JP5530170B2 - Screen printing device - Google Patents

Description

  The present invention relates to a screen printing apparatus for printing cream solder, conductive paste, or the like on a substrate as a pretreatment for mounting a component on a substrate such as a printed wiring board (PWB).

  A screen printing device is built into a printed circuit board (PCB) production line, prints conductive paste on the substrate conveyed from the upstream side, and sends it to the component mounting device on the downstream side. is there. Many of the screen printing apparatuses of this type generally accept one board at a time for one printing unit in the apparatus and send it out to a component mounting apparatus while performing a printing process, as disclosed in Patent Document 1. Is.

  However, in recent years, as disclosed in, for example, Patent Document 2, two printing units and two substrate moving stages are provided in parallel in the apparatus, and substrates are individually provided to each printing unit from the upstream side. It has also been developed that prints while accepting prints and sends them individually downstream. This is because a so-called dual transport type component mounting apparatus has been used which has two substrate transport lines in one apparatus and simultaneously advances (parallel) component mounting in each transport line. The aim is to improve the efficiency of printing and component mounting by connecting the screen printing device and the component mounting device.

Japanese Patent Laid-Open No. 7-205399 JP 2009-70867 A

  The printed circuit board production line is configured in various forms to increase production efficiency. For example, a single transport type device (referred to as a single system) having one substrate transport line and two substrate transport lines. A dual-portion type component mounting device or two single-mounting type component mounting devices (collectively referred to as two-system devices), or two upstream systems In some cases, it is required to install a screen printing device between the side device and the one component mounting device. Even when a screen printing device is provided between the two upstream devices and the two component mounting devices, and two substrate transfer lines are formed from the upstream device to the component mounting device, one substrate is also used. After printing on the board from the upstream apparatus on the transfer line, it may be required to transfer the printed board to the component mounting apparatus on the other board transfer line.

  However, the conventional apparatus described in Patent Document 1 is premised on the arrangement between a single conveyance type upstream apparatus and a single conveyance type downstream apparatus (component mounting apparatus). The conventional apparatus described in Document 2 is arranged between the dual transport type upstream apparatus and the dual transport type downstream apparatus (component mounting apparatus), and the board transport line extends from the upstream apparatus to the downstream apparatus. Are independently formed, and it is impossible to directly apply the apparatus to any screen printing apparatus.

  Therefore, in actual operation, a case where the upstream side is a single conveyance type apparatus and the downstream side is a dual conveyance type apparatus (referred to as a component mounting apparatus), for example, a case where the one disclosed in Patent Document 1 is applied as a screen printing apparatus. In other words, a sorting device for sorting the substrate transport destination is provided between the screen printing device and the component mounting device. In addition, when the one of Patent Document 2 is applied in the same case, a similar sorting device is interposed between the upstream device and the screen printing device. On the contrary, when the upstream side is a dual conveyance type apparatus and the downstream side is a single conveyance type apparatus (referred to as a component mounting apparatus), and when the screen printing apparatus of Patent Document 1 is applied, the upstream side A switching device for switching the substrate receiving source is provided between the side device and the screen printing device. In addition, in the case where the one of Patent Document 2 is applied in the same case, the screen printing device and the component mounting A similar switching device is interposed between the devices.

  Further, even when the screen printing apparatus is provided between the two upstream apparatuses and the two component mounting apparatuses and the one disclosed in Patent Document 2 is applied, for example, one side of the two board transfer lines When the board is moved to the other side during the board transfer in the board transfer line, it is necessary to provide a switching device similar to the above between the screen printing apparatus and the component mounting apparatus.

  However, such a line configuration in which an additional facility such as a sorting device or a switching device is provided in addition to the screen printing device is not desirable in terms of space saving and cost reduction of the printed circuit board manufacturing facility. There is room for it.

  The present invention has been made in view of such circumstances, and it is possible to increase the production efficiency between a single conveyance type device and a dual conveyance type device without requiring an incidental facility such as a sorting device, or dual. Provided is a screen printing apparatus in which at least one of an upstream side and a downstream side between a transport type device and a dual transport type device can be installed between an upstream device and a downstream device of a dual transport type production line. The purpose is to do.

The present invention for solving the above-described problems is directed to a screen printing apparatus, a print execution unit for performing screen printing on a substrate, and a substrate provided at one position in a specific direction across the position of the print execution unit. A substrate carry-out unit provided at the carry-in unit and the other side position, and a substrate carried from the substrate carry-in unit are received and supported so that printing can be performed in the print execution unit, and the printed substrate is A substrate support table that is unloaded from the substrate unloading unit, and the substrate support tables are arranged in parallel so as to be movable in the Y-axis direction orthogonal to the X-axis direction when the specific direction is the X-axis direction. and consists of a first substrate support table and the second substrate support table having a common area that overlaps a portion of the movable range of each other, parallel pre Symbol substrate inlet is in the Y-axis direction Configuration Li Kui the substrate outlet such from the first substrate loading unit and the second substrate inlet is positioned in the common area, or the first substrate outlet and the second substrate discharge portion substrate outlet is arranged in the Y-axis direction Tona Li Kui comprising at least one component of the configuration in which the substrate inlet is positioned in the common area, the substrate support table of one side of the front Symbol first substrate support table and the second substrate support table is, the substrate When receiving a substrate carried in from a carry-in unit or carrying out a printed substrate from the substrate carry-out unit , the substrate support table on one side is the substrate carry-in unit in the common area, or the substrate in the common area while that will be disposed at a position corresponding to the unloading unit, which is the substrate support table on the other side are disposed at positions avoiding the substrate support table of the one side in the movable region, before Print execution unit is one that is located a screen printing feasible position with respect to the substrate supported on the respective substrate support table.

  According to this screen printing apparatus, since two printing processes using two substrate support tables can be simultaneously performed in parallel, printing can be performed efficiently, and at least the upstream apparatus or the downstream apparatus can be used. It is possible to carry out printing while accepting the substrate from the upstream device and carrying it out to the downstream device by using only one screen printing device with two systems, without the conventional incidental equipment (switching device). Become.

In the above screen printing apparatus, before Symbol substrate inlet comprises a first substrate inlet and the second substrate inlet arranged in the Y-axis direction, the substrate carry-out section, the first in the Y-axis direction, a second substrate It is provided in the common area between the carry-in section, the first substrate support table, the movable region of that, the first receiving position capable receives the substrate to be carried from the first substrate loading unit The second substrate support table moves between a delivery position where the substrate can be carried out from the substrate carry-out unit , and the second substrate support table can receive a substrate carried in from the second substrate carry-in unit within the movable region . 2 moves between the receiving position and the delivery position, when either one of the side of the substrate support table of the first substrate support table and the second substrate support table is positioned at the delivery position, the other side substrate supporting The Le in which is arranged at a position avoiding the substrate support table of the one side in the movable region.

  In this screen printing apparatus, the substrate carried in from the first substrate carry-in section is received (received) by the first substrate support table disposed at the first receiving position, and printing is performed while being supported on the table. Applied. Then, the substrate is sent out from the table in a state where the first substrate support table is arranged at the sending position in the common area, and the printed substrate is carried out from the substrate carry-out section. On the other hand, the substrate carried in from the second substrate carry-in section is the second substrate support arranged at the second receiving position which is a position avoiding the first substrate support table located at the sending position in the common area within the movable area. It is received on a table and printed in a state supported on this table. Then, the substrate is sent out from the table in a state where the second substrate support table moves in the movable area and is arranged at the delivery position in the common area, whereby the printed board is carried out from the board carry-out section. At this time, the first substrate support table is disposed within the movable region at a second receiving position that is a position that avoids the second substrate support table that is located at the sending position within the common region. That is, according to this screen printing apparatus, two printing processes using two substrate support tables can be simultaneously performed in parallel, so that printing can be performed efficiently and incidental equipment as in the prior art. The (switching device) is not required, and the screen printing device alone can receive the substrate from the two upstream devices and perform printing and carry it out to the downstream device.

  In this screen printing apparatus, the print execution unit is arranged to perform printing on the substrate on each of the substrate support tables arranged at the delivery position.

  In this screen printing apparatus, the substrates carried in from the first and second board carry-in sections (two upstream apparatuses) are carried out while being printed by the common print execution section.

  The print execution unit includes a first print execution unit that performs printing on a substrate on the first substrate support table arranged at the first receiving position, and the second execution position. It may consist of a second print execution unit that performs printing on the substrate on the second substrate support table.

  In this screen printing apparatus, printing is performed on a substrate by a separate print execution unit for each substrate carrying-in unit into which the substrate has been carried in, and then carried out. Therefore, it is possible to carry out the printing while printing different patterns on the substrates carried in from the two upstream apparatuses.

In the above screen printing apparatus, before Symbol substrate outlet, comprises a first substrate outlet and the second substrate discharge unit arranged in the Y-axis direction, the substrate carrying section, the first in the Y-axis direction, is provided in the common area between the second substrate discharge portion, said first substrate support table, the movable region of that, the a receivable receiving position the substrate is carried from the substrate inlet first The second substrate support table moves from the first delivery position where the substrate can be carried out from the one substrate carry-out portion , and the second substrate support table is moved from the receiving position and the second substrate carry-out portion within the movable region. when moving between the second delivery position in which unloading of the substrate is possible, either one of the side of the substrate support table of the first substrate support table and the second substrate support table is positioned at the receiving position, the other Side board support In which the table is placed in a position avoiding a substrate support table of the one side in the movable region.

  In this screen printing apparatus, the substrate carried in from the substrate carry-in section is arranged at a receiving position within a common area where a movable area of the first substrate support table and a movable area of the second substrate support table overlap. Is received by the first substrate support table or the second substrate support table, and printing is performed while being supported on the table. When the substrate is received by the first substrate support table and printed, the substrate is sent out from the table in a state where the first substrate support table is arranged at the first delivery position. When the substrate is unloaded from the first substrate unloading section and the substrate is received by the second substrate support table and printed, the second substrate support table is disposed at the second delivery position. Then, the substrate is sent out from the table, whereby the printed substrate is carried out from the second substrate carrying-out unit. That is, in this screen printing apparatus, when the substrate is received by the first substrate support table arranged at the receiving position within the common area, the second substrate support table that supports the printed substrate is within the movable area. The first substrate support table that supports the substrate after printing when the substrate is received by the second substrate support table that is located at the second delivery position avoiding the first substrate support table and is disposed at the receiving position within the common area. Is located at the first delivery position avoiding the second substrate support table within the movable region. According to this screen printing apparatus, since two printing processes using two substrate support tables can be simultaneously performed in parallel, printing can be performed efficiently, and conventional ancillary equipment (sorting) can be performed. The apparatus) is not necessary, and the screen printing apparatus alone can receive the substrate from the upstream apparatus of one system, print the substrate, and carry it out to the downstream apparatus of the two systems.

  In this screen printing apparatus, the print execution unit is arranged to perform printing on the substrate on each of the substrate support tables arranged at the receiving position.

  In this screen printing apparatus, the substrate carried in from the substrate carry-in unit is carried out from the first or second substrate carry-out unit while being printed by the common print execution unit.

  The print execution unit includes a first print execution unit that performs printing on a substrate on the first substrate support table disposed at the first delivery position, and the second placement position. It may consist of a second print execution unit that performs printing on the substrate on the second substrate support table.

  In this screen printing apparatus, printing is performed by a separate print execution unit in accordance with the substrate carry-out unit from which the substrate is carried out. For this reason, it is possible to carry out a different pattern on a substrate carried in from one upstream apparatus and carry it out to two downstream apparatuses.

In the screen printing apparatus as described above, the substrate carry-in portion includes a first substrate carry-in portion and a second substrate carry-in portion arranged in the Y-axis direction, and the substrate carry-out portion is the first, The first substrate carry-out portion and the second substrate carry-out portion arranged in the Y-axis direction provided in the common area between the second substrate carry-in sections, wherein the first substrate support table A first receiving position capable of receiving a substrate carried in from the first substrate carry-in section, a first delivery position capable of carrying out a substrate from the first substrate carry-out section, and carry-out of a substrate from the second substrate carry-out section A second receiving position where the second substrate support table can receive a substrate carried in from the second substrate carry-in section within the movable region; The second delivery position And the substrate support table on one side of the first substrate support table and the second substrate support table is moved to either the first delivery position or the second delivery position. When positioned, the other side substrate support table may be disposed at a position avoiding the one side substrate support table in the movable region .

  As described above, according to the screen printing apparatus of the present invention, since two printing steps using two substrate support tables can be simultaneously performed in parallel, printing can be performed efficiently, Prints while accepting the substrate from the upstream device of the two systems alone and carries it out to the downstream device of the single system, or prints while receiving the substrate from the upstream device of the single system and downstream of the two systems It is possible to carry out printing while accepting a substrate from the upstream device and carry it out to the downstream device, with the screen printing device alone including at least one of the upstream device and the downstream device including two systems, including carrying out to the device. Therefore, without accompanying incidental facilities such as a conventional switching device and a sorting device, at least one side has two systems with one system and two systems It is possible to interposed between the location.

1 is a plan view showing a first embodiment of a screen printing apparatus according to the present invention. It is a front view which shows a screen printing apparatus. It is a top view (plan view of the state where a printing execution part etc. were removed from a screen printing device) which shows a substrate support table built in a screen printing device, its drive mechanism, etc. It is sectional drawing (IV-IV sectional view taken on the line of FIG. 3) of the screen printing apparatus which shows the structure of a board | substrate support table. It is a principal part enlarged view of the clamp unit in FIG. 4 ((a) is a board | substrate unclamped state, (b) is a board | substrate clamp state). It is a perspective view which shows the printing execution part etc. which are integrated in a screen printing apparatus. It is a top view which shows a printing execution part. It is a perspective view which shows the mask holding mechanism which hold | maintains a screen mask. It is a plane schematic diagram of the said mask holding mechanism for demonstrating the rotation drive mechanism and Y-axis drive mechanism incorporated in a mask holding mechanism ((a) is before mask rotation, (b) shows the state after mask rotation, respectively. ). FIG. 2 is a schematic plan view for explaining a printing operation of a screen printing apparatus based on control by a control device ((a) and (b) show the printing operation in time series). FIG. 2 is a schematic plan view for explaining a printing operation of a screen printing apparatus based on control by a control device ((a) and (b) show the printing operation in time series). It is a plane schematic diagram which shows 2nd Embodiment of the screen printing apparatus which concerns on this invention ((a), (b) has shown the printing operation in time series). FIG. 6 is a schematic plan view showing a third embodiment of a screen printing apparatus according to the present invention ((a) and (b) show printing operations in time series). It is a plane schematic diagram which shows 4th Embodiment of the screen printing apparatus which concerns on this invention. It is a plane schematic diagram which shows 5th Embodiment of the screen printing apparatus which concerns on this invention. It is a plane schematic diagram which shows 6th Embodiment of the screen printing apparatus which concerns on this invention. It is a plane schematic diagram which shows 7th Embodiment of the screen printing apparatus which concerns on this invention ((a), (b), (c) has shown printing operation in time series).

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  1 and 2 show a first embodiment of a screen printing apparatus according to the present invention. FIG. 1 is a plan view and FIG. 2 is a front view schematically showing the screen printing apparatus.

  The screen printing apparatus 1 is incorporated in a printed circuit board (PCB) production line in a state of being interposed between two upstream apparatuses and one downstream apparatus. In the illustrated example, the screen printing apparatus 1 (hereinafter abbreviated as the printing apparatus 1) includes two loaders L1 and L2 (referred to as a first loader L1 and a second loader L2) arranged in parallel and one component mounting. It is interposed between the apparatus M, performs printing on the board W fed out from the upstream loaders L1 and L2, and sends it out to the component mounting apparatus M on the downstream side.

  In the following description, the transport direction of the substrate W in the production line is the X-axis direction, the direction orthogonal to the X-axis direction on the horizontal plane is the Y-axis direction, and the phrase (vertical) is orthogonal to both the X-axis and Y-axis directions. The printing apparatus 1 will be described with the (direction) as the Z-axis direction.

  The printing apparatus 1 has two substrate carry-in portions En1 and En2 (referred to as a first substrate carry-in portion En1 and a second substrate carry-in portion En2) at one end portion in the X-axis direction (upstream end portion in the substrate transport direction). The other end (downstream end in the substrate transport direction) has one substrate carry-out portion Ex, and the substrate W fed out from the first loader L1 is transferred from the first substrate carry-in portion En1. The board W fed out from the second loader L2 is carried into the apparatus from the second board carry-in part En2, and the printed board W is carried out from the common board carry-out part Ex to the component mounting apparatus M. The substrate carry-in portions En1 and En2 are provided at positions spaced apart from each other in the Y-axis direction, and the substrate carry-out portion Ex is provided at a position between the substrate carry-in portions En1 and En2 in the Y-axis direction. In the figure, reference numerals CL1, CL2, and CM are belt conveyor pairs equipped in the loaders L1 and L2 and the component mounting apparatus M, respectively, and the substrate W is a pair of belt conveyors CL1, CL2, and CM (hereinafter referred to as conveyor pairs). (Abbreviated as CL1, CL2, and CM).

  The printing apparatus 1 performs printing on the base 2 individually on the two substrate support tables 10A and 10B for supporting the substrate W and the substrates W supported by the substrate support tables 10A and 10B. Printing execution units 20A and 20B.

  The substrate support tables 10A and 10B (referred to as the first substrate support table 10A and the second substrate support table 10B) receive the substrate W carried from the substrate carry-in portions En1 and En2, and support it so that printing is possible. The substrate W after printing is sent out from the substrate carry-out unit Ex. Among these, the first substrate support table 10A receives the substrate W carried in from the first substrate carry-in unit En1, and receives the first print execution unit. On the other hand, the second substrate support table 10B receives the substrate W carried in from the second substrate carry-in unit En2 and performs printing by the second print execution unit 20B. The substrate W is supported so that it becomes possible.

  As shown in FIG. 3, each of the substrate support tables 10A and 10B has a substantially rectangular shape that is elongated in the X-axis direction in plan view, and is configured to move individually in the Y-axis direction by a table driving mechanism. ing. The table drive mechanism is constituted by a screw feed mechanism. That is, the substrate support tables 10A and 10B are movably supported on a common fixed rail 3 provided on the base 2 and extending in the Y-axis direction. The motors 4A are respectively connected via screw shafts 5A and 5B. 4B. Then, based on motor control by the control device described later, the first substrate support table 10A can receive the substrate W carried in from the first substrate carry-in section En1 (position shown in FIGS. 1 and 3; first The second substrate support table 10B is carried in from the second substrate carry-in unit En2, while the substrate W is moved between a position where the substrate W can be carried out from the substrate carry-out unit Ex (called a send-out position). It moves between a receiving position where the substrate W can be received (position shown in FIGS. 1 and 3; referred to as a second receiving position) and the delivery position. That is, the first substrate support table 10A can move between the first receiving position and the sending position that are within the movable range of movement, and the second substrate support table 10B is the second receiving position and the sending that are within the movable range of movement. It can move between positions. The delivery position is located in a common area where the movable areas of the first substrate support table 10A and the second substrate support table 10B partially overlap each other. When the first substrate support table 10A is located at the delivery position within the common area, the second substrate support table 10B is located within the movable area at the first receiving position avoiding the first substrate support table 10A. Are positioned at the delivery position within the common area, the first substrate support table 10A is positioned at the second receiving position avoiding the second substrate support table 10B within the movable area.

  Each of the substrate support tables 10A and 10B can receive the substrate W that is carried in, and can print the substrate W on the conveyor pair 12 and the conveyor pair 12 for sending out the printed substrate W from the substrate unloading unit Ex. A clamp unit 14 for supporting and fixing, a clamp unit driving mechanism for moving the clamp unit 14 along the conveyor pair 12 in the X-axis direction, a cleaning unit 18 for cleaning the screen mask 21 described later, and the like. Prepare.

  The conveyor pair 12 is formed of a belt conveyor, and transports the substrate W in the X-axis direction as the belt moves while the both ends of the substrate W are supported by a belt 121 that moves around by a motor (FIG. 5A )reference). The conveyor on one side of the two conveyors constituting the conveyor pair 12 is a fixed conveyor fixedly supported on the substrate support tables 10A and 10B via struts, and the conveyor on the other side is the conveyor on the one side. The movable conveyor is supported by the substrate support tables 10A and 10B so as to be able to contact and separate (movable in the Y-axis direction) and is driven by an actuator such as a motor. In other words, the conveyor pair 12 is a variable stroke type conveyor that can change the interval according to the size of the substrate W.

  In the present embodiment, the first substrate support table 10A located on the front side of the apparatus (the lower side of FIGS. 1 and 3) is such that the rear side of the conveyor pair 12 is a fixed conveyor and the front side is a movable conveyor. On the other hand, the second substrate support table 10B located at the rear side of the apparatus can be changed with reference to the rear conveyor, and the front side of the pair of conveyors 12 is a fixed conveyor and the rear side is a movable conveyor. The interval can be changed based on the conveyor.

  The clamp unit 14 has a base member 140 supported so as to be movable in the X-axis direction along fixed rails 141 provided on the substrate support tables 10A and 10B. A backup mechanism for lifting and supporting the substrate W and a clamp mechanism for fixing the substrate W lifted by the backup mechanism are provided.

  As shown in FIG. 4 and FIG. 5A, the backup mechanism includes a plurality of backup pins 151 (hereinafter abbreviated as pins 151) in a predetermined arrangement and is moved up and down on the base member 140 via a link mechanism or the like. A backup table 150 (referred to as a BU table 150) that is supported and a driving motor 152 and the like are included. By driving the motor 152, the BU table 150 is moved to a predetermined retracted position and an operating position raised from this position. It is configured to be displaced. Here, the retracted position is a position where the tip position of the pin 151 is lower than the lower surface of the substrate W supported by the conveyor pair 12 (belt 121) (position shown in FIG. 5A), and the operating position is the same. This is a position where the tip position of the pin 151 is higher than the lower surface of the substrate W. Therefore, this backup mechanism lifts the substrate W from the conveyor pair 12 when the BU table 150 is placed in the operating position, as shown in FIG.

  The clamp mechanism includes a pair of clamp members 160 disposed above the conveyor pair 12 and extending parallel to each other in the X-axis direction, an arm member 161 to which the clamp members 160 are assembled, and an actuator for driving the clamp members, for example, And a two-way type air cylinder 162. One of the clamp members 160 (on the left side in FIGS. 4 and 5A) is assembled so as to be displaceable in the Y-axis direction with respect to the arm member 161, and is driven by the air cylinder 162. It is displaced to the retracted position shown in FIG. 5 and the forward position shown in FIG. That is, as shown in FIG. 4B, the clamp mechanism moves the substrate W lifted by the back-up mechanism by moving the clamp member 160 on one side from the retracted position to the advanced position. At the same time, it is clamped by being sandwiched in the Y-axis direction.

  Each arm member 161 of the clamp mechanism is formed so as to hold the conveyor pair 12 from the outside (outside in the Y-axis direction), and then slides on the X-axis direction fixed rail 122 assembled to each conveyor pair 12. Connected as possible. As described above, each arm member 161 is connected to the conveyor pair 12 (fixed rail 122) and guided so that the clamp unit 14 can be moved in the X-axis direction as will be described later. The relative position of the conveyor pair 12 and each clamp member 160 in the Y-axis direction is kept constant.

  Also, one arm member 161 of each arm member 161, specifically, the arm member 161 (the right arm member in FIG. 4) connected to the fixed conveyor of the conveyor pair 12 is fixed to the base member 140, The arm member 161 on the side connected to the movable conveyor (left arm member in FIG. 4) is supported along the fixed rail 164 provided on the base member 140 so as to be displaceable in the Y-axis direction. Therefore, when the distance between the conveyor pair 12 is changed, the arm member 161 on one side moves together with the movable conveyor in the Y-axis direction, whereby the distance between both the clamp members 160 is automatically adjusted. That is, the interval between the clamp members 160 is automatically changed to an interval at which the substrate W transported after changing the interval between the conveyor pairs 12 can be clamped. Each of the clamp members 160 is configured such that the one assembled on the movable conveyor side among them is driven. With this configuration, the substrate W is clamped with reference to the fixed conveyor side. ing. Accordingly, in the clamp unit 14 of the first substrate support table 10A, the substrate W is clamped with reference to the rear side of the apparatus, and in the clamp unit 14 of the second substrate support table 10B, the substrate W is clamped with reference to the front side of the apparatus.

  The clamp unit drive mechanism is constituted by a screw feed mechanism. That is, the base member 140 of the clamp unit 14 is movably supported on a fixed rail 141 provided on the base 2 and extending in the X-axis direction, and is driven by the motor 144 via the screw shaft 142. It is configured. And in each board | substrate support table 10A, 10B, the position in the board | substrate carrying-in part En1 and En2 vicinity is made into a board | substrate stand-by position, and the predetermined position downstream from this is a printing execution position, and the clamp unit 14 is a postscript control apparatus. Based on the motor control, it moves between these board standby positions (positions indicated by two-dot chain lines in FIG. 2) and printing execution positions (positions indicated by solid lines in FIG. 2).

  2, 4 and 5, only the clamp unit 14 of the first substrate support table 10A is shown, but the configuration of the second substrate support table 10B is also the same except that the substrate W is clamped on the front side of the apparatus. Basically, it is common with the first substrate support table 10A.

  Although not shown in detail, the cleaning unit 18 includes a cleaning head including a pad that can be slidably contacted with the lower surface of a screen mask 21 described later, a suction nozzle that sucks the screen mask 21 through the pad, and the like. When the substrate support tables 10A and 10B move in the Y-axis direction, the cleaning head is brought into sliding contact with the lower surface of the screen mask 21 to remove the paste accumulated on the lower surface of the mask and the pattern holes. The cleaning head is configured to be movable up and down with respect to the substrate support tables 10A and 10B. The cleaning head is disposed at an operating position where the cleaning head can be slidably contacted with the screen mask 21 only at the time of cleaning. It is configured to be arranged.

  In addition, the code | symbol 15 in FIGS. 1-3 is a stopper mechanism which the said conveyor pair 12 has, and is for making the board | substrate W received on the conveyor pair 12 wait in the said board | substrate standby position. This stopper mechanism 15 has a stopper shaft that is driven back and forth by an actuator such as an air cylinder, for example, and restricts the movement of the substrate W by advancing the stopper shaft into the transport path of the substrate W by the conveyor pair 12. It is configured to be switchable between an operating state and a stopped state in which the stopper shaft is retracted out of the conveyance path and the movement of the substrate W is allowed.

  Further, reference numeral 16 in the figure denotes a mask recognition camera mounted on the clamp unit 14. The mask recognizing camera 16 is a camera having a CCD area sensor or the like, and a mark such as a mark or a symbol written on the lower surface of the screen mask to recognize the relative position between the screen mask 21 and the substrate W, which will be described later. The image is taken from.

  The first print execution unit 20A is provided above the first substrate support table when the first print execution unit 20A is disposed at the first reception position for receiving the substrate, and the second print execution unit 20B is provided at the second reception position for receiving the substrate. Is provided above the second substrate support table.

  FIG. 6 is a perspective view showing only the print execution units 20 </ b> A and 20 </ b> B extracted from the printing apparatus 1. The print execution units 20A and 20B are arranged in parallel in the Y-axis direction, and are respectively arranged in the Y-axis direction, a mask holding mechanism for holding the mask 21, a squeegee unit 40 arranged in the X-axis direction, and the Y-axis direction. And a squeegee driving mechanism for moving the squeegee unit 40 in the Y-axis direction. The mechanisms and the like constituting the print execution units 20A and 20B are installed on the base 2 at a predetermined interval in the X-axis direction, and move from the first substrate carry-in unit En1 to the first receiving position. It is assembled to a pair of device frames 6 each formed in a gate shape so as to straddle the substrate W moving from the substrate carry-in portion En2 to the second receiving position and the substrate W moving from the delivery position to the substrate carry-out portion Ex. Yes.

  As shown in FIGS. 6 to 8, each mask holding mechanism includes a rectangular mask fixing member 22 in which a screen mask 21 (hereinafter abbreviated as “mask 21”) is detachably attached, and raises and lowers the mask fixing member 22. An elevating drive mechanism, a rotation driving mechanism for rotating the fixing member 22 together with the elevating drive mechanism about the Z axis, and a Y axis driving mechanism for moving the fixing member 22 along the Y axis direction together with the elevating drive mechanism Including.

  As shown in FIGS. 7 and 8, the mask fixing member 22 has a rectangular shape in which an opening 22a for printing is formed at the center, and the mask 21 assembled in advance in the frame body is the frame body. In addition, the mask fixing member 22 is fixed so as to close the opening 22a.

  Each drive mechanism of the mask fixing member 22 is configured as follows.

  Each apparatus frame 6 is provided with a fixed rail 25 extending in the Y-axis direction, and a mask support member 24 for supporting the mask fixing member 22 so as to be movable up and down is movably supported by these fixed rails 25. Specifically, the mask support member 24 has a U-shaped shape in a plan view including a pair of Y-axis plate portions 24 a extending along the fixed rail 25 and an X-axis plate portion 24 b connecting the one end portions thereof. The Y-axis plate portions 24a are connected to the sliders 26a to 26c attached to the fixed rails 25, so that they can move in the Y-axis direction.

  As shown in FIG. 8, a pair of guide shafts 251 extending in the Z-axis direction pass through each Y-axis plate portion 24 a of the mask support member 24, and the mask fixing member 22 is provided at the lower end of these guide shafts 251. Is fixed, and a connecting member 252 is fixed to the upper end. Each Y-axis plate portion 24a of the mask support member 24 has a pair of pulley-integrated nuts 256 assembled at a position between both guide shafts 251 so as to be rotatable and fixed in the Z-axis direction. A screw shaft 254 is screwed into the Z-axis direction with respect to 256, and both ends of the screw shaft 254 are fixedly supported by the mask fixing member 22 and the connecting member 252. A motor 260 is fixed to the mask support member 24, and a drive pulley (not shown) is mounted on the output shaft of the motor 260. The drive pulley and a plurality of idle pulleys 257 assembled to the mask support member 24 are provided. A drive belt 258 is mounted across the pulley integrated nut 256.

  With this configuration, when the motor 260 is driven, the rotation is transmitted to the pulley integrated nut 256 via the drive belt 258 to rotate the pulley integrated nut 256, and the screw shaft 254 is axially moved along with this rotation. As a result, the mask fixing member 22 fixed to the screw shaft 254 moves in the vertical direction (Z-axis direction) while being guided by the guide shaft 251 as indicated by an arrow in FIG. At the time of printing, the mask 21 is clamped by the clamp unit 14 while being lifted from the substrate W supported by the substrate support tables 10A and 10B, specifically the conveyor pair 12, by the control of the motor 260 by the control device described later. So as to be displaced between the overlapping height position (the position indicated by the two-dot chain line in FIG. 8) and the retracted position (the position indicated by the solid line in FIG. 8) above this height position. It has become.

  The mask support member 24 is connected to the sliders 26a to 26c mounted on the fixed rails 25 as described above. Specifically, the mask support member 24 is allowed to be displaced around the Z axis with a specific position as a fulcrum. As described above, the Y-axis plate portions 24a are connected to the sliders 26a to 26c through the link members 28a to 28c. FIG. 9A is a diagram schematically showing the mask support member 24 and the like in order to facilitate understanding of the structure. As shown in this figure, the mask support member 24 is connected to a slider 26b via a pin 29 at an intermediate position in the Y-axis plate portion 24a on one side (left side in the figure). Positions at both ends in the Y-axis direction of the shaft plate portion 24a and the sliders 26a, 26c are connected via link members 28a, 28c that are pin-connected at both ends, respectively. Similarly, the Y-axis plate ends 24a on the other side of the mask support member 24, and the three intermediate positions in the Y-axis direction and the sliders 26a to 26c are similarly connected via link members 28a to 28c connected to both ends. Yes.

  The nut member 33 is fixed to the middle slider 26b among the three sliders 26a to 26c respectively connected to the Y-axis plate portions 24a of the mask support member 24. The nut member 33 is fixed to the nut member 33 in the Y-axis direction. The extending screw shaft 32 is screwed and inserted, and the screw shaft 32 is integrated with the output shaft of the motor 30 fixed to the apparatus frame 6.

  With this configuration, when each motor 30 is driven at the same speed in the same direction, the mask support member 24 moves in the Y-axis direction while maintaining the state as it is. For example, as shown in FIG. When only one motor 30 is driven, the mask support member 24 rotates around the Z axis with the pin 29 as a fulcrum.

  In each of the print execution units 20A and 20B, the squeegee unit 40 is disposed above the mask holding mechanism. This squeegee unit 40 expands a paste such as cream solder or conductive paste on the mask 21 while rolling (kneading) the squeegee unit 40, and changes the tilt direction and tilt angle of the single squeegee 42 and the squeegee 42 with respect to the mask 21. Between the squeegee angle variable mechanism (not shown), the printing work height position at which the squeegee 42 is in sliding contact with the mask 21, and the retracted position (position shown in FIGS. 2 and 6) above this position. And a squeegee lifting mechanism and the like which are not shown in the figure.

  The squeegee drive mechanism that drives the squeegee unit 40 in the Y-axis direction is configured by a screw feed mechanism. That is, as shown in FIGS. 6 and 7, the squeegee units 40 of the print execution units 20A and 20B are movably supported on a common fixed rail 44 provided in the apparatus frame 6 and extending in the Y-axis direction. The motors 46A and 46B are driven independently of each other via screw shafts 47A and 47B, respectively.

  In FIG. 6, reference numeral 50 denotes a substrate recognition camera, which is a mark of the substrate W for recognizing the relative position between the substrate W supported on each of the substrate support tables 10A and 10B and the print execution units 20A and 20B. A sign such as a sign or a symbol is imaged from above. The substrate recognition camera 50 is a camera having a CCD area sensor and the like, similar to the mask recognition camera 16, and is located on the substrate carry-in portions En1 and En2 side of the apparatus frame 6 and is connected to the print execution portions 20A and 20B. It is fixed at the corresponding position.

  The printing apparatus 1 includes a control device (control means) (not shown) having a CPU or the like as a constituent element, and the actuators such as the motors 4A and 4B and the cameras such as the mask recognition camera 16 are all included in the control device. Is electrically connected. Accordingly, a series of print processing operations by the substrate support tables 10A and 10B and the print execution units 20A and 20B, that is, receiving the substrate W carried in from the substrate carry-in units En1 and En2, printing on the substrate W, and substrate unloading unit Ex A series of operations for unloading the substrate W from is controlled by this control device.

  Next, a printing operation of the printing apparatus 1 based on the control of the control apparatus will be described with reference to FIGS. 10 and 11.

  FIG. 10A schematically shows a state at a specific time point of the printing operation continuously performed in the printing apparatus 1, and specifically, the substrate W supported by the second substrate support table 10B. The state immediately after the end of printing is shown. The states of the substrate support tables 10A and 10B and the print execution units 20A and 20B at this time are as follows.

  The second substrate support table 10B is disposed at the second receiving position where the conveyor pair 12 corresponds to the second substrate carry-in portion En2. In the second substrate support table 10B, the clamp unit 14 is disposed at the print execution position with the substrate W clamped, and the subsequent substrate W is waiting at the substrate standby position. In the second print execution unit 20B, the mask 21 is released from the substrate W by placing the mask support member 24 in the retracted position, and the squeegee 42 is placed in the standby position above one end of the mask. It is supposed to be in a state.

  On the other hand, 10 A of 1st board | substrate support tables are arrange | positioned in the said delivery position where the conveyor pair 12 respond | corresponds to the board | substrate carrying-out part Ex. The first substrate support table 10A is immediately after unloading the previously printed substrate W from the substrate unloading section Ex, and the clamp unit 14 is disposed at the substrate standby position to clamp the subsequent substrate W. is there. Here, the clamping of the substrate W is performed by lifting the substrate W from the conveyor pair 12 by the BU table 150 after the clamp unit 14 has moved to the substrate standby position, and further by using a pair of the clamping members 160 as shown in FIG. This is performed by sandwiching the substrate W from both sides in the axial direction.

  From the state shown in FIG. 10A, first, the first substrate support table 10A moves to the second receiving position, that is, the conveyor pair 12 moves to a position corresponding to the first substrate carry-in portion En1. At this time, the clamp unit 14 moves to transfer the substrate W from the substrate standby position to the print execution position, and in the middle of the transfer, the substrate recognition camera 50 at a position corresponding to the first print execution unit 20A causes the substrate W to move. The position of the substrate W on the clamp unit 14 is image-recognized by imaging the plurality of signs above. In addition, the mask recognition camera 16 mounted on the clamp unit 14 captures a plurality of marks on the mask 21 of the first print execution unit 20A, whereby the relative positions of the mask 21 and the clamp unit 14 are image-recognized. , The positional deviation between the mask 21 and the substrate W at the printing execution position is obtained, and correction values (ΔX, ΔY) in the X-axis, Y-axis, and R-axis (around the Z-axis) directions corresponding to the positional deviation are obtained. , ΔR). Such recognition processing and calculation of correction values are performed by the control device based on images captured by the substrate recognition camera 50 and the mask recognition camera 16.

  Further, the second substrate support table 10B moves from the first receiving position to the delivery position so as to follow the movement of the first substrate support table 10A.

  Accordingly, as shown in FIG. 10B, the first substrate support table 10A is arranged at the first receiving position, and the second substrate support table 10B is arranged at the delivery position.

  When the first substrate support table 10A is arranged at the first receiving position, printing on the substrate W is executed by the first print execution unit 20A, and a subsequent substrate W is transferred from the second substrate carry-in unit En2 during that time. It is received by the first substrate support table 10A and placed at the substrate standby position. At this time, since the substrate W at the printing execution position is clamped by the clamp unit 14 while being lifted from the conveyor pair 12, the displacement of the substrate W due to the reception of the subsequent substrate W is not caused by driving the conveyor pair 12.

  In the printing of the substrate W by the first printing execution unit 20A, first, the mask support member 24 is lowered from the retracted position to the heavy loading height position, and the mask 21 is loaded on the substrate W. At this time, in a state where the first substrate support table 10A is disposed at the first receiving position, the position correction for the correction value ΔX of the substrate A in the X-axis direction is performed by the motor 144 based on the correction values (ΔX, ΔY, ΔR). However, the mask 21 is appropriate for the substrate W by performing the position correction for the correction value ΔY in the Y-axis direction and the position correction for the correction value ΔR in the R-axis direction of the mask 21 by the two motors 30, respectively. Is overloaded.

  When the loading of the mask 21 onto the substrate W is completed, the squeegee 42 moves downward from the retracted position to the printing work height position, and then the entire squeegee unit 40 including the squeegee 42 moves in the Y-axis direction to move to the substrate W. Printing is performed.

  In this way, while printing is being performed on the substrate W of the first substrate support table 10A, the clamp state of the substrate W by the clamp unit 14 is released in the second substrate support table 10B, and FIG. As shown, the printed substrate W is unloaded from the substrate unloading section Ex, and the clamp unit 14 moves to the substrate standby position to clamp the subsequent substrate W in standby. At this time, the conveyor pair 12 is driven to carry out the printed substrate W, but the subsequent substrate W waiting at the substrate standby position is stopped by the operation of the stopper mechanism 15, whereby the clamp unit 14 is driven. This makes it possible to clamp the substrate W.

  When the printing of the substrate W on the first substrate support table 10A is completed, the first print execution unit 20A is reset to the standby state. That is, the mask 21 is released from the substrate W by placing the mask support member 24 in the retracted position, and the squeegee 42 is moved up to the standby position at the upper end of the Y-axis direction destination and then stopped. Then, the first substrate support table 10A is moved to the delivery position.

  On the other hand, the second substrate support table 10B moves to the second receiving position. At this time, the substrate W is transported from the substrate standby position to the print execution position along with the movement of the clamp unit 14, and the substrate recognition camera 50 at a position corresponding to the second print execution unit 20B is moved on the substrate W during the transport. And the relative position between the mask 21 and the substrate W is image-recognized by capturing an image of the marker of the mask 21 of the second print execution unit 20B by the mask recognition camera 16. Based on this, the correction values (ΔX, ΔY, ΔR) are obtained.

  Thus, when the first substrate support table 10A is disposed at the sending position and the second substrate support table 10B is disposed at the second receiving position as shown in FIG. 11B, the correction values (ΔX, ΔY, ΔR) are set. And the mask 21 is properly mounted on the substrate W, and the second print execution unit 20B performs printing on the substrate W placed at the print execution position of the second substrate support table 10B. As shown, the subsequent substrate W is received by the second substrate support table 10B. On the other hand, for the first substrate support table 10A, the clamping of the substrate W by the clamp unit 14 is released, and the substrate W after printing is unloaded from the substrate unloading portion Ex.

  Thereafter, the substrate W carried from the first substrate carry-in unit En1 is received by the first substrate support table 10A, and the substrate W carried by the second substrate carry-in unit En2 is received by the second substrate support table 10B. While printing of the substrate W is alternately performed in each of the print execution units 20A and 20B, the printed substrate W is unloaded from the common substrate unloading unit Ex to the component mounting apparatus M.

  As described above, according to the printing apparatus 1, mainly using the first substrate support table 10 </ b> A, the substrate W is carried into the standby position, the substrate is clamped, and the substrate W is moved from the standby position to the printing position. Printing process including printing, board clamp release, board carry-out, and movement of the board clamp apparatus from the print position to the stand-by position in parallel with the board carry-out, and waiting for the board W mainly using the second board support table 10B Printing consisting of loading into the position, substrate clamping, movement of the substrate W from the standby position to the printing position, printing, substrate clamping release, substrate unloading, and movement of the substrate clamping device from the printing position to the standby position in parallel with substrate unloading Since the steps can be simultaneously performed in parallel with the execution timing being shifted, printing of the substrate W can be performed efficiently.

  Further, there is no need for a conventional incidental facility such as a transfer path switching device as in the prior art, and printing is performed by accepting the substrate W from the two upstream devices, that is, the two loaders L1 and L2, with the printing device alone. It can be carried out to a downstream apparatus of the system, that is, one component mounting apparatus M. Therefore, the production line can be made compact while the printing apparatus 1 is interposed between the two upstream apparatuses and the one downstream apparatus.

  In addition, in this printing apparatus 1, printing is performed on the first print execution unit 20 </ b> A that performs printing on the substrate W carried in from the first substrate carry-in unit En <b> 1 and the substrate W carried in from the second substrate carry-in unit En <b> 2. And the second print execution unit 20B that executes the above-described process, the substrate W fed from the two loaders L1 and L2 can be sent to the component mounting apparatus M while printing different patterns from each other. There is an advantage that you can.

  In the printing apparatus 1, the clamp unit 14 is provided to be movable between the print execution position and the substrate standby position in each of the substrate support tables 10A and 10B. The clamp unit 14 moves to the substrate standby position while the clamp of the substrate W) is released and the substrate W is being carried out, and clamps the subsequent substrate W that is on standby, from the sending position to the receiving position. The substrate W is arranged at the print execution position while the substrate support tables 10A and 10B move to (first receiving position, second receiving position). That is, after unloading the preceding substrate W, the printing execution units 20A and 20B print the succeeding substrate W almost simultaneously with the resetting of the substrate support tables 10A and 10B to the receiving positions (first receiving position and second receiving position). It becomes possible. Therefore, after the preceding substrate W is unloaded, the succeeding substrate W can be printed as quickly as possible. As a result, it is the same for the substrates W fed out from the two loaders L1 and L2. There is also an advantage that printing of the substrate W can be efficiently performed both when the pattern is printed and when different patterns are printed.

  Next, a second embodiment of the screen printing apparatus according to the present invention will be described with reference to FIG.

  FIG. 12A schematically shows a screen printing apparatus 1A (hereinafter abbreviated as printing apparatus 1A) according to the second embodiment in a plan view. The printing apparatus 1A according to the second embodiment differs from the printing apparatus 1 according to the first embodiment in the following points.

  First, each substrate support table 10A, 10B does not have a space (substrate standby position) for waiting the subsequent substrate W, and is received from the substrate carry-in portions En1, En2 to the substrate support tables 10A, 10B. The substrate W to be printed is conveyed as it is to the lower position (print execution position) of the print execution units 20A and 20B, and is clamped by the clamp unit 14 at this position. The clamp unit 14 can move in the X-axis direction as in the first embodiment, but its movable range is limited to a range in which the relative position between the mask 21 and the substrate W can be corrected when the mask is overlaid. .

  Although not shown, the mask recognition camera 16 and the substrate recognition camera 50 are connected to a moving mechanism using a motor or the like as a drive source, and a position (imaging position) interposed between the mask 21 and the substrate W, and the mask It is possible to move between the position 21 and the substrate W and the position retracted outward (retracted position). That is, in this printing apparatus 1A, after the substrate W is clamped and before the mask 21 is overlaid, the mask recognition camera 16 and the substrate recognition camera 50 are interposed between the mask 21 and the substrate W to capture images of the signs. Thus, the relative position between the mask 21 and the substrate W is recognized, and the correction values (ΔX, ΔY, ΔR) when the mask is overlaid are obtained based on the recognition result.

  In the printing apparatus 1A, the mask 21 is fixed to the base 2, while the clamp unit 14 is in the X axis direction, the Z axis direction, and the R axis direction around the Z axis with respect to the moving base of the first substrate support table 10A. After the substrate W is received from the first substrate carry-in portion En1 to the first substrate support table 10A (FIG. 12A) and the substrate W is clamped by the clamp unit 14, Based on the correction values (ΔX, ΔY, ΔR) while being driven by each motor and rising in the Z-axis direction, the clamp unit 14 is in the X-axis direction, the R-axis direction, and the moving base of the first substrate support table 10A is After moving in the Y-axis direction by the correction value, the substrate W is further raised in the Z-axis direction, and the substrate W is placed on the mask 21 from below to perform printing (FIG. 12B). After printing is completed, each motor is driven to move the clamp unit 14 in the Z-axis direction and move −ΔX in the X-axis direction and −ΔR in the R-axis direction while lowering in the Z-axis direction to release the plate. Thereafter, the moving base of the first substrate support table 10A moves in the Y-axis direction, so that the first substrate support table 10A moves to the delivery position, whereby the printed substrate W is carried out from the substrate carry-out portion Ex. (FIG. 12 (c)).

  Then, the first substrate support table 10A receives the substrate W, the substrate W is printed and the substrate W is unloaded, and the second substrate support table 10B receives the substrate W (FIG. 12A). Printing (FIG. 12 (a)) and unloading of substrate W (FIG. 12 (b)) are performed with a certain time difference, thereby supporting the substrate W loaded from the first substrate loading portion En1 to the first substrate. While the substrate W carried from the second substrate carry-in unit En2 to the table 10A is received by the second substrate support table 10B, the printing execution units 20A and 20B are alternately printed with the substrate W to carry out a common substrate carry-out. The part Ex is carried out to the component mounting apparatus M.

  That is, the first substrate support table 10A can move between the first receiving position and the sending position within the movable range of movement, and the second substrate support table 10B can be moved between the second receiving position and the sending position within the movable range of movement. Is movable. The delivery position is located in a common area where the movable areas of the first substrate support table 10A and the second substrate support table 10B overlap each other. When the first substrate support table 10A is located at the delivery position which is a common area, the second substrate support table 10B is located at the first receiving position where the first substrate support table 10A is avoided in the movable area. Are located at a delivery position that is a common area, the first substrate support table 10A is located in a second receiving position avoiding the second substrate support table 10B within the movable area.

  Also in the printing apparatus 1A according to the second embodiment, the first substrate support table 10A is used, and a printing process mainly including substrate loading, substrate clamping, printing, substrate clamping release, and substrate unloading, and the second substrate. Since the supporting table 10B and the printing process mainly consisting of substrate loading, substrate clamping, printing, substrate clamping release, and substrate unloading can be performed simultaneously in parallel with the execution timing being shifted, W can be printed efficiently.

  In addition, printing can be carried out while accepting the substrate W from the two loaders L1 and L2 by the printing apparatus 1A alone and can be carried out to one component mounting apparatus M. Therefore, it becomes useful when the production line is compactly configured as in the printing apparatus 1 of the first embodiment. In particular, in the printing apparatus 1A of the second embodiment, the substrate support tables 10A and 10B do not have a space (substrate standby position) for holding the substrate W on the substrate support tables 10A and 10B. Compact in the X-axis direction. Therefore, there is an advantage that the production line can be made compact in the substrate transport direction (X-axis direction).

  Next, a third embodiment of the screen printing apparatus according to the present invention will be described with reference to FIG.

  FIG. 13A schematically shows a screen printing apparatus 1B (hereinafter abbreviated as printing apparatus 1B) according to the third embodiment in a plan view. The printing apparatus 1B according to the third embodiment is a modification of the printing apparatus 1A (see FIG. 12) according to the second embodiment described above, and differs in configuration from the printing apparatus 1A according to the second embodiment in the following points.

  First, as the print execution unit, a common print execution unit 20 that performs printing on the substrate W on each of the substrate support tables 10A and 10B is provided, and the print execution unit 20 carries out the above-mentioned for carrying out the substrate W. It is arranged above the delivery position. The substrate recognition camera 50 is fixedly disposed above the first and second receiving positions for receiving the substrate W on the substrate support tables 10A and 10B, and is clamped by the clamp unit 14. A plurality of markers on each of the substrates W on the substrate support tables 10A and 10B are imaged at the first and second receiving positions. Further, the mask recognition camera 16 is fixedly provided on the clamp unit 14 as in the first embodiment, and the substrate support tables 10A and 10B are first and second receiving positions to perform printing on the substrate W. In the middle of moving from to the delivery position, a plurality of markers on the mask 21 are imaged.

  In the printing apparatus 1B, after the substrate W is received from the first substrate carry-in portion En1 to the first substrate support table 10A (FIG. 13A) and the substrate W is clamped by the clamp unit 14, the first substrate support is performed. As the table 10A moves from the first receiving position to the sending position, the substrate W is disposed below the print execution unit 20. In this state, after the position correction is performed on the substrate W side, the substrate W is mounted on the mask 21 and printing is performed. After the printing is finished, the substrate W is released from the clamp, and then the substrate W is masked. The plate is separated from the substrate 21, and the substrate W is unloaded from the first substrate support table 10A via the substrate unloading unit Ex as the conveyor pair 12 is driven.

  Then, the first substrate support table 10A receives the substrate W, the substrate W is printed and the substrate W is unloaded, and the second substrate support table 10B receives the substrate W (FIG. 13B). Printing (FIG. 13A) and unloading of the substrate W are performed with a certain time difference, so that the substrate W loaded from the first substrate loading portion En1 is transferred to the first substrate support table 10A and the second substrate. While the substrates W carried in from the carry-in unit En2 are received by the second substrate support table 10B, the printing execution unit 20 alternately prints the substrates W and is carried out from the common substrate carry-out unit Ex to the component mounting apparatus M. The

  That is, the first substrate support table 10A can move between the first receiving position and the sending position within the movable range of movement, and the second substrate support table 10B can be moved between the second receiving position and the sending position within the movable range of movement. Is movable. The sending position also serves as a print execution unit, and is located in a common area where the movable areas of the first substrate support table 10A and the second substrate support table 10B overlap each other. When the first substrate support table 10A is located at the delivery position within the common area, the second substrate support table 10B is located within the movable area at the first receiving position avoiding the first substrate support table 10A. Are positioned at the delivery position within the common area, the first substrate support table 10A is positioned at the second receiving position avoiding the second substrate support table 10B within the movable area.

  According to the printing apparatus 1B of the third embodiment as described above, a printing process mainly including board loading, board clamping, printing, board clamping release, board unloading using the first board support table 10A, Using the substrate support table 10B, the printing process consisting mainly of substrate carry-in, substrate clamp, printing, substrate clamp release, and substrate carry-out can be performed in parallel at the same time while shifting the execution timing. The substrate W can be printed efficiently. Therefore, it is useful when printing a common pattern on the substrate W fed out from each of the loaders L1 and L2, and printing is efficiently performed with a simple configuration including one print execution unit 20. be able to.

  Next, a screen printing apparatus according to a fourth embodiment of the present invention will be described with reference to FIG.

  FIG. 14A schematically shows a screen printing apparatus 1C (hereinafter abbreviated as printing apparatus 1A) according to the fourth embodiment in a plan view. The printing apparatus 1C according to the fourth embodiment is interposed between one upstream apparatus and two downstream apparatuses, and is different from the printing apparatus 1 of the first embodiment in the following points. The configuration is different, and other structures are basically the same as those of the printing apparatus 1 of the first embodiment.

  The printing apparatus 1C includes one substrate carry-in portion En and two substrate carry-out portions Ex1 and Ex2 (first substrate carry-out portion Ex1 and second substrate carry-out portion Ex2). In the illustrated example, the printing apparatus 1C is interposed between one loader L and two component mounting apparatuses M1 and M2 (first component mounting apparatus M1 and second component mounting apparatus M2). The board W fed out from the loader L is carried into the apparatus from the board carry-in part En, and the printed board W is transferred from the first board carry-out part Ex1 to the first component mounting apparatus M1 or from the second board carry-out part Ex2 to the second. It is carried out to the component mounting apparatus M2. Each substrate carry-out part Ex1, Ex2 is provided at a position spaced apart by a predetermined interval in the Y-axis direction, and the substrate carry-in part En is provided at a position between each substrate carry-out part Ex1, Ex2 in the Y-axis direction. In the figure, reference numerals CL, CM1, and CM2 denote a pair of belt conveyors installed in the loader L and the component mounting apparatuses M1 and M2, respectively.

  The printing apparatus 1C also includes a common print execution unit 20 that performs printing on the substrates W on the substrate support tables 10A and 10B, and a common substrate recognition camera 50 that captures an image of the substrate W. . Here, in the printing apparatus 1 </ b> C of the fourth embodiment, the first substrate support table 10 </ b> A includes the receiving position where the substrate W carried in from the substrate carry-in unit En can be received and the printed substrate W as the first substrate carry-out unit. On the other hand, the second substrate support table 10B can carry out the receiving position and the printed substrate W from the second substrate carry-out portion Ex. The print execution unit 20 and the substrate recognition camera 50 are configured to move between positions (referred to as second delivery positions) of the substrate support tables 10A and 10B in the state of being arranged at the reception position. It is provided in the upper position.

  That is, the first substrate support table 10A can move between the receiving position and the first sending position within the movable range of movement, and the second substrate support table 10B can be moved between the receiving position and the second sending position within the movable range of movement. Is movable. The receiving position also serves as a print execution unit, and is located in a common area where the movable areas of the first substrate support table 10A and the second substrate support table 10B overlap each other. When the first substrate support table 10A is located at the receiving position within the common area, the second substrate support table 10B is located at the first delivery position avoiding the first substrate support table 10A within the movable area. Are located at the receiving position within the common area, the first substrate support table 10A is located at the second delivery position avoiding the second substrate support table 10B within the movable area.

  In the printing apparatus 1C, as shown in FIG. 14A, the first substrate support table 10A is disposed at the receiving position, and the clamp unit 14 that clamps the substrate W is disposed at the printing execution position, thereby the substrate W. Is printed by the print execution unit 20, and during this printing, the subsequent substrate W fed out from the loader L is received from the substrate carry-in unit En onto the first substrate support table 10A and placed in the substrate standby position. It is made to wait.

  When the printing of the substrate W on the first substrate support table 10A is completed, the first substrate support table 10A moves from the receiving position to the first delivery position, as shown in FIG. 14B. And as shown in FIG.14 (c), while the clamp of the board | substrate W is cancelled | released and the board | substrate W after printing is carried out to the 1st component mounting apparatus M1 from the 1st board | substrate carrying-out part Ex1 by the drive of the conveyor pair 12. The clamp unit 14 moves to the substrate standby position and clamps the subsequent substrate W. Thereafter, the first substrate support table 10A is moved from the first sending position to the receiving position, and the clamp unit 14 is moved from the substrate standby position to the print execution position during that time, whereby the substrate W is prepared for printing.

  In the second substrate support table 10B, in parallel with the printing of the substrate W at the reception position of the first substrate support table 10A and the reception of the subsequent substrate W, the substrate W after printing at the second delivery position is received. Unloading from the second substrate unloading section Ex2 to the second component mounting apparatus M2 and clamping of the subsequent substrate W after the clamp unit 14 has moved to the substrate standby position are performed from the receiving position of the first substrate support table 10A. In parallel with the movement to the first delivery position, the clamp unit 14 is moved from the substrate standby position to the printing execution position and the second substrate support table 10B is moved to the reception position. Subsequent transfer of the printed substrate W from the first substrate unloading section Ex1 to the first component mounting apparatus M1 at the first delivery position of the first substrate support table 10A, and subsequent movement of the clamp unit 14 to the substrate standby position. In parallel with the clamping of the substrate W, the second substrate support table 10B performs printing of the substrate W at the receiving position and receiving of the subsequent substrate W.

  As described above, the printing of the substrate W on the first substrate support table 10A, the reception of the subsequent substrate W, the unloading operation of the substrate W from the first substrate unloading section Ex1, and the substrate W supported by the second substrate support table 10B. Printing, acceptance of the subsequent substrate W, and unloading operation of the substrate W from the second substrate unloading unit Ex2 are performed with a certain time difference, so that the substrate W loaded from the common substrate unloading unit En supports the substrate. While being received in the tables 10A and 10B, printing is alternately performed in the print execution unit 20 and carried out from the board carry-out units Ex1 and Ex2 to the component mounting apparatuses M1 and M2, respectively.

  According to the printing apparatus 1C of the fourth embodiment, mainly using the first substrate support table 10A, the substrate W is carried into the standby position, the substrate is clamped, and the substrate W is moved from the standby position to the printing position. Substrate W mainly using the second substrate support table 10B, and a printing process including movement, printing, substrate clamp release, substrate unloading, and movement of the substrate clamp device from the printing position to the standby position in parallel with substrate unloading From the stand-by position to the stand-by position, board clamp, movement of the substrate W from the stand-by position to the print position, printing, board clamp release, board carry-out, and movement from the print position to the stand-by position in parallel with the board carry-out. The printing process can be performed simultaneously in parallel with the execution timing being shifted, so that the substrate W can be printed efficiently.

  In addition, there is no need for conventional incidental equipment such as a sorting apparatus for the substrate W, and printing is performed while accepting the substrate W from one upstream apparatus, that is, one loader L, by the printing apparatus alone. It can be carried out to the downstream apparatus, that is, the two component mounting apparatuses M1 and M2. Therefore, the production line can be made compact while the printing apparatus 1 </ b> C is interposed between the one upstream apparatus and the two downstream apparatuses. In particular, the printing apparatus 1C of the fourth embodiment is useful when printing a common pattern on the substrate W fed out from one loader L1 and sending it to the component mounting apparatuses M1 and M2. Printing can be efficiently performed by one printing execution unit 20.

  Also, similarly to the printing apparatus 1 of the first embodiment, the printing apparatus 1C is provided with a clamp unit 14 that can be moved between the printing execution position and the board standby position on each of the board support tables 10A and 10B. As described above, after the printing is completed, the clamp unit 14 moves to the substrate standby position while the preceding substrate W (substrate W on which printing has been performed) is being carried out, and clamps the subsequent substrate W that is waiting, and supports the substrate at the receiving position. The substrate W is arranged at the print execution position until the tables 10A and 10B are reset. That is, the printing execution unit 20 can perform printing almost simultaneously with the resetting of the substrate support tables 10A and 10B to the receiving position. Therefore, after unloading the preceding substrate W, it is possible to print the succeeding substrate W as quickly as possible, and there is also an advantage that printing of the substrate W can be performed efficiently.

  Next, a screen printing apparatus according to a fifth embodiment of the present invention will be described with reference to FIG.

  FIG. 15A schematically shows a screen printing apparatus 1D (hereinafter abbreviated as printing apparatus 1D) according to the fifth embodiment in a plan view. The printing apparatus 1D according to the fifth embodiment is a modification of the printing apparatus 1C according to the fourth embodiment (see FIG. 14), and is different in configuration from the printing apparatus 1C according to the fourth embodiment in the following points.

  First, the substrate support tables 10A and 10B do not have a space (substrate standby position) for waiting the subsequent substrate W, and the substrate W that is received by the substrate support tables 10A and 10B from the substrate carry-in portion En is: As it is, it is conveyed to a receiving position, that is, a position below the print execution unit 20 (print execution position), and is clamped by the clamp unit 14 at this position. The clamp unit 14 can move in the X-axis direction, but its movable range is limited to a range in which the relative position between the mask 21 and the substrate W can be corrected when the mask is overlaid.

  Although not shown, the mask recognition camera 16 and the substrate recognition camera 50 are connected to a moving mechanism using a motor or the like as a drive source, and a position (imaging position) interposed between the mask 21 and the substrate W, and the mask It is possible to move between the position 21 and the substrate W and the position retracted outward (retracted position). That is, in this printing apparatus 1A, after the substrate W is clamped and before the mask 21 is overlaid, the mask recognition camera 16 and the substrate recognition camera 50 are interposed between the mask 21 and the substrate W to capture images of the signs. Thus, the relative position between the mask 21 and the substrate W is recognized, and the correction values (ΔX, ΔY, ΔR) when the mask is overlaid are obtained based on the recognition result.

  In the printing apparatus 1D, the mask 21 is fixed to the base 2, while the clamp units 14 are in the X-axis direction and Z-axis with respect to the moving bases of the first substrate support table 10A and the second substrate support table 10B. The substrate W is provided so as to be movable in the axial direction and the R direction around the Z axis, and the substrate W is received by the first substrate support table 10A and the second substrate support table 10B from the substrate carry-in portion En, and the substrate W is clamped. After being clamped by the unit 14, the clamp unit 14 moves in the X axis direction, the R axis direction, and the moving base of the first substrate support table 10A based on the correction values (ΔX, ΔY, ΔR) while rising in the Z axis direction. After moving in the Y-axis direction by the correction value, the substrate W is further raised in the Z-axis direction, and the substrate W is placed on the mask 21 from below to perform printing (FIG. 15A). 15 (b)). After the printing is completed, the first substrate support table 10A is moved to the first delivery position, and the second substrate support table 10B is moved to the second carry-out position, whereby the printed substrate W is moved from the first substrate carry-out part Ex1 to the first. It is carried out by the component mounting apparatus M1 from the 2nd board | substrate carrying-out part Ex2 to the 1st component mounting apparatus M1 (FIG.15 (b), FIG.15 (a)).

  Then, the first substrate support table 10A receives the substrate W, prints the substrate W, and carries out the substrate W. The second substrate support table 10B receives the substrate W and prints the substrate W (FIG. 15B). )) And the unloading operation of the substrate W (FIG. 15a) are performed with a certain time difference, so that the substrate W loaded from the common substrate loading portion En is received by the substrate support tables 10A and 10B, and the printing execution unit 20 Are alternately carried out and are carried out from the board carry-out portions Ex1 and Ex2 to the component mounting apparatuses M1 and M2, respectively.

  In the printing apparatus 1D of the fifth embodiment as well, a printing process mainly including loading of the substrate W, substrate clamping, printing, substrate clamping release, and substrate unloading using the first substrate support table 10A, Using the two-substrate support table 10B, a printing process mainly including loading of the substrate W, substrate clamping, printing, substrate clamping release, and substrate unloading can be performed simultaneously in parallel while shifting the execution timing. Therefore, the printing of the substrate W can be performed efficiently.

  In addition, printing can be performed while accepting the substrate W from one loader L by the printing apparatus 1D alone, and can be carried out to the two component mounting apparatuses M1 and M2. Therefore, it becomes useful when the production line is compactly configured as in the printing apparatus 1C of the fourth embodiment. In particular, in the printing apparatus 1D of the fifth embodiment, the substrate support tables 10A and 10B do not have a space (substrate standby position) for holding the substrate W on the substrate support tables 10A and 10B. Compact in the X-axis direction. Therefore, there is an advantage that the production line can be made compact in the substrate transport direction (X-axis direction).

  Next, a sixth embodiment of the screen printing apparatus according to the present invention will be described with reference to FIG.

  FIG. 16A schematically shows a screen printing apparatus 1E (hereinafter abbreviated as printing apparatus 1E) according to the sixth embodiment in a plan view. The printing apparatus 1E according to the sixth embodiment is a modification of the printing apparatus 1D (see FIG. 15) according to the fifth embodiment described above, and differs from the printing apparatus 1D according to the fifth embodiment in the following points.

  First, the printing apparatus 1E is provided with two print execution units 20A and 20B. The first and second print execution units 20A and 20B carry out the first and second substrates W on the substrate support tables 10A and 10B. Arranged above the second delivery position.

  The substrate recognition camera 50 is fixedly disposed above the receiving position for receiving the substrate W on the substrate support tables 10A and 10B. The substrate recognition camera 50 is mounted on the substrate support tables 10A and 10B clamped by the clamp unit 14. The substrate W is imaged at the receiving position. Further, the mask recognition camera 16 is fixedly provided on the clamp unit 14, and the substrate support tables 10A and 10B are moved from the receiving position to the first or second sending position to perform printing on the substrate W. The mask 21 is imaged.

  In this printing apparatus 1E, for example, the substrate W is received on the first substrate support table 10A from the substrate carry-in portion En in a state where the first substrate support table 10A is arranged at the receiving position, and the substrate W is clamped by the clamp unit 14. And the substrate is recognized (FIG. 16A). Thereafter, the motor is driven by each motor, and the mask recognition is performed while the first substrate support table 10A is moved to the first receiving position. Based on the recognition results, the clamp unit 14 is moved in the X axis direction, the R axis direction, and the first axis. After the movement base of the substrate support table 10A moves in the Y-axis direction by the correction value, the movement base rises in the Z-axis direction, the substrate W is overlapped on the mask 21, and printing is performed. After this printing, it is carried out from the first board carrying-out part Ex to the first component mounting apparatus M1 (FIG. 16B).

  Then, the first substrate support table 10A receives the substrate W, the substrate W is printed and the substrate W is unloaded, and the second substrate support table 10B receives the substrate W (FIG. 16B). Printing (FIG. 16 (a)) and the unloading operation of the substrate W are performed with a certain time difference, so that the substrate W loaded from the common substrate loading portion En is printed while being received by the substrate support tables 10A and 10B. Printing is alternately performed in the execution units 20A and 20B, and is carried out from the board carry-out units Ex1 and Ex2 to the component mounting apparatuses M1 and M2, respectively.

  According to the printing apparatus 1E of the sixth embodiment, using the first substrate support table 10A, a printing process mainly including loading of the substrate W, substrate clamping, printing, substrate clamping release, and substrate unloading, Using the second substrate support table 10B, a printing process mainly including loading of the substrate W, substrate clamping, printing, substrate clamping release, and substrate unloading is performed simultaneously in parallel while shifting the execution timing. Therefore, the printing of the substrate W can be performed efficiently.

  Further, it is useful when sending out to the component mounting apparatuses M1 and M2 while printing different patterns on the substrates W respectively fed out from one loader L1.

  Next, a seventh embodiment of the screen printing apparatus according to the present invention will be described with reference to FIG.

  The printing apparatus 1F is interposed between the two upstream apparatuses and the two downstream apparatuses, and differs in configuration from the printing apparatus 1B of the second embodiment in the following points. Other structures are basically the same as those of the printing apparatus 1B of the second embodiment.

  This printing apparatus 1F includes two substrate carry-in portions En1 and En2 (first substrate carry-in portion En1 and second substrate carry-in portion En2) provided at a predetermined interval in the Y-axis direction, and also in the Y-axis direction. It has two substrate unloading portions Ex1 and Ex2 (first substrate unloading portion Ex1 and second substrate unloading portion Ex2) provided at positions spaced apart from each other by a first substrate unloading portion Ex1 and a second substrate unloading portion. The distance from Ex2 is narrower.

  The first substrate support table 10A has a second delivery position where the printed substrate W can be carried out from the second substrate carry-out portion Ex2, and a first reception position where the substrate W carried in from the first substrate carry-in portion En1 can be received. It is supported on the rail 3 so as to be movable between the first retracted position Tes1 on the front side in the Y direction. The second substrate support table 10B has a first delivery position where the printed substrate W can be carried out from the first substrate carry-out portion Ex1, and a second reception position where the substrate W carried in from the second substrate carry-in portion En2 can be received. It is supported so as to be movable on a common rail 3 between the second retraction position Tes2 on the rear side in the Y direction. Thereby, a part of each movable area of the first substrate support table 10A and the second substrate support table 10B is a common area between the first delivery position and the second delivery position.

  In this printing apparatus 1F, the substrate W received by the first substrate support table 10A at the first receiving position from the first substrate carry-in unit En1 is clamped by the clamp unit 14, mask recognition and substrate recognition are performed, and the print execution unit At the printing position below 20A (same as the first receiving position), the position is corrected with respect to the mask 21, and then the substrate W is overlapped with the mask 21 to perform printing. The substrate W received by the second substrate support table 10A at the second receiving position from the first substrate carry-in unit En2 at approximately the same timing is clamped by the clamp unit 14, mask recognition and substrate recognition are performed, and the print execution unit 20A At the lower printing position (same as the second receiving position), the position is corrected with respect to the mask 21, and then the substrate W is overlapped on the mask 21 to perform printing (FIG. 17A).

  Thereafter, the first substrate support table 10A moves to the second delivery position, and the second substrate support table 10B moves to the second retracted position Tes2 on the rear side from the second receiving position. After the movement, the clamp by the clamp unit 14 is released in the first substrate support table 10A, and the substrate W is unloaded from the second substrate unloading portion Ex2 to the component mounting apparatus M2 (FIG. 17B).

  Thereafter, the first substrate support table 10A moves from the second delivery position to the first withdrawal position Tes1 passing through the first delivery position, and the second substrate support table 10B is moved from the second withdrawal position Tes1 to the first delivery position. Move to. After the movement, the clamp by the clamp unit 14 is released in the second substrate support table 10B, and the printed substrate W is unloaded from the first substrate unloading section Ex1 to the component mounting apparatus M1 (FIG. 17C).

  That is, when the first substrate support table 10A is located at the second delivery position in the common area, the second substrate support table 10B is moved to the second retreat position Tes2 avoiding the first substrate support table A in the movable area. When the substrate support table 10B is positioned at the first delivery position within the common area, the first substrate support table 10A is positioned at the first retraction position Tes1 that avoids the second substrate support table B within the movable area.

  According to the printing apparatus 1F of the seventh embodiment as described above, a printing process mainly including board loading, board clamping, printing, board clamping release, board unloading using the first board support table 10A, and the second Since the substrate supporting table 10B is used, the printing process mainly including substrate loading, substrate clamping, printing, substrate clamping release, and substrate unloading can be performed simultaneously in parallel while shifting the timing of substrate unloading. The substrate W can be printed efficiently.

  In addition, it is possible to efficiently perform printing of common or different patterns on the substrates W fed out from the loaders L1 and L2 with a simple configuration including the two print execution units 20, respectively. The first substrate support table 10A is moved between the first receiving position and the first delivery position, and the second substrate support table 10B is moved between the second reception position and the second delivery position. The carry-out destination can be easily switched to the component mounting apparatuses M2 and M1, respectively.

  By the way, the above-described screen printing apparatuses 1, 1 </ b> A to 1 </ b> F are exemplifications of preferred embodiments of the screen printing apparatus according to the present invention, and the specific configuration thereof can be appropriately changed without departing from the gist of the present invention. is there. For example, the specific support structure of the substrate W in the substrate support tables 10A and 10B, the specific holding structure of the mask 21 in the print execution units 20A and 20B, the specific structure of the squeegee unit 40, etc. are not necessarily limited to the above-described embodiment. It is not limited to the screen printing device 1, 1A-1F, but can be changed as appropriate.

  Furthermore, in each of the first, second, sixth, and seventh embodiments, the print execution units 20A and 20B are made to coincide with the first receiving position and the second receiving position. It may be located near the sending position or on the far side from the sending position at a position that does not interfere with the sending position. Further, in each of the third, fourth, and fifth embodiments, the common print execution unit 20 may be positioned closer to the first receiving position or the first receiving position instead of the sending position in the third embodiment. In addition, in each of the fourth and fifth embodiments, it may be positioned near the first sending position or the first sending position instead of the receiving position.

  Furthermore, in all the embodiments, the first substrate support table 10A and the second substrate support table 10B are supported so as to be movable on the common rail 3, but may be supported so as to be movable on different rails. good.

1, 1A-1F Screen printing device 10 (10A, 10B) Substrate support table (first substrate support table, second substrate support table)
14 Clamp unit 20 (20A, 20B) Print execution unit (first print execution unit, second print execution unit)
21 Screen mask 40 Squeegee unit 42 Squeegee En (En1, En2) Substrate carry-in part (first board carry-in part, second board carry-in part)
Ex (Ex1, Ex2) Substrate unloading section (first substrate unloading section, second substrate unloading section)
W substrate

Claims (8)

In screen printing equipment,
A print execution unit for performing screen printing on the substrate;
A substrate carry-in portion provided at a position on one side in a specific direction across the position of the print execution portion and a substrate carry-out portion provided at a position on the other side;
A substrate support table that receives a substrate carried in from the substrate carry-in unit and supports the print execution unit so that printing is possible, and a substrate support table that unloads the printed substrate from the substrate carry-out unit;
The substrate support table is arranged in parallel so as to be movable in the Y-axis direction orthogonal to the X-axis direction when the specific direction is the X-axis direction, and a common area in which a part of the movable areas overlaps each other. Comprising a first substrate support table and a second substrate support table having
Configuration in which the first substrate inlet and Li Kui the substrate outlet such from the second substrate inlet before Symbol substrate inlet is arranged in the Y-axis direction is positioned in the common area, or the substrate outlet is arranged in the Y-axis direction Li Kui said substrate inlet such from the first substrate outlet and the second substrate discharge portion comprises at least one component of the structure is located in the common area,
Substrate support table of one side of the front Symbol first substrate support table and the second substrate support table causes the unloading or receiving a substrate to be transported from the substrate inlet, or the substrate after printing from the substrate carry-out section in the substrate inlet of the substrate support table of the one side is the common region, or the common region of one of the Ru is disposed at a position corresponding to the substrate outlet, the substrate support table on the other side in the movable region It is arranged at a position avoiding the substrate support table on the one side,
The screen printing apparatus, wherein the printing execution unit is arranged at a position where screen printing can be performed on a substrate supported by each of the substrate support tables. The screen printing apparatus according to claim 1 ,
Before SL substrate inlet comprises a first substrate inlet and the second substrate inlet arranged in the Y-axis direction,
The substrate carry-out portion is provided in the common area between the first and second substrate carry-in portions in the Y-axis direction,
The first substrate support table, the movable region of that, sending a position out of the substrate is possible from the substrate and the first receiving position capable receives the substrate carry-out section, which is carried from the first substrate loading unit move between the second substrate support table, in its movable region, to move between the dispensing position and the second receiving position capable receives the substrate to be conveyed from the second substrate inlet when either one of the side of the substrate support table of the first substrate support table and the second substrate support table is positioned at the delivery position, the one side substrate supporting the other side of the substrate support table in the movable region A screen printing apparatus, which is arranged at a position avoiding a table. The screen printing apparatus according to claim 2,
The screen printing apparatus, wherein the print execution unit is arranged to perform printing on a substrate on each substrate support table arranged at the delivery position. The screen printing apparatus according to claim 2,
The printing execution unit includes a first printing execution unit that performs printing on a substrate on the first substrate support table disposed at the first receiving position, and the second printing unit disposed at the second receiving position. A screen printing apparatus comprising: a second print execution unit that performs printing on a substrate on a substrate support table. The screen printing apparatus according to claim 1 ,
Before SL substrate outlet comprises a first substrate outlet and the second substrate discharge unit arranged in the Y-axis direction,
The substrate carry-in portion is provided in the common area between the first and second substrate carry-out portions in the Y-axis direction,
The first substrate support table, the movable region of that, the first delivery position in which unloading of the substrate is possible from the receivable receiving position and the first substrate discharge portion of the substrate which is conveyed from the substrate inlet move between the second substrate support table, in its movable region, to move between the second delivery position in which unloading of the substrate is possible from the receiving position and the second substrate discharge portion when either one of the side of the substrate support table of the first substrate support table and the second substrate support table is positioned at the receiving position, the one side substrate supporting the other side of the substrate support table in the movable region A screen printing apparatus, which is arranged at a position avoiding a table. The screen printing apparatus according to claim 5, wherein
The screen printing apparatus, wherein the printing execution unit is arranged to perform printing on a substrate on each substrate support table arranged at the receiving position. The screen printing apparatus according to claim 5, wherein
The print execution unit includes a first print execution unit that performs printing on a substrate on the first substrate support table arranged at the first delivery position, and the second that is arranged at the second delivery position. A screen printing apparatus comprising: a second print execution unit that performs printing on a substrate on a substrate support table. The screen printing apparatus according to claim 1 ,
The substrate carry-in unit is composed of a first substrate carry-in unit and a second substrate carry-in unit arranged in the Y-axis direction,
The substrate carry-out unit includes a first substrate carry-out unit and a second substrate carry-out unit that are provided in the common area between the first and second substrate carry-in units in the Y-axis direction and are arranged in the Y-axis direction.
The first substrate support table is capable of receiving a substrate carried in from the first substrate carry-in unit and carrying out the substrate from the first substrate carry-out unit within the movable range. Moving between a first delivery position and a second delivery position at which the substrate can be unloaded from the two substrate unloading section;
The second substrate support table moves within a movable range between a second receiving position capable of receiving a substrate carried in from the second substrate carrying-in portion, the second sending position, and the first sending position. And
When the substrate support table on one side of the first substrate support table or the second substrate support table is located at either the first delivery position or the second delivery position, the other substrate support table is screen printing apparatus according to claim der Rukoto one arranged at a position avoiding the substrate support table of the one side in the movable region.

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