JP5510785B2 - Coating apparatus and coating method - Google Patents

Description

  The present invention relates to a coating apparatus and a coating method for forming a curtain film on a substrate supported by a support roll and continuously conveyed, and more particularly, a coating apparatus capable of stably forming a curtain film on a substrate and It relates to a coating method.

  Conventionally, various types of coating apparatuses that form a curtain film on a substrate supported by a support roll and continuously conveyed are known (see, for example, Patent Documents 1 to 5). In a general coating apparatus, when the curtain film is attached to the substrate, the curtain film is dropped from the coating head onto the substrate that is supported by a support roll and continuously conveyed. As a result, a curtain film is formed on the surface of the substrate.

  In the conventional coating apparatus, since the support roll is continuously rotated, an air flow (entrained wind) flows along the rotation direction of the support roll on the surface of the substrate supported by the support roll. Is generated. Here, if such an air flow hits the curtain film that has fallen from the coating head, the air flow prevents the curtain film from falling to an appropriate position on the surface of the base material, and the curtain surface on the surface of the base material. There exists a problem that a film | membrane cannot be formed appropriately.

  For this reason, in the coating apparatus as shown in Patent Documents 1 to 4, a pressure reducing chamber is provided in the vicinity of the support roll, and a wind-shielding structure made of a blade or the like is disposed at the outlet portion of the pressure reducing chamber to thereby apply the coating head. The air flow on the base material is removed in the vicinity of the location where the curtain film dropped from the base material contacts the base material. Moreover, in the apparatus as shown in Patent Document 5, an air shield that is curved along the outer peripheral surface of the support roll is provided around the support roll, and a decompression box for reducing the air flow is provided on the air shield. It is designed to be installed in multiple stages.

  Patent Document 6 discloses a coating apparatus in which a die head is brought close to a substrate supported by a support roll and a coating solution is supplied from the die head to the substrate. In a coating apparatus as shown in Patent Document 6, a slit for pressure reduction is formed inside a die head, and a labyrinth seal is formed in the vicinity of a coating liquid supply port in the die head.

JP 2000-176345 A JP 62-186966 A JP 2001-54755 A JP-A-62-289264 JP-A-6-39331 JP 2003-53233 A

  In the conventional coating apparatus as shown in Patent Documents 1 to 4, when the wind-shielding structure composed of a blade or the like formed at the outlet portion of the decompression chamber is too close to the base material supported by the support roll, the base material May come into contact with the wind-shielding structure, or foreign matter may be caught. In addition, when the windshield structure is arranged at a large distance from the substrate supported by the support roll, the vicinity of the location where the curtain film dropped from the coating head contacts the substrate due to the effect of the reduced pressure in the reduced pressure chamber However, there is a problem in that the air flow is not sufficiently suppressed and defects in the application of the curtain film occur, or the curtain film is drawn in due to the influence of the air flow. Further, the conventional coating apparatuses as shown in Patent Documents 1 to 4 have a problem that the volume of the decompression chamber is large and it is difficult to finely adjust the differential pressure of air inside and outside the decompression chamber.

  Further, in the apparatus as shown in Patent Document 5, it is difficult to adjust the size of the gap between the arc-shaped air shield and the support roll structurally, and the air shield and the support roll in the width direction of the support roll are difficult to adjust. Variations in the size of the gaps between them cause variations in the degree of suppression of the air flow in the width direction of the support rolls. As a result, the curtain film formed on the substrate is supported. There is a problem in that application variation occurs in the width direction of the roll.

  Moreover, in the coating apparatus as shown to patent document 6, the die head is made to adjoin to the base material supported by the support roll. However, Patent Document 6 does not describe any case where the coating head for dropping the curtain film with respect to the substrate is provided apart from the support roll. That is, when the coating head for dropping the curtain film with respect to the substrate is provided apart from the support roll, the curtain film naturally falls from the coating head to the substrate, and is further affected by the air flow. It becomes easy. On the other hand, since Patent Document 6 only describes the case where the die head is close to the base material, the technique disclosed in Patent Document 6 is applied to the curtain film coating method as it is. I can't.

  The present invention has been made in consideration of such points, and the curtain film is naturally dropped from the coating head and attached to the base material to form a curtain film on the base material. Even if it is easily affected, the air flow is uniformly removed in the width direction of the base material, and the base material does not come into contact with the member for removing the air flow, and the curtain film is stably attached to the base material. It is an object of the present invention to provide a coating apparatus and a coating method that can be formed in the following manner.

  The present invention is a coating apparatus that forms a curtain film on a substrate that is supported by a support roll and is continuously conveyed, and is provided in the vicinity of the support roll so as to be separated from the support roll. An application head for dropping the curtain film on the substrate to be supported, and an upstream side in the rotation direction of the support roll from a position where the curtain film dropped from the application head in the vicinity of the support roll contacts the substrate. An air flow removing unit provided with one or more slits for removing an air flow generated on the surface of the base material supported by the support roll and flowing along the rotation direction of the support roll. It is the coating device characterized by these.

  According to such a coating apparatus, the air flow removal unit is provided on the upstream side in the rotation direction of the support roll from the position where the curtain film dropped from the coating head contacts the base material. Are formed on the surface of the base material supported by the support roll, and a slit is formed to remove an air flow flowing along the rotation direction of the support roll. For this reason, it can fully suppress that the airflow produced | generated on the surface of the base material supported by the support roll and flowing along the rotation direction of the support roll hits the curtain film which fell from the coating head. In particular, even if the curtain film is naturally dropped from the coating head and adhered to the substrate, the curtain film is formed on the substrate. The slit can remove the airflow uniformly in the width direction of the substrate. In particular, since the volume of the slit is small compared to the case where a conventional decompression chamber is provided, the effect of suppressing the air flow due to the decompression can be sufficiently obtained even when the differential pressure is reduced. Moreover, since the slit is formed inside the airflow removal unit and the airflow removal unit is provided apart from the base material, the base material is prevented from coming into contact with the airflow removal unit. . In this way, the curtain film can be stably formed on the substrate.

  In the coating apparatus of the present invention, in the air flow removal unit, a plurality of the slits may be provided along the rotation direction of the support roll.

  In this case, in the air flow removal unit, a suction mechanism is connected to a slit closest to a location where the curtain film dropped from the coating head contacts the base material among the plurality of slits. An air flow may be sucked from the slit. By providing such a suction mechanism, it is possible to increase the amount of air flow removed by the slit closest to the location where the curtain film dropped from the coating head contacts the substrate, and the curtain film It is possible to further suppress the flow from being sent.

  Moreover, in the air flow removal unit, among the plurality of slits, the ends of the slits other than the slit to which the suction mechanism is connected may be open to the atmosphere.

  Alternatively, in the air flow removal unit, a suction mechanism may be connected to each of the plurality of slits, and an air flow may be sucked from each slit by each suction mechanism. In this case, the amount of airflow removed by each slit can be increased, and the airflow sent to the curtain film can be further suppressed.

  Each slit may have a cross-sectional area that decreases in order from the place where the curtain film dropped from the coating head comes into contact with the substrate. In other words, the slit closest to the location where the curtain film dropped from the coating head contacts the substrate has the smallest cross-sectional area, and the slit farthest from the above-described location has the largest cross-sectional area. This increases the amount of airflow that can be removed in order from the slit on the upstream side in the rotation direction of the support roll.

  Further, on the surface facing the support roll in the air flow removal unit, a corner portion curved in a convex shape is provided at the entrance portion of each slit, and the surface of the base material supported by the support roll is provided. The air flow generated and flowing along the rotation direction of the support roll may enter the slits along the corner portion. In this case, since the corner portion provided at the entrance portion of each slit is curved in a convex shape, a so-called Coanda effect that separates the airflow from the substrate can be obtained. The Coanda effect uses the property that an air flow flows along an object, and in the case described above, the air flow flows along a corner portion curved in a convex shape. By providing such a corner portion at the entrance portion of each slit, the air flow flowing along the rotation direction of the support roll in the gap between the facing surface of the air flow removing unit and the base material is increased. Of air flow can be sent to each slit.

  Further, at this time, each corner portion provided at the entrance portion of each slit may have a radius of curvature that decreases in order from the place where the curtain film dropped from the coating head comes into contact with the substrate. In other words, the corner portion closest to the location where the curtain film dropped from the coating head contacts the substrate has the smallest radius of curvature, and the corner portion farthest from the above location has the largest radius of curvature. As a result, the degree of curvature of the corner portion becomes gradual in order from the slit on the upstream side in the rotation direction of the support roll, and a larger Coanda effect can be obtained. For this reason, the quantity of the airflow which enters into these slits increases sequentially from the slit of the upstream in the rotation direction of a support roll.

  In the coating apparatus of the present invention, in the air flow removing unit, the curtain film dropped from the coating head is in contact with the substrate and the slit on the most downstream side in the rotation direction of the support roll. A labyrinth structure may be formed on the surface facing the support roll. Here, the labyrinth structure refers to a structure in which the size of the interval between the base material supported by the support roll and the facing surface of the air flow removing unit repeatedly increases and decreases along the transport direction of the base material. Say. By providing such a labyrinth structure on the facing surface of the air flow removing unit, the air flow flowing through the gap between the facing surface of the air flow removing unit and the base material is prevented from reaching the curtain film. In addition, the airflow can be prevented from entering the gap between the facing surface of the airflow removal unit and the base material from the curtain film side. In particular, by suppressing the air flow from entering the gap between the facing surface of the air flow removing unit and the substrate from the curtain film side, the air flow is reduced before the curtain film that has fallen from the coating head reaches the substrate. It can suppress drawing in toward the removal part side.

  In the coating apparatus of the present invention, in the air flow removing unit, an additional slit is formed on a side surface facing the curtain film falling from the coating head to the base material, and the additional slit forms the side surface and the An air flow may be sent between the curtain film. Since an additional slit is provided, an air flow is sent from the additional slit toward the curtain film. Therefore, when the curtain film falls from the coating head, the curtain film and the air flow removing unit It can suppress that a curtain film | membrane contacts the side surface of an airflow removal part because the space between becomes negative pressure.

  In this case, a corner portion curved in a convex shape is provided in the vicinity of the outlet portion of the additional slit on the surface facing the support roll in the air flow removing portion, and the corner portion is provided from the additional slit. The airflow may flow between the surface of the airflow removal unit facing the support roll and the substrate. As described above, since the corner portion provided at the outlet portion of the additional slit is curved in a convex shape, the air flow can be caused to flow along the corner portion by the Coanda effect as described above. Can be sent between the labyrinth structure of the airflow removal unit and the substrate. By such an air flow, it is possible to control the fluctuation between the pressure of the air in the slit and the pressure at the location where the curtain film dropped from the coating head contacts the substrate.

  The end of the additional slit may be open to the atmosphere.

  The present invention includes a step of dropping a curtain film on a substrate that is supported by a support roll and continuously conveyed, and forming the curtain film on the surface of the substrate, and a substrate supported by the support roll The air flow generated on the surface of the support roll and flowing along the rotation direction of the support roll is formed in an air flow removal unit provided on the upstream side in the rotation direction of the support roll with respect to the location where the curtain film contacts the substrate. A step of removing the air flow by flowing into the slit.

  According to such a coating method, the air flow generated on the surface of the base material supported by the support roll and flowing along the rotation direction of the support roll is caused to flow into the slit formed in the air flow removal unit. This air flow is removed. For this reason, it can fully suppress that the airflow produced | generated on the surface of the base material supported by the support roll and flowing along the rotation direction of the support roll hits the curtain film. In particular, even if the curtain film is naturally dropped and attached to the base material to form a curtain film on the base material, even if it is more susceptible to air flow, the slit formed inside the air flow removal unit The air flow can be removed uniformly in the width direction of the substrate. In particular, since the volume of the slit is small compared to the case where a conventional decompression chamber is provided, the effect of suppressing the air flow due to the decompression can be sufficiently obtained even when the differential pressure is reduced. Moreover, since the slit is formed inside the airflow removal unit and the airflow removal unit is provided apart from the base material, the base material is prevented from coming into contact with the airflow removal unit. . In this way, the curtain film can be stably formed on the substrate.

  According to the coating apparatus and the coating method of the present invention, a curtain film can be stably formed on a substrate.

It is a block diagram which shows the outline of a structure of the coating device by one embodiment of this invention. It is sectional drawing which shows the detail of a structure of the air flow removal part in the coating device shown in FIG. It is sectional drawing which shows the detail of the other structure of the airflow removal part in the coating device shown in FIG. It is sectional drawing which shows the detail of another structure of the airflow removal part in the coating device shown in FIG.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1 to 4 are diagrams showing a coating apparatus and a coating method according to the present embodiment. Among these, FIG. 1 is a block diagram showing an outline of the configuration of the coating apparatus according to the present embodiment, and FIG. 2 is a cross-sectional view showing details of the configuration of the air flow removing unit in the coating apparatus shown in FIG. . 3 and 4 are cross-sectional views showing details of other configurations of the air flow removing unit in the coating apparatus shown in FIG.

  As shown in FIG. 1, the coating apparatus 1 according to the present embodiment is configured to form a curtain film C on a substrate W that is supported by a cylindrical support roll 10 and continuously conveyed. Such a coating apparatus 1 includes a coating head 20 that drops the curtain film C with respect to the substrate W supported by the support roll 10, and an airflow removal unit 30 provided in the vicinity of the support roll 10. Yes. The air flow removing unit 30 is formed on the surface of the substrate W supported by the support roll 10, and removes an air flow (entrained wind) flowing along the rotation direction of the support roll 10.

  The cylindrical support roll 10 extends in a direction perpendicular to the paper surface in FIG. 1, and the support roll 10 is rotated in a counterclockwise direction in FIG. 1 by a drive unit (not shown). . As shown in FIG. 1, a substrate W is wound around the support roll 10, and the support roll 10 changes the conveyance direction of the substrate W by 180 °.

  The coating head 20 is provided apart from the support roll 10 in the vicinity of the support roll 10. As shown in FIG. 1, the coating head 20 is configured to drop the curtain film C against the base material W supported by the support roll 10. The coating head 20 extends in a direction orthogonal to the paper surface in FIG. 1, and the curtain film C discharged from the coating head 20 also extends in a direction orthogonal to the paper surface in FIG. Yes. The curtain film C sent from the coating head 20 to the substrate W adheres on the substrate W. In this way, the substrate W to which the curtain film C is attached is transported to the downstream side of the support roll 10.

  The air flow removing unit 30 is provided in the vicinity of the support roll 10 on the upstream side in the rotation direction of the support roll 10 from the location P where the curtain film C dropped from the coating head 20 contacts the substrate W. As shown in FIG. 2, the airflow removal unit 30 includes a facing surface 30p that faces the substrate W supported by the support roll 10 and a side surface that faces the curtain film C that falls from the coating head 20 to the substrate W. 30q. In addition, three slits 34, 36, 38 are formed inside the airflow removal unit 30, and one end of each of the slits 34, 36, 38 is an opening provided on the facing surface 30 p of the airflow removal unit 30. Communicate. These slits 34, 36, and 38 remove the air flow that is generated on the surface of the substrate W supported by the support roll 10 and flows along the rotation direction of the support roll 10.

  More specifically, among the three slits 34, 36, and 38, the suction mechanism 40 is connected to the slit 38 that is closest to the portion P where the curtain film C dropped from the coating head 20 contacts the substrate W. The suction mechanism 40 sucks an air flow from the slit 38. The suction mechanism 40 depressurizes the slit 38 at 2000 mPa or less. More specifically, the airflow flowing along the rotation direction of the support roll 10 in the gap between the facing surface 30p of the airflow removing unit 30 and the base material W is provided on the facing surface 30p of the airflow removing unit 30. The air enters the slit 38 through the opening and is sucked by the suction mechanism 40. In this way, the air flow generated on the surface of the substrate W supported by the support roll 10 and flowing along the rotation direction of the support roll 10 is removed by the slit 38. Here, since the suction mechanism 40 is provided, the amount of airflow removed by the slit 38 can be increased, and the airflow can be further prevented from being sent to the curtain film C. it can.

  Further, as shown in FIG. 2, among the three slits 34, 36, 38, the ends of the slits 34, 36 other than the slit 38 to which the suction mechanism 40 is connected are open to the atmosphere. In these slits 34, 36, the airflow flowing along the rotation direction of the support roll 10 in the gap between the facing surface 30 p of the airflow removing unit 30 and the substrate W is the facing surface of the airflow removing unit 30. The slits 34 and 36 enter the slits 34 and 36 from the openings provided in the openings 30p, respectively, and the air flow entering the slits 34 and 36 flows in the direction of the arrow in FIG. Open to the atmosphere. In this way, the airflow generated on the surface of the substrate W supported by the support roll 10 and flowing along the rotation direction of the support roll 10 is removed by the slits 34 and 36.

  The air flow removing unit 30 extends in a direction orthogonal to the paper surface in FIG. 1, and the slits 34, 36, and 38 provided in the air flow removing unit 30 are also orthogonal to the paper surface in FIG. It extends in the direction to do.

  Further, each of the slits 34, 36, and 38 has a smaller cross-sectional area in order from the place P where the curtain film C dropped from the coating head 20 contacts the substrate W, that is, in the order of the slit 38, the slit 36, and the slit 34. It has become. In other words, the slit 38 closest to the location P where the curtain film C dropped from the coating head 20 contacts the substrate W has the smallest cross-sectional area, and the cross-sectional area of the slit 34 farthest from the location P becomes the largest. ing. This increases the amount of airflow that can be removed in order from the slit on the upstream side in the rotation direction of the support roll 10, that is, in the order of the slits 34, 36, and 38. For this reason, the air flow that has entered between the facing surface 30p of the air flow removing unit 30 and the substrate W is first removed by a considerable amount by the slit 34 having a relatively large cross-sectional area, and the air remaining without being removed. The flow is sufficiently removed by the slit 36 having the second largest cross-sectional area, and the air flow remaining without being removed is removed by the slit 38 having the smallest cross-sectional area.

  Further, on the facing surface 30p of the airflow removing unit 30, corner portions 34a, 36a, and 38a that are curved in a convex shape are provided at the entrance portions of the slits 34, 36, and 38, respectively. And the airflow which flows along the rotation direction of the support roll 10 in the gap between the opposing surface 30p of the airflow removal unit 30 and the base material W is each slit 34, along each corner portion 34a, 36a, 38a. 36, 38. Here, since the corner portions 34a, 36a, 38a provided at the entrance portions of the slits 34, 36, 38 are curved in a convex shape, a so-called Coanda effect that separates the air flow from the substrate W is obtained. It is done. The Coanda effect uses the property that an air flow flows along an object. In the present embodiment, the Coanda effect means that the air flow flows along corner portions 34a, 36a, and 38a curved in a convex shape. By providing such corner portions 34a, 36a, 38a at the entrance portions of the slits 34, 36, 38, a support roll is provided in the gap between the facing surface 30p of the airflow removing unit 30 and the substrate W. For airflows that flow along ten rotational directions, a greater amount of airflow can be sent to each slit 34, 36, 38.

  The corner portions 34a, 36a, and 38a provided at the entrance portions of the slits 34, 36, and 38 are arranged in the order from the place P where the curtain film C dropped from the coating head 20 contacts the substrate W, that is, the corners. The radius of curvature decreases in the order of the portion 38a, the corner portion 36a, and the corner portion 34a. In other words, the corner portion 38a closest to the location P where the curtain film C dropped from the coating head 20 contacts the substrate W has the smallest radius of curvature, and the corner portion 34a farthest from the location P has the radius of curvature. It is the largest. As a result, the degree of curvature of the corner portions becomes gradual in order from the upstream corner portion in the rotation direction of the support roll 10, that is, in the order of the corner portions 34a, 36a, 38a, and a larger Coanda effect can be obtained. . For this reason, the amount of the air flow entering these slits increases in order from the upstream slit in the rotation direction of the support roll 10, that is, in the order of the slits 34, 36, and 38.

  In the air flow removal unit 30, the facing surface 30 p between the point P where the curtain film C dropped from the coating head 20 contacts the substrate W and the slit 38 on the most downstream side in the rotation direction of the support roll 10 A labyrinth structure 32 is formed. Here, the labyrinth structure 32 is a structure in which the size of the interval between the base material W supported by the support roll 10 and the facing surface 30p repeatedly increases and decreases along the transport direction of the base material W. Say. Since such a labyrinth structure 32 is provided on the facing surface 30p of the airflow removing unit 30, the airflow flowing through the gap between the facing surface 30p of the airflow removing unit 30 and the base material W is changed to the curtain film C. , And the airflow can be prevented from entering the gap between the facing surface 30p of the airflow removal unit 30 and the base material W from the curtain film C side. In particular, the curtain film C dropped from the coating head 20 is prevented from entering the gap between the facing surface 30p of the airflow removing unit 30 and the base material W from the curtain film C side. It can be suppressed that the air flow is removed toward the air flow removing unit 30 before reaching. In addition, the magnitude | size of the space | interval between the base material W supported by the support roll 10 and the labyrinth structure 32 is adjustable.

  Next, operation | movement of the coating device 1 which consists of such a structure is demonstrated below.

  In adhering the curtain film C to the substrate W, the curtain film C is dropped from the coating head 20 onto the substrate W supported by the support roll 10 and continuously conveyed. Thereby, the curtain film C is formed on the surface of the substrate W.

  At this time, since the support roll 10 is continuously rotated in the counterclockwise direction in FIGS. 1 and 2, the rotation of the support roll 10 is performed on the surface of the substrate W supported by the support roll 10. An air stream flowing along the direction is generated. If such an air flow strikes the curtain film C that has fallen from the coating head 20, the air flow prevents the curtain film C from dropping to an appropriate position on the surface of the base material W. The curtain film C cannot be properly formed on the surface of the film.

  On the other hand, in the coating apparatus 1 according to the present embodiment, since the airflow removal unit 30 is provided, the airflow removal unit 30 is generated on the surface of the substrate W supported by the support roll 10 and is along the rotation direction of the support roll 10. The flowing air flow enters the gap between the facing surface 30p of the air flow removing unit 30 and the substrate W. The air flow that has entered between the facing surface 30p of the air flow removing unit 30 and the base material W is first removed by a considerable amount by the slit 34 having a relatively large cross-sectional area. Secondly, the slit 36 having a large cross-sectional area is sufficiently removed, and the air flow remaining without being removed is removed by the slit 38 having the smallest cross-sectional area. Further, since the labyrinth structure 32 is provided, the flow of air from the gap near the entrance portion of the slit 38 toward the curtain film C side is suppressed. Thus, by providing the air flow removing unit 30, it is possible to suppress the air flow from hitting the curtain film C dropped from the coating head 20.

  As described above, according to the coating apparatus 1 of the present embodiment, the curtain film C dropped from the coating head 20 in the vicinity of the support roll 10 is more in the rotation direction of the support roll 10 than the portion P where the curtain film C contacts the substrate W. An airflow removal unit 30 is provided on the upstream side, and the airflow removal unit 30 generates air that is generated on the surface of the substrate W supported by the support roll 10 and flows along the rotation direction of the support roll 10. Slits 34, 36 and 38 for removing the flow are formed. For this reason, the airflow generated on the surface of the substrate W supported by the support roll 10 and flowing along the rotation direction of the support roll 10 is sufficiently suppressed from hitting the curtain film C dropped from the coating head 20. Can do. In particular, even when the curtain film C is naturally dropped from the coating head 20 and attached to the substrate W to form the curtain film C on the substrate W, the air flow removal unit The air flow can be uniformly removed in the width direction of the substrate W by the slits 34, 36, and 38 formed in the interior of the substrate 30. In particular, since the volumes of the slits 34, 36, and 38 are small as compared with the case where a conventional decompression chamber is provided, a sufficient air flow suppression effect can be obtained even when the differential pressure is reduced. In addition, the slits 34, 36, and 38 are formed inside the air flow removal unit 30, and the air flow removal unit 30 is provided apart from the base material W. Is prevented from touching. In this way, the curtain film C can be stably formed on the substrate W.

  In addition, the coating device by this Embodiment is not limited to said aspect, A various change can be added. For example, FIG. 3 shows another configuration of the air flow removing unit in the coating apparatus.

  Compared with the air flow removal unit 30 shown in FIG. 2, the air flow removal unit 30 a as shown in FIG. 3 has an additional slit on the side surface 30 q facing the curtain film C falling from the coating head 20 to the substrate W. The only difference is that 39 is formed, and the other parts have substantially the same configuration as the airflow removal unit 30 shown in FIG. In the description of the configuration of the air flow removing unit 30a shown in FIG. 3, the same components as those of the air flow removing unit 30 shown in FIG.

  In the airflow removal unit 30a as shown in FIG. 3, an additional slit 39 is formed inside the airflow removal unit 30a, and one end of the additional slit 39 is formed on the side surface 30q of the airflow removal unit 30a. It communicates with the provided opening. The other end of the additional slit 39 is open to the atmosphere. And as shown by the arrow of FIG. 3, an air flow is sent to the additional slit 39 from the exterior of the air flow removal part 30a, and the air flow which flowed through this additional slit 39 is the side surface 30q of the air flow removal part 30a. It is sent between the curtain film C. Thus, since the air flow is sent toward the curtain film C by the additional slit 39, when the curtain film C falls from the coating head 20, the curtain film C and the air flow removing unit 30 It is possible to prevent the curtain film C from coming into contact with the side surface 30q of the airflow removal unit 30a due to the negative pressure in the space between the two.

  Further, as shown in FIG. 3, a corner portion 39a that is curved in a convex shape is provided in the vicinity of the exit portion of the additional slit 39 on the facing surface 30p of the air flow removing portion 30a. Then, an air flow flows from the additional slit 39 along the corner portion 39a between the facing surface 30p and the base material W in the air flow removing unit 30a. More specifically, since the corner portion 39a provided at the exit portion of the additional slit 39 is curved in a convex shape, an air flow can be caused to flow along the corner portion 39a by the Coanda effect as described above. This air flow can be sent between the labyrinth structure 32 of the air flow removing unit 30a and the substrate W. Further, since the air in the slit 38 is sucked by the suction mechanism 40, the air pressure P1 in the slit 38 is smaller than the air pressure P2 in the vicinity of the outlet portion of the additional slit 39. By this differential pressure, an air flow that flows between the opposing surface 30p and the base material W in the air flow removing portion 30a along the corner portion 39a from the additional slit 39 is generated. Such an air flow makes it possible to control the fluctuation between the air pressure P1 in the slit 38 and the air pressure P2 in the vicinity of the outlet portion of the additional slit 39.

  As still another configuration of the air flow removing unit in the coating apparatus, an air flow removing unit as shown in FIG. 4 may be used.

  4 differs from the air flow removal unit 30 shown in FIG. 2 only in that the suction mechanisms 42 and 44 are also connected to the slits 34 and 36, respectively. The other parts have substantially the same configuration as the airflow removing unit 30 shown in FIG. In the description of the configuration of the airflow removal unit 30b shown in FIG. 4, the same components as those of the airflow removal unit 30 shown in FIG.

  In the air flow removing unit 30b as shown in FIG. 4, the ends of the slits 34 and 36 are not open to the atmosphere, and instead, suction mechanisms 42 and 44 are connected to the ends of the slits 34 and 36, respectively. Has been. The suction mechanisms 42 and 44 suck air flows from the slits 34 and 36, respectively. Similar to the suction mechanism 40, these suction mechanisms 42 and 44 depressurize the slits 34 and 36 at 2000 mPa or less. By providing such suction mechanisms 42, 44, slits 34, 36 are generated with respect to the air flow generated on the surface of the substrate W supported by the support roll 10 and flowing along the rotation direction of the support roll 10. Allows a greater amount of air flow to be removed.

  In addition, as an air flow removal unit having still another configuration, no suction mechanism is provided, and a plurality of slits formed inside the air flow removal unit are all open to the atmosphere. Also good.

  Further, as an air flow removing unit having another configuration, an air flow removing unit in which only one slit is formed can be used instead of a plurality of slits formed in the air flow removing unit. .

DESCRIPTION OF SYMBOLS 10 Support roll 20 Application | coating head 30, 30a, 30b Air flow removal part 30p Opposite surface 30q Side surface 32 Labyrinth structure 34, 36, 38 Slit 34a, 36a, 38a Corner part 40, 42, 44 Suction mechanism W Base material C Curtain film P Where the curtain film dropped from the coating head contacts the substrate

Claims (13)

A coating apparatus that forms a curtain film on a substrate that is supported by a support roll and continuously conveyed,
An application head that is provided apart from the support roll in the vicinity of the support roll and drops the curtain film against the substrate supported by the support roll;
The curtain film dropped from the coating head in the vicinity of the support roll is provided on the upstream side in the rotation direction of the support roll with respect to the location in contact with the base material, and is generated on the surface of the base material supported by the support roll. An air flow removing unit in which one or a plurality of slits for removing the air flow flowing along the rotation direction of the support roll are formed;
With
In the air flow removal unit, on the surface facing the support roll between the location where the curtain film dropped from the coating head contacts the substrate and the slit on the most downstream side in the rotation direction of the support roll, An applicator having a labyrinth structure .   The coating apparatus according to claim 1, wherein a plurality of the slits are provided along a rotation direction of the support roll in the air flow removing unit. On the surface facing the support roll in the air flow removal unit, a corner portion curved in a convex shape is provided at the entrance portion of each slit, and is generated on the surface of the base material supported by the support roll. The airflow flowing along the rotation direction of the support roll enters the slits along the corner portions,
The corner radius provided at the entrance of each slit has a radius of curvature that decreases in order from the location where the curtain film dropped from the coating head contacts the substrate. Coating device. A coating apparatus that forms a curtain film on a substrate that is supported by a support roll and continuously conveyed,
An application head that is provided apart from the support roll in the vicinity of the support roll and drops the curtain film against the substrate supported by the support roll;
The curtain film dropped from the coating head in the vicinity of the support roll is provided on the upstream side in the rotation direction of the support roll with respect to the location in contact with the base material, and is generated on the surface of the base material supported by the support roll. An air flow removing unit in which one or a plurality of slits for removing the air flow flowing along the rotation direction of the support roll are formed;
With
In the air flow removal unit, a plurality of the slits are provided along the rotation direction of the support roll,
On the surface facing the support roll in the air flow removal unit, a corner portion curved in a convex shape is provided at the entrance portion of each slit, and is generated on the surface of the base material supported by the support roll. The airflow flowing along the rotation direction of the support roll enters the slits along the corner portions,
Each corner portion provided at the entrance portion of each slit has a radius of curvature that decreases in order from the location where the curtain film dropped from the coating head comes into contact with the substrate. In the air flow removal unit, a suction mechanism is connected to a slit closest to a portion where the curtain film dropped from the coating head contacts the substrate, and the suction mechanism removes the slit from the slit. The coating apparatus according to any one of claims 2 to 4, wherein an air flow is sucked. 6. The coating apparatus according to claim 5 , wherein, in the air flow removing unit, among the plurality of slits, the ends of the slits other than the slit to which the suction mechanism is connected are open to the atmosphere. 3. The air flow removing unit according to claim 2 , wherein a suction mechanism is connected to each of the plurality of slits, and an air flow is sucked from each of the slits by each of the suction mechanisms. The coating apparatus as described in any one of thru | or 4 . 8. The coating according to claim 2 , wherein each slit has a cross-sectional area that decreases in order from the location where the curtain film dropped from the coating head comes into contact with the substrate. apparatus. In the air flow removing unit, an additional slit is formed on a side surface facing the curtain film falling from the coating head to the base material, and the additional slit forms an air flow between the side surface and the curtain film. The coating apparatus according to any one of claims 1 to 8 , wherein the coating device is configured to be fed. A corner portion curved in a convex shape is provided in the vicinity of the outlet portion of the additional slit on the surface facing the support roll in the air flow removing unit, and extends along the corner portion from the additional slit. The coating apparatus according to claim 9, wherein an air flow is configured to flow between a surface of the air flow removing unit facing the support roll and the substrate. The coating device according to claim 9 or 10, wherein an end of the additional slit is open to the atmosphere. A step of dropping the curtain film on the substrate supported by the support roll and continuously conveyed, and forming the curtain film on the surface of the substrate;
An air flow generated on the surface of the substrate supported by the support roll and flowing along the rotation direction of the support roll is provided on the upstream side in the rotation direction of the support roll from a location where the curtain film contacts the substrate. Removing the airflow by flowing into a slit formed in the airflow removal unit formed,
With
In the air flow removing unit, a labyrinth structure is provided on a surface facing the support roll between a portion where the dropped curtain film contacts the base material and a slit located on the most downstream side in the rotation direction of the support roll. A coating method characterized by being formed . A step of dropping the curtain film on the substrate supported by the support roll and continuously conveyed, and forming the curtain film on the surface of the substrate;
An air flow generated on the surface of the substrate supported by the support roll and flowing along the rotation direction of the support roll is provided on the upstream side in the rotation direction of the support roll from a location where the curtain film contacts the substrate. Removing the airflow by flowing into a slit formed in the airflow removal unit formed,
With
In the air flow removal unit, a plurality of the slits are provided along the rotation direction of the support roll,
In the surface facing the support roll in the airflow removal unit, a corner portion curved in a convex shape is provided at the entrance portion of each slit,
Each corner portion provided at the entrance portion of each slit has its radius of curvature decreasing in order from the location where the curtain film dropped from the coating head contacts the substrate,
In the step of removing the air flow, the air flow generated on the surface of the base material supported by the support roll and flowing along the rotation direction of the support roll enters the slits along the corner portion. A characteristic coating method.

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