JP5488675B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5488675B2 JP5488675B2 JP2012250729A JP2012250729A JP5488675B2 JP 5488675 B2 JP5488675 B2 JP 5488675B2 JP 2012250729 A JP2012250729 A JP 2012250729A JP 2012250729 A JP2012250729 A JP 2012250729A JP 5488675 B2 JP5488675 B2 JP 5488675B2
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- epitaxial growth
- arsenic
- silicon
- manufacturing
- semiconductor device
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Description
Claims (5)
- 半導体基板上にゲート絶縁膜を介してゲート電極を形成し、前記ゲート電極の両側の前記半導体基板上にエクステンション領域を形成し、前記ゲート電極の両側における前記エクステンション領域上にサイドウォール絶縁膜を形成し、前記エクステンション領域上にヒ素を含有してなるソース・ドレイン領域を選択エピタキシャル成長によって形成する工程を備えた半導体装置の製造方法であって、
前記選択エピタキシャル成長は、
5×1019atoms/cm3以上の濃度のヒ素をドーピングしながらシリコンとゲルマニウムとを前記エクステンション領域上に選択的にエピタキシャル成長させることを特徴とする半導体装置の製造方法。 - 前記エクステンション領域を、5×1019atoms/cm3以上の濃度のヒ素をドーピングしながらシリコンとゲルマニウムとを前記半導体基板上に選択的にエピタキシャル成長させることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記選択エピタキシャル成長は、
前記ゲート電極の周囲を絶縁膜で被覆した後に行う
ことを特徴とする請求項1に記載の半導体装置の製造方法。 - 前記選択エピタキシャル成長では、
シリコン原料にシリコンと水素と塩素とを含むガスを用い、
ゲルマニウム原料にゲルマニウムと水素とからなるガスを用い、
ヒ素原料にヒ素と水素とからなるガスを用いる
ことを特徴とする請求項1に記載の半導体装置の製造方法。 - 前記選択エピタキシャル成長では、
エピタキシャル成長雰囲気に塩素ガスおよび塩化水素ガスの少なくとも一方を添加することを特徴とする請求項4に記載の半導体装置の製造方法。
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JP2012250729A JP5488675B2 (ja) | 2012-11-14 | 2012-11-14 | 半導体装置の製造方法 |
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JP2012250729A JP5488675B2 (ja) | 2012-11-14 | 2012-11-14 | 半導体装置の製造方法 |
Related Parent Applications (1)
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JP2006184015A Division JP2008016523A (ja) | 2006-07-04 | 2006-07-04 | 半導体装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2013062524A JP2013062524A (ja) | 2013-04-04 |
JP5488675B2 true JP5488675B2 (ja) | 2014-05-14 |
Family
ID=48186883
Family Applications (1)
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JP2012250729A Expired - Fee Related JP5488675B2 (ja) | 2012-11-14 | 2012-11-14 | 半導体装置の製造方法 |
Country Status (1)
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JP (1) | JP5488675B2 (ja) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6313379A (ja) * | 1986-07-04 | 1988-01-20 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置およびその製造方法 |
JP2006135340A (ja) * | 1994-09-13 | 2006-05-25 | Toshiba Corp | 半導体装置 |
US5710450A (en) * | 1994-12-23 | 1998-01-20 | Intel Corporation | Transistor with ultra shallow tip and method of fabrication |
JPH08330582A (ja) * | 1995-06-02 | 1996-12-13 | Oki Electric Ind Co Ltd | Mosfetおよびその製造方法 |
JPH11163343A (ja) * | 1997-11-28 | 1999-06-18 | Nec Corp | 半導体装置およびその製造方法 |
WO2004081986A2 (en) * | 2003-03-12 | 2004-09-23 | Asm America Inc. | Method to planarize and reduce defect density of silicon germanium |
US7132338B2 (en) * | 2003-10-10 | 2006-11-07 | Applied Materials, Inc. | Methods to fabricate MOSFET devices using selective deposition process |
US7312128B2 (en) * | 2004-12-01 | 2007-12-25 | Applied Materials, Inc. | Selective epitaxy process with alternating gas supply |
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2012
- 2012-11-14 JP JP2012250729A patent/JP5488675B2/ja not_active Expired - Fee Related
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