JP5524681B2 - Wiring board built-in capacitor and wiring board - Google Patents

Description

  The present invention relates to a wiring board built-in capacitor built in a wiring board, and a wiring board containing the capacitor.

  In recent years, semiconductor integrated circuit elements (IC chips) used as computer microprocessors and the like have become increasingly faster and more functional, with an accompanying increase in the number of terminals and a tendency to narrow the pitch between terminals. . In general, a large number of terminals are densely arranged on the bottom surface of an IC chip, and such a terminal group is connected to a terminal group on the motherboard side in the form of a flip chip. However, it is difficult to connect the IC chip directly on the mother board because there is a large difference in the pitch between the terminals on the IC chip side terminal group and the mother board side terminal group. For this reason, a method is generally employed in which a package is prepared by mounting an IC chip on an IC chip mounting wiring board, and the package is mounted on a motherboard. In a wiring board for mounting an IC chip constituting this type of package, it has been proposed to provide a capacitor (also referred to as a “capacitor”) in order to reduce switching noise of the IC chip and stabilize the power supply voltage. . For example, a wiring substrate in which a capacitor is embedded in a resin core substrate (see, for example, Patent Document 1) and a wiring substrate in which a capacitor is embedded in a buildup layer formed on the front surface or the back surface of the resin core substrate have been proposed. .

  In the wiring board described in Patent Document 1, a via array type capacitor is housed in an opening formed in a core board, and a build in which a resin interlayer insulating layer and a conductor layer are laminated on the front side and the back side of the core board. An up layer is formed. In addition, in the capacitor built in the wiring board described in Patent Document 1, adhesion to a resin material provided around the capacitor is enhanced by forming a recess on the side surface. This capacitor is obtained by dividing (breaking) a multi-piece ceramic sintered body having perforated break grooves formed along the break grooves. At that time, the break groove portion becomes a recess on the side surface of the capacitor. FIG. 28 shows a capacitor 400 of Patent Document 1. As shown in FIG. 28, in the capacitor 400, the recesses 402 formed on the capacitor side surface 401 have substantially the same width in the thickness direction of the capacitor 400, and the shape viewed from the side surface is rectangular.

JP 2007-194617 A

  When the capacitor 400 of FIG. 28 is built in the wiring board, the resin material is filled from the main surface 403 side of the capacitor 400 to the tip 402a side of the recess 402. In this case, since the width of the concave portion 402 is equal, the resin material is hardly filled on the tip end 402a side, and in particular, the apex portion on the tip end 402a side is in an angular shape, so that the resin material is hardly filled. Further, even when resin is filled in the rectangular apex portion of the recess 402, the stress concentrates on the apex portion, which causes a problem that cracks are likely to occur from the apex portion to the resin material side.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a wiring board built-in capacitor that can improve the adhesion between the wiring board and a resin material. Another object is to provide a highly reliable wiring board incorporating the capacitor.

And as means (means 1) for solving the above-mentioned problem, there are a first main surface, a second main surface located on the opposite side of the first main surface, and the first main surface and the second main surface. A wiring board built-in capacitor comprising a capacitor body having a multi-layered structure in which an internal electrode and a ceramic dielectric layer are laminated and having a plate-like shape having side surfaces positioned therebetween, wherein the side surface of the capacitor body A plurality of ceramics that expose the ceramic dielectric layer and that extend in the thickness direction of the capacitor body with a base end portion at least one of the first main surface and the second main surface. The plurality of recesses have a length along the thickness direction smaller than the thickness of the capacitor main body, and the width of the base end portion when viewed from the side surface is the length of the tip end portion. larger than the width In addition, the plurality of recesses have a constricted portion that is once narrowed and then widened again in the thickness direction between the base end portion and the tip end portion, and the capacitor main body includes: There is a wiring board built-in capacitor characterized in that it has a dummy internal electrode disposed outside the internal electrode between the ceramic dielectric layers and electrically independent of the internal electrode .

  Therefore, according to the invention described in means 1, since a plurality of recesses are formed on the side surface of the capacitor body, when the wiring board built-in capacitor is built in the wiring board, the contact area with the resin material increases. In addition, since the plurality of recesses have a shape (tapered shape) in which the distal end side is narrower than the main surface side serving as the base end portion, the resin material is surely filled in the recesses, and the adhesiveness to the resin material Can be secured sufficiently. Therefore, if the wiring board built-in capacitor of the present invention is used, the reliability of the wiring board can be improved.

  In the plurality of recesses, it is preferable that the depth of the base end portion with respect to the side surface is larger than the depth of the tip end portion. If it does in this way, in a crevice, resin material can be certainly filled from the base end side to the tip part side, and adhesiveness with a resin material can fully be secured.

  It is preferable that the front-end | tip part of a some recessed part has a rounded shape seeing from the side surface side. In this case, it is possible to avoid the problem that the stress applied to the tip of the concave portion is dispersed and cracks are generated on the resin material side.

In the unit 1, the capacitor body is placed outside the internal electrodes in the ceramic dielectric layers, since they have internal electrodes electrically independent dummy internal electrodes, the thickness of the end portion of the capacitor body The thickness can be increased, and a step formed near the end can be reduced. In addition, since the plurality of recesses have a constricted portion between the base end portion and the tip end portion that is once narrowed and then widened again in the thickness direction, it fits with the resin material. Increases nature. For this reason, the capacitor can be securely fixed through the resin material in the wiring board.

  On the side surface of the capacitor body, there are an electrode exposed region where the end portion of the dummy internal electrode is exposed and an electrode non-exposed region where the end portion of the dummy internal electrode is not exposed, and the constricted portion is an electrode non-exposed region. It is preferable that it is located in. Further, the length along the thickness direction of the capacitor body in the recess is 55% or more and 90% or less of the thickness of the capacitor body, and the electrode non-exposed region is both from the first main surface and the second main surface. It is preferable that the distances are approximately equal. In this case, since the constricted portion is formed at a substantially central portion in the thickness direction of the capacitor body, the capacitor can be more reliably fixed in the wiring board.

  The wiring board built-in capacitor is a via array type capacitor having a plurality of via conductors in the capacitor electrically connected to the internal electrode, and the plurality of via conductors in the capacitor are arranged in an array as a whole. Is preferred. With such a structure, the inductance of the capacitor can be reduced, and high-speed power supply for absorbing noise and smoothing power fluctuations can be performed.

  The ceramic dielectric layer is made of a dielectric ceramic such as barium titanate, lead titanate, strontium titanate, or the like. In addition, it can also be composed of low-temperature fired ceramics such as borosilicate glass or lead borosilicate glass added with an inorganic ceramic filler such as alumina. Depending on the required characteristics, alumina, aluminum nitride, boron nitride It can also be composed of a high-temperature fired ceramic such as silicon, silicon carbide, or silicon nitride.

  Although it does not specifically limit as an internal electrode, a dummy internal electrode, and a via conductor in a capacitor, It is preferable that it is a metallized conductor. The metallized conductor is formed by applying a conductive paste containing metal powder by a conventionally well-known method, for example, a metallized printing method, followed by baking. When the metallized conductor and the ceramic dielectric layer are formed by the co-firing method, the metal powder in the metallized conductor needs to have a melting point higher than the firing temperature of the ceramic dielectric layer. For example, when the ceramic dielectric layer is made of a so-called high-temperature fired ceramic (for example, alumina or the like), nickel (Ni), tungsten (W), molybdenum (Mo), manganese (Mn), or the like is used as the metal powder in the metallized conductor. And their alloys can be selected. When the ceramic dielectric layer is made of a so-called low-temperature fired ceramic (for example, glass ceramic), copper (Cu) or silver (Ag) or an alloy thereof can be selected as the metal powder in the metallized conductor.

  Further, as another means (means 2) for solving the above problem, the wiring board built-in capacitor has a resin core substrate having a core main surface and a core back surface, or a resin interlayer insulating layer and a conductor layer. There is a wiring board characterized in that it is accommodated in a wiring laminated portion having a laminated structure.

  Therefore, according to the wiring board of means 2, a plurality of recesses are formed on the side surface of the capacitor body, so that the contact area between the wiring board built-in capacitor and the resin interlayer insulating layer is increased, and the adhesion between them is improved. In addition, since the plurality of recesses have a shape in which the distal end side is narrower than the main surface side serving as the base end portion, the resin material is reliably filled in the recesses, and sufficient adhesion with the resin material is ensured. Can be secured. Therefore, if the wiring board built-in capacitor of the present invention is used, the reliability of the wiring board can be improved.

  The resin interlayer insulating layer can be appropriately selected in consideration of insulation, heat resistance, moisture resistance, and the like. Preferred examples of the polymer material for forming the resin interlayer insulation layer include thermosetting resins such as epoxy resin, phenol resin, urethane resin, silicone resin, polyimide resin, polycarbonate resin, acrylic resin, polyacetal resin, polypropylene resin. And other thermoplastic resins. In addition, composite materials of these resins and organic fibers such as glass fibers (glass woven fabrics and glass nonwoven fabrics) and polyamide fibers, or three-dimensional network fluorine-based resin base materials such as continuous porous PTFE, epoxy resins, etc. A resin-resin composite material impregnated with a thermosetting resin may be used.

  The conductor layer is mainly made of copper and is formed by a known method such as a subtractive method, a semi-additive method, or a full additive method. Specifically, for example, techniques such as etching of copper foil, electroless copper plating, or electrolytic copper plating are applied. Note that a conductor layer can be formed by etching after forming a thin film by a technique such as sputtering or CVD, or a conductor layer can be formed by printing a conductive paste or the like.

Sectional drawing which shows schematic structure of the wiring board in 1st Embodiment. The top view which shows schematic structure of the capacitor | condenser for wiring board built-in in 1st Embodiment. The top view which shows schematic structure of the capacitor | condenser for wiring board built-in in 1st Embodiment. The side view which shows schematic structure of the capacitor | condenser for wiring board incorporation in 1st Embodiment. The side view which shows schematic structure of the capacitor | condenser for wiring board incorporation in 1st Embodiment. Sectional drawing in the AA of the capacitor | condenser for wiring board incorporation in FIG. Sectional drawing in the BB line of the capacitor | condenser for wiring board incorporation in FIG. The expanded sectional view which shows the recessed part of the side surface in a capacitor | condenser main body. The typical top view of the ceramic green sheet in which the internal electrode pattern was formed. The typical top view of the ceramic green sheet in which the internal electrode pattern was formed. The typical longitudinal section of a non-fired ceramic layered product. The typical longitudinal section of a non-fired ceramic layered product. The typical top view of a non-fired ceramic laminated body. The typical top view of a non-fired ceramic laminated body. The typical longitudinal section of a non-fired ceramic layered product. The typical top view of a non-fired ceramic laminated body. The typical longitudinal section of a non-fired ceramic layered product. The typical top view of a non-fired ceramic laminated body. The typical longitudinal section of a ceramic sintered compact. The typical top view which shows the some capacitor | condenser main body after a division | segmentation. The expanded sectional view which shows the recessed part after a division | segmentation process. The typical side view of the ceramic capacitor of 2nd Embodiment. The typical side view of the ceramic capacitor of 2nd Embodiment. The typical longitudinal section of the ceramic capacitor of a 2nd embodiment. The enlarged plan view which shows the recessed part of the side surface in a capacitor | condenser main body. The typical top view which shows the ceramic capacitor of another embodiment. The typical longitudinal section showing the wiring board of another embodiment. The longitudinal cross-sectional view which shows the conventional capacitor | condenser.

[First Embodiment]
Hereinafter, a first embodiment in which the present invention is embodied in a wiring board will be described in detail with reference to the drawings.

  As shown in FIG. 1, the wiring board 10 of the present embodiment is a wiring board for mounting an IC chip. The wiring substrate 10 includes a resin core substrate 11 made of glass epoxy, a first buildup layer 31 (wiring laminated portion) formed on the core main surface 12 (upper surface in FIG. 1) of the resin core substrate 11, a resin core It consists of a second buildup layer 32 (wiring laminate) formed on the core back surface 13 (lower surface in FIG. 1) of the substrate 11.

  Through holes 15 penetrating in the thickness direction are formed at a plurality of locations in the resin core substrate 11, and through hole conductors 16 are formed in the through hole 15. The through-hole conductor 16 connects the core main surface 12 side and the core back surface 13 side of the resin core substrate 11. Further, a conductor layer 41 made of copper is patterned on the core main surface 12 and the core back surface 13 of the resin core substrate 11, and each conductor layer 41 is electrically connected to the through-hole conductor 16.

  The first buildup layer 31 formed on the core main surface 12 of the resin core substrate 11 includes two resin interlayer insulating layers 33 and 35 made of thermosetting resin (epoxy resin), and a conductor layer 42 made of copper. Are alternately stacked. Terminal pads 44 are formed in an array at a plurality of locations on the surface of the second resin interlayer insulation layer 35. Further, the surface of the resin interlayer insulating layer 35 is almost entirely covered with a solder resist 37. An opening 46 for exposing the terminal pad 44 is formed at a predetermined position of the solder resist 37. A plurality of solder bumps 45 are provided on the surface of the terminal pad 44. Each solder bump 45 is electrically connected to the surface connection terminal 22 of the IC chip 21 having a rectangular flat plate shape. The region where each terminal pad 44 and each solder bump 45 is formed is an IC chip mounting region 23 on which the IC chip 21 can be mounted. A plurality of via conductors 43 are formed in the first resin interlayer insulation layer 33, and a plurality of via conductors 43 are also formed in the second resin interlayer insulation layer 35. Each via conductor 43 electrically connects the conductor layers 41 and 42 and the terminal pad 44 to each other.

  The second buildup layer 32 formed on the core back surface 13 of the resin core substrate 11 has substantially the same structure as the first buildup layer 31 described above. That is, the second buildup layer 32 has a structure in which two resin interlayer insulating layers 34 and 36 made of thermosetting resin (epoxy resin) and conductor layers 42 are alternately laminated. BGA pads 48 electrically connected to the conductor layer 42 via the via conductors 43 are formed in an array at a plurality of locations on the lower surface of the resin interlayer insulating layer 36. The lower surface of the resin interlayer insulating layer 36 is almost entirely covered with a solder resist 38. An opening 40 for exposing the BGA pad 48 is formed at a predetermined portion of the solder resist 38. A plurality of solder bumps 49 that can be electrically connected to a mother board (not shown) are disposed on the surface of the BGA pad 48. The wiring board 10 shown in FIG. 1 is mounted on a mother board (not shown) by each solder bump 49.

  The resin core substrate 11 has a substantially rectangular plate shape in plan view of 25 mm in length × 25 mm in width × 0.9 mm in thickness, and has a rectangular shape in plan view that opens at the center of the core main surface 12 and the center of the core back surface 13. The receiving hole 90 is provided. That is, the accommodation hole 90 is a through hole. The accommodating hole 90 has chamfered portions with chamfer dimensions of 0.1 mm or more and 2.0 mm or less at the four corners. The ceramic capacitor 101 (wiring board built-in capacitor) is housed in the housing hole 90 in an embedded state. The ceramic capacitor 101 is accommodated with the capacitor main surface 102 facing the same side as the core main surface 12 and the capacitor back surface 103 facing the same side as the core back surface 13.

  The ceramic capacitor 101 according to the present embodiment has a substantially rectangular plate shape in plan view of 12.0 mm long × 12.0 mm wide × 0.9 mm thick. The ceramic capacitor 101 is disposed in a region immediately below the IC chip mounting region 23 in the resin core substrate 11. The area of the IC chip mounting region 23 (the area of the surface on which the surface connection terminals 22 are formed in the IC chip 21) is set to be smaller than the area of the capacitor main surface 102 of the ceramic capacitor 101. When viewed from the thickness direction of the ceramic capacitor 101, the IC chip mounting region 23 is located in the capacitor main surface 102 of the ceramic capacitor 101.

  As shown in FIG. 1, the gap between the inner surface of the accommodation hole 90 and the capacitor side surface 106 of the ceramic capacitor 101 is a resin filler made of a polymer material (in this embodiment, a thermosetting resin such as epoxy). It is filled with 92. The resin filler 92 has a function of fixing the ceramic capacitor 101 to the resin core substrate 11. Further, the resin filler 92 may be added with ceramic powder such as silica in order to relieve the thermal expansion difference from the ceramic capacitor 101. Moreover, in order to improve heat dissipation, metal powders, such as Cu, may be added.

  Hereinafter, the configuration of the ceramic capacitor 101 of the present embodiment will be described in detail. FIG. 2 is a schematic plan view of the ceramic capacitor 101 viewed from the capacitor main surface 102 side, and FIG. 3 is a schematic plan view of the ceramic capacitor 101 viewed from the capacitor back surface 103 side. 4 and 5 are schematic side views of the ceramic capacitor 101. FIG. 6 is a schematic longitudinal sectional view of the ceramic capacitor 101 when cut along line AA in FIG. 2, and FIG. 7 is a schematic view of the ceramic capacitor 101 when cut along line BB in FIG. It is a longitudinal cross-sectional view. FIG. 8 is a schematic enlarged view of the vicinity of the outer periphery of the ceramic capacitor 101.

  The ceramic capacitor 101 shown in FIGS. 2 to 7 is a so-called via array type ceramic capacitor. The ceramic capacitor 101 includes a capacitor body 104 that forms the core of the capacitor 101. The capacitor body 104 has a structure in which a power supply internal electrode layer 141 (internal electrode), a ground internal electrode layer 142 (internal electrode), and a ceramic dielectric layer 105 are laminated to form a multilayer. The ceramic dielectric layer 105 is made of a sintered body of barium titanate, which is a kind of high dielectric constant ceramic, and functions as a dielectric (insulator) between the power supply internal electrode layer 141 and the ground internal electrode layer 142. That is, the power supply internal electrode layer 141 and the ground internal electrode layer 142 are electrically insulated via the ceramic dielectric layer 105. Further, the power supply internal electrode layers 141 and the ground internal electrode layers 142 are alternately arranged via the ceramic dielectric layers 105 in the stacking direction of the ceramic dielectric layers 105. The total number of internal electrode layers 141 and 142 is about 100 layers.

  In the present embodiment, a capacitor forming layer portion 144 having a structure in which a plurality of ceramic dielectric layers 105 and a plurality of internal electrode layers 141 and 142 are alternately stacked is divided into two regions on the capacitor body 104, the upper side and the lower side. It is divided and provided. Between the upper capacitor formation layer portion 144 and the lower capacitor formation layer portion 144, an intermediate layer portion 145 composed of a plurality of ceramic dielectric layers 105 is provided. Further, a cover layer portion 146 made of a plurality of ceramic dielectric layers 105 is provided on the surface layer portion on the capacitor main surface 102 side so as to cover the upper surface of the upper capacitor forming layer portion 144. A cover layer portion 146 made of a plurality of ceramic dielectric layers 105 is also provided on the surface layer portion on the capacitor back surface 103 side so as to cover the lower surface of the lower capacitor forming layer portion 144. The intermediate layer portion 145 and the cover layer portion 146 are not provided with the internal electrode layers 141 and 142 like the capacitor forming layer portion 144.

  The internal electrode layers 141 and 142 are both formed of nickel as a main component, and contain a ceramic material similar to the ceramic material (barium titanate) constituting the ceramic dielectric layer 105. By including such a ceramic material in the internal electrode layers 141 and 142, respectively, adhesion between the ceramic dielectric layer 105 and the internal electrode layers 141 and 142 can be enhanced. The internal electrode layers 141 and 142 need not contain such a ceramic material. The thickness of the internal electrode layers 141 and 142 is, for example, 2 μm or less.

  The external appearance of the capacitor body 104 is as follows. The capacitor main surface 102 (first main surface) positioned in the thickness direction of the capacitor main body 104, the capacitor back surface 103 (second main surface) positioned on the opposite side of the capacitor main surface 102, and the capacitor It is composed of a side surface 106 positioned between the main surface 102 and the capacitor back surface 103. The side surface 106 is mainly the first side surface 106a, the second side surface 106b positioned opposite (opposite) the side surface 106a, the side surface 106a and the third side surface 106c adjacent to the side surface 106b, and the opposite side surface 106c. It is comprised from the 4th side surface 106d located in the side (opposite) and adjacent to the side surface 106a and the side surface 106b. Each of the side surfaces 106a to 106d of the present embodiment is composed only of the ceramic dielectric layer 105, and the ceramic is exposed.

  The side surfaces 106 a to 106 d are respectively formed with a recess 107 extending in the thickness direction of the capacitor main body 104 and a notch 108 extending in the outer peripheral direction of the capacitor main body 104. Specifically, as shown in FIG. 4, in the side surface 106a, the recess 107 is formed on the capacitor main surface 102 side (extending in the thickness direction from the capacitor main surface 102), and the notch 108 is It is formed on the capacitor back surface 103 side. Further, in the side surface 106b, a recess 107 and a notch 108 are formed in the same manner as the side surface 106a. Further, as shown in FIG. 5, on the side surface 106 c, the recess 107 is formed on the capacitor back surface 103 side (extending in the thickness direction from the capacitor back surface 103), and the notch 108 is formed on the capacitor main surface 102. Formed on the side. Further, in the side surface 106d, a recess 107 and a notch 108 are formed in the same manner as the side surface 106c.

  The surfaces of the recess 107 and the notch 108 are also composed only of the ceramic dielectric layer 105, and the ceramic is exposed. The recess 107 is a groove having a substantially semicircular cross section, and the width gradually decreases from the base end portion 107a on the capacitor main surface 102 side and the capacitor back surface 103 side to the tip end portion 107b in the thickness direction. . That is, in the recess 107, the width of the base end portion 107a when viewed from the side surfaces 106a to 106d is larger than the width of the tip end portion 107b. Further, in the concave portion 107, the depth of the base end portion 107a with respect to the side surfaces 106a to 106d is larger than the depth of the distal end portion 107b. Furthermore, the tip 107b of the recess 107 has a rounded shape when viewed from the side surfaces 106a to 106d. Moreover, the notch part 108 is formed from one edge of each of the side surfaces 106a to 106d to the other edge. Further, the notch 108 is gradually thinner from the capacitor main surface 102 side and the capacitor back surface 103 side in the thickness direction. That is, the cross-sectional shape of the cutout portion 108 is a tapered shape like the concave portion 107 (see FIGS. 6 and 7).

  A plurality of the recesses 107 are formed at a predetermined interval along the outer periphery of the capacitor body 104, and the length along the thickness direction is smaller than the thickness of the capacitor body. Specifically, the recesses 107 on the side surfaces 106a and 106b are preferably formed from the capacitor main surface 102 to a position that is 20% or more and 70% or less of the thickness of the capacitor body 104, and the recesses 107 on the side surfaces 106c and 106d. Is preferably formed from the capacitor back surface 103 to a position of 20% to 70% of the thickness of the capacitor body 104. The reason why such a range is desirable is that if it is 20% or more, the adhesion with the resin filler 92 can be sufficiently improved, and if it is 70% or less, in the conveyance of the capacitor 101, etc. This is because cracking or chipping in the recess 107 can be reduced.

  As shown in FIG. 8, in the present embodiment, the boundary portion 110 between the recess-unformed portion 109 and the recess 107 on the side surfaces 106 a to 106 d has a rounded shape. The radius of curvature of the boundary portion 110 between the recess-unformed portion 109 and the recess 107 is preferably 0.005 mm or more and 0.2 mm or less, and is, for example, about 0.05 mm in the present embodiment. In addition, the surface of each side surface 106a-106d in the capacitor body 104 is a rough surface subjected to surface roughening.

  Further, in the cut surface that appears when the capacitor body 104 is cut in parallel to the capacitor main surface 102 and the capacitor back surface 103, the width of the recess 107 is X, and the depth of the recess 107 with respect to the non-recessed portion 109 is set. When defined as Y, the relationship X> Y holds. The width X of the concave portion 107 on the main surface 102 and the back surface 103 is preferably 60 to 150 μm. The reason why this range is preferable is that if it is less than 60 μm, the resin filler 92 does not enter well, and if the adhesiveness is insufficient or a void is formed, it becomes a product with low reliability due to the influence of that portion. If the thickness exceeds 150 μm, the area of the internal electrode layers 141 and 142 becomes small, which causes a reduction in capacity. In the present embodiment, the width X of the recess 107 is about 100 μm, and the depth Y of the recess 107 is about 35 μm. Further, the interval Z between the adjacent concave portions 107 is about 75 μm.

  As shown in FIGS. 2 and 3, chamfered portions 104 a having a chamfer dimension of 0.6 mm or more are formed at four corners of the capacitor body 104. Instead of the chamfered portion 104a or together with the chamfered portion 104a, a rounded portion having a radius of curvature of 0.6 mm or more may be formed at at least one corner of the capacitor body 104. Thus, by forming the chamfered portion 104a and the rounded portion, when the ceramic capacitor 101 is built in the wiring substrate 10 or when the resin filler 92 is deformed due to a temperature change, Since stress concentration can be relaxed, the occurrence of cracks in the resin filler 92 can be prevented.

  A large number of via holes 130 are formed in the capacitor body 104. These via holes 130 penetrate the capacitor body 104 in the thickness direction and are arranged in an array over the entire surface of the capacitor body 104. In each via hole 130, a plurality of in-capacitor via conductors 131 and 132 are formed to communicate between the capacitor main surface 102 and the capacitor back surface 103 of the capacitor body 104. In this embodiment, since the diameter of the via hole 130 is set to about 100 μm, the diameter of the via conductors 131 and 132 in the capacitor is also set to about 100 μm. Each power supply capacitor internal via conductor 131 passes through each power supply internal electrode layer 141 and electrically connects them to each other. Each ground capacitor via conductor 132 passes through each ground internal electrode layer 142 and electrically connects them to each other. Each power source capacitor via conductor 131 and each ground capacitor inner via conductor 132 are arranged in an array as a whole.

  As shown in FIG. 6, a clearance hole 133 is formed in the internal electrode layer 142 in a region through which the via conductor 131 penetrates, and the internal electrode layer 142 and the via conductor 131 are electrically insulated. Similarly, as shown in FIG. 7, a clearance hole 134 is formed in the internal electrode layer 141 in a region through which the via conductor 132 passes, and the internal electrode layer 141 and the via conductor 132 are electrically insulated. Yes. The ceramic dielectric layer 105 is interposed between the internal electrode layers 141 and 142 and the via conductors 131 and 132 in the clearance holes 133 and 134.

  The via conductors 131 and 132 are formed using nickel as a main material, and contain a ceramic material similar to the ceramic material constituting the ceramic dielectric layer 105. By including such a ceramic material in the via conductors 131 and 132, adhesion between the ceramic dielectric layer 105 and the via conductors 131 and 132 can be improved. The via conductors 131 and 132 may not contain such a ceramic material.

  On the capacitor main surface 102, a main surface side power supply external electrode 111 and a main surface side ground external electrode 112 are formed. On the capacitor back surface 103, a back side power external electrode 121 and a back side ground external electrode 122 are formed. The external electrodes 111, 112, 121, and 122 are not necessarily formed on both the capacitor main surface 102 and the capacitor back surface 103 of the capacitor body 104, and are not provided on either the capacitor main surface 102 or the capacitor back surface 103. It may be formed.

  As shown in FIG. 2, a plurality of substantially circular power supply external electrodes 111 are formed in an array on the capacitor main surface 102, and the ground external electrode 112 surrounds each power supply external electrode 111. Is formed. As shown in FIG. 3, on the capacitor back surface 103, a plurality of substantially circular ground external electrodes 122 are formed in an array, and the power external electrode 121 surrounds each ground external electrode 122. Is formed.

  The main-surface-side power external electrode 111 is directly connected to the end surface of the power-capacitor via conductor 131 on the capacitor main surface 102 side, and the main-surface-side ground external electrode 112 The via conductor 132 is directly connected to the end surface on the capacitor main surface 102 side. The back-side power external electrode 121 is directly connected to the end surface of the plurality of power-source capacitor via conductors 131 on the capacitor back surface 103 side, and the back-side ground external electrode 122 is a ground-capacitor via. The conductor 132 is directly connected to the end surface on the capacitor back surface 103 side. Therefore, the power supply external electrodes 111 and 121 are electrically connected to the power supply capacitor internal via conductor 131 and the power supply internal electrode layer 141, and the ground external electrodes 112 and 122 are connected to the ground capacitor internal via conductor 132 and the ground internal electrode. Conductive to layer 142.

  On both the capacitor main surface 102 side and the capacitor back surface 103 side, the power external electrodes 111 and 121 and the ground external electrodes 112 and 122 are separated from each other and are electrically insulated from each other. The distance (clearance) between the power supply external electrodes 111 and 121 and the ground external electrodes 112 and 122 is preferably as small as possible as long as insulation is ensured, and is, for example, about 150 μm.

  On the capacitor main surface 102 side, the total surface area of the external electrodes 111 and 112 is not less than 45% and not more than 90% of the area of the capacitor main surface 102, and on the capacitor back surface 103 side, the total surface area of the external electrodes 121 and 122. The surface area is 45% or more and 90% or less of the area of the capacitor back surface 103. By setting the total surface area of the external electrodes 111, 112, 121, 122 to the area of the capacitor main surface 102 and the capacitor back surface 103 in such a range, the ceramic dielectric layer 105 on the capacitor main surface 102 and the capacitor back surface 103 The exposed area can be reduced. Thus, by reducing the exposed area of the ceramic dielectric layer 105, the adhesion between the capacitor 101 and the resin interlayer insulating layers 33 and 34 can be improved.

  On the capacitor main surface 102, the ground external electrode 112 is formed from the end on the side surface 106a to the end on the side surface 106b side, and from the end on the side surface 106c side to the end on the side surface 106d side. The ground external electrode 112 has a recess 107 formed at the end corresponding to the side surfaces 106a and 106b. On the capacitor back surface 103, the power supply external electrode 121 is formed from the end on the side surface 106a to the end on the side surface 106b and from the end on the side surface 106c side to the end on the side surface 106d side. The power supply external electrode 121 also has a recess 107 at the end corresponding to the side surfaces 106c and 106d.

  The external electrodes 111, 112, 121, and 122 are made of nickel as a main component and contain a ceramic material similar to the ceramic material that constitutes the ceramic dielectric layer 105. By including such a ceramic material in the external electrodes 111, 112, 121, and 122, respectively, the adhesion between the ceramic dielectric layer 105 and the external electrodes 111, 112, 121, and 122 can be enhanced. The external electrodes 111, 112, 121, and 122 may not contain such a ceramic material.

  A first plating film (not shown) is formed on the surfaces of the external electrodes 111, 112, 121, and 122 to improve adhesion with the resin interlayer insulating layers 33 and 34, the via conductors 43, and the like. Yes. The first plating film also has a function of preventing oxidation of the external electrodes 111, 112, 121, and 122. The first plating film is formed by electrolytic plating. Note that the first plating film may be formed by electroless plating. The first plating film is preferably made of a conductive material such as Au or Cu, but more preferably the outermost surface is Cu in order to improve the adhesion with the resin interlayer insulating layers 33 and 34. It is preferable that it is comprised.

  Between the external electrodes 111, 112, 121, 122 and the first plating film, a second for suppressing a decrease in adhesion between the external electrodes 111, 112, 121, 122 and the first plating film. A plating film (not shown) is formed. More specifically, when the external electrode 111, 112, 121, 122 contains a ceramic material as described above, the ceramic material is exposed on the surface of the external electrode 111, 112, 121, 122, and the external electrode 111, 112 is exposed. , 121, 122 and the first plating film may be deteriorated. In order to suppress this, a second plating film is formed. The second plating film is formed by electrolytic plating. The second plating film may be formed by electroless plating as long as it is formed by a plating method.

  The second plating film is preferably made of, for example, the same conductive material as the conductive material that is the main component of the external electrodes 111, 112, 121, and 122. If the external electrodes 111, 112, 121, and 122 to which the ceramic material is added can be directly plated and the adhesion strength is high, the second plating film need not be formed.

  As shown in FIG. 1, the external electrodes 111 and 112 on the capacitor main surface 102 side are connected via the via conductor 43, the conductor layer 42, the terminal pad 44, the solder bump 45, and the surface connection terminal 22 of the IC chip 21. It is electrically connected to the IC chip 21. On the other hand, the external electrodes 121 and 122 on the capacitor back surface 103 side are electrically connected to electrodes of a mother board (not shown) via the via conductor 43, the conductor layer 42, the BGA pad 48 and the solder bump 49. .

  For example, when energization is performed from the mother board side through the external electrodes 121 and 122 and a voltage is applied between the power supply internal electrode layer 141 and the ground internal electrode layer 142, for example, positive charges accumulate in the power supply internal electrode layer 141. For example, negative charges accumulate in the ground internal electrode layer 142. In the ceramic capacitor 101, the via-conductor 131 for power supply capacitor and the via-conductor 132 for ground capacitor are alternately arranged adjacent to each other, and the via-conductor 131 for power-supply capacitor and the via-conductor 132 for ground capacitor are connected to each other. The directions of the flowing currents are set to be opposite to each other. Thereby, the inductance component is reduced.

  The ceramic capacitor 101 of the present embodiment is manufactured, for example, by the following procedure. 9 and 10 are schematic plan views of the ceramic green sheet on which the internal electrode pattern according to the present embodiment is formed, and FIGS. 11, 12, 15, and 17 show the present embodiment. It is a typical longitudinal cross-sectional view of the unbaking ceramic laminated body which concerns. 13, FIG. 14, FIG. 16, and FIG. 18 are schematic plan views of the green ceramic laminate according to the present embodiment. FIG. 19 is a schematic longitudinal sectional view of the ceramic sintered body according to the present embodiment, and FIG. 20 is a schematic plan view showing a plurality of divided capacitor bodies.

  First, a plurality of ceramic green sheets 152 (see FIG. 9) on which internal electrode patterns 151 are formed and ceramic green sheets 154 (see FIG. 10) on which internal electrode patterns 153 are formed are prepared. The internal electrode patterns 151 and 153 are unsintered conductor portions that are to become the internal electrode layers 141 and 142 later. Further, the ceramic green sheets 152 and 154 are unfired ceramic portions that are to become the ceramic dielectric layer 105 later.

  The internal electrode patterns 151 and 153 are respectively formed in the capacitor formation region R1. The capacitor formation region R <b> 1 is a region for forming the capacitor 101, and there are a plurality of the ceramic green sheets 152 and 154. In the drawing, the boundary of the capacitor formation region R1 is indicated by a two-dot chain line. The internal electrode patterns 151 and 153 are made of nickel paste, for example.

  The internal electrode patterns 151 and 153 are formed in the capacitor formation region R1 by, for example, screen printing. Further, the internal electrode pattern 151 has a clearance hole 151 a that becomes a clearance hole 134 after firing, and the internal electrode pattern 153 has a clearance hole 153 a that becomes a clearance hole 133 after firing. Further, nickel paste may be applied outside the capacitor forming region R1.

  Further, two cover layers 155 and an intermediate layer 156 shown in FIG. 11 are prepared. The cover layer 155 and the intermediate layer 156 are produced by laminating a predetermined number of ceramic green sheets on which the internal electrode patterns 151, 153 and the like are not formed.

  The ceramic green sheets 152 and the ceramic green sheets 154 are alternately stacked on the cover layer 155, and the green sheets to be the intermediate layer 156 are sequentially stacked thereon. Further, the ceramic green sheets 152 and the ceramic green sheets 154 are alternately stacked on the intermediate layer 156, and the cover layer 155 is stacked thereon. Thereafter, these are pressurized to form an unfired ceramic laminate 159 (see FIG. 11).

  After forming the unfired ceramic laminate 159, a via hole penetrating from the main surface 159a to the back surface 159b of the unfired ceramic laminate 159 is formed, and a conductive paste is pressed into the via hole to form a via conductor paste 157 ( (See FIG. 12 and FIG. 13). Further, the unfired ceramic laminate 159 on which the via conductor paste 157 is formed is pressed by a high pressure press. The via conductor paste 157 is a conductor portion to be the via conductors 131 and 132 later.

  Thereafter, external electrode patterns 160 and 161 connected to the via conductor paste 157 in the capacitor formation region R1 on the main surface 159a of the unfired ceramic laminate 159 and the back surface 159b opposite to the main surface 159a, for example, by screen printing or the like. (See FIGS. 14 and 15). The external electrode patterns 160 and 161 are conductor portions that should be the external electrodes 111, 112, 121, and 122 later. The external electrode pattern 161 on the main surface 159a side is formed so as to straddle the plurality of capacitor formation regions R1, and the external electrode pattern 160 on the back surface 159b side is formed so as to straddle the plurality of capacitor formation regions R1.

  In the green ceramic laminate 159, after forming the external electrode patterns 160, 161 on the main surface 159a and the back surface 159b, a plurality of external electrode patterns 161 penetrating the external electrode pattern 161 along the boundary of the capacitor formation region R1 by, for example, a laser. A perforated break groove 163 comprising a hole and a continuous line break groove 164 are formed (see FIGS. 16 and 17). Here, each processing hole constituting the perforated break groove 163 is larger in diameter toward the opening and smaller in diameter toward the inside. Further, the break groove 164 is wider toward the opening and narrower toward the inside.

  On the main surface 159a side, the break groove 163 is formed at a boundary along the short direction of the main surface 159a in the capacitor formation region R1, and the break groove 164 is a boundary along the longitudinal direction of the main surface 159a in the capacitor formation region R1. Formed. On the back surface 159b side, the break groove 163 is formed at the boundary along the longitudinal direction of the back surface 159b in the capacitor forming region R1, and the break groove 164 is formed at the boundary along the short side direction of the back surface 159b in the capacitor forming region R1. The

  As shown in FIG. 17, the depth a of the perforated break grooves 163 with respect to the product thickness is preferably 20 to 70% of the thickness of the entire product. Moreover, it is preferable that the depth b of the continuous linear break groove | channel 164 shall be a / b = 0.25-35. In the present embodiment, the depth a of the break groove 163 is about 50% of the thickness of the entire product, and the depth b of the continuous linear break groove 164 is about 20% of the thickness of the entire product. It is.

  Break groove 164 is formed on main surface 159a and back surface 159b so as to be orthogonal to break groove 163. Here, the break groove 163 formed on the back surface 159b side is formed at a position corresponding to the break groove 164 formed on the main surface 159a side and along the break groove 164 formed on the main surface 159a side. Break groove 164 formed on the back surface 159b side is formed at a position corresponding to break groove 163 formed on the main surface 159a side and along the break groove 163 formed on the main surface 159a side.

  After forming the break grooves 163 and 164 in the unfired ceramic laminate 159, the hole 165 and the thickness of the unfired ceramic laminate 159 penetrating through the unfired ceramic laminate 159 in the corners of the capacitor formation region R1, for example, with a laser or the like A groove 166 extending along the direction is formed (see FIG. 18). These holes 165 and grooves 166 are portions that will later become chamfered portions 104a.

  After forming the hole 165 and the groove 166 in the green ceramic laminate 159, the green ceramic laminate 159 is degreased and fired at a predetermined temperature for a predetermined time. As a result, the unfired ceramic laminate 159 is sintered to obtain a ceramic sintered body 168 (capacitor body aggregate) (see FIG. 19). Specifically, the internal electrode patterns 151 and 153, the ceramic green sheets 152 and 154, the via conductor paste 157, and the external electrode patterns 160 and 161 in the unfired ceramic laminate 159 are sintered and the internal electrode layers 141 and 142, Ceramic dielectric layer 105, via conductors 131 and 132, and external electrodes 111, 112, 121, and 122 are formed.

  Thereafter, the oxide films formed on the surfaces of the external electrodes 111, 112, 121, and 122 by polishing are removed by polishing, and then the first and second electrodes are electrolessly or electroplated on the external electrodes 111, 112, 121, and 122. A second plating film is formed.

  And the ceramic sintered body 168 is divided | segmented for every capacitor | condenser formation area R1 along the break grooves 163 and 164, and the some capacitor | condenser main body 104 is obtained (refer FIG. 20). Here, in the thickness direction of the ceramic sintered body 168, the break groove 164 is formed at a position corresponding to the break groove 163, but the ceramic sintered body 168 has a portion near the break groove 163 at the break groove 164. It is desirable to divide so that it may be cut off before the vicinity. This is because the external electrodes 112 and 122 exist between the break grooves 163, so that when the portion near the break groove 164 is cut off before the portion near the break groove 163, the external electrode 112 near the break groove 163. , 122 may not be cut along the break groove 163.

  After the step of dividing the ceramic sintered body 168, a part of the perforated break groove 163 becomes the recess 107, and a part of the continuous line break groove 164 becomes the notch 108. That is, after the division step, the capacitor body 104 is in a state in which the concave portion 107 and the notch portion 108 are formed on the side surfaces 106a to 106d that appear as break fracture surfaces. At this time, the tip of the recess 107 has a rounded shape, but on the side surfaces 106a to 106d, the boundary portion 110 between the recess-unformed portion 109 and the recess 107 has an angular shape (see FIG. 21). . For this reason, in the present embodiment, after the step of dividing the ceramic sintered body 168, wet blasting is performed in which the free abrasive grains are hit against the side surfaces 106a to 106d of the obtained capacitor main body 104 in a wet state. By performing this wet blasting process, the angular portion of the boundary portion 110 is polished, and the boundary portion 110 is rounded (see FIG. 8). In addition, in the side surfaces 106a to 106d, the boundary portion between the not-formed part of the notch part 108 and the notch part 108 also has a rounded shape.

  Further, in the side surfaces 106a to 106d of the capacitor main body 104, since the recess-unformed portion 109 is a break fracture surface, a shell-like crack may remain. In particular, stress may concentrate on the non-recessed portion 109 in the vicinity of the distal end portion 107b of the concave portion 107, and a shell-like crack may remain. Since the strength of the crack is relatively weak, it is removed by the collision of loose abrasive grains during the EtBlast processing. The ceramic capacitor 101 is manufactured through the above manufacturing process.

  Therefore, according to the present embodiment, the following effects can be obtained.

  (1) Since the ceramic capacitor 101 of the present embodiment has a plurality of recesses 107 formed on the side surfaces 106 a to 106 d of the capacitor body 104, the contact area with the resin filler 92 becomes large when incorporated in the wiring board 10. . The plurality of recesses 107 have a shape in which the tip end portion 107b side is narrower than the base end portion 107a on the capacitor main surface 102 side and the capacitor back surface 103 side. Specifically, in the ceramic capacitor 101 of the present embodiment, a concave portion 107 is opened from the capacitor main surface 102 side to two opposing side surfaces 106a and 106b among the four side surfaces 106a to 106d, and the side surfaces 106a and 106b. On the side surfaces 106c and 106d adjacent to the concave portion 107, a concave portion 107 is opened from the capacitor back surface 103 side. In this case, the two side surfaces 106a and 106b have a large opening area of the concave portion 107 at the base end portion 107a on the capacitor main surface 102 side, and the concave portion 107 is recessed toward the distal end portion 107b. The filler 92 enters smoothly. On the other hand, on the side surfaces 106c and 106d, since the concave portion 107 gradually becomes deeper toward the capacitor back surface 103 side, bubbles can be effectively removed from the resin, and problems such as bubble bites can be prevented. As a result, sufficient adhesion between the ceramic capacitor 101 and the resin filler 92 can be secured, and the reliability of the wiring board 10 can be improved.

  (2) In the ceramic capacitor 101 of the present embodiment, the tip portion 107b of the recess 107 has a rounded shape, so that the stress applied to the tip portion 107b is dispersed, and the resin filler 92 is cracked. It is possible to avoid the problem that occurs. Therefore, if the ceramic capacitor 101 of the present invention is built in the wiring board 10, the reliability of the wiring board 10 can be sufficiently secured.

  (3) In the ceramic capacitor 101 according to the present embodiment, the boundary portion 110 between the recess-unformed portion 109 and the recess 107 on the side surface 106 of the capacitor body 104 has a rounded shape. It is possible to prevent the applied stress from being dispersed and the resin filler 92 from being cracked.

  (4) The ceramic capacitor 101 of the present embodiment is a via array type capacitor, and since the plurality of via conductors 131 and 132 are arranged in an array as a whole, inductance can be reduced. Therefore, if the ceramic capacitor 101 is used, high-speed power supply for absorbing noise and smoothing power fluctuations in the wiring substrate 10 can be performed.

  (5) In the ceramic capacitor 101 of the present embodiment, since the corner portion of the side surface 106 of the capacitor body 104 is chamfered, the problem that stress concentrates on this portion and cracks occur in the resin filler 92 is avoided. can do.

(6) Since the ceramic capacitor 101 of the present embodiment has the notches 108 extending along each side of the capacitor body 104, the resin filler 92 enters the notches 108 when incorporated in the wiring board 10. Thus, the adhesion with the wiring board 10 can be improved. Further, even when a force from the capacitor main surface 102 side toward the capacitor back surface 103 side or a direction toward the opposite side is applied, the ceramic capacitor 101 is difficult to move in the vertical direction.
[Second Embodiment]

  Next, a second embodiment that embodies this embodiment will be described with reference to the drawings. The ceramic capacitor according to the present embodiment is different from the first embodiment in that a dummy internal electrode that is electrically independent from the internal electrode is formed on the capacitor body. 22 and 23 are schematic side views of the ceramic capacitor 101A of the present embodiment, and FIG. 24 is a schematic longitudinal sectional view of the ceramic capacitor 101A. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals. Hereinafter, the difference from the first embodiment will be mainly described.

  As shown in FIGS. 22 to 24, dummy electrode layers 171 and 172 (dummy internal electrodes) that do not function as electrodes are arranged in the capacitor main body 104. Specifically, the dummy electrode layers 171 and 172 are disposed between the ceramic dielectric layers 105 and on the outer peripheral side of the ceramic dielectric layer 105 (that is, from the side surface 106) than the internal electrode layers 141 and 142. Are arranged at predetermined intervals.

  The dummy electrode layer 171 is disposed on the same plane as the internal electrode layer 141, and the dummy electrode layer 172 is formed on the same plane as the internal electrode layer 142. That is, the dummy electrode layer 171 is disposed between the same ceramic dielectric layer 105 where the internal electrode layer 141 is disposed, and the dummy electrode layer 172 is disposed between the ceramic dielectric layer 105 where the internal electrode layer 142 is disposed. Are arranged between the same layers. The dummy electrode layers 171 and 172 may be formed between layers different from the ceramic dielectric layer 105 where the internal electrode layers 141 and 142 are disposed.

  The internal electrode layer 141 and the dummy electrode layer 171, and the internal electrode layer 142 and the dummy electrode layer 172 are electrically insulated from each other. The ceramic dielectric layer 105 enters the gaps S1 and S2 between the internal electrode layers 141 and 142 and the dummy electrode layers 171 and 172, respectively, and the internal electrode layers 141 and 142 and the dummy electrode layers 171 and 172 Are electrically insulated.

  The gap S1 between the internal electrode layer 141 and the dummy electrode layer 171 and the gap S2 between the internal electrode layer 142 and the dummy electrode layer 172 are in a positional relationship shifted in the thickness direction of the capacitor body 104, There is no overlap. The gaps S1 between the internal electrode layer 141 and the dummy electrode layer 171 are aligned in the thickness direction of the capacitor body 104, and the gaps S2 between the internal electrode layer 142 and the dummy electrode layer 172 are respectively The capacitor body 104 is aligned in the thickness direction.

  The dummy electrode layers 171 and 172 are formed so as to surround the internal electrode layers 141 and 142. Further, on the side surfaces 106 a to 106 d of the capacitor body 104, the outer peripheral ends of the dummy electrode layers 171 and 172 are exposed from between the ceramic dielectric layers 105. That is, on the side surfaces 106a to 106d, there are an electrode exposed region 181 where the end portions of the dummy electrode layers 171 and 172 are exposed, and an electrode non-exposed region 182 where the end portions of the dummy electrode layers 171 and 172 are not exposed. Existing. In capacitor body 104 of the present embodiment, in each of side surfaces 106a to 106d, a region corresponding to capacitor forming layer portion 144 is an electrode exposed region 181 and a region corresponding to intermediate layer portion 145 and cover layer portion 146 is an electrode. A non-exposed region 182 is formed.

  In consideration of relaxation of the step formed near the end of the ceramic capacitor 101A, it is preferable that all the outer peripheral ends of the dummy electrode layers 171 and 172 are exposed from between the ceramic dielectric layers 105. Only the outer peripheral edge may be exposed.

  The total number of dummy electrode layers 171 and 172 is preferably at least half (about 50 layers) of the total number of internal electrode layers 141 and 142 in consideration of the relief of the step formed near the end of ceramic capacitor 101A. More preferably, the total number of internal electrode layers 141 and 142 is approximately the same (about 100 layers).

  Although the dummy electrode layers 171 and 172 are made of a conductive material, the conductive material constituting the dummy electrode layers 171 and 172 is determined in consideration of the influence during the firing of the ceramic green sheets 152 and 154 and the formation process. The same material as the conductive material constituting the internal electrode layers 141 and 142 is preferable. For the same reason, the thicknesses of the dummy electrode layers 171 and 172 are preferably substantially the same as the thicknesses of the internal electrode layers 141 and 142 (for example, 2 μm or less).

  Also in this embodiment, the plurality of capacitor main bodies 104 are manufactured by dividing the ceramic sintered body 168 having the plurality of capacitor forming regions R1. In the present embodiment, since the dummy electrode layers 171 and 172 are provided, the strength of the ceramic sintered body 168 is increased. Therefore, the depth of the perforated break grooves 163 with respect to the product thickness is set to 70% of the thickness of the entire product, and the ceramic sintered body 168 is surely divided in the dividing step. Therefore, in this embodiment, the length of the recess 107 formed in the side surfaces 106 a to 106 d is more than half of the thickness of the capacitor body 104. That is, on the side surface of the capacitor body 104, the recess 107 is formed so as to extend beyond the electrode non-exposed region 182 of the intermediate layer portion 145.

  In addition, the concave portion 107 of the present embodiment is directed toward the electrode non-exposed region 182 that is located between the base end portion 107a and the tip end portion 107b on the capacitor main surface 102 side and the capacitor back surface 103 side in the thickness direction. It has a constricted portion 107c that becomes narrower at one end and then becomes wider again. The constricted portion 107c is formed by a difference in processing efficiency during laser processing of the break groove 163. That is, at the time of laser processing, energy is efficiently absorbed in the portions where the dummy electrode layers 171 and 172 exist (portions that become the electrode exposed regions 181), and the diameter of the break groove 163 becomes relatively large. On the other hand, in the portion where the dummy electrode layers 171 and 172 do not exist (the portion that becomes the electrode non-exposed region 182), energy is hardly absorbed and the diameter of the break groove 163 is relatively small. Thus, the break groove 163 has a difference in diameter in the thickness direction, and the constricted portion 107c of the recess 107 is formed by the difference. The electrode non-exposed region 182 where the constricted portion 107 c of the concave portion 107 is formed is at an equal distance from both the capacitor main surface 102 and the capacitor back surface 103.

  Also in the capacitor main body 104 of the present embodiment, the boundary portion 110 between the recess-unformed portion 109 and the recess 107 is formed on the side surfaces 106a to 106d by performing wet blasting as in the first embodiment. It has a rounded shape. Furthermore, the outer peripheral ends of the dummy electrode layers 171 and 172 exposed at the recess-unformed portion 109 and the boundary portion 110 are crushed by wet blasting to cover the recess-unformed portion 109 and the boundary portion 110.

  On the other hand, in the recess 107, the dummy electrode layers 171 and 172 are pulled down from the inner wall surface (see FIG. 25). The inner wall surface of the recess 107 is a portion that is laser-processed by the unfired ceramic laminate 159, and the end portions of the dummy electrode layers 171 and 172 are pulled down during the laser processing. Further, since the conductive material constituting the dummy electrode layers 171 and 172 has a larger shrinkage rate than the ceramic green sheets 152 and 154, the outer periphery of the dummy electrode layers 171 and 172 is caused by the difference in shrinkage rate during firing. The end is located on the inner side of the inner wall surface of the recess 107. Therefore, in the present embodiment, when the capacitor main body 104 is viewed from the side, the coverage ratio of the dummy electrode layers 171 and 172 in the recess-unformed portion 109 and the boundary portion 110 is higher. It becomes larger than the coverage.

  Therefore, according to the present embodiment, the following effects can be obtained.

  (1) Also in the ceramic capacitor 101A of the present embodiment, since the recesses 107 extending in the thickness direction of the capacitor body 104 are formed on the side surfaces 106a to 106d, the same effect as the first embodiment is obtained. It is done. Further, the concavity 107 in the present embodiment is formed with a constricted portion 107c that is once narrowed and then widened again in the thickness direction, so that the fitting property with the resin filler 92 is increased. The ceramic capacitor 101A can be securely fixed in the wiring board 10. In particular, since the constricted portion 107c of the present embodiment is located at a substantially central portion of the capacitor main body 104 in the thickness direction, the ceramic capacitor 101A can be reliably prevented from moving in the thickness direction.

  (2) In the present embodiment, the recess-unformed portion 109 and the boundary portion 110 are partially covered with a part of the dummy electrode layers 171 and 172. Furthermore, the coverage of the dummy electrode layers 171 and 172 in the recess-unformed portion 109 and the boundary portion 110 is larger than the coverage of the dummy electrode layers 171 and 172 on the inner wall surface of the recess 107. As described above, the dummy electrode layers 171 and 172 cover the recess-unformed portion 109 and the boundary portion 110, so that the strength of the portions can be increased. Therefore, even when stress is concentrated on the boundary portion 110 between the recess-unformed portion 109 and the recess 107 when the ceramic capacitor 101 is built in the wiring board 10 or when the resin filler 92 is deformed due to a temperature change, It is possible to avoid the problem that a portion of the ceramic is missing, and to sufficiently secure the adhesion to the resin filler 92.

  (3) In this embodiment, since the dummy electrode layers 171 and 172 are formed on the outer peripheral side of the ceramic dielectric layer 105 from the internal electrode layers 141 and 142, the thickness of the end portion of the capacitor body 104 is increased. Thus, it is possible to provide the ceramic capacitor 101A in which the step formed near the end portion is relaxed. When the ceramic capacitor 101A is built in the wiring board 10, when the resin filler 92 is filled in the gap between the core substrate 11 and the capacitor 101, the resin filler 92 is less likely to sink into the back surface 103 side of the capacitor 101A. As a result, defects in the build-up process for forming the build-up layers 31 and 32 can be reduced.

  (4) In the present embodiment, gaps S1 and S2 are formed between the internal electrode layers 141 and 142 and the dummy electrode layers 171 and 172. Here, when the gap S1 between the internal electrode layer 141 and the dummy electrode layer 171 and the gap S2 between the internal electrode layer 142 and the dummy electrode layer 172 overlap in the thickness direction of the capacitor body 104. In the thickness direction of the capacitor body 104, there are portions where both the internal electrode layers 141 and 142 and the dummy electrode layers 171 and 172 do not exist. Since the internal electrode layers 141 and 142 and the dummy electrode layers 171 and 172 do not exist in such a portion, the thickness becomes thinner than other portions, and a locally recessed shape is obtained. If the dent is formed at a location relatively close to the outer periphery of the capacitor, the resin filler 92 may sink into the capacitor back surface 103 side. On the other hand, in the present embodiment, the gap S1 between the internal electrode layer 141 and the dummy electrode layer 171 and the gap S2 between the internal electrode layer 142 and the dummy electrode layer 172 are included in the ceramic dielectric layer 105. Since they do not overlap in the stacking direction, it is difficult to form such local dents, and the resin filler 92 can be prevented from entering.

  In addition, you may change each embodiment of this invention as follows.

  In the ceramic capacitors 101 and 101A of the above-described embodiments, the external electrodes 111 and 122 are formed in a substantially circular shape, and the external electrodes 112 and 121 are solid patterns having a circular extraction pattern around the external electrodes 111 and 122. However, the shape of the external electrodes 111, 112, 121, 122 can be changed as appropriate. FIG. 26 shows a modification of the external electrode. In the ceramic capacitor 101B shown in FIG. 26, the power supply external electrode 111 is a belt-like pattern having a substantially rectangular shape in plan view, and four power supply external electrodes 111 are arranged in parallel to each other on the capacitor main surface 102. Yes. The ground external electrode 112 is disposed so as to surround each power supply external electrode 111.

  The power supply external electrode 111 is directly connected to the end faces of the plurality of power supply capacitor via conductors 131. The ground external electrode 112 is directly connected to the end faces of the plurality of ground capacitor via conductors 132. Although not shown, on the capacitor back surface 103 side, the ground external electrode 122 connected to the ground capacitor internal via conductor 132 is a belt-like pattern having a substantially rectangular shape in plan view. On the capacitor back surface 103 side, the power supply external electrode 121 connected to the power supply capacitor internal via conductor 131 is a wide area pattern formed in a plain shape so as to surround each power supply external electrode 122.

  In the wiring substrate 10 of the above embodiment, the ceramic capacitors 101, 101 </ b> A to 101 </ b> B are accommodated in the resin core substrate 11. However, a ceramic capacitor 201 thinner than the ceramic capacitors 101, 101A, 101B, etc. of the above embodiment is formed, and the ceramic capacitor 201 is accommodated in the first buildup layer 310 (for example, see FIG. 27) of the wiring board 10A. May be.

  Specifically, as shown in FIG. 27, the first buildup layer 310 (wiring laminated portion) of the wiring board 10A includes two resin layers in addition to the resin interlayer insulating layers 33 and 35 and the conductor layer. Insulating layers 202 and 203 are provided. In addition, no opening is formed in the core substrate 11, and the capacitor 201 is disposed between the insulating layers 202 and 203 provided on the core substrate 11. In the capacitor 201 of this embodiment, the total number of internal electrode layers 141 and 142 is about 10 layers, which is thinner than the thickness of the capacitors 101, 101A, and 101B described in the above embodiment. A concave portion 107 extending in the thickness direction of the capacitor 201 is also formed on the side surface of the ceramic capacitor 201, and the width of the base end portion 107a of the concave portion 107 is larger than that of the distal end portion 107b. In addition, the tip 107b of the recess 107 has a rounded shape.

  Even if the ceramic capacitor 201 is configured in this manner, the adhesion to the wiring board 10A can be improved. Further, since the tip portion 107b of the concave portion 107 has a rounded shape, the stress applied to the tip portion 107b is dispersed, and a problem that a crack is generated on the resin interlayer insulating layer 203 side can be avoided. .

  Furthermore, compared with the case where the ceramic capacitors 101, 101A, 101B are accommodated in the resin core substrate 11, the wiring for electrically connecting the IC chip 21 and the ceramic capacitor 201 is shortened. This prevents an increase in the inductance component of the wiring, so that the switching noise of the IC chip 21 can be reliably reduced by the ceramic capacitor 201 and the power supply voltage can be reliably stabilized. Further, since noise entering between the IC chip 21 and the ceramic capacitor 201 can be suppressed to a very low level, high reliability can be obtained without causing malfunction such as malfunction.

  In the ceramic capacitors 101, 101A, 101B, 201 of the above-described embodiment, the boundary portion 110 between the recess-unformed portion 109 and the recess 107 is polished and rounded by performing wet blasting. The processing method is not limited to this. For example, the boundary portion 110 may be polished by using a polishing member such as sand paper and processed into a rounded shape.

  Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the respective embodiments described above are listed below.

  (1) A plate having a first main surface, a second main surface located on the opposite side of the first main surface, and a side surface located between the first main surface and the second main surface, A wiring board built-in capacitor having a capacitor body having a multilayered structure in which an internal electrode and a ceramic dielectric layer are laminated, wherein the ceramic constituting the ceramic dielectric layer is formed on the side surface of the capacitor body. A plurality of recesses extending in the thickness direction of the capacitor body with the at least one side of the first main surface and the second main surface as a base end portion are formed, and the plurality of recesses are The length along the thickness direction is smaller than the thickness of the capacitor body, the width of the base end portion when viewed from the side surface side is larger than the width of the tip end portion, Boundary with the recess Wiring board built capacitor which is characterized in that a shape of part rounded.

  (2) The wiring board built-in capacitor according to the technical idea (1), wherein a corner portion on a side surface of the capacitor body is chamfered.

  (3) In any of the technical ideas (1) and (2), the capacitor body has a rectangular shape in plan view and has a cutout portion extending along each side. .

  (4) Technical idea The wiring board built-in capacitor according to any one of (1) to (3) is laminated in a resin core substrate having a core main surface and a core back surface, or a resin interlayer insulating layer and a conductor layer are laminated. A wiring board housed in a wiring laminated portion having the above structure, wherein a resin material enters the recess.

DESCRIPTION OF SYMBOLS 10,10A ... Wiring board 11 ... Resin core board 12 ... Core main surface 13 ... Core back surface 33-36, 202, 203 ... Resin interlayer insulation layer 42 ... Conductive layer 101, 101A, 101B, 201 ... As capacitor for wiring board incorporation Ceramic capacitor 102 ... Capacitor main surface 103 as the first main surface 103 ... Capacitor back surface as the second main surface 104 ... Capacitor body 105 ... Ceramic dielectric layers 106, 106a to 106d ... Side surface 107 ... Recess 107a ... Base end portion 107b DESCRIPTION OF SYMBOLS ... Tip part 107c ... Constriction part 131 ... Via conductor in capacitor for power supply as via conductor in capacitor 132 ... Via conductor in capacitor for ground as via conductor in capacitor 141 ... Internal electrode layer for power supply as internal electrode 142 ... Internal electrode Internal electrode layers for ground 171, 172... Dummy electrode layer 310 as a me internal electrode ... First buildup layer as a wiring laminate

Claims (7)

The plate has a first main surface, a second main surface located on the opposite side of the first main surface, and a side surface located between the first main surface and the second main surface, and an internal electrode and A wiring board built-in capacitor having a capacitor body having a multilayered structure of ceramic dielectric layers,
The ceramic constituting the ceramic dielectric layer is exposed on the side surface of the capacitor body, and at least one of the first main surface and the second main surface is used as a base end portion of the capacitor main body. A plurality of recesses extending in the thickness direction are formed,
Wherein the plurality of recesses, the is smaller than the thickness of the capacitor body length along the thickness direction, with a width of the proximal end portion when viewed from the side surface side is greater than the width of the tip portion ,
The plurality of recesses have a constricted portion that is once narrowed and then widened again in the thickness direction between the proximal end portion and the distal end portion, and
The capacitor body includes a dummy internal electrode disposed outside the internal electrode between the ceramic dielectric layers and electrically independent from the internal electrode. Capacitor.   2. The wiring board built-in capacitor according to claim 1, wherein the plurality of recesses have a depth of the base end portion that is larger than a depth of the tip end portion when the side surface is used as a reference.   3. The wiring board built-in capacitor according to claim 1, wherein the tips of the plurality of recesses have a rounded shape when viewed from the side surface. The side surface includes an electrode exposed region in which an end portion of the dummy internal electrode is exposed and an electrode non-exposed region in which the end portion of the dummy internal electrode is not exposed, and the constricted portion is not exposed to the electrode. 4. The wiring board built-in capacitor according to claim 1 , wherein the capacitor is located in an exposed region. The length of the concave portion along the thickness direction of the capacitor body is 55% or more and 90% or less of the thickness of the capacitor body, and the electrode non-exposed region includes the first main surface and the second main surface. 5. The wiring board built-in capacitor according to claim 4 , wherein both are substantially the same distance from the surface. The capacitor includes a plurality of via conductors in a capacitor electrically connected to the internal electrode, and the plurality of via conductors in the capacitor is a via array type capacitor arranged in an array as a whole. wiring board built capacitor according to any one of claims 1 to 5, characterized. The wiring board built-in capacitor according to any one of claims 1 to 6 , wherein the wiring board built-in capacitor has a structure in which a resin core substrate having a core main surface and a core back surface is laminated or a resin interlayer insulating layer and a conductor layer are laminated. A wiring board which is housed in a part.

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