JP2006071376A - Analyzing system, analyzer, computer program and recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an analyzing system capable of efficiently inspecting a substance contained in an inspection target, an analyzer, a computer program and a recording medium. <P>SOLUTION: A computer 30 refers to an inspection important matter database (412) based on the item of an electronic component inputted from a component ordering computer 40 at the time of an ordered part and forms inspection content data showing inspection content on the basis of the inspection important matter data stored in relation to the item not only to store the inspection content data in an inspection content database (361) but also to display the same on a display part (35). The inspection region of the electronic component is irradiated with X rays corresponding to the inspection content data and the concentration of an element to be inspected on the basis of the detected data to record an inspection result on an inspection result database (362). <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an analysis system for analyzing elements contained in an object to be inspected, an analysis apparatus constituting the analysis system, a computer program, and a computer-readable recording medium on which the computer program is recorded.

  In recent years, collection and recycling of electrical products or electronic parts, etc., and regulations on the use of harmful elements contained therein have been established in various regulations from the viewpoint of global environmental protection, and household electrical products, consumer devices, or There is an increasing demand for easily inspecting harmful elements contained in electronic parts which are used for automobile parts and the like and are especially downsized.

X-ray analyzers are used to analyze harmful elements contained in electronic components. An X-ray analyzer includes an X-ray generator that generates X-rays, an X-ray conduit that guides the X-rays generated by the X-ray generator to an object to be inspected, and a sample stage on which an object to be inspected such as an electronic component is placed. And a fluorescent X-ray detector for detecting the fluorescent X-rays emitted from the inspected object irradiated with X-rays, and processing the intensity data of the fluorescent X-ray spectral lines detected by the fluorescent X-ray detector with a computer And the density | concentration of the element contained in to-be-inspected object is displayed with a display apparatus (refer patent document 1).
JP 2004-93511 A

  However, in the X-ray analyzer of Patent Document 1, only the inspection result is displayed for each electronic component placed on the sample stage, and the inspection content of the electronic component needs to be prepared in advance. It was. Electrical products include many electronic components, and since many materials containing various elements are used for these electronic components, the contents to be inspected for each electronic component vary widely. It has not been easy to accurately grasp inspection contents such as element, sampling inspection, or total inspection for each electronic component. In particular, when electronic parts are shipped or received, it is necessary to inspect the electronic parts in a short time, and it has been desired to efficiently inspect a wide variety of electronic parts. Further, even when a large number of identical electronic components are inspected, the inspection results for each electronic component can only be obtained individually, and it has also been desired to efficiently collect the inspection results.

  The present invention has been made in view of such circumstances, and has conventionally been provided with search means for searching for inspection requirement information indicating the inspection requirement of an object to be inspected based on specific information for specifying the object to be inspected. Comparing the analysis system which can easily grasp the contents of the examination and analyze the substance contained in the inspected object according to the contents of the examination, the analyzer constituting the analysis system, and the analyzer An object of the present invention is to provide a computer program for causing a computer to analyze a substance contained in an object to be inspected, and a computer-readable recording medium on which the computer program is recorded.

  Another object of the present invention is to provide an analysis system capable of efficiently totaling inspection results by providing a totaling means for recording the inspection results and totaling the inspection history based on the recorded inspection results. There is.

  Another object of the present invention is to provide an analysis system capable of easily grasping the inspection site for each object to be inspected as compared with the conventional case, because the inspection requirement information includes the inspection site of the object to be inspected. It is to provide.

  Another object of the present invention is that the inspection requirement information includes an element to be inspected of the object to be inspected, so that it is possible to easily grasp the element to be inspected for each object to be inspected as compared with the prior art. To provide a system.

  Another object of the present invention is to provide an analysis system that can easily determine the quality of an object to be inspected by comparing an inspection result with an allowable concentration threshold value of an element to be inspected.

  Another object of the present invention is that the inspection requirement information includes a sampling inspection or a total inspection, so that the number of inspections can be easily grasped according to the object to be inspected. An object of the present invention is to provide an analysis system capable of efficiently inspecting an object to be inspected.

  Another object of the present invention is to provide an analysis system that can easily specify a test site by including a captured image of the test site in the test result.

  Another object of the present invention is to provide a correction means for adding, changing, or deleting inspection requirement information, so that the inspection part of the inspection object, the inspection target element, the allowable concentration threshold value of the inspection target element, the sampling inspection Another object of the present invention is to provide an analysis system that can easily add, change, or delete inspection requirements such as 100% inspection.

  Another object of the present invention is to provide an analysis system capable of analyzing a substance contained in a test object by irradiating the test object with X-rays.

  An analysis system according to a first aspect of the present invention is an analysis system including an analysis device that analyzes a substance contained in an object to be inspected, and a storage device that stores specific information for specifying the object to be inspected. , Storing the inspection requirement information associated with the specific information and indicating the inspection requirement of the object to be inspected, and the analysis apparatus is based on the input unit of the specific information and the specific information input from the input unit And a search means for searching for the inspection requirement information.

  An analysis system according to a second invention is the analysis system according to the first invention, wherein the recording means records the inspection result obtained by inspecting the object to be inspected, and the counting means totals the inspection history based on the inspection result recorded by the recording means. Is further provided.

  The analysis system according to a third invention is characterized in that, in the first invention or the second invention, the inspection requirement information includes an inspection site of the object to be inspected.

  The analysis system according to a fourth aspect of the present invention is the analysis system according to any one of the first to third aspects, wherein the inspection requirement information includes a substance to be inspected of the object to be inspected.

  The analysis system according to a fifth aspect of the present invention is the analysis system according to the fourth aspect, wherein the inspection requirement information includes an allowable concentration threshold value of the substance to be inspected, and further includes comparison means for comparing the inspection result with the allowable concentration threshold value. It is characterized by.

  The analysis system according to a sixth aspect of the present invention is the analysis system according to any one of the first to fifth aspects, wherein the inspection requirement information includes information indicating a sampling inspection or a total inspection.

  The analysis system according to a seventh aspect of the present invention is the analysis system according to any one of the third to sixth aspects, further comprising imaging means for imaging the object to be inspected, wherein the inspection requirement information indicates whether or not the inspection site of the object to be inspected is imaged. When the imaging of the examination site is required, the examination result includes a captured image of the examination site imaged by the imaging means.

  An analysis system according to an eighth aspect of the present invention is the analysis system according to any one of the first to seventh aspects, further comprising a correction unit that adds, changes, or deletes the inspection requirement information.

  An analysis system according to a ninth aspect of the present invention is configured in any one of the first to eighth aspects of the invention to analyze a substance contained in the inspection object by irradiating the inspection object with X-rays. It is characterized by that.

  An analyzer according to a tenth aspect of the present invention is an analyzer for analyzing a substance contained in an object to be inspected, based on input means for specifying information for specifying the object to be inspected, and specifying information input from the input means. Searching means for searching for inspection requirement information stored in association with the specific information and indicating the inspection requirement of the object to be inspected is provided.

  A computer program according to an eleventh aspect of the invention is a computer program for causing a computer to analyze a substance contained in an inspected object based on detection data detected from the inspected object. Based on the specific information to be performed, the information is stored in association with the specific information and functions as a search unit that searches for inspection requirement information indicating the inspection requirement of the object to be inspected.

  A computer-readable recording medium according to a twelfth aspect of the present invention is a computer-readable recording medium storing a computer program for causing a computer to analyze a substance contained in the inspected object based on detection data detected from the inspected object. Computer program for causing a computer to function as search means for searching for inspection requirement information that is stored in association with the specific information and indicates the inspection requirement of the inspected object based on the specific information for specifying the inspected object Is recorded.

  In the first invention, the tenth invention, the eleventh invention, and the twelfth invention, the inspected object is associated with specific information (for example, an item or a product name) for specifying the inspected object (for example, an electronic component). Inspection requirement information indicating the inspection requirements is stored. The inspection requirement information is searched based on the specific information of the inspection object input from the input means.

  In the second invention, the inspection history is totaled based on the inspection result recorded for each object to be inspected.

  In the third aspect of the invention, the inspection requirement information includes an inspection site of the object to be inspected. Based on the identification information of the object to be inspected input from the input means, the inspection site for inspecting the object to be inspected is specified.

  In the fourth invention, the inspection requirement information includes an element to be inspected of the object to be inspected. Based on the identification information of the inspection object input from the input means, the element to be inspected for inspecting the inspection object is specified.

  In the fifth invention, the inspection requirement information includes an allowable concentration threshold value of the element to be inspected. The inspection result obtained by inspecting the object to be inspected is compared with the allowable concentration threshold value, and it is determined whether or not the concentration of the element to be inspected in the object to be inspected is within the allowable value based on the comparison result.

  In the sixth invention, the inspection requirement information includes identification information for identifying whether the inspection of the inspection object is a sampling inspection or a 100% inspection. Based on the identification information of the object to be inspected input from the input means, the sampling inspection or the 100% inspection is specified.

  In the seventh invention, when the inspection requirement information includes the inspection part of the object to be inspected, the imaging device images the inspection part, and the inspection result includes the captured image of the inspection part imaged by the imaging means. .

  In the eighth invention, the correcting means adds, changes, or deletes inspection requirement information such as an inspection site of the object to be inspected, an inspection target element, an allowable concentration threshold of the inspection target element, a sampling inspection, or a total inspection. . Thereby, the inspection content corrected based on the inspection requirement information added, changed, or deleted by the correcting means is specified.

  In the ninth invention, when the object to be inspected is irradiated with X-rays, the object to be inspected emits fluorescent X-rays specific to the element contained in the object to be inspected. The emitted fluorescent X-ray is detected, and the substance contained in the object to be inspected is analyzed based on the detected detection data.

  In the first invention, the tenth invention, the eleventh invention, and the twelfth invention, even if the inspection contents are different for each inspected object by inputting the specific information for specifying the inspected object, The inspection object can be easily inspected.

  According to the second aspect of the invention, it is possible to obtain tabulated information obtained by tabulating the inspection history based on the recorded inspection results.

  In the third invention, by inputting the specific information for specifying the object to be inspected, the inspection site of the object to be inspected can be inspected even when the contents of the inspection differ for each object to be inspected.

  In the fourth invention, by inputting the specific information for specifying the object to be inspected, the inspection target element of the object to be inspected can be inspected even when the inspection contents are different for each object to be inspected. .

  In the fifth invention, by inputting the specific information for specifying the object to be inspected, the concentration of the element to be inspected in the object to be inspected is an allowable value even if the element to be inspected is different for each object to be inspected. It can be determined whether it is within the range.

  In the sixth aspect of the invention, by inputting the specific information for specifying the object to be inspected, the inspection of the object to be inspected is either a sampling inspection or a 100% inspection even if the inspection contents differ for each object to be inspected. Therefore, even when a large number of inspection objects are inspected, it is possible to inspect efficiently.

  In the seventh invention, by including the captured image of the inspection region of the inspection object in the inspection result, the inspection region of the inspection object is specified even when the inspection region is different for each inspection object Can do.

  In the eighth invention, even when a change in the material used for the object to be inspected, a change in the use location of the material, etc. occurs, the inspection site of the object to be inspected is added, changed, or deleted Thus, the inspection of the object to be inspected can be facilitated. In addition, the inspection target element of the object to be inspected or the allowable concentration threshold value of the inspection target element can be added, changed, or deleted, and inspection can be performed in accordance with various regulations for harmful elements. In addition, the number of inspections (sampling inspection or total inspection) can be added, changed, or deleted for each object to be inspected.

  In the ninth invention, it is possible to analyze harmful elements contained in the object to be inspected.

  Hereinafter, the present invention will be described with reference to the drawings illustrating embodiments thereof. FIG. 1 is a block diagram showing the configuration of an analysis system according to the present invention, and FIGS. 2 and 3 are block diagrams showing the configurations of computers 30 and 40. In the figure, reference numeral 10 denotes an X-ray analyzer. The X-ray analyzer 10 analyzes an element contained in an electronic component based on an X-ray irradiation device 20 that irradiates an object to be inspected, which is an electronic component, with X-rays, and detection data detected by the X-ray irradiation device 20. And a computer 30 for analysis. A computer 40 for ordering parts is connected to the computer 30 via a communication line 50.

  In the X-ray irradiation apparatus 20, reference numeral 11 denotes an X-ray generator that generates X-rays. An X-ray conduit 12 is attached to the X-ray generator 11, and the X-ray conduit 12 transmits X-rays generated by the X-ray generator 11 to an opening 15 provided in the vicinity of the sample stage 17. It guide | induces, narrowing down to the thin beam diameter of a 100 micrometers unit, or the beam diameter of about 1-5 mm. As an apparatus for guiding X-rays, an X-ray collimator or the like can be used in addition to the X-ray conduit. The opening 15 is a space closed by the X-ray transmitting body 16, and the inside of the opening 15 is a vacuum. In this case, a vacuum space is formed in the opening 15 by separating the sample stage 17 and the opening 15 by the X-ray transmitting body 16. However, the opening 15 may be the atmosphere, and includes the sample stage 17. The entire space may be a vacuum space. However, it is desirable to keep the X-ray irradiation space in a vacuum in order to prevent secondary X-ray attenuation and the like.

  Each end of the fluorescent X-ray detector 13 that detects secondary X-rays, for example, fluorescent X-rays, which are emitted from the X-ray conduit 12 and the electronic components irradiated with the X-rays and incident on the opening 15. The part is arranged. Further, the light receiving part of the imaging device 14 that images the object to be inspected placed on the sample stage 17 is disposed in the opening 15.

  Motors 19 and 24 are attached to the sample stage 17, and the motor 19 moves the sample stage 17 in two orthogonal directions (X direction and Y direction) parallel to the mounting surface of the sample stage 17. The motor 24 moves the sample stage 17 in the normal direction of the mounting surface of the sample stage 17 and adjusts the distance from the opening 15.

  A stage controller 22 is connected to the motors 19 and 24, and the stage controller 22 controls the positions of the inspection parts of the electronic components placed on the sample stage 17 by controlling the motors 19 and 24.

  An X-ray controller 21 is connected to the X-ray generator 11, and the X-ray controller 21 controls on / off and output intensity of X-rays generated by the X-ray generator 11.

  A data processing unit 23 is connected to the imaging device 14, the X-ray controller 21, and the stage controller 22, and the data processing unit 23 is connected to the imaging device 14, the X-ray controller 21, and the stage via the communication interface unit 231. A control signal is transmitted to the controller 22 to control the operations of the imaging device 14, the X-ray controller 21, and the stage controller 22. Further, the computer 30 is connected to the data processing unit 23 via the communication interface unit 231.

  When receiving the control parameter of the X-ray generator 11 from the computer 30, the data processing unit 23 generates a control signal corresponding to the received parameter and transmits it to the X-ray controller 21. The X-ray controller 21 controls the on / off of X-rays generated by the X-ray generator 11 and the output intensity based on the received control signal.

  When the data processing unit 23 receives the control parameter of the imaging device 14 from the computer 30, the data processing unit 23 generates a control signal corresponding to the received parameter and transmits the control signal to the imaging device 14. The imaging device 14 images an electronic component placed on the sample stage 17 based on the received control signal, and transmits a captured image (including a still image) to the computer 30.

  In addition, when the data processing unit 23 receives the control parameter of the sample stage 17 from the computer 30, the data processing unit 23 generates a control signal corresponding to the received parameter and transmits it to the stage controller 22. The stage controller 22 drives the motors 19 and 24 based on the received control signal to move the sample stage 17. For example, the data processing unit 23 transmits the captured image of the inspection part of the electronic component imaged by the imaging device 14 to the computer 30, causes the captured image to be displayed on the screen by a display unit 35 described later of the computer 30, and the operation button on the screen , The data processing unit 23 receives the control parameters of the sample stage 17 from the computer 30. Thereby, the position of the inspection part of the inspection object can be controlled while viewing the captured image of the inspection object displayed on the display unit 35 of the computer 30.

  The data processing unit 23 includes a pulse processor 232, an MCA 233 (Multi Channel Analyzer), and a spectrum memory 234, and receives a detection signal detected by the fluorescent X-ray detector 13 via the communication interface unit 231.

  The pulse processor 232 converts the detection signal received via the communication interface unit 231 into a pulse waveform proportional to the energy level, and outputs the pulse waveform to the MCA 233. Based on the input pulse waveform, the MCA 233 counts the number of pulses corresponding to the energy of the fluorescent X-rays, that is, the number of pulses for each pulse height, and temporarily stores the count value in the spectrum memory 234. The stored count value is output to the computer 30 via the communication interface unit 231.

  The computer 40 includes a CPU 42, a RAM 46, a storage unit 41 for storing various databases, a communication unit 43 for connection to the computer 30, an input / output unit 44 such as a mouse and a keyboard, and a display unit 45 such as a display. The storage unit 41 stores a component database 411 having information such as electronic component items and product names, a first inspection requirement information database 412 storing inspection requirement information for each electronic component, and a second inspection requirement information database 413.

  FIG. 4 is an explanatory diagram showing a record layout of the component database 411. The parts database 411 stores pre-registered electronic part items (part numbers) and product names, order numbers assigned when ordering electronic parts, order quantities, order dates, and electronic parts received. It consists of columns for the date and time of acceptance, the lot number of the accepted electronic component, and the location code indicating the storage location of the electronic component.

  FIG. 5 is an explanatory diagram showing a record layout of the first inspection requirement information database 412, and FIG. 6 is an explanatory diagram showing a record layout of the second inspection requirement information database 413. The first inspection requirement information database 412 includes an electronic part item, a product name, an inspection part number indicating an inspection part of the electronic part, a part name, and an imaging record necessity flag indicating whether or not a captured image of the inspection part is to be recorded. , And each column of inspection identification information indicating whether all inspections or sampling inspections are performed. For example, the inspection requirement for the cable of the item “CA-1” is that there are two inspection parts, a central part and a connector part, and each toxic element of cadmium, lead, mercury, chromium and bromine is an inspection target element, and the inspection part The captured image is recorded, and 100% inspection is performed.

  The second inspection requirement information database 413 is composed of columns of elements to be inspected and their allowable concentration threshold values which are different for each regulation and regulation. The inspection target element and its allowable concentration threshold value are extracted by the second inspection requirement information database 413 in accordance with applicable regulations and regulations. When the regulations and rules to be applied are determined, the elements to be inspected and their allowable concentration threshold values are extracted and pasted in the first inspection requirement information database 412. One or more regulations / regulations can be applied. In addition, the regulations and rules are not limited to publicly defined regulations, but it is also possible to add regulations uniquely defined in the industry or in-house.

  The computer 30 includes an external storage device 37 that drives a CD-ROM 371 that stores the computer program PG of the present invention, a RAM 33 that temporarily stores the computer program PG, a communication unit 32 for connection to the data processing unit 23, a mouse, and the like. , An input / output unit 34 such as a keyboard, a barcode reader, and a printer, a display unit 35 such as a display, a storage unit 36 that stores various databases, an image memory 38 that stores captured images captured by the imaging device 14, and a computer program A CPU 31 for executing the PG is provided.

  The storage unit 36 stores an inspection content information database 361 that stores inspection content information that is created as a result of searching for inspection requirement information and specifies inspection content, and an inspection result database 362 that records inspection results. The CPU 31 accesses these various databases as the computer program PG is executed.

  FIG. 7 is an explanatory diagram showing a record layout of the examination content information database 361. The inspection content information database 361 includes an inspection lot number assigned for each inspection, an electronic part item, an item name, an electronic part lot number, an inspection part number, a part name, inspection identification information indicating whether the whole inspection or sampling inspection is performed, It consists of a flag indicating whether or not to record a picked-up image of the examination site and a column indicating whether or not to record an image, and each column of the element to be examined.

  FIG. 8 is an explanatory diagram showing a record layout of the inspection result database 362. The inspection result database 362 includes an inspection lot number, an electronic component item, a product name, a lot number, a location code, an inspection date, an inspection site number, a site name, an image obtained by imaging the site name, and the concentration of each element to be inspected. It consists of each column of determination results.

  The CPU 31 transmits the item and quantity of electronic components input from the input / output unit 34 including a keyboard and a mouse to the computer 40. The computer 40 performs part ordering processing based on the received item and quantity, and stores the order number and order date together with the item and quantity in the parts database 411. Further, the CPU 31 acquires an item corresponding to the order number read by the input / output unit 34 provided with the barcode reader from the parts database 411 and temporarily stores it in the RAM 33.

  The CPU 31 reads the item stored in the RAM 33, searches the first inspection requirement information database 412 based on the read item, creates inspection content information based on the search result, and stores it in the inspection content information database 361. Further, the CPU 31 displays the examination content information on the display unit 35 having a display, and outputs it to the input / output unit 34 having a printer.

  FIG. 9 is an explanatory diagram showing an example of screen display of examination content information. As shown in the figure, the screen display displays a lot number, inspection lot number, item, product name, lot number, sampling inspection number, inspection part number and part name, necessity of imaging recording, and the like. For each part, a start button is displayed. When the person in charge of the operation operates the start button, the inspection is started and the inspection result is recorded.

  The CPU 31 temporarily stores detection data such as a pulse count value for each pulse height corresponding to the energy of fluorescent X-rays input from the data processing unit 23 in the RAM 33. The CPU 31 reads the detection data from the RAM 33, executes an inspection process such as calculation of the concentration of the element contained in the electronic component based on the read detection data, and comparison between the calculated concentration and the allowable concentration threshold, and the inspection result is obtained. The result is stored in the inspection result database 362. Further, the CPU 31 displays the inspection result on the display unit 35 having a display and outputs the result to the input / output unit 34 having a printer.

  Based on the inspection results stored in the inspection result database 362, the CPU 31 generates total information obtained by totaling the inspection histories, and displays the generation results on the display unit 35 such as a display, and also to the input / output unit 34 such as a printer. Output.

  10 and 11 are explanatory diagrams showing examples of screen display of total information. As shown in the figure, the lot inspection result inquiry screen shows the lot number, inspection lot number, inspection execution date, item, product name, item quantity, minimum value, maximum value, average value of the concentration of the inspection target element for each inspection site, Standard deviation values, applicable regulations / regulation names, and overall test result pass / fail judgments are displayed. Thereby, transition of the concentration value of the detection target element when many electronic components of the same item are inspected can be grasped. In addition, it is possible to switch the rules and regulations to be applied on these screens, and by switching the rules and regulations to be applied, it is possible to switch the set allowable density threshold and recalculate the pass / fail judgment. It is possible to refer to the pass / fail judgment while constantly checking the regulations and regulations to be performed.

  In addition, the inspection result inquiry screen for each sample displays the inspection result recorded for each electronic component based on the lot inspection result. Thereby, the test result recorded in the past can be easily confirmed.

  The CPU 31 displays the contents of the first inspection requirement information database 412 and the second inspection requirement information database 413 stored in the storage unit 41 of the computer 40 on the display unit 35, and based on the information input from the input / output unit 34, The inspection requirement information to be registered is stored in the first inspection requirement information database 412 or the second inspection requirement information database 413.

  As an example, when a cable having the item “CA-1” is newly commercialized, various regulations of the country in which the cable is used, for example, WEEE (Waste Electrical and Electric Equipment), RoHS (Restriction of the use of) To ensure compliance with certain Hazardous Substances in electrical and electric equipment (ELVs), ELV (End of Life Vehicle), etc., it is possible to register the examination contents. For example, when the regulated harmful elements are cadmium, lead, mercury, chromium, and bromine, these elements are set as inspection target elements, and an allowable concentration threshold is set for each element.

  Further, an examination site is set according to the material used for the cable. For example, in the case of the cable of the item “CA-1”, there are two inspection parts, which are set to inspect the center part and the connector part of the cable. Furthermore, when the cable is newly designed and there are not enough past inspection results, it is set so that all inspections are performed, and an imaging record of the inspection part is specified to specify the inspection part. Set to

  In addition, if the cable with the item “CA-2” has a fine design change compared to the conventional cable, the inspection site is registered according to the design change such as material change, and past inspections are made. Considering the actual results, it can be set to perform a sampling inspection, and the inspection efficiency can be improved. In addition, when it is determined that a captured image of the examination region is not necessary, the setting is made so as not to record and record the examination region.

  The CPU 31 displays the contents of the first inspection requirement information database 412 or the second inspection requirement information database 413 stored in the storage unit 41 of the computer 40 on the display unit 35, and based on the information input from the input / output unit 34, The inspection requirement information is changed or deleted, and the correction result is stored in the first inspection requirement information database 412 or the second inspection requirement information database 413.

  For example, if the location of the inspection site is modified according to the design change, the approval details differ according to the rules to be observed, and if the inspection target element and the allowable concentration threshold are corrected, the number of inspections according to the past inspection results If the regulations and regulations themselves are changed, the inspection requirement information is corrected.

  FIG. 12 is an explanatory diagram illustrating an example of a screen display for registering / modifying inspection requirement information. As shown in the figure, the permissible concentration threshold value of cadmium, lead, mercury, chromium and bromine, which are inspection target elements, can be corrected for each inspection part of an electronic component. Other inspection requirement information can be registered and corrected on the same screen.

  Next, the processing procedure of the analysis system according to the present invention will be described. FIG. 13 is a flowchart showing a processing procedure of the computer 40 for ordering parts. The person in charge of purchasing the parts inputs the part item to be ordered and the order quantity from the input / output unit 44 of the computer 40 (step S101). The computer 40 generates and assigns an order number based on the input item and order quantity (step S102), and on the basis of the input item, the order number, order quantity, order date and time corresponding to the item in the parts database 411. The ordering information such as is stored (step S103), and the process is terminated.

  14 to 17 are flowcharts showing the processing procedure of the computer 30 of the analyzer 10. The person in charge of inspection reads the component slip of the electronic component by the input / output unit 34 including a barcode reader (step S201). The computer 30 extracts the order number and lot number from the data read by the input / output unit 34 (step S202), transmits the extracted order number and lot number to the computer 40 (step S203), and there is no response from the computer 40. In that case (NO in step S204), the processing in step S204 is continued.

  If there is no response from the computer 30 at step S205 (NO at step S205), the computer 40 continues the process at step S205. If the computer 30 transmits the order number and lot number in step S203, it is determined that there is a response from the computer 30 (YES in step S205), and the order number and lot number are received (step S206). The computer 40 stores the receiving information such as the receiving date and time and the location code in the parts database 411 in correspondence with the order number (step S207), and extracts the item corresponding to the order number from the parts database 411 (step S208). The extracted item is transmitted to the computer 30 (step S209), and the process is terminated.

  When the computer 40 transmits the item in step S209, the computer 30 determines that there is a response from the computer 40 (YES in step S204), and receives the item (step S210). As a result, the item is input to the computer 30. The computer 30 searches the first inspection requirement information database 412 and the second inspection requirement information database 413 based on the received item (step S211), and extracts inspection identification information indicating a sampling inspection or a total inspection (step S211). S212). The computer 30 further extracts the examination part (step S213), extracts the necessity of imaging recording of the examination part (step S214), and extracts the inspection target element and the allowable concentration threshold value of each element (step S215).

  The computer 30 creates examination content information based on the information extracted in steps S212, S213, S214, and S215 (step S216), and stores the created examination content information in the examination content information database 361 (step S217). The computer 30 displays an examination content information screen (step S218).

  When the person in charge of the operation operates the examination start button for the examination region on the examination content information screen (step S219), the computer 30 transmits an X-ray irradiation signal to the X-ray irradiation apparatus 20 (step S220).

  The X-ray irradiation apparatus 20 receives the transmitted X-ray irradiation signal (step S221), and irradiates the inspection site of the electronic component placed on the sample stage with X-rays (step S222). The X-ray irradiation apparatus 20 collects the detected detection data (step S223) and determines whether the predetermined time has expired (step S224). If the predetermined time has not ended (NO in step S224), the process of step S223 for collecting detection data is continued until the predetermined time ends. On the other hand, when the predetermined time is over (YES in step S224), the detection data is transmitted to the computer 30 (step S225).

  When the X-ray irradiation apparatus 20 transmits detection data in step S225, the computer 30 receives the detection data (step S226). The computer 30 determines whether or not imaging recording of the examination site is necessary from the examination content information (step S227). If imaging recording is necessary (YES in step S227), imaging for imaging a still image of the examination site. A signal is transmitted to the X-ray irradiation apparatus 20 (step S228).

  When the computer 30 transmits an imaging signal in step S228, the X-ray irradiation apparatus 20 receives the transmitted imaging signal (step S229) and captures a still image of the examination site (step S230). The X-ray irradiation apparatus 20 transmits the captured image to the computer 30 (step S231) and ends the process.

  When the X-ray irradiation apparatus 20 transmits a captured image in step S231, the computer 30 receives the captured image (step S232). The computer 30 calculates the concentration of each element at the examination site based on the detection data received in step S226 (step S233), compares the calculated concentration with the allowable concentration threshold value, and determines whether the element concentration is within the allowable range. It is determined whether or not (step S234), and the inspection result is recorded in the inspection result database 362 together with the received image (step S235).

  On the other hand, if the imaging recording of the examination site is unnecessary in step S227 (NO in step S227), the computer 30 continues the processing from step S233.

  The computer 30 determines whether there is another examination site based on the examination content information (step S236). If there is another inspection part (YES in step S236), the person in charge of the inspection operates the operation button on the screen so that the other inspection part of the electronic component displayed on the display unit 35 is irradiated with X-rays. To move the sample stage 17, and the computer 30 continues the processing from step S219 onward.

  On the other hand, when there is no other examination site (NO in step S236), the computer 30 determines whether or not another electronic component exists (step S237). If another electronic component is present (YES in step S237), the inspector places the other electronic component on the sample stage 17, and the computer 30 continues the processing from step S219 onward. If NO exists (NO in step S237), the process ends.

  As described above, in the present invention, when receiving an ordered electronic component, the item of the electronic component is input, and based on the input item, the inspection requirement information registered in advance is searched, and the inspection content Even if the items of electronic components are different by creating information, the inspection contents corresponding to each electronic component (inspection site, inspection target element, permissible concentration threshold of inspection target element, sampling inspection or 100% inspection distinction) The inspection can be performed according to the necessity of imaging and recording of the inspection site, and the inspection can be performed more efficiently than in the past.

  In the above-mentioned embodiment, although it was an analysis system provided with the X-ray irradiation apparatus using X-rays, the light to be used is not limited to X-rays, The analysis system using the light of another wavelength The present invention can also be applied to.

  In the above-described embodiment, the case where an electronic component is used as an example of an object to be inspected is described. However, the object to be inspected is not limited to an electronic component, and an electrical component, a mechanical component, or the like. However, the present invention can also be applied to parts or products using a material that may contain an element to be inspected.

  In the above embodiment, the first inspection requirement information database 412 and the second inspection requirement information database 413 are stored in the storage unit 41 of the part ordering computer 40. However, the present invention is not limited to this. Instead of this, a configuration in which the data is stored in the storage unit 36 of the computer 30 of the analyzer 10 may be employed.

  In the above-described embodiment, the analysis apparatus 10 is configured to search the first inspection requirement information database 412 of the part ordering computer 40 based on the item of the electronic part. However, the present invention is not limited to this. Instead, the computer 30 of the analysis apparatus 10 may transmit a search request to the computer 40 and receive the search result searched by the computer 40 from the computer 40.

  Further, in the above-described embodiment, the case where the ordered part is received and the electronic part is inspected after receiving is described. However, the present invention is not limited to this, and the produced part is used in the next process such as an assembly process. Needless to say, it can be applied to shipping.

  In the above-described embodiment, the inspection person operates the operation button on the screen while viewing the captured image displayed on the display unit 35 of the computer 30 with the electronic component placed on the sample stage 17. The configuration is such that the specimen stage 17 is moved to inspect the inspection part of the electronic component. However, the present invention is not limited to this, and the X-ray irradiation apparatus includes an operation panel, and the operation panel is operated to move the sample stage 17. It may be configured. Further, the inspection part of the electronic component is scanned in advance, the position coordinates of the sample stage 17 for inspecting each inspection part are stored, and each time the inspection start button on the inspection content information screen is operated, The configuration may be such that the position coordinates of the sample stage 17 corresponding to the part are read and the sample stage 17 is moved.

  In the above-described embodiment, the X-ray irradiation apparatus 20 is configured to transmit the detection data to the computer 30 after the predetermined time is over. However, the present invention is not limited to this, and the X-ray irradiation apparatus 20 collects the detection data. Is provided, and a determination is made as to whether or not a predetermined time has elapsed after the computer 30 has transmitted the X-ray irradiation signal. If the predetermined time has ended, the flag is read and inspected. When data collection is completed, the configuration may be such that the detection data recorded in the spectrum memory 234 is read out.

  In the above-described embodiment, the X-ray is applied to the sample from above, but the X-ray may be applied from below the sample. FIG. 18 is a block diagram illustrating a configuration of an analysis system according to another embodiment.

  In the figure, 120 is an X-ray irradiation apparatus. The X-ray irradiation apparatus 120 is provided with an X-ray source 102 that generates primary X-rays a at a lower portion of a box-shaped X-ray irradiation apparatus main body 101. A specimen stage 103 on which an inspection object 110 is placed is disposed. The sample stage 103 is provided with an X-ray transmission window 104 as an X-ray transmission part that transmits X-rays. The X-ray transmission window 104 is closed with a diaphragm such as a synthetic resin that can transmit the primary X-ray a, the secondary X-ray b, which will be described later, and the visible light c. Further, a side wall 118 is provided on the outer periphery of the sample stage 103, and an openable / closable lid 119 is attached to the upper part of the side wall 118.

  Further, an X-ray conduit 105 for guiding primary X-rays a generated from the X-ray source 102 to the X-ray transmission window 104 is provided in the X-ray irradiation apparatus main body 101. A curved plate 1a that protrudes downward from around the X-ray transmission window 104 and is inserted through the upper portion of the X-ray conduit 105 is provided in the upper part of the X-ray irradiation apparatus main body 101. A space between the transmissive window 104 is a sealed X-ray irradiation space 106. The X-ray irradiation space 106 is desirably kept in a vacuum in order to prevent secondary X-ray attenuation and the like. The X-ray conduit 105 is formed of glass or the like, and guides the primary X-ray a generated by the X-ray source 102 while narrowing it to a thin beam diameter of 10 to 100 μm or a beam diameter of about 1 to 5 mm. The primary X-ray a having a beam diameter is irradiated toward the X-ray transmission window 104 (sample 110).

  Further, in the X-ray irradiation space 106, detection by a semiconductor detector or the like that detects secondary X-rays b such as fluorescent X-rays generated by irradiating the sample 110 with the primary X-rays a from the X-ray conduit 105. Means 107, an illuminator (not shown) for irradiating the X-ray transmission window 104 (sample 110) with visible light, and an X-ray conduit 105 are arranged around the X-ray conduit 105. And a condenser lens 109 that collects the visible light c reflected by the reflector 108 is accommodated.

  The detection means 107 is disposed on one side with respect to the X-ray conduit 105 in a state of being accommodated in one end (insertion side) of a cylindrical housing 113 inserted into the curved plate 1a. By irradiating the primary X-ray a generated from the X-ray source 102 toward the sample 110 on the sample stage 103 from the upper end of the X-ray conduit 105, the secondary X-ray b is generated. Is detected by the detection unit 107 in the X-ray irradiation space 106.

  The condensing lens 109 is disposed on the opposite side of the detection unit 107 with respect to the X-ray conduit 105 in a state of being accommodated in one end (insertion side) of a cylindrical housing 114 inserted into the curved plate 1a. An imaging device 115 such as a CCD camera that images the sample 110 is provided at the other end of the housing 114. The condenser lens 109 is arranged so that its optical axis is approximately 45 degrees with the reflecting surface of the reflector 108. The light condensed by the condenser lens 109 enters the light receiving unit of the imaging device 115.

  The reflector 108 has an insertion portion (not shown) cut into a long hole shape from one side to the center portion, and is composed of a mirror (reflection surface) into which the X-ray conduit 105 is inserted. It is supported by the housing 114 with its reflecting surface facing upward so that the image of the sample 110 can be reflected around the axis of the line conduit 105. That is, the reflector 108 is disposed around the X-ray conduit 105 at an angle of about 45 degrees with respect to the axis of the X-ray conduit 105, and visible light from the sample 110 is transmitted to the axis of the X-ray conduit 105. It is arranged so as to reflect at an angle of approximately 45 degrees with respect to. An image of the sample 110 reflected by the reflector 108 is picked up by the image pickup device 115.

  The detection value detected by the detection unit 107 of the X-ray irradiation apparatus 120 configured as described above is input to the data processing unit 116 that measures the intensity of the secondary X-ray b based on the detection value. The data processing unit 116 outputs the detected detection data to the computer 30. The image captured by the imaging device 115 is displayed on the display unit 35 provided in the computer 30.

  The person in charge of the inspection opens the lid 119 and places the sample 110 near the X-ray transmission part 104 of the sample stage 103. Light (visible light) generated by illumination or the like from the illuminator (not shown) is reflected by the lower surface of the sample 110 and further reflected by the mirror surface of the reflector 108 to receive the light receiving unit of the imaging device 115 from the condenser lens 109. The captured image of the sample 110 is displayed on the display unit 35. The person in charge of the inspection adjusts the placement position of the sample 110 based on the captured image displayed on the display unit 35.

  After completing the adjustment of the mounting position, the inspection person closes the lid 119 and operates the inspection start button on the inspection content information screen displayed on the display unit 35. Thereby, the primary X-ray a is output from the X-ray source 2, and the secondary X-ray b generated by the irradiation of the primary X-ray to the sample 110 is detected by the detection unit 117, and X-ray analysis is performed. Since the primary X-ray a irradiated to the sample 110 is narrowed to a narrow beam diameter by the X-ray conduit 105, the primary X-ray a is irradiated to a part of the sample 110. In this description, the captured image displayed on the display unit 35 is captured from the direction coaxial with the X-ray conduit 105 by the reflector 108, and for example, the primary X toward the center of the imaging screen of the sample 110. A line is irradiated.

  As described above, since the primary X-ray a is irradiated on the lower surface of the sample on the sample stage 103, it is not necessary to move the sample stage 103 according to the size and height of the sample, and the analysis is performed with a simple operation and high accuracy. Is possible.

It is a block diagram which shows the structure of the analysis system which concerns on this invention. It is a block diagram which shows the structure of a computer. It is a block diagram which shows the structure of a computer. It is explanatory drawing which shows the record layout of a components database. It is explanatory drawing which shows the record layout of a 1st inspection requirement information database. It is explanatory drawing which shows the record layout of a 2nd inspection requirement information database. It is explanatory drawing which shows the record layout of a test | inspection content information database. It is explanatory drawing which shows the record layout of a test result database. It is explanatory drawing which shows the example of the screen display of test | inspection content information. It is explanatory drawing which shows the example of a screen display of total information. It is explanatory drawing which shows the example of a screen display of total information. It is explanatory drawing which shows the example of the screen display of registration and correction of inspection requirement information. It is a flowchart which shows the process sequence of the computer for parts ordering. It is a flowchart which shows the process sequence of the computer of an analyzer. It is a flowchart which shows the process sequence of the computer of an analyzer. It is a flowchart which shows the process sequence of the computer of an analyzer. It is a flowchart which shows the process sequence of the computer of an analyzer. It is a block diagram which shows the structure of the analysis system of other embodiment.

Explanation of symbols

10 X-ray analyzer
DESCRIPTION OF SYMBOLS 11 X-ray generator 12 X-ray conduit 13 X-ray fluorescence detector 14 Imaging device 17 Sample stage 19, 24 Motor 20 X-ray irradiation apparatus 21 X-ray controller 22 Stage controller 23 Data processing part 30 Computer 31 CPU
32 Communication unit 33 RAM
34 Input / output unit 35 Display unit 36 Storage unit 37 External storage device 38 Image memory 40 Computer 41 Storage unit 120 X-ray irradiation device 361 Inspection content information database 362 Inspection result database 411 Parts database 412 First inspection requirement information database 413 Second inspection Requirements information database

Claims (12)

An analysis system comprising an analysis device for analyzing a substance contained in an object to be inspected, and a storage device for storing specific information for specifying the object to be inspected,
The storage device
The inspection requirement information that is associated with the specific information and indicates the inspection requirement of the object to be inspected is stored.
The analyzer is
Means for inputting the specific information;
An analysis system comprising: search means for searching for the inspection requirement information based on the specific information input from the input means. A recording means for recording an inspection result obtained by inspecting the inspection object;
The analysis system according to claim 1, further comprising: a counting unit that tabulates the inspection history based on the inspection result recorded by the recording unit.   The analysis system according to claim 1 or 2, wherein the inspection requirement information includes an inspection site of the object to be inspected.   The analysis system according to any one of claims 1 to 3, wherein the inspection requirement information includes a substance to be inspected of the inspection object. The inspection requirement information includes an allowable concentration threshold of the inspection target substance,
The analysis system according to claim 4, further comprising a comparison unit that compares the inspection result with the allowable concentration threshold value.   The analysis system according to any one of claims 1 to 5, wherein the inspection requirement information includes information indicating whether a sampling inspection or a total inspection is performed. An imaging means for imaging the object to be inspected;
The inspection requirement information includes information indicating the necessity of imaging of the inspection site of the inspection object,
The analysis system according to claim 3, wherein when the imaging of the examination site is required, the examination result includes a captured image of the examination site imaged by the imaging unit.   8. The analysis system according to claim 1, further comprising a correction unit that adds, changes, or deletes the inspection requirement information.   9. The analysis system according to claim 1, wherein X-rays are irradiated on the object to be inspected to analyze a substance contained in the object to be inspected. . In an analysis device that analyzes substances contained in a test object,
A means for inputting specific information for specifying the object to be inspected;
An analysis apparatus comprising: search means for searching for inspection requirement information that is stored in association with the specific information based on the specific information input from the input means and indicates the inspection requirement of the object to be inspected. In a computer program for causing a computer to analyze a substance contained in the test object based on detection data detected from the test object,
Computer
A computer program that functions as search means for searching for inspection requirement information that is stored in association with the specific information and that indicates the inspection requirement of the inspection subject based on the specific information that specifies the inspection subject. In a computer-readable recording medium recording a computer program for causing a computer to analyze a substance contained in the object to be inspected based on detection data detected from the object to be inspected,
Computer
A computer program is recorded on the basis of specific information for specifying an object to be inspected, and is stored in association with the specific information and functions as search means for searching for inspection requirement information indicating the inspection requirement of the object to be inspected. Computer-readable recording medium.

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