JP5552635B2 - 中性子ミラーの製造方法及び中性子ミラー - Google Patents

中性子ミラーの製造方法及び中性子ミラー Download PDF

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JP5552635B2
JP5552635B2 JP2010123375A JP2010123375A JP5552635B2 JP 5552635 B2 JP5552635 B2 JP 5552635B2 JP 2010123375 A JP2010123375 A JP 2010123375A JP 2010123375 A JP2010123375 A JP 2010123375A JP 5552635 B2 JP5552635 B2 JP 5552635B2
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multilayer film
film
substrate
neutron
neutron mirror
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Japanese (ja)
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JP2011247825A (ja
JP2011247825A5 (enExample
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正裕 日野
雅暁 北口
祐司 川端
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Kyoto University NUC
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Kyoto University NUC
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  • Optical Filters (AREA)
JP2010123375A 2010-05-28 2010-05-28 中性子ミラーの製造方法及び中性子ミラー Expired - Fee Related JP5552635B2 (ja)

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JP2010123375A JP5552635B2 (ja) 2010-05-28 2010-05-28 中性子ミラーの製造方法及び中性子ミラー

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JP2010123375A JP5552635B2 (ja) 2010-05-28 2010-05-28 中性子ミラーの製造方法及び中性子ミラー

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JP2011247825A JP2011247825A (ja) 2011-12-08
JP2011247825A5 JP2011247825A5 (enExample) 2013-07-11
JP5552635B2 true JP5552635B2 (ja) 2014-07-16

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114428091A (zh) * 2021-12-29 2022-05-03 苏州闻道电子科技有限公司 一种Ni/Ti非周期多层膜及其制备方法和应用、Ni/Ti非周期多层膜中子超反射镜

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63172939A (ja) * 1987-01-13 1988-07-16 Daicel Chem Ind Ltd 薄膜の組成分析方法
JPH05142396A (ja) * 1991-11-25 1993-06-08 Nitto Denko Corp Ｘ線反射鏡、ｘ線結像装置及びｘ線集光装置
JPH08211198A (ja) * 1995-02-06 1996-08-20 Nikon Corp 中性子反射鏡
JP2001033593A (ja) * 1999-07-22 2001-02-09 Mitsubishi Pencil Co Ltd 中性子カーボンミラーおよびその製造方法
JP4731919B2 (ja) * 2004-01-23 2011-07-27 株式会社半導体エネルギー研究所 フィルム状物品
JP2009156863A (ja) * 2007-12-05 2009-07-16 Canon Inc Ｘ線用光学素子

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