a plurality of hierarchies composed of at least an upper hierarchy and a lower hierarchy, and the database inputs the plurality of the specific information as described above. An X-ray fluorescence analyzer characterized in that it can be classified and stored in a plurality of layers.   2. The display unit is capable of displaying a list of a plurality of past measurement site images of the object to be measured corresponding to the specific information when the specific information is input from the input unit. X-ray fluorescence analyzer described in 1.   The fluorescent X-ray analyzer according to claim 2, wherein the display unit can display the past measurement site images of the objects to be measured displayed in a list in order of measurement sites with the oldest measurement date and time. . The measurement information includes a time required for measurement at the time of measurement corresponding to the object to be measured,
3. The fluorescence according to claim 2, wherein the display unit can display a measurement remaining time obtained by subtracting a measurement elapsed time at the time of measurement from a past measurement required time corresponding to the object to be measured. X-ray analyzer. The measurement information further includes information on measurement conditions of the object to be measured,
When the measurement condition of the fluorescent X-ray is set, the display unit further displays measurement conditions at the time of past measurement of the object to be measured among measurement information associated with the specific information and stored in the database. The fluorescent X-ray analyzer according to any one of claims 1 to 4, wherein:   After the measurement of fluorescent X-rays, the display unit simultaneously displays on the screen analysis results at the time of past measurement of the object to be measured among measurement information associated with the specific information and stored in the database. The fluorescent X-ray analyzer according to any one of claims 1 to 5, wherein: A determination unit that determines whether or not the content of a specific substance among the constituent elements of the object to be measured exceeds a predetermined threshold;
The X-ray fluorescence spectrometer according to any one of claims 1 to 6 , wherein the specific substance is an environmentally hazardous substance regulated by a RoHS directive .