JP5561801B2 - 集積回路デバイス及びその形成方法 - Google Patents
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823481—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823493—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]
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- H10B—ELECTRONIC MEMORY DEVICES
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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Description
101:基板
102、103:ウェル
104、105:デバイス
110:SRAMセル
110a−110d:メモリセル
111、111a、111b、112:ノード
121a:第1のデバイス(第1のプルアップ電界効果トランジスタ)
121b:第2のデバイス(第2のプルアップ電界効果トランジスタ)
122:プルダウン電界効果トランジスタ(FET)
123:パスゲート電界効果トランジスタ(FET)
150、160:深いトレンチ分離(DTI)領域
200:デバイス領域
205:浮動ウェル部分
206:ウェル102の最大深さ
208:半導体層
221:第1の拡散領域(第1のソース領域)
222:第2の拡散領域(第2のソース領域)
223:第3の拡散領域(ドープ領域)
250:接合部
260:導体層
280:共用コンタクト
760:トレンチ
901、902:ゲート構造体
Claims (11)
- 第1の導電型を有する基板と、
前記第1の導電型とは異なる第2の導電型を有する、前記基板内のウェルと、
前記ウェル上の半導体層であって、
各々が前記第1の導電型を有する、第1のデバイスの第1の拡散領域と、第2のデバイスの第2の拡散領域とを含むデバイス領域と、
前記第1の拡散領域と前記第2の拡散領域との間にそれらに接触するように横方向に配置された、前記第2の導電型を有し、前記ウェルに至るまで垂直方向にさらに延びる第3の拡散領域と、を含む半導体層と、
前記第1の拡散領域、前記第3の拡散領域、及び前記第2の拡散領域の上に横方向に延びてそれらに接触する、前記半導体層の上の導体層と、
前記半導体層を貫通して前記基板内に前記ウェルの最大深さより下まで延びる深いトレンチ分離領域であって、前記デバイス領域を画定する、トレンチ分離領域と、
電源電圧に接続する前記導体層上のコンタクトと、
を含む集積回路デバイス構造体。 - 前記第1の導電型はP型導電率を含み、前記第2の導電率はN型導電率を含む、請求項1に記載の集積回路デバイス構造体。
- 前記導体層はシリサイド層またはエピタキシャル・シリコン層を含む、請求項1に記載の集積回路デバイス構造体。
- 第1の導電型を有する基板と、
前記第1の導電型とは異なる第2の導電型を有する、前記基板内のウェルと、
前記ウェル上の半導体層であって、
各々が前記第1の導電型を有する、第1のメモリセルの第1のプルアップ電界効果トランジスタの第1のソース領域と、第2のメモリセルの第2のプルアップ電界効果トランジスタの第2のソース領域とを含むデバイス領域と、
前記第1のソース領域と前記第2のソース領域との間にそれらに接触するように横方向に配置された、前記第2の導電型を有し、前記ウェルに至るまで垂直方向にさらに延びるドープ領域と、を含む半導体層と、
前記第1のソース領域、前記ドープ領域及び前記第2のソース領域の上に横方向に延びてそれらに接触する、前記半導体層の上の導体層と、
前記半導体層を貫通して前記基板内の前記ウェルの最大深さより下まで延びる深いトレンチ分離領域であって、前記デバイス領域を画定する、トレンチ分離領域と、
電源電圧に接続する前記導体層上のコンタクトと、
を含むスタティック・ランダム・アクセス・メモリ(SRAM)アレイ構造体。 - 前記第1の導電型はP型導電率を含み、前記第2の導電率はN型導電率を含む、請求項4に記載のスタティック・ランダム・アクセス・メモリ(SRAM)アレイ構造体。
- 前記導体層はシリサイド層またはエピタキシャル・シリコン層を含む、請求項4に記載のスタティック・ランダム・アクセス・メモリ(SRAM)アレイ構造体。
- P−基板と、
前記基板内のN+ウェルと、
前記基板上の半導体層と、
前記半導体層を貫通して前記基板内に前記N+ウェルの最大深さより下まで延びて、前記アレイ内のメモリセルのデバイス領域を画定する深いトレンチ分離領域であって、
前記デバイス領域の1つは、前記N+ウェルの領域の上の半導体層の部分を含み、
前記半導体層の前記部分は、
第1のメモリセルの第1のP型プルアップ電界効果トランジスタの第1のP型ソース領域と、
前記第1のメモリセルに隣接する第2のメモリセルの第2のP型プルアップ電界効果トランジスタの第2のP型ソース領域と、
前記第1のP型ソース領域と前記第2のP型ソース領域との間に横方向にそれらに接するように配置された、前記N+ウェルの前記部分に至るまで垂直方向にさらに延びるN型ドープ領域と、を含む、深いトレンチ分離領域と、
前記第1のP型ソース領域、前記N型ドープ領域及び前記第2のP型ソース領域の上を横方向に延びてそれらに接触する、前記半導体層上の導体層と、
正の電源電圧(Vdd)に接続される、前記導体層上のコンタクトと、
を含む、スタティック・ランダム・アクセス・メモリ(SRAM)アレイ構造体。 - 集積回路デバイス構造体を形成する方法であって、
第1の導電型を有する基板を準備することと、
前記基板内に、前記第1の導電型とは異なる第2の導電型を有するウェルを形成することと、
前記ウェルを形成することの後で、前記基板上に半導体層を形成することと、
前記ウェル、第1のデバイスの第1の拡散領域及び第2のデバイスの第2の拡散領域の間に接合部を形成することと、を含み、
前記接合部を形成することは、
前記半導体層内に、前記第1の拡散領域及び前記第2の拡散領域を、前記第1の拡散領域及び前記第2の拡散領域が前記第1の導電型を有するように形成することと、
前記半導体層内に、前記第1の拡散領域と前記第2の拡散領域との間にそれらに接するように横方向に配置された第3の拡散領域を、前記第3の拡散領域が前記第2の導電型を有し、前記ウェルに至るまで垂直方向に延びるように形成することと、
前記半導体層上に、前記第1の拡散領域、前記第3の拡散領域及び前記第2の拡散領域の上に横方向に延びてそれらに接触するように導体層を形成することとを含み、さらに、前記方法は、
前記接合部を形成することの前に、前記基板内で前記ウェルの最大深さより下まで延びて前記半導体層内にデバイス領域を画定する深いトレンチ分離領域を形成することと、
前記導体層に対するコンタクトを形成して前記コンタクトを電源電圧に電気的に接続することと、を含み、
前記デバイス領域の1つは、前記ウェルの上に前記第1のデバイス及び前記第2のデバイスのための指定領域を含む、方法。 - 前記第1の導電型はP型導電率を含み、前記第2の導電率はN型導電率を含む、請求項8に記載の方法。
- 前記導体層を形成することは、シリサイド層またはエピタキシャル・シリコン層を形成することを含む、請求項8に記載の方法。
- スタティック・ランダム・アクセス・メモリ(SRAM)アレイ構造体を形成する方法であって、
第1の導電型を有する基板を準備することと、
前記基板内に、前記第1の導電型とは異なる第2の導電型を有するウェルを形成することと、
前記ウェルを形成することの後で、前記基板上に半導体層を形成することと、
前記ウェル、第1のメモリセルの第1のプルアップ電界効果トランジスタの第1のソース領域及び第2のメモリセルの第2のプルアップ電界効果トランジスタの第2のソース領域の間に接合部を形成することと、を含み、
前記接合部を形成することは、
前記半導体層内に、前記第1のプルアップ電界効果トランジスタの前記第1のソース領域及び前記第2のプルアップ電界効果トランジスタの前記第2のソース領域を、前記第1のソース領域及び前記第2のソース領域が前記第1の導電型を有するように形成することと、
前記半導体層内に、前記第1のソース領域と前記第2のソース領域との間に横方向にそれらに接するように配置されたドープ領域を、前記ドープ領域が前記第2の導電型を有し、前記ウェルに至るまで垂直方向に延びるように形成することと、
前記半導体層上に、前記第1のソース領域、前記ドープ領域及び前記第2のソース領域の上に横方向に延びてそれらに接触するように、導体層を形成することとを含み、さらに、前記方法は、
前記接合部を形成することの前に、前記基板内で前記ウェルの最大深さより下まで延びて前記半導体層内にデバイス領域を画定する深いトレンチ分離領域を形成することと、
前記導体層に対するコンタクトを形成して前記コンタクトを電源電圧に電気的に接続することと、を含み、
前記デバイス領域の1つは、前記ウェルの上に、前記第1及び前記第2のプルアップ電界効果トランジスタのための指定領域を含む、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/473,324 US7902608B2 (en) | 2009-05-28 | 2009-05-28 | Integrated circuit device with deep trench isolation regions for all inter-well and intra-well isolation and with a shared contact to a junction between adjacent device diffusion regions and an underlying floating well section |
US12/473,324 | 2009-05-28 | ||
PCT/US2010/033469 WO2010138278A2 (en) | 2009-05-28 | 2010-05-04 | Integrated circuit device with deep trench isolation regions for all inter-well and intra-well isolation and with a shared contact to a junction between adjacent device diffusion regions and an underlying floating well section |
Publications (3)
Publication Number | Publication Date |
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JP2012528484A JP2012528484A (ja) | 2012-11-12 |
JP2012528484A5 JP2012528484A5 (ja) | 2013-10-10 |
JP5561801B2 true JP5561801B2 (ja) | 2014-07-30 |
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JP2012513085A Expired - Fee Related JP5561801B2 (ja) | 2009-05-28 | 2010-05-04 | 集積回路デバイス及びその形成方法 |
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US (1) | US7902608B2 (ja) |
EP (1) | EP2401761A4 (ja) |
JP (1) | JP5561801B2 (ja) |
CN (1) | CN102428556B (ja) |
CA (1) | CA2757776A1 (ja) |
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US9105691B2 (en) * | 2013-04-09 | 2015-08-11 | International Business Machines Corporation | Contact isolation scheme for thin buried oxide substrate devices |
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2009
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- 2010-05-04 CN CN201080021329.6A patent/CN102428556B/zh active Active
- 2010-05-04 EP EP10780978A patent/EP2401761A4/en not_active Withdrawn
- 2010-05-04 CA CA2757776A patent/CA2757776A1/en not_active Abandoned
- 2010-05-10 TW TW099114867A patent/TW201104840A/zh unknown
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EP2401761A2 (en) | 2012-01-04 |
US7902608B2 (en) | 2011-03-08 |
CN102428556B (zh) | 2014-03-12 |
US20100301419A1 (en) | 2010-12-02 |
JP2012528484A (ja) | 2012-11-12 |
CA2757776A1 (en) | 2010-12-02 |
WO2010138278A3 (en) | 2011-02-03 |
CN102428556A (zh) | 2012-04-25 |
EP2401761A4 (en) | 2012-04-25 |
TW201104840A (en) | 2011-02-01 |
WO2010138278A2 (en) | 2010-12-02 |
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