JP2011247825A5 - - Google Patents

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Publication number
JP2011247825A5
JP2011247825A5 JP2010123375A JP2010123375A JP2011247825A5 JP 2011247825 A5 JP2011247825 A5 JP 2011247825A5 JP 2010123375 A JP2010123375 A JP 2010123375A JP 2010123375 A JP2010123375 A JP 2010123375A JP 2011247825 A5 JP2011247825 A5 JP 2011247825A5
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JP
Japan
Prior art keywords
multilayer film
forming
substrate
opportunity
laminated
Prior art date
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Granted
Application number
JP2010123375A
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English (en)
Japanese (ja)
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JP2011247825A (ja
JP5552635B2 (ja
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Priority to JP2010123375A priority Critical patent/JP5552635B2/ja
Priority claimed from JP2010123375A external-priority patent/JP5552635B2/ja
Publication of JP2011247825A publication Critical patent/JP2011247825A/ja
Publication of JP2011247825A5 publication Critical patent/JP2011247825A5/ja
Application granted granted Critical
Publication of JP5552635B2 publication Critical patent/JP5552635B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010123375A 2010-05-28 2010-05-28 中性子ミラーの製造方法及び中性子ミラー Expired - Fee Related JP5552635B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010123375A JP5552635B2 (ja) 2010-05-28 2010-05-28 中性子ミラーの製造方法及び中性子ミラー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010123375A JP5552635B2 (ja) 2010-05-28 2010-05-28 中性子ミラーの製造方法及び中性子ミラー

Publications (3)

Publication Number Publication Date
JP2011247825A JP2011247825A (ja) 2011-12-08
JP2011247825A5 true JP2011247825A5 (enExample) 2013-07-11
JP5552635B2 JP5552635B2 (ja) 2014-07-16

Family

ID=45413251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010123375A Expired - Fee Related JP5552635B2 (ja) 2010-05-28 2010-05-28 中性子ミラーの製造方法及び中性子ミラー

Country Status (1)

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JP (1) JP5552635B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114428091A (zh) * 2021-12-29 2022-05-03 苏州闻道电子科技有限公司 一种Ni/Ti非周期多层膜及其制备方法和应用、Ni/Ti非周期多层膜中子超反射镜

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63172939A (ja) * 1987-01-13 1988-07-16 Daicel Chem Ind Ltd 薄膜の組成分析方法
JPH05142396A (ja) * 1991-11-25 1993-06-08 Nitto Denko Corp Ｘ線反射鏡、ｘ線結像装置及びｘ線集光装置
JPH08211198A (ja) * 1995-02-06 1996-08-20 Nikon Corp 中性子反射鏡
JP2001033593A (ja) * 1999-07-22 2001-02-09 Mitsubishi Pencil Co Ltd 中性子カーボンミラーおよびその製造方法
JP4731919B2 (ja) * 2004-01-23 2011-07-27 株式会社半導体エネルギー研究所 フィルム状物品
JP2009156863A (ja) * 2007-12-05 2009-07-16 Canon Inc Ｘ線用光学素子

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