CN101661008B - Florescent X-ray analyzing device - Google Patents
Florescent X-ray analyzing device Download PDFInfo
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- CN101661008B CN101661008B CN200910168603.1A CN200910168603A CN101661008B CN 101661008 B CN101661008 B CN 101661008B CN 200910168603 A CN200910168603 A CN 200910168603A CN 101661008 B CN101661008 B CN 101661008B
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Abstract
The present invention provides the following florescent X-ray analyzing device, which can perform easy management of change point by comparing with the past determination result information. The florescent X-ray analyzing device comprises: an input portion for inputting special information for determining an object to be detected; a camera shooting portion for acquiring a detection position image of the object to be detected; a display portion for at least displaying the analyzing result of the object to be detected after the detection of the florescent X-ray; and a database for storing the post detection information corresponding to the sepcial information, wherein the detection information comprises the detection position image of the ojbect to be detected and the analyzing result, the display portion at least can simultaneously display the detection position image of the object to be detected acquired by the camera shooting portion, and the post detection position image of the object to be detected contained in the detection information stored in the detection information in the database and corresponding to the special information input by the input portion, when the display portion sets the detection condition at the florescent X-ray.
Description
Technical field
The present invention relates to the fluorescent x-ray analyzer of material.Be particularly related to the fluorescent x-ray analyzer of sneaking into the carrying capacity of environment material in the parts that electric/electronic uses being formed by various components.
Background technology
In recent years, someone points out to form the danger of the carrying capacity of environment material that the parts of electric/electronic contain, and the country of content or the quantity in state that by law/decree, limit these carrying capacity of environment materials constantly increase.For example, from 1996, in EU various countries, by RoHS instruction, ban use of that to contain 1000ppm(Cd be 100ppm) above cadmium (Cd), lead, mercury, specific bromide fire retardant, chromic parts.And, the same law that also gone into effect such as China and U.S.A.For this reason, electric/electronic manufacturer must confirm not contain carrying capacity of environment material more than limits value in each parts.
As the method for measuring constituent content, general use there is the sensitivity of tens ppm, the fluorescence X-ray analyser that can measure within a short period of time in nondestructive mode.
X-ray fluorescence analysis refers to, to determinand X-ray irradiation, by measuring the fluorescent X-ray sending from determinand, analyzes the constituent content of determinand.In using the analytical equipment of this analytical approach, the concentration that is generally known to the element to comprising in determinand is carried out quantitative step.First, set the minute of fluorescent X-ray, start to measure.After setting-up time, the concentration that contains element according to measurement result is calculated.Then, show result.On the other hand, for example as disclosed in Patent Document 1, also there is following method: be not only by setting-up time, to finish to measure end point, but finish to measure at the time point that the deviation of the measured value of fluorescent X-ray reaches below predefined mensuration precision, carry out concentration calculating and show result.
No. 2005/106440 handbook of [patent documentation 1] International Publication
After utilizing said method to measure,, image, condition determination, determination data, other additional information of showing the placement situation of determinand on device are kept to the attached data of device and preserve in part together with Lot Number with the title of determinand.
In electric/electronic manufacturer, in order to confirm not contain carrying capacity of environment material more than limits value in each uses parts, even there are the parts of measuring actual achievement, also need sample etc. and also regularly measure.But, take in the composite component being formed by parts of more than two kinds that electroplate or chip part be representative, the condition determination owing to measuring or the laying method of parts are different, and measurement result is different sometimes.Thus, identical in the time of need to making these conditions measure with last time, with time series, arrange regular measurement result etc., represent the change point management of the abnormal grade on manufacturing.
But, in order to carry out above-mentioned management, in existing fluorescent x-ray analyzer, be difficult.For example, in the situation that will measure the new parts of including in, need to and measure image to condition determination in the past of the outputs such as paper, on one side confirmation carry out the placement of condition determination and parts on one side.And, in the time will confirming a plurality of measurement result in past, must from huge paper information, extract reference data.Therefore, there is the very problem of spended time of the condition determination of parts and the placement of parts.
Summary of the invention
The present invention completes in view of above-mentioned problem just, and its object is, following fluorescent x-ray analyzer is provided: by the comparison of the mensuration information with the past, can be easy to change point management.
Fluorescent x-ray analyzer of the present invention is to determinand X-ray irradiation, by measuring the fluorescent X-ray producing from described determinand, analyze the Constitution Elements of described determinand, it adopts following structure: this fluorescent x-ray analyzer has: input part, and its input is for determining the customizing messages of determinand, image pickup part, it obtains the determination part bit image of described determinand, display part, it at least shows the analysis result of described determinand after the mensuration of fluorescent X-ray, and database, the mensuration information in the past that its storage is corresponding with customizing messages, described mensuration packets of information is containing determination part bit image and the analysis result of determinand, when described display part is set at the condition determination of fluorescent X-ray, at least can show the determination part bit image of the described determinand being obtained by described image pickup part simultaneously, determination part bit image when the past of the described determinand containing with mensuration packets of information corresponding to the customizing messages with being inputted by described input part in the mensuration information being stored in described database is measured, described input part can be according to a plurality of different levels that at least consist of upper level and the next level, a plurality of described customizing messages of the described determinand of classification input, and, described database can be according to above-mentioned a plurality of different levels, a plurality of described customizing messages of classification storage.
And fluorescent x-ray analyzer of the present invention is characterised in that, when inputting described customizing messages by described input part, described display part can be had a guide look of the described determination part bit image in the past that shows a plurality of and the described determinand that described customizing messages is corresponding.
And then fluorescent x-ray analyzer of the present invention is characterised in that, described display part can, according to the order of measuring time on date mensuration position from the old to the new, be arranged the described determination part bit image in the past of the described determinand that shows that guide look shows.
And, fluorescent x-ray analyzer of the present invention is characterised in that, mensuration when described mensuration information also comprises the mensuration corresponding with described determinand needs the time, and described display part can show the mensuration excess time that the mensuration while deducting mensuration from the described mensuration in the past corresponding with described determinand needs the time obtained after the elapsed time when measuring.
And, fluorescent x-ray analyzer of the present invention is characterised in that, described mensuration information also comprises the information of the condition determination of described determinand, when described display part is set at the condition determination of fluorescent X-ray, also show the condition determination when past that is stored in accordingly the described determinand in the mensuration information in described database with described customizing messages is measured.
And, fluorescent x-ray analyzer of the present invention is characterised in that, described display part, after the mensuration of fluorescent X-ray, shows the analysis result when past that is stored in accordingly the described determinand in the mensuration information in described database with described customizing messages is measured on picture simultaneously.
And, fluorescent x-ray analyzer of the present invention is characterised in that, this fluorescent x-ray analyzer also has detection unit, this detection unit judges whether the content of the predetermined substance in the Constitution Elements of described determinand surpasses defined threshold, the result of determination that described analysis result comprises described detection unit, described display part also shows described result of determination after the mensuration of fluorescent X-ray, and described input part can be edited described result of determination.
And then fluorescent x-ray analyzer of the present invention is characterised in that, described input part can be inputted this editor's reason when described editor, and described display part can show described result of determination before described editor and described editor's reason.
And fluorescent x-ray analyzer of the present invention is characterised in that, described predetermined substance is the carrying capacity of environment material being limited by RoHS instruction.
According to fluorescent x-ray analyzer of the present invention, can provide following fluorescent x-ray analyzer: by the comparison of the measurement result information with the past, can be easy to change point management.
Accompanying drawing explanation
Fig. 1 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 1.
Fig. 2 is for the process flow diagram of action of the fluorescent x-ray analyzer of embodiments of the present invention 1 is described.
Fig. 3 is the figure of condition determination that the fluorescent x-ray analyzer of embodiments of the present invention 1 the is shown display part while setting.
Fig. 4 is the figure that the display part after the mensuration of fluorescent x-ray analyzer of embodiments of the present invention 1 is shown.
Fig. 5 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 2.
Fig. 6 is for the process flow diagram of action of the fluorescent x-ray analyzer of embodiments of the present invention 2 is described.
Fig. 7 is the figure that the display part after the mensuration of fluorescent x-ray analyzer of embodiments of the present invention 2 is shown.
Fig. 8 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 3.
Fig. 9 is the figure that the display part after the mensuration of fluorescent x-ray analyzer of embodiments of the present invention 3 is shown.
Figure 10 is the process flow diagram of the action (setting of customizing messages is prepared) for the fluorescent x-ray analyzer of embodiments of the present invention 4 is described.
Figure 11 is the process flow diagram of the action (customizing messages input during mensuration) for the fluorescent x-ray analyzer of embodiments of the present invention 4 is described.
Figure 12 illustrates the figure that the input field of the cuit of the customizing messages in the fluorescent x-ray analyzer of embodiments of the present invention 4 shows.
Figure 13 is the process flow diagram of the action (selection of customizing messages) for the fluorescent x-ray analyzer of embodiments of the present invention 5 is described.
Figure 14 is the figure that the list display part (list display unit) in the fluorescent x-ray analyzer of embodiments of the present invention 5 is shown.
Figure 15 is the stereographic map that the determinand in the fluorescent x-ray analyzer of embodiments of the present invention 5 is shown.
Figure 16 illustrates the key diagram that the demonstration of the list display part (list display unit) in the fluorescent x-ray analyzer of embodiments of the present invention 5 changes.
Figure 17 is the figure that the display case of the estimation excess time in the fluorescent x-ray analyzer of embodiments of the present invention 6 is shown.
Figure 18 is the process flow diagram of the action (estimating the demonstration of excess time) for the fluorescent x-ray analyzer of embodiments of the present invention 6 is described.
Figure 19 is the figure that the example of the information that stores mensuration information in the past in the fluorescent x-ray analyzer of embodiments of the present invention 7 is shown.
Figure 20 is the figure that the display case of the analysis result in the fluorescent x-ray analyzer of embodiments of the present invention 7 is shown.
Figure 21 illustrates to store the information of mensuration information in the past and the figure of the example of edit history information in the fluorescent x-ray analyzer of embodiments of the present invention 7.
Label declaration
200,300,400: fluorescent x-ray analyzer; 201,301: input part; 202,302: operational part; 203,303:X ray generating unit; 204,304: primary X-ray; 205,305,505: determinand; 206,306: secondary x rays; 207,307: test section; 208,308,508: display part; 209,309,409: database; 210,310: image pickup part; 211,311: detection unit.
Embodiment
Below, use accompanying drawing explanation the specific embodiment of the present invention.
In addition, in description thereof is omitted sometimes accompanying drawing, mark the parts of same numeral.And for ease of understanding, accompanying drawing schematically illustrates each inscape.Thus, display shape etc. correctly sometimes.
(embodiment 1)
Fig. 1 is the summary construction diagram of the fluorescent x-ray analyzer 200 of embodiments of the present invention 1.
In Fig. 1, fluorescent x-ray analyzer 200 has: the input part 201 of input data; Carry out the operational part 202 of various computings; The X ray generating unit 203 of irradiating primary X-ray 204 to determinand 205; Detection is from the test section 207 of the secondary x rays (fluorescent X-ray) 206 of determinand 205; The display part 208 that shows various data; Database 209; And the image pickup part 210 at the mensuration position of ray measuring optical 205.
Input part 201 consists of the keyboard etc. of inputting the customizing messages of determinand 205 and condition determination etc. for mensuration person.Customizing messages such as be the title of determined parts and production code member etc., for determining the information of determinand 205.
Operational part 202 consists of various signal processing circuits.Operational part 202 has following calculation function: according to the customizing messages of being inputted by input part 201 and condition determination etc., in X ray generating unit 203, set irradiation time, or according to the spectrum by the detected secondary x rays 206 of test section 207, carry out the quantitative test of each composition.And operational part 202 has detection unit 211, detection unit 211, for the analysis result of determinand 205, judges whether the content of predetermined substance in each composition surpasses defined threshold.As predetermined substance, in the present embodiment, using the carrying capacity of environment material being limited by RoHS instruction as object.Predetermined substance can suitably change, and can register and preserve.
Display part 208 is such as consisting of liquid crystal display etc.Display part 208 is when setting condition determination, and display case is as the determination part bit image of the input picture of condition determination, determinand 205 etc.And, after mensuration, show the analysis result of operational part 202 etc.
Database 209 is such as consisting of hard disk etc.The mensuration information of the analysis result of database 209 storage operational parts 202, condition determination (also referred to as measuring prescription) etc.Condition determination is minute of the irradiation time of primary X-ray 204 and exposure intensity, secondary x rays 206 etc.
Image pickup part 210 consists of with camera lens and imaging apparatus etc. shooting.Image pickup part 210 is taken the image at the mensuration position that is configured in the determinand 205 on sample stage (not shown), and shows on display part 208.Image pickup part 210 can show the determination part bit image of determinand 205 in real time on display part 208.And image pickup part 210 can be obtained determination part bit image after determining mensuration position, is kept in database 109 as one of mensuration information.
The mensuration information of analysis result, condition determination and determination part bit image etc. is kept in database 109 accordingly with the customizing messages of inputting.
The structure of fluorescent x-ray analyzer 200 has more than been described.
The action of fluorescent x-ray analyzer 200 then, is described.
Fig. 2 is for the process flow diagram of action of the fluorescent x-ray analyzer 200 of embodiment 1 is described.
First, in step S1, production code member or the title of the parts that mensuration person will measure by input part 201 inputs are customizing messages.
In step S2, according to the customizing messages of inputting in step S1, the mensuration information in the past in searching database 209.
In step S3, on display part 208, show the corresponding mensuration information of 3 times in the past.Here the mensuration information showing is the determination part bit image of mensuration prescription, determinand 205 etc.
In step S4, mensuration person is placed on determinand 205 on sample stage.In addition, also can carry out the placement of determinand 205 in advance.In step S4, by image pickup part 210, take the determination part bit image that is placed on the determinand 205 on sample stage, on display part 208, show in real time.In addition, Fig. 3 is the figure of condition determination that fluorescent X-ray the is shown display part 208 while setting.As shown in Figure 3, on display part 208, be simultaneously displayed on the determination part bit image in the past of the determinand 205 showing in step S3.Thus, mensuration person can be on one side with reference to determination part bit image in the past, on one side by determinand 205 be placed on position identical while measuring with the past/identical towards.
In step S5, from be kept at the mensuration prescription database 209, select the mensuration prescription corresponding with determinand 205.Now, according to inputted customizing messages, mensuration prescription when initial selected was measured last time.
In step S6, for determinand 205, carry out x-ray fluorescence analysis.Particularly, first, according to selected mensuration prescription, 203 pairs of determinands of X ray generating unit 205 irradiate the X ray of stipulated time.Then, utilize test section 207 to detect the fluorescent X-ray sending from determinand 205.In operational part 202, according to spectrum of detected fluorescent X-ray etc., the concentration that contains element of determinand 205 is carried out quantitatively.
In step S7, display analysis result on display part 208.In addition, Fig. 4 is the figure that the display part 208 after fluorescent X-ray is measured is shown.As shown in Figure 4, shown analysis result is the content of each predetermined substance of comprising in determinand 205 and the result of determination being determined by detection unit 211.And, according to inputted customizing messages, show the analysis result of 3 times in the past simultaneously.In addition, except these analysis results, can also show out of Memory.
Then, enter step S8, inventory analysis result and condition determination etc. in database 209, finish.
In the fluorescent x-ray analyzer 200 of the present embodiment of moving according to above-mentioned steps, there is especially following effect.
The intensity of fluorescent X-ray is subject to the impact of surface state and the shape of determined sample.Therefore, even same determinand, due to the position of placing on sample stage with towards difference, measured value significantly changes, and cannot carry out the change point management of the comparison of the mensuration information based on the past.On the other hand, in fluorescent x-ray analyzer 200, as shown in step S4, while can confirm that image carries out the placement of determinand 205.Therefore, can improve position and towards precision, so, can suppress using position and towards the deviation of the fluorescent X-ray measured value that produces as main cause of difference.As a result, can improve the precision of change point management.
And, measure condition and the kind of measuring element, quantitative method etc. that prescription has stipulated that X ray produces.In the situation that measure with different condition determinations, even if determinand is identical, also can become diverse value, cannot carry out change point management.In the situation that it is few to measure the kind of prescription, the mistake in selection is few, still, conventionally generates 10 kinds of above mensuration prescriptions, so, cannot negate when selecting, to cause the possibility of the wrong choice of measuring prescription.In order to prevent this situation, in fluorescent x-ray analyzer 200, as shown in step S5, according to inputted customizing messages, mensuration prescription when initial selected was measured last time.According to this function, can prevent from measuring the wrong choice of prescription, and operability improves.
In addition, certainly can change the mensuration prescription of initial selected.
The action of fluorescent x-ray analyzer 200 has more than been described.
In addition, in the present embodiment, as analysis result, there are the content of each predetermined substance comprising in determinand and the result of determination being determined by detection unit, still, also can there is part in addition.For example, can also there is the chart that the spectrum of each predetermined substance to comprising in determinand compares.
And, as condition determination, except above-mentioned condition, can also comprise for the setting voltage of X ray generating unit 203 and electric current, spectrum quantitatively in the kind etc. of the typical curve that uses.
(embodiment 2)
The fluorescent x-ray analyzer 300 of embodiments of the present invention 2 then, is described.The fluorescent x-ray analyzer 300 of embodiment 2 is to have the debugging functions of result of determination with the difference of the fluorescent x-ray analyzer 200 of embodiment 1.
Fig. 5 is the summary construction diagram of the fluorescent x-ray analyzer 300 of embodiments of the present invention 2.Fluorescent x-ray analyzer 300 has the structure roughly the same with the fluorescent x-ray analyzer 200 of embodiment 1, still, can carry out the correction of result of determination by input part 301.The fluorescent x-ray analyzer 200 of other structure and embodiment 1 is roughly the same, so description thereof is omitted.In addition, in Fig. 5, the input part 301 of fluorescent x-ray analyzer 300 is corresponding to the input part 201 of Fig. 1, operational part 302 is corresponding to the operational part 202 of Fig. 1, and X ray generating unit 303 is corresponding to the X ray generating unit 203 of Fig. 1, and test section 307 is corresponding to the test section 207 of Fig. 1, display part 308 is corresponding to the display part 208 of Fig. 1, database 309 is corresponding to the database 209 of Fig. 1, and image pickup part 310 is corresponding to the image pickup part 210 of Fig. 1, and detection unit 311 is corresponding to the detection unit 211 of Fig. 1.
The action of fluorescent x-ray analyzer 300 then, is described.
Fig. 6 is for the process flow diagram of action of the fluorescent x-ray analyzer 300 of embodiment 2 is described.The action of step S1～step S8 and fluorescent x-ray analyzer 200 is roughly the same, so description thereof is omitted.Here, the situation that enters step S9 after step S7 is described.
In step S9, revise the result of determination showing on display part 308.For example change display area background color, carry out grid processing, clearly to revise the form of situation, show revised result of determination.
In step S10, can input the reason of revising result of determination.By preserving in advance this correction reason, after during sense analysis result, can confirm the reason of revising.
Then, enter step S8, inventory analysis result and condition determination etc. in database 309, finish.
Distinctive effect in the fluorescent x-ray analyzer 300 of present embodiment of correction step S9, S10 with above-mentioned result of determination is below described.
Fig. 7 illustrates as determinand 305 and an example that the result of display part 308 in step S7 while measuring the plastic components that contains bromide fire retardant shows.The analysis result of the carrying capacity of environment material that display part 308 limits the RoHS instruction by registering in advance with the form show needle of showing.As analysis result, whether the meet result of determination that contain measured value and limits value of automatic show needle to above-mentioned substance.And then, the past analysis result of 3 times that display part 308 extracts by search function before being presented on same picture and measuring.In the analysis result of Fig. 7, the part that has changed background color is illustrated in each and measures the rear situation of edited result respectively.
In RoHS checks, whether investigation contains cadmium (Cd), plumbous (Pb), mercury (Hg), PBBs, PBDE (hereinafter referred to as specific bromine (Br)), sexavalent chrome (Cr).In containing in analysis of described material, use the various analytical equipments such as fluorescent X-ray device, gas chromatograph mass analyzer, inductively coupled plasma luminesceence analysis device.But, from the viewpoint of operability/cost, the quantitative test that conventionally first utilizes fluorescent x-ray analyzer to contain element, the content of mensuration cadmium, lead, mercury, bromine, chromium element.About the cadmium in resulting measurement result, lead, 3 elements of mercury, can directly be considered as content.But the measurement result of bromine and chromium only illustrates the content of each element, not necessarily all as specific bromine and sexavalent chrome and exist.Therefore,, in x-ray fluorescence analysis result, in the situation that obtain surpassing bromo element and the chromium element of specification value, common way is, as long as no distinguishing not the obviously specific bromine of use and sexavalent chrome, just further to implement detailed analysis.
Like this, the bromine in x-ray fluorescence analysis and chromium contain result and specific bromine and chromic to contain result not necessarily consistent, so, when adopting while automatically judging, carry out sometimes mistake judgement.
Fig. 7 illustrates the fluorescent X-ray measurement result of the plastic components that contains bromide fire retardant.In determined parts, as bromide fire retardant, the tetrabromobisphenol-A that contains a few percent left and right.Therefore, the measurement result of bromo element is 100000ppm.In RoHS instruction, forbid containing specific bromine more than 1000ppm, so, in the automatic judgement containing for bromo element of fluorescent X-ray device, if measurement result surpasses 1000, be shown as " * ".But, contain material tetrabromobisphenol-A and do not meet specific bromine, so be not RoHS instruction designated substance.Therefore, do not need to analyze in more detail.Thus, result of determination is " * ", still, actual no problem, can use these parts.The result that only reference shows automatically in the situation that do not know this fact, only see the souvenir that judgement " * " is such, possible errors is judged as the countermeasure that the parts that take to make to contain load substances flow out market, that is, may again measure the same sample of measuring last time or carry out high accuracy analysis.And if do not know this exception, data in the past also judge in situation about storing with " * ", also may investigate over unquestioned reason etc.Again analyze, high accuracy analysis, fact-finding meeting waste time and expense.
Fluorescent x-ray analyzer 300 has manual will be somebody's turn to do " * " and judges the function that is modified to the function of " zero " and records in the lump correction reason.By utilizing this function to carry out edited result, carrying out result while judging in the future, even if know at a glance and contain more than a large amount of settings predetermined substance by described determined parts also it doesn't matter, can be reliably and carry out rapidly result judgement.
(embodiment 3)
Fig. 8 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 3.
The fluorescent x-ray analyzer 400 of embodiment 3 is with the difference of the fluorescent x-ray analyzer 300 of embodiment 2, is configured to shared database in a plurality of fluorescent x-ray analyzers.In fluorescent x-ray analyzer 400, the structure of each fluorescent x-ray analyzer 300 is identical with the fluorescent x-ray analyzer of embodiment 2 with action.
In fluorescent x-ray analyzer 400, each fluorescent x-ray analyzer 300 can be analyzed respectively individually.Resulting mensuration information (analysis result, condition determination, determination part bit image etc.) by data transfer to database 409 and store.The frequency of storage is for to store for each analysis.In addition, in the present embodiment, be configured to and share a database 409, but be not limited to this.For example, together with shared database, each fluorescent x-ray analyzer also can have respectively database.The in the situation that of this structure, regularly from each database to shared database, carry out data transfer, and store data.The frequency of storage also can be for storing for each analysis, still, for example also can be as 1 hour 1 time, 1 day 1 time so regular storage.
The action of fluorescent x-ray analyzer 400 then, is described.
In fluorescent x-ray analyzer 400, the action of each fluorescent x-ray analyzer 300 is identical with the action of explanation in embodiment 2.But, in database 409, except the mensuration information of a fluorescent x-ray analyzer 300, also store the mensuration information of another fluorescent x-ray analyzer 300.Thus, can show up-to-date mensuration information in the mensuration information that a plurality of fluorescent x-ray analyzers obtain.
Fig. 9 is illustrated in a fluorescent x-ray analyzer 300, as determinand 305 and an example that the result of display part 308 while measuring brass parts shows.The analysis result of the carrying capacity of environment material that display part 308 limits the RoHS instruction by registering in advance with the form show needle of showing.As analysis result, whether the meet result of determination that contain measured value and limits value of automatic show needle to above-mentioned substance.And then, the past analysis result of 3 times that display part 308 extracts by search function before being presented on same picture and measuring.In the analysis result of Fig. 9, the part that has changed background color is illustrated in each and measures the rear situation of edited result respectively.
In RoHS checks, whether investigation contains cadmium (Cd), plumbous (Pb), mercury (Hg), PBBs, PBDE (hereinafter referred to as specific bromine (Br)), sexavalent chrome (Cr).In containing in analysis of described material, use the various analytical equipments such as fluorescent X-ray device, gas chromatograph mass analyzer, inductively coupled plasma luminesceence analysis device.But from the viewpoint of operability/cost, the quantitative test that conventionally first utilizes fluorescent x-ray analyzer to contain element, in the situation that detect bromo element and chromium element more than specification value, further carries out detailed analysis.
As shown in Figure 9, described determinand is that brass parts contains lead element more than 1500ppm.On the other hand, in RoHS instruction, forbid containing lead element more than 1000ppm, so, in automatically judging, be shown as " * ".But in the application exceptional item of RoHS instruction, due to the problem of material purity, the lead in brass starting material contains permission to 40000ppm.Therefore, outside application examples, the result of determination of lead element was also judged as " zero " originally, did not need further to analyze.Thus, shown result of determination is " * ", still, actual no problem, can use these parts.In the situation that do not know outside this application examples only with reference to the result automatically showing, only see the souvenir that judgement " * " is such, possible errors is judged as the countermeasure that the parts that take to make to contain load substances flow out market, that is, may again measure the same sample of measuring last time or carry out high accuracy analysis.And if do not know this exception, data in the past also judge in situation about storing with " * ", also may investigate over unquestioned reason etc.Again analyze, high accuracy analysis, fact-finding meeting waste time and expense.
Fluorescent x-ray analyzer 300 has manual will be somebody's turn to do " * " and judges the function that is modified to the function of " zero " and records in the lump correction reason.By utilizing this function to carry out edited result, carrying out result while judging in the future, even if know at a glance and contain more than a large amount of settings predetermined substance by described determined parts also it doesn't matter, can be reliably and carry out rapidly result judgement.
In the present embodiment, the past analysis result of 3 times is not the analysis result that only shows the past of a fluorescent x-ray analyzer 300.That is,, by shared database 409, in the fluorescent x-ray analyzer that the past is not measured actually, also can show the measurement result in the past of other fluorescent x-ray analyzer.By this structure, can utilize other fluorescent x-ray analyzer to share and show the analysis result being carried out in the past by any fluorescent x-ray analyzer, can further improve the precision of change point management.
In addition, in the present embodiment, shared database 409 in 2 fluorescent x-ray analyzers, but be not limited to 2.Also can be 3 above fluorescent x-ray analyzer shared databases.
And, about the configuration place of shared database, both can be arranged with the body portion of many fluorescent x-ray analyzers, also can pack in the main body of any.In a word, as long as can share mensuration information in the past between Duo Tai, configure place and be not particularly limited.
And, in whole embodiments, as a result of judge, the example of " zero ", " * " souvenir is shown, but is not limited to this.For example, also can use other souvenirs such as " △ ", can also use numeral to judge.
(embodiment 4)
The fluorescent x-ray analyzer of embodiments of the present invention 4 then, is described with reference to Figure 10～Figure 12.
The difference of the fluorescent x-ray analyzer of embodiment 4 and embodiment 2 is, input part 301 can be according to a plurality of different levels that at least consist of upper level and the next level, a plurality of customizing messages of classification input determinand 305, and, database 309 can be according to above-mentioned a plurality of different levels, a plurality of customizing messages of classification storage.
For example, with reference to the setting of the flowchart text customizing messages of Figure 10, prepare.
First, the customizing messages by input part 301 input determinands 305 forms (step S41) by the hierarchical information of several grades.For example, in the situation that hierarchical information is 3 grades, be input as 3.Then, the title (step S42) of the key element of the customizing messages of input formation successively from upper level.For example, input is as " product " of upper level, as " production code member " of meta level, as " mensuration toponym " these 3 project names of the next level.And then, the above-mentioned number of packages of customizing messages and the above-mentioned title (step S43) of key element that database 309 storages are inputted.
Customizing messages input while then, measuring with reference to the flowchart text of Figure 11.
First, from database 309, read the title (step S44) of the number of packages of customizing messages and the cuit of customizing messages.Then, as shown in figure 12, operational part (apparatus control portion) 302 shows the cuit (input field) (step S45) of customizing messages on display part 308 in the mode that can input.And then, measure operator and in the cuit of display part 308, carry out the input (step S46) of each customizing messages (product, production code member, mensuration toponym).
Like this, in the present embodiment, input part 301 can be according to a plurality of different levels, a plurality of customizing messages of classification input determinand 305, and database 309 can be according to above-mentioned a plurality of different levels, a plurality of customizing messages of classification storage, so, can meet the input of the form of determinand 305 and device user's applying rules.
(embodiment 5)
The fluorescent x-ray analyzer of embodiments of the present invention 5 then, is described with reference to Figure 13～Figure 15.
As shown in Figure 13～Figure 15, the difference of the fluorescent x-ray analyzer of embodiment 5 and embodiment 4 is, when by input part 301 input customizing messages, display part 508 can be had a guide look of the determination part bit image in the past that shows a plurality of determinands corresponding with this customizing messages 505, and, display part 508 can, according to the order of measuring time on date mensuration position from the old to the new, be arranged the determination part bit image in the past of the determinand 505 that shows that guide look shows.
; the fluorescent x-ray analyzer of present embodiment as shown in figure 14; as specific information selecting unit, by operational part (apparatus control portion) 302, on display part 508, show: with respect to the level list of selecting operation, show list display part (list display unit) 508a as candidate's data, in list, show the image displaying part 508b of the image of determinand 505, for the button sign of the arbitrary data in selective listing, be the 508c of data selection portion and the customizing messages display part 508d that shows selected customizing messages.And the fluorescent x-ray analyzer of present embodiment, when selecting the customizing messages of final level (the next level), shows image and the condition determination of the determinand 505 while measuring on display part 508, carries out measurement operation.
For example,, with reference to the customizing messages of the flowchart text present embodiment shown in Figure 13.First, the customizing messages that the fluorescent x-ray analyzer utilization of present embodiment has been selected is retrieved mensuration information from store the database 309 of mensuration information in the past, the options of the level for alternative is listed in table, as shown in figure 14, the list display part 508a to display part 508 exports customizing messages (step S51).
That is, when upper level is product selection, as customizing messages, the list of output products title.And, when meta level is production code member selection, exports upper level and selected the list of the production code member of product.And then, when the next level is measured toponym and selected, export the list of mensuration toponym of the production code member of selecting product and meta level of upper level.
Then, if during the selection of final level (the next level) (step S52), utilize the image of corresponding determinand 505, as shown in figure 14, up-to-date image (step S53) shows date on display part 508.In addition, for ease of understanding, Figure 16 illustrates the demonstration during as determinand 505 using the parts of the dice shape shown in Figure 15.
Then, operator specifies for selecting the button sign (508c of data selection portion) of the list on display part 508 on picture, determine and select rear (step S54), operational part (apparatus control portion) 302 exported selected customizing messages (step S55) to the customizing messages display part 508d of display part 508.Then,, if during the selection of final level (the next level) (step S56), operational part (apparatus control portion) 302 be according to the condition determination of selected list, the preparation of measuring (step S57).
Like this, in the present embodiment, when by input part 301 input customizing messages, can have a guide look of the determination part bit image in the past that shows a plurality of determinands corresponding with customizing messages 505, so, can grasp mensuration number of packages, can grasp the amount that measure.
And then in the present embodiment, display part 508 can, according to the order of measuring time on date mensuration position from the old to the new, be arranged the determination part bit image in the past of the determinand 505 that shows that guide look shows.
; as shown in figure 16; when the final level of the customizing messages of determinand 505 is selected, by measuring control part, be that list display part (list display unit) 508a of the input part 301 controlled of operational part 302 shows option according to measuring date order from the old to the new.Now, operator's option date, old project implemented to measure operation.
And then after said determination finishes, when the final level of the customizing messages of determinand 505 is selected, list display part (list display unit) 508a shows option according to measuring date order from the old to the new again.
For example, in the list showing at the left end of Figure 16, as measuring the mensuration position of the oldest determinand 505 of date, show that Top(measures toponym 1) the situation of image under, operator specifies the shown button sign of the list of this left end (508c of data selection portion) on picture, determine after selection, utilize the mensuration position of this list and condition determination to start to measure.After this is measured, by the mensuration position of determinand 505, be that Top(measures toponym 1) the date of mensuration date while being updated to up-to-date mensuration.
Therefore, when operator then measures, when having selected the final level of customizing messages, at the right-hand member of display part 508, show that the mensuration position of determinand 505 is that Top(measures toponym 1) list, using the mensuration position of the 2nd demonstration of on the left side last time, be that Right side(measures toponym 5) list as the oldest mensuration position, at left end, show.Then, operator specifies the shown button sign of the list of left end (508c of data selection portion) again on picture, determines after selection, utilizes the mensuration position of this list and condition determination to start to measure.
Like this, in the present embodiment, display part 508 can be according to the order of measuring time on date mensuration position from the old to the new, arrange the determination part bit image in the past of the determinand 505 that shows that guide look shows, so, in the image that operator selects guide look to show, at the image of end, measure all the time, thus, can easily select all the time old mensuration position to measure.Therefore, device indication sequence of operation, thus, has alleviated operator's burden, can concentrate one's energy to analyze, and, can not measure with omitting.
(embodiment 6)
The fluorescent x-ray analyzer of embodiments of the present invention 6 then, is described with reference to Figure 17～Figure 19.
As shown in Figure 17～Figure 18, the difference of the fluorescent x-ray analyzer of embodiment 6 and embodiment 1 is, mensuration when mensuration information also comprises the mensuration corresponding with determinand 305 needs the time, and display part 308 can show the estimation excess time (measuring excess time) that deducts the mensuration while measuring and obtain after the elapsed time from the mensuration in the past corresponding with determinand 305 needs the time when measuring.
That is, while estimating the demonstration of excess time (measuring excess time) with reference to the flowchart text shown in Figure 18, first, set the customizing messages of determinand 305 in advance, start to measure (step S61).Then, as shown in figure 19, operational part (mensuration control part) 302 measurement result that retrieval meets from store the database 309 of mensuration information in the past, extracts the data on up-to-date mensuration date, and, the actual achievement (step S62) of reading minute.And then operational part (apparatus control portion) 302 deducts the elapsed time of the mensuration of current enforcement from the mensuration actual achievement time of last time, as shown in figure 17, to successively output estimation excess time demonstration of display part 308.
Like this, in the present embodiment, display part 308 can show the mensuration excess time that the mensuration while deducting mensuration from the mensuration in the past corresponding with determinand 305 needs the time obtained after the elapsed time when measuring, so, can in mensuration, predict to measure and finish predetermined instant.
(embodiment 7)
The fluorescent x-ray analyzer of embodiments of the present invention 7 then, is described with reference to Figure 20 and Figure 21.
As shown in figure 20, the difference of the fluorescent x-ray analyzer of embodiment 7 and embodiment 3 is, display part 308 can show result of determination before editor and editor's reason.; in the present embodiment; as shown in figure 21; the edit history information that stores the information of the mensuration information in the past of having stored and stored result of determination, editor's reason and editor's name etc. in database 309; measuring control part is that operational part 302 can be set as; when to display part 308 output analysis result, again show the result of determination before editor, and show in the lump editor's reason of result of determination.For example, as shown in figure 20, owing to meeting edited result of determination outside RoHS application examples in the situation that, in analysis result, be shown as " outside RoHS application examples ".
Like this, in the present embodiment, display part 308 can show result of determination before editor and editor's reason, so, can confirm state before changing, can confirm with which type of reason, result of determination to be changed, as evidence.
Utilizability in industry
Fluorescent x-ray analyzer of the present invention is particularly useful in the field of containing species analysis of regularly carrying out parts.
Claims (10)
1. a fluorescent x-ray analyzer, this fluorescent x-ray analyzer, to determinand X-ray irradiation, by measuring the fluorescent X-ray producing from described determinand, is analyzed the Constitution Elements of described determinand, it is characterized in that, this fluorescent x-ray analyzer has:
Input part, its input is for determining the customizing messages of determinand;
Image pickup part, it obtains the determination part bit image of described determinand;
Display part, it at least shows the analysis result of described determinand after the mensuration of fluorescent X-ray; And
Database, the mensuration information in the past that its storage is corresponding with customizing messages,
Described mensuration packets of information contains determination part bit image and the analysis result of determinand,
When described display part is set at the condition determination of fluorescent X-ray, determination part bit image when the past that at least can show the determination part bit image of the described determinand being obtained by described image pickup part simultaneously and be stored in the described determinand that mensuration packets of information corresponding to the customizing messages with being inputted by described input part in the mensuration information in described database contain is measured
Described input part can be according to a plurality of different levels that at least consist of upper level and the next level, a plurality of described customizing messages of the described determinand of classification input, and described database can be according to above-mentioned a plurality of different levels, a plurality of described customizing messages of classification storage.
2. fluorescent x-ray analyzer according to claim 1, is characterized in that,
When inputting described customizing messages by described input part, described display part can be had a guide look of the described determination part bit image in the past that shows a plurality of and the described determinand that described customizing messages is corresponding.
3. fluorescent x-ray analyzer according to claim 2, is characterized in that,
Described display part can, according to the order of measuring time on date mensuration position from the old to the new, be arranged the described determination part bit image in the past of the described determinand that shows that guide look shows.
4. fluorescent x-ray analyzer according to claim 2, is characterized in that,
Mensuration when described mensuration information also comprises the mensuration corresponding with described determinand needs the time,
Described display part can show the mensuration excess time that the mensuration while deducting mensuration from the described mensuration in the past corresponding with described determinand needs the time obtained after the elapsed time when measuring.
5. according to the fluorescent x-ray analyzer described in any one in claim 1～4, it is characterized in that,
Described mensuration information also comprises the information of the condition determination of described determinand,
When described display part is set at the condition determination of fluorescent X-ray, also show the condition determination when past that is stored in accordingly the described determinand in the mensuration information in described database with described customizing messages is measured.
6. fluorescent x-ray analyzer according to claim 1, is characterized in that,
Described display part, after the mensuration of fluorescent X-ray, shows the analysis result when past that is stored in accordingly the described determinand in the mensuration information in described database with described customizing messages is measured on picture simultaneously.
7. fluorescent x-ray analyzer according to claim 1, is characterized in that,
This fluorescent x-ray analyzer also has detection unit, and this detection unit judges whether the content of the predetermined substance in the Constitution Elements of described determinand surpasses defined threshold,
The result of determination that described analysis result comprises described detection unit,
Described display part also shows described result of determination after the mensuration of fluorescent X-ray,
Described input part can be edited described result of determination.
8. fluorescent x-ray analyzer according to claim 7, is characterized in that,
Described input part can be inputted this editor's reason when described editor,
Described display part can show described result of determination before described editor and described editor's reason.
9. fluorescent x-ray analyzer according to claim 7, is characterized in that,
Described predetermined substance is the carrying capacity of environment material being limited by RoHS instruction.
10. fluorescent x-ray analyzer according to claim 8, is characterized in that,
Described predetermined substance is the carrying capacity of environment material being limited by RoHS instruction.
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| JP2008219147 | 2008-08-28 | ||
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| JP2009192761A JP5506288B2 (en) | 2008-08-28 | 2009-08-24 | X-ray fluorescence analyzer |
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| JP2014035334A (en) * | 2012-08-10 | 2014-02-24 | Hitachi High-Tech Science Corp | Fluorescent x-ray analysis method and fluorescent x-ray analyzer |
| JP6657851B2 (en) * | 2015-11-27 | 2020-03-04 | 日産化学株式会社 | Determination of trace chlorine components |
| JP6601854B1 (en) * | 2018-06-21 | 2019-11-06 | 株式会社リガク | X-ray fluorescence analysis system |
| JP6679049B2 (en) | 2018-09-28 | 2020-04-15 | 株式会社リガク | Measuring device, program, and control method of measuring device |
| JP7238366B2 (en) * | 2018-11-30 | 2023-03-14 | 株式会社島津製作所 | Analysis system |
| JP7315282B2 (en) * | 2019-07-02 | 2023-07-26 | 第一実業ビスウィル株式会社 | Appearance inspection device |
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| JP2006071376A (en) * | 2004-08-31 | 2006-03-16 | Horiba Ltd | Analyzing system, analyzer, computer program and recording medium |
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