CN101661008A - Florescent X-ray analyzing device - Google Patents
Florescent X-ray analyzing device Download PDFInfo
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- CN101661008A CN101661008A CN 200910168603 CN200910168603A CN101661008A CN 101661008 A CN101661008 A CN 101661008A CN 200910168603 CN200910168603 CN 200910168603 CN 200910168603 A CN200910168603 A CN 200910168603A CN 101661008 A CN101661008 A CN 101661008A
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Abstract
The present invention provides the following florescent X-ray analyzing device, which can perform easy management of change point by comparing with the past determination result information. The florescent X-ray analyzing device comprises: an input portion for inputting special information for determining an object to be detected; a camera shooting portion for acquiring a detection position imageof the object to be detected; a display portion for at least displaying the analyzing result of the object to be detected after the detection of the florescent X-ray; and a database for storing the post detection information corresponding to the sepcial information, wherein the detection information comprises the detection position image of the ojbect to be detected and the analyzing result, the display portion at least can simultaneously display the detection position image of the object to be detected acquired by the camera shooting portion, and the post detection position image of the object to be detected contained in the detection information stored in the detection information in the database and corresponding to the special information input by the input portion, when the display portion sets the detection condition at the florescent X-ray.
Description
Technical field
The present invention relates to the fluorescent x-ray analyzer of material.Be particularly related to the fluorescent x-ray analyzer of sneaking into the carrying capacity of environment material in the employed parts of electric/electronic that constitutes by various components.
Background technology
In recent years, the someone points out to constitute the danger of the carrying capacity of environment material that the parts of electric/electronic contain, and limit the country of content of these carrying capacity of environment materials or the quantity in state constantly increases by law/decree.For example, from 1996, in the EU various countries,, ban use of and contain 1000ppm (Cd is 100ppm) above cadmium (Cd), lead, mercury, specific bromide fire retardant, chromic parts by the RoHS instruction.And, the same laws that also gone into effect such as the China and the U.S..For this reason, electric/electronic manufacturer must confirm not contain the carrying capacity of environment material more than the limits value in each parts.
As the method for measuring constituent content, the general fluorescence X-ray analyser that uses sensitivity, can measure within a short period of time in nondestructive mode with tens ppm.
X-ray fluorescence analysis is meant, to determinand irradiation X ray, by measuring the fluorescent X-ray that sends from determinand, analyzes the constituent content of determinand.In the analytical equipment that uses this analytical approach, general known have the concentration of the element that comprises in pair determinand to carry out quantitative step.At first, set the minute of fluorescent X-ray, begin to measure.Through behind the setting-up time, contain the concentration calculating of element according to measurement result.Then, display result.Relative therewith, for example as patent documentation 1 is disclosed, also there is following method: be not only to finish to measure end point by setting-up time, but finish to measure at the time point that the deviation of the measured value of fluorescent X-ray reaches below the predefined mensuration precision, carry out concentration and calculate and display result.
[patent documentation 1] international the 2005/106440th trumpeter's volume that discloses
After utilizing said method to measure,, image, condition determination, determination data, other additional information that shows the placement situation of determinand on device is kept at the attached data of device preserves in the part with the title and the Lot Number of determinand.
In electric/electronic manufacturer,,, also need to take a sample to wait and also regularly measure even the parts of measuring actual achievement are arranged in order to confirm in each uses parts, not contain the carrying capacity of environment material more than the limits value.But, in the composite component that the parts by more than 2 kinds that with electroplate or chip part are representative constitute, condition determination or the laying method difference of parts, measurement result difference sometimes during owing to mensuration.Thus, identical when these conditions were measured with last time, arrange regular measurement result etc. with time series, represent the change point management of the unusual grade made.
But,, in existing fluorescent x-ray analyzer, be difficult in order to carry out above-mentioned management.For example, include under the situation that parts measure new, need to outputs such as paper in the past condition determination and measure image, on one side confirmation carry out the placement of condition determination and parts on one side.And, in the time will confirming a plurality of measurement result in past, must from huge paper information, extract reference data.Therefore, the unusual problem of spended time of the placement that has the condition determination of parts and parts.
Summary of the invention
The present invention finishes in view of above-mentioned problem just, and its purpose is, following fluorescent x-ray analyzer is provided: by with the comparison of the mensuration information in past, can be easy to the change point management.
Fluorescent x-ray analyzer of the present invention shines X ray to determinand, by measuring the fluorescent X-ray that produces from described determinand, analyze the formation element of described determinand, it adopts following structure: this fluorescent x-ray analyzer has: input part, its input are used for determining the customizing messages of determinand; Image pickup part, it obtains the determination part bit image of described determinand; Display part, it shows the analysis result of described determinand at least after the mensuration of fluorescent X-ray; And database, the mensuration information in the past that its storage is corresponding with customizing messages, described mensuration information comprises the determination part bit image and the analysis result of determinand, when described display part is set at the condition determination of fluorescent X-ray, can show the determination part bit image of the described determinand that obtains by described image pickup part at least simultaneously and be stored in past in the mensuration information in described database determination part bit image when measuring with the described determinand that comprises by the corresponding mensuration information of the customizing messages of described input part input.
And, fluorescent x-ray analyzer of the present invention is characterised in that, described input part can be according to a plurality of different levels that are made of upper level and the next level at least, the a plurality of described customizing messages of the described determinand of classification input, and, described database can be according to above-mentioned a plurality of different levels, a plurality of described customizing messages of classification and storage.
And fluorescent x-ray analyzer of the present invention is characterised in that when importing described customizing messages by described input part, described display part can be had a guide look of the described determination part bit image in the past of the described determinand that shows that a plurality of and described customizing messages is corresponding.
And then fluorescent x-ray analyzer of the present invention is characterised in that described display part can be arranged the described determination part bit image in the past of the described determinand that shows that guide look shows according to the order of measuring time on date mensuration position from the old to the new.
And, fluorescent x-ray analyzer of the present invention is characterised in that, mensuration when described mensuration information also comprises the mensuration corresponding with described determinand needs the time, and described display part can show when measuring from the described mensuration in the past corresponding with described determinand needs to deduct the time mensuration excess time that the mensuration when measuring obtained after the elapsed time.
And, fluorescent x-ray analyzer of the present invention is characterised in that, described mensuration information also comprises the information of the condition determination of described determinand, when described display part is set at the condition determination of fluorescent X-ray, also show the condition determination the when past that is stored in the described determinand in the mensuration information in the described database accordingly with described customizing messages is measured.
And, fluorescent x-ray analyzer of the present invention is characterised in that, described display part shows the analysis result the when past that is stored in the described determinand in the mensuration information in the described database accordingly with described customizing messages is measured simultaneously on picture after the mensuration of fluorescent X-ray.
And, fluorescent x-ray analyzer of the present invention is characterised in that, this fluorescent x-ray analyzer also has detection unit, this detection unit judges whether the content of the predetermined substance in the formation element of described determinand surpasses defined threshold, described analysis result comprises the result of determination of described detection unit, described display part also shows described result of determination after the mensuration of fluorescent X-ray, described input part can be edited described result of determination.
And then fluorescent x-ray analyzer of the present invention is characterised in that, described input part can be imported this editor's reason when described editor, and described display part can show described result of determination before the described editor and described editor's reason.
And fluorescent x-ray analyzer of the present invention is characterised in that described predetermined substance is the carrying capacity of environment material by RoHS instruction restriction.
According to fluorescent x-ray analyzer of the present invention, can provide following fluorescent x-ray analyzer: by with the comparison of the measurement result information in past, can be easy to the change point management.
Description of drawings
Fig. 1 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 1.
Fig. 2 is the process flow diagram of action that is used to illustrate the fluorescent x-ray analyzer of embodiments of the present invention 1.
Fig. 3 is the figure of condition determination that the fluorescent x-ray analyzer of embodiments of the present invention 1 the is shown display part when setting.
Fig. 4 is the figure that the display part after the mensuration of fluorescent x-ray analyzer of embodiments of the present invention 1 is shown.
Fig. 5 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 2.
Fig. 6 is the process flow diagram of action that is used to illustrate the fluorescent x-ray analyzer of embodiments of the present invention 2.
Fig. 7 is the figure that the display part after the mensuration of fluorescent x-ray analyzer of embodiments of the present invention 2 is shown.
Fig. 8 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 3.
Fig. 9 is the figure that the display part after the mensuration of fluorescent x-ray analyzer of embodiments of the present invention 3 is shown.
Figure 10 is the process flow diagram of the action (setting of customizing messages is prepared) that is used to illustrate the fluorescent x-ray analyzer of embodiments of the present invention 4.
Figure 11 is the process flow diagram of the action (the customizing messages input during mensuration) that is used to illustrate the fluorescent x-ray analyzer of embodiments of the present invention 4.
Figure 12 illustrates the figure that the input field of the cuit of the customizing messages in the fluorescent x-ray analyzer of embodiments of the present invention 4 shows.
Figure 13 is the process flow diagram of action (selection of customizing messages) that is used to illustrate the fluorescent x-ray analyzer of embodiments of the present invention 5.
Figure 14 is the figure that the tabulation display part (list display unit) in the fluorescent x-ray analyzer of embodiments of the present invention 5 is shown.
Figure 15 is the stereographic map that the determinand in the fluorescent x-ray analyzer of embodiments of the present invention 5 is shown.
Figure 16 illustrates the key diagram that the demonstration of the tabulation display part (list display unit) in the fluorescent x-ray analyzer of embodiments of the present invention 5 changes.
Figure 17 is the figure that the demonstration example of the estimation excess time in the fluorescent x-ray analyzer of embodiments of the present invention 6 is shown.
Figure 18 is the process flow diagram of the action (estimating the demonstration of excess time) that is used to illustrate the fluorescent x-ray analyzer of embodiments of the present invention 6.
Figure 19 is the figure that the example of the information that stores mensuration information in the past in the fluorescent x-ray analyzer of embodiments of the present invention 7 is shown.
Figure 20 is the figure that the demonstration example of the analysis result in the fluorescent x-ray analyzer of embodiments of the present invention 7 is shown.
Figure 21 is the figure that the example of information that stores mensuration information in the past in the fluorescent x-ray analyzer of embodiments of the present invention 7 and edit history information is shown.
Label declaration
200,300,400: fluorescent x-ray analyzer; 201,301: input part; 202,302: operational part; 203,303:X ray generating unit; 204,304: primary X-ray; 205,305,505: determinand; 206,306: secondary x rays; 207,307: test section; 208,308,508: display part; 209,309,409: database; 210,310: image pickup part; 211,311: detection unit.
Embodiment
Below, use description of drawings the specific embodiment of the present invention.
In addition, omit the parts of mark same numeral in the explanation accompanying drawing sometimes.And for easy to understand, accompanying drawing schematically illustrates each inscape.Thus, display shape etc. correctly sometimes.
(embodiment 1)
Fig. 1 is the summary construction diagram of the fluorescent x-ray analyzer 200 of embodiments of the present invention 1.
In Fig. 1, fluorescent x-ray analyzer 200 has: the input part 201 of input data; Carry out the operational part 202 of various computings; X ray generating unit 203 to determinand 205 irradiation primary X-raies 204; Detection is from the test section 207 of the secondary x rays (fluorescent X-ray) 206 of determinand 205; The display part 208 that shows various data; Database 209; And the image pickup part 210 at the mensuration position of ray measuring optical 205.
The mensuration information of analysis result, condition determination and determination part bit image etc. is kept in the database 109 accordingly with the customizing messages of being imported.
The structure of fluorescent x-ray analyzer 200 more than has been described.
The action of fluorescent x-ray analyzer 200 then, is described.
Fig. 2 is the process flow diagram of action that is used to illustrate the fluorescent x-ray analyzer 200 of embodiment 1.
At first, in step S1, mensuration person is a customizing messages by the production code member or the title of the parts that input part 201 inputs will be measured.
In step S2, according to the customizing messages of in step S1, importing, the mensuration information in the past in the searching database 209.
In step S3, on display part 208, show corresponding 3 times mensuration information in the past.Here the mensuration information of Xian Shiing is the determination part bit image of mensuration prescription, determinand 205 etc.
In step S4, mensuration person is placed on determinand 205 on the sample stage.In addition, also can carry out the placement of determinand 205 in advance.In step S4, take the determination part bit image that is placed on the determinand 205 on the sample stage by image pickup part 210, on display part 208, show in real time.In addition, Fig. 3 is the figure of condition determination that fluorescent X-ray the is shown display part 208 when setting.As shown in Figure 3, on display part 208, be simultaneously displayed on the determination part bit image in the past of the determinand 205 that shows among the step S3.Thus, mensuration person can be on one side with reference to determination part bit image in the past, on one side with determinand 205 be placed on position identical when measuring in the past/identical towards.
In step S5, select the mensuration corresponding to write out a prescription in mensuration from be kept at database 209 prescription with determinand 205.At this moment, according to the customizing messages of being imported, the mensuration prescription when initial selected was measured last time.
In step S6, carry out x-ray fluorescence analysis at determinand 205.Particularly, at first, according to selected mensuration prescription, the X ray of 205 irradiation stipulated times of 203 pairs of determinands of X ray generating unit.Then, utilize test section 207 to detect the fluorescent X-ray that sends from determinand 205.In operational part 202,, the concentration that contains element of determinand 205 is carried out quantitatively according to spectrum of detected fluorescent X-ray etc.
In step S7, display analysis result on display part 208.In addition, Fig. 4 is the figure that the display part 208 after fluorescent X-ray is measured is shown.As shown in Figure 4, shown analysis result is the content of each predetermined substance of comprising in the determinand 205 and the result of determination that is determined by detection unit 211.And,, show 3 times analysis result in the past simultaneously according to the customizing messages of being imported.In addition, except these analysis results, can also show out of Memory.
Then, enter step S8, inventory analysis result and condition determination etc. in database 209 finish.
In the fluorescent x-ray analyzer 200 of the present embodiment of moving, has following effect especially according to above-mentioned steps.
The intensity of fluorescent X-ray is subjected to the influence of the surface state and the shape of determined sample.Therefore, even same determinand since the position of on sample stage, placing with towards different, measured value significantly changes, can't carry out based on the change point management of the comparison of the mensuration information in past.Relative therewith, in fluorescent x-ray analyzer 200, shown in step S4, while can confirm that image carries out the placement of determinand 205.Therefore, can improve the position and towards precision, so, can suppress with the position and towards the deviation of the fluorescent X-ray measured value that produces as main cause of difference.As a result, can improve the precision of change point management.
And, measure condition and the kind of measuring element, quantitative methods etc. that prescription has stipulated that X ray produces.Under situation about measuring with different condition determinations, even determinand is identical, also can become diverse value, can't carry out the change point management.Under the few situation of the kind of measuring prescription, the mistake in the selection is few, still, generates the mensuration prescription more than 10 kinds usually, so, can't negate the possibility that when selecting, causes the wrong choice of measuring prescription.In order to prevent this situation, in fluorescent x-ray analyzer 200, shown in step S5, according to the customizing messages of being imported, the mensuration prescription when initial selected was measured last time.According to this function, can prevent to measure the wrong choice of prescription, and operability improves.
In addition, can change the mensuration prescription of initial selected certainly.
The action of fluorescent x-ray analyzer 200 more than has been described.
In addition, in the present embodiment,, the content of each predetermined substance that comprises in the determinand and the result of determination that is determined by detection unit are arranged, still, also can have part in addition as analysis result.For example, can also have the chart that the spectrum to each predetermined substance of comprising in the determinand compares.
And, as condition determination, except above-mentioned condition, can also comprise at the setting voltage of X ray generating unit 203 and electric current, spectrum quantitatively in the kind etc. of the typical curve that uses.
(embodiment 2)
The fluorescent x-ray analyzer 300 of embodiments of the present invention 2 then, is described.The fluorescent x-ray analyzer 300 of embodiment 2 is to have the debugging functions of result of determination with the difference of the fluorescent x-ray analyzer 200 of embodiment 1.
Fig. 5 is the summary construction diagram of the fluorescent x-ray analyzer 300 of embodiments of the present invention 2.Fluorescent x-ray analyzer 300 has the structure roughly the same with the fluorescent x-ray analyzer 200 of embodiment 1, still, can carry out the correction of result of determination by input part 301.The fluorescent x-ray analyzer 200 of other structure and embodiment 1 is roughly the same, so omit explanation.In addition, in Fig. 5, the input part 301 of fluorescent x-ray analyzer 300 is corresponding to the input part 201 of Fig. 1, operational part 302 is corresponding to the operational part 202 of Fig. 1, and X ray generating unit 303 is corresponding to the X ray generating unit 203 of Fig. 1, and test section 307 is corresponding to the test section 207 of Fig. 1, display part 308 is corresponding to the display part 208 of Fig. 1, database 309 is corresponding to the database 209 of Fig. 1, and image pickup part 310 is corresponding to the image pickup part 210 of Fig. 1, and detection unit 311 is corresponding to the detection unit 211 of Fig. 1.
The action of fluorescent x-ray analyzer 300 then, is described.
Fig. 6 is the process flow diagram of action that is used to illustrate the fluorescent x-ray analyzer 300 of embodiment 2.The action of step S1～step S8 and fluorescent x-ray analyzer 200 is roughly the same, so omit explanation.Here, the situation that enters step S9 behind step S7 is described.
In step S9, revise the result of determination that on display part 308, shows.For example change the display area background color, carry out Mesh Processing, show revised result of determination with the form of clearly revising situation.
In step S10, can import the reason of revising result of determination.By preserving this correction reason in advance, after sense analysis as a result the time, can confirm the reason of revising.
Then, enter step S8, inventory analysis result and condition determination etc. in database 309 finish.
Following explanation distinctive effect in the fluorescent x-ray analyzer 300 of the present embodiment of correction step S9, S10 with above-mentioned result of determination.
Fig. 7 illustrates as determinand 305 and a example that the result of display part 308 among the step S7 when measuring the plastic components that contains bromide fire retardant shows.Display part 308 shows the analysis result of the carrying capacity of environment material that limits at the RoHS instruction by registration in advance with the form of table.As analysis result, show the result of determination that whether meets that contains measured value and limits value automatically at above-mentioned substance.And then, past 3 times the analysis result that extracts by search function before display part 308 is presented on same picture and measures.In the analysis result of Fig. 7, the part that has changed background color is illustrated in each and measures the back situation of edited result respectively.
In RoHS checked, whether investigation contained cadmium (Cd), plumbous (Pb), mercury (Hg), PBBs, PBDE (hereinafter referred to as specific bromine (Br)), sexavalent chrome (Cr).In containing in the analysis of described material, use various analytical equipments such as fluorescent X-ray device, gas chromatograph mass analyzer, inductively coupled plasma luminesceence analysis device.But, from the viewpoint of operability/cost, the common quantitative test that at first utilizes fluorescent x-ray analyzer to contain element, the content of mensuration cadmium, lead, mercury, bromine, chromium element.About the cadmium in the resulting measurement result, lead, 3 elements of mercury, can directly be considered as content.But the measurement result of bromine and chromium only illustrates the content of each element, not necessarily all as specific bromine and sexavalent chrome and exist.Therefore, in the x-ray fluorescence analysis result, under the situation of bromo element that obtains surpassing specification value and chromium element, common way is, short of distinguish obviously do not use specific bromine and sexavalent chrome, just further implement detail analysis.
Like this, bromine in the x-ray fluorescence analysis and chromium to contain the result not necessarily consistent with specific bromine and the chromic result of containing, so, when adopting when judging automatically, carry out mistake judgement sometimes.
Fig. 7 illustrates the fluorescent X-ray measurement result of the plastic components that contains bromide fire retardant.In determined parts,, contain the tetrabromobisphenol-A about a few percent as bromide fire retardant.Therefore, the measurement result of bromo element is 100000ppm.In the RoHS instruction, forbid containing the above specific bromine of 1000ppm, so, in the automatic judgement that contains at bromo element of fluorescent X-ray device,, then be shown as " * " if measurement result surpasses 1000.But, contain the material tetrabromobisphenol-A and do not meet specific bromine, so be not RoHS instruction designated substance.Therefore, do not need to analyze in more detail.Thus, result of determination is " * ", and is still actual no problem, can use these parts.Not knowing this fact only under the situation with reference to automatic result displayed, only see the souvenir that judgement " * " is such, possible errors is judged as take to make the parts that contain load substances to flow out the countermeasure in market, that is, may measure the same sample of measuring last time or carry out high accuracy analysis once more.And if do not know this exception, data in the past also judge under the situation about storing with " * ", also may investigate over unquestioned reason etc.Analyze once more, high accuracy analysis, fact-finding meeting waste time and expense.
(embodiment 3)
Fig. 8 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 3.
The fluorescent x-ray analyzer 400 of embodiment 3 is with the difference of the fluorescent x-ray analyzer 300 of embodiment 2, constitutes shared database in a plurality of fluorescent x-ray analyzers.In fluorescent x-ray analyzer 400, the structure of each fluorescent x-ray analyzer 300 is identical with the fluorescent x-ray analyzer of embodiment 2 with action.
In fluorescent x-ray analyzer 400, each fluorescent x-ray analyzer 300 can be analyzed respectively individually.Resulting mensuration information (analysis result, condition determination, determination part bit image etc.) is transferred to database 409 by data and stores.The frequency of storage is for to store at each analysis.In addition, in the present embodiment, constitute a shared database 409, but be not limited thereto.For example, with shared database, each fluorescent x-ray analyzer also can have database respectively.Under the situation of this structure, regularly carry out data to shared database and pass on from each database, and the storage data.The frequency of storage also can be for storing at each analysis, still, for example also can be as 1 hour 1 time, 1 day 1 time regular the storage.
The action of fluorescent x-ray analyzer 400 then, is described.
In fluorescent x-ray analyzer 400, the action of each fluorescent x-ray analyzer 300 is identical with the action of explanation in embodiment 2.But, in database 409, except the mensuration information of a fluorescent x-ray analyzer 300, also store the mensuration information of another fluorescent x-ray analyzer 300.Thus, can show up-to-date mensuration information in the mensuration information that a plurality of fluorescent x-ray analyzers obtain.
The example that Fig. 9 is illustrated in the fluorescent x-ray analyzer 300, the result of the display part 308 when measuring brass parts as determinand 305 shows.Display part 308 shows the analysis result of the carrying capacity of environment material that limits at the RoHS instruction by registration in advance with the form of table.As analysis result, show the result of determination that whether meets that contains measured value and limits value automatically at above-mentioned substance.And then, past 3 times the analysis result that extracts by search function before display part 308 is presented on same picture and measures.In the analysis result of Fig. 9, the part that has changed background color is illustrated in each and measures the back situation of edited result respectively.
In RoHS checked, whether investigation contained cadmium (Cd), plumbous (Pb), mercury (Hg), PBBs, PBDE (hereinafter referred to as specific bromine (Br)), sexavalent chrome (Cr).In containing in the analysis of described material, use various analytical equipments such as fluorescent X-ray device, gas chromatograph mass analyzer, inductively coupled plasma luminesceence analysis device.But, from the viewpoint of operability/cost, usually at first utilize fluorescent x-ray analyzer to contain the quantitative test of element, under the situation that detects bromo element more than the specification value and chromium element, further carry out detail analysis.
As shown in Figure 9, described determinand is that brass parts contains the above lead element of 1500ppm.On the other hand, in the RoHS instruction, forbid containing the above lead element of 1000ppm, so, in judging automatically, be shown as " * ".But in the application exceptional item of RoHS instruction, because the problem of material purity, the lead in the brass starting material contains and allows 40000ppm.Therefore, because outside the application examples, the result of determination of lead element also was judged as " zero " originally, did not need further to analyze.Thus, shown result of determination is " * ", and is still actual no problem, can use these parts.Outside not knowing this application examples and only under the situation with reference to result displayed automatically, only see the souvenir that judgement " * " is such, possible errors is judged as take to make the parts that contain load substances to flow out the countermeasure in market, that is, may measure the same sample of measuring last time or carry out high accuracy analysis once more.And if do not know this exception, data in the past also judge under the situation about storing with " * ", also may investigate over unquestioned reason etc.Analyze once more, high accuracy analysis, fact-finding meeting waste time and expense.
In the present embodiment, past 3 times analysis result is not the analysis result that only shows the past of a fluorescent x-ray analyzer 300.That is,, in the fluorescent x-ray analyzer that the past is not measured, also can show the measurement result in the past of other fluorescent x-ray analyzer actually by shared database 409.By this structure, the analysis result that can utilize the shared demonstration of other fluorescent x-ray analyzer to be carried out in the past by any fluorescent x-ray analyzer can further improve the precision of change point management.
In addition, in the present embodiment, shared database 409 in 2 fluorescent x-ray analyzers, but be not limited to 2.It also can be the fluorescent x-ray analyzer shared database more than 3.
And, about the configuration place in data shared storehouse, both can be arranged, in any one main body of also can packing into the body portion of many fluorescent x-ray analyzers.In a word, if can be between Duo Tai the mensuration information in shared past, then dispose the place and be not particularly limited.
And, in whole embodiments, as a result of judge, the example of " zero ", " * " souvenir is shown, but is not limited thereto.For example, also can use " △ " to wait other souvenir, can also use numeral to judge.
(embodiment 4)
The fluorescent x-ray analyzer of embodiments of the present invention 4 then, is described with reference to Figure 10～Figure 12.
The difference of the fluorescent x-ray analyzer of embodiment 4 and embodiment 2 is, input part 301 can be according to a plurality of different levels that are made of upper level and the next level at least, a plurality of customizing messages of classification input determinand 305, and, database 309 can be according to above-mentioned a plurality of different levels, a plurality of customizing messages of classification and storage.
For example, prepare with reference to the setting of the flowchart text customizing messages of Figure 10.
At first, the customizing messages by input part 301 input determinands 305 constitutes (step S41) by the hierarchical information of several grades.For example, be under the situation of 3 grades in hierarchical information, be input as 3.Then, import the title (step S42) of the key element that constitutes customizing messages successively from upper level.For example, input is as " product " of upper level, as " production code member " of meta level, as " mensuration toponym " these 3 project names of the next level.And then, the above-mentioned number of packages of the customizing messages that database 309 storages are imported and the above-mentioned title (step S43) of key element.
Customizing messages input when then, measuring with reference to the flowchart text of Figure 11.
At first, from database 309, read the title (step S44) of the cuit of the number of packages of customizing messages and customizing messages.Then, as shown in figure 12, operational part (apparatus control portion) 302 shows the cuit (input field) (step S45) of customizing messages on display part 308 in the mode that can import.And then, measure the operator and in the cuit of display part 308, carry out the input (step S46) of each customizing messages (product, production code member, mensuration toponym).
Like this, in the present embodiment, input part 301 can be according to a plurality of different levels, a plurality of customizing messages of classification input determinand 305, and database 309 can be according to above-mentioned a plurality of different levels, a plurality of customizing messages of classification and storage, so, can meet the input of form with device user's the utilization rule of determinand 305.
(embodiment 5)
The fluorescent x-ray analyzer of embodiments of the present invention 5 then, is described with reference to Figure 13～Figure 15.
As Figure 13～shown in Figure 15, the difference of the fluorescent x-ray analyzer of embodiment 5 and embodiment 4 is, when by input part 301 input customizing messages, display part 508 can be had a guide look of the determination part bit image in the past that shows a plurality of determinands 505 corresponding with this customizing messages, and, display part 508 can be arranged the determination part bit image in the past of the determinand 505 that shows that guide look shows according to the order of measuring time on date mensuration position from the old to the new.
Promptly, the fluorescent x-ray analyzer of present embodiment as shown in figure 14, as the specific information selecting unit, showing on the display part 508 by operational part (apparatus control portion) 302: with respect to the level tabulation of carrying out selection operation show tabulation display part (list display unit) 508a as candidate's data, the image displaying part 508b, the button sign that is used for the arbitrary data in the selective listing of the image of demonstration determinand 505 is data selection portion 508c and the customizing messages display part 508d that shows selected customizing messages in tabulation.And the fluorescent x-ray analyzer of present embodiment shows the image and the condition determination of the determinand 505 when measuring on display part 508 when selecting the customizing messages of final level (the next level), carry out measurement operation.
For example, with reference to the customizing messages of flowchart text present embodiment shown in Figure 13.At first, the customizing messages that the fluorescent x-ray analyzer utilization of present embodiment has been selected is retrieval mensuration information from store mensuration database of information 309 in the past, to list in the table at the options of the level of alternative, as shown in figure 14, to the tabulation display part 508a of display part 508 output customizing messages (step S51).
That is, when upper level is the product selection, as customizing messages, the tabulation of output products title.And, when the meta level is the production code member selection, export the tabulation that upper level has promptly been selected the production code member of product.And then, when the next level is promptly measured toponym and selected, export the tabulation of mensuration toponym of the production code member of selecting product and meta level of upper level.
Then, if during the selection of final level (the next level) (step S52), then utilize the image of corresponding determinand 505, as shown in figure 14, up-to-date image (step S53) shows date on display part 508.In addition, for easy to understand, the demonstration when Figure 16 illustrates parts with dice shape shown in Figure 15 as determinand 505.
Then, the operator is specifying the button sign (data selection portion 508c) that is used to select the tabulation on the display part 508 on the picture, determine to select back (step S54), operational part (apparatus control portion) 302 exported selected customizing messages (step S55) to the customizing messages display part 508d of display part 508.Then, if during the selection of final level (the next level) (step S56), then operational part (apparatus control portion) 302 be according to the condition determination of selected tabulation, the preparation of measuring (step S57).
Like this, in the present embodiment, when by input part 301 input customizing messages, can have a guide look of the determination part bit image in the past that shows a plurality of determinands 505 corresponding with customizing messages, so, can grasp the mensuration number of packages, can grasp the amount that measure.
And then in the present embodiment, display part 508 can be arranged the determination part bit image in the past of the determinand 505 that shows that guide look shows according to the order of measuring time on date mensuration position from the old to the new.
Promptly, as shown in figure 16, when the final level of the customizing messages of determinand 505 is selected, be that tabulation display part (list display unit) 508a of the input part 301 of operational part 302 controls shows option according to measuring date order from the old to the new by measuring control part.At this moment, operator's option date, old project implemented to measure operation.
And then after said determination finished, when the final level of the customizing messages of determinand 505 was selected, tabulation display part (list display unit) 508a showed option according to measuring date order from the old to the new once more.
For example, in the tabulation that the left end of Figure 16 shows, show as the mensuration position of measuring the oldest determinand 505 of date under the situation of image of Top (measuring toponym 1), the operator specifies the shown button sign of the tabulation of this left end (data selection portion 508c) on picture, after determining to select, utilize the mensuration position of this tabulation and condition determination to begin to measure.After this is measured, it is when Top (measuring toponym 1) mensuration date being updated to up-to-date mensuration date with the mensuration position of determinand 505.
Therefore, when the operator then measures, when having selected the final level of customizing messages, right-hand member at display part 508 shows that the mensuration position of determinand 505 is the tabulation of Top (measuring toponym 1), with the mensuration position of the 2nd demonstration of on the left side last time be the tabulation of Right side (measuring toponym 5) as the oldest mensuration position, show at left end.Then, the operator specifies the shown button sign (data selection portion 508c) of tabulation of left end once more on picture, after determining to select, utilizes the mensuration position of this tabulation and condition determination to begin to measure.
Like this, in the present embodiment, display part 508 can be according to the order of measuring time on date mensuration position from the old to the new, arrange the determination part bit image in the past of the determinand 505 that shows that guide look shows, so, the operator selects to have a guide look of in the image of demonstration and measures at the image of end all the time, thus, can easily select old mensuration position to measure all the time.Therefore, device indication sequence of operation thus, has alleviated operator's burden, can concentrate one's energy to analyze, and, can not measure with omitting.
(embodiment 6)
The fluorescent x-ray analyzer of embodiments of the present invention 6 then, is described with reference to Figure 17～Figure 19.
As Figure 17～shown in Figure 180, the difference of the fluorescent x-ray analyzer of embodiment 6 and embodiment 1 is, mensuration when mensuration information also comprises the mensuration corresponding with determinand 305 needs the time, and display part 308 can show when measuring from the mensuration in the past corresponding with determinand 305 needs to deduct the time estimation excess time (measuring excess time) that the mensuration when measuring obtained after the elapsed time.
That is, when estimating the demonstration of excess time (measuring excess time), at first, set the customizing messages of determinand 305 in advance, begin to measure (step S61) with reference to flowchart text shown in Figure 180.Then, as shown in figure 19, operational part (mensuration control part) 302 measurement result that retrieval meets from store mensuration database of information 309 is in the past extracted the data on up-to-date mensuration date, and, the actual achievement (step S62) of reading minute.And then operational part (apparatus control portion) 302 deducts the elapsed time of the mensuration of current enforcement from the mensuration actual achievement time of last time, as shown in figure 17, exports estimation excess time and demonstration one by one to display part 308.
Like this, in the present embodiment, display part 308 can show when measuring from the mensuration in the past corresponding with determinand 305 needs to deduct the time mensuration excess time that the mensuration when measuring obtained after the elapsed time, so, can in mensuration, predict and measure the end predetermined instant.
(embodiment 7)
The fluorescent x-ray analyzer of embodiments of the present invention 7 then, is described with reference to Figure 20 and Figure 21.
As shown in figure 20, the difference of the fluorescent x-ray analyzer of embodiment 7 and embodiment 3 is that display part 308 can show edits preceding result of determination and editor's reason.Promptly, in the present embodiment, as shown in figure 21, the edit history information that in database 309, stores the information of the mensuration information in the past of having stored and stored result of determination, editor's reason and editor's name etc., measuring control part is that operational part 302 can be set at, to display part 308 output analysis results the time, show the result of determination that editor is preceding once more, and show editor's reason of result of determination in the lump.For example, as shown in figure 20,, in analysis result, be shown as " outside the RoHS application examples " owing to meeting under the situation of having edited result of determination outside the RoHS application examples.
Like this, in the present embodiment, display part 308 can show edits preceding result of determination and editor's reason, so, can confirm state before changing, can confirm result of determination to be changed, as evidence with which type of reason.
Utilizability on the industry
Fluorescent x-ray analyzer of the present invention is regularly carrying out the neck that contains species analysis of parts The territory is particularly useful.
Claims (10)
1. fluorescent x-ray analyzer, this fluorescent x-ray analyzer shines X ray to determinand, by measuring the fluorescent X-ray that produces from described determinand, analyzes the formation element of described determinand, it is characterized in that this fluorescent x-ray analyzer has:
Input part, its input are used for determining the customizing messages of determinand;
Image pickup part, it obtains the determination part bit image of described determinand;
Display part, it shows the analysis result of described determinand at least after the mensuration of fluorescent X-ray; And
Database, the mensuration information in the past that its storage is corresponding with customizing messages,
Described mensuration information comprises the determination part bit image and the analysis result of determinand,
When described display part is set at the condition determination of fluorescent X-ray, can show the determination part bit image of the described determinand that obtains by described image pickup part at least simultaneously and be stored in past in the mensuration information in described database determination part bit image when measuring with the described determinand that comprises by the corresponding mensuration information of the customizing messages of described input part input.
2. fluorescent x-ray analyzer according to claim 1 is characterized in that,
Described input part can be according to a plurality of different levels that are made of upper level and the next level at least, the a plurality of described customizing messages of the described determinand of classification input, and described database can be according to above-mentioned a plurality of different levels, a plurality of described customizing messages of classification and storage.
3. fluorescent x-ray analyzer according to claim 1 and 2 is characterized in that,
When importing described customizing messages by described input part, described display part can be had a guide look of the described determination part bit image in the past of the described determinand that shows that a plurality of and described customizing messages is corresponding.
4. fluorescent x-ray analyzer according to claim 3 is characterized in that,
Described display part can be arranged the described determination part bit image in the past of the described determinand that shows that guide look shows according to the order of measuring time on date mensuration position from the old to the new.
5. fluorescent x-ray analyzer according to claim 3 is characterized in that,
Mensuration when described mensuration information also comprises the mensuration corresponding with described determinand needs the time,
Described display part can show when measuring from the described mensuration in the past corresponding with described determinand needs to deduct the time mensuration excess time that the mensuration when measuring obtained after the elapsed time.
6. according to any described fluorescent x-ray analyzer in the claim 1～5, it is characterized in that,
Described mensuration information also comprises the information of the condition determination of described determinand,
When described display part is set at the condition determination of fluorescent X-ray, also show the condition determination the when past that is stored in the described determinand in the mensuration information in the described database accordingly with described customizing messages is measured.
7. according to any described fluorescent x-ray analyzer in the claim 1～6, it is characterized in that,
Described display part shows the analysis result the when past that is stored in the described determinand in the mensuration information in the described database accordingly with described customizing messages is measured simultaneously on picture after the mensuration of fluorescent X-ray.
8. according to any described fluorescent x-ray analyzer in the claim 1～7, it is characterized in that,
This fluorescent x-ray analyzer also has detection unit, and this detection unit judges whether the content of the predetermined substance in the formation element of described determinand surpasses defined threshold,
Described analysis result comprises the result of determination of described detection unit,
Described display part also shows described result of determination after the mensuration of fluorescent X-ray,
Described input part can be edited described result of determination.
9. fluorescent x-ray analyzer according to claim 8 is characterized in that,
Described input part can be imported this editor's reason when described editor,
Described display part can show described result of determination before the described editor and described editor's reason.
10. according to Claim 8 or 9 described fluorescent x-ray analyzers, it is characterized in that,
Described predetermined substance is the carrying capacity of environment material by RoHS instruction restriction.
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| CN112204387A (en) * | 2018-09-28 | 2021-01-08 | 株式会社理学 | Measuring device, program, and method for controlling measuring device |
| US11513086B2 (en) | 2020-05-18 | 2022-11-29 | Rigaku Corporation | X-ray fluorescence spectrometer |
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| JP2014035334A (en) * | 2012-08-10 | 2014-02-24 | Hitachi High-Tech Science Corp | Fluorescent x-ray analysis method and fluorescent x-ray analyzer |
| JP6657851B2 (en) * | 2015-11-27 | 2020-03-04 | 日産化学株式会社 | Determination of trace chlorine components |
| JP6601854B1 (en) * | 2018-06-21 | 2019-11-06 | 株式会社リガク | X-ray fluorescence analysis system |
| JP7238366B2 (en) * | 2018-11-30 | 2023-03-14 | 株式会社島津製作所 | Analysis system |
| JP7315282B2 (en) * | 2019-07-02 | 2023-07-26 | 第一実業ビスウィル株式会社 | Appearance inspection device |
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| JP2003156460A (en) * | 2001-09-10 | 2003-05-30 | Jeol Ltd | Method and system for managing data |
| JP2006039844A (en) * | 2004-07-26 | 2006-02-09 | Toshiba Corp | Quality control device and quality control program |
| JP2006071376A (en) * | 2004-08-31 | 2006-03-16 | Horiba Ltd | Analyzing system, analyzer, computer program and recording medium |
| JP4383374B2 (en) * | 2005-03-10 | 2009-12-16 | 株式会社リガク | X-ray diffractometer |
| JP4859019B2 (en) * | 2005-07-06 | 2012-01-18 | 株式会社リガク | X-ray diffractometer |
| JP2009174977A (en) * | 2008-01-24 | 2009-08-06 | Panasonic Corp | Inspection device and inspection program for electronic component |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112204387A (en) * | 2018-09-28 | 2021-01-08 | 株式会社理学 | Measuring device, program, and method for controlling measuring device |
| US11125704B2 (en) | 2018-09-28 | 2021-09-21 | Rigaku Corporation | Measurement system, program, and measurement system control method |
| CN112204387B (en) * | 2018-09-28 | 2022-03-15 | 株式会社理学 | Measuring apparatus, computer-readable storage medium, and method of controlling measuring apparatus |
| US11513086B2 (en) | 2020-05-18 | 2022-11-29 | Rigaku Corporation | X-ray fluorescence spectrometer |
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| JP5506288B2 (en) | 2014-05-28 |
| CN101661008B (en) | 2014-11-05 |
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| JP2010078592A (en) | 2010-04-08 |
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