JP4997369B2 - Cleaner device - Google Patents

Description

  The present invention relates to a cleaner device for cleaning the surface of a tape, and more particularly to a cleaner device suitable for cleaning a spacer tape for protecting a semiconductor product tape.

Semiconductor product tapes, such as TAB tapes and COF tapes, are wound into a roll together with a spacer tape (protective tape) in order to protect the surface (see Patent Document 1).
JP 2002-076064 A

  Conventionally, in order to clean a semiconductor product tape, foreign substances such as dust have been removed using an adhesive rubber roller or an adhesive tape roller.

  However, in this method, as shown in FIG. 3, in the case of the spacer tape 12 having the protrusion (emboss) 12A, there is a portion that does not contact the roller, and there is a problem that the entire surface cannot be reliably cleaned.

  In view of the above, an object of the present invention is to provide a cleaner device that can reliably clean the entire surface of a tape with protrusions.

The cleaner device according to claim 1 is provided on both sides of the transporting means for transporting the tape and the transport path of the tape, and contacts the surface of the tape transported by the transporting means to remove foreign matter on the tape surface. A pair of brushes, a box provided corresponding to each of the brushes so as to cover a portion other than the tape side of the brush, and negative pressure in the box by sucking air in the box The suction means is disposed on the opposite side of the box across the tape transport path, and is opposed to the tape-side opening of the box with a gap along the shape of the brush. forming a transport path of said tape, said in the width direction of the tape have a wide range of the cover for shielding member than the width of the opening portion of said box, said pair of brush of the tape transportable It is characterized in that it is arranged by shifting the position in the direction.

  Next, the operation of the cleaner device according to claim 1 will be described.

  In the cleaner device according to the first aspect, the tape is conveyed by the conveying means.

  By transporting the tape, both sides of the tape are rubbed against the brush, and the foreign matter adhering to the tape surface is removed.

  Since the air in the box covering the brush is sucked by the suction means, the foreign matter removed from the tape surface is sucked together with the air by the suction means.

  Since the brush contacts the tape surface, even if the tape surface is somewhat uneven, the entire surface of the tape can be rubbed and foreign matter can be removed from the entire surface of the tape.

In addition, since the pair of brushes are arranged with their positions shifted in the tape transport direction, it is possible to provide a shielding member facing the opening of the box, and in the box as compared with the case where there is no shielding member. The degree of vacuum can be increased, and the flow rate of air flowing into the box is increased in the gap between the box opening and the shielding member, and the foreign matter removed from the tape surface is reliably sucked without scattering outside the box. It can be aspirated by means.

  According to a second aspect of the present invention, in the cleaner device of the first aspect, the brush is formed in a roll shape and rotates.

  Next, the operation of the cleaner device according to claim 2 will be described.

  Since the brush is formed in a roll shape and rotates, the removal performance of foreign matters on the tape surface is improved as compared with a brush that does not rotate.

  As described above, according to the cleaner device of the present invention, there is an excellent effect that foreign matter on the surface can be surely removed even with an uneven tape.

  Hereinafter, a cleaner device 10 to which the present invention is applied will be described with reference to the drawings.

  As shown in FIG. 1, the cleaner device 10 includes an unwinding-side reel shaft 14 that holds a spacer tape 12, and a winding-side reel shaft 16 that winds up the spacer tape 12 drawn from the unwinding-side reel shaft 14. Yes.

  The take-up reel shaft 16 is rotated by a motor 18 so that the spacer tape 12 drawn from the take-up reel shaft 14 is sequentially wound around the take-up reel shaft 16.

  A box 20 is disposed between the unwinding side reel shaft 14 and the winding side reel shaft 16.

  The box 20 has slit-like openings 22 formed on the unwinding reel shaft side and the take-up reel side.

  Inside the box 20, rotating brushes 24 are provided on both sides of the conveyance path of the spacer tape 12. Note that the one rotating brush 24 and the other rotating brush 24 are not opposed to each other across the conveying path of the spacer tape 12 but are shifted in the conveying direction of the spacer tape.

  In these rotating brushes 24, countless fibers 24B extend in the radial direction from the outer periphery of the shaft 24A.

  As shown in FIGS. 1 and 2, a vacuum box 26 is disposed inside the box 20 so as to cover the rotating brush 24.

  One end of the shaft 24 </ b> A of the rotating brush 24 protrudes from the vacuum box 26 and is connected to the motor 28.

  The vacuum box 26 has an opening on the conveyance path side of the spacer tape 12, and the opening end is inclined inward as shown in FIG. A part of the rotary brush 24 protrudes from the opening of the vacuum box 26.

  On the opening side of the vacuum box 26, a shielding plate 30 is disposed on the opposite side of the vacuum box 26 across the conveyance path of the spacer tape 12.

  The shielding plate 30 is formed in a substantially arc shape with a concave surface facing the rotating brush 24.

  A gap that is slightly wider than the thickness of the spacer tape 12 is formed between the shielding plate 30 and the vacuum box 26 so as to correspond to the conveyance path portion of the spacer tape 12.

  As shown in FIG. 2, the shielding plate 30 is formed longer than the opening portion of the vacuum box 26 along the longitudinal direction (arrow A direction) of the vacuum box 26.

One end of a hose 32 is connected to the center of the bottom plate 26 </ b> A of the vacuum box 26. The other end of the hose 32 is connected to a suction device 34 for making the inside of the vacuum box have a negative pressure. The suction device 34 includes a blower that sucks air, a filter that removes dust in the sucked air, and the like.
(Function)
Next, the operation of the cleaner device 10 of this embodiment will be described.

  First, the take-up reel shaft 16 is rotated by a motor, and the spacer tape 12 is sequentially pulled out from the take-up reel shaft 14. At the same time, the rotating brush 24 is rotated (for example, in the direction of arrow B), and the suction device 34 is operated to make the vacuum box have a negative pressure.

  When the spacer tape 12 drawn from the unwinding-side reel shaft 14 passes through the box, the surface of the spacer tape 12 is rubbed by the rotating brush 24, and foreign matters such as dust adhering to the surface are removed from the tape surface. .

  When the fiber of the rotating brush 24 hits the spacer tape 12, the protrusion 12A is formed on the spacer tape 12 by pressing the rotating brush 24 against the surface of the spacer tape 12 so that the tip of the fiber is slightly bent. In addition, the entire surface of the spacer tape 12 can be rubbed reliably.

  Since the inside of the vacuum box 26 is set to a negative pressure, external air flows into the vacuum box at high speed through the gap between the vacuum box 26 and the shielding plate 30, and the inflowed air passes through the hose 32. Flow to the suction device 34. For this reason, the foreign matter removed from the tape surface is reliably sucked into the suction device 34 via the hose 32 on the air flowing into the box without scattering from the vacuum box 26 to the outside.

  If the shielding plate 30 is not provided, the opening area of the vacuum box 26 is increased, so the degree of vacuum in the vacuum box does not increase, and the velocity of the air flowing into the box is extremely reduced, resulting in a tape surface. There is a possibility that the foreign matter removed from can not be sucked. Further, even when the set of the rotating brush 24 and the vacuum box 26 is disposed so as to face each other across the conveying path of the spacer tape 12 without using the shielding plate 30, the space between the two vacuum boxes 26, that is, the spacer tape. At 12 position, the degree of vacuum does not increase (substantially atmospheric pressure), and it cannot be expected to create a flow of air.

  Since there are various widths of the spacer tape 12, the length of the rotary brush 24 is longer than the width dimension of the widest spacer tape 12.

  As can be seen from FIGS. 1 and 2, even if the width of the spacer tape 12 changes, the opening area of the vacuum box 26 provided with the shielding plate 30 on the front surface (the gap between the vacuum box 26 and the shielding plate 30). Does not change and the pressure in the vacuum box does not change. That is, according to the cleaner device 10 of the present embodiment, the degree of dust removal does not change even if the width of the spacer tape 12 changes.

  If the narrow spacer tape 12 is transported without the shielding plate 30, the opening area of the vacuum box 26 becomes large, and the degree of vacuum in the vacuum box does not sufficiently increase, so that foreign matter cannot be sucked. .

It is a side view which shows schematic structure of the cleaner apparatus which concerns on embodiment. It is sectional drawing of a vacuum box. (A) is a perspective view of a spacer tape, (B) is a side view of a spacer tape.

Explanation of symbols

10 Cleaner Device 12 Spacer Tape 24 Rotating Brush 26 Vacuum Box (Box)
30 Shield plate (shield member)
34 Suction device (suction device)

Claims (2)

Conveying means for conveying the tape;
A pair of brushes that are provided on both sides of the tape transport path, and that contacts the surface of the tape transported by the transport means to remove foreign matter on the tape surface;
A box provided corresponding to each brush, and provided to cover a portion other than the tape side of the brush;
Suction means for sucking air in the box and making the inside of the box have a negative pressure;
It is arranged on the opposite side of the box across the transport path of the tape and so as to face the tape side opening portion of the box through a gap ,
A shielding member that forms a transport path of the tape along the shape of the brush, and covers a width wider than the width of the opening of the box in the width direction of the tape ;
Have
The pair of brushes are arranged with their positions shifted in the tape transport direction.   The cleaner device according to claim 1, wherein the brush is formed in a roll shape and rotates.