JP5550008B2 - Method for producing fixed abrasive saw wire - Google Patents

Description

The present invention relates to a saw wire that is a tool for cutting a hard material, and more particularly to a method for manufacturing a fixed abrasive saw wire.

A wire saw is known as a machine for cutting a hard and brittle material (hereinafter referred to as a workpiece) typified by silicon used in solar cells and the like. FIG. 1 is a schematic view of a multi-wire saw that performs a plurality of cutting processes with a single machine. The wire is prepared in a multi-wire saw as follows. The wire 2 wound around the supply reel 4 is supplied to the multi-wire saw. The wire 2 is guided to a main roller 6 by being guided by a plurality of guide rollers (not shown). The wire 2 is wound around a main roller 6 generally composed of 2 to 4 wires. Several tens to several hundreds of wire groups are stretched between the main rollers 6. Thereafter, the wire 2 is guided by a plurality of guide rollers and wound around the discharge reel 8 in the same manner as in the supply.

Run the wire after the wire is set on the multi-wire saw. In this state, a workpiece 10 made of silicon or the like to be processed is pressed against a group of wires stretched between the main rollers 6. Then, the workpiece 10 is cut by the wire group, and a thin plate (hereinafter referred to as a wafer) having a thickness corresponding to the wire pitch is obtained.

There are two types of saw wire cutting. One is a method of cutting while spraying slurry containing abrasive grains. The other is a method in which cutting is performed using a wire in which abrasive grains are fixed in advance. In general, the former is called a free abrasive type, and the latter is called a fixed abrasive type. In recent years, the opportunity to adopt the fixed abrasive type is increasing due to the high cutting ability.

In the fixed abrasive saw wire, abrasive grains are generally fixed uniformly on the outer periphery of a wire core having a round cross section. Patent Document 1 describes a typical fixed abrasive saw wire. Since the abrasive grains are fixed to the wire core in advance, the abrasive grains do not rotate. That is, the abrasive grains continue to effectively grind the workpiece as the wire travels, and the workpiece is cut. In the fixed abrasive type, a processing speed several times that of the free abrasive type is realized.

Conventionally, the means for fixing the abrasive grains to the surface of the wire core with a binder is roughly divided into two types. One is a case where resin is used as a binder, and the other is a case where metal is used as a binder. In recent years, the latter is preferred due to the strength of the fixing force, and specifically, plating is performed. There exists patent document 1 etc. as a typical saw wire.

However, since the saw wire as in Patent Document 1 is also plated on the outer peripheral end of the abrasive grains, the initial cutting ability particularly when using the saw wire is low. That is, when the abrasive grains are fixed, not only the surface of the wire core material but also the abrasive grain surface is uniformly plated. When this saw wire is used, the saw wire and the work piece contact each other at the beginning of cutting is not actually abrasive grains but plating covering the surface layer. Soft plating does not have excellent cutting ability and lacks sharpness.

Thus, for example, Patent Document 2 describes a saw wire in which a part of the plating layer is removed to expose the abrasive grains in response to the problem that plating (Ni) grown on the abrasive grain surface reduces the sharpness of the saw wire. ing. As a method of exposing the abrasive grains, for example, a mechanical method of passing through a dressing stone made of WA, GC, cast iron, glass, quartz, or a chemical method of removing by running while immersed in a chemical solution is described. Has been.

JP 09-150314 A JP 2006-181701 A

However, in any of the methods, consumables such as dressing stones and chemicals are used to remove plating on the outer peripheral edge of the abrasive grains. These are not only good in terms of environment, but also increase consumption and cost due to mass production of saw wires.

Therefore, the present invention has an object to provide a manufacturing method of a fixed abrasive saw wire that can be performed by a simple method without requiring a special consumable material in removing plating on the outer peripheral edge of the abrasive. To do.

The method for producing a fixed abrasive saw wire according to the present invention includes a first step of covering the surface of a wire core with a binder and fixing the abrasive, and then applying the abrasive to one roller having a plurality of running grooves. A second wire is wound around the fixed wire, and is wound twice or more in the same running groove of the two or more grooves of the roller so that the wire is tightly wound tightly and is in strong contact with each other . Including a process,
It is characterized by that.

Alternatively, a mechanism may be provided in which a plurality of rollers having a plurality of running grooves described in the preceding stage are installed and run while being wound around the same running groove of two or more grooves on the outer periphery of the roller group. .

Incidentally, the roller has a plurality of running grooves, by running grooves a plurality of wires runs there are 2 or more, increases the chance of wire each other rubbing, as an effect of removing the plating of abrasive grains of the outer peripheral edge Higher ones can be expected.

Furthermore, by including at least one mechanism or process for twisting the wire from the traveling groove in which the plurality of wires travel to the traveling groove in which the next plurality of wires travels, the entire circumference of the wire is included. It is possible to remove the plating on the outer peripheral edge of the abrasive grains for all the fixed abrasive grains.

With the above means, the outer peripheral end plating of the wire can be removed by rubbing the wires, so that the fixed abrasive saw wire with high initial cutting performance can be obtained without preparing a special consumable material. Manufacture can be performed easily.

Schematic of multi-wire saw Enlarged view of the abrasive grains fixed to the saw wire and the outer peripheral edge removed. Sectional view of a roller with three wires wound around one running groove Explanatory drawing showing the action when two wires rub against each other in one running groove Schematic diagram of an embodiment of the present invention Schematic of an embodiment of a method for imparting twist to a wire

The effect | action of this invention is demonstrated using FIG.3 and FIG.4. FIG. 3 is a cross-sectional view of a roller in which three wires are wound around one traveling groove (twisted winding), and FIG. 4 is an explanation showing the action when two wires rub against each other in one traveling groove. FIG.

As shown in FIG. 3, for example, when three wires are wound around one traveling groove 18 of the roller 16, the wires are traveling stably as in A to C. The wire that has entered the travel groove 18 from A1 travels on the outer periphery of the roller 16 or the outer periphery of another roller, and again enters the A2 position of the travel groove 18 of the roller 16. It travels on the outer periphery of the roller 16 as it is, and then moves to the B1 position. Thereafter, the wire is similarly changed to B2-C1-C2 and discharged.

When wound around the roller 16 as in the previous stage, at least when changing from A2 to B1 and when changing from B2 to C1 on the outer periphery of the roller 16, the wires come into contact with each other as shown in FIG. At this time, the wire 2a in the process of changing from A2 to B1 and the wire 2b in the process of changing from B2 to C1 have the same wire speed, but the wire 2b passes on the outer peripheral side, so it is running. In other words, the wires are displaced from each other. In addition, these wires are tightly and tightly wound around the roller 16, so that they are in strong contact with each other. These situations create friction between the wires. In FIG. 4, the abrasive grains 12a fixed to the wire 2a and the 12b fixed to the wire 2b rub against each other, and the bonding material coated on the portion of each abrasive grain located at the outer peripheral end of the wire is removed. Can do.

The wires that are rubbed do not actually come into contact with the wire surface, and the abrasive grains fixed on the surface rub against each other. Specifically, if the saw wire has several tens or more of abrasive grains fixed to the entire surface of the wire having a length of about 1 mm, contact between the abrasive grains and the wire surface can be sufficiently avoided.

If it is a form which can obtain this effect | action, about the implementation method, it will not be specified in particular, For example, it can carry out by winding several times around the running groove of one roller like FIG.5 (c). Or you may wind around the outer periphery of two or more rollers like FIG.5 (d). In this case, since there are a lot of running grooves on which a plurality of wires run, the opportunities for the wires to rub against each other increase, and the rotation effect of the wire that naturally twists during running due to being forced by spiral winding as a whole is added, The binder can be removed from the outer peripheral edge of the abrasive grains fixed to the entire circumference of the wire.

Furthermore, a mechanism for forcibly twisting the wire may be provided. For example, as shown in FIG. 6E, the rotation axes of the plurality of rollers 16 having the running grooves are inclined with respect to each other, whereby the wire is likely to be twisted, and the rubbing position can be appropriately changed. Alternatively, as shown in FIG. 6 (f), in addition to the roller 16 around which the wire is wound, another roller 18 having a function of reciprocating in the direction parallel to the rotation axis of the roller 16 is provided on the outer periphery of the roller 16. Twist can be imparted to the wire by contacting one of the wound wires. The method for imparting twist to the wire is not limited to these, and it is only necessary to include a process using a mechanism or device in which the entire surface of the wire rubs against each other.

Moreover, the wire of a 1st process does not need to have the abrasive grain fixed completely. That is, in the first step, it is only necessary that the abrasive grains are fixed to such an extent that they do not fall off in the subsequent second step. By doing so, even if the abrasive grains are aggregated and fixed in the first step, the aggregated particles in the second step are destroyed, and the abrasive particles are more uniformly fixed to the surface of the wire core material. Can be made. At this time, if the abrasive grains at the outer peripheral edge, specifically, the insulating abrasive grains such as diamond are exposed, the outer peripheral edge of the abrasive grains is exposed by electrolytic plating or the like if necessary. Can be fixed.

A steel wire having a diameter of 0.12 mm was prepared as a wire core material, and diamond abrasive grains with an average particle diameter of 20 μm coated with Ni were used as abrasive grains. The abrasive grains were fixed in the nickel plating solution by electroplating while being dispersed and suspended by stirring (first step). Next, two rollers having one running groove were prepared, and arranged such that their rotation axes intersected at 90 ° as shown in FIG. The diameter of the roller used was φ150 mm. Similar to FIG. 6 (e), the roller was run at a linear speed of 30 m / min while being wound around the outer periphery of these rollers three times. The fixed abrasive saw wire obtained by this method is uniform over the entire circumferential surface of the wire, and the bonding material (nickel plating) at the outer peripheral end of the abrasive grain is sufficiently removed to obtain a uniform saw wire. did it.

2 .... Wire 4 ... Supply reel 6 ... Main roller 8 ... Discharge reel 10 ... Workpiece 12 ... Abrasive grain 14 ... Binder 16 ... roller

Claims (2)

A method for producing a fixed abrasive saw wire in which abrasive grains are fixed to a wire core with a binder,
A first step of covering the surface of the wire core material with a binder and fixing the abrasive grains; and thereafter, at least one roller having a plurality of running grooves, or a wire having the abrasive grains fixed to the outer periphery of a roller group. Secondly , it is wound around the same running groove of the roller or two or more grooves of the roller group or more times so that the wire is tightly wound tightly and run in a state where they are in strong contact with each other . Process,
A method for producing a fixed abrasive saw wire comprising:     The fixed abrasive according to claim 1, comprising at least one mechanism or step of twisting the wire before the wire moves from the running groove wound twice or more to the next running groove wound twice or more. Type saw wire manufacturing method.