JP4859019B2 - X-ray diffractometer - Google Patents

Description

  The present invention relates to an X-ray diffraction apparatus for analyzing a sample using X-rays.

  In general, in an X-ray diffractometer, measurement is performed such that a sample is irradiated with X-rays and X-rays diffracted by the sample are detected by an X-ray detector. In performing such measurement, usually, a plurality of measurement conditions are set to a predetermined value or a predetermined range by an operator. The measurement conditions include, for example, which axis is selected as the measurement axis, how many times the diffraction angle is set to the measurement range, how many times the diffraction angle is scanned with an angular step width, Conditions such as the scanning speed at which the diffraction angle is scanned can be considered.

  As described above, when setting measurement conditions in an X-ray diffraction apparatus, a technique for displaying an image for inputting measurement conditions on a screen of a display is known (for example, see Patent Document 1). According to this X-ray diffractometer, the measurement condition can be set to a desired value or range by operating an input device such as a mouse while the operator visually recognizes the input screen.

JP 11-237348 A (page 3, FIG. 2)

  However, regarding the conventional input image, although the column or region for inputting the measurement condition is displayed, the explanation about the measurement condition is not displayed. For this reason, a numerical value that cannot be input may be erroneously input. And in order to avoid such an error, it was necessary to refer to the instruction manual of the X-ray diffractometer.

  Also, a screen display technique is known in which, in the screen display of a conventional X-ray diffractometer, an explanation regarding the measurement condition is always displayed in the vicinity of a column or region for inputting the measurement condition. In this conventional technique, as the input area increases, the display for explaining the measurement conditions increases, and thus there is a problem that the screen display becomes difficult to see and the area of the screen display increases.

  The present invention has been made in view of the above-described problems, and it is possible to present an explanation regarding measurement conditions to an operator on the screen of a display device, and even when the presentation is performed, the screen is difficult to see. It is an object of the present invention to provide an X-ray diffraction apparatus that does not become.

  The X-ray diffractometer according to the present invention has (1) a plurality of measurement axes including a measurement axis defined by the interlocking of a plurality of moving systems, and one of the plurality of measurement axes is selected and measured. Measuring means for measuring by moving an X-ray element with respect to an axis, (2) Display means for displaying an image on a screen based on image data, and (3) Designating an area in the screen of the display means And (4) a measurement axis input region for performing input for selecting the one measurement axis, and a scanning speed of the X-ray element with reference to the one measurement axis. Generating image data of an input image including three areas of a scanning speed input area for inputting a step width input area for inputting a scanning step width, and supplying the image data to the display means, The input image is displayed on the screen of the display means. (5) When one of the measurement axes defined by the interlocking of a plurality of moving systems is instructed by the input means, and the scanning speed is input by the input means The effective range data for determining the effective range of the step width value that can be input to the step width input area by calculation according to the plurality of moving systems that specify the specified one measurement axis and the input scanning speed (6) generating image data of an image including a value of the effective range of the step width determined by the effective range data generating unit, supplying the image data to the display unit, and the input unit On the screen of the display means for a predetermined time after the step width input area is instructed, the step and the step width input area are simultaneously displayed on the screen. And having an effective range image generating display means for displaying the effective range of up width.

  In the above configuration, the “measurement axis” is an axis that is a reference for measurement when performing measurement. The X-ray diffractometer includes an X-ray source, a sample support device, an X-ray detector, and various other X-ray elements. Further, various drive systems that drive these X-ray elements for measurement, that is, moving systems are also included. The above measurement axes may be realized by one of these drive systems, or one measurement axis may be realized by a combination of operations of a plurality of drive systems.

  In the above configuration, the “measuring means” includes, for example, an X-ray source that emits X-rays, an incident-side optical system that guides the X-rays to the sample, a sample support device that supports the sample, and X-rays diffracted by the sample. It can be formed by arranging X-ray elements such as a light receiving side optical system that leads to a detector and an X-ray detector that detects X-rays at predetermined positions.

  The “display means” can be configured by, for example, a display using a CRT (Cathode Ray Tube), a display using a flat panel display such as a liquid crystal display device, or any other display device that displays an image with an arbitrary structure. The “input unit” includes an input device such as a keyboard and a mouse.

  Further, the “input image generation / display unit”, “effective range data generation unit”, and “effective range image generation / display unit” include, for example, a CPU (Central Processing Unit) that realizes a calculation function and a control function of a computer. , RAM (Random Access Memory), ROM (Read Only Memory), hard disk and other storage media, application software that allows them to function as function realizing means, and image signal processing that generates and supplies image signals suitable for display means A circuit or the like can be combined.

  “Effective range data generation means” determines, for example, an effective range that fits the 2θ axis when the 2θ axis is selected as the measurement axis, and an effective fit that matches the ω axis when the ω axis is selected as the measurement axis. The range is determined, and when the 2θ / ω axis is selected as the measurement axis, an effective range that matches the 2θ / ω axis is determined. As a method of determination, for example, a method of storing an arithmetic expression in application software and sequentially determining by calculation is conceivable. A method of determining using a data table can also be employed.

  According to the X-ray diffraction apparatus having the above configuration, the input image generation and display means displays the input image on the screen of the display means, and the input means can indicate the area in the screen. Measurement conditions related to the means can be set while viewing the screen.

  Further, the image of the effective range related to the input value is only displayed on the screen for a predetermined time after the input area is instructed by the input means, and the image is not displayed when the input area is not instructed, that is, the effective range. Since the image is displayed in a pop-up, the normal screen of the input image can have simple display contents, and therefore it is possible to prevent the normal screen from becoming difficult to see.

  In addition, when one of the measurement axes is instructed by the input unit and the scanning speed is further input by the input unit, an effective range of step width values that can be input to the step width input area is defined as the one measurement axis and the one of the measurement axes. Since the effective range is determined on the screen of the display means by the effective range image generation and display means, the operator needs to determine the effective range by calculation or the like. Instead, an appropriate step width can be input to the step width input area with reference to the effective range displayed on the screen.

  Next, in the X-ray diffraction apparatus according to the present invention, in addition to the effective range, the effective range data generating means (1) the X-ray element rotates and moves around the designated one measurement axis. Settable angle scanning minimum step width when, (2) settable distance scanning minimum step width when the X-ray element is translated along the designated one measurement axis, (3) X-ray A minimum scan speed that can be set when an element rotates around the indicated single measurement axis or translates along the single measurement axis; (4) the X-ray element is indicated; A maximum scanning speed indicated by an angle value per time during a measurement performed by rotating around one measurement axis, and (5) the X-ray element is along the one measurement axis indicated. By moving in parallel At least one thereof or a combination of at least two of the highest scanning speed indicated by the distance value per time from (1) (5) at the time of measurement can be determined by calculation to be. According to this configuration, the operation when the operator inputs measurement conditions relating to the measurement means can be performed more easily and appropriately.

  Next, in the X-ray diffraction apparatus according to the present invention, the plurality of measurement axes defined by the interlocking of the plurality of movement systems are (1) θs movement for changing the angle θs at which the X-ray generation system looks at the sample. An axis defined by the interlocking of the system and the θd moving system for changing the angle θd at which the X-ray detection means looks at the sample, and the 2θ axis that defines the diffraction angle 2θ with respect to the incident X-ray, (2) an axis having the same value as θs when the θs moving system and the θd moving system are interlocked as θd = 2θ−θs, and the ω axis that defines the incident angle ω of X-rays incident on the sample, (3) An axis defined by the interlocking of the θs moving system and the θd moving system, wherein the X-ray incident angle ω incident on the sample and the X-ray diffraction angle 2θ diffracted by the sample are interlocked. It is desirable to use either the 2θ / ω axis, which is a reference for changing.

Hereinafter, an X-ray diffraction apparatus according to the present invention will be described by exemplifying an embodiment. Of course, the present invention is not limited to the embodiment.
FIG. 1 shows an embodiment of an X-ray diffraction apparatus according to the present invention. The X-ray diffractometer 1 includes a measuring device 2 that measures an appropriate substance as a sample, an input device 3 that includes a keyboard, a mouse, and the like, an image display device 4 as a display unit, and a printer as a printing unit. 6, a CPU (Central Processing Unit) 7, a RAM (Random Access Memory) 8, a ROM (Read Only Memory) 9, and a hard disk 11 as an external storage medium. These elements are connected to each other by a bus 12.

  The image display device 4 is configured by an image display device such as a CRT display or a liquid crystal display, and displays an image on a screen according to an image signal generated by the image control circuit 13. The image control circuit 13 generates an image signal based on the image data input thereto. The image data input to the image control circuit 13 is formed by the operation of various arithmetic means realized by a computer including the CPU 7, RAM 8, ROM 9 and hard disk 11. As the printer 6, an ink plotter, a dot printer, an ink jet printer, an electrostatic transfer printer, or any other printing apparatus having an arbitrary structure can be used. The hard disk 11 can also be configured by a magneto-optical disk, a semiconductor memory, or any other storage medium having an arbitrary structure.

  Inside the hard disk 11, analysis application software 16 that controls the overall operation of the X-ray diffraction apparatus 1 according to the present embodiment, measurement application software 17 that controls the operation of the measurement process using the measurement apparatus 2, and Stored is display application software 18 that controls the operation of display processing using the image display device 4. These application software implement predetermined functions after being read from the hard disk 11 and transferred to the RAM 8 as necessary. In addition, a data file 19 for storing various measurement data obtained by the measurement device 2 is provided in the hard disk 11.

  As a file management method for storing a plurality of measurement data in the data file 19, a method of storing individual measurement data in individual files is also conceivable. In the present embodiment, FIG. As shown, a plurality of measurement data are stored continuously in one data file 19. Note that the storage area described as “condition” in FIG. 1A is an area for storing measurement conditions when measurement data is obtained.

  Such measurement conditions include (1) the name of the substance to be measured, (2) the type of measuring device, (3) the measurement temperature range from how many times to (4) the measurement start time, and (5) the measurement end. Time, (6) Measurement angle range from time to time, (7) Moving speed of the scanning movement system, (8) Scanning conditions, (9) Type of X-ray incident on the sample, (10) Sample high temperature apparatus Various other conditions are conceivable, such as whether or not an attachment such as is used.

  As the measuring device 2, for example, the device shown in FIG. 2 is used. The measuring device 2 includes a sample support device 21 that supports a sample S to be measured, an X-ray source 22 that generates X-rays, and an X-ray detector 23 that detects X-rays. A monochromator 24 made of, for example, a single crystal material is provided between the X-ray source 22 and the sample S. The X-ray detector 23 can be configured by, for example, an SC (Scintillation Counter) that is a zero-dimensional counter. The measuring device 2 can analyze a powder sample, a single crystal sample, and a single crystal thin film sample.

  The X-ray source 22 can be configured using, for example, a cathode that is heated and emits thermoelectrons, that is, a filament, and a counter cathode that collides the thermoelectrons emitted from the filament at high speed, that is, a target. The region where the thermoelectrons emitted from the filament collide with the target is the X-ray focal point, and X-rays are emitted from this X-ray focal point. The surface of the target on which the thermal electrons collide can be formed by, for example, copper (Cu). In this case, continuous X-rays including CuKα characteristic lines are emitted from the X-ray focal point. From the X-ray focal point, it is possible to take out a cross-sectional X-ray, so-called point-focused X-ray, or a cross-sectional rectangular X-ray, so-called line-focused X-ray.

  An X-ray generation system 20 including an X-ray source 22 and a monochromator 24 is supported by a Ts moving system 25. The Ts moving system 25 is supported by the θs moving system 26. Further, the θs moving system 26 rotates the X-ray generation system 20 around the horizontal axis line X0 passing through the sample S, whereby the X-ray horizontal line X0 emitted from the X-ray source 22 and monochromatized by the monochromator 24 is obtained. This is a moving system for adjusting the emission angle θs with respect to. The X-ray generation system 20 can be configured not to include the monochromator 24. In this case, the X-ray emission angle θs emitted from the X-ray generation system 20 is the X-ray emission angle emitted from the X-ray source 22. Further, the Ts moving system 25 is a movement for finely adjusting the position of the X-ray generating system 20 along the direction Ts perpendicular to the optical axis of the X-ray that exits the X-ray generating system 20 and enters the sample S. It is a system.

  X-rays emitted from the X-ray source 22 are irradiated to the monochromator 24. The monochromator 24 is supported by the ωM 1 moving system 28. The ωM1 moving system 28 is a moving system for adjusting the incident angle ωM of X-rays incident on the monochromator 24. The monochromator 24 diffracts and emits characteristic X-rays corresponding to its own material from continuous X-rays emitted from the X-ray source 22. For example, the monochromator 24 emits CuKα by diffraction, and the diffraction line enters the sample S through the slit S1.

  The sample support device 21 that supports the sample S includes a Z movement system 31 that translates the sample S in the vertical direction (that is, the Z direction), a φ movement system 32 supported by the Z movement system 31, and the φ movement. And a tilting movement system 33 supported by the system 32. The sample S is directly supported by the tilt movement system 33. The φ moving system 32 is a moving system that rotates the sample S as indicated by an arrow φ around the φ axis that is an axis that crosses the sample S in a perpendicular direction, that is, a so-called in-plane rotation.

  The tilt moving system 33 is a moving system for swinging the sample S as indicated by arrows Rx and Ry, that is, so-called tilt moving. Here, the tilt movement Rx is a tilt movement in the horizontal direction with respect to the X-rays incident on the sample S. The tilt movement Ry is a tilt movement in the direction along the X-ray incident on the sample S. Next, the Z movement system 31 is a movement system for translating the sample S in the vertical direction (that is, the Z direction).

  When X-rays are incident on the sample S, the X-rays are diffracted by the sample S when a diffraction condition between the incident X-rays and the sample S, that is, a so-called Bragg condition is satisfied. The diffracted rays are condensed on the light receiving slit S2 and pass through the slit S2, and then detected by the X-ray detector 23. The slit S <b> 3 is a slit for preventing unnecessary X-rays from being taken into the X-ray detector 23. The X-ray detector 23 is supported by a θd moving system 37. The θd moving system 37 is a moving system for rotating the X-ray detector 23 about the horizontal axis X0 in order to adjust the angle 2θ with respect to the incident X-ray of the X-ray detector 23.

  The measuring apparatus 2 according to the present embodiment has a plurality of measuring axes. The measurement axis is an axis that serves as a reference when the elements such as the X-ray generation system 20, the sample S, the X-ray detector 23, and the like are moved alone or in conjunction with each other. With respect to these measurement axes, there are measurement axes that are realized by a single operation of each of the above-described moving systems, and there are measurement axes that are realized by a plurality of interlocks of each of the above-described moving systems. Hereinafter, these measurement axes will be described.

(1) θs axis This measurement axis is a measurement axis when the angle θs at which the X-ray generation system 20 looks at the sample S is changed. This measurement axis is a rotation axis that serves as a reference when the θs moving system 26 operates to rotate the X-ray generation system 20.

(2) θd axis This measurement axis is a measurement axis when the angle θd at which the X-ray detector 23 looks at the sample S is changed. This measurement axis is a rotation axis that serves as a reference when the θd moving system 37 is operated to rotate the X-ray detector 23.

(3) Rx axis This measurement axis is a measurement axis when the tilt angle Rx of the sample S is changed. This measurement axis is a rotation axis that serves as a reference when the tilt movement system (Rx) operates to tilt the sample S in the Rx direction.

(4) Ry axis This measurement axis is a measurement axis when the tilt angle Ry of the sample S is changed. This measurement axis is a rotation axis that serves as a reference when the tilt movement system (Ry) operates to tilt the sample S in the Ry direction.

(5) Z axis This measurement axis is a measurement axis when the sample S is translated in the vertical direction (that is, the vertical direction). This measurement axis is an axis that serves as a reference when the Z moving system 31 operates to translate the sample S in the vertical direction, that is, in the Z direction.

(6) φ axis This measurement axis is a measurement axis when the sample S is rotated in-plane. This measurement axis is an axis that serves as a reference when the φ moving system 32 operates to rotate the sample S about the vertical axis φ.

(7) 2θ axis This measurement axis is a measurement axis that defines the angle 2θ formed by the diffracted X-rays with respect to the X-rays incident on the sample S. The diffraction angle 2θ is a value determined by 2θ = θs + θd, and a value determined by the interlocking of the θs moving system 26 and the θd moving system 37.

(8) ω-axis This measurement axis is an axis that defines the incident angle ω of X-rays incident on the sample S. While the ω axis feels like the same measurement axis as the θs axis, the angle θs is an angle defined by a single operation of the θs moving system 26, whereas the angle ω maintains the diffraction angle 2θ, The value must be changed. That is, the angle θs can be changed by a single operation of the θs moving system 26, while the angle ω links the θs moving system 26 and the θd moving system 37 so that θd = 2θ−θs. Can be changed. When moved in this way, the angle ω coincides with the angle θs. For these reasons, the ω measurement axis and the θs measurement axis exist as different measurement axes.

(9) 2θ / ω axis This measurement axis is a reference axis when the X-ray incident angle ω and the X-ray diffraction angle 2θ are changed in conjunction with each other. The angle value with reference to the 2θ / ω axis is a value determined by the interlocking of the θs moving system 26 and the θd moving system 37.

With respect to the measuring apparatus 2 in FIG. 2, the measurable effective range is determined for each of the plurality of measuring axes. This effective range depends on the mechanical configuration of the apparatus and various other factors. Hereinafter, how the effective range is determined will be described by taking the ω axis as a logical axis as an example.
In FIG. 8A, θs = θd = 5 ° is set. That is, 2θ = 10 ° is set. At this time, ω = 5 °. From this state, when ω is set to 0 ° while maintaining 2θ = 10 ° as shown in FIG. 8B, θs changes from 5 ° to 0 °, and θd changes from 5 ° to 10 °.

  In FIG. 8C, the effective range of θs is determined from −1.5 ° to 77 ° for mechanical structural reasons. Therefore, the lower angle limit of ω, that is, the low limit is −1.5 °. Considering the case where ω = −1.5 ° while maintaining 2θ = 10 °, θs changes from 0 ° to −1.5 °, and θd changes from 10 ° to 11.5 °.

  Next, in FIG. 8D, the effective range of θd is determined from −5 ° to 120 ° for mechanical structural reasons. Therefore, the limit on the high angle side of ω, that is, the high limit is 15 °. Considering a case where ω = 15 ° while keeping 2θ = 10 °, θs changes from −1.5 ° to 15 °, and θd changes from 11.5 ° to −5 °.

  From the above, considering the case where the current state of the measuring apparatus 2 is 2θ = 10 °, the effective range of ω is −1.5 ° to 15 °. In the field of the current X-ray diffraction apparatus, the initial state of the measurement apparatus 2 is often set to 2θ = 10 °. That is, when the power of the measuring device 2 is turned on, initial control is often performed in which the device automatically moves to a state of 2θ = 10 °, stops at that position, and stands by.

  The above description is for the case where the measuring device 2 is set to 2θ = 10 °. Next, the case where the measuring device 2 is set to 2θ = 0 ° will be considered with reference to FIG. In FIG. 9A, θs = θd = 0 ° is set. That is, 2θ = ω = 0 ° is set.

  Next, in FIG. 9B, the effective range of θs is determined from −1.5 ° to 77 ° for mechanical structural reasons. Therefore, the lower angle limit of ω, that is, the low limit is −1.5 °. When ω is set to −1.5 ° while maintaining 2θ = 0 °, θs changes from 0 ° to −1.5 °, and θd changes from 0 ° to 1.5 °.

  Next, in FIG. 9C, the effective range of θd is determined from -5 ° to 120 ° for mechanical structural reasons. Therefore, the limit on the high angle side of ω, that is, the high limit is 5 °. Considering the case where ω = 5 ° while maintaining 2θ = 0 °, θs changes from −1.5 ° to 5 °, and θd changes from 1.5 ° to −5 °. From the above, considering the case where the current state of the measuring apparatus 2 is 2θ = 0 °, the effective range of ω is −1.5 ° to 5 °.

  Next, in FIG. 10A, 2θ is an angle formed by θs and θd. The angle ω is an angle θs in a state where the angle 2θ is kept constant. That is, as shown in FIGS. 10A and 10B, the angle ω is an angle when the angle θs and the angle θd move in association with each other at 1: -1.

  As described above, which moving system in FIG. 2 is selected and operated is determined according to which measurement axis is selected in the measurement. Also, the effective measurement range that can be input is determined according to the selected measurement axis. The relationship between the measurement axis and the moving system and the relationship between the measurement axis and the effective measurement range are stored, for example, in the form of a data table in an appropriate storage area in the hard disk 11 of FIG. Further, a mathematical expression may be stored in a predetermined storage area, and the above effective measurement range may be obtained using the mathematical expression.

  As can be understood from the above description, each axis of the 2θ axis, the ω axis, and the 2θ / ω axis has other measurement axes depending on the movement amount of the X-ray element with reference to these axes. Is a range in which the X-ray element can move, that is, a moving effective range changes. On the other hand, the effective movement range in which the X-ray element can move with reference to the axes of θs axis, θd axis, Rx axis, Ry axis, Z axis, and φ axis is a range uniquely determined without being linked to other axes. .

  The measurement apparatus 2 shown in FIG. 2 can perform measurement by selecting any one of the plurality of measurement axes exemplified above. Hereinafter, the operation of the X-ray diffraction apparatus 1 having the above configuration will be described with reference to the flowchart shown in FIG. When the start instruction is given by the operator via the input device 3 in FIG. 1, the analysis application 16 is activated, and in step S1 in FIG. 3, the main frame 41 in FIG. 4 is connected to the image display device 4 in FIG. Displayed on the screen.

  In the main frame 41, reference numeral 46 is a status display screen. The θs, θd, 2θ / ω, φ, Z, Rx, Ry, S, Ts, ω, 2θ, and ωM1 displayed in the “name” column of the status display screen 46 are described above. The measurement axes of θs axis, θd axis, 2θ / ω axis, φ axis, Z axis, Rx axis, Ry axis, S axis, Ts axis, ω axis, 2θ axis, and ωM1 axis are shown. The “state” indicates what state the measuring apparatus 2 in FIG. 2 is currently set with respect to each of those measurement axes. For example, if 2θ = 0 ° is set for the 2θ axis, a numerical value “0 °” is displayed in the “status” column corresponding to 2θ. If 2θ = 10 ° is set for the 2θ axis, a value of “10 °” is displayed in the “status” column corresponding to 2θ.

  The operator who sees the main frame 41 can adjust the initial positions of the optical elements in the measuring apparatus 2 in FIG. 2 before starting the measurement. This initial position adjustment is sometimes referred to as zero adjustment. If the operator desires zero adjustment, the operator points to the corresponding menu in the menu bar 42 in the main frame 41 of FIG. When the CPU 7 in FIG. 1 confirms that there is an instruction for zero adjustment in step S2 in FIG. 3 (YES in step S2), zero adjustment is performed in step S3.

  Specifically, in FIG. 2, an X-ray filter is disposed at an appropriate position on the X-ray optical path without supporting the sample S by the sample support device 21, and then X-rays are emitted from the X-ray source 22 to move θs. The X-ray detector 23 detects X-rays while adjusting each moving system such as the system 26 and the θd moving system 37. Then, each moving system is set at an appropriate position.

  Thereafter, when the operator desires measurement, the operator selects “manual control” from the menu bar 42 on the screen of FIG. Then, this is recognized in step S4 in FIG. 3, and the process proceeds to step S5, and the manual control screen 43 is displayed at an appropriate position in the main frame 41 in FIG. The manual control screen 43 is shown in detail as shown in FIG.

  In FIG. 6A, the column “control target axis” indicates any of a plurality of measurement axes 2θ, 2θ / ω,..., Φ, ω in the measurement apparatus 2 of FIG. This is an area for instructing whether to do this. Further, the “movement condition” column is an area for instructing the movement destination and the like when the X-ray generation system 20 and the X-ray detector 23 of FIG. 2 are to be moved to a desired place prior to measurement. is there. In the “Measurement condition” column, how many times the measurement start angle is set, how many times the measurement end angle is set, how many step angle widths are scanned, and how many scan speeds This is an area for instructing conditions such as whether or not to perform scanning.

  A plurality of input areas for inputting numerical values desired by the operator are set in the movement condition column and measurement condition column. In the figure, these input areas are indicated by a rectangular solid line frame surrounding numerical values. The operator, for example, inputs a numerical value using an input device such as a keyboard after instructing one of the input areas with a pointer 38 that is an image for area indication that can be moved by a mouse input tool. You can enter the desired value for the input item. In the “measurement condition” column, a “measurement execution” icon 44 for instructing the start of measurement is displayed.

  The contents of the setting performed using the manual control screen 43 are stored in a predetermined storage area in the hard disk 11 of FIG. Prior to the start-up of the manual control screen 43, the CPU 7 accesses a predetermined storage area in the hard disk 11 to read out what conditions were set in the previous measurement. The conditions are displayed in the manual control screen 43. In the display state shown in FIG. 6A, the ω axis is selected as the measurement axis as indicated by the arrow A, 0.0020 deg is designated as the increase / decrease amount of the movement condition, and 10.0000 deg is set as the measurement start angle of the measurement condition. This indicates a state in which 13.0000 deg is designated as the measurement end angle of the measurement condition, 1.0004 deg is designated as the step width of the measurement condition, and 4.8000 deg / min is designated as the scan speed of the measurement condition. Yes.

  When the operator desires to perform measurement under these conditions, the measurement execution icon 44 is clicked and instructed without changing the displayed conditions. Then, a measurement execution instruction is recognized in step S6 of FIG. 3 (YES in step S6). Since we are now considering the case where no change is made to the contents of the manual control screen 43 in FIG. 6A, it is determined “NO” in step S7 in FIG. 3, and the process proceeds to step S11. Measurement is performed under the conditions of 6 (a). That is, measurement is performed with the ω axis as the measurement axis.

  More specifically, in FIG. 2, X-rays are emitted from the X-ray generation system 20, and the diffraction lines diffracted by the sample S are changed while changing the X-ray incident angle ω with a predetermined step width at a predetermined step speed. Detection is performed by an X-ray detector 23 arranged at a predetermined 2θ position. As a result, it is possible to measure how many diffraction lines having the intensity I appear at the angle ω, and measurement data (ω, I) can be obtained.

  When the measurement data is obtained in this way, the measurement result is displayed as an X-ray profile P1 in step S12 as shown in FIG. 7 as necessary. In step S13, the measurement data is stored in the RAM 8 of FIG. Thereafter, when a measurement end signal is transmitted from the measuring device 2, this is recognized in step S14 (YES in step S14), and in step S15, the measurement data in the RAM 8 in FIG. Transferred to and saved.

  If it is determined in step S14 in FIG. 3 that the measurement end instruction has not been issued (NO in step S14), the process returns to step S5 and the manual control screen 43 in FIG. 7 continues to be displayed. The manual control screen 43 is displayed during measurement but cannot be input. When the measurement is completed, the manual control screen 43 can be input. The display of the manual control screen 43 is terminated by a “Close” button.

  When the operator desires to continue the measurement while changing the measurement conditions, the operator changes the desired conditions on the manual control screen 43 in FIG. For example, the pointer 38 is placed on the measurement start input area in the measurement condition column, and an instruction is clicked by clicking the input button of the mouse. When the instruction is recognized in step S7 of FIG. 3 (YES in step S7), it is determined in step S8 whether or not the instructed condition item is an item to be displayed in a pop-up display.

  Here, the pop-up display is a matter related to measurement conditions, for example, how many times the effective range of measurement that can be input is, how many times the resolution of the measurement that can be set is, etc. An image for explaining the matter is not always displayed on the screen of the image display device 4 in FIG. 1, but only when the corresponding measurement condition is selected and instructed, or is superimposed on the manual control screen 43 or It is to display in an area on the screen that does not overlap with the manual control screen 43.

  This pop-up display can continue to be displayed until another instruction is given by the operator, or it can be turned off automatically after being displayed for a certain time regardless of the operation by the operator. Also good.

  If it is determined in step S8 that the instructed condition item is an item to be displayed in a pop-up display (YES in step S8), the CPU 7 activates the display application software 18 to select the selected measurement axis (current In this case, the effective measurement range with respect to the ω axis) is obtained by calculation. This calculation is performed according to the rules described with reference to FIGS. 8 and 9, for example. As a result of this calculation, when an effective measurement range for the selected measurement axis is obtained, the effective measurement range is superimposed on the manual control screen 43 as shown by reference numeral 47 in FIG. 5 is superimposed on the main frame 41 shown in FIG. 5 or displayed on a screen in an area that does not overlap with the main frame 41.

  In the example shown in FIG. 6B, as the pop-up display 47, the effective angle scanning range that can be input is an angle of −2.4998 ° to an angle of 153.4998 °, and a settable angle scanning minimum step width (so-called resolution). ) Indicates an angle of 0.0002 °. The operator who sees this can very easily determine in which range the measurement start angle and the measurement end angle should be selected. In addition, it is very easy to know at what resolution measurement is performed. Thus, the operator can input the measurement start angle and the measurement end angle without error.

  The above description relates to the pop-up display 47 relating to the measurement start angle and the measurement end angle, but the display application software 18 of this embodiment has data relating to a large number of input items. For example, it also has effective range data related to “movement destination” in the “movement condition” column, effective range data related to “scan speed” in the “measurement condition” column, and the like. Accordingly, when the operator moves the pointer 38 to the “movement destination” input field in the “movement condition” field instead of the “measurement start angle” field in FIG. Information pops up. When the operator moves the pointer to the “scan speed” input field, information on the effective range related to the scan speed pops up.

  Hereinafter, a specific example of pop-up display will be described. FIG. 11A illustrates a case where the movement destination field in the movement condition field is instructed by the operator, and the movement destination around the ω axis shown when the angle 2θ around the 2θ axis is 2θ = 0 °. A pop-up display 47 for is shown. In this pop-up display 47, the effective angle scanning range that can be set as the movement destination is in the range of angle −1.5000 ° to angle 5.0000 °, and the settable angle scanning minimum step width (that is, resolution) is 0.0001. Indicates that it is °. This effective range and resolution are determined by the calculation of the display application software 18 shown in FIG. The operator can input the movement destination around the ω axis without error with reference to the effective range shown in the pop-up display 47.

  Next, FIG. 11B shows a case where the input field of the movement destination in the movement condition field is instructed by the operator, and is shown when the angle 2θ around the 2θ axis is 2θ = 10 °. A pop-up display 47 relating to the movement destination is shown. In this pop-up display 47, the effective angle scanning range that can be set as the movement destination is in the range of angle −1.5000 ° to angle 15.0000 °, and the settable angle scanning minimum step width (that is, resolution) is 0.0001. Indicates that it is °. This effective range is determined by the calculation of the display application software 18 shown in FIG. 1 or by a data table stored in a proper place in the hard disk 11. The operator can input the movement destination around the ω axis without error with reference to the effective range shown in the pop-up display 47.

  Next, FIG. 12A shows a case where the input field of the movement destination in the movement condition field is instructed by the operator, and is shown when the angle ω around the ω axis is ω = 0 °. A pop-up display 47 relating to the movement destination is shown. In this pop-up display 47, the effective angle scanning range that can be set as the movement destination is in the range of angle −5.000 ° to angle 120.0000 °, and the settable angle scanning minimum step width (that is, resolution) is 0.0001. Indicates that it is °. This effective range is determined by the calculation of the display application software 18 shown in FIG. The operator can input the movement destination around the 2θ axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 12B shows a case where the input field of the movement destination in the movement condition field is instructed by the operator, and the movement destination around the 2θ axis shown when the angle ω around the ω axis is ω = 5 °. A pop-up display 47 for is shown. In this pop-up display 47, the effective angle scanning range that can be set as the movement destination is in the range of angle 0.00000 ° to angle 125.0000 °, and the angle scanning minimum step width (that is, resolution) that can be set is 0.0001 °. It is shown that. This effective range is determined by the calculation of the display application software 18 shown in FIG. 1 or by a data table stored in a proper place in the hard disk 11. The operator can input the movement destination around the 2θ axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 13A shows a case where the input field of the movement destination in the movement condition field is instructed by the operator, and is shown when the angle 2θ / ω about the 2θ / ω axis is 2θ / ω = 0 °. A pop-up display 47 relating to the movement destination around the ω axis is shown. In this pop-up display 47, the effective angle scanning range that can be set as the movement destination is in the range of angle −1.5000 ° to angle 5.0000 °, and the settable angle scanning minimum step width (that is, resolution) is 0.0001. Indicates that it is °. This effective range is determined by the calculation of the display application software 18 shown in FIG. 1 or by a data table stored in a proper place in the hard disk 11. The operator can input the movement destination around the ω axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 13B shows a case where the input field of the movement destination in the movement condition field is instructed by the operator, and is shown when the angle 2θ / ω about the 2θ / ω axis is 2θ / ω = 20 °. A pop-up display 47 relating to the movement destination around the ω axis is shown. In this pop-up display 47, the effective angle scanning range that can be set as the movement destination is in the range of angle −1.5000 ° to angle 25.0000 °, and the settable angle scanning minimum step width (that is, resolution) is 0.0001. Indicates that it is °. This effective range is determined by the calculation of the display application software 18 shown in FIG. 1 or by a data table stored in a proper place in the hard disk 11. The operator can input the movement destination around the ω axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 14A shows a case where the input field of the movement destination in the movement condition field is instructed by the operator, and is shown when the angle 2θ / ω about the 2θ / ω axis is 2θ / ω = 0 °. A pop-up display 47 relating to the movement destination around the 2θ axis is shown. In this pop-up display 47, the effective angle scanning range that can be set as the movement destination is in the range of angle −5.000 ° to angle 120.0000 °, and the settable angle scanning minimum step width (that is, resolution) is 0.0001. Indicates that it is °. This effective range is determined by the calculation of the display application software 18 shown in FIG. 1 or by a data table stored in a proper place in the hard disk 11. The operator can input the movement destination around the 2θ axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 14B shows the case where the input field of the movement destination in the movement condition field is instructed by the operator, and is shown when the angle 2θ / ω around the 2θ / ω axis is 2θ / ω = 20 °. A pop-up display 47 relating to the movement destination around the 2θ axis is shown. In this pop-up display 47, the effective angle scanning range that can be set as the movement destination is in the range of angle 5.0000 ° to angle 130.0000 °, and the angle scanning minimum step width (that is, resolution) that can be set is 0.0001 °. It is shown that. This effective range is determined by the calculation of the display application software 18 shown in FIG. 1 or by a data table stored in a proper place in the hard disk 11. The operator can input the movement destination around the 2θ axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 15A shows a case where the pop-up display 47 displays the effective range of the movement destination of the 2θ axis when the angle around the θs axis is θs = 5 ° and the angle around the θd axis is θd = 30 °. Is shown. When moving to θs = 5 ° and θd = 30 °, the angle around the 2θ axis becomes 2θ = 35 °, and the angle around the θ axis becomes θ = 5 °. In this case, the effective angle scanning range of the movement destination of the angle around the 2θ axis is 0.0000 to 125.0000 ° as shown by the pop-up display 47. The pop-up display 47 indicates that the minimum angle scanning step width (that is, resolution) that can be set is 0.0001 °. The operator can input the movement destination around the 2θ axis without error with reference to the effective range shown in the pop-up display 47.

  In FIG. 15B, the pop-up display 47 displays the effective range of the ω axis when the angle around the θs axis is θs = 5 ° and the angle around the θd axis is moved to θd = 30 °. Shows the case. When moving to θs = 5 ° and θd = 30 °, the angle around the 2θ axis becomes 2θ = 35 °, and the angle around the θ axis becomes θ = 5 °. In this case, the effective range of the movement destination of the angle around the ω axis is −1.5000 to 40.0000 ° as shown by the pop-up display 47. The pop-up display 47 indicates that the resolution is 0.0001 °. The operator can input the movement destination around the ω axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 15C shows a display regarding the current position of each axis displayed on the status display screen 46 of FIG. 5 in the case of FIGS. 15A and 15B.

  FIG. 16A shows a case where the pop-up display 47 displays the effective range of the movement destination of the 2θ axis when the angle around the θs axis is θs = 30 ° and the angle around the θd axis is θd = 5 °. Is shown. When moving to θs = 30 ° and θd = 5 °, the angle around the 2θ axis becomes 2θ = 35 °, and the angle around the θ axis becomes θ = 30 °. In this case, the effective angle scanning range of the movement destination of the angle around the 2θ axis is 25.000 to 150.0000 ° as indicated by the pop-up display 47. The pop-up display 47 indicates that the minimum angle scanning step width (that is, resolution) that can be set is 0.0001 °. The operator can input the movement destination around the 2θ axis without error with reference to the effective range shown in the pop-up display 47.

  In FIG. 16B, the pop-up display 47 displays the effective range of the movement destination of the ω axis when the angle around the θs axis is θs = 30 ° and the angle around the θd axis is moved to θd = 5 °. Shows the case. When moving to θs = 30 ° and θd = 5 °, the angle around the 2θ axis becomes 2θ = 35 °, and the angle around the θ axis becomes θ = 30 °. In this case, the effective range of the movement destination of the angle around the ω axis is −1.5000 to 40.0000 ° as shown by the pop-up display 47. The pop-up display 47 indicates that the resolution is 0.0001 °. The operator can input the movement destination around the ω axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 16C shows a display relating to the current position of each axis displayed on the status display screen 46 of FIG. 5 in the case of FIGS. 16A and 16B.

  FIG. 17A shows a case where the effective range of the movement destination around the θs axis is displayed in a pop-up display 47. The pop-up display 47 indicates that the effective angle scanning range is -1.5000 to 77.0000 °. Further, it indicates that the settable minimum angular scanning step width (that is, resolution) is 0.0001 °. Since the θs axis is a physical axis, the effective range of the θs axis is always displayed as the mechanical effective range of the θs axis regardless of the positions of the other axes. The operator can input the movement destination around the θs axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 17B shows a case where the effective range of the movement destination around the θd axis is displayed in a pop-up display 47. The pop-up display 47 indicates that the effective angle scanning range is −5.00000 to 120.0000 °. Further, it indicates that the settable minimum angular scanning step width (that is, resolution) is 0.0001 °. Since the θd axis is a physical axis, the effective range of the θd axis is always displayed as the mechanical effective range of the θd axis regardless of the positions of the other axes. The operator can input the movement destination around the θd axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 18A shows a case where the effective range of the movement destination around the Rx axis is displayed in a pop-up display 47. The pop-up display 47 indicates that the effective angle scanning range is −3,000 to 3.000 °. In addition, the settable minimum angle scanning step width (that is, resolution) is 0.002 °. Since the Rx axis is a physical axis, the effective range of the Rx axis is always displayed as the mechanical effective range of the Rx axis regardless of the position of other axes. The operator can input the movement destination around the Rx axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 18B shows a case where the effective range of the movement destination around the Ry axis is displayed in a pop-up display 47. The pop-up display 47 indicates that the effective angle scanning range is −3,000 to 3.000 °. In addition, the settable minimum angle scanning step width (that is, resolution) is 0.002 °. Since the Ry axis is a physical axis, the effective range of the Ry axis is always displayed as the mechanical effective range of the Ry axis regardless of the position of other axes. The operator can input the movement destination around the Ry axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 19A shows a case where the effective range of the movement destination along the Z axis is displayed in a pop-up display 47. The pop-up display 47 indicates that the effective distance scanning range is -10.0000 to 2.0000 mm. Further, the distance scanning minimum step width that can be set (that is, the resolution is 0.0001 mm. Since the Z axis is a physical axis, the effective range of the Z axis is always regardless of the position of the other axis. This is displayed as the mechanical effective range of the Z axis, and the operator can input the movement destination around the Z axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 19B shows a case where the effective range of the movement destination around the φ axis is displayed in a pop-up display 47. The pop-up display 47 indicates that the effective angle scanning range is −720.000 to 720.000 °. In addition, the settable minimum angle scanning step width (that is, resolution) is 0.002 °. Since the φ axis is a physical axis, the effective range of the φ axis is always displayed as the mechanical effective range of the φ axis regardless of the position of other axes. The operator can input the movement destination around the φ axis without error with reference to the effective range shown in the pop-up display 47.

  FIG. 20A shows a pop-up display 47 displayed when the step width in the measurement condition column in the manual control screen 43 is instructed by the operator. The minimum step width that can be specified is displayed by calculating a step width from which the count time per step does not become 50 msec or less from the scan speed specified at that time. Here, the reason why the critical time is set to 50 msec is that it follows the characteristics of the electric circuit.

FIG. 20A shows a case where the pop-up display 47 displays the effective range of the step width of the ω axis when the scan speed is 0.1 ° / min. The pop-up display 47 indicates that the effective angle scanning range is 0.0002 to 1.0000 °. Further, it indicates that the settable minimum angular scanning step width (that is, resolution) is 0.0001 °. The step width at which the counting time per step is 50 msec when the scanning speed is 0.1 ° / min is 0.05 sec × 0.1 ° ÷ 60.0 sec = 0.000083 °
It is. Since 0.000083 ° is smaller than the physical minimum step width (resolution × 2 = 0.0002 °) of the drive shaft, the minimum step width is 0.0002 °.

FIG. 20B shows a case where the pop-up display 47 displays the effective range of the step width of the ω axis when the scan speed is 8.0 ° / min. The pop-up display 47 indicates that the effective angle scanning range is 0.0066 to 1.0000 °. Further, it indicates that the settable minimum angular scanning step width (that is, resolution) is 0.0001 °. The step width at which the counting time per step is 50 msec when the scanning speed is 8.0 ° / min is 0.05 sec × 8.0 ° ÷ 60.0 sec = 0.666 °
It is. Since 0.0066 ° is larger than the physical minimum step width (resolution × 2 = 0.0002 °) of the drive shaft, the minimum step width is 0.0066 °.

  FIG. 21A shows a pop-up display 47 displayed when the scan speed in the measurement condition column in the manual control screen 43 is instructed by the operator. The maximum scan speed that can be specified is calculated by displaying a scan speed at which the counting time per step does not become 50 msec or less from the step width specified at that time. Here, the reason why the critical time is set to 50 msec is that it follows the characteristics of the electric circuit.

FIG. 21A shows a case where the effective range of the scan speed of the ω axis when the step width is 0.1 ° is displayed in the pop-up display 47. The pop-up display 47 indicates that the effective scan speed range is 0.0001 to 100.000 ° / min. It also indicates that the minimum scan speed that can be set is 0.0001 ° / min. The scan speed at which the counting time per step is 50 msec when the step width is 0.1 ° is 60.0 sec × 0.1 ° ÷ 0.05 sec = 120.0 ° / min
It is. Since 120.0 ° / min is larger than the physical maximum scanning speed (100.0 ° / min) of the drive shaft, the maximum scanning speed is 100.0 ° / min.

FIG. 21B shows a case where the pop-up display 47 displays the effective range of the scan speed of the ω axis when the step width is 0.001 °. The pop-up display 47 indicates that the effective scan speed range is 0.0001 to 1.2000 ° / min. In addition, the scan speed minimum step width that can be set is 0.0001 ° / min. The scanning speed at which the counting time per step becomes 50 msec when the step width is 0.001 ° is 60.0 sec × 0.001 ° ÷ 0.05 sec = 1.2 ° / min
It is. Since 1.2 ° / min is smaller than the physical maximum scanning speed (100.0 ° / min) of the drive shaft, the maximum scanning speed is 1.2 ° / min.

  Note that the pop-up display that can be performed by the apparatus according to the present embodiment is not limited to the pop-up display illustrated and described above, and various items can be selected as necessary. For example, when setting the φ axis in FIG. 19B, when the scan speed input area is instructed by the operator's pointing operation, the maximum scanning speed indicated by the angle value per time at the time of measurement is popped up. Can be displayed. Further, when setting the Z axis in FIG. 19A, when the scan speed input area is instructed by the operator's pointing operation, the maximum scanning speed indicated by the distance value per time at the time of measurement is popped up. Can be displayed.

  As described above, according to the present embodiment, the manual control screen 43 as shown in FIG. 6A, that is, the input screen is displayed on the screen of the image display device 4 in FIG. Since the area in the screen 43 can be designated, the operator can set the measurement conditions related to the measuring apparatus 2 while viewing the screen 43. In addition, items related to measurement conditions (for example, information on the effective measurement range that can be entered, information on the resolution that can be set, etc.) are displayed on the screen, so that the operator does not have to bother to refer to the instruction manual. Input operations can be performed.

  Furthermore, items related to measurement, such as a measurement effective range that can be input, are displayed on the screen when the input area is instructed by the input device 3, and are not displayed on the screen when the input area is not instructed. Yes. That is, an image of matters relating to measurement is displayed on the screen only when necessary, so-called pop-up display. For this reason, since the input screen itself needs only a very simple display, it is possible to prevent the screen from becoming difficult to see.

  Further, the pop-up display includes the conditions that have already been set (for example, which measurement axis is selected, how many 2θ are set, how many ω are set, 2θ / how many ω are set, how many θs and θd are set, how many step widths are set, how many scan speeds are set, etc. Therefore, the operator who is trying to input information can obtain information without performing calculations by himself / herself, which is very convenient.

The present invention has been described with reference to the preferred embodiments. However, the present invention is not limited to the embodiments, and various modifications can be made within the scope of the invention described in the claims.
For example, the measuring apparatus 2 in FIG. 1 is not limited to the X-ray diffractometer having the configuration shown in FIG. 2, and may be an X-ray diffractometer having any other configuration. Further, the input image is not limited to the manual control screen 43 as indicated by reference numeral 43 in FIG. 5 and may be an image having any other configuration as necessary.

1 is a block diagram showing an embodiment of an X-ray diffraction apparatus according to the present invention. It is a figure which shows an example of a measuring apparatus. It is a flowchart which shows the flow of control performed by the apparatus of FIG. It is a figure which shows an example of the image displayed on the screen of a display apparatus. It is a figure which shows the other example of the image displayed on the screen of a display apparatus. It is a figure which shows an example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image displayed on the screen of a display apparatus. It is a figure for demonstrating the effective measurement range regarding the measurement axis in the measuring apparatus of FIG. It is another figure for demonstrating the effective measurement range regarding the measurement axis in the measuring apparatus of FIG. FIG. 10 is still another diagram for explaining an effective measurement range related to a measurement axis in the measurement apparatus of FIG. 2. It is a figure which shows the other example of the image for an input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus. It is a figure which shows the further another example of the image for input displayed on the screen of a display apparatus.

1. 1. X-ray diffractometer, 2. measuring device; Input device (input means),
4). 10. Image display device (display means) 11. Hard disk (storage means) bus,
20. X-ray generation system, 21. Sample support device, 22. X-ray source, 23. X-ray detector,
24. Monochromator, 38. Pointer, 41. main frame,
43. Manual control screen (input screen) 44. Measurement execution icon,
46. Status display screen, 47. Pop-up display, P1. X-ray profile,
S. Sample, S0. Divergence regulation slit, S1. Slit, S2. Receiving slit,
X0. Horizontal axis, Z. Vertical direction, Rx, Ry. Moving

Claims (3)

It has a plurality of measurement axes including a measurement axis defined by the linkage of a plurality of moving systems, and selects one of the plurality of measurement axes and moves the X-ray element with reference to the measurement axis to perform measurement. Measuring means to perform;
Display means for displaying an image on a screen based on image data;
Input means for designating and inputting an area in the screen of the display means;
A measurement axis input area for performing input for selecting the one measurement axis, a scanning speed input area for inputting a scanning speed of the X-ray element with reference to the one measurement axis, and a scanning step Generate image data of an input image including three areas of step width input areas for inputting a width, supply the image data to the display means, and display the input image on the screen of the display means Input image generation and display means,
Step width value that can be input to the step width input area when one of the measurement axes defined by the interlocking of a plurality of moving systems is instructed by the input means and the scanning speed is input by the input means. Effective range data generating means for determining the effective range of the plurality of moving systems defining the designated one measurement axis and calculation according to the input scanning speed;
The image data of the image including the value of the effective range of the step width determined by the effective range data generating means is generated, the image data is supplied to the display means, and the step width input area is indicated by the input means. And an effective range image generation and display means for displaying the effective range of the step width simultaneously with the measurement axis input area and the step width input area on the screen of the display means for a predetermined time after X. Line diffraction device. In X-ray diffraction apparatus according to claim 1 Symbol placement,
The effective range data generation means, in addition to the effective range,
(1) A settable angle scanning minimum step width when the X-ray element rotates around the designated one measurement axis,
(2) a settable distance scanning minimum step width when the X-ray element is translated along the designated one measurement axis;
(3) The minimum scan speed that can be set when the X-ray element rotates around the designated one measurement axis or translates along the one measurement axis,
(4) a maximum scanning speed indicated by an angle value per time at the time of measurement performed by rotating the X-ray element around the designated one measurement axis; and (5) the X-ray element. Is the maximum scanning speed indicated by the distance value per time during the measurement performed by translating along one of the indicated measurement axes,
An X-ray diffractometer characterized in that at least one of (1) to (5) or a combination of at least two thereof is determined by calculation. The X-ray diffractometer according to claim 1 or 2 ,
The plurality of measurement axes defined by the interlocking of the plurality of moving systems is
(1) An axis defined by the linkage of the θs moving system for changing the angle θs at which the X-ray generation system looks at the sample and the θd moving system for changing the angle θd at which the X-ray detection means looks at the sample. The 2θ axis that defines the diffraction angle 2θ with respect to the incident X-ray,
(2) An axis having the same value as θs when the θs moving system and the θd moving system are interlocked as θd = 2θ−θs, and defines an incident angle ω of X-rays incident on the sample. ω axis,
(3) An axis defined by the interlocking of the θs moving system and the θd moving system, wherein the X-ray incident angle ω incident on the sample and the X-ray diffraction angle 2θ diffracted by the sample are interlocked. An X-ray diffractometer that is either a 2θ / ω axis that serves as a reference for the change.

Images